JP7642617B2 - セラミック板の製造方法、及び、切削加工機の使用方法 - Google Patents

セラミック板の製造方法、及び、切削加工機の使用方法 Download PDF

Info

Publication number
JP7642617B2
JP7642617B2 JP2022510609A JP2022510609A JP7642617B2 JP 7642617 B2 JP7642617 B2 JP 7642617B2 JP 2022510609 A JP2022510609 A JP 2022510609A JP 2022510609 A JP2022510609 A JP 2022510609A JP 7642617 B2 JP7642617 B2 JP 7642617B2
Authority
JP
Japan
Prior art keywords
setter
cutting
laminate
ceramic green
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022510609A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021193739A1 (enrdf_load_stackoverflow
Inventor
利貴 山縣
龍平 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denka Co Ltd
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denka Co Ltd, Denki Kagaku Kogyo KK filed Critical Denka Co Ltd
Publication of JPWO2021193739A1 publication Critical patent/JPWO2021193739A1/ja
Application granted granted Critical
Publication of JP7642617B2 publication Critical patent/JP7642617B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C3/00Milling particular work; Special milling operations; Machines therefor
    • B23C3/13Surface milling of plates, sheets or strips
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00Charging; Discharging; Manipulation of charge
    • F27D3/12Travelling or movable supports or containers for the charge

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP2022510609A 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法 Active JP7642617B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020056234 2020-03-26
JP2020056234 2020-03-26
PCT/JP2021/012300 WO2021193739A1 (ja) 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法

Publications (2)

Publication Number Publication Date
JPWO2021193739A1 JPWO2021193739A1 (enrdf_load_stackoverflow) 2021-09-30
JP7642617B2 true JP7642617B2 (ja) 2025-03-10

Family

ID=77892237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022510609A Active JP7642617B2 (ja) 2020-03-26 2021-03-24 セラミック板の製造方法、及び、切削加工機の使用方法

Country Status (2)

Country Link
JP (1) JP7642617B2 (enrdf_load_stackoverflow)
WO (1) WO2021193739A1 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023038151A1 (ja) * 2021-09-13 2023-03-16 デンカ株式会社 窒化ホウ素焼結体の製造方法及び窒化ホウ素焼結体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001019561A (ja) 1999-06-29 2001-01-23 Ibiden Co Ltd セラミック焼成用治具の再生方法
JP2004103863A (ja) 2002-09-10 2004-04-02 Murata Mfg Co Ltd セラミック電子部品の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0446873Y2 (enrdf_load_stackoverflow) * 1988-06-22 1992-11-05
JPH04203888A (ja) * 1990-11-30 1992-07-24 Toshiba Ceramics Co Ltd セラミックス焼成用治具及びその製造方法
DE4322084A1 (de) * 1993-07-02 1995-01-12 Abb Research Ltd Verfahren zur Herstellung eines Setters
JP3098410B2 (ja) * 1995-11-02 2000-10-16 株式会社住友金属エレクトロデバイス セラミック基板の製造装置
JP3369819B2 (ja) * 1995-11-15 2003-01-20 電気化学工業株式会社 セラミックス焼結体の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001019561A (ja) 1999-06-29 2001-01-23 Ibiden Co Ltd セラミック焼成用治具の再生方法
JP2004103863A (ja) 2002-09-10 2004-04-02 Murata Mfg Co Ltd セラミック電子部品の製造方法

Also Published As

Publication number Publication date
WO2021193739A1 (ja) 2021-09-30
JPWO2021193739A1 (enrdf_load_stackoverflow) 2021-09-30

Similar Documents

Publication Publication Date Title
JP4996600B2 (ja) アルミニウム−炭化珪素質複合体及びそれを用いた放熱部品
TWI445682B (zh) Alumina sintered body, and its manufacturing method and semiconductor manufacturing device parts
WO2019235593A1 (ja) 板状の窒化ケイ素質焼結体およびその製造方法
JP2022550701A (ja) 窒化珪素基板の製造方法
WO2019235594A1 (ja) 板状の窒化ケイ素質焼結体およびその製造方法
JP7642617B2 (ja) セラミック板の製造方法、及び、切削加工機の使用方法
WO2022196693A1 (ja) 窒化珪素基板
WO2021235407A1 (ja) セラミック板の製造方法、セッターの製造方法、及びセッターの再生方法
JP7211549B2 (ja) 窒化珪素基板
JP7248186B2 (ja) 窒化珪素基板
JP5092135B2 (ja) 多孔質体およびその製造方法
JP2005213086A (ja) 熱処理用トレー及びそれを用いたセラミック製品の製造方法
JP7211476B2 (ja) 窒化珪素基板
CN111278792A (zh) 取向陶瓷烧结体的制法以及平坦片材
JPH02279569A (ja) 窒化ホウ素シート
JP5073135B2 (ja) 窒化アルミニウム焼結体、その製造方法及び用途
JP2016084260A (ja) セラミック基体
JPWO2019082916A1 (ja) 配向セラミック焼結体の製法及びフラットシート
JP7248187B2 (ja) 窒化珪素基板
WO2022019181A1 (ja) セラミック焼結体、及びその製造方法
JP2010024500A (ja) アルミニウム−炭化珪素質複合体及びその製造方法
TWI864880B (zh) 具有增加厚度的模具內襯之燒結裝置
KR102735535B1 (ko) 질화규소 기판의 분석 방법
JP7318835B2 (ja) 窒化珪素基板
KR102727296B1 (ko) 질화규소 기판의 재생 방법

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230612

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240611

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240726

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240924

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241112

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20250218

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20250226

R150 Certificate of patent or registration of utility model

Ref document number: 7642617

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150