WO2020213112A1 - Dispositif d'usinage par décharge électrique à fil - Google Patents

Dispositif d'usinage par décharge électrique à fil Download PDF

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Publication number
WO2020213112A1
WO2020213112A1 PCT/JP2019/016576 JP2019016576W WO2020213112A1 WO 2020213112 A1 WO2020213112 A1 WO 2020213112A1 JP 2019016576 W JP2019016576 W JP 2019016576W WO 2020213112 A1 WO2020213112 A1 WO 2020213112A1
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WO
WIPO (PCT)
Prior art keywords
wire
ingots
workpiece
electric discharge
machining
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Application number
PCT/JP2019/016576
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English (en)
Japanese (ja)
Inventor
瞬 中澤
隆 湯澤
大友　陽一
茂行 中里
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to PCT/JP2019/016576 priority Critical patent/WO2020213112A1/fr
Priority to JP2019553145A priority patent/JP6647469B1/ja
Priority to CN201980095387.4A priority patent/CN113710398B/zh
Publication of WO2020213112A1 publication Critical patent/WO2020213112A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02—Wire-cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/36—Supply or regeneration of working media

Definitions

  • the present invention relates to a wire electric discharge machine that simultaneously performs wire electric discharge machining of a plurality of ingots with one wire.
  • One of the wire electric discharge machines is a device in which two ingots to be machined are arranged in parallel and two ingots are simultaneously wire electric discharged with one wire.
  • the wire electric discharge machine described in Patent Document 1 forms a plurality of wire cutting portions by winding one wire electrode between four guide rollers and arranging them in parallel, and feeds each wire cutting portion individually. are doing.
  • This wire electric discharge machine cuts two ingots at the same time by simultaneously discharging between each wire cutting portion and the ingot while supplying a processing liquid to each wire cutting portion, and a plurality of each ingot at a time. It is cut into pieces.
  • the present invention has been made in view of the above, and even when a plurality of ingots arranged in parallel are subjected to wire electric discharge machining with one wire at the same time, the machining fluids supplied to the adjacent ingots are used. It is an object of the present invention to obtain a wire electric discharge machine capable of performing cutting with high accuracy while suppressing collision with each other.
  • the wire electric discharge machine of the present invention arranges a columnar first workpiece and a columnar second workpiece in parallel in the same plane.
  • the holding portion to be held is linearly arranged so as to face each of the first work piece and the second work piece, and the positions facing the first work piece and the second work piece.
  • the first workpiece and the second workpiece are provided with a wire electrode for performing wire electric discharge machining.
  • the wire electric discharge machine of the present invention is arranged at a position along the wire electrode and at a position facing the first work piece and the second work piece, and the first wire electric discharge machine is arranged along the wire electrode.
  • the workpiece and the second workpiece are provided with a pair of machining fluid supply units that inject the machining fluid onto the workpiece and the second workpiece, and the first workpiece and the second workpiece have the same diameter.
  • the first holding portion is provided so that the distance between the cylindrical shaft of the first workpiece and the cylindrical shaft of the second workpiece is 1.2D or more and 2D or less when the diameter is D. Holds the work piece and the second work piece.
  • the wire electric discharge machining apparatus prevents the machining fluids supplied to the adjacent ingots from colliding with each other even when a plurality of ingots arranged in parallel are wire electric discharged simultaneously with one wire. It has the effect of being able to perform accurate cutting while suppressing it.
  • the figure which shows the structure of the wire electric discharge machining apparatus which concerns on embodiment The figure for demonstrating the arrangement position of the ingot processed by the wire electric discharge machine which concerns on embodiment.
  • the figure for demonstrating the machined groove of the ingot machined by the wire electric discharge machine which concerns on embodiment.
  • the figure for demonstrating the flow of the machining fluid ejected from the nozzle of the wire electric discharge machining apparatus which concerns on embodiment.
  • the figure for demonstrating the numerical analysis model of the arrangement position of an ingot in the wire electric discharge machining apparatus which concerns on embodiment.
  • the figure for demonstrating the analysis result of the numerical analysis for the wire electric discharge machining apparatus which concerns on embodiment.
  • the figure which shows the calculation result when the amplitude of the wire electrode was calculated using the theoretical formula for the wire electric discharge machining apparatus which concerns on embodiment.
  • FIG. 1 is a diagram showing a configuration of a wire electric discharge machine according to an embodiment.
  • the horizontal direction in the paper surface is the X direction
  • the upward direction in the paper surface is the Z direction
  • the front direction with respect to the paper surface is the Y direction.
  • the Z direction is the direction opposite to the vertical direction
  • the XY plane is a horizontal plane.
  • FIG. 2 is a diagram for explaining an arrangement position of an ingot processed by the wire electric discharge machine according to the embodiment.
  • FIG. 2 shows a cross-sectional view of the ingots 30a and 30b when the ingots 30a and 30b are viewed from the Y direction.
  • the wire electric discharge machine 1 is a device that simultaneously wire electric discharges a plurality of ingots with one wire. In the present embodiment, a case where the wire electric discharge machine 1 simultaneously performs wire electric discharge machining of two ingots 30a and 30b with one wire will be described.
  • the distance Xd between the tangents Ta and Tb perpendicular to the wire electrodes 12 of the two ingots 30a and 30b is 0.2D or more.
  • EDM is performed with the ingots 30a and 30b arranged so that the intervals are 1D or less.
  • the tangent line Ta is a tangent line in the vertical direction closer to the ingot 30b among the tangent lines perpendicular to the wire electrode 12 of the ingot 30a
  • the tangent line Tb is a tangent line perpendicular to the wire electrode 12 of the ingot 30b to the ingot 30a.
  • the shortest distance Xd (distance in the X direction) between the ingots 30a and 30b is 0.2D or more and 1D or less.
  • the distance between the centers of the circles of the ingots 30a and 30b having the same Y coordinate is 1.2D or more and 2D or less.
  • the circle of the ingot 30a and the circle of the ingot 30b in this case are circles in the same XZ plane. That is, the distance between the cylindrical shaft 35a of the ingot 30a and the cylindrical shaft 35b of the ingot 30b is 1.2D or more and 2D or less.
  • the cylindrical shaft 35a is an axis that passes through the center of the upper surface and the center of the bottom surface of the cylindrical ingot 30a
  • the cylindrical shaft 35b is an axis that passes through the center of the upper surface and the center of the bottom surface of the cylindrical ingot 30b. That is, the cylindrical shaft 35a is an axis parallel to the generatrix of the ingot 30a (an axis extending in the height direction of the ingot 30a), and the cylindrical shaft 35b is an axis parallel to the generatrix of the ingot 30b (in the height direction of the ingot 30b). Extending axis).
  • the wire electric discharge machine 1 includes a feeding bobbin 11, a wire electrode 12, a winding guide roller 13a, 13b, 13c, 13d, a winding bobbin 14, a positioning guide roller 15a, 15b, a power supply 17a, 17b, a nozzle 19a, and the like. 19b, machining liquid supply hoses 20a and 20b, machining stage 40, workpiece holder 50, and machining tank 60 are provided.
  • the workpiece holder 50 for holding the ingots 30a and 30b is arranged on the machining stage 40 in the machining tank 60, and the machining liquid 70 is filled in the machining tank 60.
  • An example of the wire electric discharge machine 1 is a multi-wire electric discharge machine.
  • the feeding bobbin 11, the wire electrode 12, the winding guide rollers 13a, 13b, 13c, 13d, the winding bobbin 14, and the positioning guide rollers 15a, 15b are composed of columnar members extending in the Y direction.
  • the feeding bobbin 11 feeds out the wire electrode 12, the winding guide rollers 13a to 13d are wound with the wire electrode 12, and the winding bobbin 14 winds the wire electrode 12.
  • the positioning guide rollers 15a and 15b position the wire electrode 12.
  • one wire electrode 12 unwound from the feeding bobbin 11 sequentially moves between a plurality of winding guide rollers 13a, 13d, 13c, and 13b a plurality of times. It is wound at various intervals.
  • one wire electrode 12 is sequentially wound around each of the winding guide rollers 13a to 13d, and the wire electrodes 12 are arranged so as to be arranged parallel to the axial direction (X direction) of the wire electrodes 12.
  • the portion of the wire electrode 12 that cuts the ingots 30a and 30b is the wire cutting portion.
  • the wire electrode 12 forms a plurality of wire cutting portions.
  • the plurality of wire cutting portions are provided in parallel so as to be separated from each other, and face the ingots 30a and 30b, respectively.
  • the distance between the wire cutting portions formed by winding the wire electrode 12 is the processing width of the ingots 30a and 30b, that is, the thickness of the workpiece to be cut (thin plate cut from the ingots 30a and 30b).
  • the wire electrodes 12 are linearly arranged so as to face the ingots 30a and 30b, respectively, and wire electric discharge machining is performed on the ingots 30a and 30b at positions facing the ingots 30a and 30b.
  • the wire electrode 12, the winding guide rollers 13c, 13d, the winding bobbin 14, the positioning guide rollers 15a, 15b, the power supply 17a, etc. are placed in the processing tank 60 filled with the processing liquid 70.
  • the wire cutting portions With the 17b, nozzles 19a, 19b, machining fluid supply hoses 20a, 20b, machining stage 40, workpiece holder 50, and ingots 30a, 30b immersed, the wire cutting portions are separated by a predetermined interval, and the ingots 30a, It is arranged so as to face 30b, and a voltage is applied between the wire cutting portion and the ingots 30a and 30b.
  • the wire electric discharge machining apparatus 1 discharge-cuts the ingots 30a and 30b by the wire cutting portion by feeding the ingots 30a and 30b to the wire cutting portion in the cutting direction. That is, the wire electric discharge machining apparatus 1 has a drive mechanism (not shown) for relatively machining and feeding the wire electrode 12 and the ingots 30a and 30b held by the workpiece holder 50. As a result, the ingots 30a and 30b are processed into a plurality of thin plates at the same time.
  • the ingots 30a and 30b which are the workpieces, have a columnar shape having the same diameter, and are columnar in the present embodiment.
  • the ingots 30a and 30b are held side by side in parallel by the workpiece holder 50 in the processing tank 60 so that the Y direction is the axial direction.
  • the ingots 30a and 30b are materials that are sliced into a plurality of thin plates.
  • the ingots 30a and 30b may be, for example, a metal such as tungsten or molybdenum as a sputtering target, or ceramics such as polycrystalline silicon carbide used as various structural members.
  • the ingots 30a and 30b may be single crystal silicon as a semiconductor device wafer, may be a semiconductor material such as a single crystal silicon carbide or gallium nitride, or may be a single crystal as a solar cell wafer. It may be a solar cell material such as silicon or polycrystalline silicon.
  • FIG. 1 shows a case where one wire electrode 12 is wound around a plurality of winding guide rollers 13a, 13b, 13c, 13d, but the case is not limited to this case. That is, as long as a plurality of wire cutting portions can be formed by folding back one wire electrode 12, the specific configuration thereof is not particularly limited.
  • the wire cutting portion may be provided at one location on each of the ingots 30a and 30b.
  • the plurality of winding guide rollers 13a, 13b, 13c, 13d have a columnar shape, and each of them is directed in the Y direction perpendicular to the direction in which each axis extends (X direction). They are arranged so as to be parallel to each other. In the present embodiment, four winding guide rollers 13a to 13d are arranged, but the number of winding guide rollers 13a to 13d may be two, three, or five or more. In the following description, when distinguishing the four winding guide rollers 13a to 13d, “first winding guide roller 13a", “second winding guide roller 13b", and “third winding guide roller 13b", respectively. They are called “guide roller 13c” and "fourth winding guide roller 13d".
  • the first winding guide roller 13a and the second winding guide roller 13b are provided at positions higher than the third winding guide roller 13c and the fourth winding guide roller 13d. Further, the third winding guide roller 13c and the fourth winding guide roller 13d are higher than the positions of the ingots 30a and 30b, and are higher than the first winding guide roller 13a and the second winding guide roller 13b. It is installed side by side in a low position.
  • the wire electrode 12 taken out from the feeding bobbin 11 is wound around the winding bobbin 14 after being wound a predetermined number of times between the first to fourth winding guide rollers 13a to 13d.
  • the wire portion R between the third winding guide roller 13c and the fourth winding guide roller 13d faces the ingots 30a and 30b as a wire cutting portion. Is arranged so that In the wire electric discharge machining apparatus 1, the ingots 30a and 30b are opposed to the wire cutting portion at a minute interval to perform electric discharge machining.
  • 15a and 15b are arranged respectively.
  • first positioning guide roller 15a when the two positioning guide rollers 15a and 15b are distinguished, they are referred to as “first positioning guide roller 15a” and “second positioning guide roller 15b", respectively.
  • the first positioning guide roller 15a is provided between the wire cutting portion and the third winding guide roller 13c.
  • the first positioning guide roller 15a is separated from the third winding guide roller 13c so that the axial direction of the first positioning guide roller 15a is parallel to the axial direction of the third winding guide roller 13c. Are arranged.
  • the second positioning guide roller 15b is provided between the wire cutting portion and the fourth winding guide roller 13d.
  • the second positioning guide roller 15b is separated from the fourth winding guide roller 13d so that the axial direction of the second positioning guide roller 15b is parallel to the axial direction of the fourth winding guide roller 13d. Are arranged.
  • the wire electrode 12 includes the feeding bobbin 11, the winding guide roller 13a, the winding guide roller 13d, the power supply 17b, the positioning guide roller 15b, the positioning guide roller 15a, the power supply 17a, and the winding guide roller 13c.
  • the winding guide rollers 13b and the winding bobbin 14 are wound around the winding guide rollers 13a to 13d so as to come into contact with each other in this order.
  • the power supply 17a is arranged between the third winding guide roller 13c and the first positioning guide roller 15a, and the power supply 17b is the fourth winding guide roller 13d and the second positioning guide roller 15b. It is placed between.
  • the portion is a feeding wire portion to which a processing voltage for performing electric discharge machining is applied and a current is supplied.
  • a pulsed processing voltage (high frequency pulse power) for performing electric discharge machining is applied to the power feeding wire portion of the wire electrode 12 from a processing power supply (not shown) via power supplies 17a and 17b to supply a current. Will be done. As a result, a machining voltage is applied between the wire cutting portion and the ingots 30a and 30b.
  • the power supply electrons 17a and 17b are provided with the number of wire cutting portions composed of the wire electrodes 12.
  • the plurality of power supply electrons 17a and 17b are insulated from each other and are aligned on both sides of the ingots 30a and 30b to form a power supply unit.
  • the power supply electron arranged between the third winding guide roller 13c and the first positioning guide roller 15a is the power supply electron 17a, and the power supply electron group composed of the power supply electrons 17a arranged in the Y direction is the first. It is an electronic power supply unit. Further, the power supply electron arranged between the fourth winding guide roller 13d and the second positioning guide roller 15b is the power supply electron 17b, and the power supply electron group composed of the power supply electrons 17b arranged in the Y direction is the first. It is a power supply unit of 2.
  • the wire electric discharge machine 1 has a configuration in which a voltage can be independently applied to each wire cutting portion by each of the power supply electrons 17a and 17b.
  • a plurality of processing power supply units capable of independently applying a voltage to the parallel wire cutting portions are connected to a control device (not shown) of the wire electric discharge machining device 1.
  • the processing power supply unit applies a voltage to the corresponding wire cutting portion via the corresponding power supply electrons 17a and 17b according to the instruction of the control device.
  • the voltage application polarity of the wire electric discharge machine 1 of the present embodiment can be appropriately reversed as needed, as in the conventional wire electric discharge machine.
  • the pair of nozzles 19a and 19b are processing liquid supply units that inject the processing liquid 70 onto the ingots 30a and 30b along the linear wire portion R.
  • the nozzle 19a is arranged between the first positioning guide roller 15a and the ingot 30a, and the nozzle 19b is arranged between the second positioning guide roller 15b and the ingot 30b.
  • the machining fluid supply hose 20a is connected to the nozzle 19a, and the machining fluid supply hose 20b is connected to the nozzle 19b.
  • the nozzle 19a removes the machining debris of the ingot 30a by injecting the machining fluid 70 into the ingot 30a along the wire portion R, and the nozzle 19b injects the machining fluid 70 into the ingot 30b along the wire portion R. Removes the processing waste of the ingot 30b.
  • the nozzles 19a and 19b are made of an electrically insulating material or subjected to an electrical insulation treatment such as an alumite treatment so as not to come into contact with the wire electrode 12 and cause a short circuit.
  • the machining fluid 70 flowing into the nozzles 19a and 19b from the machining fluid supply hoses 20a and 20b is ejected to the outside of the nozzles 19a and 19b at the position of the wire portion R.
  • the machining liquid 70 supplied to the inside of the machining groove is discharged into the space between the ingots 30a and 30b while removing the machining chips inside the machining groove.
  • the ingots 30a and 30b are held by the workpiece holder 50 so that the axial direction is the Y direction. That is, the workpiece holder 50, which is a holding portion, holds the ingots 30a and 30b side by side in the same plane.
  • the distance Xd between the tangents Ta and Tb perpendicular to the wire electrodes 12 of the two ingots 30a and 30b is 0.2D.
  • An interval of more than 1D and less than or equal to 1D is provided between the ingots 30a and 30b to fix the ingots 30a and 30b.
  • the positions of the ingots 30a and 30b are controlled by a position control device (not shown) so as to separate a minute gap from the wire electrode 12 wound between the first to fourth winding guide rollers 13a to 13d. .. This control maintains the proper discharge gap length.
  • FIG. 3 is a diagram for explaining a machined groove of the ingot machined by the wire electric discharge machine according to the embodiment.
  • FIG. 4 is a diagram for explaining the flow of the machining fluid injected from the nozzle of the wire electric discharge machining apparatus according to the embodiment.
  • the horizontal direction in the paper surface is the X direction
  • the downward direction in the paper surface is the Y direction
  • the front direction with respect to the paper surface is the Z direction.
  • the depth direction of the paper surface is the vertical direction
  • the XY plane is the horizontal plane.
  • jets 71a and 71b of the machining fluid 70 are simultaneously injected from the nozzles 19a and 19b installed on both sides of the ingots 30a and 30b, and the jets 71a and 71b are formed in the machining groove. It passes through the inside of C along the linear wire portion R, and is ejected from the inside of the processing groove C along the wire portion R.
  • the jets 71a and 71b of the processing liquid 70 collide with each other at the collision point P coaxial with the nozzles 19a and 19b, the jets 71a and 71b are diffused around the collision point P near the collision point P. A flow is formed.
  • the momentum of the jets 71a and 71b of the machining fluid 70 jetted toward the machining grooves C of the ingots 30a and 30b is maintained inside the machining groove C, so that the jets 71a and 71b of the jetted machining fluid 70 are ,
  • the machining debris inside the machining groove C can be removed while maintaining a sufficient flow velocity.
  • the distance Xd between the tangents Ta and Tb perpendicular to the wire electrodes 12 of the two ingots 30a and 30b is fixed at Xd ⁇ 1D, the increase in the amplitude of the wire vibration during machining is suppressed, and the accuracy of cutting machining is suppressed. Can be kept.
  • FIG. 5 is a diagram for explaining a numerical analysis model of the arrangement position of the ingot in the wire electric discharge machining apparatus according to the embodiment.
  • FIG. 5 shows an ingot model when the ingots 30a and 30b are viewed from the Y direction.
  • the outline of the numerical analysis model for analyzing the arrangement position of the ingot model and the boundary condition of the arrangement position of the ingots 30a and 30b will be described below.
  • the first ingot model is the above-mentioned ingot 3D model having a plate thickness of 3 mm and a diameter of 50 mm
  • the second ingot model is the above-mentioned ingot 3D model having a plate thickness of 3 mm and a diameter of 100 mm.
  • the processing liquid 70 was water, and the standard k- ⁇ model was used as the turbulent flow model.
  • the flow rate of the processing liquid 70 ejected from the nozzles 19a and 19b was 10 L / min for the ingot having a diameter of 50 mm and 20 L / min for the ingot having a diameter of 100 mm.
  • the machined groove width is 0.15 mm, and the situation where the cutting process is advanced by 80% is simulated.
  • the machined groove depth F is set to 80 mm. Processing inside the processing groove when the distance Xd between the tangents Ta and Tb perpendicular to the wire electrode 12, which is the installation interval of the ingots 30a and 30b, is changed by the first ingot model and the second ingot model. The change in liquid flow was verified.
  • the position where the flow velocity of the processing liquid 70 is measured is shown at position 90.
  • the ingots 30a and 30b having a diameter of 50 mm may be referred to as a first ingot set, and the ingots 30a and 30b having a diameter of 100 mm may be referred to as a second ingot set.
  • FIG. 6 is a diagram for explaining the analysis result of the numerical analysis for the wire electric discharge machine according to the embodiment.
  • the horizontal axis is the value Z obtained by normalizing the distance Xd between the tangents Ta and Tb perpendicular to the wire electrode 12 with the diameters D of the ingots 30a and 30b
  • the vertical axis is the flow velocity near the exit of the machining groove (position 90).
  • the relationship between the value Z and the flow velocity is plotted.
  • the round mark 41 shows the relationship between the value Z of the first ingot set and the flow velocity
  • the square mark 42 shows the relationship between the value Z of the second ingot set and the flow velocity. There is. Further, in FIG.
  • the maximum value of the flow velocity of the first ingot group is indicated by the maximum value 51, and the maximum value of the flow velocity of the second ingot group is indicated by the maximum value 52. Further, in FIG. 6, a value of 70% of the maximum value of the flow velocity of the first ingot group is indicated by a value of 61, and a value of 70% of the maximum value of the flow velocity of the second ingot group is indicated by a value of 62.
  • the wire electric discharge machine 1 performs wire electric discharge machining with the distance Xd between the tangents Ta and Tb perpendicular to the wire electrodes 12 of the two ingots 30a and 30b being 0.2D or more.
  • T is the tension of the wire portion R
  • h is the length of the wire portion R
  • q is the electrostatic attraction applied to the wire portion R.
  • the wire electric discharge machine 1 is a multi-wire electric discharge machine
  • the wire electric discharge machine 1 has one wire electrode 12 at one location on each of the ingots 30a and 30b. It may be a wire electric discharge machining apparatus that performs machining.
  • the cutting process is performed with an interval of 0.2 D or more and 1 D or less as the distance Xd between the tangents Ta and Tb perpendicular to the wire electrode 12 with respect to the diameter D of the ingots 30a and 30b. Therefore, the collision of the working liquid 70 supplied from both sides of the ingots 30a and 30b can be suppressed. That is, even when the ingots 30a and 30b arranged in parallel are subjected to wire electric discharge machining with one wire electrode 12 at the same time, the machining liquids 70 supplied to the adjacent ingots 30a and 30b are prevented from colliding with each other. it can. Since it is possible to prevent the machining liquids 70 from colliding with each other, it is possible to remove the machining debris without retaining it inside the machining groove.
  • the configuration shown in the above-described embodiment shows an example of the content of the present invention, can be combined with another known technique, and is one of the configurations without departing from the gist of the present invention. It is also possible to omit or change the part.
  • 1 Wire electric discharge machine 11 Feeding bobbin, 12 Wire electrode, 13a to 13d Winding guide roller, 14 Winding bobbin, 15a, 15b Positioning guide roller, 17a, 17b Power supply, 19a, 19b Nozzle, 20a, 20b Machining liquid supply hose, 30a, 30b wire, 35a, 35b cylindrical shaft, 40 machining stage, 50 workpiece holder, 60 machining tank, 70 machining fluid, 71a, 71b jet, C machining groove, F machining groove depth, P collision point, R wire part, Xd distance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

La présente invention concerne un dispositif d'usinage par décharge électrique à fil (1) comprenant : un outil de maintien de pièce à usiner (50) qui maintient des lingots cylindriques (30a, 30b) disposés en parallèle sur le même plan ; des électrodes de fil (12) qui sont agencées en une forme de ligne droite pour faire face aux lingots (30a, 30b), respectivement, et effectuer un usinage par décharge électrique à fil sur les lingots (30a, 30b) à des emplacements faisant face aux lingots (30a, 30b) ; et une paire de tuyaux d'alimentation en liquide de traitement (20a, 20b) qui sont agencés le long des électrodes de fil (12) et à des emplacements se faisant face avec les lingots (30a, 30b) intercalés entre eux, et injectent un fluide de travail (70) sur les lingots (30a, 30b) le long des électrodes de fil (12), les lingots (30a, 30b) ayant le même diamètre, et l'outil de maintien de pièce (50) maintenant les lingots (30a, 30b) de telle sorte qu'un intervalle entre des axes cylindriques (35a, 35b) des deux lingots (30a, 30b) est de 1,2D ou plus et 2D ou moins, où D est le diamètre.
PCT/JP2019/016576 2019-04-18 2019-04-18 Dispositif d'usinage par décharge électrique à fil WO2020213112A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2019/016576 WO2020213112A1 (fr) 2019-04-18 2019-04-18 Dispositif d'usinage par décharge électrique à fil
JP2019553145A JP6647469B1 (ja) 2019-04-18 2019-04-18 ワイヤ放電加工装置
CN201980095387.4A CN113710398B (zh) 2019-04-18 2019-04-18 线放电加工装置

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Application Number Priority Date Filing Date Title
PCT/JP2019/016576 WO2020213112A1 (fr) 2019-04-18 2019-04-18 Dispositif d'usinage par décharge électrique à fil

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WO2020213112A1 true WO2020213112A1 (fr) 2020-10-22

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Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2015047685A (ja) * 2013-09-04 2015-03-16 三菱電機株式会社 マルチワイヤ加工装置及びマルチワイヤ加工方法
JP2016064460A (ja) * 2014-09-24 2016-04-28 株式会社ディスコ マルチワイヤ放電加工装置

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