WO2022075018A1 - ガラス板の製造方法 - Google Patents

ガラス板の製造方法 Download PDF

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Publication number
WO2022075018A1
WO2022075018A1 PCT/JP2021/033758 JP2021033758W WO2022075018A1 WO 2022075018 A1 WO2022075018 A1 WO 2022075018A1 JP 2021033758 W JP2021033758 W JP 2021033758W WO 2022075018 A1 WO2022075018 A1 WO 2022075018A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
inspection step
inspection
manufacturing
defect
Prior art date
Application number
PCT/JP2021/033758
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English (en)
French (fr)
Japanese (ja)
Inventor
翔 北川
直樹 熊崎
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020237011336A priority Critical patent/KR20230078689A/ko
Priority to CN202180068777.XA priority patent/CN116324390A/zh
Publication of WO2022075018A1 publication Critical patent/WO2022075018A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving

Definitions

  • the present invention relates to a method for manufacturing a glass plate, which comprises a step of inspecting the presence or absence of defects contained in the molded glass plate during transportation.
  • various glass plates such as glass plates for flat panel displays (FPDs) such as liquid crystal displays and electroluminescence displays are made by molding molten glass melted in a melting furnace into a strip-shaped glass ribbon. It is manufactured by cutting the glass ribbon to a predetermined size after it has been sufficiently cooled.
  • a down draw method such as an overflow down draw method (fusion method) or a slot down draw method is generally used for forming the glass ribbon.
  • the glass ribbon is molded in a vertical position. From the viewpoint of space saving of manufacturing equipment, the cutting process, ear cutting process, transport process, inspection process, and packing process are performed in the vertical posture for the purpose of omitting the process of changing the posture of the glass plate. There is.
  • typical defects of the glass plate include foam defects and foreign matter defects (for example, exfoliated matter from a refractory or the like), and the influence on the quality of the glass plate differs between the foam defects and the foreign matter defects. Therefore, the permissible size of bubble defects and the permissible size of foreign matter defects are different, and even if the defects have the same size, the pass / fail criteria differ depending on the type of defect. Further, by feeding back the information on the type of defect to the upstream process such as the melting process and the molding process, it is possible to reduce the defect and improve the yield. Therefore, it is necessary to distinguish between foam defects and foreign matter defects. Examples of the inspection method for that purpose include those disclosed in Patent Document 2.
  • the bright-field optical system and the dark-field optical system are combined to identify the coordinates of the defect, an image of the defect is imaged, and the type of the defect is identified based on the image of the image of the defect. ing.
  • the technical subject of the present invention is to accurately identify the type of defect in the vertical glass plate.
  • the present invention which was devised to solve the above problems, comprises a molding process of forming a glass ribbon by a down-draw method, a cutting process of cutting a glass plate by cutting the molded glass ribbon at a predetermined length, and a cutting process of cutting out a glass plate.
  • a method for manufacturing a glass plate comprising a transporting step of transporting the cut out glass plate in a vertical position in parallel with the main surface of the glass plate, and an inspection step of inspecting the glass plate during the transporting step.
  • a first inspection step of specifying the coordinates of the defect of the glass plate and a second inspection step of identifying the type of the defect located at the coordinates specified in the first inspection step are performed. It is characterized by being prepared. According to such a configuration, by separating the identification of the coordinates of the defect and the identification of the type of the defect into separate steps, it is possible to accurately identify the type of the defect with respect to the glass plate conveyed in the vertical posture.
  • the upper part and the lower part of the glass plate are sandwiched in the inspection step. According to such a configuration, the amplitude of the shaking of the glass plate can be suppressed to be small, and the glass plate can be inspected accurately.
  • the holding mechanism for holding the glass plate applies a tensile force to the glass plate in the vertical direction and the width direction. According to such a configuration, the amplitude of the shaking of the glass plate can be suppressed to be smaller, and the glass plate can be inspected more accurately.
  • the first inspection step includes a linear light source along the vertical direction and a line sensor camera.
  • the entire main surface of the glass plate can be imaged by passing the linear light source and the line sensor camera once through the glass plate, so that the coordinates of the defects of the entire main surface of the glass plate can be quickly obtained. Can be identified.
  • the second inspection step has an imaging system, and the imaging system includes a light source unit that irradiates the glass plate with inspection light and the defect located at the coordinates specified in the first inspection step. It is preferable to have a microscopic optical unit that magnifies the image of the above and an image pickup unit that captures the magnified image of the defect. According to such a configuration, the image of the defect can be imaged at an appropriate magnification, and the defect can be directly magnified and visually observed, so that the type of the defect can be identified more accurately.
  • the imaging system it is preferable to drive the imaging system in the vertical direction and the width direction of the glass plate. With such a configuration, the imaging system can be easily moved to the coordinates of the defect identified in the first inspection step.
  • the glass plate in the transfer step, the glass plate is carried in to the second inspection step and the glass plate is carried out from the second inspection step, and the glass plate is carried out to the second inspection step. It is preferable to keep the imaging system on standby below the lower end of the glass plate during the loading and unloading of the glass plate from the second inspection step. Generally, when the magnification of the imaging system is increased, the focal length of the imaging system becomes shorter. Therefore, it is necessary to make the distance between the image pickup system and the glass plate closer than that of the conventional inspection method, and there is a possibility that the glass plate and the image pickup system collide with each other during the transportation of the glass plate. By making the image pickup system stand by below the lower end of the glass plate, it is possible to prevent the glass plate from colliding with the image pickup system during loading into the second inspection process and during removal from the second inspection step.
  • the image pickup system is placed in the width direction below the lower end of the glass plate during the loading of the glass plate into the second inspection step and the loading of the glass plate from the second inspection step. It is preferable to make it stand by in the substantially central part of the above. According to such a configuration, the collision between the image pickup system and the glass plate is prevented, and the moving distance of the image pickup system from the standby position to the coordinates of the defect specified in the first inspection step is shortened, so that the second inspection step It can reduce the time required for.
  • the imaging system in the first inspection step, the coordinates of the defect with respect to the end face of the glass plate are recorded, and in the second inspection step, the end face of the glass plate is detected by using the position detecting means. It is preferable to move the imaging system to a coordinate position with respect to the end face. Due to mechanical errors in the transport process, the glass plates carried into the second inspection process do not always stop at the same position.
  • the reference of the coordinates of the second inspection step is constant regardless of the stop position of the glass plate, if the variation of the stop position of the glass plate is large, the defect to be imaged is out of the field of view of the imaging system and cannot be imaged. There is a risk that the type of glass cannot be identified.
  • the imaging system By detecting the position of the end face of the glass plate and using it as a reference for the coordinates in the second inspection step, the imaging system can be moved to a position where the defect can be accommodated in the field of view.
  • the inspection step further includes a third inspection step in which the inspector visually inspects the appearance of the glass plate, and the third inspection step is performed in parallel with the second inspection step. Is preferable.
  • the inspection time and the inspection space can be shortened as compared with the case where the second inspection step and the third inspection step are carried out individually.
  • the inspection step the upper region in the vertical direction of the glass plate is inspected in the third inspection step, the lower region is inspected in the second inspection step, and the third inspection step It is preferable that the area to be inspected in the second inspection step is wider than the area to be inspected. Defects in the glass plate occur continuously along the flow direction in the molding process, that is, the vertical direction.
  • the glass plate is suspended, supported and transported from above in a vertical position, but by setting the area to be inspected in the second inspection process to the lower side of the glass plate, equipment for carrying out the second inspection process and equipment for carrying out the second inspection process, It is possible to prevent the interference of the equipment for transporting the glass plate.
  • the third inspection step is to inspect the appearance of the glass plate such as pulse and uneven thickness, and it is not necessary to inspect a wide area. By making the area to be inspected in the second inspection step wider than the area to be inspected in the third inspection step, it is possible to specify as many types of defects whose coordinates are specified in the first inspection step as possible.
  • the second inspection step excludes the area to be inspected in the third inspection step. Defects in the glass plate occur continuously along the vertical direction. Therefore, it is not necessary to inspect the entire range in the vertical direction, but it is sufficient to inspect the entire range in the width direction. According to such a configuration, the time required for the second inspection step and the third inspection step can be shortened.
  • the number of the defects identified in the second inspection step is smaller than the number of the coordinates of the defects specified in the first inspection step.
  • the first inspection step can be inspected in a time required to pass the line sensor camera once through the glass plate.
  • the second inspection step since the imaging system is driven for the coordinates of the defects specified in the first inspection step and the image is taken, the number of defects whose coordinates are specified in the first inspection step is larger than a certain number. In that case, the inspection time of the second inspection step is longer than that of the first inspection step. Therefore, the number of defects imaged in the second inspection step is limited to a certain number or less. With such a configuration, it is possible to prevent the time required for the inspection process from becoming longer than necessary.
  • the type of defect of the glass plate in the vertical posture can be accurately identified.
  • FIG. 1 shows an embodiment of a method for manufacturing a glass plate according to the present invention.
  • the glass plate manufacturing apparatus 1 includes a molding step S1 in which the molten glass Gm is stretched downward X to form a strip-shaped glass ribbon Gr, and a slow cooling step S2 in which the glass ribbon Gr formed in the molding step S1 is slowly cooled.
  • an ear cutting step S5 for removing thick portions (ears) formed at both ends in the width direction Y
  • a first inspection step S6 for inspecting the glass plate G obtained in the ear cutting step S5.
  • the second inspection step S7, the third inspection step S8, and the packing step S9 for packing the glass plate G that has passed the inspection are provided.
  • the glass ribbon Gr is molded from the molten glass Gm melted in a melting furnace (not shown) using the overflow downdraw method.
  • the molded body 21 is arranged in the molded body 2, and the molten glass Gm overflowing from the top 211 of the molded body 21 having a wedge-shaped cross section on both sides is formed on the outer surface portion of the molded body 21.
  • the glass ribbon Gr is molded by fusing and integrating at the lower end portion 213 of the molded body while flowing down along the 212.
  • the molten glass Gm (or glass ribbon Gr) is guided by the edge roller 22 and stretched downward X.
  • the molding step S1 is not limited to the one using the overflow down draw method, and for example, another down draw method such as a slot down draw method or a redraw method, or a float method may be used.
  • the glass ribbon Gr is slowly cooled.
  • the slow cooling furnace is provided with a predetermined temperature gradient in the internal space toward the downward X.
  • the glass ribbon Gr continuous with the molded body 21 is guided by the annealing roller 31 arranged in the slow cooling unit 3, and moves downward X in the internal space of the slow cooling furnace as it moves downward. It is slowly cooled so that the temperature becomes low. Along with this, the internal strain of the glass ribbon Gr is removed.
  • the glass ribbon Gr is cut to a predetermined length.
  • the cutout portion 4 includes an arm 41, and first, both ends of the glass ribbon Gr in the width direction Y are sandwiched by chucks 42 attached to the arm 41.
  • the wheel cutter 43 is run along the width direction Y of the glass ribbon Gr along the planned cutting line of one main surface of the glass ribbon Gr.
  • the ribbon line 46 is formed.
  • the arm 41 rotates around the fulcrum bar 45 and applies bending stress along the scribe line 46 to cut (cut) the glass ribbon Gr along the scribe line 46.
  • a glass plate G having a predetermined length can be obtained from the glass ribbon Gr.
  • the glass ribbon Gr is cut in a vertical posture (for example, a vertical posture), and the obtained glass plate G is conveyed in the vertical posture in the transport step S4.
  • the cutting method of the glass ribbon Gr is not limited to cutting by bending stress, and may be, for example, laser cutting or laser fusing.
  • the glass plate G produced in the cutting step S3 is transported to each step after the selvage cutting step S5 in a vertical posture.
  • the transport unit 5 includes an upper holding mechanism 51, an upper guide rail 52, and a moving body 53.
  • the upper holding mechanism 51 holds the upper portion of the glass plate G in the vertical posture, and then the moving body 53 moves along the upper guide rail 52 extending in the width direction Y of the glass plate G to convey the glass plate G.
  • both ends (ears) of the glass plate G in the width direction Y are cut. Both ends of the glass plate G in the width direction Y may be relatively thicker than the central portion in the width direction Y, and both ends thereof are called selvage portions.
  • the selvage cutting portion 6 includes a holding portion 61, a wheel cutter 62, and a support bar 63 in the first station ST1.
  • the glass plate G transported to the first station ST1 by the transport step S4 is delivered to the sandwiching portion 61, and the upper portion is suspended and supported in a vertical posture.
  • the wheel cutter 62 forms a scribe line 67 along the upward direction X of the glass plate G in a state of being supported by the support bar 63 from the back surface of the glass plate G.
  • the glass plate G is delivered to the upper holding mechanism 51 in the transport step S4 and is transported to the second station ST2.
  • the second station ST2 includes a holding portion 64, a pressing portion 65, and a support bar 66.
  • the glass plate G transported to the second station ST2 by the transport step S4 is delivered to the holding portion 64, and the upper portion is suspended and supported in a vertical posture.
  • the pressing portion 65 bends the glass plate G with the support bar 66 as a fulcrum by pushing the selvage portion 68 toward the back surface side.
  • the inspection steps include a first inspection step S6 for specifying the coordinates of defects in the glass plate G, a second inspection step S7 for specifying the type of defects in the glass plate G, and defects and first inspections that regularly appear in the flow direction. It has a third inspection step S8 for inspecting defects that cannot be detected in the inspection step S6 and the second inspection step S7.
  • the first inspection step S6, the second inspection step S7, and the third inspection step S8 will be described in detail.
  • the first inspection device 7 provided with the support mechanism 71, the bright field inspection machine 72, and the dark field inspection machine 73 is used.
  • the glass plate G transported to the first inspection step S6 by the transport step S4 is delivered to the support mechanism 71.
  • the upper holding mechanism 711 sandwiches the upper part of the glass plate G
  • the lower holding mechanism 712 holds the lower part of the glass plate G, respectively.
  • the chucks constituting the upper pinching mechanism 711 and the lower pinching mechanism 712 are connected to the air cylinder 713, respectively.
  • the air cylinder 713 can send compressed air from an air supply device (for example, an air compressor) (not shown), and sucks the air remaining in the air cylinder 713 by an air suction device (for example, a vacuum pump) (not shown). It is possible to discharge. Then, the air pressure in the air cylinder 713 is adjusted by the air supply device and the air suction device, and a predetermined force is applied by moving the piston contained in the cylinder by the pressure.
  • an air supply device for example, an air compressor
  • an air suction device for example, a vacuum pump
  • the upper downstream chuck group 7111 is upward and downstream
  • the upper upstream chuck group 7112 is upward and upstream
  • the lower downstream chuck group 7121 is downward and downstream
  • the lower upstream chuck group 7122 is downward.
  • the bright field inspection machine 72 includes a bright field light source 721 and a bright field camera 722.
  • the bright-field camera 722 is arranged on the optical axis of the bright-field light source 721 so that the light emitted from the bright-field light source 721 to the glass plate G and transmitted through the glass plate G can be captured.
  • a light-shielding plate 723 that forms a bright part and a dark part in the field of view of the bright-field camera 722 is installed between the glass plate G and the bright-field camera 722.
  • the dark field inspection machine 73 includes a dark field light source 731 and a dark field camera 732, and the dark field camera 732 can capture the light scattered by the defect of the glass plate G by irradiating the glass plate G from the dark field light source 731. As such, it is arranged at a position off the optical axis of the dark field light source 731. Further, a plurality of bright-field light sources 721 and dark-field light sources 731 are arranged along the vertical direction X of the glass plate G to form a linear light source. Further, a plurality of bright-field cameras 722 and dark-field cameras 732 are similarly arranged along the vertical direction X to form line sensor cameras, respectively.
  • the entire main surface of the glass plate G can be imaged by passing the linear light source and the line sensor camera once through the glass plate G, so that the coordinates of the defects of the entire main surface of the glass plate G can be quickly identified. ..
  • the bright-field light source 721 and the dark-field light source 731 may be unitized so that the imaging position of the bright-field inspection machine 72 and the imaging position of the dark-field inspection machine 73 on the glass plate G match. ..
  • a beam splitter 74 is installed between the glass plate G and the light-shielding plate 723 using a dark-field light source 731 having a wavelength different from that of the bright-field light source 721, and the light and the dark-field camera imaged by the bright-field camera 722.
  • the light imaged by the 732 is separated.
  • the bright field light source 721 and the dark field light source 731 may not be unitized, and the optical paths of the bright field inspection machine 72 and the dark field inspection machine 73 may be made independent.
  • the LED light source is used as the bright field light source 721 and the dark field light source 731, but a metal halide lamp or a laser light source may be used.
  • the bright field inspection machine 72 and the dark field inspection machine 73 can be integrally moved in the width direction Y of the glass plate G. While moving in the width direction Y of the glass plate G, the entire main surface of the glass plate G is imaged. By comparing the obtained bright-field image and dark-field image, the presence or absence of defects is identified, and the coordinates are recorded in a database (not shown). The reference of the coordinates is the upper end and the downstream end face of the glass plate G.
  • the glass plate G is handed over to the upper holding mechanism 51 of the transporting step S4, and then is transported to the second inspection step S7.
  • the second inspection device 8 provided with the support mechanism 81, the image pickup system 82, and the image pickup system drive mechanism 83 is used.
  • the glass plate G transported to the second inspection step S7 by the transport step S4 is delivered to the support mechanism 81.
  • the upper holding mechanism 811 holds the upper part of the glass plate G
  • the lower holding mechanism 812 holds the lower part of the glass plate G, respectively.
  • the chucks constituting the upper pinching mechanism 811 and the lower pinching mechanism 812 are each connected to the air cylinder 813.
  • the air cylinder 813 is connected to an air supply device and an air suction device (not shown) to apply a predetermined force.
  • the upper downstream chuck group 8111 is in the upward and downstream sides
  • the upper upstream chuck group 8112 is in the upward and upstream sides
  • the lower downstream chuck group 8121 is in the downward and downstream sides
  • the lower upstream chuck group 8122 is in the lower direction.
  • a tensile force is applied to the vertical direction X and the width direction Y of the glass plate G on the direction and the upstream side.
  • the tensile force is preferably 120 N or more.
  • the position detecting means 84 is used to detect and record the positions of the upper end and the downstream end surface of the glass plate G.
  • the position detecting means 84 for example, a transmission type laser sensor or the like can be used. As a result, the imaging system can be moved to a position where defects can be accommodated in the field of view of the imaging unit 823.
  • the image pickup system 82 includes a light source unit 821, a microscopic optical unit 822, and an image pickup unit 823.
  • the light source unit 821 irradiates the glass plate G with inspection light, magnifies the image of the defect of the glass plate G by the microscopic optical unit 822, and images the image on the image pickup unit 823.
  • the image of the defect includes an image in which the inspection light is reflected by the defect and an image in which the light reflected by the back surface of the glass plate G is blocked by the defect.
  • the LED light source is used as the light source unit 821, but a metal halide lamp or a laser light source may be used.
  • the image pickup system 82 is attached to the vertical drive mechanism 832, and the vertical drive mechanism 832 is attached to the width direction drive mechanism 831.
  • the vertical drive mechanism 832 and the width direction drive mechanism 831 are provided with a servomotor, a linear motion guide, and a ball screw, and are driven in the vertical direction X and the width direction Y, respectively.
  • the image pickup system 82 can move to an arbitrary position in the region to be inspected in the second inspection step S7 of the glass plate G and take an image.
  • the driving method of the vertical drive mechanism 832 and the width direction drive mechanism 831 is not limited to the ball screw, and a timing belt, a chain, or the like may be used. Further, a linear motor may be used as an alternative to the servo motor and the ball screw.
  • the image pickup system 82 stands by in the region A below the lower end of the glass plate G shown in FIG. As a result, it is possible to prevent the glass plate G from coming into contact with the image pickup system 82 even if the glass plate G is greatly shaken during the delivery to the second inspection step S7. Further, the imaging system 82 stands by in the region B at the substantially central portion in the width direction Y of the glass plate G, so that the coordinates of the defect identified in the first inspection step S6 are located on the upstream side or the downstream side of the farthest upper side. Even if there is, the distance traveled to the coordinates of the defect can be shortened. When the glass plate G is carried out from the second inspection step S7, it is preferable to make the image pickup system 82 stand by in the area A or the area B as in the case of carrying in the glass plate G.
  • the imaging system 82 After the glass plate G is sandwiched by the upper pinching mechanism 811 and the lower pinching mechanism 812, the imaging system 82 is moved to the coordinates of the defect specified in the first inspection step S6.
  • the reference of the coordinates is the upper end surface and the downstream end surface of the glass plate G detected by the position detecting means 84.
  • the image pickup system 82 moves from the area A or the area B to the coordinates of the defect, the image pickup system 82 passes between the lower downstream side chuck group 8121 and the lower upstream side chuck group 8122.
  • the number of coordinates to be imaged is limited to a predetermined number or less so that the time required for the second inspection step S7 is within the transport tact time.
  • the imaging system 82 After imaging the defect at the coordinates to be imaged, the imaging system 82 passes between the lower downstream side chuck group 8121 and the lower upstream side chuck group 8122 again, moves to the area A or the area B, and stands by.
  • the type of defect is specified based on the image of the defect captured in the second inspection step S7.
  • the type of the identified defect is associated with the information on the number and coordinates of the defect identified in the first inspection step S6, and is stored in a database (not shown).
  • the third inspection apparatus 9 provided with the third inspection table 91, the third inspection light source 92, and the light source cover 93 is used.
  • the inspector stands on the third inspection table 91 at a predetermined height and cannot find the veins and uneven thickness of the glass plate G in the first inspection step S6 and the second inspection step S7. Visually detect defects and defects that appear regularly in the flow direction. By irradiating the end face of the glass plate G with the inspection light from the third inspection light source 92, the visibility of defects such as pulse and uneven thickness is improved and the detection is facilitated.
  • the LED light source is used as the third inspection light source 92, but a metal halide lamp, a laser light source, or the like may be used.
  • the third inspection device 9 is arranged at a position common to the second inspection device 8 so that the second inspection step S7 and the third inspection step S8 can be performed in parallel. This makes it possible to shorten the time required for the inspection process and save space. Further, the lower region C in the vertical direction X of the glass plate G is inspected in the second inspection step S7, and the upper region D narrower than the region C is inspected in the third inspection step S8. Defects in the glass plate G occur continuously along the flow direction in the molding process, that is, the vertical direction X. By dividing the area to be inspected by the glass plate G into the lower area C and the upper area D, the entire range can be inspected in the width direction Y in each inspection process, and defects in the width direction Y can be inspected.
  • the glass plate G is suspended, supported and transported from above in a vertical posture, but by setting the region to be inspected in the second inspection step S7 to the lower side of the glass plate G, the second inspection step It is possible to prevent interference between the equipment for carrying out S7 and the transport unit 5.
  • the third inspection step S8 inspects the appearance of the glass plate G such as the veins and uneven thickness, and it is not necessary to inspect a wide area. By making the area C wider than the area D, it is possible to specify as many types of defects whose coordinates are specified in the first inspection step S6 as possible. As a result, the time required for the second inspection step S7 and the third inspection step S8 can be shortened.
  • the number of defects identified in the second inspection step S7 is reduced to be smaller than the number of coordinates of the defects specified in the first inspection step S6.
  • the first inspection step S6 can be inspected in a time required only once the line sensor camera is passed through the glass plate G.
  • the imaging system 82 is driven for the coordinates of the defects specified in the first inspection step S6 to take an image, so that the number of defects whose coordinates are specified in the first inspection step S6 is increased.
  • the inspection time of the second inspection step S7 is longer than that of the first inspection step S6. Therefore, the number of defects imaged in the second inspection step S7 is limited to a certain number or less. With such a configuration, it is possible to prevent the time required for the second inspection step S7 from becoming longer than necessary.
  • the inspection result of the glass plate G is determined based on the results of the first inspection step S6, the second inspection step S7, and the third inspection step S8.
  • the glass plate G is handed over to the upper holding mechanism 51 of the transport step S4. If the glass plate G passes the inspection, it is transported to the packing process S9, and if the inspection fails, it is disposed of at a disposal location (not shown).
  • the glass plate manufacturing apparatus 1 configured as described above, regarding the glass plate G conveyed in the vertical posture by dividing the identification of the coordinates of the defect and the identification of the type of the defect into separate steps. , The type of defect can be identified accurately.
  • the present invention is not limited to the configuration of the above embodiment, and is not limited to the above-mentioned action and effect.
  • the present invention can be modified in various ways without departing from the gist of the present invention.
  • the present invention is limited to this. Not done. It is not always necessary to apply a tensile force to the glass plate G, and the lower portion of the glass plate G may not be sandwiched but only the upper portion may be sandwiched.
  • the bright field inspection machine 72 and the dark field inspection machine 73 specify the coordinates of the defect by using the light transmitted through the glass plate G, but the present invention is not limited to this.
  • a method of specifying the coordinates of the defect by using the light reflected from the glass plate G may also be used.
  • the glass plate G is passed through the line sensor camera for inspection, but the inspection is not limited to this.
  • the line sensor camera may be fixed and the glass plate G may be relatively moved to take an image of the entire glass plate.
  • the image pickup system 82 uses the light reflected by the glass plate G to image the defect, but the present invention is not limited to this. A method of imaging defects using light transmitted through the glass plate G may also be used.
  • the image pickup system 82 is made to stand by in the area A or the area B when the glass plate G is carried in or out, but the present invention is not limited to this.
  • the image pickup system 82 may move in the direction perpendicular to the surface of the glass plate and stand by when the glass plate G is carried in or out.
  • the third inspection device 9 is arranged above the second inspection device 8, and the second inspection step and the third inspection step are performed in parallel, but the present invention is not limited to this.
  • the third inspection device 9 may be arranged on the downstream side of the second inspection device 8, and the third inspection step S8 may be carried out after the completion of the second inspection step S7. Further, the entire surface of the glass plate G may be inspected in the second inspection step S7 and the third inspection step S8, or the third inspection step may be omitted.
  • the present invention can be suitably used for manufacturing a glass plate including a step of inspecting the presence or absence of defects contained in the molded glass plate during transportation.

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PCT/JP2021/033758 2020-10-07 2021-09-14 ガラス板の製造方法 WO2022075018A1 (ja)

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US20050011229A1 (en) * 2002-12-05 2005-01-20 Peter Lisec Device for securing material plates, such as glass sheets, during the working thereof
KR20050026253A (ko) * 2003-09-09 2005-03-15 로체 시스템즈(주) 직립형 유리판절단장치
JP2006194858A (ja) * 2004-12-17 2006-07-27 Micronics Japan Co Ltd 表示用パネルの検査装置
CN101718714A (zh) * 2009-11-25 2010-06-02 河北东旭投资集团有限公司 一种检测平板玻璃表面缺陷的系统及方法
JP2014211415A (ja) * 2013-04-22 2014-11-13 日本電気硝子株式会社 板ガラス搬送装置、及び板ガラス搬送方法、並びに板ガラス検査装置
JP2015105930A (ja) * 2013-12-02 2015-06-08 旭硝子株式会社 透光性基板の微小欠陥検査方法および透光性基板の微小欠陥検査装置
JP2017111033A (ja) * 2015-12-17 2017-06-22 日本電気硝子株式会社 ガラス板の製造方法
JP2018104221A (ja) * 2016-12-26 2018-07-05 日本電気硝子株式会社 ガラス板の製造方法

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Publication number Priority date Publication date Assignee Title
JP2001255232A (ja) * 2000-03-10 2001-09-21 Micronics Japan Co Ltd 表示用パネル基板の検査装置
US20050011229A1 (en) * 2002-12-05 2005-01-20 Peter Lisec Device for securing material plates, such as glass sheets, during the working thereof
KR20050026253A (ko) * 2003-09-09 2005-03-15 로체 시스템즈(주) 직립형 유리판절단장치
JP2006194858A (ja) * 2004-12-17 2006-07-27 Micronics Japan Co Ltd 表示用パネルの検査装置
CN101718714A (zh) * 2009-11-25 2010-06-02 河北东旭投资集团有限公司 一种检测平板玻璃表面缺陷的系统及方法
JP2014211415A (ja) * 2013-04-22 2014-11-13 日本電気硝子株式会社 板ガラス搬送装置、及び板ガラス搬送方法、並びに板ガラス検査装置
JP2015105930A (ja) * 2013-12-02 2015-06-08 旭硝子株式会社 透光性基板の微小欠陥検査方法および透光性基板の微小欠陥検査装置
JP2017111033A (ja) * 2015-12-17 2017-06-22 日本電気硝子株式会社 ガラス板の製造方法
JP2018104221A (ja) * 2016-12-26 2018-07-05 日本電気硝子株式会社 ガラス板の製造方法

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