CN115335657A - 测量装置、测量方法以及程序 - Google Patents

测量装置、测量方法以及程序 Download PDF

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Publication number
CN115335657A
CN115335657A CN202180024721.4A CN202180024721A CN115335657A CN 115335657 A CN115335657 A CN 115335657A CN 202180024721 A CN202180024721 A CN 202180024721A CN 115335657 A CN115335657 A CN 115335657A
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China
Prior art keywords
measurement
light
measuring
unit
distance
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CN202180024721.4A
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English (en)
Chinese (zh)
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村木洋介
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XTIA Ltd
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XTIA Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/22Measuring arrangements characterised by the use of optical techniques for measuring depth
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202180024721.4A 2020-04-03 2021-02-16 测量装置、测量方法以及程序 Pending CN115335657A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020067655 2020-04-03
JP2020-067655 2020-04-03
PCT/JP2021/005742 WO2021199744A1 (ja) 2020-04-03 2021-02-16 計測装置、計測方法及びプログラム

Publications (1)

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CN115335657A true CN115335657A (zh) 2022-11-11

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CN202180024721.4A Pending CN115335657A (zh) 2020-04-03 2021-02-16 测量装置、测量方法以及程序

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US (1) US20230107896A1 (enExample)
EP (1) EP4130652A4 (enExample)
JP (1) JPWO2021199744A1 (enExample)
CN (1) CN115335657A (enExample)
WO (1) WO2021199744A1 (enExample)

Citations (9)

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JPH05272969A (ja) * 1992-03-26 1993-10-22 Fuji Electric Co Ltd 測距装置
JP2003285248A (ja) * 2002-03-27 2003-10-07 Sunx Ltd ワーク姿勢制御装置及びワーク姿勢制御方法、傾斜測定装置及びその測定動作方法
US20070081168A1 (en) * 2005-08-23 2007-04-12 University Of Washington - Uw Techtransfer Distance determination in a scanned beam image capture device
CN201607216U (zh) * 2010-02-02 2010-10-13 科瑞自动化技术(深圳)有限公司 同时测量待测面的角度和高度的装置
JP2014126381A (ja) * 2012-12-25 2014-07-07 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、及び形状測定プログラム
TW201723428A (zh) * 2015-12-30 2017-07-01 國立中正大學 傾斜角度與距離量測方法
CN107525463A (zh) * 2016-06-17 2017-12-29 株式会社三丰 光干涉测定装置和光干涉测定方法
CN108375349A (zh) * 2017-01-31 2018-08-07 欧姆龙株式会社 倾斜测定装置
US20190323829A1 (en) * 2018-04-20 2019-10-24 Keyence Corporation Shape Measuring Device And Shape Measuring Method

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Publication number Priority date Publication date Assignee Title
JPH05231832A (ja) 1992-02-24 1993-09-07 I N R Kenkyusho:Kk 三次元形状測定方法及び装置
JP2003202213A (ja) * 2001-10-29 2003-07-18 Mitsutoyo Corp 姿勢検出センサ、加速度センサ及びそれを用いた移動経路計測装置
US7023536B2 (en) * 2004-03-08 2006-04-04 Electronic Scripting Products, Inc. Apparatus and method for determining orientation parameters of an elongate object
JP2009186404A (ja) * 2008-02-08 2009-08-20 Dainippon Screen Mfg Co Ltd 画像情報生成装置及び画像情報生成方法。
US11880178B1 (en) * 2010-11-16 2024-01-23 Ectoscan Systems, Llc Surface data, acquisition, storage, and assessment system
JP2019523393A (ja) * 2016-05-23 2019-08-22 コンティンユーズ バイオメトリクス リミテッドContinUse Biometrics Ltd. 物体の深さ特性評価に使用するシステム及び方法
JP7102302B2 (ja) * 2018-09-10 2022-07-19 京セラ株式会社 電磁波検出装置の調整方法
US12422251B2 (en) * 2020-01-14 2025-09-23 Pxe Computational Imaging Ltd. System and method for optical imaging and measurement of objects

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05272969A (ja) * 1992-03-26 1993-10-22 Fuji Electric Co Ltd 測距装置
JP2003285248A (ja) * 2002-03-27 2003-10-07 Sunx Ltd ワーク姿勢制御装置及びワーク姿勢制御方法、傾斜測定装置及びその測定動作方法
US20070081168A1 (en) * 2005-08-23 2007-04-12 University Of Washington - Uw Techtransfer Distance determination in a scanned beam image capture device
CN201607216U (zh) * 2010-02-02 2010-10-13 科瑞自动化技术(深圳)有限公司 同时测量待测面的角度和高度的装置
JP2014126381A (ja) * 2012-12-25 2014-07-07 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、及び形状測定プログラム
TW201723428A (zh) * 2015-12-30 2017-07-01 國立中正大學 傾斜角度與距離量測方法
CN107525463A (zh) * 2016-06-17 2017-12-29 株式会社三丰 光干涉测定装置和光干涉测定方法
CN108375349A (zh) * 2017-01-31 2018-08-07 欧姆龙株式会社 倾斜测定装置
US20190323829A1 (en) * 2018-04-20 2019-10-24 Keyence Corporation Shape Measuring Device And Shape Measuring Method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
浦昭邦 等: "《光电测试技术(第2版)》", 31 December 2009, 机械工业出版社, pages: 285 *

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EP4130652A4 (en) 2023-10-04
JPWO2021199744A1 (enExample) 2021-10-07
WO2021199744A1 (ja) 2021-10-07
EP4130652A1 (en) 2023-02-08
US20230107896A1 (en) 2023-04-06

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