WO2021095843A1 - セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法 - Google Patents

セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法 Download PDF

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WO2021095843A1
WO2021095843A1 PCT/JP2020/042420 JP2020042420W WO2021095843A1 WO 2021095843 A1 WO2021095843 A1 WO 2021095843A1 JP 2020042420 W JP2020042420 W JP 2020042420W WO 2021095843 A1 WO2021095843 A1 WO 2021095843A1
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Prior art keywords
ceramic substrate
metal layer
plate thickness
thickness direction
manufacturing
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PCT/JP2020/042420
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English (en)
French (fr)
Japanese (ja)
Inventor
優太 津川
西村　浩二
小橋　聖治
善幸 江嶋
晃正 湯浅
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Denka Co Ltd
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Denka Co Ltd
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Application filed by Denka Co Ltd filed Critical Denka Co Ltd
Priority to JP2021556169A priority Critical patent/JP7168795B2/ja
Priority to EP20887982.5A priority patent/EP4059911B1/en
Priority to CN202080078881.2A priority patent/CN114667806B/zh
Priority to KR1020227019594A priority patent/KR20220100629A/ko
Publication of WO2021095843A1 publication Critical patent/WO2021095843A1/ja
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Definitions

  • the present invention relates to a ceramic substrate, a composite substrate, a circuit board, a method for manufacturing a ceramic substrate, a method for manufacturing a composite substrate, a method for manufacturing a circuit board, and a method for manufacturing a plurality of circuit boards.
  • Patent Document 1 it is known that metal layers are fixed on both sides of a ceramic substrate to form a composite substrate, and a circuit pattern is formed on one metal layer of the composite substrate to form a circuit board. ..
  • This circuit board is used for, for example, a power module because it is excellent in terms of high thermal conductivity and high insulation.
  • Each such a ceramic substrate includes a metal layer forming step of fixing a metal layer (for example, a copper plate) on both sides thereof, a circuit pattern forming step of forming a circuit pattern on at least one of the metal layers, and a scribing line forming step. It is processed into a circuit board through a process.
  • a metal layer forming step of fixing a metal layer for example, a copper plate
  • a circuit pattern forming step of forming a circuit pattern on at least one of the metal layers
  • a scribing line forming step It is processed into a circuit board through a process.
  • An object of the present invention is to provide a ceramic substrate capable of producing a circuit board having excellent flatness.
  • the ceramic substrate of the first aspect of the present invention is a ceramic substrate having a rectangular shape in a plan view, and when the intersection formed by the pair of diagonal lines is used as a reference in the plate thickness direction of the ceramic substrate, the pair One of the pair of first region and the pair of second regions facing each other across the intersection is located on one side of the intersection in the plate thickness direction, and the other is located at the intersection.
  • the value obtained by dividing the maximum convex amount of the ceramic substrate in the plate thickness direction by the diagonal length of the ceramic substrate is 6 ⁇ m / mm or less.
  • the ceramic substrate of the second aspect of the present invention is a rectangular ceramic substrate in a plan view, and is cut by a first straight line that passes through the center of the ceramic substrate in a plan view and is parallel to any one of the four sides.
  • the first cut surface is cut by a second straight line whose central portion in the length direction is convexly curved toward one side in the plate thickness direction, passes through the center, and is orthogonal to the first straight line.
  • the central portion of the cut surface in the length direction is curved convexly toward the other side in the plate thickness direction, and the maximum convex amount of the ceramic substrate in the plate thickness direction at the diagonal length of the ceramic substrate.
  • the value excluding is 6 ⁇ m / mm or less.
  • the ceramic substrate of the third aspect of the present invention is the ceramic substrate, and the first one parallel to the first cut surface at each position extending from the center to both ends of the ceramic substrate in the direction along the first straight line.
  • the central portion in each length direction is curved convexly toward one side in the plate thickness direction, and the first parallel cut surface at each position is formed from the center to the second straight line. The curvature increases continuously over both ends of the ceramic substrate in the direction along the line.
  • the ceramic substrate of the fourth aspect of the present invention is the ceramic substrate, and the second one parallel to the second cut surface at each position extending from the center to both ends of the ceramic substrate in the direction along the second straight line.
  • the central portion in each length direction is curved convexly toward the other side in the plate thickness direction, and the second parallel cut surface at each position is formed from the center to the first straight line. The curvature is continuously reduced over both ends of the ceramic substrate in the direction along the line.
  • the ceramic substrate of the fifth aspect of the present invention is the ceramic substrate and has a three-dimensional shape that is axisymmetric with the first straight line as a line of symmetry in the plate thickness direction.
  • the ceramic substrate of the sixth aspect of the present invention is the ceramic substrate and has a three-dimensional shape that is axisymmetric with the second straight line as a line of symmetry in the plate thickness direction.
  • the ceramic substrate of the seventh aspect of the present invention is the ceramic substrate and includes silicon nitride or aluminum nitride.
  • the composite substrate of the eighth aspect of the present invention includes the ceramic substrate, a first metal layer fixed to the front surface side of the ceramic substrate, and a second metal layer fixed to the back surface side of the ceramic substrate. To be equipped.
  • the circuit board of one aspect of the present invention comprises the ceramic substrate, a circuit pattern formed on one surface side of the ceramic substrate, and a metal layer fixed to the other surface side of the ceramic substrate. Be prepared.
  • the method for producing a ceramic substrate according to the first aspect of the present invention is the method for producing a ceramic substrate, which is a step of cutting a strip-shaped green sheet containing a ceramic powder to obtain a single-wafer green sheet, and firing.
  • the single-wafer green sheet is placed in the chamber, the firing chamber is heated until the temperature in the firing chamber reaches at least 1600 ° C., and then the firing chamber is cooled, and the single-wafer green sheet is sintered to obtain the above.
  • the sintering step includes a sintering step of obtaining a ceramic substrate and a cutting step of a ceramic substrate for cutting the entire peripheral edge of the ceramic substrate cooled after the sintering step.
  • the firing is performed when the firing chamber is cooled.
  • the temperature in the firing chamber is rapidly cooled at a temperature in the chamber of 900 ° C. or higher and 1200 ° C. or lower, and in the step of cutting the ceramic substrate, the entire peripheral edge is cut off by at least 3 mm in width.
  • the method for producing a ceramic substrate according to the second aspect of the present invention is the method for producing a ceramic substrate, and the ceramic powder includes silicon nitride powder or aluminum nitride powder.
  • the method for manufacturing a composite substrate according to one aspect of the present invention includes a method for manufacturing the ceramic substrate, a fixing step of fixing the first metal layer on the front surface side of the ceramic substrate, and fixing the second metal layer on the back surface side. including.
  • the method for manufacturing a circuit board according to one aspect of the present invention includes a method for manufacturing the composite substrate and a pattern forming step for forming at least one circuit pattern on either the first metal layer or the second metal layer. ,including.
  • the method for manufacturing a plurality of circuit boards according to one aspect of the present invention is a pattern forming step of forming a plurality of circuit patterns on either the method for manufacturing the composite substrate and the first metal layer and the second metal layer. And a division step of dividing the composite substrate on which the plurality of circuit patterns are formed into a plurality of circuit boards each having one of the circuit patterns.
  • FIG. 2C is a schematic view of FIG.
  • FIG. 2C viewed from the front side. It is a figure for demonstrating from the deposition process included in the green sheet forming process of this embodiment to the sintering process in the manufacturing method of a plurality of mounting substrates of this embodiment. It is a graph which shows the profile of the firing temperature in the sintering process (including the condition examined by the test). It is a graph which shows the relationship between the quenching start temperature in a firing process (including the condition examined by a test), and the amount of warpage. It is a top view of the ceramic substrate of this embodiment, and is the height distribution map in the state where the profile of the degree of height (the degree of dent) in the thickness direction is attached. FIG.
  • FIG. 3D is a cross-sectional view of the ceramic substrate, which is a vertical cross-sectional view cut along the X 0- X 0 cutting line, a vertical cross-sectional view cut along the X 1- X 1 cutting line, and cut along the X 2- X 2 cutting line. It is the figure which arranged the vertical sectional views along the X direction, respectively.
  • FIG. 3D is a cross-sectional view of the ceramic substrate, which is a cross-sectional view cut along a Y 0- Y 0 cutting line, a cross-sectional view cut along a Y 1- Y 1 cutting line, and a cross section cut along a Y 2- Y 2 cutting line. It is the figure which arranged the cross-sectional view along the Y direction respectively.
  • FIG. 1 Another example of the present embodiment is a plan view of a ceramic substrate, which is a height distribution diagram in a state where a profile of a degree of height (depression) in the plate thickness direction is attached. It is the schematic for demonstrating the outer peripheral part cutting process included in the manufacturing method of the plurality of mounting substrates of this embodiment. It is a graph which shows the relationship between the cutting width of the outer peripheral part and the amount of warpage in the outer peripheral part cutting process. It is a figure for demonstrating the scrib line forming process included in the manufacturing method of the plurality of mounting substrates of this embodiment. It is a figure for demonstrating the metal layer formation process included in the manufacturing method of the plurality of mounting substrates of this embodiment. FIG.
  • FIG. 6A is a cross-sectional view of the ceramic substrate of FIG. 6A, which is a cross-sectional view cut along a 6B-6B cutting line. It is a figure for demonstrating the resist printing process included in the manufacturing method of the plurality of mounting substrates of this embodiment. It is a figure for demonstrating the etching process included in the manufacturing method of the plurality of mounting substrates of this embodiment. It is a figure for demonstrating the division process included in the manufacturing method of the plurality of mounting substrates of this embodiment. It is a figure for demonstrating the metal layer formation process of the modification.
  • the ceramic substrate 40 of this embodiment has the following basic features. Specifically, the ceramic substrate 40 of the present embodiment is described as described above when "it is rectangular in a plan view and the intersection formed by the pair of diagonal lines is used as a reference in the thickness direction of the ceramic substrate 40. Of the four regions divided by a pair of diagonal lines, one of the pair of first region and the pair of second regions facing each other across the intersection is located on one side of the intersection in the plate thickness direction, and the other is said. It is located on the other side of the plate thickness direction from the intersection, and the value obtained by dividing the maximum convex amount of the ceramic substrate 40 in the plate thickness direction by the diagonal length of the ceramic substrate 40 is 6 ⁇ m / mm or less. " Features.
  • the ceramic substrate 40 of the present embodiment is "a first unit that is rectangular in a plan view, passes through the center in the plan view, and is parallel to any one of the four sides.
  • the first cut surface cut by the straight line L1 has a second straight line whose central portion in the length direction is curved convexly toward one side in the plate thickness direction, passes through the center, and is orthogonal to the first straight line L1.
  • the central portion of the second cut surface cut by L2 is curved convexly toward the other side in the plate thickness direction, and the plate of the ceramic substrate 40 has a diagonal length of the ceramic substrate 40.
  • the value obtained by dividing the maximum convex amount in the thickness direction is 6 ⁇ m / mm or less. ” That is, the ceramic substrate 40 of the present embodiment is substantially flat or completely flat.
  • the ceramic substrate 40 of the present embodiment has a value of 6 ⁇ m obtained by dividing the maximum convex amount of the ceramic substrate 40 in the plate thickness direction by the diagonal length of the ceramic substrate 40, which is one of the above basic features. As long as the regulation of / mm or less is satisfied, the following aspects may be used.
  • the ceramic substrate 40 of the present embodiment further states that "the first parallel cut surfaces parallel to the first cut surface at each position extending from the center to both ends of the ceramic substrate 40 in the direction along the first straight line L1 are respectively.
  • the central portion in the length direction is curved convexly toward one side in the plate thickness direction, and the first parallel cut surface at each position is a ceramic substrate 40 in a direction along the second straight line from the center.
  • the curvature is continuously increased over both ends of the.
  • the second parallel cut surface parallel to the second cut surface at each position extending from the center to both ends of the ceramic substrate 40 in the direction along the second straight line L2 is ,
  • the central portion in each length direction is curved convexly toward the other side in the plate thickness direction, and the second parallel cut surface at each position is a ceramic in the direction from the center to the first straight line. It may have a feature that the curvature is continuously reduced over both ends of the substrate 40.
  • the ceramic substrate 40 of the present embodiment may further have a feature of "having a three-dimensional shape that is axisymmetric with the first straight line L1 as a line of symmetry in the plate thickness direction". Further, for example, the ceramic substrate 40 of the present embodiment may further have a feature of "having a three-dimensional shape that is axisymmetric with the second straight line L2 as a line of symmetry in the plate thickness direction”.
  • FIG. 3D is a plan view of the ceramic substrate 40 of the present embodiment, and is a height distribution diagram of the ceramic substrate 40 in a state with a profile of the degree of height (recession) in the plate thickness direction (Z direction).
  • FIG. 3E is a cross-sectional view (end view) of the ceramic substrate 40 of FIG. 3D, which is a vertical cross-sectional view (X 0- X 0 cross section) cut along an X 0- X 0 cutting line, and an X 1- X 1 cutting line.
  • FIG. 3F is a cross-sectional view of the ceramic substrate 40 of FIG. 3D, which is a cross-sectional view cut along the Y 0- Y 0 cutting line, a cross-sectional view cut along the Y 1- Y 1 cutting line, and Y 2- Y 2 It is the figure which arranged the cross-sectional view cut by the cutting line along the Y direction, respectively.
  • the ceramic substrate 40 is not flat in the plate thickness direction but is in a warped state.
  • the specific warped state can be represented by the following configurations (first configuration to fourth configuration).
  • the first configuration is divided by a pair of diagonal lines when the intersection O formed by the pair of diagonal lines (broken line in FIG. 3D) is used as a reference in the plate thickness direction of the ceramic substrate 40 in a plan view.
  • one of the pair of the first region and the pair of the second regions facing each other across the intersection O is located on one side of the intersection O in the plate thickness direction, and the other is located on the other side of the intersection O in the plate thickness direction. It is to be located on the side.
  • the amount of warpage is 6 ⁇ m / mm or less.
  • the amount of warpage in the present specification means a value obtained by dividing the maximum convex amount in the plate thickness direction of the ceramic substrate 40 by the diagonal length of the ceramic substrate 40.
  • the ceramic substrate 40 of the present embodiment has a length of 206 mm and a width of 146 mm, so that the diagonal length thereof is about 252.5 mm.
  • the cut surface (first cut surface) cut along the straight line L1 (first straight line L1) in the Y direction passing through the center O has the portion of the center O on one side in the plate thickness direction. It has an arc shape that is convex.
  • the first cut surface forms an arc-shaped surface in which the position of the central O portion serves as an inflection point and becomes convex on one side in the plate thickness direction.
  • the first cut surface has an arcuate shape in which the position of the center O portion is the position on one side of the plate thickness direction and is convex on one side in the plate thickness direction. Forming a surface.
  • the convex amount of the convex portion of the central O portion (the amount of the convex or concave portion as compared with the flat case (reference in the figure)) is defined as ⁇ Z 1 .
  • the convex amount becomes smaller as ⁇ Z 2 ( ⁇ Z 1 ) and ⁇ Z 3 ( ⁇ Z 2).
  • the convex amount ⁇ Z 1 is about 600 ⁇ m as an example.
  • the arcuate surface having a convex shape on one side in the plate thickness direction has a substantially symmetrical shape with respect to the straight line L2 (second straight line L2) in the X direction passing through the center O.
  • the convex amount in the case of an asymmetrical shape with respect to the straight line L2 is the amount of the portion that is convex or concave as compared with the flat case (reference in the figure).
  • the "maximum convex amount" in the present specification means the maximum value of the amount of the convex or concave portion as compared with the flat case. Therefore, as in the example of FIG.
  • the portion having the maximum convex amount is the center line of one or both of the width direction and the length direction. It may be offset from.
  • the amount of warpage of the ceramic substrate 40 was measured as follows. That is, the ceramic substrate 40 is irradiated with laser light by a laser three-dimensional shape measuring machine, the diffusely reflected light from the ceramic substrate 40 is received, the displacement amount is calculated, and the warp amount of the main surface of the ceramic substrate 40 is calculated. It was measured.
  • the laser three-dimensional shape measuring machine adopts K2-300 (manufactured by Kozu Seiki Co., Ltd.) as the XY ⁇ stage unit, LK-G500 (manufactured by KEYENCE Co., Ltd.) as the high-precision laser displacement meter, and a motor.
  • SC-200K manufactured by Kozu Seiki Co., Ltd.
  • DL-100 manufactured by Kozu Seiki Co., Ltd.
  • the measurement pitch was 1.0 mm.
  • the "maximum convex amount" in the present embodiment corresponds to the difference between the maximum value and the minimum value of the displacement measured by the laser three-dimensional shape measuring machine.
  • the cut surface (second cut surface) cut along the straight line L2 (second straight line L2) in the X direction passing through the center O has the portion of the center O on the other side in the plate thickness direction. It has a convex arc shape.
  • the second cut surface forms an arc-shaped surface in which the position of the central O portion serves as an inflection point and becomes convex on the other side in the plate thickness direction.
  • the second cut surface has an arc shape in which the position of the center O portion is the position on the other side in the plate thickness direction and is convex toward the other side in the plate thickness direction. Forming a surface.
  • the convex amount of the convex portion of the central O portion (the amount of the convex or concave portion as compared with the flat case) is defined as ⁇ Z 1 .
  • the convex amount increases to ⁇ Z 2 (> ⁇ Z 1 ) and ⁇ Z 3 (> ⁇ Z 2 ).
  • the convex amount ⁇ Z 1 is about 400 ⁇ m as an example.
  • the ceramic substrate 40 of the present embodiment is in a warped state that is line-symmetric with respect to the straight line L1 and the straight line L2 described later.
  • the ceramic substrate 40 of the present embodiment has a three-dimensional shape that is line-symmetric with respect to the straight line L1 and the straight line L2. From the above, in the ceramic substrate 40 of the present embodiment, the maximum convex amount is about 600 ⁇ m and the diagonal length is about 252.5 mm, so that the warp amount satisfies about 2 ⁇ m / mm to 6 ⁇ m / mm or less. It becomes 2.37 ⁇ m / mm.
  • the second configuration is a configuration in which the first configuration is viewed from a different perspective.
  • the first cut surface cut by the first straight line L1 passing through the center O and parallel to any one of the four sides in the plan view of the ceramic substrate 40 is in the length direction (Y direction).
  • Y direction the length direction
  • the second cut surface cut by the second straight line L2 that passes through the center O and is orthogonal to the straight line L1 has a central portion in the length direction that is convexly curved toward the other side in the plate thickness direction (FIG. 3F), the amount of warpage is 6 ⁇ m / mm or less.
  • the third configuration is a configuration premised on the second configuration.
  • the third configuration is a first parallel cut surface parallel to the first cut surface (X 0- X 0 cross section) at each position extending from both ends of the ceramic substrate 40 in the direction (Y direction) from the center O along the straight line L1.
  • Figure 3E X 1 -X 1 section and X 2 -X 2 cross-section of) is curved in the respective longitudinal direction of the central portion protruding toward the one side in the thickness direction, said each position first 1
  • the parallel cut surface has a continuous increase in curvature from the center O to both ends of the ceramic substrate 40 in the direction along the straight line L2 (X direction) (see FIG. 3E).
  • the fourth configuration is a configuration premised on the second configuration.
  • the fourth configuration at each position across the both ends of the ceramic substrate 40 from the center O in the direction along the straight line L2 (X direction), the second parallel cut surfaces parallel to the second cutting plane (Figure 3F of Y 1 -Y 1 cross section and Y 2 -Y 2 section) is curved in the respective longitudinal direction of the central portion protruding toward the other side of the plate thickness direction, the second parallel cut surfaces of the respective positions, the center O
  • the curvature is continuously reduced over both ends of the ceramic substrate 40 in the direction (Y direction) along the straight line L1 (see FIG. 3F).
  • the ceramic substrate 40 constitutes a so-called saddle-shaped substrate in which the center O is a saddle point.
  • the motherboard 60 of this embodiment includes a ceramic substrate 40, a first metal layer 50A fixed to the front surface 40A1 side of the ceramic substrate 40, and a second metal layer 50B fixed to the back surface 40A2 side of the ceramic substrate 40. , Equipped with.
  • the circuit board 60C of the present embodiment has a ceramic substrate 40, a circuit pattern CP formed on one surface side of the ceramic substrate 40 (in this embodiment, the surface 40A1 side as an example), and the other surface of the ceramic substrate 40.
  • a metal layer (second metal layer 50B) fixed to the side (in the present embodiment, as an example, the back surface 40A2 side (see FIG. 6B)) is provided.
  • the assembly board 60B of the present embodiment is an assembly of a plurality of circuit boards 60C in which a plurality of circuit boards 60C are arranged side by side and integrated.
  • the manufacturing method S100 of the present embodiment includes a green sheet forming step S1, a sintering step S2, an outer peripheral partial cutting step S3, a scribing line forming step S4 (hereinafter referred to as SL forming step S4), and a metal layer forming step. It includes S5, a resist printing step S6, an etching step S7, a surface treatment step S8, a division step S9, and a mounting step S10. Then, the manufacturing method S100 of the present embodiment is performed in the order described in each of these steps.
  • each step of the manufacturing method S100 of the present embodiment includes the following description of each invention.
  • the method for manufacturing the ceramic substrate 40 of the present embodiment includes a step of cutting the band-shaped green sheet 20 for obtaining the single-wafer green sheet 30 by cutting the band-shaped green sheet 20 containing the ceramic powder, and a step of arranging the single-leaf green sheet 30 in the firing chamber.
  • the temperature in the firing chamber is 900 ° C. or higher and 1200 ° C. or lower when the firing chamber is cooled.
  • the temperature in the firing chamber is rapidly cooled at the temperature of (see FIGS. 1, 2B, 2C, 3B, etc.), and in the cutting step of the ceramic substrate, the entire peripheral edge is cut off by at least 3 mm in width (see FIGS. 1, 4A). ).
  • the manufacturing method of the motherboard 60 of the present embodiment is the above-mentioned manufacturing method of the ceramic substrate and the fixing of fixing the first metal layer 50A on the front surface 40A1 side of the ceramic substrate 40 and fixing the second metal layer 50B on the back surface 40A2 side. Includes steps (see FIG. 6A).
  • the method for manufacturing the circuit board 60C of the present embodiment is one of the above-mentioned manufacturing method of the motherboard 60 and either the first metal layer 50A or the second metal layer 50B (in the case of the present embodiment, the first metal layer 50A is an example.
  • the method for manufacturing the plurality of circuit boards 60C of the present embodiment is one of the above-mentioned method for manufacturing the motherboard 60 and either the first metal layer 50A or the second metal layer 50B (in the case of the present embodiment, the first metal is an example.
  • the step of combining the green sheet forming step S1 and the sintering step S2 in the present embodiment in the order described corresponds to the method for manufacturing the ceramic substrate 40.
  • the method for manufacturing the ceramic substrate 40 of the present embodiment will be described with reference to FIGS. 2A to 2D, FIGS. 3A to 3F, and FIGS. 4A and 4B.
  • the ceramic substrate 40 is, for example, a ceramic substrate provided in a circuit board or a mounting substrate for a power module mounted on an electric vehicle, a railroad vehicle, or other industrial equipment.
  • the ceramic substrate 40 is obtained by sintering a single-wafer green sheet 30 (see FIG. 2C) described later in a laminated state (see FIG. 3A).
  • the single-wafer green sheet 30 is obtained by cutting the strip-shaped green sheet 20 (see FIGS. 2B and 2C). That is, the relationship between the ceramic substrate 40 and the single-wafer green sheet 30 is the relationship between the finished product and the intermediate product (the product manufactured in the process before becoming the finished product), or the first intermediate product and the second intermediate product.
  • the single-wafer green sheet 30 of the present embodiment is manufactured by the steps up to the intermediate stage of the manufacturing method of the ceramic substrate 40 of the present embodiment.
  • the ceramic substrate 40 of the present embodiment is, as an example, a rectangular plate (see FIGS. 3D, 5 and the like).
  • the green sheet forming step S1 includes a slurry manufacturing step S11, a molding step S12, a cutting step S13, a deposition step S14, and a degreasing step S15, and is performed in the order described in these steps (FIGS. 1 and S1). See FIG. 2A).
  • the slurry preparation step S11 will be described. This step is a step of mixing the raw material powder described later and an organic solvent to prepare a slurry 10.
  • the slurry 10 produced in this step (see FIG. 2B) is molded into a band-shaped green sheet 20 in the next step (molding step S12).
  • the raw material powder of the slurry 10 is a powder containing a main component and a sintering aid, which will be described later.
  • Main component is 80 wt% to 98.3 wt% of silicon nitride as an example (Si 3 N 4), sintering aid of at least one 1 wt% to 10 wt% as an example (as oxide) It is a rare earth element and 0.7% by mass to 10% by mass (oxide equivalent) of magnesium (Mg).
  • the pregelatinization rate of the silicon nitride powder is preferably 20% to 100% in consideration of the density, bending strength and thermal conductivity of the ceramic substrate 40.
  • the raw material powder of silicon nitride is Si 3 N 4 powder (also known as silicon nitride powder or an example of ceramic powder), the raw material powder of Mg is MgO powder, and the powder of rare earth element raw material is Y 2 O 3 powdered denoted.
  • the raw material powder of silicon nitride and the raw material powder of the sintering aid do not have to be Si 3 N 4 powder, Mg O powder and Y 2 O 3 powder, respectively.
  • the Si 3 N 4 powder, the Mg O powder and the Y 2 O 3 powder blended as described above are mixed with a plasticizer, an organic binder and an organic solvent to prepare a slurry 10. Therefore, the slurry 10 produced in this step contains ceramic powder.
  • this step is a step of manufacturing the band-shaped green sheet 20 from the slurry 10.
  • the doctor blade forming apparatus 100 includes a belt conveying mechanism 110, a forming unit 120, and a heating unit 130.
  • the belt transport mechanism 110 has a roller 112A on the upstream side, a roller 112B on the downstream side, and a belt 114, and drives the roller 112 on the downstream side to move the belt 114 from the roller 112 on the upstream side to the roller 112 on the downstream side. Move (along the X direction).
  • the molding unit 120 is arranged on the upper side of the belt 114 (on the Z direction side of the belt 114) and faces the belt 114.
  • the molding unit 120 has an accommodating portion 122 accommodating the slurry 10 and a doctor blade 124.
  • the molding unit 120 is a sheet having a film thickness determined by regulating the slurry 10 taken out from the accommodating portion 122 by its own weight and the adhesive force with the moving belt 114 by the doctor blade 124. Make it into a shape.
  • the heating unit 130 blows warm air WC onto the slurry 10 on the belt 114 having a predetermined film thickness to form the slurry 10 into a sheet (vaporizes the organic solvent).
  • a band-shaped green sheet 20 having a width defined from the slurry 10 (the Y direction in the drawing corresponds to the width direction) is produced. That is, in the molding step S12, the slurry 10 is formed into a band by doctor blade molding to obtain a band-shaped green sheet 20 containing Si 3 N 4 (ceramic) as an example.
  • this step is performed after defoaming the slurry 10 produced in the slurry production step S11 and thickening the slurry 10.
  • the film thickness of the band-shaped green sheet 20 produced in this step is set in consideration of the film thickness of the ceramic substrate 40 finally produced.
  • the regulation conditions (distance from the belt 114, etc.) of the doctor blade 124 for regulating the slurry 10 to a predetermined film thickness are also set in consideration of the film thickness of the ceramic substrate 40 to be finally manufactured. Will be done.
  • this step is a step of cutting the strip-shaped green sheet 20 to produce the single-wafer green sheet 30.
  • the cutting device 200 includes a sheet transport mechanism 210 and a cutting portion 220.
  • the sheet transport mechanism 210 has a support portion 212, a first transport portion 214, and a second transport portion 216.
  • the support portion 212 rotatably supports the roller 112B (see FIGS. 2B and 2C) in which the strip-shaped green sheet 20 produced in the molding step S12 is wound around the outer peripheral surface.
  • the first transport portion 214 arranges the posture of the strip-shaped green sheet 20 transported from the support portion 212 and conveys the strip-shaped green sheet 20 to the cutting portion 220 along the X direction (along the longitudinal direction of the strip-shaped green sheet 20). To do.
  • the second transport section 216 transports the single-wafer green sheet 30 produced by cutting the strip-shaped green sheet 20 at the cutting section 220 further downstream (in the X direction).
  • the cutting portion 220 has a housing 222, an irradiation portion 224, and a moving mechanism 226.
  • the irradiation unit 224 irradiates the laser beam LB as an example.
  • the moving mechanism 226 scans the irradiation unit 224 from one end to the other end of the strip-shaped green sheet 20 in the lateral direction (Y direction in the drawing).
  • the irradiation unit 224 and the moving mechanism 226 are attached to the housing 222.
  • the strip-shaped green sheet 20 is conveyed by the sheet conveying mechanism 210 for the length of the single-wafer green sheet 30 to stop the strip-shaped green sheet 20, and the strip-shaped green sheet 20 is stopped by the cutting portion 220.
  • the cutting portion 220 moves the irradiation portion 224 along the Y direction from one end side to the other end side in the lateral direction of the band-shaped green sheet 20 by the moving mechanism 226, while the laser light LB is transferred to the irradiation portion 224. (See Fig. 2D).
  • the irradiation unit 224 scanned by the moving mechanism 226 intermittently irradiates the laser beam LB.
  • the moving mechanism 226 scans the irradiation unit 224 by causing the irradiation unit 224 to repeatedly move and stop (see FIG. 2D).
  • the band-shaped green sheet 20 is irradiated with the laser beam LB to cut the band-shaped green sheet 20 to obtain the single-wafer green sheet 30.
  • the laser light LB may be a carbon dioxide gas laser light, an infrared laser light, an ultraviolet laser light, or other laser light as long as the band-shaped green sheet 20 can be cut.
  • the strip-shaped green sheet 20 is cut by using the cutting device 200 shown in FIG. 2C to manufacture the single-wafer green sheet 30, but the single-leaf green sheet 30 is formed from the strip-shaped green sheet 20.
  • Other methods may be used as long as they can be produced.
  • a strip-shaped green sheet 20 may be punched out by a press using a press working apparatus (not shown) to produce a single-wafer green sheet 30.
  • the ceramic substrate 40 according to this embodiment is preferably rectangular. Further, the diagonal length on the surface of the ceramic substrate 40 is preferably 150 mm or more, more preferably 200 mm or more, and particularly preferably 236 mm or more. The upper limit is not particularly limited, but can be, for example, 254 mm or less.
  • the thickness of the ceramic substrate 40 according to the present embodiment can be 0.1 mm or more and 3.0 mm or less, preferably 0.2 mm or more and 1.2 mm or less, and more preferably 0.25 mm or more and 0.5 mm or less. is there.
  • this step is a step of stacking a plurality of single-wafer green sheets 30 in the thickness direction thereof.
  • This step is a step for efficiently sintering the single-wafer green sheet 30 in a later step (sintering step S2).
  • a plurality of single-wafer green sheets 30 are deposited via a non-reactive powder layer (not shown) described later.
  • the number of sheets of the sheet-fed green sheets 30 that overlap each other is small, the number of sheets that can be processed at one time in the sintering furnace (not shown) in the subsequent sintering step S2 is small (the production efficiency is low).
  • the number of sheets of the sheet-fed green sheet 30 stacked is large, the binder contained in the sheet-fed green sheet 30 is less likely to be decomposed in the next step (defatting step S15).
  • the number of sheet-fed green sheets 30 to be stacked in this step is 8 to 100, preferably 30 to 70.
  • the non-reactive powder layer of the present embodiment is, for example, a boron nitride powder layer (BN powder layer) having a film thickness of about 1 ⁇ m to 20 ⁇ m.
  • the BN powder layer has a function of easily separating the ceramic substrate 40 after the next step (sintering step S2).
  • the BN powder layer is applied as a slurry of BN powder on one surface of each sheet-fed green sheet 30 by, for example, spraying, brush coating, roll coater, screen printing, or the like.
  • the BN powder has a purity of 85% or more, and preferably has an average particle size of 1 ⁇ m to 20 ⁇ m.
  • This step is a step for degreasing the binder and the plasticizer contained in the single-wafer green sheet 30 before the next step (sintering step S2).
  • a plurality of single-wafer green sheets 30 (see FIG. 3A) stacked in the deposition step S14 are held in a temperature environment of 450 ° C. to 750 ° C. for 0.5 hours to 20 hours.
  • the binder and the plasticizer contained in the plurality of single-wafer green sheets 30 are degreased.
  • a plurality of single-wafer green sheets 30 (hereinafter referred to as a plurality of single-wafer green sheets 30 in FIG. 3A), which are stacked in the deposition step S14 and degreased by the binder and the plasticizer in the degreasing step S15, are baked.
  • the sintering device is equipped with a sintering furnace and a control device.
  • the sintering furnace has a temperature control mechanism, a firing chamber, and a thermometer for measuring the temperature in the firing chamber.
  • the temperature adjusting mechanism includes a temperature raising unit (as an example, a heater) for raising the temperature in the firing chamber and a cooling unit (for example, a water cooling pipe) for cooling the firing chamber.
  • the control device is a temperature adjusting mechanism so that the temperature in the firing chamber changes according to the temperature control program described later. To control.
  • the temperature control program is stored in a storage device (for example, ROM or the like) of the control device.
  • the temperature control program is a program for the control device to perform temperature control by the temperature adjusting mechanism while referring to the temperature information of the thermometer (for example, PID control or the like).
  • the temperature control program comprises a temperature profile in the firing chamber consisting of a temperature raising region F1 having a slow heating region, a temperature holding region F2, and a cooling region F3, and the profile proceeds in the order described. (See FIG. 3B).
  • the technical significance of the temperature rising region F1, the temperature holding region F2, and the cooling region F3 will be described.
  • the temperature rise region F1 is a temperature region for the sintering aid contained in each single-wafer green sheet 30 to react with the oxide layer on the surface of the silicon nitride particles to form a liquid phase.
  • the temperature rising region F1 of the present embodiment is, for example, in about 12 hours from room temperature to a temperature within the range of 1600 ° C. to 2000 ° C. (in the case of the present embodiment, about 1800 ° C. as an example). It is preferable to raise the temperature in a specific manner.
  • the grain growth of ⁇ -type silicon nitride is suppressed, and the silicon nitride particles are rearranged and densified in the liquid-phased sintering aid.
  • a ceramic substrate 40 having a small pore diameter and a small porosity, a strong bending strength, and a high thermal conductivity can be obtained through the next temperature holding region F2.
  • the temperature holding region F2 is a ceramic substrate which is a sintered body by promoting rearrangement of silicon nitride particles, formation of ⁇ -type silicon nitride crystals, and grain growth of silicon nitride crystals from the liquid phase generated in the temperature rising region F1.
  • This is a temperature range for further densifying 40.
  • the temperature in the temperature holding range F2 is 1600 ° C. to 2000 ° C. in consideration of the size and aspect ratio (ratio of major axis to minor axis) of ⁇ -type silicon nitride particles, formation of pores due to volatilization of the sintering aid, and the like. It is preferable that the temperature is within the range of ° C.
  • the holding time is 1 hour to 30 hours (in the case of this embodiment, about 8 hours as an example).
  • the temperature of the temperature holding region F2 is less than 1600 ° C., the ceramic substrate 40 is difficult to be densified.
  • the sintering aid volatilizes and silicon nitride decomposes violently, making it difficult for the ceramic substrate 40 to become dense.
  • the temperature of the temperature holding region F2 may be set so as to change with time (for example, the temperature is gradually increased). May be set as).
  • the temperature of the temperature holding region F2 is more preferably a temperature in the range of 1750 ° C. to 1950 ° C., and further preferably a temperature in the range of 1800 ° C. to 1900 ° C. Further, the temperature of the temperature holding region F2 is preferably 50 ° C. or more higher than the upper limit of the temperature of the slow heat region F1, and more preferably 100 ° C. to 300 ° C. or more higher.
  • the holding time of the temperature holding region F2 is more preferably 2 hours to 20 hours, still more preferably 3 hours to 10 hours.
  • the cooling region F3 is a temperature region for cooling and solidifying the liquid phase maintained in the temperature holding region F2 and fixing the position of the obtained grain boundary phase.
  • the cooling region F3 of the present embodiment includes a quenching region F4 described later.
  • the cooling rate of the cooling region F3 is preferably 100 ° C./hour or more, more preferably 300 ° C./hour or more, and more preferably 500 ° C./hour, in order to rapidly solidify the liquid phase and maintain the uniformity of the grain boundary phase distribution. More than time is more preferred.
  • the practical cooling rate is preferably 500 ° C. to 600 ° C./hour.
  • the cooling region F3 is the temperature region after the temperature rising region F1 and the temperature holding region F2 in the temperature control program (see FIG. 3B). Therefore, the cooling region F3 of the present embodiment can be said to be a temperature region in which the firing chamber is cooled after the firing chamber is heated by the temperature raising region F1 and the temperature holding region F2 until the temperature in the firing chamber reaches at least 1600 ° C. ( See FIG. 3B).
  • the cooling region F3 of the present embodiment has a temperature region in which the cooling temperature rate is further increased in the middle of the progress.
  • this "temperature region in which the cooling rate is further increased" is referred to as a quenching region F4.
  • the quenching region F4 of the present embodiment is started when, for example, the temperature in the firing chamber reaches any temperature of 900 ° C. or higher and 1200 ° C. or lower.
  • the time for performing the quenching region F4 is, for example, about half or less of the time for performing the cooling region F3.
  • the technical significance of setting the quenching region F4 in the cooling region F3 (see FIGS. 3C to 3F, etc.) will be described later.
  • This step is a step (cutting step) of cutting a portion on the entire peripheral edge side of the ceramic substrate 40 manufactured through the sintering step S2.
  • a laser processing machine (not shown) is used to cut a portion having a width of at least 3 mm as an example of the entire peripheral edge side of the ceramic substrate 40 after the sintering step S2.
  • the laser light source of the laser processing machine intermittently irradiates the laser beam along the portion to be cut. As a result, this step produces a ceramic substrate 40 in which the entire peripheral edge is cut.
  • this step is performed by intermittently irradiating the laser beam with a laser processing machine, but this step may be performed by another method as long as the outer peripheral edge portion can be cut. ..
  • a cutting method by continuous irradiation of laser light, a cutting method by polishing, or another cutting method may be used.
  • the above is the explanation of the outer peripheral partial cutting step S3.
  • the above is a description of the method for manufacturing the ceramic substrate 40 of the present embodiment.
  • FIG. 3B is a graph showing a profile of the firing temperature in the sintering step S2 (including the conditions examined by the test).
  • the quenching region F4 is started.
  • FIG. 3C is a graph of the result, that is, a graph showing the relationship between the quenching start temperature in the sintering step S2 and the amount of warpage. According to the graph of FIG. 3C, it can be seen that the lower the quenching start temperature, the smaller the amount of warpage of the ceramic substrate 40 tends to be.
  • the amount of warpage is preferably 6 ⁇ m or less at the maximum.
  • the maximum permissible value of the amount of warpage is 6 ⁇ m as an example.
  • the reason is that it can be easily handled during the circuit pattern forming step (resist printing step S6 and etching step S7) or the electronic component mounting step S10.
  • the higher the quenching start temperature the larger the amount of warpage and the more the amount of warpage varies. This means that the higher the quenching start temperature, the greater the influence of the partial strain of the ceramic substrate 40 due to the quenching.
  • the quenching start temperature is 400 ° C. to 1100 ° C.
  • the amount of warpage of the ceramic substrate 40 is the maximum amount of warpage even when the variation in the amount of warpage is taken into consideration. It is less than the permissible value (in this case, 2 ⁇ m / mm to less than 6 ⁇ m / mm). Further, if the quenching start temperature is extremely lowered (for example, 400 ° C. or lower), the productivity is lowered due to the extension of the firing time. Therefore, in the present embodiment, the quenching start temperature is set to be in an appropriate range of 900 ° C. to 1100 ° C. in consideration of the balance between the amount of warpage and the shortening of the firing time. If the shortening of the firing time is not taken into consideration, the quenching start temperature may be set to less than 650 ° C. The above is the technical significance of setting the quenching region F4 in the cooling region F3.
  • FIG. 4B is a graph of the result, that is, a graph showing the relationship between the cutting width of the outer peripheral portion and the amount of warpage in the outer peripheral portion cutting step S3. As can be seen from the graph of FIG.
  • This step is a step of forming a plurality of scribing lines SL (three lines as an example in this embodiment) on one surface of the ceramic substrate 40 (surface 40A1 as an example in this embodiment).
  • the ceramic substrate 40A with SL is manufactured.
  • a total of three straight lines, one in the center in the width direction and two in the length direction are divided into three equal parts by the laser beam irradiated from the irradiation portion (not shown) on the surface 40A1 of the ceramic substrate 40 as an example. Is formed, and the entire region of the surface 40A1 is divided into six equal parts.
  • each scribe line SL is composed of a plurality of dents arranged in a straight line (see FIG. 6B). Therefore, the irradiation unit (for example, a carbon dioxide laser light source, a YAG laser light source, etc.) used in this step can intermittently irradiate laser light, for example.
  • Each scribe line SL is used as a cutting line when the ceramic substrate 40 is divided into a plurality of (six in the present embodiment) in the dividing step S9 (see FIG. 1), which is a later step.
  • the metal layer forming step S5 will be described with reference to FIGS. 6A and 6B.
  • the first metal layer 50A and the second metal layer 50B are fixed to the front surface 40A1 side and the back surface 40A2 side of the ceramic substrate 40A with SL, respectively.
  • the first metal layer 50A and the second metal layer 50B are fixed to the front surface 40A1 side and the back surface 40A2 side, respectively, via a brazing material (not shown).
  • a paste-like brazing material is uniformly applied to the front surface 40A1 and the back surface 40A2 of the ceramic substrate 40 by a method such as a roll coater method, a screen printing method, or a transfer method, and further, the paste-like material is uniformly applied.
  • the first metal layer 50A and the second metal layer 50B are joined to the front surface 40A1 and the back surface 40A2 of the ceramic substrate 40 via a brazing material, respectively.
  • the screen printing method is preferable in that the paste-like brazing material is uniformly applied. Further, in this case, it is preferable to control the clay of the paste-like brazing material to 5 Pa ⁇ s to 20 Pa ⁇ s.
  • FIG. 6B illustrates a state in which microcracks MC extending from each of the plurality of dents constituting the scribe line SL to the back surface 40A2 are formed. It is what is formed.
  • the microcrack MC is also formed during the above-mentioned outer peripheral portion cutting step S3.
  • the resist printing step S6 will be described with reference to FIG. 7.
  • the first metal layer 50A of the motherboard 60 is coated with a photosensitive resist film PRF, and the six regions defined by the three scribing lines SL in the first metal layer 50A are each circuit described later.
  • This is a step of forming a resist pattern PRP corresponding to the pattern CP.
  • an exposure apparatus (not shown) is used to print a resist pattern PRP on the resist film PRF (the resist pattern PRP is cured, and a portion of the resist film PRF other than the resist pattern PRP is printed. Leave uncured).
  • the motherboard 60A with PRP is manufactured.
  • the etching step S7 (an example of the circuit pattern forming step) will be described with reference to FIG.
  • the uncured resist film PRF in the resist film PRF of the motherboard 60A with PRP is removed, the exposed portion of the first metal layer 50A is etched, and then the remaining resist pattern PRP is removed to remove the circuit pattern CP. Is the process of forming.
  • the motherboard 60A with PRP before this step becomes a collective substrate 60B in which the circuit pattern CP is formed in each of the six regions partitioned by the three scribe lines SL.
  • the assembly substrate 60B when the assembly substrate 60B is formed, all the portions of the three scribe lines SL formed in the SL forming step S4 are exposed as the first metal layer 50A is etched.
  • Electronic components (not shown) such as ICs, capacitors, and resistors are mounted on each circuit pattern CP formed in this step in the mounting step S10 described later.
  • the etching step S7 is taken as an example of the circuit pattern forming step, but the combination of the resist printing step S6 and the etching step S7 may be regarded as an example of the circuit pattern forming step.
  • a protective layer such as a solder resist is formed on the surface of the assembly substrate 60B on the side where a plurality of circuit pattern CPs (six in this embodiment) are formed, except for the bonding portion where the electronic components are bonded.
  • This is a step of covering with (not shown) and surface-treating a portion other than the joint portion.
  • the joint portion to which the electronic component is joined is plated by, for example, an electrolytic plating method, and the surface treatment of the joint portion is performed.
  • the product at the end of the etching step S7 is the assembly substrate 60B, but the product at the end of the surface treatment step S8, that is, the substrate in which the assembly substrate 60B is coated with the protective layer is assembled. You may think of it as a substrate.
  • a division step S9 Next, the division step S9 will be described with reference to FIG.
  • a plurality of assembly boards 60B (or ceramic substrates 40A with SL) are cut along a plurality of (three as an example in this embodiment) scribing line SL, and a plurality of assembly boards 60B (one example in this embodiment) are cut.
  • This is a step of dividing the circuit board into 60C.
  • the first metal layer 50A becomes the circuit pattern CP of each circuit board 60C by the steps so far.
  • the region partitioned by the three scribe lines SL is the metal on the side opposite to the side on which the circuit pattern CP is formed in each circuit board 60C by the steps so far.
  • the metal layer functions as a heat radiating layer for radiating heat generated by electronic components mounted on the circuit pattern CP when the mounting board (not shown) manufactured in the mounting step S10 described later is used. ..
  • the metal layer forming step S5 is performed on the motherboard 60, and then the dividing step S9 is performed.
  • the surface treatment step S8 may be performed from the metal layer forming step S5 after the step S9 is performed.
  • This step is a step of mounting an electronic component (not shown) on each circuit board 60C (see FIG. 9).
  • a mounting device (not shown) is used to attach solder (not shown) to a joint portion where electronic components are joined in the circuit pattern CP (see FIG. 9) of each circuit board 60C, and the joint portion is attached. Join the joining terminals of electronic components to.
  • this step is a step after the split step S9, but the split step S9 may be performed after the main step. That is, the manufacturing method S100 of the present embodiment may be performed in the order of the mounting step S10 and the dividing step S9 after the surface treatment step S8.
  • an inspection device (not shown) is used to inspect the circuit pattern CP, inspect the operation of electronic components, and the like.
  • the above is the description of the manufacturing method S100 of the present embodiment.
  • the ceramic substrate 40 of the present embodiment has a rectangular shape in a plan view, and the intersection formed by the pair of diagonal lines is used as a reference in the plate thickness direction of the ceramic substrate 40.
  • one of the pair of first region and the pair of second regions facing each other across the intersection is located on one side of the intersection in the plate thickness direction among the four regions divided by the pair of diagonal lines.
  • the other is located on the other side of the intersection in the plate thickness direction, and the value obtained by dividing the maximum convex amount of the ceramic substrate 40 in the plate thickness direction by the diagonal length of the ceramic substrate 40 is 6 ⁇ m / mm or less. Is.
  • the ceramic substrate 40 of the present embodiment is manufactured by controlling the forced cooling temperature, and is warped in a saddle shape due to an appropriate residual thermal stress remaining.
  • the saddle-shaped warped ceramic substrate 40 is continuously curved, and the warp is easily corrected when laminated with the metal plates (first metal layer 50A and second metal layer 50B) to form a flat shape. .. Therefore, the ceramic substrate 40 of the present embodiment has excellent adhesion to the metal plate (first metal layer 50A and second metal layer 50B), and has excellent adhesion to the metal plate (first metal layer 50A and second metal layer 50B). Excellent bondability.
  • the ceramic substrate 40 of the present embodiment has the above-mentioned configuration, so that a circuit board having excellent flatness can be produced.
  • the ceramic substrate 40 of the present embodiment has a rectangular shape in a plan view, passes through the center thereof in a plan view, and is parallel to any one of the four sides.
  • the first cut surface cut by the first straight line L1 has a central portion in the length direction that is convexly curved toward one side in the plate thickness direction, passes through the center, and is orthogonal to the first straight line L1.
  • the central portion in the length direction is curved convexly toward the other side in the plate thickness direction, and the length of the diagonal line of the ceramic substrate 40 is the length of the ceramic substrate 40.
  • the ceramic substrate 40 of the present embodiment is processed into a circuit board 60C (see FIG. 9) by fixing the first metal layer 50A and the second metal layer 50B on both side surfaces thereof, respectively. Therefore, in the ceramic substrate 40 of the present embodiment, various thermal histories are added in a state where the first metal layer 50A and the second metal layer 50B are fixed on both side surfaces thereof (the state of the motherboard 60), respectively. That is, thermal strain and thermal stress are generated inside the motherboard 60.
  • the ceramic substrate 40 of the present embodiment can produce a circuit board having excellent flatness in which residual thermal strain and residual thermal stress are remarkably reduced.
  • the ceramic substrate and the metal plate (first metal layer 50A and second metal layer 50B) are formed. Adhesion may decrease, poor bonding may occur, and the amount of warpage as a circuit board may increase.
  • the metal plates (first metal layer 50A and second metal layer 50B). ) Is excellent, poor bonding is suppressed, and the amount of warpage as a circuit board is reduced.
  • the ceramic substrate 40 of the present embodiment has a first position parallel to the first cut surface at each position extending from the center to both ends of the ceramic substrate 40 in the direction along the first straight line L1.
  • the central portion in each length direction is curved convexly toward one side in the plate thickness direction, and the first parallel cut surface at each position is the second straight line from the center.
  • the curvature is continuously increased over both ends of the ceramic substrate 40 in the direction along the above. Therefore, by having the above-described configuration, the ceramic substrate 40 of the present embodiment can produce a circuit board having excellent flatness in which residual thermal strain and residual thermal stress are remarkably reduced.
  • the first parallel cut surface at each position is both ends of the ceramic substrate 40 in a direction from the center along the second straight line.
  • the adhesion to the metal plate decreases in the region where the curvature changes locally, and the bonding is performed. Defects may occur and the amount of warpage as a circuit board may increase.
  • the ceramic substrate 40 of the present embodiment is warped in a saddle shape, that is, there is no region where the curvature is locally changed, the metal plates (first metal layer 50A and second metal layer 50B). ) Is excellent, poor bonding is suppressed, and the amount of warpage as a circuit board is reduced.
  • the ceramic substrate 40 of the present embodiment has a second position parallel to the second cut surface at each position extending from the center to both ends of the ceramic substrate 40 in the direction along the second straight line L2.
  • the central portion in each length direction is curved convexly toward the other side in the plate thickness direction, and the second parallel cut surface at each position is the first straight line from the center.
  • the curvature is continuously reduced over both ends of the ceramic substrate 40 in the direction along. Therefore, by having the above-described configuration, the ceramic substrate 40 of the present embodiment can produce a circuit board in which residual thermal strain and residual thermal stress are remarkably reduced and excellent in flatness.
  • the second parallel cut surface at each position is both ends of the ceramic substrate 40 in the direction from the center along the first straight line.
  • the adhesion to the metal plate decreases in the region where the curvature changes locally, and the bonding is performed. Defects may occur and the amount of warpage as a circuit board may increase.
  • the metal plates since the ceramic substrate 40 of the present embodiment is warped in a saddle shape, that is, there is no region where the curvature is locally changed, the metal plates (first metal layer 50A and second metal layer 50B). ) Is excellent, poor bonding is suppressed, and the amount of warpage as a circuit board is reduced.
  • ⁇ Fifth effect> For example, in the case of a ceramic substrate having a shape different from that of the ceramic substrate 40 of the present embodiment and having local waviness or the like, the shape is formed when the ceramic substrate is bonded to the metal plate (first metal layer 50A and second metal layer 50B). (Local waviness, etc.) cannot be corrected, which may lead to poor joining.
  • the ceramic substrate 40 of the present embodiment the ceramic substrate 40 is warped in a saddle shape, and the value obtained by dividing the maximum convex amount in the plate thickness direction of the ceramic substrate 40 by the diagonal length of the ceramic substrate 40 is 6 ⁇ m /. It is mm or less. Therefore, according to the ceramic substrate 40 of the present embodiment, it is possible to produce a circuit board having excellent adhesion to the metal plates (first metal layer 50A and second metal layer 50B) and good bondability.
  • the motherboard 60 of this embodiment has a ceramic substrate 40, a first metal layer 50A fixed to the front surface 40A1 side of the ceramic substrate 40, and a back surface 40A2 side of the ceramic substrate 40.
  • the ceramic substrate 40 included in the motherboard 60 of the present embodiment has the above-mentioned first to fourth effects. Therefore, the motherboard 60 of the present embodiment is provided with the ceramic substrate 40 of the present embodiment, so that the residual thermal strain and the residual thermal stress are remarkably reduced and the flatness is excellent.
  • the circuit board 60C of the present embodiment includes a ceramic substrate 40 and a circuit pattern CP formed on one surface side of the ceramic substrate 40 (in this embodiment, the surface 40A1 side as an example).
  • a metal layer (second metal layer 50) fixed to the other surface side of the ceramic substrate 40 (in the present embodiment, the back surface 40A2 side as an example) is provided.
  • the ceramic substrate 40 included in the circuit board 60C of the present embodiment has the above-mentioned first to fourth effects. Therefore, the circuit board 60C of the present embodiment is provided with the ceramic substrate 40 of the present embodiment, so that the residual thermal strain and the residual thermal stress are remarkably reduced and the flatness is excellent.
  • the method for producing the ceramic substrate 40 of the present embodiment includes a cutting step (see FIGS. 2B and 2C) of cutting the strip-shaped green sheet 20 containing the ceramic powder to obtain the single-wafer green sheet 30 and the single-wafer green in the firing chamber.
  • the sheet 30 is arranged, the firing chamber is heated until the temperature in the firing chamber reaches at least 1600 ° C., and then the firing chamber is cooled, and the single-wafer green sheet 30 is sintered to obtain a ceramic substrate 40.
  • the sintering step which includes a knotting step, the temperature in the firing chamber is rapidly cooled when the temperature in the firing chamber becomes 650 ° C. or lower when the firing chamber is cooled (see FIG. 3B).
  • the method for manufacturing the ceramic substrate 40 of the present embodiment further includes a cutting step of cutting the entire peripheral edge of the cooled ceramic substrate 40 after the sintering step (see FIG. 4A).
  • a cutting step of cutting the entire peripheral edge of the cooled ceramic substrate 40 after the sintering step see FIG. 4A.
  • the ceramic substrate 40 whose entire peripheral edge is cut is released from a state in which compressive stress or tensile stress is applied due to the influence of cooling, that is, stress of the outer peripheral edge in particular.
  • it is possible to manufacture the ceramic substrate 40 in which the residual thermal strain and the residual thermal stress are remarkably reduced and the flatness is excellent see FIG. 4B). ..
  • the method for manufacturing the motherboard 60 of the present embodiment is the method of manufacturing the ceramic substrate 40 of the present embodiment, in which the first metal layer 50A is fixed to the front surface 40A1 side of the ceramic substrate 40 and the second metal layer 50B is attached to the back surface 40A2 side. It includes a fixing step of fixing (see FIG. 6A).
  • the method for manufacturing the ceramic substrate 40 of the present embodiment has the above-mentioned seventh effect. Therefore, according to the method for manufacturing the motherboard 60 of the present embodiment, it is possible to manufacture the motherboard 60 in which the residual thermal strain and the residual thermal stress are remarkably reduced and the flatness is excellent.
  • the method for manufacturing the circuit board 60C of the present embodiment is the manufacturing method of the motherboard 60 of the present embodiment and either one of the first metal layer 50A and the second metal layer 50B (in the case of the present embodiment, the first metal layer).
  • 50A) includes a pattern forming step of forming a circuit pattern CP (see FIGS. 7, 8 and the like). Then, the manufacturing method of the motherboard 60 of the present embodiment exerts the above-mentioned eighth effect. Therefore, according to the method for manufacturing the circuit board 60C of the present embodiment, it is possible to manufacture the circuit board 60C in which the residual thermal strain and the residual thermal stress are remarkably reduced and the flatness is excellent.
  • an example of ceramic powder has been described as silicon nitride.
  • an example of the ceramic powder may be another ceramic powder.
  • aluminum nitride powder may be used.
  • the molding step S12 (see FIG. 2A) included in the green sheet forming step S1 of the present embodiment, it is assumed that the doctor blade molding is used. However, if the slurry 10 can be molded into the band-shaped green sheet 20, the molding step S12 may be performed by another method. For example, the molding step S12 may be performed by extrusion molding.
  • the irradiation unit 224 is moved from one end side to the other end side of the strip-shaped green sheet 20 in the lateral direction.
  • the strip-shaped green sheet 20 can be cut to obtain the single-wafer green sheet 30 as a result, the cut portion of the strip-shaped green sheet 20 is one end side of the strip-shaped green sheet 20 in the lateral direction as in the case of the present embodiment. It does not have to be a straight portion extending from the other end to the other end.
  • the strip-shaped green sheet 20 is cut so as to separate (or hollow out) the single-leaf green sheet 30 from the strip-shaped green sheet 20 by making a hole in the strip-shaped green sheet 20 in the shape of the single-leaf green sheet 30.
  • the single-wafer green sheet 30 obtained by cutting the strip-shaped green sheet 20 may have at least a part of all end faces thereof as a cut surface.
  • the circuit pattern CP is formed on the first metal layer 50A.
  • the circuit pattern CP may be formed on the second metal layer 50B without forming the circuit pattern CP on the first metal layer 50A. That is, in the pattern forming step (resist printing step S6 and etching step S7), at least one circuit pattern CP may be formed on either the first metal layer 50A or the second metal layer 50B.
  • the scribe line SL has been described as having a plurality of dents arranged in a straight line (see FIG. 6B).
  • the scribe line SL may be, for example, a continuous groove, a plurality of dents having different lengths, widths, etc., as long as the function can be exhibited.
  • the plurality of scribe lines SL has been described as being three scribe lines SL (see FIG. 5). However, the number of the plurality of scribe lines SL may be at least one or more.
  • the plurality of scribe lines SL divide the motherboard 60 into six equal parts (see FIG. 5). However, the plurality of scribe lines SL do not have to divide the motherboard 60 into equal parts.
  • the metal layer forming step S5 may be performed after the outer peripheral partial cutting step S3 without performing the SL forming step S4.
  • the mounting step S10 is performed without performing the dividing step S9 after the surface treatment step S8 (see FIG. 1), one mounting substrate is manufactured from one motherboard 60.
  • the method for manufacturing the ceramic substrate 40 of the present embodiment includes the outer peripheral partial cutting step S3 (see FIGS. 1, 4A and 4B).
  • the amount of warpage of the ceramic substrate 40 can be made equal to or less than the maximum permissible value, so that it is not necessary to make the outer peripheral partial cutting step S3 an indispensable component.

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PCT/JP2020/042420 2019-11-15 2020-11-13 セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法 Ceased WO2021095843A1 (ja)

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EP20887982.5A EP4059911B1 (en) 2019-11-15 2020-11-13 Ceramic substrate, composite substrate, circuit board, method for producing ceramic substrate, method for producing composite substrate, method for producing circuit board, and method for producing plurality of circuit boards
CN202080078881.2A CN114667806B (zh) 2019-11-15 2020-11-13 陶瓷基板、复合基板及电路基板以及陶瓷基板的制造方法、复合基板的制造方法、电路基板的制造方法及多个电路基板的制造方法
KR1020227019594A KR20220100629A (ko) 2019-11-15 2020-11-13 세라믹 기판, 복합 기판 및 회로 기판 그리고 세라믹 기판의 제조 방법, 복합 기판의 제조 방법, 회로 기판의 제조 방법 및 복수의 회로 기판의 제조 방법

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KR20240127948A (ko) 2021-12-23 2024-08-23 가부시끼가이샤 도꾸야마 그린 시트, 질화규소 소결체의 제조 방법 및 질화규소 소결체
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