WO2020248987A1 - 光电功能晶体m 3re(po 4) 3及其制备方法与应用 - Google Patents
光电功能晶体m 3re(po 4) 3及其制备方法与应用 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/14—Phosphates
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
Definitions
- the invention relates to a photoelectric functional crystal M 3 RE(PO 4 ) 3 and a preparation method and application thereof, and belongs to the technical field of photoelectric functional crystals.
- optoelectronic functional crystal materials are valued by countries all over the world.
- the development of laser and optoelectronics has further promoted the development and application of functional crystals.
- the research and application of my country's optoelectronic functional crystals are at the forefront of the world, especially the research of inorganic nonlinear optical crystals.
- the current international competition in the field of optoelectronic functional crystals is becoming increasingly fierce, and researchers in the field of crystal materials in my country are still striving to develop new crystal materials.
- photoelectric functional crystals which mainly include nonlinear optical crystals, piezoelectric crystals, laser crystals, scintillation crystals, etc. according to their functions.
- optoelectronic functional crystal materials are limited, and it is urgent to explore new functional crystal materials to develop new optoelectronic devices and expand new applications.
- M 3 RE(PO 4 ) 3 structure type compounds currently, the main focus is on the synthesis and luminescence properties of nanometer phosphors doped with different rare earth ions.
- the present invention provides a series of photoelectric functional crystals with the general formula M 3 RE(PO 4 ) 3 and a preparation method thereof.
- the invention also provides a yttrium strontium phosphate crystal.
- the invention also provides applications of the yttrium strontium phosphate crystal.
- the yttrium strontium phosphate crystal has the chemical formula Sr 3 Y(PO 4 ) 3 , and the conventional expression in this field is abbreviated as SYP.
- SYP the conventional expression in this field.
- the expressions of Sr 3 Y(PO 4 ) 3 and SYP have the same meaning in the present invention.
- Room temperature has a well-known meaning in the art, generally means 25 ⁇ 5°C.
- Lifting off the crystal Lifting the crystal from the melt surface.
- the Czochralski method is used for the first time to grow M 3 RE(PO 4 ) 3 series crystals with a non-centrosymmetric structure.
- the M 3 RE(PO 4 ) 3 crystal belongs to the cubic system -43m point group. It not only has a higher optical transmittance and a wider absorption edge, but also has no phase change from room temperature to melting point. It has piezoelectric activity and non-uniformity. Linear frequency conversion characteristics have application prospects in the field of optoelectronic functional devices.
- An optoelectronic functional crystal with the general formula M 3 RE(PO 4 ) 3 which has a non-centrosymmetric structure and belongs to the cubic crystal system -43m point group, where M is an alkaline earth metal and RE is a rare earth element.
- the alkaline earth metal is Ba, Ca or Sr.
- the rare earth element is preferably Y, La, Gd or Yb.
- the rare earth elements of the present invention are not limited to the four types of Y, La, Gd or Yb, but are also applicable to other rare earth elements. They also have good mechanical properties, are not easy to deliquesce and melt uniformly, due to their non-centrosymmetric structure
- Features, suitable for nonlinear optical crystals and piezoelectric crystals are that the crystal has a high melting point, no phase change from room temperature to melting point, stable chemical properties, non-deliquescent, and a non-centrosymmetric structure and high melting point compound. And wide temperature zone nonlinear optics field has obvious advantages.
- the M 3 RE(PO 4 ) 3 photoelectric functional crystal is selected from one of the following:
- Ba 3 Y(PO 4 ) 3 crystals Ba 3 La(PO 4 ) 3 crystals, Ba 3 Yb(PO 4 ) 3 crystals, Ca 3 Gd(PO 4 ) 3 crystals, Sr 3 Y(PO 4 ) 3 crystals, Sr 3 La(PO 4 ) 3 crystal, Sr 3 Gd(PO 4 ) 3 crystal; the corresponding chemical names are: yttrium barium phosphate crystal, lanthanum barium phosphate crystal, ytterbium barium phosphate crystal, gadolinium calcium phosphate crystal, yttrium strontium phosphate Crystal, lanthanum strontium phosphate crystal, gadolinium strontium phosphate crystal.
- spectral analysis measured Ba 3 Y(PO 4 ) 3 crystal, Ba 3 La(PO 4 ) 3 crystal, Ca 3 Gd(PO 4 ) 3 crystals, Sr 3 La(PO 4 ) 3 crystals, and Sr 3 Gd(PO 4 ) 3 crystals respectively have high optical transmittances of >70% in the 325nm-4302nm band.
- the photoelectric functional crystal of M 3 RE(PO 4 ) 3 is measured by impedance method for Ba 3 Y(PO 4 ) 3 crystal, Ba 3 La(PO 4 ) 3 crystal, Ba 3 Yb(PO 4 ) 3 crystals, Ca 3 Gd(PO 4 ) 3 crystals, Sr 3 La(PO 4 ) 3 crystals, and Sr 3 Gd(PO 4 ) 3 crystals respectively.
- the effective piezoelectric constant d eff >6pC/N indicates that it has Piezoelectric activity.
- the crystal is a non-centrosymmetric structure and belongs to the cubic system -43m point group.
- the crystal has no phase change from room temperature to melting point.
- the melting point of the yttrium strontium phosphate crystal is basically 1850°C, and there is no phase change from room temperature to the melting point.
- spectral analysis measured that the crystal has a high optical transmittance of >80% in the 480nm-4100nm band.
- the method for growing the M 3 RE(PO 4 ) 3 optoelectronic functional crystal includes:
- the raw materials MCO 3 , RE 2 O 3 and phosphorus-containing compounds are accurately weighed in a stoichiometric ratio, and on this basis, the phosphorus-containing compounds are further increased by 1.5-10% of the total mass Mass percentage (based on the mass of the phosphorous compound in the stoichiometric ratio);
- M 3 RE(PO 4 ) 3 polycrystalline material synthesized in step (1) into an iridium crucible in a single crystal growth furnace.
- the furnace is evacuated and filled with protective gas nitrogen or argon, using intermediate frequency induction heating method Heat up the M 3 RE(PO 4 ) 3 polycrystalline material to melt. After the polycrystalline material is completely melted, the temperature is reduced to make it condense, and then the temperature is raised again to melt all of it. Repeat this several times to remove the bubbles generated in the melt; then Then overheat the melt for 10-20°C and keep it at a constant temperature for 0.5-2 hours to obtain a uniformly melted M 3 RE(PO 4 ) 3 melt;
- iridium rod or M 3 RE(PO 4 ) 3 crystal as the seed crystal, lower the seed crystal to the M 3 RE(PO 4 ) 3 melt surface, make the bottom end of the seed crystal vertical and just contact the melt, and start Single crystal growth; single crystal growth process conditions are as follows: growth temperature 1800-1950 °C; when the seed crystal is necked, the pulling speed is 1-5mm/h, when the shoulder is placed, the pulling speed is reduced to 0.2-1mm/h. The pulling speed is 0.5-1mm/h; when the crystal grows to the required size, the crystal is lifted off.
- the crystal is kept at a constant temperature in a temperature field for 0.5-1 h, and then lowered to room temperature at a rate of 5-30° C./h to obtain an M 3 RE(PO 4 ) 3 crystal.
- the M 3 RE(PO 4 ) 3 crystal After taking out the M 3 RE(PO 4 ) 3 crystal from the single crystal growth furnace, it is annealed at a temperature of 1200-1400°C. Preferably, the annealing time is 24-48 hours, so that the thermal stress generated during the growth of the M 3 RE(PO 4 ) 3 crystal is fully released. Preferably, the M 3 RE(PO 4 ) 3 crystal is placed in a high-temperature muffle furnace for annealing treatment.
- the phosphorus-containing compound is NH 4 H 2 PO 4 or P 2 O 5 . It is further preferred that the total mass of the phosphorus-containing compound is exceeded by 3-6% by mass.
- the raw materials in step (1) of the present invention are all prepared with high-purity raw materials with a purity greater than 99.9%; these raw materials can be purchased through conventional channels.
- the primary sintering and secondary sintering of the raw materials are both performed in a ceramic crucible.
- the purpose of primary sintering is to decompose and remove CO 2 , NH 3 and H 2 O, and improve the purity of synthetic polycrystalline materials.
- the invention adopts the melt pulling method for crystal growth.
- the iridium gold crucible is used, in order to prevent the iridium gold from being oxidized at high temperature, the crystal growth needs to be performed under the protection of an inert gas atmosphere such as nitrogen or argon.
- an inert gas atmosphere such as nitrogen or argon.
- the volume fraction of nitrogen or inert gas is 90%-95%.
- the bubbles generated in the melt are completely drained after repeated cooling and condensation-heating and melting, so as to reduce crystal growth defects (bubbles and inclusions, etc.) Crystal growth quality.
- the cooling condensation-heating melting is repeated 3-4 times.
- the crystal growth in step (3) goes through four stages of necking, shouldering, isodiametric growth and crystal lifting; wherein, during the necking process, the pulling speed is controlled to be 1-8mm/h, when When the diameter of the seed crystal is reduced to 0.5-2.0mm, start to slowly lower the temperature at 0.5-5°C/h, and carry out shoulder placement; in the shoulder placement stage, the pulling speed is reduced to 0.2-1mm/h; when the diameter of the crystal shoulder reaches When the size is predetermined, the temperature is raised or lowered at a rate of 0-5°C/h, and the temperature is controlled at 1800-1950°C for isodiametric growth; when the crystal is pulled to the required height, the crystal is lifted.
- the process conditions of the crystal lifting and removing process are: slowly increasing the temperature at a rate of 10-50° C./h, and when the bottom of the crystal tends to shrink inward, the lifting speed is increased to 5-20 mm/h. Pull the crystal to separate it from the melt.
- the crystal growth size is generally 15-30 mm in diameter and 20-50 mm in height.
- the time required for the growth of M 3 RE(PO 4 ) 3 crystals of this size is generally 4-7 days.
- the size of the crystal refers to the normal diameter and total height of the crystal.
- the yttrium strontium phosphate crystal of the present invention is grown by the pulling method.
- the technical key lies in the ratio of raw materials, especially the use of excess phosphate raw materials, as well as the synthesis of polycrystalline materials, and at an appropriate temperature and a specific temperature. Obtain high optical quality single crystals that meet the application requirements of nonlinear optics and piezoelectric functional materials under field conditions.
- the method for preparing the yttrium strontium phosphate crystal includes:
- the raw materials containing Sr compound, Y compound and P compound are mixed and sintered to synthesize yttrium strontium phosphate polycrystalline material.
- the temperature is raised to melt the yttrium strontium phosphate polycrystalline material, and the yttrium strontium phosphate polycrystalline material is melted by repeated cooling and condensation and heating for several times to obtain uniform melting Of yttrium strontium phosphate melt;
- the raw material contains Sr compounds, Y-containing compounds, and P-containing compounds based on the stoichiometric ratio, and an excess of 2.5-7.5% by mass based on the mass of the P-containing compound ;
- An iridium rod or a yttrium strontium phosphate crystal is used as the seed crystal, and the bottom end of the seed crystal is just in contact with the yttrium strontium phosphate melt, and the single crystal growth is performed by the pulling method.
- the single crystal growth temperature is 1700-1850°C.
- the Sr-containing compound, Y-containing compound and P-containing compound are each independently selected from at least one of the corresponding oxides, carbonates, phosphates, halides, nitrates, oxalates and borates. Species, and compounds containing Sr, Y, and P elements cannot be halide at the same time.
- the Sr-containing compound is selected from the corresponding oxide, carbonate, halide, sulfate or nitrate compound; the Y-containing compound is selected from the corresponding oxide, nitrate or phosphate; The P-containing compound is selected from the corresponding oxide or phosphate.
- the Sr-containing compound is SrCO 3
- the Y-containing compound is Y 2 O 3
- the P-containing compound is NH 4 H 2 PO 4 or P 2 O 5 .
- the Sr-containing compound, Y-containing compound and P-containing compound in the above raw materials are made to be in excess of 3-5% by mass based on the mass of the P-containing compound on the basis of the stoichiometric ratio.
- the yttrium strontium phosphate polycrystalline material when preparing the yttrium strontium phosphate polycrystalline material, high temperature sintering is performed twice after the raw materials are mixed to ensure the growth quality of the crystal.
- the raw materials are mixed and sintered according to the following method: the weighed raw materials are ground and mixed uniformly, and then sintered once.
- the sintering temperature is 800°C-950°C, and the temperature is constant for 10-15 hours to decompose and remove CO 2 , NH 3 and H 2 O; then lower to room temperature, fully grind and refine the raw materials for the primary sintering and mix them evenly, press them into a cake-like block for secondary sintering, the sintering temperature is 1200°C-1400°C, the constant temperature is 20-40 After hours, the raw materials undergo solid-phase reaction to obtain polycrystalline yttrium strontium phosphate. More preferably, the above sintering is performed by placing the raw materials in a ceramic crucible in a sintering furnace.
- the yttrium strontium phosphate polycrystalline material is melted, it is repeatedly cooled to condense and heated to melt 3-4 times.
- the polycrystalline material is heated and melted and then cooled and condensed for many times, so that the bubbles generated in the melt are completely drained, so as to reduce crystal growth defects (bubbles and inclusions, etc.) to improve the quality of crystal growth.
- the yttrium strontium phosphate polycrystalline material is melted, it is repeatedly cooled and condensed and heated to melt for several times, and then the melt is overheated by 10-20° C. and kept at a constant temperature for 0.5-2 hours to further uniformly melt.
- the volume fraction of nitrogen or inert gas in the single crystal growth furnace is 90%-95%.
- yttrium strontium phosphate crystals need to be grown for the first time with iridium with a higher melting point as seed crystals; after yttrium strontium phosphate crystals are prepared, yttrium strontium phosphate crystals should be used as seed crystals OK.
- the crystal growth process includes four stages of necking, shouldering, isodiametric growth, and crystal lifting; preferably, the pulling speed in the necking stage is controlled to 2-5mm/h, when the diameter of the seed crystal is closed When it is as thin as 0.5-2.0mm, start to lower the temperature slowly at 0.5-5°C/h, and then lower the shoulder; in the shoulder-releasing stage, reduce the pulling speed to 0.2-2mm/h, when the diameter of the crystal shoulder reaches the required crystal diameter , And then raise or lower the temperature at a rate of 0-5°C/h for isodiametric growth.
- the pulling speed is 0.4-0.7mm/h and the rotation speed is 6-8r/min; when the crystal is pulled to the required Remove the crystal when the crystal is high.
- the method for removing crystals is as follows: slowly increase the temperature at a rate of 10-50°C/h, and when the bottom of the crystal tends to shrink inward, increase the pulling speed to 5-20mm/h, Pull the crystal to separate it from the melt.
- the yttrium strontium phosphate crystal growth method of the present invention further includes an annealing step; the annealing step includes: after the yttrium strontium phosphate crystal is grown, the yttrium strontium phosphate crystal is taken out and placed in a high-temperature muffle furnace. Annealing, the annealing temperature is 1200-1400°C, and the annealing time is 24-48 hours. The thermal stress generated during the growth of Sr 3 Y(PO 4 ) 3 crystal is fully released.
- the size of Sr 3 Y(PO 4 ) 3 grown in the present invention is generally: 20-50mm in height and 15-30mm in diameter.
- the growth time of Sr 3 Y(PO 4 ) 3 crystals of this size is generally 4-5 days.
- the size of the crystal mentioned here refers to the normal diameter and total height of the crystal.
- the method for preparing the yttrium strontium phosphate crystal includes the following steps:
- step (1) Grind and mix the weighed raw materials in step (1), and then put them into a ceramic crucible for a sintering.
- the sintering temperature is 800°C-950°C and the temperature is constant for 10-15 hours; then the raw materials are reduced to room temperature and the raw materials are sintered.
- step (2) Put the yttrium strontium phosphate polycrystalline material synthesized in step (2) into an iridium-gold crucible in a single crystal growth furnace.
- the furnace is evacuated and filled with protective gas nitrogen or argon.
- the yttrium strontium phosphate polycrystalline material is heated by intermediate frequency induction heating.
- the crystal material is heated to melting, the polycrystalline material is completely melted and then cooled to condense, and then the temperature is raised again to melt all of it. Repeat this several times to remove the bubbles generated in the melt; and then overheat the melt for 10-20 °C, constant temperature for 0.5-2 hours to obtain a uniformly melted yttrium strontium phosphate melt;
- the seed crystal is vertically lowered into the yttrium strontium phosphate melt of step (3), so that the bottom end of the seed crystal is perpendicular to and just in contact with the melt, and the single crystal growth is started.
- the single crystal growth temperature is 1700-1850°C; the crystal growth process includes four stages of necking, shouldering, isodiametric growth and crystal lifting; the pulling speed of the necking stage is 2-5mm/h, when the diameter of the seed crystal is closed When the thickness is as small as 0.5-2.0mm, start to slowly lower the temperature at 0.5-5°C/h, and then carry out shoulder lifting; in the shoulder lifting stage, the pulling speed is reduced to 0.2-2mm/h, when the diameter of the grown crystal shoulder reaches the required crystal diameter When the crystal is removed, the temperature is increased or decreased at a rate of 0-5°C/h for isodiametric growth; when the crystal is pulled to the required crystal height, the crystal is lifted; after the crystal is lifted, the crystal is held in the temperature field at a constant temperature of 0.5- 1h, then reduce to room temperature at a rate of 5-30°C/h to obtain yttrium strontium phosphate crystals;
- the annealing temperature is 1200-1400°C and the annealing time is 24-48 hours.
- the pulling speed in the necking stage is 3-5mm/h, and the rotating speed is 8-15r/min; the pulling speed in the shoulder laying stage is reduced to 0.3-0.8mm/h, and the rotating speed is 6-10r/min. min; The pulling speed is 0.5-0.6mm/h during equal diameter growth, and the rotation speed is 8r/min.
- the raw materials are all prepared with high-purity raw materials with a purity greater than 99.9%; the raw materials required for crystal growth can be purchased through conventional channels.
- the yttrium strontium phosphate Sr 3 Y(PO 4 ) 3 provided by the present invention is a new type of photoelectric functional crystal, belonging to the cubic system -43m point group, with non-centrosymmetric crystal structure characteristics, good mechanical properties and uniform melting characteristics , It is not easy to deliquesce, and it can grow large-size high-quality single crystal in a short time by pulling method; due to its non-centrosymmetric structure, it is suitable for nonlinear optical crystal and piezoelectric crystal.
- the present invention provides the following uses of Sr 3 Y(PO 4 ) 3 crystals:
- the Sr 3 Y(PO 4 ) 3 crystal of the present invention is used as a nonlinear optical crystal and piezoelectric crystal.
- the Sr 3 Y(PO 4 ) 3 crystal is used as a laser matrix crystal, a nonlinear frequency change crystal, and a high-temperature piezoelectric crystal.
- the crystallographic axis of the Sr 3 Y(PO 4 ) 3 crystal is oriented by an X-ray directional instrument; the frequency doubling effect can be observed when the yttrium strontium phosphate crystal is passed through the 2090nm laser, and the crystal can achieve effective frequency doubling of the 2090nm wavelength laser.
- the different Sr 3 Y(PO 4 ) 3 crystal cut shapes were raised from room temperature to 1000°C, and the observation showed that the crystal still has piezoelectric activity, as shown in Figure 14, which indicates that the crystal is in the piezoelectric field, especially high-temperature piezoelectricity. The field has potential applications.
- the Sr 3 Y(PO 4 ) 3 crystal cut type is an XZ, XY or ZX cut type, or an XZ, XY, ZX cut type, which is obtained by rotating around X or Y or Z respectively.
- the nonlinear optical function device includes a laser frequency converter, an optical parameter Amplifier, optical parametric oscillator or Raman frequency converter;
- the piezoelectric device includes a piezoelectric resonator, an oscillator, a filter, a piezoelectric transducer, a piezoelectric pressure sensor, an acoustic transducer or Ultrasonic sensor.
- the raw materials are mixed and then high-temperature sintering is performed twice, and the sintering is performed at a temperature below the melting point to decompose and remove CO 2 , NH 3 and H 2 O;
- the secondary sintering should be performed at a temperature to prepare a high-purity polycrystalline material to ensure the quality of crystal growth.
- the crystal growth needs to be seeded at the full melting point.
- the key technology of the crystal growth stage is that the pulling speed and the number of revolutions in each stage need to be specially controlled to obtain high-quality single crystals.
- the invention adopts the pulling method to grow large-size and high-quality M 3 RE(PO 4 ) 3 single crystals in a short time.
- the present invention provides a new series of photoelectric function M 3 RE (PO 4 ) 3 crystals, which have good mechanical properties, are not easy to deliquesce and are uniformly melted. Due to their non-centrosymmetric structure, they are suitable for nonlinear optical crystals and pressure Transistor.
- the advantage of the application of nonlinear optical crystals and piezoelectric crystals is that the crystal has a high melting point, no phase change from room temperature to melting point, stable chemical properties, and non-deliquescent. It is a rare compound with a non-centrosymmetric structure and high melting point. Therefore, it has obvious advantages in the field of high temperature piezoelectricity and wide temperature range nonlinear optics.
- this series of crystal melt viscosity is small, it is easy to remove impurities during crystal growth, and the growth speed is fast, which is convenient for obtaining high-quality single crystals, which is beneficial to subsequent application research and development.
- the inventors unexpectedly discovered that yttrium strontium phosphate crystals are different from other isomorphous compounds in that their uniform melting zone is very narrow.
- the present invention creatively adopts a method of 2.5-7.5% of the total excess mass of the P-containing compound (phosphate or phosphorus pentoxide) to obtain high-quality yttrium strontium phosphate single crystal, which meets the requirements of optical high quality.
- the P-containing compound phosphate or phosphorus pentoxide
- Studies have found that yttrium strontium phosphate crystals cannot be grown if the stoichiometric ratio is used in the usual way. When the excess of phosphate or phosphorus pentoxide is too low, the quality of the obtained yttrium strontium phosphate crystals cannot meet the requirements of optical high quality.
- the present invention provides a new type of photoelectric functional crystal Sr 3 Y(PO 4 ) 3 .
- the advantage of Sr 3 Y(PO 4 ) 3 crystal as a nonlinear optical crystal and piezoelectric crystal is that the melting point of the crystal is higher than 1800 °C, and there is no phase change from room temperature to the melting point, the chemical properties are stable, and it is not deliquescent. It is a rare compound with a non-centrosymmetric structure and a high melting point, so it has obvious advantages in the field of high temperature piezoelectricity and wide temperature range nonlinear optics.
- the crystal melt viscosity is small, impurities are easily removed during crystal growth, and the growth speed is fast, which is convenient for obtaining high-quality single crystals, which is beneficial to subsequent application research and development.
- Figure 1 is an XRD phase diagram of the M 3 R(PO 4 ) 3 series crystals.
- Figure 2 is a photo of Ba 3 Y(PO 4 ) 3 crystals grown in Example 1.
- Figure 3 is a photo of Ba 3 La(PO 4 ) 3 crystals grown in Example 2.
- Fig. 5 is a transmission spectrum of Ba 3 Y(PO 4 ) 3 crystal of Example 1.
- Figure 6 is the dielectric spectrum of the Ba 3 Y(PO 4 ) 3 crystal of Example 1
- Fig. 7 is a photo of the product obtained in Comparative Example 1, Ba 3 Y(PO 4 ) 3 polycrystal obtained by compounding in a stoichiometric ratio.
- Figure 8 is a photograph of the product obtained in Comparative Example 2.
- the obtained Ca 3 Gd(PO 4 ) 3 crystal has poor optical quality.
- Example 9 is a photograph of Sr 3 Y(PO 4 ) 3 crystals grown in Example 5.
- Fig. 10 is an X-ray diffraction pattern of Sr 3 Y(PO 4 ) 3 crystal.
- Figure 11 is a photograph of a product grown by the method of Comparative Example 3.
- FIG. 12 is the frequency doubling data of Sr 3 Y(PO 4 ) 3 crystal at 2090 nm in Example 5.
- the AgGaS 2 crystal serves as a comparison.
- the abscissa is the powder size of the yttrium strontium phosphate crystal and gallium sulphur silver crystal samples, and the ordinate is the relative intensity.
- FIG. 13 is a transmission spectrum of the Sr 3 Y(PO 4 ) 3 crystal of Example 5.
- Fig. 15 is an impedance phase angle spectrum produced by the ZX-cut piezoelectric effect of the Sr 3 Y(PO 4 ) 3 crystal of Example 9.
- FIG. 16 shows the Sr 3 Y(PO 4 ) 3 crystal grown in Comparative Example 4.
- Fig. 17 is a photograph of Ba 3 Yb(PO 4 ) 3 crystals grown in Example 11.
- FIG. 18 is an X-ray diffraction pattern of the Ba 3 Yb(PO 4 ) 3 crystal of Example 11.
- the purity of the raw materials 1-6 in the embodiment is greater than 99.9%.
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible, and place them in a muffle furnace for the first sintering.
- the sintering temperature is 850 ⁇ 50°C and the temperature is kept constant for 12 hours.
- the raw materials are removed ⁇ CO 2 , NH 3 and H 2 O;
- step (3) Put the yttrium barium phosphate polycrystalline raw material synthesized in step (2) into an iridium crucible in a single crystal furnace, evacuate the furnace and fill it with nitrogen as a protective gas, and use intermediate frequency induction heating to heat the polycrystalline raw material To melt, the polycrystalline material is completely melted and then cooled to condense, and then the temperature is raised again to melt all of it. This is repeated 3 times to eliminate the bubbles generated in the melt. After that, the melt is overheated at 20°C and kept at a constant temperature for 0.5 hours to obtain a uniformly melted yttrium barium phosphate melt;
- step (3) Using a barium yttrium phosphate polycrystalline rod as a seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and then the single crystal is grown;
- Single crystal growth process conditions temperature 1850 ⁇ 50°C; when the seed crystal is necked, the pulling speed is controlled to 5mm/h, when the diameter of the seed crystal is reduced to about 1mm, start to slowly cool down at 1-4°C/h, and carry out shoulder setting ; When the shoulder is placed, the pulling speed is reduced to 0.5-1mm/h; when the diameter of the crystal shoulder reaches the predetermined size of about 22mm, the temperature is raised and lowered at a speed of 1-4°C/h for isodiametric growth; The pulling speed is 0.5-0.7mm/h. When the crystal grows to a height of about 40mm, the crystal will be lifted. First, the temperature will be slowly increased at a rate of 15-20°C/h. When the temperature is increased, the bottom of the crystal will shrink inwardly When the trend is high, increase the pulling speed to 10-15mm/h and pull the crystal to separate it from the melt.
- the crystals After removing the crystals, the crystals are kept constant in a temperature field for 45 minutes, and then lowered to room temperature at a rate of 10°C/h to obtain barium yttrium phosphate crystals.
- the annealing temperature is 1300°C and the annealing time is 24 hours to fully release the thermal stress generated during the growth of Ba 3 Y(PO 4 ) 3 crystals.
- the obtained Ba 3 Y(PO 4 ) 3 crystal is shown in Fig. 2 with good optical quality.
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible for the first sintering.
- the sintering temperature is 900°C and the temperature is kept constant for 10 hours to decompose and remove CO 2 , H 2 O and NH 3 ;
- the first sintered raw materials are fully ground and mixed uniformly, then pressed into a block, put into an alumina ceramic crucible for solid phase reaction, the sintering temperature is 1400 °C and the constant temperature is 30h, to obtain the barium lanthanum phosphate Polycrystalline raw materials;
- step (3) Put the lanthanum barium phosphate polycrystalline material obtained in step (2) into an iridium-gold crucible in a single crystal furnace, evacuate the furnace and fill it with nitrogen as a protective gas to prevent the iridium-gold crucible from being oxidized, and use intermediate frequency induction heating
- the polycrystalline raw material is heated to melting, the polycrystalline material is completely melted and then cooled to condense, and then the temperature is raised again to melt all of it, and this is repeated 2-4 times to remove the bubbles generated in the melt.
- the melt is overheated at about 15°C and kept at a constant temperature for 1 hour to obtain a uniformly melted lanthanum barium phosphate melt;
- step (3) Using an iridium rod as a seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and then the single crystal is grown;
- Single crystal growth process conditions growth temperature 1850 ⁇ 50°C; when the seed crystal is necked, the pulling speed is controlled at 6mm/h. When the diameter of the seed crystal is reduced to about 1.5mm, start to slowly cool down at 5°C/h, and carry out shoulder setting ; When the shoulder is placed, the pulling speed is reduced to 0.3mm/h; when the diameter of the shoulder of the crystal reaches the predetermined size of about 30mm, the temperature is raised and lowered at a speed of 0-5°C/h for isodiametric growth; The pulling speed is 0.6mm/h. When the crystal grows to a height of about 50mm, the crystal is ready to be lifted; the lift-off process is as follows: slowly increase the temperature at a rate of 20°C/h. When the temperature is increased, it is observed that there is When there is a tendency to shrink inward, increase the pulling speed to 15mm/h and pull the crystal to separate it from the melt.
- the crystals are kept constant in the temperature field for 1 hour, and then lowered to room temperature at a rate of 10° C./h to obtain barium lanthanum phosphate crystals.
- the obtained Ba 3 La(PO 4 ) 3 crystal is shown in Fig. 3 and has good optical quality.
- the crystal annealing treatment is the same as in Example 1.
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible, and place them in a muffle furnace for the first sintering.
- the sintering temperature is 900°C and the temperature is kept constant for 13 hours to remove CO in the raw materials. 2.
- step (3) Put the polycrystalline calcium gadolinium phosphate synthesized in step (2) into an iridium crucible in a single crystal furnace, evacuate the furnace and fill it with nitrogen as a protective gas, and use intermediate frequency induction heating to raise the temperature of the polycrystalline raw material To melt, the polycrystalline material is completely melted and then cooled to condense, and then the temperature is raised again to melt all of it. This is repeated 3 times to eliminate the bubbles generated in the melt. Then, the melt is overheated at 20°C and kept at a constant temperature for 0.5 hours to obtain a uniformly melted calcium gadolinium phosphate melt;
- step (3) Using an iridium rod as a seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and then the single crystal is grown;
- Single crystal growth process conditions temperature 1800 ⁇ 50°C; when the seed crystal is necked, the pulling speed is controlled at 5mm/h, when the seed crystal diameter is reduced to about 1mm, the temperature is slowly reduced at 3°C/h, and shoulders are placed; When the shoulder is placed, the pulling speed is reduced to 0.3-1mm/h; when the diameter of the crystal shoulder reaches the predetermined size of 15-25mm, the temperature is raised and lowered at a speed of 1-4°C/h for isodiametric growth; The pulling speed is 0.5mm/h. When the crystal grows to the required size of 30-50mm, the crystal will be lifted off. The temperature will be increased slowly at a rate of 25°C/h. When the temperature is increased, the bottom of the crystal will shrink inwardly. When, increase the pulling speed to 15-20mm/h and pull the crystal to separate it from the melt.
- the crystals were kept constant in a temperature field for 45 minutes, and then lowered to room temperature at a rate of 10°C/h to obtain calcium gadolinium phosphate crystals.
- the obtained Ca 3 Gd(PO 4 ) 3 crystals are shown in Figure 4 and have good optical quality.
- the crystal annealing treatment is the same as in Example 1.
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible, and place them in a muffle furnace for the first sintering.
- the sintering temperature is 850°C and the temperature is kept constant for 15 hours to remove CO in the raw materials. 2.
- step (3) Put the lanthanum strontium phosphate polycrystalline raw material synthesized in step (2) into an iridium-gold crucible in a single crystal furnace.
- the furnace is evacuated and filled with nitrogen as a protective gas, and the polycrystalline raw material is heated by medium frequency induction heating To melt, the polycrystalline material is completely melted and then cooled to condense, and then the temperature is raised again to melt all of it. This is repeated 3 times to eliminate the bubbles generated in the melt. Then, the melt is overheated at 20°C and kept at a constant temperature for 0.5 hours to obtain a uniformly melted lanthanum strontium phosphate melt;
- step (3) Using the iridium rod as the seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is vertical and just in contact with the melt, and then the single crystal is grown;
- Single crystal growth process conditions temperature 1800-1900°C; when the seed crystal is necked, the pulling speed is controlled at 6mm/h. When the diameter of the seed crystal is reduced to about 1mm, start to slowly cool down at 1-3°C/h, and carry out Shoulder; when the shoulder is placed, the pulling speed is reduced to 0.4mm/h; when the diameter of the crystal shoulder reaches the predetermined size of 15-25mm, the temperature is raised and lowered at a speed of 1-4°C/h for isodiametric growth; When the pulling speed is 0.6mm/h, when the crystal grows to the required size of 20-35mm, the crystal is lifted off, and the temperature is slowly increased at a rate of 20°C/h. When the temperature is increased, the bottom of the crystal is observed to shrink inward When, increase the pulling speed to 10-15mm/h and pull the crystal to separate it from the melt.
- the crystal is kept at a constant temperature in a temperature field for 45 minutes, and then lowered to room temperature at a rate of 10°C/h to obtain a lanthanum strontium phosphate crystal.
- the crystal annealing treatment is the same as in Example 1.
- step (1) BaCO 3 , Y 2 O 3 and NH 4 H 2 PO 4 are used as raw materials for crystal growth, according to the chemical formula of barium yttrium phosphate Ba 3 Y(PO 4 ) 3.
- the results showed that: due to the component deviation and delamination phenomenon occurred after the yttrium barium phosphate raw material was melted, Ba 3 Y(PO 4 ) 3 single crystal could not be grown when the lower seed crystal was pulled.
- the photo of the growth product is shown in Figure 7. It is Ba 3 Y(PO 4 ) 3 polycrystalline.
- step (1) the CaCO 3 , Gd 2 O 3 and NH 4 H 2 PO 4 raw materials are compounded according to the chemical formula Ca 3 Gd(PO 4 ) 3 stoichiometric ratio, Furthermore, the NH 4 H 2 PO 4 raw material is excessively 0.5% by mass. The quality of the grown crystals is poor, as shown in Figure 8. Studies have found that the phosphate in this example is only 0.5% in excess, which is not enough to compensate for the deviation of the composition caused by the volatilization of phosphorus during crystal growth, resulting in poor crystallinity of calcium gadolinium phosphate single crystal.
- SrCO 3 , Y 2 O 3 and NH 4 H 2 PO 4 are used as raw materials for crystal growth.
- the stoichiometric ratio is used for batching, and NH 4 3% of the total mass of excess H 2 PO 4 phosphate;
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible for the first sintering.
- the sintering temperature is 900°C and the temperature is kept constant for 10 hours to decompose and remove CO 2 , H 2 O and NH 3 ;
- step (3) Put the yttrium strontium phosphate polycrystalline material obtained in step (2) into an iridium-gold crucible in a single crystal furnace, evacuate the furnace and fill it with nitrogen as a protective gas to prevent the iridium-gold crucible from being oxidized, and use intermediate frequency induction heating
- the polycrystalline material is heated to melting, the polycrystalline material is fully melted and then cooled to condense, and then the temperature is raised again to melt all of it, and this is repeated 3 times to remove the bubbles generated in the melt.
- the melt is overheated at about 20°C and kept at constant temperature for 1 hour to obtain a uniformly melted yttrium strontium phosphate melt;
- step (3) Using an iridium rod as a seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and then the single crystal is grown;
- the growth temperature is 1800°C; when the seed crystal is necked, the pulling speed is controlled at 3 ⁇ 3.5mm/h, and the speed is 8-15r/min; when the diameter of the seed crystal is reduced to 1mm, it starts at 0.5°C/ h Slowly lower the temperature, then put the shoulders; when the shoulders are put, the pulling speed is reduced to 0.3 ⁇ 0.4mm/h, and the rotation speed is 6-8r/min; when the diameter of the crystal shoulder reaches the predetermined size of 20mm, the speed is 0.3°C/h The temperature is raised and lowered at the speed for equal diameter growth; during equal diameter growth, the pulling speed is 0.5mm/h and the rotation speed is 8r/min.
- the lift off process is as follows: increase the temperature at a rate of 20°C/h, and when the bottom of the crystal is observed to shrink inward at the rising temperature, increase the pulling speed to 5mm /h Pull the crystal to separate it from the melt. After the crystal is removed, the crystal is kept constant in the temperature field for 1 hour, and the temperature is reduced to room temperature at a rate of 10° C./h to obtain a yttrium strontium phosphate crystal.
- the annealing temperature is 1300°C and the annealing time is 24 hours to fully release the thermal stress generated during the growth of Sr 3 Y(PO 4 ) 3 crystals.
- the obtained Sr 3 Y(PO 4 ) 3 crystal passes through 2090 nm light, a frequency doubling effect is observed, and the crystal can achieve effective frequency doubling of the 2090 nm wavelength laser.
- the AgGaS 2 crystal in the figure as a comparison shows that the Sr 3 Y(PO 4 ) 3 crystal can achieve effective frequency multiplication in the infrared band.
- the transmission spectrum of the Sr 3 Y(PO 4 ) 3 crystal is shown in FIG. 13.
- the 480nm-4100nm band there is a transmittance of >80%, indicating that the grown crystal has good optical uniformity, and the absorption cut-off edge is lower than 180nm, indicating that this crystal has potential applications in the deep ultraviolet band.
- SrCO 3 , Gd 2 O 3 and P 2 O 5 are used as raw materials for crystal growth. According to the chemical formula of gadolinium strontium phosphate, Sr 3 Gd(PO 4 ) 3 , the stoichiometric ratio is used for compounding, and further P 2 O 5 5% excess of total mass;
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible for the first sintering at a sintering temperature of 900°C and a constant temperature for 15 hours to decompose and remove CO 2 and H 2 O;
- step (3) Put the gadolinium strontium phosphate polycrystalline material obtained in step (2) into an iridium-gold crucible in a single crystal furnace.
- the furnace is evacuated and filled with nitrogen as a protective gas to prevent oxidation of the iridium-gold crucible, and heated by medium frequency induction
- the polycrystalline material is heated to melting, the polycrystalline material is fully melted and then cooled to condense, and then the temperature is raised again to melt all of it, and this is repeated 3 times to remove the bubbles generated in the melt.
- the melt is overheated at about 20°C and kept at a constant temperature for 1 hour to obtain a uniformly melted gadolinium strontium phosphate melt;
- step (3) Take the yttrium strontium phosphate crystal as the seed crystal, and slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and the single crystal is grown;
- the growth temperature is 1800°C; when the seed crystal is necked, the pulling speed is controlled at 4 ⁇ 4.5mm/h, and the speed is 8-15r/min; when the diameter of the seed crystal is reduced to 1mm, it starts at 0.8°C/ h Slowly lower the temperature, and then put the shoulders; when the shoulders are put, the lifting speed is reduced to 0.4 ⁇ 0.5mm/h, and the rotation speed is 6-8r/min; when the diameter of the crystal shoulder reaches the predetermined size of 20mm, the speed is 0.2°C/h The temperature is raised and lowered at the speed for equal diameter growth; during equal diameter growth, the pulling speed is 0.6mm/h and the rotation speed is 8r/min.
- the crystal When the crystal grows to a height of 30mm, the crystal is ready to be lifted; the lift-off process is as follows: increase the temperature at a rate of 20°C/h, and when the bottom of the crystal is observed to shrink inward at the rising temperature, increase the pulling speed to 6mm/ h Pull the crystal to separate it from the melt. After the crystal is removed, the crystal is kept at a constant temperature in a temperature field for 1 hour, and the temperature is reduced to room temperature at a rate of 15° C./h to obtain a strontium gadolinium phosphate crystal.
- the annealing temperature is 1300°C and the annealing time is 24 hours to fully release the thermal stress generated during the growth of Sr 3 Gd(PO 4 ) 3 crystals.
- the size of the obtained Sr 3 Gd(PO 4 ) 3 crystal is 20 mm in diameter and 30 mm in height; a frequency doubling effect is observed when passing through 2090 nm light. After testing, the crystal has a transmittance of >80% in the 480nm-4100nm band, and the optical uniformity is good.
- Comparative Example 3 As described in Example 5, the difference is that the raw materials of SrCO 3 , Y 2 O 3 and NH 4 H 2 PO 4 in step (1) are compounded according to the chemical formula Sr 3 Y(PO 4 ) 3 stoichiometric ratio , NH 4 H 2 PO 4 is not excessive. The results showed that: due to the component deviation and delamination phenomenon occurred after the yttrium strontium phosphate raw material was melted, Sr 3 Y(PO 4 ) 3 single crystal could not be grown when the lower seed crystal was pulled. The photo of the growth product is shown in Figure 3. Sr 3 Y(PO 4 ) 3 polycrystalline.
- Comparative Example 4 The method as described in Example 5, except that: in step (1), the raw materials of SrCO 3 , Y 2 O 3 and NH 4 H 2 PO 4 are stoichiometrically measured according to the chemical formula Sr 3 Y(PO 4 ) 3 Compared with the batching, the NH 4 H 2 PO 4 raw material is further increased by 0.5%.
- the crystals grown are of poor quality and irregular shapes, as shown in Figure 8. It has been found through research that in this case, the phosphate excess of only 0.5% is not enough to compensate for the deviation of the composition due to the volatilization of phosphorus during crystal growth, resulting in poor crystallinity of yttrium strontium phosphate single crystal.
- the wafer was processed along the X and Y directions of the physical axis.
- the thickness direction was X
- the length direction was Y
- the width direction was Z.
- the piezoelectric resonance and anti-resonance peaks of the wafer sample are detected by an impedance analyzer, indicating that the crystal has a piezoelectric effect in the tangential direction. In particular, when the temperature rises to 1000°C, piezoelectric resonance and anti-resonance peaks are still observed, indicating that the crystal can be used as a high-temperature piezoelectric crystal. As shown in Figure 14.
- the Sr 3 Y(PO 4 )3 crystal prepared in Example 6 is oriented with reference to the physical axis of the piezoelectric, and the wafer is processed along the physical axis X and Z directions.
- the thickness direction is X
- the length direction is Z
- the width direction is X
- conductive electrode is plated on crystal surface in thickness direction.
- the piezoelectric resonance and anti-resonance peaks of the wafer sample are detected by an impedance analyzer, indicating that the crystal has a piezoelectric effect in the tangential direction.
- the piezoelectric resonance peak and anti-resonance peak can also be observed, indicating that the crystal can be used as a high-temperature piezoelectric crystal.
- the resonant frequency and anti-resonant frequency of the sample appeared at 881.8kHz and 887.8kH, respectively.
- the Sr 3 Y(PO 4 ) 3 crystal prepared in Example 5 was oriented with reference to the piezoelectric physical axis, and the wafer was processed along the physical axis Z and X directions.
- the thickness direction is Z
- the length direction is X
- the width direction is Y
- conductive electrode is plated on crystal surface in thickness direction.
- the piezoelectric resonance and anti-resonance peaks of the wafer sample were detected by an impedance analyzer, indicating that the crystal has a piezoelectric effect in this direction.
- the crystal cut shape still has piezoelectric activity, so it can be used as a high temperature piezoelectric crystal.
- the different Sr 3 Y(PO 4 ) 3 crystal cut shapes were raised from room temperature to 1000° C., and it was observed that the crystal still had piezoelectric activity.
- the resulting impedance analysis spectrum is shown in FIG. 15.
- the impedance analyzer can detect the piezoelectric resonance and anti-resonance peaks of the series of wafer samples with different Sr 3 Y(PO 4 ) 3 crystal cuts, indicating that the crystal has piezoelectric effect in any direction in space.
- the crystal cut type also has piezoelectric activity at a temperature of 1000° C., so it can be used as a high-temperature piezoelectric crystal.
- step (2) Fully mix the raw materials prepared in step (1) and put them into an alumina crucible for the first sintering.
- the sintering temperature is 900°C and the temperature is kept constant for 10 hours to decompose and remove CO 2 , H 2 O and NH 3 ;
- step (3) Put the ytterbium barium phosphate polycrystalline material obtained in step (2) into an iridium-gold crucible in a single crystal furnace, evacuate the furnace and fill it with nitrogen as a protective gas to prevent oxidation of the iridium-gold crucible, and use medium frequency induction heating
- the polycrystalline material is heated to melting, the polycrystalline material is fully melted and then cooled to condense, and then the temperature is raised again to melt all of it, and this is repeated 3 times to remove the bubbles generated in the melt.
- the melt is overheated at about 20°C and kept at a constant temperature for 1 hour to obtain a uniformly melted barium ytterbium phosphate melt;
- step (3) Using an iridium rod as a seed crystal, slowly immerse it into the polycrystalline melt of step (3), so that the top of the seed crystal is perpendicular to and just in contact with the melt, and then the single crystal is grown;
- the growth temperature is 1800°C; when the seed crystal is necked, the pulling speed is controlled at 1 ⁇ 3.5mm/h, and the speed is 6-12r/min; when the diameter of the seed crystal is reduced to 1mm, it starts at 0.5°C/ h Slowly lower the temperature and put the shoulders down; when the shoulders are put down, the pulling speed is reduced to 0.3 ⁇ 0.5mm/h, and the rotation speed is 6-8r/min; when the diameter of the crystal shoulder reaches the predetermined size of 15mm, the speed is 0.3°C/h The temperature is raised and lowered at the speed for equal diameter growth; during equal diameter growth, the pulling speed is 0.5mm/h and the rotation speed is 5r/min.
- the lift off process is as follows: increase the temperature at a rate of 15°C/h, and when the bottom of the crystal is observed to shrink inward at the rising temperature, increase the pulling speed to 5mm /h Pull the crystal to separate it from the melt. After the crystals are removed, the crystals are kept constant in a temperature field for 1 hour, and the temperature is reduced to room temperature at a rate of 10-30° C./h to obtain barium ytterbium phosphate crystals.
- the annealing temperature is 1300°C and the annealing time is 48 hours to fully release the thermal stress generated during the growth of Ba 3 Yb(PO 4 ) 3 crystals.
- the dielectric spectrum and resistivity characteristics of the Ba 3 Yb(PO 4 ) 3 crystal are shown in FIGS. 19 and 20. At 900°C, it not only has low dielectric loss ( ⁇ 1.1), but also has high resistivity ( ⁇ >10 7 (Ohm ⁇ cm)), indicating that Ba 3 Yb(PO 4 ) 3 crystal is in the high-temperature piezoelectric field Has potential applications.
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Abstract
Description
Claims (20)
- 通式为M 3RE(PO 4) 3的光电功能晶体,所述晶体为非中心对称结构,属于立方晶系-43m点群,其中,M为碱土金属,RE为稀土元素。
- 根据权利要求1所述的光电功能晶体,其特征在于,所述的碱土金属为Ba、Ca或Sr。
- 根据权利要求1所述的光电功能晶体,其特征在于,所述的稀土元素为Y、La、Gd或Yb。
- 根据权利要求1所述的光电功能晶体,其特征在于,所述M 3RE(PO 4) 3光电功能晶体选自下列之一种:Ba 3Y(PO 4) 3晶体,Ba 3La(PO 4) 3晶体,Ba 3Yb(PO 4) 3,Ca 3Gd(PO 4) 3晶体,Sr 3Y(PO 4) 3晶体,Sr 3La(PO 4) 3晶体,Sr 3Gd(PO 4) 3晶体。
- 根据权利要求4所述的光电功能晶体,其特征在于,所述晶体结构参数如下:
- 如权利要求6所述磷酸钇锶晶体,其特征在于,所述磷酸钇锶晶体熔点基本上在1850℃,且从室温到熔点无相变;光谱分析测得该晶体在480nm-4100nm波段有>80%的高光学透过率;或者,用阻抗法测得该晶体的有效压电常数为d 14=6-10pC/N;或者,利用阻抗法测量计算得到该晶体的有效机电耦合系数为k 14=10-30%。
- 权利要求1所述M 3RE(PO 4) 3的光电功能晶体的生长方法,包括步骤:(1)多晶料合成根据化学式通式M 3RE(PO 4) 3,采用化学计量比准确称取原料MCO 3、RE 2O 3和含磷化合物,在此基础上进一步使含磷化合物过量其总质量1.5-10%质量百分比(以化学计量比的含磷化合物的质量计);将上述称量好的原料进行研磨和混合均匀后进行一次烧结,优选装入陶瓷坩埚内进行烧结;烧结温度为800℃-950℃并且恒温10-15小时,然后降温,将一次烧结的原料进行研磨细化并混合均匀,压成圆饼状料块进行二次烧结,烧结温度为1200-1400℃并且恒温24-48小时,经固相反应得到M 3RE(PO 4) 3多晶料;(2)多晶料熔化将步骤(1)合成的M 3RE(PO 4) 3多晶料放入单晶生长炉内的铱金坩埚中,炉内抽真空并且充入保护气体氮气或者氩气,采用中频感应加热方式将M 3RE(PO 4) 3多晶料升温至熔化,多晶料全熔后降温使其凝结,然后再次升温使其全部熔化,如此重复若干次,排净熔体中产生的气泡;然后再将熔体过热10-20℃,恒温0.5-2小时,得到熔化均匀的M 3RE(PO 4) 3熔液;(3)提拉法晶体生长采用铱金棒或M 3RE(PO 4) 3晶体作为籽晶,将籽晶下到M 3RE(PO 4) 3熔液液面,使籽晶底端与熔液垂直且刚好接触,开始进行单晶生长;单晶生长工艺条件如下:生长温度1800-1950℃;籽晶收颈时提拉速度1-8mm/h、放肩时提拉速度降至0.2-1mm/h,等径生长提拉速度为0.5-1mm/h;晶体生长到所需尺寸时提脱晶体。
- 如权利要求8所述M 3RE(PO 4) 3的光电功能晶体的生长方法,其特征在于,提脱晶体后,将晶体在温场内恒温0.5-1h,然后以5-30℃/h的速率降至室温,得到M 3RE(PO 4) 3晶体;从单晶生长炉内取出M 3RE(PO 4) 3晶体后,将其进行退火处理,退火温度为1200-1400℃。 退火时间为24-48小时。
- 如权利要求8所述M 3RE(PO 4) 3的光电功能晶体的生长方法,其特征在于,步骤(1)中,所述含磷化合物为NH 4H 2PO 4或P 2O 5;使含磷化合物过量其总质量3-6%质量百分比。
- 如权利要求8所述M 3RE(PO 4) 3的光电功能晶体的生长方法,其特征在于,步骤(1)中,氮气或者惰性气体的体积分数为90%-95%;步骤(3)中晶体生长经过收颈、放肩、等径生长和提脱晶体四个阶段;其中,收颈过程中,提拉速度控制为1-8mm/h,当籽晶直径收细至0.5-2.0mm时,开始以0.5-5℃/h缓慢降温,进行放肩;放肩阶段,将提拉速度降至0.2-1mm/h;当晶体肩部的直径达到预定尺寸时,再以0-5℃/h的速度升温或降温,控制温度在1800-1950℃,进行等径生长;当晶体提拉至所需高度时开始提脱晶体。
- 如权利要求8所述M 3RE(PO 4) 3的光电功能晶体的生长方法,其特征在于,所述提脱晶体工艺条件为:以10-30℃/h速率缓慢升高温度,当晶体底部有向内收缩的趋势时,将提拉速度提高至5-20mm/h,提拉晶体使之与熔液脱离。
- 权利要求6所述的磷酸钇锶晶体的制备方法,包括:将含Sr化合物、含Y化合物和含P化合物的原料混合、烧结,合成磷酸钇锶多晶料,升温使磷酸钇锶多晶料熔化,并经反复降温凝结、升温熔化若干次,得到熔化均匀的磷酸钇锶熔液;其中,根据化学式Sr 3Y(PO 4) 3,所述原料中含Sr化合物、含Y化合物和含P化合物在化学计量比基础上,按含P化合物质量计使其过量2.5-7.5%质量百分比;采用铱金棒或磷酸钇锶晶体作为籽晶,使所述籽晶底端与所述磷酸钇锶熔液刚好接触,采用提拉法进行单晶生长,单晶生长温度1700-1850℃,籽晶收颈时提拉速度2-5mm/h,放肩时提拉速度降至0.2-2mm/h,等径生长提拉速度为0.2-1mm/h;晶体生长到所需尺寸时提脱晶体,并在温场内恒温0.5-1h,再以不大于30℃/h的速率降至室温,得到磷酸钇锶晶体。
- 如权利要求13所述的磷酸钇锶晶体的制备方法,其特征在于,所述含Sr化合物、含Y化合物和含P化合物各自独立地选自相应的氧化物、碳酸盐、磷酸盐、卤化物、硝酸盐、草酸盐和硼酸盐中的至少一种,且含有Sr、Y、P元素的化合物不可以同时为卤化物;优选的,所述含Sr化合物选自相应的氧化物、碳酸盐、卤化物、硫酸盐或硝酸盐化合物;所述含Y化合物选自相应的氧化物、硝酸盐或磷酸盐;所述含P化合物选自相应的氧化物或磷酸盐。
- 如权利要求13所述的磷酸钇锶晶体的制备方法,其特征在于,制备磷酸钇锶多晶 料时,原料混合后进行两次高温烧结,所述原料混合、烧结按以下方法进行:将称量好的原料进行研磨并混合均匀后进行一次烧结,烧结温度为800℃-950℃,恒温10-15小时,以分解和去除CO 2、NH 3和H 2O;然后降至室温,将一次烧结的原料进行充分研磨细化并混合均匀,压成圆饼状料块进行二次烧结,烧结温度为1200℃-1400℃,恒温20-40小时,原料经固相反应得到磷酸钇锶多晶料。
- 如权利要求13所述的磷酸钇锶晶体的制备方法,其特征在于,所述磷酸钇锶多晶料熔化后,反复降温凝结、升温熔化3-4次;优选的,所述磷酸钇锶多晶料熔化后反复降温凝结、升温熔化若干次后,再将熔体过热10-20℃,恒温0.5-2小时。
- 如权利要求13所述的磷酸钇锶晶体的制备方法,其特征在于,所述晶体生长过程包括收颈、放肩、等径生长和提脱晶体四个阶段;优选的,收颈阶段中提拉速度控制为2-5mm/h,当籽晶直径收细至0.5-2.0mm时,开始以0.5-5℃/h缓慢降温,进行放肩;放肩阶段将提拉速度降至0.2-2mm/h,当晶体肩部的直径达到所需晶体直径时,再以0-5℃/h的速度升温或降温,进行等径生长,等径生长时提拉速度为0.4-0.7mm/h,转速为6-8r/min;当晶体提拉至所需晶体高度时进行提脱晶体;所述提脱晶体方法如下:以10-30℃/h的速率缓慢升高温度,当晶体底部有向内收缩的趋势时,将提拉速度提高至5-20mm/h,提拉晶体使之与熔液脱离。
- 如权利要求13所述的磷酸钇锶晶体的制备方法,其特征在于,本发明的磷酸钇锶晶体生长方法还包括退火步骤;所述退火步骤包括:在磷酸钇锶晶体生长完成后,将磷酸钇锶晶体取出,置于高温马弗炉内进行退火,退火温度为1200-1400℃,退火时间为24-48小时。
- 权利要求6所述的Sr 3Y(PO 4) 3晶体作为非线性光学晶体和压电晶体的应用,作为激光基质晶体、非线性频率变化晶体、高温压电晶体的用途。
- 如权利要求9所述的Sr 3Y(PO 4) 3晶体作为非线性光学晶体和压电晶体的应用,其特征在于,所述非线性光学功能器件包括激光频率变换器、光参量放大器、光参量振荡器或拉曼频率变换器;所述压电器件包括压电谐振器、振荡器、滤波器、压电换能器、压电式压力传感器、声换能器或超声波传感器。
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| CN115747950B (zh) * | 2022-12-14 | 2025-11-25 | 山东省科学院新材料研究所 | 一种ktn单晶的制备方法 |
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