JP4887630B2 - ガラス基板の位置決め装置及び端面研削装置 - Google Patents
ガラス基板の位置決め装置及び端面研削装置 Download PDFInfo
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- JP4887630B2 JP4887630B2 JP2005049506A JP2005049506A JP4887630B2 JP 4887630 B2 JP4887630 B2 JP 4887630B2 JP 2005049506 A JP2005049506 A JP 2005049506A JP 2005049506 A JP2005049506 A JP 2005049506A JP 4887630 B2 JP4887630 B2 JP 4887630B2
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- Prior art keywords
- glass substrate
- pressing
- positioning device
- positioning
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
2 ガラス基板
2a 第1の辺
2b 第2の辺
2c 第3の辺
2d 第4の辺
3 受止部材
4 押付部材
4b 偏芯ローラ
5 作業用テーブル
6 変位センサ
Claims (7)
- ガラス基板の外周縁の辺が、相互に平行な第1の辺及び第2の辺と、これらの辺に直角で且つ相互に平行な第3の辺及び第4の辺とからなると共に、該ガラス基板の第1の辺と第3の辺とにそれぞれ当接可能な受止部材と、該ガラス基板の第2の辺と第4の辺とにそれぞれ当接可能とされ且つ該ガラス基板を対向する前記各受止部材の側にそれぞれ押動させる押付部材とを備え、前記各受止部材と対向する前記各押付部材とのそれぞれの相互作用により前記ガラス基板の位置決めを行うように構成された位置決め装置において、
前記各受止部材を、対向する前記各押付部材による前記ガラス基板のそれぞれの押動に追従してそれらの押動方向に移動可能とすると共に、それらの移動可能な状態を維持して該ガラス基板の第1の辺と第3の辺とを前記各受止部材に当接させた状態で、対向する前記各押付部材によるそれぞれの押動時における該ガラス基板の第2の辺から第1の辺に向かう方向の変位量と第4の辺から第3の辺に向かう方向の変位量とをそれぞれ基準として、前記ガラス基板の位置決めを行うように構成されていることを特徴とするガラス基板の位置決め装置。 - 前記受止部材は、第1の辺に少なくとも二個、及び第3の辺に少なくとも一個が当接可能となり、前記押付部材は、第2の辺に少なくとも二個、及び第4の辺に少なくとも一個が当接可能となるように構成されていることを特徴とする請求項1に記載のガラス基板の位置決め装置。
- 前記ガラス基板の第2の辺及び第4の辺に当接可能なそれぞれの押付部材に隣接して、前記ガラス基板の第2の辺及び第4の辺のそれぞれの変位量を検出する変位センサを配設したことを特徴とする請求項1または2に記載のガラス基板の位置決め装置。
- 前記押付部材は、駆動源からの回転駆動力を前記ガラス基板への押動動作に変換する偏芯ローラを有していることを特徴とする請求項1〜3の何れかに記載のガラス基板の位置決め装置。
- 前記偏芯ローラは、前記ガラス基板に対する押動の初期段階では単位回転角度当たりの押動量を相対的に大きくし、且つ前記ガラス基板に対する押動の終盤段階では単位回転角度当たりの押動量を相対的に小さくするように構成されていることを特徴とする請求項4に記載のガラス基板の位置決め装置。
- 前記受止部材及び押付部材は、作業用テーブルの外周縁よりも外側に配設されると共に、前記ガラス基板を該作業用テーブルの載置面上に載せる際に前記受止部材と押付部材との相互作用により該ガラス基板の前記載置面に対する位置決めを行うように構成されていることを特徴とする請求項1〜5の何れかに記載のガラス基板の位置決め装置。
- 請求項6に記載のガラス基板の位置決め装置が付設される端面研削装置であって、前記ガラス基板の少なくとも平行な二辺は、前記作業用テーブルにおける載置面の外周縁よりも外側に位置していると共に、その位置周辺には、請求項6に記載の位置決め装置による位置決め完了後のガラス基板の少なくとも平行な二辺の端面研削を行う研削具が配設されることを特徴とするガラス基板の端面研削装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005049506A JP4887630B2 (ja) | 2005-02-24 | 2005-02-24 | ガラス基板の位置決め装置及び端面研削装置 |
PCT/JP2006/301617 WO2006090561A1 (ja) | 2005-02-24 | 2006-02-01 | ガラス基板の位置決め装置、位置決め方法、端面研削装置及び端面研削方法 |
KR1020077007547A KR101285642B1 (ko) | 2005-02-24 | 2006-02-01 | 유리기판의 위치결정장치, 위치결정방법, 끝면 연삭장치 및끝면 연삭방법 |
CN200680001376A CN100577351C (zh) | 2005-02-24 | 2006-02-01 | 玻璃基板定位装置、定位方法、端面磨削装置及磨削方法 |
TW095104496A TWI358341B (en) | 2005-02-24 | 2006-02-10 | Positioning apparatus and positioning method of gl |
Applications Claiming Priority (1)
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---|---|---|---|
JP2005049506A JP4887630B2 (ja) | 2005-02-24 | 2005-02-24 | ガラス基板の位置決め装置及び端面研削装置 |
Related Child Applications (1)
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JP2011231772A Division JP5397840B2 (ja) | 2011-10-21 | 2011-10-21 | ガラス基板の位置決め装置、位置決め方法、端面研削装置及び端面研削方法 |
Publications (2)
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JP2006231462A JP2006231462A (ja) | 2006-09-07 |
JP4887630B2 true JP4887630B2 (ja) | 2012-02-29 |
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Country Status (5)
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JP (1) | JP4887630B2 (ja) |
KR (1) | KR101285642B1 (ja) |
CN (1) | CN100577351C (ja) |
TW (1) | TWI358341B (ja) |
WO (1) | WO2006090561A1 (ja) |
Families Citing this family (23)
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JP5720696B2 (ja) * | 2010-11-01 | 2015-05-20 | 旭硝子株式会社 | 面取り装置および面取り方法 |
CN102744662A (zh) * | 2012-07-20 | 2012-10-24 | 山东耀华玻璃有限公司 | 一种玻璃磨边系统 |
CN102785092A (zh) * | 2012-08-01 | 2012-11-21 | 济南蓝贝思特科技有限公司 | 多媒体黑板用书写板气动定位装置 |
CN102806500A (zh) * | 2012-09-04 | 2012-12-05 | 张家港市广丰玻璃有限公司 | 一种倒角机 |
CN102963726B (zh) * | 2012-11-30 | 2015-09-30 | 江西沃格光电股份有限公司 | 无痕活动式玻璃夹具 |
CN103323960B (zh) * | 2013-05-15 | 2016-03-30 | 友达光电(苏州)有限公司 | 定位装置及使用其的检测装置、组装装置 |
CN103625704B (zh) * | 2013-12-15 | 2016-01-20 | 佛山市鼎吉包装技术有限公司 | 一种带有一组向心连杆同步驱动装置的瓷砖垛扶正机构 |
CN103625705B (zh) * | 2013-12-15 | 2016-04-13 | 佛山市鼎吉包装技术有限公司 | 一种瓷砖垛理直机构 |
JP5932861B2 (ja) * | 2014-02-25 | 2016-06-08 | 国立大学法人東北大学 | 合金組成物、Fe基ナノ結晶合金薄帯、Fe基ナノ結晶合金粉末及び磁性部品 |
CN104589113B (zh) * | 2014-12-02 | 2016-09-07 | 爱彼思(苏州)自动化科技有限公司 | 壳体夹持装置 |
US20190039839A1 (en) * | 2016-02-29 | 2019-02-07 | Corning Incorporated | Method and apparatus for transport of a glass substrate |
CN106217667B (zh) * | 2016-08-30 | 2018-07-13 | 台州市双辉机械设备有限公司 | 一种水晶棒定向粘料机的料板定位装置 |
CN106405897B (zh) * | 2016-11-29 | 2019-03-15 | 京东方科技集团股份有限公司 | 一种对位装置以及阵列基板维修设备 |
CN107170703B (zh) * | 2017-06-19 | 2019-11-05 | 武汉华星光电技术有限公司 | 一种玻璃基板位置矫正装置及方法 |
WO2019004359A1 (ja) | 2017-06-29 | 2019-01-03 | 株式会社アルバック | 成膜装置 |
CN109352510B (zh) * | 2018-11-08 | 2020-10-23 | 东旭集团有限公司 | 基板玻璃研磨定位系统 |
JP7153231B2 (ja) * | 2018-12-21 | 2022-10-14 | 日本電気硝子株式会社 | ガラス板の撓み測定装置及びガラス板の製造方法 |
JP7108240B2 (ja) * | 2019-04-19 | 2022-07-28 | 日本電気硝子株式会社 | ガラス板の製造装置及びガラス板の製造方法 |
CN110788696B (zh) * | 2019-11-05 | 2021-08-20 | 佛山市南海澳兴玻璃有限公司 | 一种进出料一体化方形玻璃拐角打磨装置 |
CN111055100B (zh) * | 2019-12-27 | 2021-07-27 | 中国科学院沈阳自动化研究所 | 一种门头板精确定位机构 |
CN111571359A (zh) * | 2020-04-17 | 2020-08-25 | 安徽千辉节能玻璃科技有限公司 | 一种可调节的装饰玻璃加工用磨边设备 |
CN115768595A (zh) * | 2020-08-25 | 2023-03-07 | 日本电气硝子株式会社 | 玻璃板的制造方法以及其制造装置 |
CN112355755A (zh) * | 2020-10-28 | 2021-02-12 | 江苏永钢集团有限公司 | 一种冲击试样端面磨削工装 |
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JPS50122383U (ja) * | 1974-03-22 | 1975-10-06 | ||
JPS62104835U (ja) * | 1985-12-18 | 1987-07-04 | ||
JPH0195741U (ja) * | 1987-12-18 | 1989-06-26 | ||
JPH08141888A (ja) * | 1994-11-15 | 1996-06-04 | Asahi Glass Co Ltd | 板状体の位置検出方法及び装置 |
JP3763619B2 (ja) * | 1996-10-28 | 2006-04-05 | 大日本スクリーン製造株式会社 | 基板回転保持装置および回転式基板処理装置 |
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2005
- 2005-02-24 JP JP2005049506A patent/JP4887630B2/ja active Active
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2006
- 2006-02-01 CN CN200680001376A patent/CN100577351C/zh active Active
- 2006-02-01 WO PCT/JP2006/301617 patent/WO2006090561A1/ja not_active Application Discontinuation
- 2006-02-01 KR KR1020077007547A patent/KR101285642B1/ko active IP Right Grant
- 2006-02-10 TW TW095104496A patent/TWI358341B/zh active
Also Published As
Publication number | Publication date |
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CN101080303A (zh) | 2007-11-28 |
KR20070106965A (ko) | 2007-11-06 |
WO2006090561A1 (ja) | 2006-08-31 |
JP2006231462A (ja) | 2006-09-07 |
CN100577351C (zh) | 2010-01-06 |
KR101285642B1 (ko) | 2013-07-12 |
TWI358341B (en) | 2012-02-21 |
TW200630184A (en) | 2006-09-01 |
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