JP7642617B2 - セラミック板の製造方法、及び、切削加工機の使用方法 - Google Patents
セラミック板の製造方法、及び、切削加工機の使用方法 Download PDFInfo
- Publication number
- JP7642617B2 JP7642617B2 JP2022510609A JP2022510609A JP7642617B2 JP 7642617 B2 JP7642617 B2 JP 7642617B2 JP 2022510609 A JP2022510609 A JP 2022510609A JP 2022510609 A JP2022510609 A JP 2022510609A JP 7642617 B2 JP7642617 B2 JP 7642617B2
- Authority
- JP
- Japan
- Prior art keywords
- setter
- cutting
- laminate
- ceramic green
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000919 ceramic Substances 0.000 title claims description 140
- 238000005520 cutting process Methods 0.000 title claims description 76
- 238000000034 method Methods 0.000 title claims description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 238000010304 firing Methods 0.000 claims description 29
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 14
- 229910052582 BN Inorganic materials 0.000 claims description 12
- 238000003801 milling Methods 0.000 claims description 10
- 230000003746 surface roughness Effects 0.000 claims description 10
- 238000005245 sintering Methods 0.000 claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 238000005238 degreasing Methods 0.000 description 12
- 239000011362 coarse particle Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 241000238631 Hexapoda Species 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000003826 uniaxial pressing Methods 0.000 description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- -1 oxides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/13—Surface milling of plates, sheets or strips
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020056234 | 2020-03-26 | ||
JP2020056234 | 2020-03-26 | ||
PCT/JP2021/012300 WO2021193739A1 (ja) | 2020-03-26 | 2021-03-24 | セラミック板の製造方法、及び、切削加工機の使用方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021193739A1 JPWO2021193739A1 (enrdf_load_stackoverflow) | 2021-09-30 |
JP7642617B2 true JP7642617B2 (ja) | 2025-03-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2022510609A Active JP7642617B2 (ja) | 2020-03-26 | 2021-03-24 | セラミック板の製造方法、及び、切削加工機の使用方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7642617B2 (enrdf_load_stackoverflow) |
WO (1) | WO2021193739A1 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023038151A1 (ja) * | 2021-09-13 | 2023-03-16 | デンカ株式会社 | 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001019561A (ja) | 1999-06-29 | 2001-01-23 | Ibiden Co Ltd | セラミック焼成用治具の再生方法 |
JP2004103863A (ja) | 2002-09-10 | 2004-04-02 | Murata Mfg Co Ltd | セラミック電子部品の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0446873Y2 (enrdf_load_stackoverflow) * | 1988-06-22 | 1992-11-05 | ||
JPH04203888A (ja) * | 1990-11-30 | 1992-07-24 | Toshiba Ceramics Co Ltd | セラミックス焼成用治具及びその製造方法 |
DE4322084A1 (de) * | 1993-07-02 | 1995-01-12 | Abb Research Ltd | Verfahren zur Herstellung eines Setters |
JP3098410B2 (ja) * | 1995-11-02 | 2000-10-16 | 株式会社住友金属エレクトロデバイス | セラミック基板の製造装置 |
JP3369819B2 (ja) * | 1995-11-15 | 2003-01-20 | 電気化学工業株式会社 | セラミックス焼結体の製造方法 |
-
2021
- 2021-03-24 WO PCT/JP2021/012300 patent/WO2021193739A1/ja active Application Filing
- 2021-03-24 JP JP2022510609A patent/JP7642617B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001019561A (ja) | 1999-06-29 | 2001-01-23 | Ibiden Co Ltd | セラミック焼成用治具の再生方法 |
JP2004103863A (ja) | 2002-09-10 | 2004-04-02 | Murata Mfg Co Ltd | セラミック電子部品の製造方法 |
Also Published As
Publication number | Publication date |
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WO2021193739A1 (ja) | 2021-09-30 |
JPWO2021193739A1 (enrdf_load_stackoverflow) | 2021-09-30 |
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