WO2021199744A1 - 計測装置、計測方法及びプログラム - Google Patents

計測装置、計測方法及びプログラム Download PDF

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Publication number
WO2021199744A1
WO2021199744A1 PCT/JP2021/005742 JP2021005742W WO2021199744A1 WO 2021199744 A1 WO2021199744 A1 WO 2021199744A1 JP 2021005742 W JP2021005742 W JP 2021005742W WO 2021199744 A1 WO2021199744 A1 WO 2021199744A1
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Prior art keywords
measurement
unit
light
distance
measuring
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PCT/JP2021/005742
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English (en)
French (fr)
Japanese (ja)
Inventor
洋介 村木
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XTIA Ltd
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XTIA Ltd
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Priority to US17/913,568 priority Critical patent/US20230107896A1/en
Priority to CN202180024721.4A priority patent/CN115335657A/zh
Priority to JP2022511640A priority patent/JPWO2021199744A1/ja
Priority to EP21778884.3A priority patent/EP4130652A4/en
Publication of WO2021199744A1 publication Critical patent/WO2021199744A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Definitions

  • the present invention relates to a measuring device, a measuring method and a program.
  • An optical measuring device is used to measure the surface shape of the object to be measured in a non-contact manner.
  • Patent Document 1 in order to measure a complicated surface shape in a non-contact manner, a triangular surveying method is used to move a laser light source in a direction perpendicular to the surface shape to measure the distance to each measurement point.
  • a technique for obtaining three-dimensional coordinate data of a surface shape is disclosed.
  • a measuring device includes a guide light source unit, an imaging unit, and a measuring unit.
  • the guide light source unit is configured to output guide light and continuously irradiate the measurement surfaces of a plurality of measurement reference points with the guide light.
  • the measurement reference point is one end of the distance between the two points to the measurement surface.
  • the imaging unit is configured to image a spot of guide light on the measurement surface of the first measurement reference point.
  • the measurement unit is configured to calculate the inclination of the measurement surface based on the shape of the captured spot, and based on this, calculate the depth of the second measurement reference point, which is the next round of the first measurement reference point. Will be done.
  • FIG. This is an example of the shape SP of the spot of the guide light.
  • FIGS. 4A to 4C are a plan view, a front view, and a side view, respectively.
  • 5A to 5C are a plan view, a front view, and a side view, respectively, which are aspects of an object to be measured having an inclination ⁇ x around the X-axis and an inclination ⁇ y around the Y-axis.
  • FIG. 1 shows the hardware composition of the measuring apparatus 1.
  • This is an example of the shape SP of the spot of the captured guide light.
  • This is an example of reference data relating to the spot shape SP.
  • This is a method of calculating the inclination of the measurement surface 7 based on the inverse transformation formula of the projective transformation.
  • It is an activity diagram of the method of calculating the inclination of the measurement surface 7 which concerns on embodiment.
  • It is an overall block diagram of the measuring apparatus 1 which concerns on 2nd Embodiment.
  • the program for realizing the software appearing in the present embodiment may be provided as a non-transitory recording medium (Non-Transity Computer-Readable Medium) that can be read by a computer, or may be downloaded from an external server. It may be provided as possible, or it may be provided so that the program is started by an external computer and the function is realized by the client terminal (so-called cloud computing).
  • Non-Transity Computer-Readable Medium Non-Transity Computer-Readable Medium
  • the "part" may include, for example, a combination of hardware resources implemented by a circuit in a broad sense and information processing of software that can be concretely realized by these hardware resources. ..
  • various information is handled in this embodiment, and these information include physical values of signal values such as voltage and current, and high and low signal values as a binary bit set composed of 0 or 1.
  • signal values such as voltage and current, and high and low signal values as a binary bit set composed of 0 or 1.
  • it is represented by quantum superposition (so-called qubit), and communication / calculation can be executed on a circuit in a broad sense.
  • a circuit in a broad sense is a circuit realized by at least appropriately combining a circuit (Circuit), circuits (Circuitry), a processor (Processor), a memory (Memory), and the like. That is, an integrated circuit for a specific application (Application Specific Integrated Circuit: ASIC), a programmable logic device (for example, a simple programmable logic device (Simple Programmable Logical Device: SPLD), a composite programmable logic device (Complex Program) It includes a programmable gate array (Field Programmable Gate Array: FPGA) and the like.
  • FIG. 1 is an overall configuration diagram of the measuring device 1.
  • the measuring device 1 includes a measuring unit 2, an information processing device 3, and a display device 8.
  • the measuring device 1 three-dimensionally measures the measuring surface 7 of the object to be measured in a non-contact manner.
  • the information processing device 3 is electrically connected to the measurement unit 2 so that the detection signal of the photodetector 24 can be input.
  • Each component will be described in more detail below.
  • the measurement unit 2 includes a guide light source unit 21, a measurement light source unit 22, an imaging unit 23, a light detection unit 24, and a beam splitter 25.
  • the measurement unit 2 is provided on an XY stage (not shown), a hand of a orthogonal coordinate type robot (not shown), or the like, and three-dimensionally measures an object to be measured in a non-contact manner.
  • the guide light source unit 21 outputs the guide light.
  • FIG. 2 is an example of the shape SP of the spot of the guide light.
  • the guide light source unit 21 continuously emits guide light having such a shape to the measurement surface 7 of a plurality of measurement reference points MB (MB1, MB2, ..., MBn-2, MBn-1, MBn). It is configured to irradiate.
  • FIG. 3 shows the measurement reference point MB and the measurement surface 7 of the object to be measured.
  • the measurement reference point MB is one end of the distance between the two points up to the measurement surface 7.
  • the measurement reference point MB is a point that serves as a reference for three-dimensionally measuring the object to be measured.
  • the measurement reference point MB is a coordinate point in the absolute coordinate system.
  • the guide light source unit 21 irradiates the measurement surface 7 of the object to be measured, which is located perpendicular to each measurement reference point MB, with the guide light.
  • the coordinate points in the height direction of the measurement reference point MB are the same and are set at positions that do not interfere with the object to be measured.
  • the arrangement of the measurement reference points MB may be on a straight line or in a grid pattern.
  • the guide light is visible light and is applied to the measurement surface 7 in a predetermined spot shape.
  • the spot shape may be circular or rectangular.
  • the guide light may be visible light, infrared light, or ultraviolet light. It suffices if the imaging unit 23, which will be described later, can detect the guide light.
  • the wavelength of the guide light can be 600 nm to 1200 nm.
  • the wavelength of the guide light is, for example, 600, 620, 640, 660, 680, 700, 720, 740, 760, 780, 800, 820, 840, 860, 880, 900, 920, 940, 960, It is 980, 1000, 1020, 1040, 1060, 1080, 1100, 1120, 1140, 1160, 1180, 1200 nm, and may be within the range between any two of the numerical values exemplified here.
  • the measurement light source unit 22 is configured to output the measurement light and irradiate the measurement surface 7 of the plurality of measurement reference points MB with the measurement light.
  • the measurement light may be visible light, infrared light, or ultraviolet light.
  • the measurement light is, for example, laser light, and more preferably, the measurement light source unit 22 is an optical comb light source.
  • the imaging unit 23 is configured to image a spot of guide light on the measurement surface 7 of the first measurement reference point MB1. That is, the imaging unit 23 detects the reflected component of the guide light reflected by the measurement surface 7 and images the spot. Therefore, the image pickup unit 23 may be, for example, an optical image sensor, and may be a CCD (Charge Couple Devices) image sensor or a CMOS (Completion Metal Oxide Semiconductor) image sensor. An imaging unit 23 having a sensor corresponding to the wavelength of the guide light is selected.
  • CCD Charge Couple Devices
  • CMOS Completion Metal Oxide Semiconductor
  • the light detection unit 24 includes a reference light detection unit 241 and a measurement light detection unit 242.
  • the reference light detection unit 241 detects a part of the measurement light reflected by the beam splitter 25, which will be described later, and extracts reference data.
  • the measurement light detection unit 242 is configured to detect a scattered light reflection component of the measurement light on the measurement surface 7.
  • the photodetector 24 is a measuring device that detects electromagnetic energy such as light and converts it into electricity.
  • the photodetector 24 is configured to be convertible into electrical data.
  • the beam splitter 25 is arranged in the measuring unit 2.
  • the beam splitter 25 reflects a part of the measurement light emitted from the measurement light source unit 22 toward the reference light detection unit 241.
  • the beam splitter 25 transmits the remaining light as measurement light, and reflects the measurement light that has entered from the reflection path toward the measurement light detection unit 242.
  • the measurement surface 7 is the surface of the object to be measured that is irradiated with the measurement light and the guide light.
  • the measuring device 1 three-dimensionally measures the distance from the measuring reference point MB to the measuring surface 7.
  • FIG. 4 is an aspect of an object to be measured having an inclination ⁇ y around the Y axis
  • FIGS. 4A to 4C are a plan view, a front view, and a side view, respectively.
  • 5A and 5C are aspects of an object to be measured having an inclination ⁇ x around the X-axis and an inclination ⁇ y around the Y-axis
  • FIGS. 5A to 5C are a plan view, a front view, and a side view, respectively.
  • Both figures show a state in which the measuring device 1 is measuring the first distance L from the measurement start point MS to the measuring surface 7.
  • the measuring device 1 calculates the inclination of the measuring surface 7 based on the method described later.
  • the inclination is not limited to the X-axis or the Y-axis, and both axes may be inclined at the same time. By calculating the inclination of the measurement surface 7, a highly accurate distance can be measured three-dimensionally.
  • FIG. 6 is a block diagram showing a hardware configuration of the measuring device 1.
  • the information processing device 3 is a component of the measuring device 1.
  • FIG. 7 is a block diagram showing a hardware configuration of the information processing device 3.
  • FIG. 8 is a functional block diagram showing a function carried out by the control unit 33 in the information processing device 3.
  • the information processing device 3 includes a communication unit 31, a storage unit 32, and a control unit 33 (acquisition unit 331, measurement unit 332, imaging control unit 333, mode switching unit 334, result storage unit 335, display control unit 336). These components are electrically connected to each other inside the information processing apparatus 3 via the communication bus 30. Hereinafter, each component will be further described.
  • the communication unit 31 performs wireless LAN network communication, mobile communication such as LTE / 3G, Bluetooth (registered trademark) communication, and the like as necessary. May be included. That is, it is more preferable to carry out as a set of these plurality of communication means.
  • the guide light source unit 21, the measurement light source unit 22, the imaging unit 23, and the light detection unit 24 are configured to be communicable according to a predetermined communication standard.
  • the communication unit 31 is configured to receive the data detected by the optical detection unit 24. Further, the communication unit 31 is configured so that the guide light source unit 21 and the measurement light source unit 22 can transmit data for outputting light. With such a configuration, the measuring device 1 can control the distance from the measuring reference point MB to the measuring surface 7 in three dimensions.
  • the storage unit 32 stores various information defined by the above description. This is, for example, as a storage device such as a solid state drive (SSD), or a random access memory (Random Access Memory:) that stores temporarily necessary information (arguments, arrays, etc.) related to program operations. It can be implemented as a memory such as RAM). Moreover, these combinations may be used.
  • the storage unit 32 stores the data detected by the imaging unit 23 and the light detection unit 24. Further, the storage unit 32 stores the acquisition program, the measurement program, the result storage program, and the display control program. In addition to this, the storage unit 32 stores various programs related to the information processing device 3 executed by the control unit 33.
  • Control unit 33 The control unit 33 processes and controls the entire operation related to the information processing device 3.
  • the control unit 33 is, for example, a central processing unit (CPU) (not shown).
  • the control unit 33 realizes various functions related to the information processing device 3 by reading a predetermined program stored in the storage unit 32. Specifically, the acquisition function, the measurement function, the result storage function, and the display control function are applicable. That is, the information processing by the software (stored in the storage unit 32) is specifically realized by the hardware (control unit 33), so that the acquisition unit 331, the measurement unit 332, the image pickup control unit 333, and the mode switching unit are realized. It can be executed as 334, result storage unit 335, and display control unit 336. Although it is described as a single control unit 33 in FIG.
  • control unit 33 it is not actually limited to this, and it may be implemented so as to have a plurality of control units 33 for each function. Moreover, it may be a combination thereof.
  • the acquisition unit 331, the measurement unit 332, the image pickup control unit 333, the mode switching unit 334, the result storage unit 335, and the display control unit 336 will be described in more detail.
  • the acquisition unit 331 In the acquisition unit 331, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the acquisition unit 331 is configured to acquire the electrical data detected by the imaging unit 23 and the light detection unit 24 via the communication unit 31.
  • the measurement unit 332 calculates the inclination of the measurement surface 7 based on the shape SP of the spot of the guide light imaged by the image pickup unit 23.
  • the shape SP of the spot is square, but it may be circular or rectangular, and is not particularly limited as long as it has a certain area.
  • FIG. 9 is an example of the shape SP of the spot of the captured guide light. Since the shape of the object to be measured is complicated and has irregularities and steps, the shape SP of the spot of the guide light varies as shown in FIG.
  • the spot shape SP shown in FIG. 9 is a shape imaged on a measurement surface 7 tilted 30 ° around the X-axis and 30 ° around the Y-axis.
  • the spot shape SP1 is a shape imaged on a smooth measurement surface 7.
  • the spot shape SP2 is a shape when the distance from the imaging unit 23 to the measurement surface 7 is large.
  • the spot shape SP3 is a shape when the measurement surface 7 has a convex portion.
  • the spot shape SP4 is a shape when the measurement surface 7 has a recess.
  • the spot shape SP5 and the spot shape SP6 are shapes when the measurement surface 7 has a discontinuous surface.
  • the measurement unit 332 can calculate the inclination of the measurement surface 7 in the X direction and the Y direction in the three-dimensional space based on the shape SP of such a complicated spot.
  • the storage unit 32 of the measuring device 1 stores reference data related to the shape SP of the spot of the guide light.
  • the reference data is data in which the gradient with respect to the plane perpendicular to the irradiation direction of the guide light and the shape SP of the spot in each gradient are associated with each other.
  • FIG. 10 is an example of reference data relating to the spot shape SP.
  • the reference data is a black-and-white image in which the spot shape SP is rotated around the X-axis and the Y-axis in advance.
  • the measurement unit 332 preprocesses the shape SP of the captured spot, binarizes it with a predetermined threshold value, converts it into a black-and-white image, performs pattern matching with each image of the reference data, and obtains the reference data having the highest degree of matching. Based on this, the inclination of the measurement surface 7 is calculated.
  • reference data of only the fourth quadrant of the plane coordinates is shown, but reference data of the first quadrant, the second quadrant, and the third quadrant may be prepared. Further, the reference data may be prepared by finely chopping the rotation angles around the X-axis and the Y-axis. Further, in performing this processing, if pattern matching is performed by appropriately changing the size of the shape SP of the imaged spot, a more accurate result can be obtained.
  • the reference data related to the spot shape SP of the guide light may be a trained model in which the correlation between the gradient and the spot shape SP at each gradient is learned.
  • the trained model is created by associating each gradient created by rotating the spot shape SP around the X-axis and the Y-axis with reference data related to the spot shape SP.
  • the trained model is stored in the storage unit 32 in advance. As shown in FIG. 10, a trained model can be created by rotating many guide light spot shape SPs around the X-axis and the Y-axis in various ways.
  • the measurement unit 332 is configured to calculate the inclination of the measurement surface 7 based on the trained model. Therefore, when the shape SP of the spot of the guide light imaged by the imaging unit 23 is input to the trained model, the measuring unit 332 identifies the reference data having the strongest correlation and calculates the inclination of the measuring surface 7. By creating a trained model using a large amount of reference data, the measurement unit 332 can accurately calculate the inclination of the measurement surface 7.
  • the measuring unit 332 may calculate the inclination of the measuring surface 7 by using the geometric transformation.
  • a projective transformation which is one of the geometric transformations, is used.
  • Arbitrary coordinates (x, y) are moved to (x', y') by the projective transformation of Equation 1.
  • a, b, c, d, e, f, g, and h are parameters.
  • FIG. 11 is a method of calculating the inclination of the measurement surface 7 based on the inverse transformation formula of the projective transformation. As shown in FIG. 11, the vertices A', B', C', and D'of the imaged spot shape SP8 are inversely transformed with slopes ⁇ x and ⁇ y.
  • the slopes ⁇ x and ⁇ y are changed until the lengths of the sides of AB, BC, CD and DA obtained from the vertices A, B, C and D of the inversely transformed spot shape SP7 are equal. Continue repeating the inverse transformation. When the lengths of the sides are substantially the same, the inverse transformation is stopped and ⁇ x and ⁇ y are the slopes of the measurement surface 7.
  • the measurement unit 332 is configured to calculate the depth of the second measurement reference point MB2, which corresponds to the next round of the first measurement reference point MB1, based on the calculated inclination of the measurement surface 7. Based on this depth, the measurement unit 332 determines whether or not the measurement light source unit 22 is within the working distance at the next measurement reference point MB. When within the working distance, the measurement light source unit 22 does not move in the height direction. When it is outside the working distance, the measurement light source unit 22 moves to the measurement start point MS so as to be inside the working distance. If the shape of the object to be measured is complicated and the distance from the measurement reference point MB to the measurement surface 7 deviates from the focal length, highly accurate measurement cannot be performed.
  • the depth of the measurement surface 7 is calculated based on the inclination of the measurement surface 7, and the measurement light source unit 22 is moved to the measurement start point MS so as to be within the working distance to perform highly accurate measurement. Can be done. Since the measurement start point MS is located within the working distance, it is located both above and below in relation to the measurement reference point MB. In FIGS. 3 to 5, the tip of the measurement unit 2 is set to be the measurement reference point MB and the measurement start point MS. As long as the measurement light source unit 22 is within the working distance, there is no problem.
  • the measurement unit 332 continuously measures the first distance L, which is the distance from the measurement start point MS to the reflection point of the measurement light on the measurement surface 7, based on the scattered light reflection component of the measurement light reflected by the measurement surface 7. do.
  • the measurement start point MS is located within the working distance.
  • the first distance L is a distance physically measured by the measuring device 1.
  • the measurement unit 332 calculates the measurement distance by adding the first distance L and the second distance M, which is the distance from the measurement reference point MB to the measurement start point MS.
  • the second distance M is a distance obtained by moving the measurement light source unit 22 so as to be within the working distance in advance, is a distance from the measurement reference point MB to the measurement start point MS, and is a value calculated by the measurement unit 332. be.
  • the second distance M varies depending on the depth of the measurement surface 7.
  • the measuring device 1 is configured to measure the shape of the measuring surface 7 in this way.
  • the distance physically measured by the measuring device 1 is the distance from the measuring light source unit 22 to the measuring surface 7, but may be the distance from the tip of the measuring unit 2.
  • the measured distance may be converted based on the design data of the measuring device 1, and the reference position for measurement is not specified.
  • the measurement unit 332 causes the measurement light source unit 22 to output light, and measures the round-trip time ⁇ of the light from the reference signal data detected by the reference light detection unit 241 and the measurement signal data detected by the measurement light detection unit 242.
  • the first distance L to the measurement surface 7 of the object to be measured is obtained as in Equation 2.
  • n is the average refractive index of the optical path
  • c is the speed of light in vacuum.
  • the distance can be measured by interference measurement by the optical comb.
  • the distance is measured by providing a bandpass filter (not shown) in the measurement unit 2, cutting out a high frequency component, and obtaining the electrical phase difference of the mode interval frequency.
  • the image pickup control unit 333 sets the position of the image pickup unit 23 or its focal position so that the depth from the measurement reference point MB calculated in the previous measurement to the measurement surface 7 falls within the depth of field of the image pickup unit 23. It is configured to adjust. At the measurement reference point MB, the image pickup control unit 333 adjusts the position of the image pickup unit 23 so that the spot shape SP of the guide light is always in focus. In the adjustment, the position of the imaging unit 23 or the focal position thereof may be directly adjusted, or the position of the measuring unit 2 having the imaging unit 23 may be adjusted. The adjustment method is not limited.
  • the image pickup control unit 333 is configured to move the measurement light source unit 22 from the measurement reference point MB to the measurement start point MS based on the adjusted position of the image pickup unit 23 or its focal position. That is, when the measurement light source unit 22 is out of the working distance, the image pickup control unit 333 moves the measurement light source unit 22 in the height direction to the measurement start point MS so as to focus on the measurement surface 7. If it is already within the working distance, the measurement light source unit 22 does not move. In this way, stable measurement is possible by moving the measurement light source unit 22 so as to be within the working distance at the measurement reference point MB. Since the inclination of the measurement surface 7 is calculated each time the measurement is performed, the depth from the next measurement reference point MB to the measurement surface 7 can be calculated.
  • the image pickup control unit 333 adjusts the position of the image pickup unit 23 so that the shape SP of the spot of the guide light is in focus, and further, the measurement light source unit 22 so that the measurement light source unit 22 is within the working distance. To move. Upon movement, only the measurement light source unit 22 may be directly moved, or the measurement unit 2 having the measurement light source unit 22 may be moved. The method of movement is not limited.
  • the mode switching unit 334 is configured to switch between the guide light mode and the measurement light mode.
  • the guide light mode is a mode in which the guide light source unit 21 outputs the guide light
  • the measurement light mode is a mode in which the measurement light source unit 22 outputs the measurement light.
  • the image pickup control unit 333 reads these data from the storage unit 32, and based on these data, moves the measurement light source unit 22 so that the measurement light source unit 22 enters the working distance. Then, the accurate distance from the measurement start point MS is measured.
  • result storage unit 335) In the result storage unit 335, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the result storage unit 335 measures the coordinate points of each measurement reference point MB, the inclination of the measurement surface 7 at each measurement reference point MB calculated in the guide light mode, the depth from each measurement reference point MB to the measurement surface 7, and the like.
  • the data related to the above is stored in the storage unit 32.
  • Display control unit 336 In the display control unit 336, information processing by software (stored in the storage unit 32) is specifically realized by hardware (control unit 33).
  • the display control unit 336 measures the coordinate points of each measurement reference point MB, the inclination of the measurement surface 7 at each measurement reference point MB, the depth from each measurement reference point MB to the measurement surface 7, etc. during or after the measurement.
  • the data related to the above is displayed on the display device 8. Since these data display the measurement status at the production site in real time, it is possible to quickly grasp and identify the problem of the measurement surface 7 of the object to be measured. As a result, it is useful for quick measures.
  • the measurement method includes a guide light output step, an imaging step, a tilt measurement step, an imaging control step, a measurement light control step, a measurement light output step, a measurement light detection step, and a distance measurement step.
  • the guide light output step the guide light is output. This is continuously irradiated to the measurement surfaces 7 of the plurality of measurement reference points MB.
  • the measurement reference point MB is one end of the distance between the two points up to the measurement surface 7.
  • the imaging step the spot of the guide light on the measurement surface 7 of the first measurement reference point MB1 is imaged.
  • the inclination measurement step the inclination of the measurement surface 7 is calculated based on the shape SP of the captured spot. Based on this, the depth of the second measurement reference point MB2, which corresponds to the next round of the first measurement reference point MB1, is calculated.
  • the imaging control step the position of the imaging unit 23 or the focal position thereof is adjusted so that the depth is within the depth of field of the imaging unit 23.
  • the measurement light control step the measurement light source unit 22 is moved from the measurement reference point MB to the measurement start point MS based on the position of the imaging unit 23 or the focal position thereof.
  • the measurement light output step the measurement light is output. This is irradiated to the measurement surface 7.
  • the scattered light reflection component of the measurement light on the measurement surface 7 is detected.
  • the first distance L which is the distance from the measurement start point MS to the reflection point of the measurement light on the measurement surface 7, is continuously measured based on the scattered light reflection component, and the first distance L is measured.
  • the measurement distance is calculated by adding the second distance M, which is the distance from the reference point MB to the measurement start point MS. As a result, the shape of the measuring surface 7 is measured. Specifically, this measurement method will be described in two parts.
  • FIG. 12 is an activity diagram of a method for calculating the inclination of the measurement surface 7 according to the embodiment. Hereinafter, description will be given with reference to this figure.
  • the user switches to the guide light mode with the mode switching unit 334.
  • the guide light source unit 21 outputs the guide light.
  • the measurement unit 332 confirms whether or not it is the last measurement reference point MB.
  • the guide light source unit 21 irradiates the measurement surface 7 with the guide light. In the last case, activity A14 is executed.
  • the measurement unit 332 confirms whether or not it is the first measurement reference point MB.
  • the imaging control unit 333 reads the depth from the measurement reference point MB to the measurement surface 7 from the storage unit 32.
  • the image pickup control unit 333 adjusts the image pickup unit 23 so as to be within the depth of field based on the depth read from the storage unit 32.
  • the imaging unit 23 moves within the depth of field.
  • the imaging unit 23 images the shape SP of the spot of the guide light.
  • the acquisition unit 331 acquires the image data of the shape SP of the spot of the guide light.
  • the measurement unit 332 calculates the inclination of the measurement surface 7 based on the image data of the shape SP of the spot of the guide light.
  • the measurement unit 332 calculates the depth to the measurement surface 7 at the next measurement reference point MB based on the inclination of the measurement surface 7.
  • the result storage unit 335 stores the inclination of the measurement surface 7 and the depth to the measurement surface 7 at the next measurement reference point MB in the storage unit 32.
  • the guide light source unit 21 stops the output of the guide light and ends the process.
  • FIG. 13 is an activity diagram of a method for measuring the distance to the measurement surface 7 according to the embodiment.
  • the user switches to the measurement light mode with the mode switching unit 334.
  • the measurement unit 332 confirms whether or not it is the last measurement reference point MB.
  • the image pickup control unit 333 confirms whether or not it is the first measurement reference point MB.
  • the image pickup control unit 333 reads the depth of the measurement reference point MB from the storage unit 32.
  • the image pickup control unit 333 calculates the measurement start point MS based on the depth of the measurement reference point MB so that the measurement light source unit 22 enters the working distance.
  • the measurement light source unit 22 moves to the measurement start point MS.
  • the measurement light source unit 22 outputs the measurement light.
  • the reference light detection unit 241 detects the reference light.
  • the measurement light detection unit 242 detects the measurement light.
  • the acquisition unit 331 acquires the reference signal data and the measurement signal data.
  • the measurement unit 332 measures the first distance L from the measurement start point MS to the measurement surface 7 based on the reference signal data and the measurement signal data.
  • the measurement unit 332 adds the first distance L and the second distance M from the measurement reference point MB to the measurement start point MS, and measures the distance from the measurement reference point MB to the measurement surface 7.
  • the result storage unit 335 stores the distance from the measurement reference point MB to the measurement surface 7 in the storage unit 32.
  • the measurement light source unit 22 stops the output of the measurement light.
  • FIG. 14 is an overall configuration diagram of the measuring device 1 according to the second embodiment.
  • FIG. 15 is a block diagram showing a hardware configuration of the measuring device 1 according to the second embodiment.
  • the measuring device 1 includes a measuring unit 2, an information processing device 3, and a display device 8 as in the first embodiment.
  • the measuring device 1 three-dimensionally measures the measuring surface 7 of the object to be measured in a non-contact manner.
  • the information processing device 3 is electrically connected to the measurement unit 2 so that the detection signals of the photodetector 24 and the illuminometer 27 can be input.
  • the components added to the measurement unit 2 and the information processing device 3 described in the first embodiment will be described in more detail.
  • the measurement unit 2 includes a guide light source unit 21, a measurement light source unit 22, an imaging unit 23, a light detection unit 24, a beam splitter 25, a second beam splitter 26, and an illuminance meter 27.
  • the measurement unit 2 is provided on an XY stage (not shown), a hand of a orthogonal coordinate type robot (not shown), or the like, and three-dimensionally measures an object to be measured in a non-contact manner.
  • the second beam splitter 26 and the illuminometer 27 added to the second embodiment will be described.
  • the second beam splitter 26 is arranged in the measuring unit 2.
  • the second beam splitter 26 transmits the measurement light emitted from the measurement light source unit 22 toward the measurement surface 7, and a part of the scattered light reflected by the measurement surface 7 entering from the reflection path is described later at a predetermined division ratio. It is reflected toward the ilometer 27 and the remaining scattered light is transmitted toward the beam splitter 25.
  • the illuminometer 27 also called a photometer, is a photometer measuring device for measuring illuminance and irradiance, and measures the intensity of light such as scattered light, absorption, and fluorescence.
  • the illuminometer 27 is attached to the measuring unit 2 and measures the intensity of a part of the scattered light reflected by the measuring surface 7.
  • FIG. 16 is a functional block diagram showing a function played by the control unit 33 in the information processing device 3 according to the second embodiment.
  • the information processing device 3 includes a communication unit 31, a storage unit 32, a control unit 33 (acquisition unit 331, measurement unit 332, imaging control unit 333, mode switching unit 334, result storage unit 335, display control unit 336, and brightness setting. It has a unit 337), and these components are electrically connected to each other via a communication bus 30 inside the information processing device 3.
  • the luminous intensity setting unit 337 added to the components of the first embodiment will be further described.
  • the luminous intensity setting unit 337 may set the luminous intensity of the measurement light output from the measurement light source unit 22 based on the inclination of the measurement surface 7.
  • the inclination of the measurement surface 7 is the inclination ⁇ x around the X axis and the inclination ⁇ y around the Y axis measured by the measurement unit 332 as described above.
  • the luminous intensity setting unit 337 is based on the calculation results of both inclinations such as the average value of the inclinations of each axis, ⁇ x and ⁇ y, the minimum value of the two angles, and the maximum value of the two angles. Set the luminous intensity of the measurement light.
  • the luminous intensity setting unit 337 sets the luminous intensity of the measurement light to be small.
  • the values of the calculation results of both inclinations are small, the brightness of the scattered light reflected by the measurement surface 7 is small, so that the luminous intensity setting unit 337 sets the luminous intensity of the measurement light to be large.
  • FIG. 17 is a schematic view showing an example of a two-dimensional look-up table TL used for setting the luminous intensity of the measurement light according to the second embodiment.
  • the luminous intensity setting unit 337 may set the luminous intensity of the measured light using the two-dimensional look-up table TL. That is, the horizontal axis of the two-dimensional look-up table TL is the slope ⁇ x around the X axis, the vertical axis is the slope ⁇ y around the Y axis, and the luminous intensity value of the measurement light is set in each array.
  • the value is a ratio of the measurement light having the inclination ⁇ x around the X-axis and the inclination ⁇ y around the Y-axis of the measurement surface 7 to the amount of light of 10 ° or less.
  • the luminosity setting unit 337 has a two-dimensional look from the inclination ⁇ x around the X-axis and the inclination ⁇ y around the Y-axis on the horizontal axis.
  • the array of the uptable TL is specified, and the luminosity of the measurement light is set using the value read from the storage unit 32.
  • the set values of the inclinations of the vertical axis and the horizontal axis of the lookup table TL and the values of each array are determined by the measurement conditions such as the wavelength of the measurement light, the material of the measurement surface 7, and the state of the surface treatment.
  • the luminous intensity setting unit 337 may set the luminous intensity of the measurement light output from the measurement light source unit 22 based on the scattered light reflected by the measurement surface 7.
  • the luminous intensity setting unit 337 sets the luminous intensity of the measurement light output from the measurement light source unit 22 based on the intensity of the scattered light.
  • the illuminometer 27 for measuring the intensity of scattered light is attached to the measuring unit 2.
  • the second beam splitter 26 arranged in the measuring unit 2 reflects a part of the scattered light reflected by the measuring surface 7 toward the illuminometer 27. With such a configuration, the illuminometer 27 measures the intensity of the scattered light reflected by the measurement surface 7.
  • the luminous intensity setting unit 337 sets the luminous intensity of the measured light output from the measurement light source unit 22 to be large.
  • the luminous intensity setting unit 337 sets the luminous intensity of the measurement light output from the measurement light source unit 22 to be small.
  • the measuring device 1 may measure the intensity of the scattered light based on the electric signal converted from the measuring light detection unit 242. Further, the intensity of the scattered light may be measured based on the spot of the guide light on the measurement surface 7 imaged by the imaging unit 23. For example, specifically, the intensity of scattered light is measured by performing image processing on a luminance image of the captured spot.
  • the luminous intensity setting unit 337 measures the luminous intensity of the measured light output from the measuring light source unit 22 based on the intensity of the scattered light reflected by the measuring surface 7, so that stable measurement can always be performed and an appropriate amount of light is obtained.
  • the measurement light can be output from the measurement light source unit 22.
  • a mechanism that sets the amount of measured light based on the intensity of scattered light realizes stability and energy saving in three-dimensional measurement.
  • the image pickup control unit 333 adjusts the image pickup unit 23 so as to enter the depth of field at the next measurement reference point MB during measurement, and also starts measuring the measurement light source unit 22 so as to be within the working distance. You may move it to a point. After the movement, the measuring unit 332 measures the distance to the measuring surface 7.
  • the shape SP of the spot of the guide light is not limited to the square of the embodiment. The spot shape SP may be circular or another rectangle.
  • the distance measurement is not limited to the above-mentioned method, and an optical modulation method, a matching method, an optical comb interference measurement method, or the like may be appropriately adopted.
  • the measurement light may have a function of a guide light. That is, the measuring device 1 may calculate the inclination and depth of the measuring surface 7 using the light output from one light source, and further measure the distance to the measuring surface 7.
  • a program may be provided that causes a computer to execute the above-mentioned measurement method.
  • the measuring device further includes a measurement light source unit and a measurement light detection unit, and the measurement light source unit is configured to output measurement light and irradiate the measurement surface with the measurement light.
  • the measurement unit is configured to detect the scattered light reflection component of the measurement light on the measurement surface, and the measurement unit is based on the scattered light reflection component from the measurement start point to the reflection point of the measurement light on the measurement surface.
  • the first distance which is the distance to, is continuously measured, and the first distance and the second distance, which is the distance from the measurement reference point to the measurement start point, are added to calculate the measurement distance.
  • a device configured to measure the shape of the measurement surface.
  • the measuring device further includes an imaging control unit, and the imaging control unit adjusts the position of the imaging unit or its focal position so that the depth is within the depth of field of the imaging unit. What is composed.
  • the imaging control unit is configured to move the measurement light source unit from the measurement reference point to the measurement start point based on the position of the imaging unit or the focal position thereof.
  • the measuring device further includes a mode switching unit, and the mode switching unit is configured to switch between a guide light mode and a measurement light mode.
  • the guide light mode the guide light source unit is the guide. It is a mode for outputting light
  • the measurement light mode is a mode in which the measurement light source unit outputs the measurement light.
  • the measuring device further includes a storage unit, which stores reference data, wherein the reference data includes a gradient with respect to a plane perpendicular to the irradiation direction of the guide light, and the gradient at each gradient. Data associated with the shape of the spot, the measuring unit is configured to calculate the inclination of the measuring surface based on the reference data.
  • the reference data is a trained model in which the correlation between the gradient and the shape of the spot in each gradient is learned, and the measuring unit is based on the trained model and the measuring surface. A thing that is configured to calculate the slope of.
  • the measuring light source unit is an optical comb light source.
  • the shape of the spot is rectangular.
  • the measuring device further includes a luminous intensity setting unit, which measures the luminous intensity of the measured light output from the measuring light source unit based on the inclination of the measuring surface or the scattered light reflected by the measuring surface. Things to set.
  • the measurement method includes a guide light output step, an imaging step, a tilt measurement step, an imaging control step, a measurement light control step, a measurement light output step, a measurement light detection step, and a distance measurement step.
  • guide light output step guide light is output and continuously irradiated to the measurement surfaces of a plurality of measurement reference points, where the measurement reference points are between two points up to the measurement surface.
  • the imaging step a spot of the guide light on the measurement surface of the first measurement reference point is imaged, and in the tilt measurement step, the measurement surface is based on the shape of the imaged spot.
  • the inclination is calculated, and based on this, the depth of the second measurement reference point, which is the next round of the first measurement reference point, is calculated.
  • the depth is the depth of view of the imaging unit.
  • the position of the imaging unit or its focal position is adjusted so as to be inside, and in the measurement light control step, the measurement light source unit is started to measure from the measurement reference point based on the position of the imaging unit or its focal position.
  • the measurement light output step the measurement light is output and irradiated to the measurement surface
  • the measurement light detection step the scattered light reflection component of the measurement light on the measurement surface is detected.
  • the first distance which is the distance from the measurement start point to the reflection point of the measurement light on the measurement surface
  • the second distance which is the distance from the measurement reference point to the measurement start point
  • Measuring device 2 Measuring unit 21: Guide light source unit 22: Measuring light source unit 23: Imaging unit 24: Light detection unit 241: Reference light detection unit 242: Measurement light detection unit 25: Beam splitter 26: Second beam splitter 27 : Illuminance meter 3: Information processing device 30: Communication bus 31: Communication unit 32: Storage unit 33: Control unit 331: Acquisition unit 332: Measurement unit 333: Imaging control unit 334: Mode switching unit 335: Result storage unit 336: Display Control unit 337: Luminous intensity setting unit 7: Measurement surface 8: Display device L: First distance M: Second distance MB: Measurement reference point MB1: First measurement reference point MB2: Second measurement reference point MB3: Third measurement reference Point MBn-2: N-2nd measurement reference point MBn-1: n-1th measurement reference point MBn: nth measurement reference point MS: Measurement start point SP: Spot shape SP1: Spot shape SP2: Spot shape SP3: Spot shape SP4: Spot shape

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2021/005742 2020-04-03 2021-02-16 計測装置、計測方法及びプログラム Ceased WO2021199744A1 (ja)

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CN202180024721.4A CN115335657A (zh) 2020-04-03 2021-02-16 测量装置、测量方法以及程序
JP2022511640A JPWO2021199744A1 (enExample) 2020-04-03 2021-02-16
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JPWO2021199744A1 (enExample) 2021-10-07

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