WO2021241581A1 - 感光性樹脂組成物 - Google Patents
感光性樹脂組成物 Download PDFInfo
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- WO2021241581A1 WO2021241581A1 PCT/JP2021/019805 JP2021019805W WO2021241581A1 WO 2021241581 A1 WO2021241581 A1 WO 2021241581A1 JP 2021019805 W JP2021019805 W JP 2021019805W WO 2021241581 A1 WO2021241581 A1 WO 2021241581A1
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- resin composition
- photosensitive resin
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- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
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- PDAAXBZLJILPLZ-UHFFFAOYSA-N COCC1=CC=C(CC2=CC=C(COC)C(O)=C2COC)C(COC)=C1O Chemical compound COCC1=CC=C(CC2=CC=C(COC)C(O)=C2COC)C(COC)=C1O PDAAXBZLJILPLZ-UHFFFAOYSA-N 0.000 description 1
- HTIRHQRTDBPHNZ-UHFFFAOYSA-N Dibutyl sulfide Chemical compound CCCCSCCCC HTIRHQRTDBPHNZ-UHFFFAOYSA-N 0.000 description 1
- XXRCUYVCPSWGCC-UHFFFAOYSA-N Ethyl pyruvate Chemical compound CCOC(=O)C(C)=O XXRCUYVCPSWGCC-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- VGGLHLAESQEWCR-UHFFFAOYSA-N N-(hydroxymethyl)urea Chemical class NC(=O)NCO VGGLHLAESQEWCR-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- MBHRHUJRKGNOKX-UHFFFAOYSA-N [(4,6-diamino-1,3,5-triazin-2-yl)amino]methanol Chemical class NC1=NC(N)=NC(NCO)=N1 MBHRHUJRKGNOKX-UHFFFAOYSA-N 0.000 description 1
- HUGSFVOUFKFSCM-UHFFFAOYSA-N [1-(hydroxymethyl)-4-phenylcyclohexa-2,4-dien-1-yl]methanol Chemical compound C1=CC(CO)(CO)CC=C1C1=CC=CC=C1 HUGSFVOUFKFSCM-UHFFFAOYSA-N 0.000 description 1
- XMUZQOKACOLCSS-UHFFFAOYSA-N [2-(hydroxymethyl)phenyl]methanol Chemical compound OCC1=CC=CC=C1CO XMUZQOKACOLCSS-UHFFFAOYSA-N 0.000 description 1
- SQAMZFDWYRVIMG-UHFFFAOYSA-N [3,5-bis(hydroxymethyl)phenyl]methanol Chemical compound OCC1=CC(CO)=CC(CO)=C1 SQAMZFDWYRVIMG-UHFFFAOYSA-N 0.000 description 1
- YWMLORGQOFONNT-UHFFFAOYSA-N [3-(hydroxymethyl)phenyl]methanol Chemical compound OCC1=CC=CC(CO)=C1 YWMLORGQOFONNT-UHFFFAOYSA-N 0.000 description 1
- WWFMINHWJYHXHF-UHFFFAOYSA-N [6-(hydroxymethyl)pyridin-2-yl]methanol Chemical compound OCC1=CC=CC(CO)=N1 WWFMINHWJYHXHF-UHFFFAOYSA-N 0.000 description 1
- YGCOKJWKWLYHTG-UHFFFAOYSA-N [[4,6-bis[bis(hydroxymethyl)amino]-1,3,5-triazin-2-yl]-(hydroxymethyl)amino]methanol Chemical compound OCN(CO)C1=NC(N(CO)CO)=NC(N(CO)CO)=N1 YGCOKJWKWLYHTG-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- MOVRNJGDXREIBM-UHFFFAOYSA-N aid-1 Chemical compound O=C1NC(=O)C(C)=CN1C1OC(COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C(NC(=O)C(C)=C2)=O)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C(NC(=O)C(C)=C2)=O)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C(NC(=O)C(C)=C2)=O)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)COP(O)(=O)OC2C(OC(C2)N2C3=C(C(NC(N)=N3)=O)N=C2)CO)C(O)C1 MOVRNJGDXREIBM-UHFFFAOYSA-N 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000004849 alkoxymethyl group Chemical group 0.000 description 1
- 125000005011 alkyl ether group Chemical group 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- NNIHVLKSQCWODK-UHFFFAOYSA-N butan-1-ol;1,3,5-triazine-2,4,6-triamine Chemical compound CCCCO.CCCCO.CCCCO.CCCCO.CCCCO.CCCCO.NC1=NC(N)=NC(N)=N1 NNIHVLKSQCWODK-UHFFFAOYSA-N 0.000 description 1
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- FCFXSHWIQVTCQE-UHFFFAOYSA-N cyano(phenyl)cyanamide Chemical compound N#CN(C#N)C1=CC=CC=C1 FCFXSHWIQVTCQE-UHFFFAOYSA-N 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- TXOCEEGZIYOOAN-UHFFFAOYSA-N dibutyl-(4,8-dibutoxynaphthalen-1-yl)sulfanium Chemical compound C(CCC)[S+](C1=CC=C(C2=CC=CC(=C12)OCCCC)OCCCC)CCCC TXOCEEGZIYOOAN-UHFFFAOYSA-N 0.000 description 1
- OTARVPUIYXHRRB-UHFFFAOYSA-N diethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](C)(OCC)CCCOCC1CO1 OTARVPUIYXHRRB-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- WVJOGYWFVNTSAU-UHFFFAOYSA-N dimethylol ethylene urea Chemical compound OCN1CCN(CO)C1=O WVJOGYWFVNTSAU-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PKWIYNIDEDLDCJ-UHFFFAOYSA-N guanazole Chemical compound NC1=NNC(N)=N1 PKWIYNIDEDLDCJ-UHFFFAOYSA-N 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- OKKJLVBELUTLKV-UHFFFAOYSA-N methanol Natural products OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 1
- 229940057867 methyl lactate Drugs 0.000 description 1
- YWTJTYXQYJSKNB-UHFFFAOYSA-N methyl propaneperoxoate Chemical compound CCC(=O)OOC YWTJTYXQYJSKNB-UHFFFAOYSA-N 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- MQWFLKHKWJMCEN-UHFFFAOYSA-N n'-[3-[dimethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CO[Si](C)(OC)CCCNCCN MQWFLKHKWJMCEN-UHFFFAOYSA-N 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 229920002114 octoxynol-9 Polymers 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- GEVPUGOOGXGPIO-UHFFFAOYSA-N oxalic acid;dihydrate Chemical compound O.O.OC(=O)C(O)=O GEVPUGOOGXGPIO-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- URLKBWYHVLBVBO-UHFFFAOYSA-N p-dimethylbenzene Natural products CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical class C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- 125000004417 unsaturated alkyl group Chemical group 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N urea group Chemical group NC(=O)N XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
Definitions
- the present invention relates to a photosensitive resin composition.
- Patent Document 1 describes that a film obtained by applying a resin composition containing a compound having a phenolic hydroxyl group to a polyamide having a specific structure and curing it at 200 ° C. or lower exhibits a high elongation at break. (Paragraph 0008).
- the present invention provides a resin film having excellent curability at low temperatures.
- Component (A) A photosensitive resin composition containing an alkali-soluble resin.
- the component (A) contains a component (a1): a biphenyl aralkyl type phenol resin.
- a photosensitive resin composition having a tensile elongation of 10% or more and 200% or less of a cured film of the photosensitive resin composition measured under the following condition 1.
- Condition 1 The photosensitive resin composition is cured at 200 ° C. for 180 minutes to form the cured film, and a sample having a thickness of 6.5 mm ⁇ 20 mm ⁇ 10 ⁇ m is prepared from the cured film.
- Ii Based on JIS K7161, a tensile test of the sample is carried out under the conditions of 23 ° C. and a test speed of 5 mm / min to obtain the tensile elongation.
- the present invention for example, it is possible to provide a resin film obtained by curing the photosensitive resin composition in the present invention, and an electronic device provided with the resin film.
- composition may contain each component alone or in combination of two or more.
- x to y in the numerical range represents “x or more and y or less”, and includes both a lower limit value x and an upper limit value y.
- similar components are designated by a common reference numeral, and description thereof will be omitted as appropriate.
- the figure is a schematic view and does not match the actual dimensional ratio.
- the photosensitive resin composition contains a component (A): an alkali-soluble resin, and the component (A) contains a component (a1): a biphenyl aralkyl type phenol resin.
- the tensile elongation of the cured film of the photosensitive resin composition measured under the following condition 1 is 10% or more and 200% or less.
- (Condition 1) (I) The photosensitive resin composition is cured at 200 ° C. for 180 minutes to form a cured film, and a sample having a thickness of 6.5 mm ⁇ 20 mm ⁇ 10 ⁇ m is prepared from the cured film. (Ii) Based on JIS K7161, a tensile test of a sample is carried out under the conditions of 23 ° C. and a test speed of 5 mm / min to determine the tensile elongation.
- the present inventor conducted a study to improve the low temperature curability of the photosensitive resin composition.
- the above-mentioned problems are solved by making the photosensitive resin composition contain a specific component and having the tensile elongation of the cured film of the photosensitive resin composition within a specific range. I found that.
- the tensile elongation of the cured film is 10% or more, preferably 20% or more, more preferably 30% or more, still more preferably 40% or more, from the viewpoint of suppressing brittle fracture. Further, from the viewpoint of obtaining a cured film more stably, the tensile elongation of the cured film is 200% or less, preferably 150% or less, more preferably 125% or less, still more preferably 100% or less, still more preferably. Is 90% or less.
- the glass transition temperature (Tg) of the cured product of the photosensitive resin composition is preferably 150 ° C. or higher, more preferably 180 ° C. or higher, still more preferably 200 ° C. or higher from the viewpoint of improving heat resistance. , Even more preferably 210 ° C. or higher. Further, from the viewpoint of suppressing deterioration of brittleness, the glass transition temperature of the cured product of the photosensitive resin composition is preferably 260 ° C. or lower, more preferably 240 ° C. or lower, still more preferably 230 ° C. or lower.
- the Tg of the cured product of the photosensitive resin composition is obtained by using a thermomechanical analyzer (TMA) for a predetermined test piece (width 3 mm ⁇ length 10 mm ⁇ thickness 0.005 to 0.015 mm). It is calculated from the results of measurement under the conditions of a start temperature of 30 ° C., a measurement temperature range of 30 to 440 ° C., and a temperature rise rate of 10 ° C./min.
- TMA thermomechanical analyzer
- the film strength of the cured film measured under the following condition 2 is preferably 70 MPa or more, more preferably 90 Pa or more, still more preferably 100 MPa or more. , Even more preferably 105 MPa or more. From the viewpoint of suppressing brittle fracture, the film strength of the cured film is preferably 150 MPa or less, more preferably 140 MPa or less, still more preferably 130 MPa or less, still more preferably 120 MPa or less.
- Equipment Tensile / compression tester Temperature: Room temperature (25 ° C)
- the linear expansion coefficient of the cured film in the temperature range of 50 to 100 ° C. is preferably 25 ppm / ° C. or higher, more preferably 30 ppm / ° C. The above is more preferably 35 ppm / ° C. or higher, and more preferably 40 ppm / ° C. or lower.
- the linear expansion coefficient of the cured film in the temperature range of 50 to 100 ° C. is specifically a test piece of the cured film obtained under the conditions of 200 ° C. and 180 minutes (width 3 mm ⁇ length 10 mm ⁇ thickness 10 mm).
- thermomechanical analyzer (TMA) it is calculated from the results of measurement under the conditions of a start temperature of 30 ° C., a measurement temperature range of 30 to 440 ° C., and a temperature rise rate of 10 ° C./min.
- the component (A) is an alkali-soluble resin, and the component (a1): a biphenyl aralkyl type phenol resin is contained.
- the component (a1) is preferably represented by the following general formula (2) from the viewpoint of improving the curability at a low temperature.
- n is preferably 6 or more, more preferably 10 or more, still more preferably 12 or more, still more preferably 14 or more, from the viewpoint of improving the curability at low temperature. Further, from the viewpoint of solvent solubility, n is preferably 72 or less, more preferably 54 or less, still more preferably 36 or less.
- the weight average molecular weight of the component (a1) may be, for example, 500 or more, preferably 2000 or more, more preferably 3000 or more, and further preferably 4000 or more, from the viewpoint of improving the curability at low temperature.
- the weight average molecular weight of the component (a1) may be, for example, 50,000 or less, preferably 20,000 or less, more preferably 15,000 or less, still more preferably 10,000 or less, still more preferably, from the viewpoint of solvent solubility. It is 8000 or less.
- the weight average molecular weight of the component (a1) is specifically measured by gel permeation chromatography (GPC) and calculated based on a calibration curve prepared using a polystyrene standard substance.
- the content of the component (a1) in the photosensitive resin composition is preferably 5 parts by mass or more from the viewpoint of improving toughness at low temperature curing when the total solid content of the photosensitive resin composition is 100 parts by mass. Yes, more preferably 10 parts by mass or more, still more preferably 15 parts by mass or more. Further, from the viewpoint of deterioration of thermomechanical properties, the content of the component (a1) in the photosensitive resin composition is preferably 70 parts by mass or less when the total solid content of the photosensitive resin composition is 100 parts by mass. Yes, more preferably 60 parts by mass or less, further preferably 50 parts by mass or less, still more preferably 40 parts by mass or less.
- the component (A) may contain a substance other than the component (a1).
- resins include one or more selected from the group consisting of phenol resins other than the component (a1), hydroxystyrene resins, polyamide resins, polybenzoxazole resins, polyimide resins, and cyclic olefin resins.
- the component (A) preferably further contains a phenol resin other than the component (a2): the component (a1) from the viewpoint of improving the curability at a low temperature and the reliability of the cured film.
- a phenol resin other than the component (a2): the component (a1) from the viewpoint of improving the curability at a low temperature and the reliability of the cured film.
- the component (a2) include novolak-type phenol resins such as phenol novolac resin, cresol novolak resin, bisphenol novolak resin, phenol-biphenyl novolak resin, allylated novolak-type phenol resin, and xylylene novolak-type phenol resin; novolak.
- a reaction product of a phenol compound such as a type phenol resin, a resol type phenol resin, and a cresol novolak resin and an aldehyde compound; one or 2 selected from the group consisting of a reaction product of a phenol compound such as a phenol aralkyl resin and a dimethanol compound.
- the component (a2) is preferably a novolak type phenol resin.
- the component (a2) preferably has a structural unit represented by the following general formula (4) from the viewpoint of improving the curability at a low temperature and the reliability of the cured film.
- R 41 and R 42 each independently have a hydroxyl group, a halogen atom, a carboxyl group, a saturated or unsaturated alkyl group having 1 to 20 carbon atoms, and 1 to 20 carbon atoms.
- It has an aliphatic group having 1 to 10 carbon atoms, an alicyclic group having 3 to 20 carbon atoms, and an aromatic structure having 6 to 20 carbon atoms, which may have a single bond or an unsaturated bond. is selected from the group consisting of organic radicals, Z 4 is bonded to either one of the two benzene rings.
- the phenol resin having the structural unit represented by the general formula (4) can be obtained by using the method described in JP-A-2018-155938.
- the content of the component (a2) in the photosensitive resin composition is preferably 5 parts by mass or more from the viewpoint of improving the curability at low temperature curing when the total solid content of the photosensitive resin composition is 100 parts by mass. It is more preferably 10 parts by mass or more, still more preferably 15 parts by mass or more. Further, from the viewpoint of deterioration of toughness, the content of the component (a2) in the photosensitive resin composition is preferably 70 parts by mass or less when the total solid content of the photosensitive resin composition is 100 parts by mass. It is more preferably 60 parts by mass or less, further preferably 50 parts by mass or less, and even more preferably 40 parts by mass or less.
- the content of the component (A) in the photosensitive resin composition is from the viewpoint of improving the curability at low temperature and the reliability of the cured film when the total solid content of the photosensitive resin composition is 100 parts by mass. Therefore, it is preferably 30 parts by mass or more, more preferably 45 parts by mass or more, further preferably 50 parts by mass or more, and may be, for example, 55 parts by mass or more. Further, from the viewpoint of improving chemical resistance and photosensitivity, the content of the component (A) in the photosensitive resin composition is preferably 95% by mass when the total solid content of the photosensitive resin composition is 100 parts by mass. The amount is 9 parts or less, more preferably 90 parts by mass or less, further preferably 85 parts by mass or less, and even more preferably 70 parts by mass or less.
- the photosensitive resin composition preferably further contains a component (B): a cross-linking agent from the viewpoint of improving the reliability and chemical resistance of the cured film.
- the component (B) is specifically a compound having a group capable of reacting with the component (A) by heat, and is, for example, 1,2-benzenedimethanol, 1,3-benzenedimethanol, 1,4-benzene.
- Alkoxymethylglycol uryl compounds methylol benzoguanamine compounds, methylol urea compounds such as dimethylol ethyleneurea; alkylated urea resins; cyano compounds such as dicyanoaniline, dicyanophenol, cyanophenylsulfonic acid; 1,4-phenylenediisocyanate, Isocyanate compounds such as 3,3'-dimethyldiphenylmethane-4,4'-diisosianate; ethylene glycol diglycidyl ether, bisphenol A diglycidyl ether, triglycidyl isocyanurate, phenoxy type epoxy resin, bisphenol A type epoxy resin, Epoxy group-containing compounds such as bisphenol F type epoxy resin, naphthalene type epoxy resin, biphenyl type epoxy resin, phenol novolac resin type epoxy resin; N, N'-1,3-phenylenedi maleimide, N, N'-methylenedimaleimide Examples thereof include maleimide
- the component (B) preferably contains the component (b1): a bifunctional epoxy resin, and more preferably 2. Includes a functional phenoxy-type epoxy resin. From the same viewpoint, it is also preferable that the component (B) contains the component (b1) and the alkylated urea resin.
- the phenoxy type epoxy resin include bisphenol A type phenoxy resin, bisphenol F type phenoxy resin, bisphenol S type phenoxy resin, bisphenol acetophenone type phenoxy resin, novolak type phenoxy resin, biphenyl type phenoxy resin, fluorene type phenoxy resin, and dicyclopentadiene type.
- Phenoxy resin, norbornen type phenoxy resin, naphthalene type phenoxy resin, anthracene type phenoxy resin, adamantan type phenoxy resin, terpene type phenoxy resin, trimethylcyclohexane type phenoxy resin and the like can be used.
- Specific examples of commercially available phenoxyphenoxy-type epoxy resins include resins JER-1256, YX-7105 (all manufactured by Mitsubishi Chemical Corporation), and LX-01 (manufactured by Osaka Soda Co., Ltd.).
- the content of the component (b1) in the photosensitive resin composition is preferably 0.1 part by mass from the viewpoint of improving toughness at low temperature curing when the total solid content of the photosensitive resin composition is 100 parts by mass.
- the above is more preferably 1 part by mass or more, still more preferably 3 parts by mass or more.
- the content of the component (b1) in the photosensitive resin composition is preferably 100 parts by mass when the total solid content of the photosensitive resin composition is 100 parts by mass. It is 60 parts by mass or less, more preferably 50 parts by mass or less, and further preferably 40 parts by mass or less.
- the content of the component (B) in the photosensitive resin composition is preferably 100 parts by mass when the total solid content of the photosensitive resin composition is 100 parts by mass, from the viewpoint of improving toughness and chemical resistance during low-temperature curing. It is 0.1 part by mass or more, more preferably 1 part by mass or more, and further preferably 3 parts by mass or more. Further, from the viewpoint of enhancing the chemical resistance of the cured film, the content of the component (B) in the photosensitive resin composition is preferably 60 parts by mass when the total solid content of the photosensitive resin composition is 100 parts by mass. It is more preferably 50 parts by mass or less, still more preferably 40 parts by mass or less.
- the photosensitive resin composition preferably further contains a component (C): an acid generator from the viewpoint of stably forming a cured film.
- the component (C) is specifically a compound that generates an acid by absorbing heat energy or light energy.
- the component (C) preferably contains the component (c1): a sulfonium compound or a salt thereof.
- the component (c1) is specifically a sulfonium salt having a sulfonium ion as a cation portion.
- the anion portion of the component (c1) is specifically a sulfonic acid ion such as a borodate ion, an antimony ion, a phosphorus ion or a trifluoromethanesulfonic acid ion, and from the viewpoint of improving the reaction rate at a low temperature, from the viewpoint of improving the reaction rate at a low temperature. It is preferably a borohydride ion or an antimony ion, and more preferably a borohydride ion. These anions may have substituents.
- the component (c1) preferably contains a sulfonium salt represented by the following general formula (1).
- R 2 is a monovalent organic group, and is preferably a benzyl group which may have a hydrocarbon group having a chain or a branched chain or a substituent from the viewpoint of improving the reactivity at a low temperature, and more preferably.
- Is a benzyl group which may be substituted with an alkyl group having 1 or more and 4 or less carbon atoms or an alkyl group having 1 or more and 4 or less carbon atoms, and more preferably a methyl group or a benzyl aromatic ring portion may be substituted with a methyl group. It is a group.
- R 3 is a monovalent organic group, preferably a hydrocarbon group having a chain or a branched chain from the viewpoint of improving reactivity at a low temperature, and more preferably an alkyl group having 1 or more and 4 or less carbon atoms. Yes, more preferably a methyl group.
- component (c1) include triphenylsulfonium salts such as triphenylsulfonium trifluoromethanesulfonate. Further, the component (c1) may be a photoacid generator such as di (trifluoromethanesulfon) imide (4,8-di-n-butoxy-1-naphthyl) dibutylsulfonium.
- the content of the component (c1) in the photosensitive resin composition is preferably 0.005 mass by mass from the viewpoint of improving the curability at a low temperature when the total solid content of the photosensitive resin composition is 100 parts by mass. It is more than a part, more preferably 0.01 part by mass or more, still more preferably 0.02 part by mass or more. Further, from the viewpoint of suppressing a decrease in reliability, the content of the component (C) in the photosensitive resin composition is preferably 5% by mass or less when the total solid content of the photosensitive resin composition is 100 parts by mass. It is more preferably 4% by mass or less, further preferably 3% by mass or less, and for example, 0.5 part by mass or less, for example 0.2 part by mass or less, or 0.1 part by mass or less, for example. Is also preferable.
- the photosensitive resin composition preferably further contains a component (D): a silane coupling agent from the viewpoint of enhancing the adhesion of the cured film of the photosensitive resin composition to the substrate.
- a silane coupling agent include epoxysilanes such as 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldiethoxysilane, and 3-glycidoxypropyltriethoxysilane; p-styryltrimethoxysilane and the like.
- Styrylsilane 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane; 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-acryloxypropyltrimethoxysilane, etc.
- the component (D) is preferably at least one selected from the group consisting of epoxysilane and (meth) acrylicsilane, and more preferably 3-glycidoxypropyltrimethoxysilane and 3-methacry. It is at least one of the loxypropyltrimethoxysilanes.
- a silicon compound having one or more groups selected from the group consisting of an amino group, an amide group and a urea group is reacted with an acid dianhydride or an acid anhydride.
- the silicon compound obtained by the above can also be mentioned.
- the content of the component (D) in the photosensitive resin composition is preferably 0, with respect to 100 parts by mass of the component (A), from the viewpoint of achieving both adhesion and storage stability of the photosensitive resin composition.
- the photosensitive resin composition may contain components other than the above-mentioned components.
- a component for example, additives other than the component (D) such as an adhesion aid, a surfactant, an antioxidant, a dissolution accelerator, a filler, and a sensitizer may be added.
- an adhesion aid other than the component (D) from the viewpoint of improving the adhesion of the cured film of the photosensitive resin composition to the metal, specifically, 1 or selected from the group consisting of a triazole compound and an imide compound. Two or more compounds can be mentioned. This makes it possible to further increase the number of lone electron pairs derived from the nitrogen atom.
- triazole compound specifically, mercaptotriazole, 4-amino-1,2,4-triazole, 4H-1,2,4-triazole-3-amine, 4-amino-3,5- Di-2-pyridyl-4H-1,2,4-triazole, 3-amino-5-methyl-4H-1,2,4-triazole, 4-methyl-4H-1,2,4-triazole-3- Amine, 3,4-diamino-4H-1,2,4-triazole, 3,5-diamino-4H-1,2,4-triazole, 1,2,4-triazole-3,4,5-triamine, 3-Pyridyl-4H-1,2,4-Triazole, 4H-1,2,4-Triazole-3-Carboxamide, 3,5-diamino-4-methyl-1,2,4-Triazole, 3-Pyridyl- One or more compounds selected from the group consisting of 1,2,4-triazole, such as 4-methyl-1,2,4-triazole, 4-methyl-1
- the content of the adhesion aid in the photosensitive resin composition is preferably 0.05 parts by mass or more, more preferably 0 parts by mass, with respect to 100 parts by mass of the component (A), from the viewpoint of further enhancing the adhesion. It is 1 part by mass or more, more preferably 1 part by mass or more, preferably 10 parts by mass or less, and more preferably 5 parts by mass or less.
- the surfactant include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, and the like.
- a fluorine-based surfactant having a perfluoroalkyl group examples include Megafuck F171, Megafuck F173, Megafuck F444, Megafuck F470, Megafuck F471, Megafuck F475, Megafuck F482, and Megafuck.
- F477 manufactured by DIC
- Surflon S-381, Surflon S-383, Surflon S-393 manufactured by AGC Seimi Chemical
- Novek FC4430 and Novek FC4432 manufactured by 3M Japan. It is preferable to use.
- a silicone-based surfactant for example, polyether-modified dimethylsiloxane
- silicone-based surfactants SH series, SD series and ST series of Toray Dow Corning, BYK series of Big Chemie Japan, KP series of Shin-Etsu Chemical Co., Ltd., Disform of NOF Corporation ( Examples include the (registered trademark) series and the TSF series of Toshiba Silicone Co., Ltd.
- the content of the surfactant in the photosensitive resin composition is, for example, 0.001 mass with respect to the entire photosensitive resin composition (including the solvent) from the viewpoint of improving the coatability and the uniformity of the coating film.
- % (10 ppm) or more preferably 1% by mass (10000 ppm) or less, more preferably 0.5% by mass (5000 ppm) or less, still more preferably 0.1% by mass (1000 ppm) or less.
- the photosensitive resin composition is prepared by mixing and dissolving each of the above-mentioned components and, if necessary, other components in an organic solvent. Further, in the present embodiment, the photosensitive resin composition is used in the form of a varnish by dissolving, for example, the above-mentioned components and, if necessary, other components in an organic solvent. Further, in the photosensitive resin composition, a component (A) other than the component (a1) and the component (a1) and other components are appropriately reacted in advance to obtain a pre-reaction resin, and then further components are added as appropriate. It can also be used.
- organic solvent examples include N-methyl-2-pyrrolidone, ⁇ -butyrolactone, N, N-dimethylacetamide, dimethylsulfoxide, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, propylene glycol monomethyl ether, and dipropylene glycol monomethyl ether.
- a resin film can be obtained by curing the photosensitive resin composition in the present embodiment.
- the resin film in the present embodiment is a dry film or a cured film of the photosensitive resin composition. That is, the resin film is formed by drying or curing the photosensitive resin composition, and preferably the photosensitive resin composition is effective.
- This resin film is used for forming a resin film for an electronic device such as a permanent film or a resist. Among these, it is preferable to use it for applications using a permanent film from the viewpoint of obtaining a resin film at a low temperature, having excellent processability, and obtaining a resin film having excellent reliability.
- a resin film obtained by using a photosensitive resin composition is a film having excellent processability or reliability, which is required to make a resin film useful for manufacturing an electronic device or the like. It is also possible to obtain.
- the permanent film is composed of a resin film obtained by prebaking, exposing and developing a photosensitive resin composition, patterning it into a desired shape, and then curing it by post-baking.
- the permanent film can be used as a protective film for electronic devices such as a buffer coat film, an interlayer film such as an insulating film for rewiring, and a dam material.
- the photosensitive resin composition is preferably used as a buffer coat film or an insulating film for wiring.
- the photosensitive resin composition is applied to the object to be masked by the resist by a method such as spin coating, roll coating, flow coating, dip coating, spray coating, doctor coating, etc., and the photosensitive resin composition is used. It is composed of a resin film obtained by removing the solvent.
- FIG. 1 is a cross-sectional view showing a configuration example of an electronic device having a resin film in the present embodiment.
- the electronic device 100 shown in FIG. 1 can be an electronic device provided with the resin film.
- one or more of the group consisting of the passivation film 32, the insulating layer 42, and the insulating layer 44 can be a resin film.
- the resin film is preferably the above-mentioned permanent film.
- the electronic device 100 is, for example, a semiconductor chip. In this case, for example, a semiconductor package can be obtained by mounting the electronic device 100 on the wiring board via the bump 52.
- the electronic device 100 includes a semiconductor substrate provided with a semiconductor element such as a transistor, and a multilayer wiring layer (not shown) provided on the semiconductor substrate.
- the uppermost layer of the multilayer wiring layer is provided with an interlayer insulating film 30 and an uppermost layer wiring 34 provided on the interlayer insulating film 30.
- the top layer wiring 34 is made of, for example, aluminum Al.
- a passivation film 32 is provided on the interlayer insulating film 30 and on the uppermost layer wiring 34. A part of the passivation film 32 is provided with an opening in which the uppermost layer wiring 34 is exposed.
- a rewiring layer 40 is provided on the passivation film 32.
- the rewiring layer 40 includes an insulating layer 42 provided on the passivation film 32, a rewiring 46 provided on the insulating layer 42, and an insulating layer 44 provided on the insulating layer 42 and the rewiring 46.
- the insulating layer 42 is formed with an opening connected to the uppermost layer wiring 34.
- the rewiring 46 is formed on the insulating layer 42 and in the openings provided in the insulating layer 42, and is connected to the uppermost layer wiring 34.
- the insulating layer 44 is provided with an opening for connecting to the rewiring 46.
- a bump 52 is formed in the opening provided in the insulating layer 44, for example, via a UBM (Under Bump Metallurgy) layer 50.
- the electronic device 100 is connected to a wiring board or the like via, for example, a bump 52.
- Examples 1 to 5, Comparative Examples 1 to 5 A photosensitive resin composition was prepared according to the formulation shown in Table 1. Specifically, first, each component blended according to Table 1 was stirred and mixed in a nitrogen atmosphere, and then filtered through a polyethylene filter having a pore size of 0.2 ⁇ m to obtain a varnish-like photosensitive resin composition. .. Details of each component shown in Table 1 are shown below. Further, in Table 1, the content of each component is an active amount.
- Alkaline-soluble resin (A) Alkaline-soluble resin) (A2) Alkaline-soluble resin 1: Novolak-type phenol resin, phenol resin obtained in Production Example 1 described later (a2) Alkaline-soluble resin 2: Cresol-type phenol resin, PR-56001, manufactured by Sumitomo Bakelite Co., Ltd. (a2) Alkaline-soluble Resin 3: Allyl type phenol resin, MEH-8000H, manufactured by Meiwa Kasei Co., Ltd. (a2) Alkaline-soluble resin 4: Zylock type phenol resin, MEH-7800SS, manufactured by Meiwa Kasei Co., Ltd. (a1) Alkaline-soluble resin 5: Biphenyl aralkyl type phenol resin 1.
- Alkaline-soluble resin 6 Biphenyl aralkyl type phenol resin 2, Weight average molecular weight 4000, GPH-103, Nippon Kayaku Co., Ltd.
- Alkaline-soluble resin 7 Prereaction resin obtained in Production Example 2 described later.
- (B) Crosslinking agent (B1) Crosslinking agent 1: Phenoxy type epoxy resin, YX-7105, manufactured by Mitsubishi Chemical Co., Ltd. (b1) Crosslinking agent 2: Bisphenol A type epoxy resin, LX-01, Crosslinking agent manufactured by Osaka Soda, 3: Alkylated urea resin, Nicarax MX-270 manufactured by Sanwa Chemical Co., Ltd.
- Adhesion aid 1 Silane coupling agent (3-glycidoxypropyltrimethoxysilane), KBM-403, Shin-Etsu Chemical Co., Ltd.
- Adhesion aid 2 Mercaptotriazole adhesion aid 3: Silane coupling agent ( 3-methacryloxypropyltrimethoxysilane), KBM-503, manufactured by Shin-Etsu Chemical Co., Ltd.
- Acid generator 1 Sulfonium salt 1 (4-acetoxyphenyldimethylsulfonium tetrakis (pentafluorophenyl) borate), SI-B5, manufactured by Sanshin Chemical Industry Co., Ltd.
- Acid generator 2 Sulfonium salt 2 (4) -Acetoxyphenylmethylbenzylsulfonium tetrakis (pentafluorophenyl) borate), SI-B3A, manufactured by Sanshin Chemical Industry Co., Ltd.
- Acid generator 3 Sulfonium salt 3 (di (trifluoromethanesulfon) imide (4,8-di) -N-butoxy-1-naphthyl) dibutylsulfonium), ZK-1232, manufactured by DSP Gokyo Food & Chemical Co., Ltd.
- Surfactant 1 Fluorosurfactant, FC4430, manufactured by 3M Japan Ltd.
- phenol resin alkali-soluble resin 1 which is a novolak-type phenol resin having a weight average molecular weight of 3200.
- the photosensitive resin composition obtained in each example was cured at 200 ° C. for 180 minutes to form a cured film. From the obtained cured film, a sample having a thickness of 6.5 mm ⁇ 20 mm ⁇ 10 ⁇ m was prepared. The tensile test of the sample was carried out based on JIS K7161 under the conditions of a tensile tester manufactured by Orientec (Tencilon RTA-100), 23 ° C., and a test speed of 5 mm / min. One sample was measured eight times, and the average value (“ave.” In Table 1) was taken as the tensile elongation (%). The results are shown in Table 1.
- Tg coefficient of linear expansion (CTE)
- CTE coefficient of linear expansion
- compositions obtained in each example had excellent processability and curability at low temperature.
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Abstract
Description
特許文献1には、特定の構造を有するポリアミドに対して、フェノール性水酸基を有する化合物を含む樹脂組成物を塗布し、200℃以下で硬化した膜は、高い破断伸び率を示す、と記載されている(段落0008)。
成分(A):アルカリ可溶性樹脂を含む感光性樹脂組成物であって、
前記成分(A)が、成分(a1):ビフェニルアラルキル型フェノール樹脂を含み、
以下の条件1にて測定される、当該感光性樹脂組成物の硬化膜の引張伸び率が、10%以上200%以下である、感光性樹脂組成物が提供される。
(条件1)
(i)当該感光性樹脂組成物を200℃、180分の条件で硬化して前記硬化膜を形成し、前記硬化膜から、6.5mm×20mm×10μm厚の試料を作製する。
(ii)JIS K7161に基づき、23℃、試験速度5mm/minの条件で前記試料の引張試験を実施して前記引張伸び率を求める。
本明細書において、数値範囲の「x~y」は「x以上y以下」を表し、下限値xおよび上限値yをいずれも含む。また、以下の図面において、同様な構成要素には共通の符号を付し、適宜説明を省略する。また、図は概略図であり、実際の寸法比率とは一致していない。
本実施形態において、感光性樹脂組成物は、成分(A):アルカリ可溶性樹脂を含み、成分(A)は、成分(a1):ビフェニルアラルキル型フェノール樹脂を含む。そして、以下の条件1にて測定される、感光性樹脂組成物の硬化膜の引張伸び率が、10%以上200%以下である。
(条件1)
(i)当該感光性樹脂組成物を200℃、180分の条件で硬化して硬化膜を形成し、硬化膜から、6.5mm×20mm×10μm厚の試料を作製する。
(ii)JIS K7161に基づき、23℃、試験速度5mm/minの条件で試料の引張試験を実施して引張伸び率を求める。
また、硬化膜をより安定的に得る観点から、硬化膜の引張伸び率は、200%以下であり、好ましくは150%以下、より好ましくは125%以下、さらに好ましくは100%以下、さらにより好ましくは90%以下である。
また、脆性悪化を抑制する観点から、感光性樹脂組成物の硬化物のガラス転移温度は、好ましくは260℃以下であり、より好ましくは240℃以下、さらに好ましくは230℃以下である。
また、脆性破壊を抑制する観点から、硬化膜の上記膜強度は、好ましくは150MPa以下であり、より好ましくは140MPa以下、さらに好ましくは130MPa以下、さらにより好ましくは120MPa以下である。
(条件2)
装置:引張・圧縮試験機
温度:常温(25℃)
引張速度:5mm/min
試験片サイズ:6.5mm×20mm×10μm厚
ここで、50~100℃の温度領域における硬化膜の線膨張係数は、具体的には、200℃、180分の条件で得られた硬化膜の試験片(幅3mm×長さ10mm×厚み10mm)に対して、熱機械分析装置(TMA)を用いて、開始温度30℃、測定温度範囲30~440℃、昇温速度10℃/minの条件下で測定を行った結果から算出される。
(成分(A))
成分(A)は、アルカリ可溶性樹脂であり、成分(a1):ビフェニルアラルキル型フェノール樹脂を含む。
また、溶剤溶解性の観点から、nは、好ましくは72以下であり、より好ましくは54以下、さらに好ましくは36以下である。
また、成分(a1)の重量平均分子量は、たとえば50000以下であってよく、溶剤溶解性の観点から、好ましくは20000以下であり、より好ましくは15000以下、さらに好ましくは10000以下、さらにより好ましくは8000以下である。
ここで、成分(a1)の重量平均分子量は、具体的には、ゲルパーミエーションクロマトグラフィー(GPC)により測定し、ポリスチレン標準物質を用いて作成した検量線をもとに計算される。
また、熱機械特性悪化の観点から、感光性樹脂組成物中の成分(a1)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは70質量部以下であり、より好ましくは60質量部以下、さらに好ましくは50質量部以下、さらにより好ましくは40質量部以下である。
成分(a2)として、具体的には、フェノールノボラック樹脂、クレゾールノボラック樹脂、ビスフェノールノボラック樹脂、フェノール-ビフェニルノボラック樹脂、アリル化ノボラック型フェノール樹脂、キシリレンノボラック型フェノール樹脂等のノボラック型フェノール樹脂;ノボラック型フェノール樹脂、レゾール型フェノール樹脂、クレゾールノボラック樹脂などのフェノール化合物とアルデヒド化合物との反応物;フェノールアラルキル樹脂などのフェノール化合物とジメタノール化合物との反応物からなる群から選択される1種または2種以上を含む。成分(a2)は好ましくはノボラック型フェノール樹脂である。
また、靭性悪化の観点から、感光性樹脂組成物中の成分(a2)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは70質量部以下であり、より好ましくは60質量部以下、さらに好ましくは50質量部以下、さらにより好ましくは40質量部以下である。
また、耐薬性や感光性を向上させる観点から、感光性樹脂組成物中の成分(A)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは95質量部以下であり、より好ましくは90質量部以下、さらに好ましくは85質量部以下、さらにより好ましくは70質量部以下である。
感光性樹脂組成物は、硬化膜の信頼性および耐薬性を向上する観点から、好ましくは成分(B):架橋剤をさらに含む。
成分(B)は、具体的には成分(A)と熱により反応可能な基を有する化合物であり、たとえば、1,2-ベンゼンジメタノール、1,3-ベンゼンジメタノール、1,4-ベンゼンジメタノール(パラキシレングリコール)、1,3,5-ベンゼントリメタノール、4,4-ビフェニルジメタノール、2,6-ピリジンジメタノール、2,6-ビス(ヒドロキシメチル)-p-クレゾール、4,4'-メチレンビス(2,6-ジアルコキシメチルフェノール)などのメチロール基を有する化合物;フロログルシドなどのフェノール類;1,4-ビス(メトキシメチル)ベンゼン、1,3-ビス(メトキシメチル)ベンゼン、4,4'-ビス(メトキシメチル)ビフェニル、3,4'-ビス(メトキシメチル)ビフェニル、3,3'-ビス(メトキシメチル)ビフェニル、2,6-ナフタレンジカルボン酸メチル、4,4'-メチレンビス(2,6-ジメトキシメチルフェノール)などのアルコキシメチル基を有する化合物;ヘキサメチロールメラミン、ヘキサブタノールメラミン等から代表されるメチロールメラミン化合物;ヘキサメトキシメラミンなどのアルコキシメラミン化合物;テトラメトキシメチルグリコールウリルなどのアルコキシメチルグリコールウリル化合物;メチロールベンゾグアナミン化合物、ジメチロールエチレンウレアなどのメチロールウレア化合物;アルキル化尿素樹脂;ジシアノアニリン、ジシアノフェノール、シアノフェニルスルホン酸などのシアノ化合物;1,4-フェニレンジイソシアナート、3,3'-ジメチルジフェニルメタン-4,4'-ジイソシアナートなどのイソシアナート化合物;エチレングリコールジグリシジルエーテル、ビスフェノールAジグリシジルエーテル、イソシアヌル酸トリグリシジル、フェノキシ型エポキシ樹脂、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ナフタレン系エポキシ樹脂、ビフェニル型エポキシ樹脂、フェノールノボラック樹脂型エポキシ樹脂などのエポキシ基含有化合物;N,N'-1,3-フェニレンジマレイミド、N,N'-メチレンジマレイミドなどのマレイミド化合物等が挙げられる。
また、低温硬化時の熱機械特性を保持する観点から、感光性樹脂組成物中の成分(b1)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは60質量部以下であり、より好ましくは50質量部以下、さらに好ましくは40質量部以下である。
また、硬化膜の耐薬性を高める観点から、感光性樹脂組成物中の成分(B)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは60質量部以下であり、より好ましくは50質量部以下、さらに好ましくは40質量部以下である。
感光性樹脂組成物は、硬化膜を安定的に形成する観点から、好ましくは成分(C):酸発生剤をさらに含む。成分(C)は、具体的には、熱エネルギーまたは光エネルギーを吸収することにより酸を発生する化合物である。
成分(c1)は、具体的には、カチオン部としてスルホニウムイオンを有するスルホニウム塩である。このとき、成分(c1)のアニオン部は、具体的には、ホウ化物イオン、アンチモンイオン、リンイオンまたはトリフルオロメタンスルホン酸イオン等のスルホン酸イオンであり、低温での反応速度を向上する観点から、好ましくはホウ化物イオンまたはアンチモンイオンであり、より好ましくはホウ化物イオンである。これらのアニオンは置換基を有してもよい。
R2は一価の有機基であり、低温での反応性を向上する観点から、好ましくは鎖状もしくは分岐鎖を有する炭化水素基または置換基を有してもよいベンジル基であり、より好ましくは炭素数1以上4以下のアルキル基で置換されてもよいベンジル基または炭素数1以上4以下のアルキル基であり、さらに好ましくはメチル基または芳香環部がメチル基で置換されてもよいベンジル基である。
R3は一価の有機基であり、低温での反応性を向上する観点から、好ましくは鎖状もしくは分岐鎖を有する炭化水素基であり、より好ましくは炭素数1以上4以下のアルキル基であり、より好ましくはメチル基である。
また、成分(c1)は、ジ(トリフルオロメタンスルホン)イミド (4,8-ジ-n-ブトキシ-1-ナフチル)ジブチルスルホニウム等の光酸発生剤であってもよい。
また、信頼性低下を抑制する観点から、感光性樹脂組成物中の成分(C)の含有量は、感光性樹脂組成物の全固形分を100質量部としたとき、好ましくは5質量%以下であり、より好ましくは4質量%以下、さらに好ましくは3質量%以下であり、また、たとえば0.5質量部以下、たとえば0.2質量部以下、またはたとえば0.1質量部以下であることも好ましい。
感光性樹脂組成物は、感光性樹脂組成物の硬化膜の基板への密着性を高める観点から、好ましくは成分(D):シランカップリング剤をさらに含む。シランカップリング剤としては、たとえば3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルメチルジエトキシシラン、3-グリシドキシプロピルトリエトキシシラン等のエポキシシラン;p-スチリルトリメトキシシラン等のスチリルシラン;3-メタクリロキシプロピルメチルジメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン;3-メタクリロキシプロピルメチルジエトキシシラン、3-メタクリロキシプロピルトリエトキシシラン、3-アクリロキシプロピルトリメトキシシラン等の(メタ)アクリルシラン;N-2-(アミノエチル)-3-アミノプロピルメチルジメトキシシラン、N-2-(アミノエチル)-3-アミノプロピルトリメトキシシラン、N-2-(アミノエチル)-3-アミノプロピルトリエトキシシラン、3-アミノプロピルトリメトキシシラン、3-アミノプロピルトリエトキシシラン、N-フェニル-3-アミノプロピルトリメトキシシラン等のアミノシラン;3-メルカプトプロピルメチルジメトキシシラン、3-メルカプトプロピルトリメトキシシラン等のメルカプトシラン;ビス(トリエトキシプロピル)テトラスルフィド等のスルフィド系シラン;3-イソシアネートプロピルトリエトキシシラン等のイソシアネートシランが挙げられる。同様の観点から、成分(D)は、好ましくはエポキシシランおよび(メタ)アクリルシランからなる群から選択される少なくとも1種であり、より好ましくは3-グリシドキシプロピルトリメトキシシランおよび3-メタクリロキシプロピルトリメトキシシランの少なくとも1つである。また、成分(D)の具体例として、アミノ基、アミド基およびウレア基からなる群から選択される1または2以上の基を有するケイ素化合物と酸二無水物または酸無水物とを反応することにより得られるケイ素化合物も挙げられる。
感光性樹脂組成物は、上述した各成分と、必要に応じてその他の成分と、を有機溶剤に混合して溶解することにより調製される。
また、本実施形態において、感光性樹脂組成物は、たとえば上述の成分および必要に応じその他の成分を有機溶剤に溶解し、ワニス状にして使用される。
また、感光性樹脂組成物は、成分(a1)および成分(a1)以外の成分(A)ならびに適宜その他の成分を事前に反応させて事前反応樹脂とした後、適宜さらに他の成分を加え、用いることもできる。
本実施形態における感光性樹脂組成物を硬化することにより樹脂膜が得られる。また、本実施形態における樹脂膜は、感光性樹脂組成物の乾燥膜または硬化膜である。すなわち、樹脂膜は、感光性樹脂組成物を乾燥または硬化させてなり、好ましくは感光性樹脂組成物を効果させてなる。
この樹脂膜は、たとえば永久膜、レジストなどの電子装置用の樹脂膜を形成するために用いられる。これらの中でも、低温で樹脂膜が得られる観点、優れた加工性を有する観点、および、信頼性に優れる樹脂膜が得られる観点から、永久膜を用いる用途に用いられることが好ましい。
本実施形態によれば、たとえば、感光性樹脂組成物を用いて得られる樹脂膜について、電子装置等を作製するために有用な樹脂膜とする上で求められる、加工性または信頼性に優れる膜を得ることも可能となる。
また、感光性樹脂組成物は、好ましくはバッファーコート膜または配線用絶縁膜に用いられる。
図1に示した電子装置100は、上記樹脂膜を備える電子装置とすることができる。具体的には、電子装置100のうち、パッシベーション膜32、絶縁層42および絶縁層44からなる群の1つ以上を、樹脂膜とすることができる。ここで、樹脂膜は、上述した永久膜であることが好ましい。
表1に記載の配合にて感光性樹脂組成物を調製した。具体的には、まず、表1に従い配合された各成分を、窒素雰囲気下で撹拌混合後、孔径0.2μmのポリエチレン製フィルターで濾過することにより、ワニス状の感光性樹脂組成物を得た。
表1に記載の各成分の詳細を以下に示す。また、表1において、各成分の含有量はアクティブ量である。
(a2)アルカリ可溶性樹脂1:ノボラック型フェノール樹脂、後述の製造例1で得られたフェノール樹脂
(a2)アルカリ可溶性樹脂2:クレゾール型フェノール樹脂、PR-56001、住友ベークライト社製
(a2)アルカリ可溶性樹脂3:アリル型フェノール樹脂、MEH-8000H、明和化成社製
(a2)アルカリ可溶性樹脂4:ザイロック型フェノール樹脂、MEH-7800SS、明和化成社製
(a1)アルカリ可溶性樹脂5:ビフェニルアラルキル型フェノール樹脂1、重量平均分子量600、MEH-7851SS、明和化成社製
(a1)アルカリ可溶性樹脂6:ビフェニルアラルキル型フェノール樹脂2、重量平均分子量4000、GPH-103、日本化薬社製
(a1)アルカリ可溶性樹脂7:後述の製造例2で得られた事前反応樹脂
(b1)架橋剤1:フェノキシ型エポキシ樹脂、YX-7105、三菱ケミカル社製
(b1)架橋剤2:ビスフェノールA型エポキシ樹脂、LX-01、大阪ソーダ社製
架橋剤3:アルキル化尿素樹脂、ニカラックMX-270 三和ケミカル社製
感光剤1:DS-427、ダイトーケミックス社製
溶媒1(樹脂中に含まれるもの):γ-ブチロラクトン
(D)密着助剤1:シランカップリング剤(3-グリシドキシプロピルトリメトキシシラン)、KBM-403、信越化学工業社製
密着助剤2:メルカプトトリアゾール
密着助剤3:シランカップリング剤(3-メタクリロキシプロピルトリメトキシシラン)、KBM-503、信越化学工業社製
(c1)酸発生剤1:スルホニウム塩1(4-アセトキシフェニルジメチルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート)、SI-B5、三新化学工業社製
(c1)酸発生剤2:スルホニウム塩2(4-アセトキシフェニルメチルベンジルスルホニウム テトラキス(ペンタフルオロフェニル)ボレート)、SI-B3A、三新化学工業社製
(c1)酸発生剤3:スルホニウム塩3(ジ(トリフルオロメタンスルホン)イミド (4,8-ジ-n-ブトキシ-1-ナフチル)ジブチルスルホニウム)、ZK-1232、DSP五協フード&ケミカル社製
界面活性剤1:フッ素系界面活性剤、FC4430、スリーエムジャパン社製
温度計、攪拌機、原料投入口および乾燥窒素ガス導入管を備えた4つ口のガラス製丸底フラスコに、乾燥窒素気流下、m-クレゾール64.9g(0.60モル)、p-クレゾール43.3g(0.40モル)、30質量%ホルムアルデヒド水溶液65.1g(ホルムアルデヒド0.65モル)、及び蓚酸二水和物0.63g(0.005モル)を仕込んだ後、油浴中に浸し、反応液を還流させながら100℃で4時間重縮合反応を行った。次いで、油浴の温度を200℃まで3時間かけて昇温した後に、フラスコ内の圧力を50mmHg以下まで減圧し、水分及び揮発分を除去した。その後、樹脂を室温まで冷却して、重量平均分子量3200のノボラック型フェノール樹脂であるフェノール樹脂(アルカリ可溶性樹脂1)を得た。
アルカリ可溶性樹脂1 50質量部、アルカリ可溶性樹脂6 50質量部、架橋剤1 30質量部、触媒としてテトラフェニルホスフィン 0.4質量部、溶媒1 45質量部仕込み、150℃になるまで加熱して2時間フラスコで攪拌した。常温迄冷却後にフラスコから生成物を取り出し、事前反応樹脂(アルカリ可溶性樹脂7)を得た。
(伸び率)
各例で得られた感光性樹脂組成物を200℃、180分の条件で硬化して硬化膜を形成した。得られた硬化膜から、6.5mm×20mm×10μm厚の試料を作製した。
試料の引張試験を、JIS K7161に基づき、オリエンテック社製引張試験機(テンシロンRTA-100)、23℃、試験速度5mm/minの条件で実施した。1つの試料について8回測定をおこない、その平均値(表1中「ave.」)を引張伸び率(%)とした。結果を表1に示す。
各例で得られた感光性樹脂組成物の硬化膜を200℃、180分の条件で作製し、得られた硬化膜から幅3mm×長さ10mm×厚み10mmの試験片を得た。
各例の試験片に対し、熱機械分析装置(TMA、Seiko Instruments Inc社製、SS6000)を用いて、開始温度30℃、測定温度範囲30~440℃、昇温速度10℃/minの条件下で測定をおこない、測定結果より、Tg(℃)および50~100℃の温度領域の線膨張係数(ppm/℃)を求めた。結果を表1に示す。
各例で得られた感光性樹脂組成物を200℃、180分の条件で硬化して硬化膜を形成し、得られた硬化膜から、6.5mm×20mm×10μm厚の試験片を作製した。得られた試験片の引張強度(MPa)を以下の条件で測定した。結果を表1に示す。
装置:オリエンテック社製引張試験機(テンシロンRTC-1210A)
温度:常温(25℃)
引張速度:5mm/min
実施例1~4および比較例1~5のそれぞれについて、得られたワニス状感光性樹脂組成物をシリコンウェハへ塗布し、100℃/4分の条件下で熱処理を施すことにより、膜厚約7.0μmの樹脂膜を得た。この樹脂膜にi線ステッパー(ニコン社製・NSR-4425i)を用いて最適量で露光を行い、現像液として2.38%のテトラメチルアンモニウムヒドロキシド水溶液を用いて、プリベーク後の膜厚と現像後の膜厚の差が0.3μmになるように現像時間を調節して2回パドル現像を行うことによって露光部を溶解除去した後、純水で10秒間リンスした。樹脂膜に形成されたパターンの開口部について、光学顕微鏡の倍率200倍で観察し、100μm□の開口部にて残渣発生の有無を確認した。
〇:残渣の大きさが5μm未満
×:残渣の大きさが5μm以上
評価結果を表1に示す。
低温硬化性の尺度として、各例で得られた組成物を用いて得られた硬化膜のフィルム破断性を評価した。
各例で得られた感光性樹脂組成物を、6インチシリコンウェハに硬化後の厚さが10μmとなるように塗布し、100℃/4分でプリベークをおこなった。次に、クリーンオーブンで酸素濃度を2000ppm以下に制御して、200℃、180分で硬化をおこなった。
得られた硬化膜から幅3mm×長さ10mm×厚み10mmの試験片を得た。試験片を半分に折り、その外観を観察し、以下の基準で評価した。
○:破断無し
×:一部破断あり又は完全破断
評価結果を表1に示す。
32 パッシベーション膜
34 最上層配線
40 再配線層
42、44 絶縁層
46 再配線
50 UBM層
52 バンプ
100 電子装置
Claims (9)
- 成分(A):アルカリ可溶性樹脂を含む感光性樹脂組成物であって、
前記成分(A)が、成分(a1):ビフェニルアラルキル型フェノール樹脂を含み、
以下の条件1にて測定される、当該感光性樹脂組成物の硬化膜の引張伸び率が、10%以上200%以下である、感光性樹脂組成物。
(条件1)
(i)当該感光性樹脂組成物を200℃、180分の条件で硬化して前記硬化膜を形成し、前記硬化膜から、6.5mm×20mm×10μm厚の試料を作製する。
(ii)JIS K7161に基づき、23℃、試験速度5mm/minの条件で前記試料の引張試験を実施して前記引張伸び率を求める。 - 前記成分(a1)の重量平均分子量が、2000以上50000以下である、請求項1に記載の感光性樹脂組成物。
- 成分(B):架橋剤
をさらに含み、
前記成分(B)が、成分(b1):2官能性のエポキシ樹脂を含む、請求項1または2に記載の感光性樹脂組成物。 - 成分(C):酸発生剤
をさらに含み、
前記成分(C)が、成分(c1):スルホニウム化合物またはその塩を含む、請求項1乃至3いずれか1項に記載の感光性樹脂組成物。 - 前記成分(A)が、成分(a2):前記成分(a1)以外のフェノール樹脂をさらに含む、請求項1乃至4いずれか1項に記載の感光性樹脂組成物。
- 成分(D):シランカップリング剤をさらに含む、請求項1乃至5いずれか1項に記載の感光性樹脂組成物。
- 当該感光性樹脂組成物の硬化物のガラス転移温度が150℃以上260℃以下である、請求項1乃至6いずれか1項に記載の感光性樹脂組成物。
- 以下の条件2で測定される前記硬化膜の膜強度が70MPa以上150MPa以下である、請求項1乃至7いずれか1項に記載の感光性樹脂組成物。
(条件2)
装置:引張・圧縮試験機
温度:常温
引張速度:5mm/min
試験片サイズ:6.5mm×20mm×10μm厚 - バッファーコート膜または配線用絶縁膜に用いられる、請求項1乃至8いずれか1項に記載の感光性樹脂組成物。
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JP2012123378A (ja) * | 2010-11-17 | 2012-06-28 | Asahi Kasei E-Materials Corp | 半導体素子表面保護膜又は層間絶縁膜用の感光性樹脂組成物 |
JP2019101052A (ja) * | 2017-11-28 | 2019-06-24 | 日立化成株式会社 | 感光性樹脂組成物及び回路基板の製造方法 |
JP2019109425A (ja) * | 2017-12-20 | 2019-07-04 | 住友ベークライト株式会社 | 永久膜形成用ネガ型感光性樹脂組成物、当該組成物の硬化膜および当該硬化膜を備える電気・電子機器 |
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JP2012123378A (ja) * | 2010-11-17 | 2012-06-28 | Asahi Kasei E-Materials Corp | 半導体素子表面保護膜又は層間絶縁膜用の感光性樹脂組成物 |
JP2019101052A (ja) * | 2017-11-28 | 2019-06-24 | 日立化成株式会社 | 感光性樹脂組成物及び回路基板の製造方法 |
JP2019109425A (ja) * | 2017-12-20 | 2019-07-04 | 住友ベークライト株式会社 | 永久膜形成用ネガ型感光性樹脂組成物、当該組成物の硬化膜および当該硬化膜を備える電気・電子機器 |
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