WO2020202856A1 - 走行車システム - Google Patents
走行車システム Download PDFInfo
- Publication number
- WO2020202856A1 WO2020202856A1 PCT/JP2020/006371 JP2020006371W WO2020202856A1 WO 2020202856 A1 WO2020202856 A1 WO 2020202856A1 JP 2020006371 W JP2020006371 W JP 2020006371W WO 2020202856 A1 WO2020202856 A1 WO 2020202856A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- traveling
- traveling vehicle
- track
- arm
- vehicle system
- Prior art date
Links
- 230000033001 locomotion Effects 0.000 description 17
- 230000003028 elevating effect Effects 0.000 description 16
- 238000012423 maintenance Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000009351 contact transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/12—Systems with propulsion devices between or alongside the rails, e.g. pneumatic systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Definitions
- One aspect of the present invention relates to a traveling vehicle system.
- Patent Document 1 The traveling vehicle described in Patent Document 1 is a track including a pair of left and right side walls and a base portion connecting between the upper ends of the pair of side walls so that a space for accommodating the traveling portion is formed. It travels along a track formed in a C-shape in cross section.
- Each of the pair of side walls is provided with a power feeding unit that supplies electric power to the traveling vehicle along the extending direction.
- an object of one aspect of the present invention is to provide a traveling vehicle system capable of forming a working area that exposes a traveling portion that requires maintenance work and moving the traveling vehicle in the working area.
- the traveling vehicle system is provided with a main body portion that accommodates the traveling portion of the traveling vehicle and extends along the traveling path of the traveling vehicle, and a main body portion extending along the extending direction of the main body portion.
- a traveling vehicle system in which a traveling vehicle travels on a traveling vehicle having a feeding unit for supplying power to the traveling unit, and is provided so as to be continuous with the traveling track, and at least a part of the traveling unit is exposed. It is provided with a work track in which an open portion is formed and a feeding portion is not provided, and a moving mechanism for moving a traveling vehicle along the work track.
- the portion where the feeding portion is provided is used to form an open portion that exposes at least a part of the traveling portion.
- the traveling vehicle cannot run on its own on a work track without a power feeding unit, but a moving mechanism for moving the traveling vehicle on this work track is provided. There is. As a result, it is possible to form a work area that exposes the traveling portion that requires maintenance work, and to move the traveling vehicle in the work area.
- traveling tracks are connected to both ends of the working track, and the moving mechanism is a traveling vehicle between one traveling track and the other traveling track. May be moved.
- a work area for maintaining the traveling vehicle can be provided as a part of the traveling route.
- the traveling vehicle system may further include a traveling vehicle located on a work track provided with a processing device that executes work on at least a part of the traveling unit via an open portion.
- a part of the maintenance work for the traveling vehicle can be automated.
- the processing device may be a suction device that sucks the deposits adhering to at least a part of the traveling portion.
- the deposits can be collected without adhering the deposits to other parts.
- the moving mechanism includes a pair of arm portions for sandwiching the traveling vehicle from the front and rear in the traveling direction, and a position for sandwiching the traveling vehicle and a position for retracting the pair of arm portions from the traveling vehicle.
- a rotation drive unit that moves between the two arm units and a movement drive unit that moves the pair of arm units along the extending direction of the traveling track may be provided.
- the traveling vehicle can be moved with the traveling vehicle sandwiched from the front and rear in the traveling direction, so that the traveling vehicle coasts when the traveling vehicle is moved or stopped. Can be prevented.
- the moving mechanism includes a base plate and a moving plate provided on the base plate so as to be movable in the traveling direction, and a pair of arm portions includes a first arm portion. It has a second arm portion, the first arm portion is provided so as to be movable in the extending direction of the traveling track with respect to the moving plate, and the second arm portion is provided with respect to the moving plate. It may be provided so as to be immovable in the extending direction of.
- the traveling vehicle system having this configuration when moving the traveling vehicle, it is sufficient to move the moving plate provided with the first arm portion and the second arm portion, and therefore the distance between the first arm portion and the second arm portion. It is not necessary to control the first arm portion and the second arm synchronously in order to maintain the above. Therefore, the traveling vehicle can be moved with simple control as compared with the configuration in which the first arm portion and the second arm portion move independently.
- the traveling unit has traveling wheels that are braked when no power is supplied and traveling auxiliary wheels that rotate freely, and the working track is a traveling unit. It has a lower support portion that supports from below, and the lower support portion is formed so that the first portion facing the traveling auxiliary wheels is located above the second portion facing the traveling wheels in the vertical direction. You may be.
- the traveling wheels of the traveling vehicle having this configuration are configured so as not to easily rotate when the driving unit is not driven. Therefore, it is difficult to move the traveling vehicle in a state where the traveling wheel is in contact with the work track on which the feeding portion is not provided. In the traveling vehicle system having this configuration, only the freely rotating traveling auxiliary wheels come into contact with the work track, so that the traveling vehicle can be easily moved.
- FIG. 1 is a schematic plan view showing a traveling vehicle system according to an embodiment.
- FIG. 2 is a front schematic view of the ceiling traveling vehicle of FIG. 1 as viewed from the traveling direction.
- FIG. 3 is a perspective view showing a working track of one embodiment.
- FIG. 4 is a cross-sectional view showing the work track of FIG. 3 and the traveling portion of the traveling vehicle.
- FIG. 5 is a plan view showing the moving mechanism of one embodiment.
- FIG. 6 is a side view showing the moving mechanism of FIG.
- FIG. 7 is a cross-sectional view of the moving mechanism and the suction device arranged in the work area of one embodiment as viewed from the extending direction of the work track.
- 8 (a) to 8 (d) are explanatory views showing the operation of the moving mechanism of FIG. 9 (a) to 9 (d) are explanatory views showing the operation of the moving mechanism of FIG.
- the traveling vehicle system 1 is for transporting the article 10 between the mounting portions 9 and 9 by using the ceiling traveling vehicle 6 that can move along the traveling track 4. It is a system.
- the article 10 includes, for example, a FOUP (Front Opening Unified Pod) for storing a plurality of semiconductor wafers, a container for storing a glass substrate, a container such as a reticle pod, and general parts.
- the traveling vehicle system 1 includes a traveling track 4, a plurality of traveling vehicles 6, a plurality of mounting portions 9, a working track 41, a moving mechanism 60, and a suction device (processing device) 80.
- the traveling track 4 is laid near the ceiling, which is an overhead space for workers, for example.
- the traveling track 4 is suspended from the ceiling, for example.
- the traveling track 4 is a predetermined traveling path for traveling the traveling vehicle 6.
- the traveling track 4 is supported by the columns 40A and 40A.
- the traveling track 4 of the traveling vehicle system 1 introduces the traveling vehicle 6 into a working track 41 provided with a main line portion 4A that circulates in a predetermined area in one direction and a work area 160 for maintaining the traveling vehicle 6. It has a retracting portion 4B to be made to move. Also in the evacuation section 4B, the traveling vehicle 6 moves in a predetermined direction.
- the traveling track 4 has a tubular rail main body 40 composed of a pair of lower surface portions 40B, a pair of side surface portions 40C and 40C, and a top surface portion 40D, a feeding portion 40E, and a magnetic plate 40F. ..
- the rail main body 40 accommodates (includes) the traveling portion 50 of the traveling vehicle 6.
- the lower surface portion 40B extends in the traveling direction of the traveling vehicle 6 and constitutes the lower surface of the rail main body portion 40.
- the lower surface portion 40B is a plate-shaped member that rolls and travels the traveling roller 51 of the traveling vehicle 6.
- the side surface portion 40C extends in the traveling direction of the traveling vehicle 6 and constitutes the side surface of the rail main body portion 40.
- the top surface portion 40D extends in the traveling direction of the traveling vehicle 6 and constitutes the upper surface of the rail main body portion 40.
- the power supply unit 40E is a portion that supplies electric power to the power supply core 57 of the traveling vehicle 6 and transmits / receives signals to / from the power supply core 57.
- the power feeding portion 40E is fixed to each of the pair of side surface portions 40C and 40C and extends along the traveling direction.
- the power feeding unit 40E supplies power to the power feeding core 57 in a non-contact state.
- the magnetic plate 40F generates a magnetic force for running or stopping the LDM (Linear DC Motor) 59 of the traveling vehicle 6.
- the magnetic plate 40F is fixed to the top surface portion 40D and extends along the traveling direction.
- the traveling vehicle 6 travels on the traveling track 4 and conveys the article 10.
- the fact that the traveling vehicle 6 travels on the traveling track 4 means that the traveling roller 51 of the traveling vehicle 6 rolls on the lower surface portion 40B of the traveling track 4.
- the traveling vehicle 6 is configured so that the article 10 can be transferred.
- the traveling vehicle 6 is a ceiling traveling type unmanned traveling vehicle.
- the number of traveling vehicles 6 included in the traveling vehicle system 1 is not particularly limited, and is a plurality.
- the traveling vehicle 6 has a main body portion 7, a traveling unit 50, and a control unit 35.
- the main body portion 7 includes a main body frame 22, a lateral feed portion 24, a ⁇ drive 26, an elevating drive portion 28, an elevating base 30, and a cover 33.
- the main body frame 22 is connected to the traveling unit 50 and supports the lateral feed unit 24, the ⁇ drive 26, the elevating drive unit 28, the elevating table 30, and the cover 33.
- the lateral feed unit 24 collectively feeds the ⁇ drive 26, the elevating drive unit 28, and the elevating table 30 in a direction perpendicular to the traveling direction of the traveling track 4.
- the ⁇ drive 26 rotates at least one of the elevating drive unit 28 and the elevating table 30 within a predetermined angle range in a horizontal plane.
- the elevating drive unit 28 elevates and elevates the elevating table 30 by winding or feeding a lifting material such as a wire, a rope, and a belt.
- the lift 30 is provided with a chuck so that the article 10 can be freely gripped or released.
- a pair of covers 33 are provided before and after the traveling vehicle 6 in the traveling direction.
- the cover 33 causes claws and the like (not shown) to appear and disappear to prevent the article 10 from falling during transportation.
- the traveling unit 50 causes the traveling vehicle 6 to travel along the traveling track 4.
- the traveling unit 50 includes a traveling roller 51, a side roller 52, a branch roller 53, an auxiliary roller 54, an inclined roller 55, a power feeding core 57, and an LDM 59.
- the branch roller 53, the auxiliary roller 54, and the inclined roller 55 are not shown.
- the traveling roller 51 is a pair of rollers including an outer ring 51A as a traveling wheel and an inner ring 51B as a traveling auxiliary wheel.
- the traveling rollers 51 are arranged at both front and rear left and right ends of the traveling portion 50.
- the traveling roller 51 rolls on a pair of lower surface portions 40B and 40B (or a lower support portion 43 in FIG. 4 to be described later) of the traveling track 4.
- the side rollers 52 are arranged so as to sandwich each of the outer rings 51A of the traveling roller 51 in the front-rear direction.
- the side roller 52 is provided so as to be in contact with the side surface portion 40C (or the side support portion 45 of FIG. 4 to be described later) of the traveling track 4.
- the branch rollers 53 are arranged so as to sandwich each of the side rollers 52 in the vertical direction.
- the side roller 52 is provided so as to be in contact with a guide (not shown) arranged at a connecting portion or a branch portion of the traveling track 4.
- the auxiliary roller 54 is a group of three rollers provided before and after the traveling portion 50.
- the auxiliary roller 54 prevents the LDM 59, the feeding core 57, and the like from coming into contact with the magnetic plate 40F arranged on the upper surface of the traveling track 4 when the traveling unit 50 tilts back and forth during traveling due to acceleration / deceleration or the like. It is provided for this purpose.
- Inclined rollers 55 are provided at the four corners of the LDM 59.
- the tilt roller 55 is arranged so as to be tilted from the front-rear direction.
- the tilt roller 55 is provided to prevent the traveling portion 50 from tilting due to centrifugal force when traveling in the curved section.
- the power feeding core 57 is arranged in front of and behind the traveling portion 50 so as to sandwich the LDM 59 in the left-right direction. Non-contact power supply and non-contact transmission / reception of various signals are performed with the power supply unit 40E arranged on the traveling track 4. The power feeding core 57 exchanges signals with the control unit 35.
- the LDM 59 is provided before and after the traveling portion 50. The LDM 59 uses an electromagnet to generate a magnetic force for traveling or stopping with a magnetic plate 40F arranged on the upper surface of the traveling track 4.
- the mounting portion 9 is arranged along the traveling track 4 and is provided at a position where the article 10 can be delivered to and from the traveling vehicle 6.
- the mounting unit 9 includes a buffer and a delivery port.
- the buffer is a placement portion on which the article 10 is temporarily placed. When the article 10 cannot be transferred to the delivery port of the article 10 carried by the traveling vehicle 6 due to, for example, another article 10 being placed in the target delivery port, the buffer can be used as the article 10. It is a mounting part that is temporarily placed.
- the delivery port is a mounting port for delivering the article 10 to a semiconductor processing device (not shown) such as a cleaning device, a film forming device, a lithography device, an etching device, a heat treatment device, and a flattening device. It is a department.
- the processing device is not particularly limited, and may be various devices.
- the mounting portion 9 is arranged on the side of the traveling track 4.
- the traveling vehicle 6 delivers the article 10 to and from the mounting portion 9 by laterally feeding the elevating drive unit 28 and the like by the lateral feed unit 24 and slightly raising and lowering the elevating table 30.
- the mounting portion 9 may be arranged directly below the traveling track 4. In this case, the traveling vehicle 6 delivers the article 10 to and from the mounting portion 9 by raising and lowering the elevating table 30.
- the control unit 35 is an electronic control unit including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like.
- the control unit 35 controls various operations in the traveling vehicle 6. Specifically, the control unit 35 controls the traveling unit 50, the lateral feed unit 24, the ⁇ drive 26, the elevating drive unit 28, and the elevating table 30.
- the control unit 35 can be configured as software in which a program stored in the ROM is loaded into the RAM and executed by the CPU, for example.
- the control unit 35 may be configured as hardware such as an electronic circuit.
- the control unit 35 communicates with the controller 90 by using the power supply unit 40E (feeder line) or the like of the traveling track 4.
- the controller 90 is an electronic control unit including a CPU, ROM, RAM, and the like.
- the controller 90 can be configured as software in which a program stored in the ROM is loaded on the RAM and executed by the CPU.
- the controller 90 may be configured as hardware such as an electronic circuit.
- the controller 90 transmits a transport command for transporting the article 10 to the traveling vehicle 6.
- the work area 160 is provided in a part of the evacuation unit 4B, and is an area for performing maintenance such as the traveling roller 51 and the power feeding core 57 of the traveling unit 50 included in the traveling vehicle 6.
- the work area 160 is provided with a work track 41 (see FIG. 3), a moving mechanism 60 (see FIGS. 5 and 6), and a suction device (processing device) 80 (see FIG. 7).
- the work track 41 has a frame 42 arranged at both ends of the work track 41, a pair of lower support portions 43, 43, and a pair of side support portions 45.
- the frame 42 has a pair of side surface portions 42A and 42A and a top surface portion 42B.
- the pair of side surface portions 42A and 42A are plate-shaped members arranged so as to face each other in the left-right direction and extending in the vertical direction.
- the side surface portion 42A is fixed to the ceiling via a bracket (not shown) and a support (not shown).
- the top surface portion 42B is a plate-shaped member that connects a pair of side surface portions 42A and 42A at the upper ends of the pair of side surface portions 42A and 42A.
- the lower support portion 43 supports the traveling portion 50 from below. More specifically, the lower support portion 43 is a member that rolls and travels the inner ring 51B of the traveling roller 51 of the traveling vehicle 6.
- the lower support portion 43 is fixed to the lower end of the side surface portion 42A of the frame 42, and is hung on the pair of frames 42, 42 along the extending direction X.
- the lower support portion 43 is formed so that the first portion 43B facing the inner ring 51B is located above the second portion 43A facing the outer ring 51A in the vertical direction.
- the first portion 43B of the lower support portion 43 (that is, the rolling surface of the inner ring 51B) is at the same level as the upper surface of the lower surface portion 40B (see FIG. 2) of the traveling track 4 at the portion connected to the traveling track 4. It is connected (facially) to form a plane.
- the side support portion 45 is a member with which the side rollers 52 of the traveling vehicle 6 come into contact.
- the side support portion 45 is fixed to the side surface portion 42A of the frame 42 and is hung on the pair of frames 42, 42.
- the moving mechanism 60 moves the traveling vehicle 6 along the working track 41 so that the traveling vehicle 6 travels on the working track 41.
- the traveling vehicle 6 travels on the work track 41, it means that the traveling roller 51 of the traveling vehicle 6 rolls on the lower support portion 43 of the work track 41.
- Traveling tracks 4 and 4 are connected to both ends of the working track 41.
- the moving mechanism 60 moves the traveling vehicle 6 from one traveling track 4 to the other traveling track 4.
- the moving mechanism 60 includes a base plate 70, a moving plate 71, a pair of arm portions including a first arm portion 61 and a second arm portion 65, a first rotating drive unit (rotation drive unit) 62, and a second. It includes a rotation drive unit (rotation drive unit) 66, a first movement drive unit (movement drive unit) 64, and a second movement drive unit (movement drive unit) 68.
- the base plate 70 includes a moving plate 71, a first arm portion 61, a second arm portion 65, a first rotation drive unit 62, a second rotation drive unit 66, a first movement drive unit 64, and a second movement drive unit 68. It is a plate-shaped member that supports. The base plate 70 is suspended from the ceiling by a suspension member 75.
- the moving plate 71 supports the first arm portion 61, the second arm portion 65, the first rotation drive unit 62, the second rotation drive unit 66, the first movement drive unit 64, and the second movement drive unit 68. , A plate-shaped member.
- the moving plate 71 is provided so as to be movable with respect to the base plate 70 in the extending direction X of the traveling vehicle 6. More specifically, the moving plate 71 can be moved in the extending direction X of the traveling vehicle 6 with respect to the base plate 70 by the second moving drive unit 68 including the LM guide (Linear Motion Guide) 68A and the drive motor 68B. It is provided.
- the first arm portion 61 is arranged on the upstream side in the extending direction X of the traveling vehicle 6. That is, when the traveling vehicle 6 is moved, the first arm portion 61 comes into contact with the rear end (cover 33) of the traveling vehicle 6.
- the upstream side and the downstream side referred to here refer to a direction determined based on a preset moving direction of the traveling vehicle 6 in one direction.
- the first arm portion 61 is moved by the first rotation drive unit 62 between a position where the traveling vehicle 6 is sandwiched (contact position) and a position where the traveling vehicle 6 is retracted (evacuated position).
- the first arm portion 61 and the first rotation drive portion 62 are provided so as to be movable in the extending direction X of the traveling vehicle 6 with respect to the moving plate 71 by the first moving drive portion 64. More specifically, the first arm portion 61 and the first rotation drive portion 62 are extended in the extending direction of the traveling vehicle 6 with respect to the moving plate 71 by the first moving drive portion 64 including the LM guide 64A and the drive motor 64B. It is provided so that it can be moved to X.
- the second arm portion 65 is arranged on the downstream side in the extending direction X of the traveling vehicle 6. That is, when the traveling vehicle 6 is moved, the second arm portion 65 comes into contact with the front end of the traveling vehicle 6.
- the second arm portion 65 is moved by the second rotation drive portion 66 between a position where the traveling vehicle 6 is sandwiched and a position where the traveling vehicle 6 is retracted from the traveling vehicle 6.
- the second arm portion 65 and the second rotation drive portion 66 are provided so as not to be movable in the extending direction X with respect to the moving plate 71. ..
- the suction device 80 executes work on the traveling vehicle 6 located in the work area 160 (working track 41) via the opening portion 47 on at least a part of the traveling portion 50. More specifically, the suction device 80 sucks the deposits adhering to at least a part of the traveling portion 50 (for example, the feeding core 57).
- the suction device 80 is provided on a support plate 85 suspended from the ceiling.
- the suction device 80 is a vertical articulated robot 81 composed of six (six-axis) joints, and a suction unit 82 for sucking deposits is provided at the tip thereof.
- the first arm portion 61 When the traveling vehicle 6 does not exist on the work track 41 arranged in the work area 160, the first arm portion 61 is located at the retracted position and the second arm portion 65 comes into contact with each other as shown in FIG. 8A. It is located in a position. In such a state, when the traveling vehicle 6 enters the work track 41, the traveling vehicle 6 temporarily stops at a position where it comes into contact with the second arm portion 65, as shown in FIG. 8B. .. Once the traveling vehicle 6 is temporarily stopped at a position where it comes into contact with the second arm portion 65, the first rotation drive unit 62 rotates the first arm portion 61 to the contact position, and the first movement drive unit 64 is the first.
- the arm portion 61 and the first rotation drive portion 62 are advanced (moved to the downstream side in the traveling direction of the traveling vehicle 6). As a result, as shown in FIG. 8C, the traveling vehicle 6 is in a state of being sandwiched between the first arm portion 61 and the second arm portion 65.
- the second moving drive unit 68 advances the moving plate 71. That is, the second moving drive unit 68 maintains the distance between the first arm unit 61 and the second arm unit 65, and the first arm unit 61, the first rotation drive unit 62, and the second arm unit 65. , And the second rotation drive unit 66 are advanced.
- the traveling vehicle 6 is advanced in a state of being sandwiched between the first arm portion 61 and the second arm portion 65, and as shown in FIG. 9A, one traveling track is along the working track 41. It is moved from 4 to the other traveling track 4.
- the traveling vehicle 6 when the traveling vehicle 6 is moved to the other traveling track 4, the second rotation driving unit 66 rotates the second arm portion 65 to the retracted position as shown in FIG. 9B. Let me. After that, the traveling vehicle 6 starts advancing by the driving unit of its own traveling unit 50 by the electric power supplied to the power feeding core 57 of the traveling unit 50.
- the second rotation drive unit 66 rotates the second arm unit 65 to the contact position.
- the second moving drive unit 68 retracts the moving plate 71. That is, the second moving drive unit 68 maintains the distance between the first arm unit 61 and the second arm unit 65, and the first arm unit 61, the first rotation drive unit 62, and the second arm unit 65.
- the second rotation drive unit 66 is retracted.
- the first moving drive unit 64 retracts the first arm unit 61 and the first rotation drive unit 62.
- the first arm portion 61 and the second arm portion 65 return to the position where the next approaching traveling vehicle 6 is awaited.
- the first arm portion 61 is located at the retracted position and the second arm portion 65 is located at the contact position, and waits for the arrival of the next traveling vehicle 6. ..
- the traveling portion 50 of the traveling vehicle 6 utilizes the portion provided with the feeding portion.
- An open portion 47 is formed to expose at least a part of the above.
- the traveling section 50 that was accommodated in the rail main body 40 and could not be exposed can be exposed from the working track 41, so that the maintenance of the traveling section 50 can be easily performed.
- a moving mechanism 60 for moving the traveling vehicle 6 which cannot run by itself because the power feeding unit is not provided is provided on the work track 41. Therefore, it is possible to form a work area 160 that exposes the traveling portion 50 that requires maintenance work, and to move the traveling vehicle 6 in the working area 160.
- the traveling vehicle 6 is moved from one traveling track 4 to the other traveling track 4 along the working track 41.
- a moving mechanism 60 is provided. Therefore, a work area for maintaining the traveling vehicle 6 can be provided as a part of the traveling route.
- a suction device 80 as a device is provided.
- the moving mechanism 60 of the traveling vehicle system 1 of the above embodiment is a pair of arm portions that sandwich the traveling vehicle 6 from the front and rear in the traveling direction, that is, the first arm portion 61 and the second arm.
- the part 65 is provided. With such a configuration, it is possible to prevent the traveling vehicle 6 from coasting when the traveling vehicle 6 is moved or stopped.
- the first arm portion 61 and the second arm portion 65 are provided on the moving plate 71 provided so as to be movable in the extending direction X with respect to the base plate 70. ing. With such a configuration, it is not necessary to synchronously control the first arm portion 61 and the second arm portion 65 in order to maintain a distance from each other when the traveling vehicle 6 is moved. Therefore, the traveling vehicle 6 can be moved with simple control as compared with the configuration in which the first arm portion 61 and the second arm portion 65 move independently.
- the lower support portion 43 has a second portion 43B facing the inner ring 51B in the vertical direction and a second portion 43B facing the outer ring 51A. It is formed so as to be located above the portion 43A. Therefore, even if the traveling vehicle 6 has an outer ring 51A that is braked so as not to rotate when power is not supplied to the power supply core 57 (when no power is supplied), only the inner ring 51B that rotates freely without applying the brake works. Since the outer ring 51A, which is a traveling wheel, comes into contact with the track 41 and floats (does not come into contact with the lower support portion 43), the traveling vehicle 6 can be easily moved.
- the work track 41 of the above embodiment has been described with reference to an example composed of a lower support portion 43 and a side support portion 45, but the present invention is not limited to this embodiment.
- an opening having side surface portions covering the side surfaces such as a pair of side surface portions 40C and 40C provided on the traveling track 4 and exposing at least a part of the traveling portion 50 by using the portion provided with the feeding portion.
- the portion 47 may be formed.
- the work area 160 (that is, the work track 41) is arranged between the running track 4 and the running track 4, but the work area 160 is the running track 4 It may be placed at the end of the.
- the moving mechanism 60 of the above embodiment has been described with reference to an example in which the first arm portion 61 and the second arm portion 65 are provided on the moving plate 71 and integrally move in the extending direction X.
- the first arm portion 61 and the second arm portion 65 may be provided on the base plate 70 and may be provided independently of the base plate 70 so as to be movable in the extending direction X.
- the lower support portion 43 has been described with reference to an example in which the first portion 43B is formed so as to be located above the second portion 43A in the vertical direction. Not limited.
- the traveling wheel of the traveling portion 50 is formed as the inner ring 51B and the traveling auxiliary wheel is configured as the outer ring 51A, even if the second portion 43A is formed so as to be located above the first portion 43B. Good.
- traveling track 4 for suspending and traveling the traveling vehicle 6
- one aspect of the present invention is a traveling vehicle in which the traveling vehicle travels on a track arranged on the ground. It can also be applied to the system.
- Second arm unit 66 ... Second rotation drive unit (rotation drive unit), 68 ... Second movement drive unit (movement drive unit), 70 ... Base plate, 71 ... Movement plate, 80 ... Suction device (Processing device), 81 ... Vertical articulated robot, 82 ... Suction unit, 160 ... Work area.
Abstract
Description
Claims (7)
- 走行車の走行部を収容すると共に前記走行車の走行経路に沿って延在する本体部と、前記本体部の延在方向に沿って設けられており、前記走行部に電力を供給する給電部とを有する走行用軌道を、前記走行車が走行する走行車システムであって、
前記走行用軌道に連続するように設けられており、前記走行部の少なくとも一部を露出させる開放部を形成すると共に前記給電部が設けられていない作業用軌道と、
前記作業用軌道に沿って前記走行車を移動させる移動機構と、を備える、走行車システム。 - 前記作業用軌道の両端には、前記走行用軌道が接続されており、
前記移動機構は、一方の前記走行用軌道から他方の前記走行用軌道との間で前記走行車を移動させる、請求項1記載の走行車システム。 - 前記作業用軌道に位置する前記走行車に、前記開放部を介して、前記走行部の少なくとも一部に作業を実行する処理装置を更に備える、請求項1又は2記載の走行車システム。
- 前記処理装置は、前記走行部の少なくとも一部に付着した付着物を吸引する吸引装置である、請求項3記載の走行車システム。
- 前記移動機構は、
前記走行車を走行方向における前後から挟み込む一対のアーム部と、
前記一対のアーム部を、前記走行車を挟み込む位置と前記走行車から退避する位置との間で移動させる回動駆動部と、
前記一対のアーム部を、前記走行用軌道の延在方向に沿って移動させる移動駆動部と、を備える、請求項1~4の何れか一項記載の走行車システム。 - 前記移動機構は、
ベースプレートと、
前記ベースプレートに、前記走行方向に移動可能に設けられた移動プレートと、を有し、
前記一対のアーム部は、第一アーム部と第二アーム部とを有し、
前記第一アーム部は、前記移動プレートに対して前記走行用軌道の延在方向に移動可能に設けられており、
前記第二アーム部は、前記移動プレートに対して前記走行用軌道の延在方向に移動不能に設けられている、請求項5記載の走行車システム。 - 前記走行部は、無給電時に、ブレーキがかかる走行輪と、自由に回転する走行補助輪と、を有しており、
前記作業用軌道は、走行部を下方から支持する下方支持部を有しており、
前記下方支持部は、鉛直方向において、前記走行補助輪に対向する第一部分が、前記走行輪に対向する第二部分よりも上方に位置するように形成されている、請求項1~6の何れか一項記載の走行車システム。
Priority Applications (7)
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JP2021511204A JP7099622B2 (ja) | 2019-04-03 | 2020-02-18 | 走行車システム |
SG11202109765Q SG11202109765QA (en) | 2019-04-03 | 2020-02-18 | Traveling vehicle system |
US17/437,074 US20220161833A1 (en) | 2019-04-03 | 2020-02-18 | Traveling vehicle system |
KR1020217034605A KR20210140760A (ko) | 2019-04-03 | 2020-02-18 | 주행차 시스템 |
CN202080018504.XA CN113557186B (zh) | 2019-04-03 | 2020-02-18 | 行驶车系统 |
EP20784630.4A EP3950457B1 (en) | 2019-04-03 | 2020-02-18 | Traveling vehicle system |
IL286075A IL286075A (en) | 2019-04-03 | 2021-09-02 | passenger vehicle system |
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JP2019071206 | 2019-04-03 | ||
JP2019-071206 | 2019-04-03 |
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WO2020202856A1 true WO2020202856A1 (ja) | 2020-10-08 |
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PCT/JP2020/006371 WO2020202856A1 (ja) | 2019-04-03 | 2020-02-18 | 走行車システム |
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US (1) | US20220161833A1 (ja) |
EP (1) | EP3950457B1 (ja) |
JP (1) | JP7099622B2 (ja) |
KR (1) | KR20210140760A (ja) |
CN (1) | CN113557186B (ja) |
IL (1) | IL286075A (ja) |
SG (1) | SG11202109765QA (ja) |
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WO2024038671A1 (ja) * | 2022-08-18 | 2024-02-22 | 村田機械株式会社 | 走行車システム |
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- 2020-02-18 SG SG11202109765Q patent/SG11202109765QA/en unknown
- 2020-02-18 US US17/437,074 patent/US20220161833A1/en active Pending
- 2020-02-18 EP EP20784630.4A patent/EP3950457B1/en active Active
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- 2020-02-18 JP JP2021511204A patent/JP7099622B2/ja active Active
- 2020-02-18 KR KR1020217034605A patent/KR20210140760A/ko active IP Right Grant
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CN113557186B (zh) | 2024-02-13 |
JP7099622B2 (ja) | 2022-07-12 |
EP3950457A4 (en) | 2022-12-28 |
IL286075A (en) | 2021-10-31 |
JPWO2020202856A1 (ja) | 2021-12-23 |
EP3950457B1 (en) | 2024-04-10 |
EP3950457A1 (en) | 2022-02-09 |
SG11202109765QA (en) | 2021-10-28 |
US20220161833A1 (en) | 2022-05-26 |
TW202045389A (zh) | 2020-12-16 |
CN113557186A (zh) | 2021-10-26 |
KR20210140760A (ko) | 2021-11-23 |
TWI821552B (zh) | 2023-11-11 |
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