WO2021177468A1 - ガラススペーサの製造方法、ガラススペーサ、及びハードディスクドライブ装置 - Google Patents

ガラススペーサの製造方法、ガラススペーサ、及びハードディスクドライブ装置 Download PDF

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Publication number
WO2021177468A1
WO2021177468A1 PCT/JP2021/008935 JP2021008935W WO2021177468A1 WO 2021177468 A1 WO2021177468 A1 WO 2021177468A1 JP 2021008935 W JP2021008935 W JP 2021008935W WO 2021177468 A1 WO2021177468 A1 WO 2021177468A1
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WO
WIPO (PCT)
Prior art keywords
film
glass spacer
spacer
glass
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/008935
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
正文 三浦
橋本　和明
直之 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP2022504489A priority Critical patent/JP7290792B2/ja
Priority to CN202180016786.4A priority patent/CN115176310A/zh
Priority to US17/909,583 priority patent/US11869538B2/en
Priority to PH1/2022/552339A priority patent/PH12022552339A1/en
Publication of WO2021177468A1 publication Critical patent/WO2021177468A1/ja
Anticipated expiration legal-status Critical
Priority to JP2023091016A priority patent/JP7726949B2/ja
Priority to US18/494,381 priority patent/US12183365B2/en
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/02—Details
    • G11B17/021—Selecting or spacing of record carriers for introducing the heads
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/02—Details
    • G11B17/038—Centering or locking of a plurality of discs in a single cartridge
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B19/00—Driving, starting, stopping record carriers not specifically of filamentary or web form, or of supports therefor; Control thereof; Control of operating function ; Driving both disc and head
    • G11B19/20—Driving; Starting; Stopping; Control thereof
    • G11B19/2009—Turntables, hubs and motors for disk drives; Mounting of motors in the drive
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G11B23/02—Containers; Storing means both adapted to cooperate with the recording or reproducing means
    • G11B23/03—Containers for flat record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739—Magnetic recording media substrates
    • G11B5/73911—Inorganic substrates
    • G11B5/73921—Glass or ceramic substrates

Definitions

  • the present invention relates to a method for manufacturing a ring-shaped glass spacer provided in contact with a magnetic disk in a hard disk drive device, a glass spacer, and a hard disk drive device including the glass spacer.
  • HDD devices hard disk drive devices
  • the HDD device is provided with a ring-shaped spacer for holding the magnetic disks apart from each other between the magnetic disks in the HDD device.
  • This spacer functions so that the magnetic disks do not come into contact with each other and the magnetic disks are arranged at predetermined positions with high accuracy.
  • a metal material having a low manufacturing cost has been used as a material for this spacer.
  • a glass spacer (hereinafter referred to as a glass spacer) in response to the case where a glass substrate is used as a substrate for a magnetic disk.
  • glass since glass is generally an insulator, static electricity tends to accumulate on the magnetic disk or glass spacer due to friction between the magnetic disk rotating at high speed and the glass spacer and air.
  • the magnetic disk or spacer is charged, foreign matter or fine particles are easily adsorbed, and the accumulated static electricity may be discharged to the magnetic head, which may destroy the recording element or the reproducing element of the magnetic head, which is not preferable.
  • Patent Document 1 a glass spacer in which at least the contact surface and the inner peripheral surface of the glass spacer with a magnetic disk are coated with a conductive ceramic film having a film thickness of 0.1 to 3 ⁇ m.
  • the present invention in order to suppress the discharge of static electricity of the magnetic head charged on the magnetic disk in the HDD device, the charging of the magnetic disk or the glass spacer can be suppressed, and further, the glass spacer that suppresses dust generation. It is an object of the present invention to provide a hard disk drive device using this glass spacer and a method for manufacturing the glass spacer.
  • One aspect of the present invention is a method for manufacturing a ring-shaped glass spacer provided in a hard disk drive device so as to be in contact with a magnetic disk.
  • the glass spacer is formed by forming a film on the glass spacer body.
  • the manufacturing method includes a process of forming the film on the surface of the glass spacer body. In the treatment, the film is formed by passing the outer peripheral end surface of the glass spacer body through a place where the components of the film are sprayed while rotating in the circumferential direction.
  • the rotating shaft is provided on the moving mechanism so as to move in one direction while rotating.
  • the location of the sprayed state is preferably formed by spraying the components of the film from both sides of the transport path of the glass spacer body.
  • the treatment preferably includes heating the film formed on the glass spacer body.
  • the arithmetic mean roughness Ra of the surface of the film is preferably 1 ⁇ m or less.
  • the surface resistivity at 22 [° C.] is 10 -4 ⁇ 10 6 [ ⁇ / sq], it is preferable.
  • the film contains, for example, any one of tin oxide, zinc oxide, and titanium oxide. Twice
  • Another aspect of the present invention is a surface of a spacer for a hard disk drive device, including a housing including at least a drive motor, a spray port, and a spacer transport means having a rotary shaft spanned by a pair of moving mechanisms. It is a device for forming a film on the surface.
  • Another aspect of the present invention is a ring-shaped glass spacer provided in the hard disk drive device so as to be in contact with the magnetic disk.
  • the entire surface including the main surface and the end face of the glass spacer is covered with a film containing any one of tin oxide, zinc oxide, and titanium oxide, and the thickness of the film on the end face of the glass spacer. Is thicker than the thickness of the film on the main surface of the glass spacer.
  • the difference between the maximum film thickness and the minimum film thickness on the entire surface of the glass spacer is preferably less than half of the maximum film thickness.
  • the entire surface of the glass spacer is covered with the film having a thickness of less than 100 nm.
  • the arithmetic mean roughness Ra on the end face of the glass spacer is larger than the arithmetic average roughness Ra on the main surface of the glass spacer.
  • the surface resistivity at 22 [° C.] is 10 -4 ⁇ 10 6 [ ⁇ / sq], it is preferable.
  • Another aspect of the present invention is a hard disk drive device including the glass spacer and the magnetic disk.
  • FIG. 1 is an external perspective view of a glass spacer (hereinafter, may be simply referred to as a spacer) 1 of one embodiment
  • FIG. 2 is a diagram illustrating an arrangement of the spacer 1 and the magnetic disk 5.
  • FIG. 3 is a cross-sectional view of a main part for explaining an example of the structure of the HDD device in which the spacer 1 is incorporated.
  • FIG. 4 is a cross-sectional view of an example of the spacer 1.
  • the spacer 1 is incorporated into an HDD device by alternately stacking magnetic disks 5 and spacers 1.
  • a plurality of magnetic disks 5 are fitted into a rotating spindle 14 connected to a motor 12 via a spacer 1, and further fixed onto the spindle 14 with screws via a top clamp 16. Therefore, they are installed at predetermined intervals.
  • the spacer 1 is arranged so that the spacer 1 and the magnetic disk 5 are alternately arranged so as to be located between the two magnetic disks 5, and the gap between the adjacent magnetic disks 5 is maintained at a predetermined distance. do.
  • the spacer 1 described in the following embodiment is intended for a spacer provided between two magnetic disks 5 so as to be in contact with the magnetic disk 5, but the spacer for the present invention is the uppermost layer or the most. It also includes a spacer that is in contact with only the underlying magnetic disk 5. Depending on the specifications of the HDD device, the spacer 1 that is in contact with only the top layer or the bottom layer magnetic disk 5 may not be provided.
  • the spacer 1 has a ring shape and includes an outer peripheral end surface 2, an inner peripheral end surface 3, and a main surface 4 facing each other.
  • the inner peripheral end surface 3 is a surface in contact with the spindle 14, and is a wall surface surrounding a hole having an inner diameter slightly larger than the outer diameter of the spindle 14.
  • the dimensions of the annular spacer 1 may be appropriately changed according to the specifications of the HDD to be mounted, but for a nominal 3.5-inch HDD device, the outer diameter is, for example, 30 to 34 mm, and the inner diameter is For example, it is 24 to 26 mm, the radial width is, for example, 2 to 5 mm, and the thickness is, for example, 0.5 to 3 mm.
  • a chamfered surface may be appropriately provided at the connection portion between the outer peripheral end surface 2 and the inner peripheral end surface 3 and the main surface 4.
  • the chamfered surface may have a linear shape or an arc shape in terms of cross-sectional shape.
  • the chamfered surface has a width in the radial direction and the plate thickness direction of, for example, 0.01 to 0.5 mm.
  • the main surface 4 is two parallel surfaces that are in contact with the magnetic disk 5.
  • the spacer 1 is in close contact with the magnetic disk 5 and fixes the magnetic disk 5 by frictional force. Since the spacer 1 and the magnetic disk 5 are in contact with each other in this way, a difference in thermal expansion occurs between the spacer 1 and the magnetic disk 5 as the temperature inside the HDD device changes, causing a positional shift. Rub. As a result, static electricity is likely to be generated in the glass, which is an insulator. Further, static electricity is likely to be generated on the spacer 1 due to friction between the spacer 1 rotating at high speed and air.
  • Such static electricity is generated in the spacer 1, and when the spacer 1 is charged, foreign matter and fine particles are easily adsorbed, and the accumulated static electricity is discharged to the magnetic head, which may destroy the recording element and the reproducing element of the magnetic head. Therefore, static electricity is not preferable.
  • a part of the glass may become fine particles and generate dust from the surface of the spacer 1. Due to dust generation, fine particles float in the sealed space of the HDD device and adhere to the main surface of the magnetic disk 5, which hinders reading from the magnetic disk 5 and writing to the magnetic disk 5 by the magnetic head. Therefore, dust generation is not preferable. Such dust generation is particularly likely to occur from the outer peripheral end surface of the spacer 1.
  • the outer peripheral end face is always exposed during the operation of the HDD device and is close to the main surface of the magnetic disk 5.
  • the inner peripheral end surface of the spacer 1 may be rubbed when the spacer 1 is mounted on the spindle to generate dust. These dust generations are not preferable because they may be transferred to the main surface of the magnetic disk 5 during rework, which is the work of replacing the magnetic disk 5.
  • the spacer 1 has a ring-shaped glass spacer main body (hereinafter, referred to as a spacer main body) 20 and a film 22.
  • the film 22 can be, for example, a conductive film containing tin oxide (SnO 2 ) and zinc oxide (ZnO). Further, the film 22 may be a film containing titanium oxide. FTO in which tin oxide is doped with fluorine or AZO in which zinc oxide is doped with aluminum oxide (Al 2 O 3 ) may be used.
  • the thickness of the film 22 covering the entire surface of the spacer 1 is preferably less than 100 nm.
  • PVD Physical Vapor Deposition
  • CVD Chemical Vapor Deposition
  • a spray method or the like has been used for film formation.
  • these film forming methods are used by a general method, there is a problem that the film formation cannot be fundamentally performed on the portion where the holding member (supporting member) holding the spacer comes into contact with the spacer. For this reason, a part of the surface of the spacer cannot be formed and is exposed due to the holding by the holding member, so that the glass fragments may become fine particles and generate dust from the exposed portion.
  • the spacer formed while being held by the holding member is taken out from the film forming apparatus, and the film is formed a second time in a state where the formed area is held by the holding member.
  • the film is formed twice, the film thickness unevenness of about twice is generated between the place where the holding member is in contact and the place other than the holding member, and the film forming process becomes complicated and the cost increases. There was a problem.
  • the entire surface of the spacer 1 is covered with a film 22 containing tin oxide without using the conventional holding member as described above.
  • the thickness of the film 22 covering the entire surface of the spacer 1 is preferably 200 nm or less, and more preferably less than 100 nm. If the thickness exceeds 200 nm, the manufacturing cost may become excessive. Further, when the thickness is 100 nm or more, the surface unevenness of the film 22 becomes large, and when the convex portion of the film 22 comes into contact with the magnetic disk 5, the convex portion is pressed, and a part of the convex portion is separated from the surface of the film 22. It becomes fine particles and may generate dust. The generated fine particles may be transferred to the main surface of the magnetic disk during rework, which is not preferable.
  • the thickness of the film 22 on the outer peripheral end surface 2 and the inner peripheral end surface 3 of the spacer 1 is preferably thicker than the thickness of the film 22 on the main surface 4 of the spacer 1. Since the film 22 on the outer peripheral end surface 2 is exposed in the closed space of the HDD device, dust generation from the outer peripheral end surface 2 must be suppressed. Therefore, the thickness of the film 22 on the outer peripheral end surface 2 is made thicker than the thickness of the film 22 on the main surface 4 of the spacer 1 so that the glass of the spacer body 20 is not exposed to the closed space. On the other hand, the film 22 on the inner peripheral end surface 3 rubs against the spindle 14, so that dust is easily generated.
  • the thickness of the film 22 on the inner peripheral end surface 3 is made thicker than the thickness of the film 22 on the main surface 4 of the spacer 1.
  • the thickness of the film 22 on the main surface 4 of the spacer 1 can be 30 nm or more and 190 nm or less, but more preferably 30 nm or more and 90 nm or less.
  • the thickness of the film 22 on the outer peripheral end surface 2 and the inner peripheral end surface 3 can be, for example, 40 nm or more and 200 nm or less, but more preferably 40 nm or more and less than 100 nm.
  • the arithmetic mean roughness Ra on the outer peripheral end surface 2 and the inner peripheral end surface 3 of the spacer 1 is preferably larger than the arithmetic average roughness Ra on the main surface 4 of the spacer 1.
  • the arithmetic mean roughness Ra on the main surface 4 of the spacer 1 can be made smaller than the outer peripheral end surface 2 and the inner peripheral end surface 3.
  • the arithmetic mean roughness Ra on the main surface 4 of the spacer 1 is preferably 1.0 ⁇ m or less. Further, it is preferable that the arithmetic mean roughness Ra on the outer peripheral end surface 2 and the inner peripheral end surface 3 of the spacer 1 is 0.5 ⁇ m or more. Further, according to one embodiment, the difference between the maximum film thickness and the minimum film thickness of the film 22 on the entire surface of the spacer 1 is preferably less than half of the maximum film thickness.
  • the difference is more preferably less than a quarter of the maximum film thickness. If there is no place on the surface of the spacer 1 where the film thickness of the film 22 is extremely thin due to holding by a holding jig or the like, the difference is the film on each of the main surface, the inner peripheral end surface, and the outer peripheral end surface of the spacer 1. It can be calculated from the thickness.
  • the film thickness of each surface can be, for example, the film thickness at the center of each surface.
  • the production of the spacer 1 provided with such a film 22 includes a process of forming the film 22 on the surface of the ring-shaped spacer body 20 which is the base of the spacer 1.
  • the outer peripheral end surface 2 of the spacer body 20 is rotated in the circumferential direction, and the film 22 is formed by passing the components of the film 22 through the sprayed state.
  • FIG. 5 is a diagram illustrating an example of film formation in the method for manufacturing the spacer 1 of the embodiment. In this way, while rotating the outer peripheral end surface 2 of the spacer body 20 in the circumferential direction, the film 22 is efficiently and evenly formed on the entire surface of the spacer body 20 by passing the components of the film 22 through the sprayed state 23. can do.
  • the film 22 is not formed on the holding portion.
  • the holding portion can be changed to another place to form the film 22 for the second time, but the thickness of the film 22 becomes uneven.
  • the film forming method of the present invention it is not necessary to change the holding member, and the film 22 can be formed evenly by one film forming process.
  • the ring-shaped spacer body 20 is loose-fitted, that is, a rotating shaft 50 having an outer diameter smaller than the inner diameter of the hole is passed through the hole. It is preferable to rotate the outer peripheral end surface 2 by rotating the rotating shaft 50 by bringing a part of the inner peripheral surface (inner peripheral end surface of the spacer main body 20) of the hole into contact with the rotating shaft 50. In this method, the spacer body 20 is rotated by the rotation of the rotating shaft 50. Therefore, the surface roughness and material of the rotating shaft 50 may be appropriately designed so that the rotating shaft 50 and the inner peripheral end surface of the spacer main body 20 cause appropriate friction.
  • a concave portion (groove) or a convex portion may be provided on the surface of the rotating shaft 50 so that the position of the rotating shaft does not shift in the axial direction during rotation.
  • a concave portion and the convex portion it becomes easy to increase the number of ring-shaped spacer main bodies to be attached to one rotating shaft, so that the production efficiency can be improved.
  • the rotating shaft 50 is provided on the moving mechanism 52 so as to move in one direction while rotating.
  • the film 22 can be formed on the entire surface of the spacer body 20 while rotating and transporting the spacer body 20 in the spray state 23.
  • the moving mechanism 52 includes, for example, a pair of rotating members 54 wound in a spiral shape and a drive motor (not shown).
  • FIG. 6 is a diagram illustrating an example of a spacer conveying means used in the method for manufacturing a glass spacer of one embodiment.
  • the rotating member 54 is arranged along the transport path of the spacer body 20.
  • a plurality of locations of the spray state 23 are provided, and the film 22 is passed through each location of the spray state 23 while the spacer main body 20 is conveyed by the moving mechanism 52, whereby the film 22 is passed over the entire surface of the spacer main body 20. Can be reliably formed.
  • the location of the spray state 23 is preferably formed by spraying the components of the film 22 from a plurality of spray ports provided so as to surround the transport path of the spacer main body 20.
  • a plurality of spray ports can be provided on both sides of the transport path, left and right, up and down, up and down, left and right, and the like.
  • the plurality of spray ports may be provided along the transport path of the spacer main body 20.
  • the treatment for forming the film 22 may include heating the film 22 formed on the spacer body 20 by using a heating means during and / or after the formation of the film 22.
  • the spacer body 20 may be heated before the film 22 is formed, and the film 22 may be heated by the residual heat. That is, the film 22 can be heated by appropriately combining heating before, during, and after the formation of the film 22.
  • the film 22 is chemically treated by heat treatment. It causes a reaction to solidify the membrane 22.
  • the film 22 is preferably a conductive oxide or ceramic.
  • a liquid spray state 23 in which a tin organic compound such as dibutyltin diacetate or dimethyltin dichloride is dissolved in a solvent such as ethanol is formed, and the spacer body 20 is formed in this spray state 23.
  • a film 22 is formed on the surface of the above, and then, for example, it is heated at 400 to 600 ° C. to form tin oxide.
  • the spraying may be performed after heating the spacer body 20 and / or while heating.
  • conventionally known heating devices such as various heaters and heating plates can be used.
  • the spacer conveying means as shown in FIG.
  • the device for forming the film by incorporating the spacer transport means illustrated in FIG. 6 in a housing including at least a drive motor, a spray port, and optionally a heating means is a hard disk drive made of any material.
  • a film can also be formed on the surface of the device spacer.
  • the arithmetic mean roughness Ra of the surface of the film 22 is preferably 1 ⁇ m or less.
  • the membrane 22, the surface resistivity at 22 [° C.] is preferably 10 -4 ⁇ 10 6 [ ⁇ / sq].
  • the material of the film 22 is, for example, tin-containing ceramics containing tin oxide or zinc-containing ceramics containing zinc oxide. Moreover, you may use the material containing titanium oxide. Further, a material obtained by doping these substances with fluorine or aluminum oxide may be used. Film 22 formed in these materials for electrically conductive, spacer 1 having a membrane 22, the surface resistivity at 22 [° C.], may be 10 -4 ⁇ 10 6 [ ⁇ / sq].
  • the film 22 is formed by passing the component of the film 22 through the sprayed state 23 while rotating the outer peripheral end surface of the spacer body 20 in the circumferential direction.
  • the film 22 can be formed on the entire surface of the spacer body 20, and the film 22 can be formed evenly.
  • the film 22 can be processed under atmospheric pressure, the film 22 can be formed at a lower cost than PVD, CVD, or the like.
  • the method for manufacturing the spacer 1 described above is not limited to the method for forming the film 22 by passing the outer peripheral end surface of the spacer body 20 described above in the circumferential direction while passing through the place of the spray state 23, and other manufacturing methods.
  • the method can also be used.
  • the spacer main body 20 may be placed on a table such as a heating plate, and the film 22 may be formed on the entire surface by spraying a plurality of times while appropriately changing the mounting method and the spraying method.
  • Example 1 A glass spacer having an outer diameter of 32 mm, an inner diameter of 25 mm, and a thickness of 2 mm was prepared.
  • the arithmetic mean roughness Ra of the main surface, the inner peripheral end face, and the outer peripheral end face of the glass spacer was set to 0.3 ⁇ m, 0.8 ⁇ m, and 0.8 ⁇ m, respectively.
  • the film forming device has a rectangular parallelepiped housing (chamber) structure containing a pair of rotating members (spiral) equipped with a rotating shaft and a drive motor, and has a plurality of spray nozzles and lamp heaters on the upper and lower surfaces at predetermined intervals. It is provided.
  • the spray nozzle and the lamp heater are provided so that the film can be sufficiently formed even if the glass spacer is conveyed.
  • a glass spacer was passed through the rotating shaft in the housing, and the rotating shaft was bridged over a pair of rotating members.
  • the output of the lamp heater is set so that the glass spacer is heated to 400 ° C., and an ethanol solution of dibutyltin diacetate is sprayed on a specific area inside the housing every 5 seconds to spray a part inside the housing. Formed a state.
  • conditions such as a drive motor were set so that the transport speed of the glass spacer in the X direction (see FIG. 6) was 10 cm / min and the work was rotated at 3 rpm.
  • the rotating shaft moved while rotating on the rotating member and passed through the sprayed state.
  • a film was formed on the surface of the glass spacer while heating and transporting it in a sprayed state.
  • the thickness of the tin oxide film formed on the main surface, the inner peripheral end face, and the outer peripheral end face of the glass spacer was 70 nm, 82 nm, and 90 nm, respectively.
  • the film thickness of the end face was thicker than the film thickness of the main surface.
  • the difference between the maximum film thickness and the minimum film thickness is 20 nm and the maximum film thickness is 90 nm, the difference between the maximum film thickness and the minimum film thickness of the film 22 on the entire surface of the spacer 1 is less than half of the maximum film thickness.
  • the film thickness variation was very small, satisfying less than 1/4.
  • the arithmetic mean roughness Ra of these surfaces was 0.3 ⁇ m, 0.8 ⁇ m, and 0.8 ⁇ m, respectively.
  • the surface resistivity of the glass spacer after the tin oxide film formed was in the range of 10 -4 ⁇ 10 6 [ ⁇ / sq] at 22 [° C.].
  • Example 2 Using a glass spacer having the same size as above, the formation of a film on the glass spacer was repeated in the same manner as above. By reducing the transport speed in the X direction in the sprayed state, a film having a thickness larger than that of Example 1 was formed.
  • the thickness of the tin oxide film formed on the main surface, the inner peripheral end face, and the outer peripheral end face of the glass spacer was 140 nm, 170 nm, and 188 nm, respectively.
  • the film thickness of the end face was thicker than the film thickness of the main surface.
  • the difference between the maximum film thickness and the minimum film thickness of the film 22 on the entire surface of the spacer 1 was less than half of the maximum film thickness, and the film thickness variation was small.
  • the arithmetic mean roughness Ra of these surfaces was 0.4 ⁇ m, 0.9 ⁇ m, and 1.0 ⁇ m, respectively.
  • Example 3 Using a glass spacer having the same size as above, the formation of a film on the glass spacer was repeated in the same manner as above. By increasing the transport speed in the X direction in the sprayed state, a film having a thickness smaller than that of Example 1 was formed.
  • the thickness of the tin oxide film formed on the main surface, the inner peripheral end face, and the outer peripheral end face of the glass spacer was 40 nm, 47 nm, and 51 nm, respectively.
  • the film thickness of the end face was thicker than the film thickness of the main surface.
  • the difference between the maximum film thickness and the minimum film thickness of the film 22 on the entire surface of the spacer 1 was less than half and less than 1/4 of the maximum film thickness, and the film thickness variation was very small.
  • the arithmetic mean roughness Ra of these surfaces was 0.3 ⁇ m, 0.8 ⁇ m, and 0.8 ⁇ m, respectively.
  • the thickness of the tin oxide film formed on the main surface, the inner peripheral end face, and the outer peripheral end face of the obtained glass spacer is 70 nm, 140 nm, and 140 nm, respectively, and the film thickness of the end face is higher than that of the main surface. Although it was thicker than the maximum film thickness, the difference between the maximum film thickness and the minimum film thickness did not satisfy less than half of the maximum film thickness. That is, it was found that the film thickness variation of the film 22 on the entire surface of the spacer 1 was very large. The arithmetic mean roughness Ra of these surfaces was 0.3 ⁇ m, 0.9 ⁇ m, and 0.9 ⁇ m, respectively.
  • Example 1 As shown in FIG. 3, two spacers produced in Example 1 are sandwiched between three magnetic disks (main surface roughness Ra is 0.3 nm or less) to produce an HDD device, and a signal from a magnetic head is used. When we checked the operation of recording and playback, no particular problem was found. Further, as for the spacers produced in Examples 2 and 3 and the reference example, no particular problem was found when the HDD device was similarly produced and the operation was confirmed.
  • main surface roughness Ra is 0.3 nm or less
  • the present invention is not limited to the above embodiments and various improvements are made without departing from the gist of the present invention. Of course, you may make changes.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Surface Treatment Of Glass (AREA)
  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
PCT/JP2021/008935 2020-03-06 2021-03-08 ガラススペーサの製造方法、ガラススペーサ、及びハードディスクドライブ装置 Ceased WO2021177468A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2022504489A JP7290792B2 (ja) 2020-03-06 2021-03-08 ガラススペーサの製造方法、ガラススペーサ、及びハードディスクドライブ装置
CN202180016786.4A CN115176310A (zh) 2020-03-06 2021-03-08 玻璃间隔件的制造方法、玻璃间隔件和硬盘驱动器装置
US17/909,583 US11869538B2 (en) 2020-03-06 2021-03-08 Method for manufacturing glass spacer, glass spacer, and hard disk drive device
PH1/2022/552339A PH12022552339A1 (en) 2020-03-06 2021-03-08 Method for manufacturing glass spacer, glass spacer, and hard disk drive device
JP2023091016A JP7726949B2 (ja) 2020-03-06 2023-06-01 ガラススペーサの製造方法、ガラススペーサ、及びハードディスクドライブ装置
US18/494,381 US12183365B2 (en) 2020-03-06 2023-10-25 Glass spacer and hard disk drive device

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