JPWO2021095843A1 - - Google Patents

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Publication number
JPWO2021095843A1
JPWO2021095843A1 JP2021556169A JP2021556169A JPWO2021095843A1 JP WO2021095843 A1 JPWO2021095843 A1 JP WO2021095843A1 JP 2021556169 A JP2021556169 A JP 2021556169A JP 2021556169 A JP2021556169 A JP 2021556169A JP WO2021095843 A1 JPWO2021095843 A1 JP WO2021095843A1
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Japan
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JP2021556169A
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JPWO2021095843A5 (https=
JP7168795B2 (ja
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    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
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    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/587Fine ceramics
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    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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    • C04B35/593Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
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    • C04B35/71Ceramic products containing macroscopic reinforcing agents
    • C04B35/78Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80Fibres, filaments, whiskers, platelets, or the like
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
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    • C04B2235/30Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/6025Tape casting, e.g. with a doctor blade
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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structure Of Printed Boards (AREA)
JP2021556169A 2019-11-15 2020-11-13 セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法 Active JP7168795B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019206750 2019-11-15
JP2019206750 2019-11-15
PCT/JP2020/042420 WO2021095843A1 (ja) 2019-11-15 2020-11-13 セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法

Publications (3)

Publication Number Publication Date
JPWO2021095843A1 true JPWO2021095843A1 (https=) 2021-05-20
JPWO2021095843A5 JPWO2021095843A5 (https=) 2022-07-05
JP7168795B2 JP7168795B2 (ja) 2022-11-09

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JP2021556169A Active JP7168795B2 (ja) 2019-11-15 2020-11-13 セラミック基板、複合基板及び回路基板並びにセラミック基板の製造方法、複合基板の製造方法、回路基板の製造方法及び複数の回路基板の製造方法

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EP (1) EP4059911B1 (https=)
JP (1) JP7168795B2 (https=)
KR (1) KR20220100629A (https=)
CN (1) CN114667806B (https=)
WO (1) WO2021095843A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7695850B2 (ja) * 2021-09-21 2025-06-19 デンカ株式会社 セラミック複合基板、及びセラミック複合基板の製造方法
CN118119577A (zh) 2021-12-23 2024-05-31 株式会社德山 生片、氮化硅烧结体的制造方法及氮化硅烧结体
CN115124351B (zh) * 2022-07-18 2023-10-20 合肥圣达电子科技实业有限公司 氮化铝多层用高温阻焊浆料及其制备方法
WO2025205771A1 (ja) * 2024-03-28 2025-10-02 京セラ株式会社 窒化珪素基板及び冷却装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141476A (ja) * 1988-11-21 1990-05-30 Murata Mfg Co Ltd セラミック基板の製造方法
JP2007019123A (ja) * 2005-07-06 2007-01-25 Sumitomo Metal Electronics Devices Inc セラミック回路基板集合体
JP2007198626A (ja) * 2006-01-24 2007-08-09 Tdk Corp 焼成炉
JP2008186897A (ja) * 2007-01-29 2008-08-14 Tdk Corp 多層セラミック基板の製造方法
JP2017178715A (ja) * 2016-03-31 2017-10-05 日立金属株式会社 セラミック焼結板の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4155960A (en) * 1977-03-02 1979-05-22 Norton Company Porcelain tower packing
JP3722573B2 (ja) * 1996-12-11 2005-11-30 電気化学工業株式会社 セラミックス基板及びそれを用いた回路基板とその製造方法
EP1201623B1 (en) * 2000-10-27 2016-08-31 Kabushiki Kaisha Toshiba Silicon nitride ceramic substrate and silicon nitride ceramic circuit board using the substrate
GB2412384A (en) * 2004-03-24 2005-09-28 David Bartlett Three-dimensional tiles
JP6012990B2 (ja) * 2012-03-19 2016-10-25 日本軽金属株式会社 放熱器一体型基板の製造方法
EP3255666B1 (en) * 2015-02-02 2021-10-13 Kabushiki Kaisha Toshiba Silicon nitride circuit substrate and electronic component module using same
JP6399252B2 (ja) * 2016-03-28 2018-10-03 日立金属株式会社 回路基板および窒化ケイ素焼結基板の製造方法
JP2018018971A (ja) 2016-07-28 2018-02-01 日立金属株式会社 セラミック基板の製造方法
US10377076B2 (en) * 2017-07-31 2019-08-13 City University Of Hong Kong System and method for four-dimensional printing of ceramic origami structures
KR20190022383A (ko) * 2017-08-24 2019-03-06 주식회사 아모센스 세라믹 기판 제조방법 및 세라믹 기판
US10916433B2 (en) 2018-04-06 2021-02-09 Applied Materials, Inc. Methods of forming metal silicide layers and metal silicide layers formed therefrom

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02141476A (ja) * 1988-11-21 1990-05-30 Murata Mfg Co Ltd セラミック基板の製造方法
JP2007019123A (ja) * 2005-07-06 2007-01-25 Sumitomo Metal Electronics Devices Inc セラミック回路基板集合体
JP2007198626A (ja) * 2006-01-24 2007-08-09 Tdk Corp 焼成炉
JP2008186897A (ja) * 2007-01-29 2008-08-14 Tdk Corp 多層セラミック基板の製造方法
JP2017178715A (ja) * 2016-03-31 2017-10-05 日立金属株式会社 セラミック焼結板の製造方法

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