WO2020197684A1 - Gas distribution plate with high aspect ratio holes and a high hole density - Google Patents

Gas distribution plate with high aspect ratio holes and a high hole density Download PDF

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Publication number
WO2020197684A1
WO2020197684A1 PCT/US2020/020070 US2020020070W WO2020197684A1 WO 2020197684 A1 WO2020197684 A1 WO 2020197684A1 US 2020020070 W US2020020070 W US 2020020070W WO 2020197684 A1 WO2020197684 A1 WO 2020197684A1
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WO
WIPO (PCT)
Prior art keywords
holes
plate
diameter
gas distribution
interconnected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2020/020070
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English (en)
French (fr)
Inventor
Sumit Agarwal
Sanjeev Baluja
Chad Peterson
Michael R. Rice
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to SG11202108874Q priority Critical patent/SG11202108874QA/en
Priority to CN202080017675.0A priority patent/CN113508191B/zh
Priority to KR1020217033028A priority patent/KR102865277B1/ko
Priority to JP2021556710A priority patent/JP7781639B2/ja
Publication of WO2020197684A1 publication Critical patent/WO2020197684A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus

Definitions

  • Embodiments of the present disclosure generally relate to a showerhead for processing chambers, and, more particularly, to a showerhead having a high aspect ratio of holes and a high hole density for processing chambers.
  • the showerhead includes a gas distribution plate having a plurality of holes through which a processing gas may flow.
  • the number of holes and the aspect ratio of those holes may be limited.
  • the uniformity of the flow of the processing gas through the showerhead is limited.
  • a major factor in limiting the number of holes within a gas distribution plate is the process in which the holes are generated. For example, mechanical drilling of holes may place high levels of stress on the gas distribution plate potentially damaging the gas distribution plate and/or may create burrs within the gas distribution plate. Further, mechanical drilling is time prohibitive and may be process limited.
  • mechanical drilling utilizes a spindle coolant fed drills, which are available in the smallest diameter size of about 500um, limiting the smallest possible hole that may be drilled.
  • Other subtractive drilling methods include ultrasonic drilling or micro electrical discharge machining (EDM), which are both time prohibitive.
  • EDM micro electrical discharge machining
  • a further example of subtractive drilling includes laser drilling which is typically limited to about a 10:1 aspect ratio and which is also time prohibitive.
  • the conventional methods of generating holes limit the size of the holes and the aspect ratio of the holes, while increasing the manufacturing cost of the gas distribution plate. Further, the conventional methods of holes generation limit the hole density, which limits the uniformity of a process gas flowing through the gas distribution plate.
  • a gas distribution plate for a showerhead assembly includes a first plate and second plate.
  • the first plate may comprise a first plurality holes each having a diameter of at least about 100 urn.
  • the second plate may comprise a second plurality of holes each having a diameter of at least about 100 urn. Further, each of the first plurality of holes is aligned with a respective one of the second plurality of holes forming a plurality of interconnected holes. Each of the plurality of interconnected holes is isolated from each other of the plurality of interconnected holes.
  • a method for forming a showerhead comprises generating a first plurality of holes in a first plate and generating a second plurality of holes in a second plate.
  • Each of the first plurality of holes has a diameter of at least about 100 urn and each of the second plurality of holes has a diameter of about 100 urn.
  • the method further comprises aligning each of the first plurality of holes with a respective one of the second plurality of holes to generate a plurality of interconnected holes, and bonding the first plate to the second plate.
  • Each of the plurality of interconnected holes is isolated from each other of the plurality of interconnected holes.
  • a processing chamber comprises a showerhead assembly, a substrate support configured to support a substrate and a gas supply fluidly coupled with the showerhead assembly and configured to provide a process gas to the showerhead assembly.
  • the showerhead assembly comprises a gas distribution plate including a first plate and second plate.
  • the first plate comprises a first plurality holes each having a diameter of at least about 100 urn.
  • the second plate comprises a second plurality of holes each having a diameter of at least about 100 urn. Further, each of the first plurality of holes is aligned with a respective one of the second plurality of holes forming a plurality of interconnected holes, and each of the plurality of interconnected holes is isolated from each other of the plurality of interconnected holes.
  • Figures 1 and 2A are schematic cross-sectional view of a gas distribution plate, according to one or more embodiments.
  • Figure 2B is a schematic side view of a portion of a gas distribution plate, according to one or more embodiments.
  • Figure 3 is a schematic cross-sectional view of gas distribution plate, according to one or more embodiments.
  • Figures 4A, 4B, 4C, 4D, 4E, 4F, 4G, 4H, and 4I are schematic cross-sectional view of a gas distribution plate, according to one or more embodiments.
  • Figure 5 illustrates a flow chart of a method for forming a gas distribution plate, according to one or more embodiments.
  • Figure 6 is a schematic side view of a process chamber, according to one or more embodiments.
  • Embodiments for the present application include a gas distribution plate having high aspect ratio holes for a showerhead assembly.
  • the gas distribution plate includes a plurality of holes through which a processing gas may flow.
  • a processing gas may flow.
  • embodiments of the following disclosure describe a gas distribution plate having a high number of small holes and a method for generating such a gas distribution plate while maintaining sufficient thickness of the gas distribution plate for adequate strength.
  • Figure 1 illustrates a gas distribution plate 100, according to one or more embodiments.
  • the gas distribution plate 100 includes a plate 1 10i and a plate H O2.
  • the plate 1 10i may be connected to the plate H O2 forming the gas distribution plate 100.
  • the gas distribution plate 100 may be part of a showerhead assembly, e.g., the showerhead assembly 616 of Figure 6.
  • the plate 1 10i comprises holes 1 12i.
  • the plate 1 10i may be formed of aluminum, an aluminum alloy, molybdenum, a molybdenum alloy, nickel, a nickel alloy, or silicon, among others.
  • the number of holes 1 12i may be about 50,000 or greater. Further, the number of holes 1 12i may be about 100,000 or greater.
  • the diameter of each hole 1 12i may be at least about 100 urn. Further, the diameter of each hole 1 12i may be about 100 urn to about 600 urn. Alternatively, the diameter of each hole 1 12i may be less than about 100 urn or greater than about 600 urn. Further, each hole 1 12i may be of a common size (e.g., a common diameter). Alternatively, the diameter of one or more holes 1 12i differs from the diameter of another one of the holes
  • Each of the holes 1 12i may have a uniform diameter.
  • the aspect ratio of each of the holes 1 12i may be substantially constant such that the diameter at any point within each hole 1 12i is the same, or within a manufacturing tolerance, as the diameter at any other point within each hole 1 12i.
  • the size of each hole 1 12i at a first side of the plate 1 10i is the same, or within a manufacturing tolerance, as the size of each hole 1 12i at a second side of the plate 1 10i.
  • the diameter of a hole on a first side of the plate 1 10i may differ from the diameter of the hole on a second side of the plate 1 10i.
  • the thickness 1 16 of the plate 1 10i may be in a range of about 200 um to about 900 um. Alternatively, the thickness 1 16 of the plate 1 10i may be less than about 200 um or greater than about 900 um.
  • the plate H O2 includes holes 1 122.
  • the plate H O2 may be formed of aluminum, an aluminum alloy, molybdenum, a molybdenum alloy, nickel, a nickel alloy, or silicon, among others. Further, the plate H O2 may be formed of the same material as plate 1 10i or a different material from plate 1 10i.
  • the number of holes 1 122 may be about 50,000 or greater. Further, the number of holes 1 122 may be about 100,000 or greater. The number of holes 1 122 may be the same as the number of holes 1 12i.
  • the diameter of each hole 1 122 may be about 100 um to about 600 um. Alternatively, the diameter of each hole 1 122 may be less than about 100 um or greater than about 600 um.
  • each hole 1 122 may be of a common size (e.g., a common diameter). Alternatively, the diameter of one or more holes 1 122 differs from the diameter of another one of the holes 1 122. Additionally, the diameter of each of the holes 1 122 may be the same as the diameter of each of the holes 1 12i, or one or more holes 1 122 differs from the diameter of one or more of the holes 1 12i.
  • Each of the holes 1 122 may have a uniform diameter.
  • the aspect ratio of each of the holes 1 122 may be substantially constant such that the diameter at any point of within each hole 1 122 is the same, or within a manufacturing tolerance, as the diameter at any other point within each hole 1 1 22.
  • the size of each hole 1 122 at a first side of the plate H O2 is the same, or within a manufacturing tolerance, as the size of each hole 1 12i at a second side of the plate H O2.
  • the diameter of a hole on a first side of the plate 1 10i may differ from the diameter of the hole on a second side of the plate 1 10i .
  • the thickness 126 of the plate H O2 may be in a range of about 200 um to about 900 um. Alternatively, the thickness 126 of the plate 1 1 O2 may be less than about 200 um or greater than about 900 um.
  • the gas distribution plate 100 and the plates 1 10i, H O2 may have a circular shape.
  • the gas distribution plate 100 may have a circular shape with a diameter in a range of about 200 mm to about 350 mm.
  • the gas distribution plate 100 may have a diameter of less than about 200 mm or greater than about 350 mm.
  • the gas distribution plate 100 may have other shapes than a circular shape.
  • the gas distribution plate 100 may have an elliptical shape or a rectangular shape, among others.
  • the gas distribution plate 100 is shown as including 2 plates, e.g., plate 1 10i and plate H O2, the gas distribution plate 100 may include more than 2 plates.
  • the gas distribution plate 100 may include 1 1 ON plates, where N is greater than 2.
  • the total thickness of the gas distribution plate 100 may be about 25.4 mm.
  • the total thickness of the gas distribution plate 100 may be less than about 25.4 mm or greater than about 25.4 mm.
  • the plates 1 10i, H O2 may be joined together to form the gas distribution plate 100.
  • the plates 1 10i, H O2 may be joined together, forming the gas distribution plate 100 and a plurality of interconnected holes 212.
  • FIG. 2A illustrates the gas distribution plate 100, according to an embodiment.
  • the gas distribution plate 100 of Figure 2A includes a combined plate 210 that is formed by joining or coupling the plates 1 10i, H O2 together such that each of the holes 1 12i is aligned with a respective one of the holes 1 122. Aligning each of the holes 1 12i with respective ones the holes 1 1 22 forms a plurality of interconnected holes 212.
  • Each of the interconnected holes 212 is formed from one of the holes 1 12i and one of the fholes 1 122. Further, each of the interconnected holes 212 may be isolated from each other interconnected hole. For example, a processing gas may flow through each of the interconnected holes 212 but not between the interconnected holes 212. Further, each of the interconnected holes 212 may be same shape and/or size.
  • the combined plate 210 may be formed from a number of plates greater than 2.
  • the combined plate 210 may be formed from of at least N plates, where N is 3 or more.
  • the combined plate 210 may be formed from at least 10 plates. Further, the combined plate 210 may be formed from at least 100 plates.
  • FIG. 2B illustrates a portion of a combined plate 210, according to one or more embodiments.
  • the interconnected hole 212a has a diameter 214 and a height 216. Further, an aspect ratio of the interconnected hole 212 may be based on a ratio of the height 216 to the diameter 214.
  • the interconnected hole 212a may have an aspect ratio of at least about 50 to 1.
  • the interconnected hole 212a may have an aspect ratio of less than about 50 to 1 or greater than about 50 to 1.
  • each of interconnected holes 212 may have about the same aspect ratio.
  • the interconnected hole 212a may have an aspect ratio of about 25 to 1.
  • the diameter of each of the interconnected holes 212 may be substantially uniform. For example, at any point of an interconnected hole the diameter is the same, or within a manufacturing tolerance, of any other point of the interconnected hole. Stated another way, the aspect ratio of each interconnected holes is uniform or substantially similar (e.g., within a manufacturing tolerance) throughout the entirety of each interconnected hole. Further, the diameter of each interconnected hole 212 at a first side (e.g., surface) of the combined plate 210 is the same as the diameter of each interconnected hole 212 at a second side (e.g., surface) of the combined plate 210.
  • Figure 3 illustrates the gas distribution plate 100, according to one or more embodiments.
  • the gas distribution plate 100 of Figure 3 includes the combined plate 300 formed by joining the plate 1 10i, the plate H O2, and a plate 1 1 ON, where N is greater than 2. Further, the holes 1 12i of the plate 1 10i, the holes 1 122 of the plate H O2, and the holes 1 12N of the plate 1 1 ON are aligned to generate a plurality of interconnected holes.
  • Figure 4A illustrates plates 410i and 4102 of a gas distribution plate 400a, according to one or more embodiments. While two plates are illustrated in the embodiment of Figure 4A, alternatively, the gas distribution plate 400b may include three or more plates. Further, the plate 410i may be bonded to the plate 4102 forming the gas distribution plate 400a. Additionally, the gas distribution plate 400a may be part of a showerhead assembly, e.g., the showerhead assembly 616 of Figure 6.
  • the plate 410i includes holes 412i and may be formed similar to that of plate 1 10i and H O2. Further, the plate 4102 includes holes 4122 and may be formed similar to that of plate 1 10i and 1 102.
  • the diameter of each of the holes 4122 may differ from the diameter from the diameter of each of the holes 412i.
  • the diameter of the holes 412i along surface 424 of the plate 410i is larger than the diameter of the holes 4122 along the surface 426 of the plate 4102.
  • the diameter of the holes 4122 along the surface 426 may be the same or may differ from the diameter of the holes 4122 along the surface 428.
  • the diameter of the holes 4122 along the surface 426 may be larger or smaller than the diameter of the holes 4122 along the surface 428.
  • Utilizing plates having holes with different diameters may aid in the alignment of the plates before bonding to the plates together. For example, utilizing holes of different diameter allow for slight offsets in alignment of the holes while maintaining a similar cross section area for the gas flow as compared to utilizing holes of a common diameter which are fully aligned with each other.
  • Figure 4B illustrates a portion of gas distribution plate 400a, according to one or more embodiments.
  • Figure 4B illustrates an interconnected hole 440a of gas distribution plate 400a formed after bonding the plate 410i with the plate 4102.
  • the interconnected hole 440a is formed by joining the plate 410i with the plate 4102, and comprises one of holes 412i and one of holes 4122.
  • the diameter of interconnected hole 440 is non-uniform (i.e. , a non-uniform diameter).
  • the diameter of the interconnected hole 440a along the surface 422 differs from the diameter of the interconnected hole 440 along the side 428.
  • Figure 4C illustrates plates 4103 and 4104 of a gas distribution plate 400b, according to one or more embodiments. While two plates are illustrated in the embodiment of Figure 4C, alternatively, the gas distribution plate 400b may include three or more plates. Further, the plate 4103 may be bonded to the plate 4104 forming the gas distribution plate 400b. Additionally, the gas distribution plate 400b may be part of a showerhead assembly, e.g., the showerhead assembly 616 of Figure 6.
  • the plate 4103 includes holes 4123 and may be formed similar to that of plate 1 10i and 1 102.
  • the plate 4104 includes holes 4124 and may be formed similar to that of plate 1 10i and 1 1 O2.
  • the diameter of each of the holes 4123 may differ from the diameter from the diameter of each of the holes 4124.
  • the holes 4123 and/or the holes 4124 may include a tapered region.
  • the holes 4124 include a tapered region 434.
  • the diameter of the holes 4124 is non- uniform.
  • the diameter of the holes 4124 along the surface 426 is larger than the diameter of the holes 4124 along surface 428.
  • the diameter of the holes 4123 may be non-uniform.
  • the diameter of the holes 4123 along one of the surfaces 422 and 424 may differ from the diameter of the holes 4123 along the other one of the surfaces 422 and 424.
  • the holes 4123 may include a tapered region.
  • Figure 4D illustrates a portion of gas distribution plate 400b, according to one or more embodiments.
  • Figure 4D illustrates an interconnected hole 440b of gas distribution plate 400b formed after bonding the plate 4103 with the plate 4104.
  • the interconnected hole 440a is formed by joining the plate 4103 with the plate 4104, and comprises one of holes 4123 and one of holes 4124.
  • the diameter of interconnected hole 440b is non-uniform, differing between surface 422 and surface 428, and the interconnected hole 440b includes a tapered region 434.
  • the diameter of the interconnected hole 440b along surface 422 may be larger or smaller than the diameter of the interconnected hole 440b along surface 428.
  • Figure 4E illustrates an interconnected hole 440c, according to one or more embodiments.
  • the interconnected hole 440c may be formed from holes in two or more plates as illustrated in the embodiments of Figures 1 , 3, 4A and/or 4C and described in the corresponding description.
  • the interconnected hole 440c includes a tapered region 444 disposed along the surface 422. Further, the diameter of the interconnected hole 440c is non-uniform, varying between the surface 422 and 428.
  • Figure 4F illustrates an interconnected hole 440d, according to one or more embodiments.
  • the interconnected hole 440d may be formed from holes in two or more plates as illustrated in the embodiments of Figures 1 , 3, 4A and/or 4C and described in the corresponding description.
  • the interconnected hole 440d includes a tapered region 454 disposed along the surface 422 and tapered region 456 disposed between the surface 422 and 428. Further, the diameter of the interconnected hole 440d is non-uniform, varying between the surface 422 and 428.
  • Figure 4G illustrates an interconnected hole 440e, according to one or more embodiments.
  • the interconnected hole 440e may be formed from holes in two or more plates as illustrated in the embodiments of Figures 1 , 3, 4A and/or 4C and described in the corresponding description.
  • the interconnected hole 440e includes a tapered regions 464 disposed along the surface 422 and tapered region 466 disposed along the surface 428.
  • the diameter of the interconnected hole 440e is non-uniform, varying between the surface 422 and 428.
  • the diameter of the interconnected hole 440e along the surface 422 may be similar to (e.g., within a manufacturing tolerance) the diameter of the interconnected hole 440e along surface 428.
  • the diameter of the interconnected hole 440e along the surface 422 differs from the diameter of the interconnected hole 440e along surface 428.
  • the diameter of the interconnected hole 440e along the surface 422 is greater than or less than the diameter of the interconnected hole 440e along surface 428.
  • Figure 4H illustrates an interconnected hole 440f, according to one or more embodiments.
  • the interconnected hole 440f may be formed from holes in two or more plates as illustrated in the embodiments of Figures 1 , 3, 4A and/or 4C and described in the corresponding description.
  • the interconnected hole 440f includes a tapered region 474 disposed along the surface 428. Further, the diameter of the interconnected hole 440f is non-uniform, varying between the surface 422 and 428.
  • Figure 4I illustrates an interconnected hole 440e, according to one or more embodiments.
  • the interconnected hole 440g may be formed from holes in two or more plates as illustrated in the embodiments of Figures 1 , 3, 4A and/or 4C and described in the corresponding description.
  • the interconnected hole 440g includes a tapered region 484 disposed along the surface 422 and tapered region 486 disposed along the surface 428.
  • the diameter of the interconnected hole 440g is non-uniform, varying between the surface 422 and 428.
  • the diameter of the interconnected hole 440g along the surface 422 is greater than the diameter of the interconnected hole 440g along surface 428.
  • the diameter of the interconnected hole 440g along the surface 428 may be greater than the diameter of the interconnected hole 440g along surface 422.
  • FIG. 5 illustrates a flowchart of a method for bonding plates to generate a gas distribution plate 100, according to one or more embodiments.
  • a plurality of holes is generated in a first plate.
  • the holes 1 12i are generated in plate 110i.
  • the holes 1 12i may be generated through a process of mechanical drilling, ultrasonic drilling, laser drilling, electro-discharge machining, or any other subtractive fabrication method.
  • a plurality of holes is generated in a second plate.
  • the holes 1 122 are generated in the plate H O2.
  • the holes 1 12i may be generated through a process of mechanical drilling, ultrasonic drilling, laser drilling, electro-discharge machining, or any other subtractive fabrication method. Further, a similar method may be used to generate holes in any number of plates.
  • the plates are prepared for bonding.
  • the surfaces of plates 1 10 and 410 may be prepared for bonding to ensure that the surfaces are flat and clean to facilitate proper bonding of the plates. Preparing the surfaces for bonding may include one or more of polishing the surfaces, lapping the surfaces, cleaning the surfaces, and etching the surfaces, among others.
  • each of the plurality holes of the first plate is aligned with a respective one of the plurality of holes of the second plate.
  • each of the holes 1 12i may be aligned with a respective one of the holes 1 1 22 forming a plurality of interconnected holes 212.
  • the holes from any two plates may be aligned to form a plurality interconnected holes.
  • Each of the interconnected holes may be formed from a hole from each of the plates utilized to form the gas distribution plate 100.
  • the first plate is bonded with the second plate.
  • the plates may be together using a brazing method (i.e. , brazing technique), or a diffusion bonding method (i.e., a diffusion bonding technique), among others.
  • the holes are aligned, the plates are stacked and a braze, or filler, sheet may be disposed and sandwiched between the plates.
  • the plate 1 10i may be stacked with plate 1 1 02 and each of the holes 1 12i may be aligned with a respective one of the holes 1 1 22.
  • the portions of the braze sheets that may be overlapping a hole in the corresponding plate may be removed.
  • the brazing process may be completed. For example, temperature at or above the melting temperature of the braze sheets may be applied to the gas distribution plate 100, to melt the braze sheets and join the plate 1 10i with the plate 1 1 O2.
  • each plate of the gas distribution plate 100 may be stacked and the holes of each plate may be aligned.
  • the plate 1 10i may be stacked with plate H O2 and each of the holes 112i may be aligned with a respective one of the holes 1 122.
  • the diffusing bonding process may be completed.
  • aligning the holes may include orienting the plates such that the rolling directions of the raw material of each of the plates are aligned. Orienting the rolling directions of the plates may ensure that any mismatches in material properties based on the direction of the raw material for plates does not impact the bonding and performance of the gas distribution plate.
  • the rolling direction may be parallel to the structural lines on the surface of the plates created during as a result of the manufacture process utilized to crate the plates.
  • the gas distribution plate formed by bonding the first and second plates is cleaned.
  • the gas distribution plate may be cleaned using any suitable chemical cleaning process.
  • the gas distribution plate 100, 400 may be coated with an oxide, forming a coating on the gas distribution plate, using an atomic layer deposition (ALD) method, or any other process that is able to deposit a layer on the gas distribution plate 100, 400 such that a processing gas may still pass through the interconnected holes.
  • the gas distribution plate 100, 400 may be coated within an oxide, such as Aluminum oxide or Yttrium oxide, among others.
  • FIG. 6 illustrates a schematic sectional view of a processing chamber 600 according to one embodiment.
  • the processing chamber 600 may be used to process one or more substrates 640 therein, including the processes of depositing a material on the substrate 640, heating of the substrate 640, etching of the substrate 640, or combinations thereof.
  • the processing chamber 600 may be an atomic layer deposition (ALD) chamber.
  • the processing chamber 600 may be a chemical vapor deposition (CVD) processing chamber, a plasma-enhanced chemical vapor deposition (PECVD) processing chamber, or a physical vapor deposition (PVD) processing chamber, among others.
  • CVD chemical vapor deposition
  • PECVD plasma-enhanced chemical vapor deposition
  • PVD physical vapor deposition
  • the processing chamber 600 has an internal region 61 1 that includes a substrate support 642 disposed therein to support a substrate 640.
  • the substrate support 642 includes a heating element 618 and an element that retains the substrate 640 on a top surface 544 of the substrate support 642, such as an electrostatic chuck, a vacuum chuck, a substrate retaining clamp, or the like.
  • the substrate support 642 may be coupled to and movably disposed in the internal region 61 1 by a stem 610 connected to a lift system that moves the substrate support 642 between an elevated processing position and a lowered position that facilitates transfer of the substrate 640 to and from the processing chamber 600 through an opening 624.
  • the processing chamber 600 may include a gas supply source 626.
  • the gas supply source 626 may include a mass flow control (MFC) device, disposed between a gas source and the internal region 61 1 to control a flow rate of process gas or gasses from the gas source to the gas distribution plate 100 of a showerhead assembly 616 used for distributing the process gasses across the internal region 61 1.
  • the process gas may flow through gas inlet 614 and through the holes of the gas distribution plate 100.
  • the showerhead assembly 616 is coupled to the processing chamber 600.
  • the showerhead assembly 616 may be coupled to the processing chamber 600 to position the gas distribution plate 100 above the substrate 640.
  • the gas distribution plate 100 may be centered over the substrate 640.
  • the gas distribution plate 100 may be larger than the substrate 640 such that the edges of the gas distribution plate 100 extend beyond the edges of the substrate 340.
  • the showerhead assembly 616 may be connected to a RF power source for generating a plasma in the internal region 61 1 from a process gasses.
  • a deposition process may be utilized to process the substrate 640 at a processing pressure to deposit or grow a film onto the substrate 640.
  • the stem 610 is configured to move the substrate support 642 to an elevated processing position to process the substrate 640. Further, a vacuum pump 657 may be coupled to the internal region 61 1 and control the pressure within the internal region 61 1.
  • a process gas such as a deposition gas or cleaning chemistry
  • a gas supply source 627 into the internal region 61 1 through the gas inlet 613 of the processing chamber 600. Further, the process gas may exit the process gas region through the gas outlet 636. Removal of the process gas, including cleaning chemistry, through the gas outlet 636 is facilitated by a vacuum pump 657 coupled to the gas outlet 636.
  • the above-described processing chamber 600 can be controlled by a processor based system controller, such as controller 630.
  • the controller 630 is configured to control flow of various precursor gases, process gases, and purge gases, during different operations of a substrate processing sequence.
  • the controller 630 is configured to control feeding of gases, lamp operation, or other process parameters, among other controller operations.
  • the controller 630 is generally used to facilitate the control and automation of the components within the processing chamber 600.
  • the controller 630 can be, for example, a computer, a programmable logic controller, or an embedded controller.
  • the controller 630 typically includes a central processing unit (CPU) 632 memory 634, and support circuits for inputs and outputs (I/O).
  • the CPU 632 may be one of any form of computer processors that are used in industrial settings for controlling various system functions, substrate movement, chamber processes, and control support hardware (e.g., sensors, motors, heaters, etc.), and monitor the processes performed in the processing chamber 600.
  • the memory 634 is connected to the CPU 632, and may be one or more of a readily available non-volatile memory, such as random access memory (RAM), flash memory, read only memory (ROM), floppy disk, hard disk, or any other form of digital storage, local or remote.
  • Software instructions and data can be coded and stored within the memory for instructing the CPU 632.
  • the support circuits are also connected to the CPU 632 for supporting the processor in a conventional manner.
  • the support circuits may include cache, power supplies, clock circuits, input/output circuitry, subsystems, and the like.
  • a program e.g., software routine or computer instructions
  • a program e.g., software routine or computer instructions
  • the program is software readable by the processor within the controller 630 that includes code to perform tasks relating to monitoring, execution and control of the delivery and control of the process variables utilized in one or more the processes performed within the processing chamber 600, and the movement, support, and/or positioning of the substrate 640 and other components within the processing chamber 600 along with the various process tasks and various sequences being controlled the by controller 630.
  • a gas distribution plate may be formed to increase in the uniformity of the process gas applied to a substrate during processing of the substrate.
  • the gas distribution plate may be formed by joining two or more plates together.
  • Each of the plates may have a plurality of holes formed therein, and each of the holes in a first one of the plates is aligned with a respective hole in a second one of the plates.
  • the aligned holes form a plurality of interconnected holes.
  • the holes may have a higher aspect ratio than if the holes were formed in a thicker gas distribution plate formed from a single plate.
  • the number of holes that may be formed in each plate may be greater than the total number of holes that may be formed in a gas distribution plate formed from a single plate.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
PCT/US2020/020070 2019-03-27 2020-02-27 Gas distribution plate with high aspect ratio holes and a high hole density Ceased WO2020197684A1 (en)

Priority Applications (4)

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SG11202108874Q SG11202108874QA (en) 2019-03-27 2020-02-27 Gas distribution plate with high aspect ratio holes and a high hole density
CN202080017675.0A CN113508191B (zh) 2019-03-27 2020-02-27 具有高长宽比孔洞及高孔洞密度的气体分布板
KR1020217033028A KR102865277B1 (ko) 2019-03-27 2020-02-27 높은 종횡비 홀들 및 높은 홀 밀도를 갖는 가스 분배 플레이트
JP2021556710A JP7781639B2 (ja) 2019-03-27 2020-02-27 高アスペクト比の孔及び高い孔密度を有するガス分配プレート

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US201962824369P 2019-03-27 2019-03-27
US62/824,369 2019-03-27

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KR102865277B1 (ko) 2025-09-25
TWI832986B (zh) 2024-02-21
CN113508191B (zh) 2024-06-11
TW202039088A (zh) 2020-11-01
JP7781639B2 (ja) 2025-12-08
KR20210133302A (ko) 2021-11-05
US20220380898A1 (en) 2022-12-01
CN113508191A (zh) 2021-10-15
SG11202108874QA (en) 2021-10-28
JP2022527694A (ja) 2022-06-03
US20200308703A1 (en) 2020-10-01

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