WO2021193739A1 - セラミック板の製造方法、及び、切削加工機の使用方法 - Google Patents

セラミック板の製造方法、及び、切削加工機の使用方法 Download PDF

Info

Publication number
WO2021193739A1
WO2021193739A1 PCT/JP2021/012300 JP2021012300W WO2021193739A1 WO 2021193739 A1 WO2021193739 A1 WO 2021193739A1 JP 2021012300 W JP2021012300 W JP 2021012300W WO 2021193739 A1 WO2021193739 A1 WO 2021193739A1
Authority
WO
WIPO (PCT)
Prior art keywords
setter
green sheet
ceramic green
ceramic plate
cutting
Prior art date
Application number
PCT/JP2021/012300
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
山縣　利貴
龍平 渡邊
Original Assignee
デンカ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by デンカ株式会社 filed Critical デンカ株式会社
Priority to JP2022510609A priority Critical patent/JP7642617B2/ja
Publication of WO2021193739A1 publication Critical patent/WO2021193739A1/ja

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C3/00—Milling particular work; Special milling operations; Machines therefor
    • B23C3/13—Surface milling of plates, sheets or strips
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge

Definitions

  • This disclosure relates to a method of manufacturing a ceramic plate and a method of using a cutting machine.
  • Power modules that control large currents are used in fields such as automobiles, electric railways, industrial equipment, and power generation.
  • the circuit board mounted on the power module has an insulating ceramic plate.
  • a method for manufacturing a ceramic plate for example, the following manufacturing method as described in Patent Document 1 is known. That is, a step of extruding the ceramic powder into a sheet after mixing it with a sintering aid or the like, a step of punching to form a ceramic green sheet, and a step of firing the ceramic green sheet are performed. Then, a ceramic plate is manufactured. In the firing step of the ceramic green sheet, the ceramic green sheet is fired in a state where a required number of ceramic green sheets of about 10 to 20 sheets are stacked on the setter.
  • the setter used in the firing process of the ceramic green sheet is preferably used repeatedly from the viewpoint of effective utilization of resources. Therefore, the present disclosure provides a method for manufacturing a ceramic plate, which can improve the production efficiency of the ceramic plate by repeatedly using the setter. Further, the present invention provides a method of using a cutting machine capable of improving the production efficiency of a ceramic plate.
  • the setter after firing the first laminated body including the setter and the first ceramic green sheet, the setter is recovered from the first laminated body, and the facing surface of the setter facing the first ceramic green sheet is cut.
  • a method for manufacturing a ceramic plate which comprises a step of obtaining a processed surface and a step of firing a second laminated body laminated so that the processed surface and the second ceramic green sheet face each other to obtain a ceramic plate. offer.
  • the setter is recovered from the fired first laminated body, and the facing surface of the setter, which is facing the first ceramic green sheet, is cut.
  • the facing surfaces By cutting the facing surfaces in this way, minute foreign substances can be reduced, and it is possible to suppress the occurrence of irregularities on the ceramic plate obtained by firing the second laminated body.
  • the yield of the ceramic plate can be maintained even if the setter is repeatedly used, the production efficiency of the ceramic plate can be improved.
  • the cutting allowance of the setter when cutting the facing surface of the setter may be 5 ⁇ m or more. As a result, the foreign matter adhering to the facing surface can be sufficiently removed, and the unevenness generated on the surface of the ceramic plate can be sufficiently reduced. Therefore, the yield of the ceramic plate can be further improved.
  • the cutting allowance is the thickness of the setter removed by cutting. The cutting allowance is calculated as the difference between the thickness of the setter before cutting and the thickness of the setter after cutting.
  • the surface roughness (Ra) of the processed surface may be less than 4 ⁇ m.
  • the surface (processed surface) of the setter can be sufficiently smoothed while sufficiently removing the foreign matter adhering to the facing surface.
  • the surface roughness Ra in the present disclosure is the arithmetic mean roughness defined by JIS B0601: 2001.
  • the facing surface of the setter may be cut by cutting by rotating a tool to obtain the above processed surface.
  • the cutting allowance can be sufficiently reduced and the damage caused by processing can be reduced. Therefore, the life of the setter is extended, and the number of times the setter is repeatedly used for firing the ceramic green sheet can be sufficiently increased.
  • the method of using the cutting machine according to one aspect of the present disclosure is to fire a laminate in which a setter and a ceramic green sheet are laminated, collect the setter from the laminate, and use the setter facing the ceramic green sheet. It has a step of cutting the facing surface by using a cutting machine equipped with a rotary tool.
  • the facing surface of the setter that was facing the ceramic green sheet is cut using a cutting machine equipped with a rotary tool.
  • the components contained in the ceramic green sheet or the ceramic plate may adhere to the facing surface of the setter facing the ceramic green sheet as a foreign substance. Even if the foreign matter is minute, it grows and becomes coarse when the ceramic green sheet is fired, and causes unevenness on the surface of the ceramic plate.
  • the setter is recovered from the laminated body, and the facing surface of the setter facing the ceramic green sheet is cut by using a cutting machine equipped with a rotary tool. By cutting the facing surface in this way, foreign matter can be reduced and unevenness on the ceramic plate can be suppressed.
  • the yield of the ceramic plate can be maintained even if the setter is repeatedly used, the production efficiency of the ceramic plate can be improved.
  • the present disclosure it is possible to provide a method for manufacturing a ceramic plate capable of improving the production efficiency of the ceramic plate by repeatedly using the setter. Further, it is possible to provide a method of using a cutting machine capable of improving the production efficiency of a ceramic plate.
  • FIG. 1 is a diagram illustrating an example of a method for degreasing and firing a laminated body.
  • FIG. 2 is a diagram showing an example of a cutting device that cuts the main surface of the collected setter.
  • FIG. 3 is an SEM photograph of the main surface (before cutting) of the setter.
  • FIG. 4 is an SEM photograph of the main surface (before cutting) of the setter taken at a higher magnification than that of FIG.
  • FIG. 5 is an SEM photograph of the main surface of the setter when the cutting allowance is 5 ⁇ m.
  • FIG. 6 is an SEM photograph of the main surface of the setter when the cutting allowance is 10 ⁇ m.
  • FIG. 7 is an SEM photograph of the main surface of the setter when the cutting allowance is 15 ⁇ m.
  • the method for manufacturing a ceramic plate includes a first step of preparing a setter and a ceramic green sheet, and firing a laminate (first laminate) containing the setter and the ceramic green sheet to obtain a ceramic plate.
  • the setter is collected from the laminated body, and the facing surface of the setter facing the ceramic green sheet is cut to obtain a processed surface, so that the processed surface and the ceramic green sheet face each other.
  • It has a fourth step of firing the laminated body (second laminated body) to obtain a ceramic plate.
  • the ceramic green sheet prepared in the first step is manufactured by, for example, the following procedure. First, a raw material slurry containing a ceramic powder, a sintering aid and a binder is formed.
  • the ceramic is not particularly limited, and examples thereof include carbides, oxides, and nitrides. Specific examples thereof include silicon carbide, alumina, silicon nitride, aluminum nitride and boron nitride. Binders include those containing organic components.
  • the ceramic green sheet may be processed into a desired shape by, for example, cutting.
  • a commercially available ceramic sintered body may be purchased, or may be manufactured by a known method.
  • the setter include those composed of at least one selected from the group consisting of boron nitride, silicon carbide, alumina, zirconia, graphite, and silicon nitride.
  • the boron nitride setter is preferably used because it has both heat resistance and good machinability.
  • the material of the setter may be different from the material of the ceramic plate from the viewpoint of suppressing the adhesion between the setter and the ceramic plate after firing.
  • a boron nitride sintered body When a boron nitride sintered body is used as the setter, it can be manufactured by the following procedure. First, a molded product is prepared using hexagonal boron nitride powder as a raw material. If necessary, a sintering aid may be added to the hexagonal boron nitride powder before molding. Examples of the sintering aid include alkaline earth oxides such as magnesium oxide and calcium oxide, rare earth oxides such as aluminum oxide, silicon oxide and yttrium oxide, and composite oxides such as spinel. Molding may be performed by uniaxial pressure molding and CIP molding. Uniaxial pressure molding may be performed at 3 to 20 MPa. CIP molding may be performed at 50 to 300 MPa.
  • the obtained molded product is fired to obtain a boron nitride sintered body.
  • the firing may be carried out under the conditions of a non-oxidizing atmosphere, a heating rate of 150 ° C./hr or less, a maximum temperature of 1800 to 2200 ° C., and a holding time in this temperature range of 5 hours or more.
  • the non-oxidizing atmosphere include a nitride gas atmosphere such as nitrogen and ammonia.
  • the density of the boron nitride sintered body may be 1600 kg / m 3 or more.
  • the method for producing the boron nitride sintered body is not limited to the above method. For example, it may be manufactured by a hot press method. Ceramic sintered bodies other than the boron nitride sintered body can be produced by a known method.
  • the setter and the ceramic green sheet are laminated to prepare a laminated body.
  • the number of setters and ceramic green sheets constituting the laminate is not particularly limited.
  • the laminate may have, for example, a plurality of (for example, 50 to 100) ceramic green sheets sandwiched between a pair of setters.
  • a mold release agent may be applied to the main surface of the ceramic green sheet in order to prevent adjacent ceramic green sheets from adhering to each other during firing. Further, the release agent may be applied to the surface of the setter facing the main surface of the ceramic green sheet. Examples of the component contained in the release agent include ceramic powder such as boron nitride, graphite powder, and binder.
  • FIG. 1 is a diagram illustrating an example of a method for degreasing and firing a laminated body.
  • the laminate 50 includes three setters 10 and a plurality of ceramic green sheets 30. Of the three setters 10, the pair of setters 10A and 10B are laminated at the bottom and top of the laminated body 50. Therefore, in the setters 10A and 10B, one main surface faces and is in contact with one of the ceramic green sheets 30.
  • the remaining setter 10C is laminated in the central portion of the laminated body 50. Therefore, in the setter 10C, each of both main surfaces faces and is in contact with one of the ceramic green sheets 30.
  • the main surface facing and contacting one of the ceramic green sheets 30 and the main surface facing and contacting one of the ceramic green sheets 30 are referred to as "opposing surfaces”. .. Approximately the same number of ceramic green sheets 30 may be laminated between the setter 10A and the setter 10C, and between the setter 10C and the setter 10B.
  • the laminated body 50 is housed in the degreasing furnace 20 and heated to, for example, 300 ° C. to 700 ° C. As a result, the binder contained in the ceramic green sheet 30 is removed. Subsequently, the degreased laminate 50 is housed in the firing furnace 25 and heated to 1600 ° C. to 2000 ° C. As a result, the ceramic green sheet is fired to obtain a ceramic plate.
  • the degreasing furnace 20 used for degreasing and the firing furnace 25 used for firing may be the same furnace or different furnaces. Further, the heating temperature, time and atmosphere may be appropriately adjusted according to the composition of the ceramic green sheet.
  • the setter is collected from the fired laminate.
  • the obtained ceramic plate may be processed as necessary to form, for example, a circuit board.
  • the ceramic green sheet or the component contained in the ceramic plate adheres as a foreign substance to the ceramic green sheet of the recovered setter and the facing surface facing the ceramic plate.
  • minute foreign matters adhere to one of the main surfaces facing the ceramic green sheet 30.
  • minute foreign matter adheres to both main surfaces facing the ceramic green sheet 30.
  • the ceramic green sheet and the facing surface of the setter that was facing the ceramic plate are cut.
  • a method of cutting by rotating a tool can be appropriately adopted. For example, it may be milled. With such a cutting process, it is possible to sufficiently reduce minute foreign matters on the main surface of the setter while reducing the cutting allowance. Moreover, the damage to the setter can be sufficiently reduced. Therefore, the life of the setter is extended, and the number of times the setter is repeatedly used can be sufficiently increased. Milling may be performed using an end mill as a rotary tool. The number of blades of the end mill may be 6 or more, or 10 or more, from the viewpoint of obtaining a smooth machined surface.
  • FIG. 2 is a diagram showing an example of a cutting device that cuts the main surface of the collected setter.
  • the cutting device 100 includes a milling machine 60.
  • An end mill 70 is attached to the tip of the spindle 62 of the milling cutter 60.
  • a position adjusting unit 42 is placed on the table 64 of the milling machine 60.
  • the position adjusting unit 42 may be, for example, a hexapod.
  • a support portion 40 having a fixing function for fixing the setter 10 such as a vacuum chuck is arranged on the position adjusting portion 42.
  • the setter 10 is fixed by the fixing function of the support portion 40.
  • the upper main surface 11 of the setter 10 fixed to the support portion 40 is cut by the end mill 70. This main surface is the facing surface of the laminated body 50 that was opposed to the ceramic green sheet 30.
  • the facing surface 11 of the setter 10 is cut to obtain a machined surface.
  • the cutting allowance of the setter 10 may be 5 ⁇ m or more, 10 ⁇ m or more, or 15 ⁇ m or more.
  • the cutting allowance of the setter 10 may be 50 ⁇ m or less, or 40 ⁇ m or less.
  • one main surface (opposing surface) may be cut, and then the setter 10C may be turned over to cut the other main surface (opposing surface). As a result, both main surfaces become machined surfaces.
  • the surface roughness (Ra) of the processed surface may be, for example, less than 4 ⁇ m and may be less than 3 ⁇ m.
  • the processed surface of the setter can be sufficiently smoothed while sufficiently removing the foreign matter adhering to the facing surface 11 of the setter 10.
  • the surface roughness (Ra) of the machined surface may be 1 ⁇ m or more and may be 2 ⁇ m or more from the viewpoint of facilitating the cutting operation.
  • a laminated body (second laminated body) is produced again using a setter having a processed surface obtained by cutting in the third step. Specifically, the processed surface of the setter and the ceramic green sheet (second ceramic green sheet) are laminated so as to face each other to obtain a second laminated body.
  • This second laminated body is heated in a degreasing furnace and a firing furnace to obtain a ceramic plate.
  • the degreasing furnace and the firing furnace may be the same as those used in the second step, or may be different.
  • the second laminated body may have the same laminated structure as the first laminated body 50 used in the second step, or may have a different laminated structure.
  • a ceramic plate can be obtained by sequentially performing degreasing and firing in the same manner as in the second step.
  • the facing surface facing the first ceramic green sheet in the first laminated body is cut. Therefore, foreign matter on the main surface of the setter is sufficiently reduced. Therefore, even if the setter is used repeatedly, it is possible to prevent the ceramic plate obtained by firing the second laminated body from having irregularities. In this way, the yield of the ceramic plate can be maintained even if the setter is used repeatedly. Therefore, the production efficiency of the ceramic plate can be improved.
  • the 1st to 4th steps may be repeated.
  • the number of repetitions may be once or multiple times.
  • the setter may cut the facing surface each time the laminate is fired once, or the facing surface may be cut after repeating the production, firing, and removal of the setter a plurality of times.
  • the frequency of cutting may be adjusted according to the presence or absence of foreign matter on the main surface or the amount of foreign matter. In any case, by repeatedly using the setter, it is possible to effectively utilize resources and reduce the manufacturing cost of the ceramic plate.
  • the ceramic plates obtained in the first step and the fourth step of the above-mentioned manufacturing method have the same surface quality. Therefore, it can be used for the same purpose.
  • the ceramic plate may be used as a circuit board by forming an electric circuit composed of a metal layer on one or both main surfaces, for example.
  • the method of using the cutting machine includes a first step of producing a setter and a ceramic green sheet, and a first step of firing a laminate (first laminate) containing the setter and the ceramic green sheet to obtain a ceramic plate. It has two steps and a third step of collecting the setter from the fired laminate and cutting the facing surface of the setter facing the ceramic green sheet to obtain a processed surface. Each of these steps may be the same as the first step, the second step, and the third step of the above-mentioned method for manufacturing a ceramic plate. Further, after the third step, a fourth step may be performed in which a laminated body (second laminated body) laminated so that the processed surface and the ceramic green sheet face each other is fired to obtain a ceramic plate.
  • the cutting machine when the ceramic green sheet is fired to obtain a ceramic plate, even if the setter is repeatedly used, it is possible to suppress the occurrence of unevenness on the ceramic plate. As described above, since the yield of the ceramic plate can be maintained even if the setter is repeatedly used, the production efficiency of the ceramic plate can be improved.
  • the cutting machine include a drilling machine, a milling machine, a machining center, and the like in which a rotary tool cuts a fixed setter.
  • the present disclosure is not limited to the above embodiment.
  • the ceramic plate, the ceramic green sheet, and the setter may have a shape other than the rectangular parallelepiped shape. These may be chamfered at the corners. Further, the setter may be arranged only below the laminated body.
  • Example 1 A molded body (sheet material) was prepared by uniaxial pressure molding of a raw material powder containing a silicon nitride powder and a sintering aid (magnesium oxide powder, yttrium oxide powder, and silicon dioxide powder). This sheet material was punched out using a cutting device to form 70 ceramic green sheets having a rectangular parallelepiped shape. Separately, two setters made of boron nitride having a rectangular parallelepiped shape (manufactured by Denka Co., Ltd., trade name: NB-1000) were prepared.
  • 70 ceramic green sheets were sandwiched between a pair of setters to obtain a laminate in which 2 setters and 70 ceramic green sheets were laminated.
  • a slurry for mold release was applied to one main surface of each ceramic green sheet.
  • the degreasing temperature was 500 ° C. and the degreasing time was 30 hours.
  • the firing temperature was 1800 ° C. and the firing time was 30 hours. After firing, the laminate was taken out from the firing furnace, the ceramic plate was removed from the laminate, and a pair of setters were recovered.
  • FIG. 3 is an SEM photograph of the facing surface (before cutting) of the setter.
  • FIG. 4 is an SEM photograph of the facing surface (before cutting) of the setter taken at a higher magnification than that of FIG.
  • coarse particles were scattered on the facing surfaces of the setters.
  • coarse particles having columnar crystals are projected in the central part of the SEM photograph.
  • Si and N were detected in the coarse particles. From this, it was confirmed that the silicon nitride particles, which are the components contained in the ceramic green sheet (ceramic plate), were present as foreign substances on the facing surface of the setter.
  • a cutting device as shown in FIG. 2 was manufactured.
  • an NC milling machine (trade name: YZ-400SG) manufactured by Yamazaki Giken Co., Ltd. was used.
  • a tongue mill manufactured by Dangaloy Co., Ltd. (model number: TPW13R250M47.6-12, diameter: 250 mm, number of blades: 12) was used.
  • a commercially available hexapod was used as the position adjusting unit.
  • the facing surface of the setter in which the silicon nitride was present was cut to obtain a machined surface.
  • the machined surface when the cutting allowance was 5 ⁇ m, 10 ⁇ m, and 15 ⁇ m was observed with a scanning electron microscope (SEM) with reference to before cutting.
  • SEM scanning electron microscope
  • FIG. 5 is an SEM photograph of the facing surface (main surface) of the setter when the cutting allowance is 5 ⁇ m.
  • FIG. 6 is an SEM photograph of the facing surface (main surface) of the setter when the cutting allowance is 10 ⁇ m.
  • FIG. 7 is an SEM photograph of the facing surface (main surface) of the setter when the cutting allowance is 15 ⁇ m.
  • a contact type surface roughness meter small surface roughness measuring machine "SJ-210" (trade name) manufactured by Mitutoyo Co., Ltd.) was used for the measurement. The measurement results are as shown in Table 1. After cutting. The surface roughness of the machined surface was smaller than the surface roughness of the main surface before cutting.
  • the present disclosure it is possible to provide a method for manufacturing a ceramic plate capable of improving the production efficiency of the ceramic plate. Further, it is possible to provide a method of using a cutting machine capable of improving the production efficiency of a ceramic plate.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
PCT/JP2021/012300 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法 WO2021193739A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022510609A JP7642617B2 (ja) 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-056234 2020-03-26
JP2020056234 2020-03-26

Publications (1)

Publication Number Publication Date
WO2021193739A1 true WO2021193739A1 (ja) 2021-09-30

Family

ID=77892237

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2021/012300 WO2021193739A1 (ja) 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法

Country Status (2)

Country Link
JP (1) JP7642617B2 (enrdf_load_stackoverflow)
WO (1) WO2021193739A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023038151A1 (ja) * 2021-09-13 2023-03-16 デンカ株式会社 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024690U (enrdf_load_stackoverflow) * 1988-06-22 1990-01-12
JPH04203888A (ja) * 1990-11-30 1992-07-24 Toshiba Ceramics Co Ltd セラミックス焼成用治具及びその製造方法
JPH09132464A (ja) * 1995-11-02 1997-05-20 Sumitomo Kinzoku Erekutorodebaisu:Kk セラミック基板の製造装置
JP2004103863A (ja) * 2002-09-10 2004-04-02 Murata Mfg Co Ltd セラミック電子部品の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4322084A1 (de) * 1993-07-02 1995-01-12 Abb Research Ltd Verfahren zur Herstellung eines Setters
JP3369819B2 (ja) * 1995-11-15 2003-01-20 電気化学工業株式会社 セラミックス焼結体の製造方法
JP4311821B2 (ja) * 1999-06-29 2009-08-12 イビデン株式会社 セラミック焼成用治具の再生方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH024690U (enrdf_load_stackoverflow) * 1988-06-22 1990-01-12
JPH04203888A (ja) * 1990-11-30 1992-07-24 Toshiba Ceramics Co Ltd セラミックス焼成用治具及びその製造方法
JPH09132464A (ja) * 1995-11-02 1997-05-20 Sumitomo Kinzoku Erekutorodebaisu:Kk セラミック基板の製造装置
JP2004103863A (ja) * 2002-09-10 2004-04-02 Murata Mfg Co Ltd セラミック電子部品の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023038151A1 (ja) * 2021-09-13 2023-03-16 デンカ株式会社 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体
JP7282279B1 (ja) * 2021-09-13 2023-05-26 デンカ株式会社 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体

Also Published As

Publication number Publication date
JP7642617B2 (ja) 2025-03-10
JPWO2021193739A1 (enrdf_load_stackoverflow) 2021-09-30

Similar Documents

Publication Publication Date Title
JP4013386B2 (ja) 半導体製造用保持体およびその製造方法
US8178455B2 (en) Alumina sintered body, method for manufacturing the same, and semiconductor manufacturing apparatus member
JP7377961B2 (ja) 窒化珪素基板の製造方法
JP2000058631A5 (enrdf_load_stackoverflow)
JPWO2007125878A1 (ja) アルミニウム−炭化珪素質複合体及びそれを用いた放熱部品
WO2021193739A1 (ja) セラミック板の製造方法、及び、切削加工機の使用方法
WO2022196693A1 (ja) 窒化珪素基板
WO2021235407A1 (ja) セラミック板の製造方法、セッターの製造方法、及びセッターの再生方法
JP4421910B2 (ja) 熱処理用トレー及びそれを用いたセラミック製品の製造方法
JP7211549B2 (ja) 窒化珪素基板
JP7248186B2 (ja) 窒化珪素基板
JP5092135B2 (ja) 多孔質体およびその製造方法
CN111278792B (zh) 取向陶瓷烧结体的制法以及平坦片材
JP3486666B2 (ja) セラミックスの加工方法
JP7211476B2 (ja) 窒化珪素基板
CN117565179A (zh) 一种氮化硅陶瓷基片材料流延成型工艺
JPH0799263A (ja) セラミック基板の製造方法
WO2022019181A1 (ja) セラミック焼結体、及びその製造方法
JP7248187B2 (ja) 窒化珪素基板
WO2008023766A1 (fr) Procédé de production d'un élément en carbure de silicium
JP7318835B2 (ja) 窒化珪素基板
JPWO2019082916A1 (ja) 配向セラミック焼結体の製法及びフラットシート
JP2016084260A (ja) セラミック基体
JP4659346B2 (ja) セラミック焼成体の製造方法
JP2010024500A (ja) アルミニウム−炭化珪素質複合体及びその製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 21775501

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2022510609

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 21775501

Country of ref document: EP

Kind code of ref document: A1