WO2021003759A1 - Mécanisme de retournement de plaque en céramique et système d'amenée de plaques en céramique - Google Patents

Mécanisme de retournement de plaque en céramique et système d'amenée de plaques en céramique Download PDF

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Publication number
WO2021003759A1
WO2021003759A1 PCT/CN2019/096243 CN2019096243W WO2021003759A1 WO 2021003759 A1 WO2021003759 A1 WO 2021003759A1 CN 2019096243 W CN2019096243 W CN 2019096243W WO 2021003759 A1 WO2021003759 A1 WO 2021003759A1
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WO
WIPO (PCT)
Prior art keywords
turning
ceramic disc
ceramic
rotating frame
bearing structure
Prior art date
Application number
PCT/CN2019/096243
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English (en)
Chinese (zh)
Inventor
葛永恒
葛林四
韩鹏帅
葛威威
吴士勇
Original Assignee
上海提牛机电设备有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 上海提牛机电设备有限公司 filed Critical 上海提牛机电设备有限公司
Publication of WO2021003759A1 publication Critical patent/WO2021003759A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/08—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for ceramic mouldings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40—Safety features of loads, equipment or persons

Definitions

  • the invention relates to the technical field of semiconductors, in particular to a ceramic disc turning mechanism and a ceramic disc feeding system.
  • Semiconductor ceramics refer to ceramics with semiconductor characteristics and a conductivity of about 10-6 ⁇ 105S/m.
  • the electrical conductivity of semiconductor ceramics changes significantly due to changes in external conditions (temperature, light, electric field, atmosphere, temperature, etc.). Therefore, changes in physical quantities in the external environment can be converted into electrical signals to make sensitive components for various purposes.
  • the present invention provides a ceramic disk turning mechanism and a ceramic disk feeding system to solve the ceramic disk damage and efficiency problems that are prone to occur during the ceramic disk turning process.
  • a ceramic disc turning mechanism used in the feeding process of the ceramic disc including a mounting frame, a bearing structure, and a turning drive mechanism and a ceramic disk conveying mechanism provided on the mounting frame ;
  • the conveying mechanism is used to convey the ceramic disc to the turning drive mechanism
  • the supporting structure is installed on the turning drive mechanism, so that the ceramic disc can be supported after being separated from the conveying mechanism;
  • the turning drive mechanism is used to drive the supporting structure to make a turning movement, so that the ceramic discs located on the supporting structure undergo a turning movement synchronously.
  • the turning drive mechanism includes a telescopic cylinder, a slotted wheel, a rotating frame, and a turning cylinder, and the rotating frame is rotatable on the mounting frame;
  • the output shaft of the turning cylinder is rotatably connected with the rotating frame, and the bearing structure is fixedly installed on the rotating frame; when the turning cylinder drives the rotating frame to turn, the bearing structure also synchronously rotates accordingly ;
  • the telescopic cylinder is directly or indirectly fixedly connected to the rotating frame, so that the telescopic cylinder can rotate synchronously with the rotating frame;
  • the grooved wheel is directly or indirectly fixed to the output end of the telescopic cylinder to support the ceramic disc.
  • the conveying mechanism includes a conveying motor and a rotating wheel, and the conveying motor is used to drive the rotating wheel to rotate, so that the ceramic disc is drawn to the supporting structure.
  • rolling wheels are installed on the bearing structure.
  • the ceramic disc turning mechanism further includes an anti-collision rubber ring, and the anti-collision rubber ring is arranged on the mounting frame.
  • the ceramic disk turning mechanism further includes a detection sensor, and the detection sensor is provided on the mounting frame to detect the turning position of the ceramic disk.
  • the ceramic disc turning mechanism further includes a skew assisting mechanism provided on the turning drive mechanism, the skew assisting mechanism is turned over synchronously with the rotating frame, and the skew assisting mechanism turns over with the ceramic plate during the turning action.
  • the ceramic disc remains in close contact.
  • the stroke of the telescopic cylinder is 0-50 mm.
  • the stroke of the turning cylinder is 0-300mm.
  • a ceramic disc feeding system including the ceramic disc turning mechanism related to the first aspect and its optional solutions.
  • the ceramic disc turning mechanism provided by the present invention adopts a mechanical turning method to avoid the low efficiency problem of manual turning; through the design of the bearing structure and the turning drive mechanism, the ceramic plate is turned over without the need for the clamping of the mechanical arm. Hold, thereby avoiding damage to the ceramic disc due to clamping force problems.
  • Fig. 1 is a structural schematic diagram 1 of a ceramic disc turning mechanism in an embodiment of the present invention
  • Fig. 2 is a second structural diagram of a ceramic disc turning mechanism in an embodiment of the present invention.
  • FIG. 1 is a structural schematic diagram 1 of a ceramic disk turning mechanism in an embodiment of the present invention
  • FIG. 2 is a structural diagram II of a ceramic disk turning mechanism in an embodiment of the present invention.
  • the ceramic disc turning mechanism described can be understood as being used in the process of feeding the ceramic disc.
  • a ceramic disc turnover mechanism including a mounting frame, a bearing structure 3, and a turnover driving mechanism and a ceramic disc conveying mechanism provided on the mounting frame 1;
  • the conveying mechanism is used to convey the ceramic disc 2 to the inversion driving mechanism;
  • the supporting structure 3 is installed on the inversion driving mechanism, so that the ceramic disc 2 can be supported after being separated from the conveying mechanism;
  • the turning drive mechanism is used for driving the supporting structure to make turning motions, so that the ceramic discs on the supporting structure are turning over synchronously;
  • the ceramic disc 2 Since the supporting structure 3 is fixedly assembled to the turning drive mechanism, the ceramic disc 2 is transported to the supporting structure 3 by the conveying mechanism and supported by the supporting mechanism 3. Therefore, when the turning drive mechanism performs turning, the supporting structure 3 will turn over simultaneously. As a result, the ceramic disc 2 on the supporting structure 3 is turned over.
  • the mounting frame 1 is assembled by connecting a plurality of rods, and has a substantially hollow rectangular structure.
  • the turning drive mechanism includes a telescopic cylinder 6, a slot wheel 7, a rotating frame 9, and a turning cylinder 5, and the rotating frame 9 is rotatable on the mounting frame 1;
  • a bearing seat 12 is installed on each of the rods on both sides of the mounting frame 1, and the two side walls of the rotating frame 9 pass The assembling shaft body is used in conjunction with the bearing seat 12.
  • the output shaft of the turning cylinder is rotatably connected with the rotating frame, and the bearing structure is fixedly installed on the rotating frame; when the turning cylinder drives the rotating frame to turn, the bearing structure also synchronously rotates accordingly ;
  • the bearing structure 3 can be directly assembled on the rotating frame 9, and the output shaft of the overturning cylinder 5 is rotatably connected with the rotating frame 9 through a rotating shaft member. Therefore, when the overturning cylinder 5 is working, it is When the output shaft extends out of the cylinder, the rotating frame 9 is pushed to flip along the axis of the bearing seat 12, and the bearing structure 3 is also turned over, so that the ceramic disc 2 on the bearing structure 3 is also turned over simultaneously.
  • the ceramic disc 2 is gradually inclined with the supporting structure 3.
  • the supporting structure 3 is equipped with a rolling wheel 4, and the rolling wheel 4 is equipped with two rolling wheels 4 respectively located at the front and rear ends of the supporting structure 3 in this embodiment. It is beneficial to reduce the frictional resistance between the ceramic disc 2 and the supporting structure 3 during the overturning process.
  • the telescopic cylinder 6 is directly or indirectly fixedly connected to the rotating frame 9 so that the telescopic cylinder 6 can rotate synchronously with the rotating frame 9; the slot 7 wheels directly Or indirectly fixed to the output end of the telescopic cylinder 6 to support the ceramic disc 2.
  • the telescopic cylinder 6 can be directly assembled on the rotating frame 9, or it can be connected to the rotating frame 9 through a component similar to a telescopic rod.
  • This indirect connection is beneficial to the telescopic cylinder 6 Adjust the position (the connection method adopts the common mechanical component connection method);
  • the slotted wheel 7 is indirectly connected to the output end of the telescopic cylinder 6 through a connecting plate in this embodiment.
  • the ceramic disc 2 gradually tilts with the overturning of the bearing structure 3, and when tilted to a certain angle , The end of the ceramic disc 2 will slide into the upper groove of the grooved wheel 7, in order to better support the grooved wheel 7 to the ceramic disc 2, in the above embodiment, two grooved wheels 7 are used, which are assembled separately On both sides of the connecting plate.
  • the conveying mechanism includes a conveying motor 14 and a rotating wheel 8.
  • the conveying motor 14 is used to drive the rotating wheel 8 to rotate so that the ceramic disc 2 is drawn to the supporting structure. 3.
  • the conveying motor 14 is fixedly assembled and mounted on the rod of the mounting frame 1, the rotating wheel 8 is also assembled on the rod, and a rotating shaft is used between the conveying motor 14 and the rotating wheel 8. connection.
  • the ceramic disc turning mechanism further includes an anti-collision rubber ring 11, the anti-collision rubber ring 11 is provided on the mounting frame 1, to prevent the ceramic disc 2 and the mounting frame 1 from colliding against the ceramic If the disk is damaged, the ceramic disk turning mechanism further includes a detection sensor 10 which is arranged on the mounting frame 1 to detect the turning position of the ceramic disk 2.
  • the anti-collision rubber ring 11 and the detection sensor 10 are assembled on the same rod on the mounting frame 1.
  • the conveying mechanism conveys the ceramic disc 2 to the supporting structure 3, the ceramic disc 2 The edge may collide with the rod on the mounting frame 1.
  • the anti-collision rubber ring 11 plays a protective role, and when the detection sensor 10 senses the ceramic plate 2, it indicates that the ceramic plate 2 is already on the supporting structure 3.
  • the turning cylinder 5 works, pushing the rotating frame 9 to turn, and performing the turning work of the ceramic disc 2 (for the process, refer to the above-mentioned embodiment).
  • the ceramic disc turning mechanism also includes a skew assisting mechanism 15 provided on the turning drive mechanism.
  • the skew assisting mechanism 15 and the rotating frame 9 are turned synchronously, and the skew assisting mechanism 15 is synchronized with the turning motion of the ceramic disk 2 during the turning action.
  • the ceramic disc 2 remains in close contact.
  • the skew assist mechanism 15 and the mounting plate on the telescopic cylinder 6 are kept in a horizontal plane, and the end of the skew assist mechanism 15 is equipped with a roller. The surface is adhered to prevent the ceramic disc 2 from skewing.
  • the stroke of the telescopic cylinder is 0-50 mm, and the provided telescopic amplitude is 0-50 mm; the stroke of the turning cylinder is 0-300 mm.
  • the telescopic cylinder and the inverted cylinder structure can be any structure in the field with a piston rod and a cylinder body based on the operating principle of the cylinder.
  • the cylinder body can be connected with a gas pipe, and furthermore, can also be connected with a gas source through the gas pipe.
  • a fixing seat 13 is installed on the rod at the bottom end of the mounting frame 1, and the turning cylinder 5 is fixedly installed on the fixing seat 13.

Abstract

La présente invention se rapporte au domaine technique des semi-conducteurs, et concerne en particulier un mécanisme de retournement de plaque en céramique et un système d'amenée de plaques en céramique destinés à être utilisés pendant l'amenée d'une plaque en céramique. Le mécanisme de retournement de plaque en céramique comporte un châssis d'installation, une structure porteuse, et un mécanisme d'entraînement de retournement et un mécanisme de transport de plaques en céramique disposés sur le châssis d'installation, le mécanisme de transport étant utilisé pour transporter une plaque en céramique jusqu'au mécanisme d'entraînement de retournement, la structure porteuse étant installée sur le mécanisme d'entraînement de retournement de façon à permettre à la plaque en céramique d'être soutenue après qu'elle a été séparée du mécanisme de transport, et le mécanisme d'entraînement de retournement étant utilisé pour entraîner la structure porteuse en retournement de façon à permettre à la plaque en céramique sur la structure porteuse d'être retournée de manière synchrone. Dans la présente invention, un procédé de retournement mécanique est utilisé, de sorte que le faible rendement du retournement manuel est résolu; et du fait de la conception de la structure porteuse et du mécanisme d'entraînement de retournement, le serrage par un bras mécanique est éliminé pendant le retournement de plaques en céramique, ce qui permet de prévenir le problème de l'endommagement des plaques en céramique dû à une force de serrage.
PCT/CN2019/096243 2019-07-05 2019-07-16 Mécanisme de retournement de plaque en céramique et système d'amenée de plaques en céramique WO2021003759A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910606561.9A CN110406979A (zh) 2019-07-05 2019-07-05 一种陶瓷盘翻转机构与陶瓷盘送料系统
CN201910606561.9 2019-07-05

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WO2021003759A1 true WO2021003759A1 (fr) 2021-01-14

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WO (1) WO2021003759A1 (fr)

Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
CN116682766B (zh) * 2023-08-01 2023-10-10 北京特思迪半导体设备有限公司 用于加热晶圆的烘箱以及下蜡机

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JPH04173624A (ja) * 1990-11-02 1992-06-22 Iida Kogyo Kk 材料給送装置
PL65830Y1 (pl) * 2009-03-20 2012-03-30 Zakłady Porcelany Elektrotechnicznej Zapel Społka Akcyjna Przewrotnica półwyrobów ceramicznych
CN105438789A (zh) * 2015-12-30 2016-03-30 佛山市业丰赛尔陶瓷科技有限公司 一种瓷砖翻面机
CN109625866A (zh) * 2018-11-22 2019-04-16 湖北鑫来利陶瓷发展有限公司 瓷砖自动翻转输送机及操作方法
CN209291261U (zh) * 2018-11-06 2019-08-23 浙江晶盛机电股份有限公司 一种用于陶瓷盘清洗机的上料装置

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ITMO20020093A1 (it) * 2002-04-16 2003-10-16 C M C Srl Off Dispositivo per il ribaltimento di oggetti lastriformi in transito suuna linea di trasporto
ITMI20100189U1 (it) * 2010-06-04 2011-12-05 Revicart S R L Apparecchiatura di trasferimento per un fine linea di una macchina piegaincolla.
CN202414728U (zh) * 2011-12-15 2012-09-05 浙江亨达电子设备有限公司 通用装配输送线的工件自动翻转机构
CN108557432A (zh) * 2018-05-14 2018-09-21 青岛双星橡塑机械有限公司 模具翻转装置
CN108820717A (zh) * 2018-07-13 2018-11-16 苏州新长光热能科技有限公司 翻转立锭机

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04173624A (ja) * 1990-11-02 1992-06-22 Iida Kogyo Kk 材料給送装置
PL65830Y1 (pl) * 2009-03-20 2012-03-30 Zakłady Porcelany Elektrotechnicznej Zapel Społka Akcyjna Przewrotnica półwyrobów ceramicznych
CN105438789A (zh) * 2015-12-30 2016-03-30 佛山市业丰赛尔陶瓷科技有限公司 一种瓷砖翻面机
CN209291261U (zh) * 2018-11-06 2019-08-23 浙江晶盛机电股份有限公司 一种用于陶瓷盘清洗机的上料装置
CN109625866A (zh) * 2018-11-22 2019-04-16 湖北鑫来利陶瓷发展有限公司 瓷砖自动翻转输送机及操作方法

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