WO2020175863A1 - Module de table et appareil pour échanger automatiquement un kit de conversion - Google Patents

Module de table et appareil pour échanger automatiquement un kit de conversion Download PDF

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Publication number
WO2020175863A1
WO2020175863A1 PCT/KR2020/002574 KR2020002574W WO2020175863A1 WO 2020175863 A1 WO2020175863 A1 WO 2020175863A1 KR 2020002574 W KR2020002574 W KR 2020002574W WO 2020175863 A1 WO2020175863 A1 WO 2020175863A1
Authority
WO
WIPO (PCT)
Prior art keywords
conversion kit
picker
negative pressure
module
plate structure
Prior art date
Application number
PCT/KR2020/002574
Other languages
English (en)
Korean (ko)
Inventor
한복우
조윤기
고상남
Original Assignee
제너셈(주)
에스케이하이닉스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020190022387A external-priority patent/KR102057331B1/ko
Priority claimed from KR1020190022654A external-priority patent/KR102095728B1/ko
Priority claimed from KR1020190111576A external-priority patent/KR102137996B1/ko
Priority claimed from KR1020190111578A external-priority patent/KR102167500B1/ko
Priority claimed from KR1020190111581A external-priority patent/KR102138003B1/ko
Application filed by 제너셈(주), 에스케이하이닉스 주식회사 filed Critical 제너셈(주)
Priority to SG11202107576RA priority Critical patent/SG11202107576RA/en
Priority to CN202080010565.1A priority patent/CN113330545A/zh
Publication of WO2020175863A1 publication Critical patent/WO2020175863A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

Definitions

  • This application relates to the table module and conversion kit automatic exchange device.
  • the package manufacturing system is a cutting process in which a plurality of packages are formed into individual packages, a washing process for washing the package cut in the cutting process, a drying process for drying the package washed in the washing process, and the drying process.
  • a semiconductor package can be manufactured by sequentially performing the package inspection process, which inspects the package for defects, and the off-load process, which classifies the package that passed the defect inspection and the package that did not pass according to the inspection result.
  • Such a package manufacturing system generally includes a table module on which a strip or package is seated, but it was necessary to replace the top of the table module according to the individual size of the package, which may differ according to the manufacturer or product characteristics.
  • This application is to solve the problems of the prior art described above, and aims to provide a conversion kit automatic exchange system, a table module and a conversion kit automatic exchange device in which the upper plate of the table module can be automatically replaced.
  • the conversion kit automatic exchange system includes a package cutting device for cutting the strip into a package; a drying device for drying the package; and a package seating system.
  • Conversion kits that adsorb the package can be placed or removed.
  • the picker device includes: a first picker module for transferring a strip to the package cutting device; a second picker module for transferring a package from the package cutting device to the drying device; And a third picker module for transferring a package from the drying device to the vision table, wherein each of the first to third picker modules includes a conversion pre-arranged with respect to the package cutting device, the drying device, or the vision table.
  • the kit can be removed or a new conversion kit can be deployed.
  • the second picker module transfers the conversion kit between the package cutting device and the drying device
  • the third picker module is the drying device and Conversion kits can be transferred between the above vision tables.
  • the conversion kit automatic exchange system further comprising a loading unloading device in which the conversion kit is prepared, and the first picker module receives the conversion kit from the loading and unloading device. It is provided and can be placed on the package cutting device, and the second picker module picks up the conversion kit placed on the package cutting device and can be placed on the drying device, and the third picker module is The conversion kit placed on the drying device can be picked up and placed on the vision table.
  • the third picker module adds a conversion kit placed to the dry device after placing the conversion kit on the vision table. After picking up, the second picker module may place a conversion kit on the drying device, and then additionally pick up the conversion kit placed on the package cutting device.
  • the first picker module picks up the conversion kit placed on the package cutting device and transfers it to the loading unloading device
  • the second picker module can pick up the conversion kit placed on the drying device and place it on the package cutting device
  • the third picker module picks up the conversion kit placed on the vision table.
  • the vision table, the drying device, the conversion kit of the third picker module and the first picker module, and the conversion kit of the package cutting device are They can be of different types.
  • each of the package cutting device, the drying device, the vision table and the picker device absorbs a conversion kit and the conversion kit, and a negative pressure generator
  • a negative pressure transmission plate structure that communicates a plurality of vacuum holes of the conversion kit 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 can be included.
  • the conversion kit automatic exchange system when vacuum adsorption of the negative pressure transmission plate to the conversion kit, the conversion kit is fixed to the negative pressure transmission plate, and the negative pressure transmission plate When the vacuum adsorption is released for the conversion kit, the conversion kit is removable from the negative pressure transmission plate.
  • the sound pressure transmission plate structure is, a portion facing the portion in which the plurality of vacuum holes of the conversion kit is formed is recessed, and the sound pressure generator A product depression that transmits the negative pressure action and the sound pressure release to the vacuum hole; And a portion facing at least a portion of the edge portion of the conversion kit is depressed to allow vacuum adsorption to the conversion kit.It may include a kit depression portion.
  • the kit recess may have a long-hole-shaped cross-section extending in a longitudinal direction of the table plate structure.
  • the negative pressure transmission plate structure includes a protruding protrusion, and a hole in which at least a part of the protrusion is inserted may be formed in the conversion kit.
  • the table module according to the second aspect of the present application has a plurality of vacuum holes in the ⁇ axis direction.
  • the conversion kit is arranged on the other surface in the ⁇ axial direction, including a negative pressure transmission plate structure for a table that communicates the sound pressure generator and the vacuum hole,
  • the negative pressure transmission plate structure for the table is the conversion When the kit can be vacuum-adsorbed, and when vacuum-adsorbed to the conversion kit of the negative pressure transmission plate structure structure for the table, the conversion kit is fixed to the negative pressure transmission plate structure for the table, and the conversion of the negative pressure transmission plate structure for the table When the vacuum adsorption is released for the kit, the conversion kit is removable from the negative pressure transmission plate structure for the table.
  • the negative pressure transmission plate structure for the table has a portion facing the portion in which the plurality of vacuum holes of the conversion kit is formed is recessed to one side in the axial direction, A table product depression that transmits the sound pressure action and sound pressure release by the sound pressure generator to the vacuum hole; and at least a portion of the edge of the conversion kit that faces one side in the ⁇ axial direction to vacuum for the conversion kit. It may include a recessed portion of the kit for the table through which adsorption takes place.
  • the kit recess may have a long-hole-shaped cross-section extending in the longitudinal direction of the conversion kit.
  • the sound pressure transmission lengthening structure for the table includes a protrusion that turns into a bamboo rudder, and the conversion 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • a hole may be formed into which at least some of the upper protrusions are inserted.
  • the conversion kit automatic exchange device includes the table module according to the first aspect of the present application; and the conversion kit pre-arranged with respect to the negative pressure transmission plate structure for the table. From struct
  • It includes a picker module that can be separated or place a new conversion kit on the negative pressure transmission plate structure for the table.
  • the picker module includes a negative pressure transmission plate structure for a picker on which the conversion kit is mounted on one side in the 7-axis direction, but the negative pressure transmission for the picker
  • the plate structure is capable of vacuum adsorption of the conversion kit.
  • the negative pressure transmission plate structure for the picker the portion facing the portion in which the plurality of vacuum holes of the conversion kit are formed is recessed toward the other side in the axial direction, A product depression for a picker that transmits the sound pressure action and sound pressure release by the sound pressure generator to the vacuum hole; And the part facing the edge of the conversion kit is recessed to the other side in the axial direction, so that the picker kit is recessed for adsorption to the conversion kit. May contain wealth.
  • the picker kit depression portion may have a long-hole-shaped cross-section extending in the longitudinal direction of the conversion kit.
  • the picker sound pressure transmission plate structure includes a protrusion protruding in one axial direction
  • the table sound pressure transmission plate structure includes at least at least of the projections. A hole into which a part is inserted may be formed.
  • the conversion kit further includes a pair of protrusions protruding outward from each side of the conversion kit to extend in the length direction of the conversion kit.
  • the picker sound pressure transmission plate structure may further include a pair of fastening portions protruding from each side in the ⁇ axial direction from each of the two sides of the picker sound pressure transmission plate structure to fit the pair of projections.
  • the picker module further includes a conversion kit, but when the conversion kit of the picker module is not mounted on the negative pressure transmission plate structure for the picker , It is possible to separate the previously arranged conversion kit for the negative pressure transmission plate structure for the table, or to place a new conversion kit.
  • the conversion kit automatic exchange system includes a package cutting device for cutting a strip into a package; a drying device for drying the package; a vision table on which the package is seated; and the package cutting device and the drying device.
  • the package cutting device, the drying device, and the picker unit for transferring the package between the vision table are included, the package cutting device, the drying device ,
  • the package cutting device, the drying device includes an adsorption module for adsorbing a package, and the adsorption module 7: includes a clamp capable of gripping a conversion kit having a plurality of vacuum holes formed in the axial direction, and the picker unit The conversion kit may be disposed or removed on the cutting device, the drying device, the vision table, and the picker.
  • the adsorption module The conversion kit; ⁇ The conversion kit is arranged on one side in the axial direction, and a negative pressure transmission plate structure that communicates the sound pressure generator and the vacuum hole of the conversion kit; is provided on one side of the negative pressure transmission plate structure in the ⁇ axial direction, in a basic state
  • the clamp capable of gripping the conversion kit; And is protruding on one surface of the negative pressure transmission plate structure in the X-axis direction, the suction module and
  • It may include a protrusion that guides the neighboring clamp of the neighboring suction module neighboring in the axial direction to face it in an outward movement state.
  • the picker unit may be provided such that its suction module faces the package cutting device, the drying device, and each suction module of the vision table.
  • the clamp is, at least part of the negative pressure transmission plate structure ⁇ axis direction
  • a clamp unit protruding from one side and having a protrusion protruding inward toward a portion in which the conversion kit is disposed; a hinge unit in which the clamp unit is rotatable about the longitudinal direction of the negative pressure transmission plate structure; And the inner side It may include an elastic member that provides an external force to the clamp unit.
  • the picker unit A first picker device for transferring the conversion kit between the loading unloading device and the package cutting device in which the conversion kit is prepared; A second picker device for transferring the conversion kit between the package cutting device and the drying device; And a third picker device for transferring the conversion kit between the drying device and the vision table, wherein the first to third pickers
  • Each of the devices may remove a conversion kit previously arranged for the package cutting device, the drying device, or the vision table, or may arrange a new conversion kit.
  • the clamp of the first picker device may further include a cylinder for rotating the hinge unit so that the clamp unit rotates.
  • the inner part of the protrusion of the clamp unit unit of the clamp of the second and third picker devices is provided to allow entry into the inner side of the protrusion of the neighboring suction module.
  • Guide groove to guide 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 can be formed.
  • the adsorption module includes: a conversion kit in which a plurality of vacuum holes are formed in the ⁇ axial direction; A negative pressure transmission plate structure in which the conversion kit is disposed on one surface in the axial direction, and communicates the sound pressure generator and the vacuum hole of the conversion kit; At least a part is provided to protrude toward one side of the negative pressure transmission plate structure, the clamp capable of gripping the conversion kit in the basic state; And at least a part is protruding to one side of the seven axis of the negative pressure transmission plate structure, and the adsorption module It may include a protrusion that guides the neighboring clamp of the neighboring suction module adjacent to the ⁇ axis to face it in an outward moving state.
  • the clamp is, at least a part, protruding from one surface in the 7-axis direction of the sound pressure transmission plate structure, and protruding inward toward the portion in which the conversion kit is placed.
  • a recessed portion is formed on the outer surface of the conversion kit in which a projection of the clamp unit can be engaged, and the clamp unit is, in the basic state, of the conversion kit.
  • the depression may be formed so that the gripping can take place.
  • Guide grooves to guide can be formed.
  • the clamp unit is formed at a position corresponding to the stone line of the neighboring top mounting module, and the proximity of the sawing module and the neighboring adsorption module in the ⁇ -axis direction
  • the protrusion of the neighboring suction module enters the sagittal guide groove and is in an outward moving state by receiving an external force from the outside, and the elastic member may be compressed by an external force to the outside.
  • the protrusion may have a wedge shape.
  • the clamp unit is capable of releasing the gripping of the conversion kit when in the outward moving state.
  • the negative pressure transmission plate In the adsorption module according to an embodiment of the present application, the negative pressure transmission plate
  • the structure is capable of vacuum adsorption of the conversion kit.
  • the picker device includes an adsorption module according to the fifth aspect of the present application.
  • the table unit according to the seventh aspect of the present application includes an adsorption module according to the fifth aspect of the present application.
  • the adsorption module according to the eighth aspect of the present application has a plurality of vacuum holes formed in the ⁇ axis direction.
  • the clamp is protruding from one surface in the X-axis direction of the negative pressure transmission plate structure, and a protrusion protruding inward toward the portion where the conversion kit is disposed is formed.
  • a clamp unit that is; A hinge unit that enables the clamp unit to rotate in the longitudinal direction of the negative pressure transmission plate structure; And an elastic member that provides an external force to the clamp unit to the inside, wherein the cylinder is the clamp unit this
  • the hinge unit can be rotated to rotate.
  • a recessed portion is formed on the outer surface of the conversion kit in which the projection of the clamp unit can be engaged, and the clamp unit is, in the basic state, of the conversion kit. It is possible to engage and fasten the recessed portion so that the gripping can take place.
  • the protrusion may have a wedge shape.
  • the clamp unit In the adsorption module according to an embodiment of the present application, the clamp unit,
  • the cylinder rotates by an external force applied and moves outward to enter the outward moving state, and the elastic member can be compressed by an external force outward due to the outward movement of the clamp unit.
  • the clamp unit is capable of releasing the gripping of the conversion kit when in the outward moving state.
  • the clamp unit may be provided with a receiving unit capable of accommodating the protrusion of the neighboring adsorption module.
  • the negative pressure transmission plate In the adsorption module according to an embodiment of the present application, the negative pressure transmission plate
  • the structure is capable of vacuum adsorption of the conversion kit.
  • the picker device includes an adsorption module according to the eighth aspect of the present application.
  • the conversion kit can be mounted on the negative pressure transmission plate structure by vacuum adsorption of the negative pressure transmission plate structure, so that the conversion kit and the negative pressure transmission plate structure are fixed by setting the presence or absence of vacuum suction formation.
  • the lock release can be done automatically, and accordingly, when the lock release is done automatically, the picker module vacuum-sucks the conversion kit, separates it from the negative pressure transmission plate structure, and transfers it to automatically remove the existing batch conversion kit, and the picker module is new.
  • the negative pressure transmission plate structure can be vacuum-adsorbed and automatically fixed in position, so that the new conversion kit can be automatically placed and fixed.
  • the first picker module, the second picker module and the third picker module transfer the conversion kit in a relay type, and the conversion kit is in the order of the vision table, the third picker module, the dryer, the second picker module and the package cutting device. Since the conversion kit of the vision table, the third picker module, the drying device, the second picker module and the package cutting device are of different types, the conversion kit can be efficiently placed.
  • the picker module Since the conversion kit and the negative pressure transmission plate structure can be physically fixed by the fastening part, the conversion kit is prevented from being separated from the negative pressure transmission plate structure even when vacuum adsorption is stopped, thereby preventing the problem of damage to the conversion kit. have.
  • the conversion kit and the negative pressure transmission plate structure are mutually formed by vacuum adsorption.
  • the clamp By physically gripping the conversion kit and releasing the grip by the clamp by the protrusion of the neighboring suction module when the cylinder or the neighboring suction module is close in the two-axis direction, the conversion kit can be stopped even if the air suction caused by an unexpected problem is interrupted. Prevents unexpected removal from the negative pressure transmission plate structure, 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 If necessary, the gripping can be easily released and the conversion kit can be removed.
  • the conversion kit is gripped by the clamp and fixed to the negative pressure transmission plate structure, so that when the dig air into the vacuum hole of the conversion kit is supplied, the conversion kit is a negative pressure transmission plate. Problems of shaking, dropping or moving on the structure can be avoided.
  • the coupling force of the conversion kit to the sound pressure transmission plate structure can be increased.
  • FIG. 1 is a schematic perspective view of a conversion kit automatic exchange system according to a first embodiment of the present application.
  • Figure 2 is a view from a different angle from that of Figure 1, according to the first embodiment of the present application
  • FIG. 3 is a schematic perspective view of the table module of the automatic conversion kit system according to the first embodiment of the present application.
  • FIG. 4 is a schematic front view of the table module of the automatic conversion kit system according to the first embodiment of the present application, shown in a partial cross-sectional view.
  • Fig. 5 is a schematic perspective view of the negative pressure transmission plate structure of the automatic conversion kit system according to the first embodiment of the present application.
  • FIG. 6 is a schematic perspective view of a picker module of the automatic conversion kit system according to the first embodiment of the present application.
  • Fig. 7 is a view according to the first embodiment of the present original as viewed from a different angle from Fig.
  • Fig. 8 is a schematic perspective view of a picker module of the automatic conversion kit replacement system according to the first embodiment of the present application in which the conversion kit is not installed.
  • Fig. 9 is a schematic front view of the picker module of the conversion kit automatic exchange system according to the first embodiment of the present application, shown in a partial cross-sectional view.
  • Fig. 4 is a schematic front view of the table module of the flipper module of the drying device of the automatic conversion kit system according to the first embodiment of the present application.
  • Fig. 11 is a schematic perspective view of an adsorption module according to the first embodiment of the present application applied to a package cutting device, a drying device, and a vision table of a conversion kit automatic exchange system according to a second embodiment of the present application.
  • Fig. 12 <&gt is a schematic front view of the adsorption module according to the first embodiment of the present application applied to the package cutting device, drying device and vision table of the conversion kit automatic exchange system according to the second embodiment of the present application, a partial cross-sectional view Was shown. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 7]
  • Fig. 13 ⁇ 4 is an enlarged view of Fig. 12 & part of it.
  • Fig. 12 (1 shows the clamp unit and elastic member of the adsorption module according to the first embodiment of the present application applied to the package cutting device, drying device and vision table of the conversion kit automatic exchange system according to the second embodiment of the present application. To illustrate, it is a conceptual perspective view showing some of the products removed.
  • FIG. 13 is a package of a conversion kit automatic exchange system according to a second embodiment of the present application
  • FIG. 1 It is a schematic perspective view of the pressure transmission plate structure of the suction module according to the first embodiment of the present application, which is applied to a cutting device, a drying device, and a vision table.
  • FIG. 14 is a schematic perspective view of a second picker device (or a third picker device) of the conversion kit automatic exchange system according to the second embodiment of the present application.
  • FIG. 15 is a view according to a second embodiment of the present application, viewed from a different angle from that of FIG. 14
  • Fig. 16 is a schematic perspective view of a second picker device (or a third picker device) of the conversion kit automatic exchange system according to the second embodiment of the present application in which the conversion kit is not installed.
  • Fig. 17 is a schematic perspective view of a first picker device of an automatic switching system for a conversion kit according to a second embodiment of the present application.
  • FIG. 18 is a view according to a second embodiment of the present application, viewed from an angle different from that of FIG.
  • Fig. 19 is a schematic perspective view of the first picker device of the automatic conversion kit exchange system according to the second embodiment of the present application in which the conversion kit is not mounted.
  • Fig. 20 is a schematic front view of a first picker device of a conversion kit automatic exchange system according to a second embodiment of the present application, shown in partial cross-sectional view.
  • This application relates to a conversion kit automatic exchange system, a table module and a conversion kit automatic exchange system.
  • the conversion kit automatic exchange system (hereinafter referred to as “the first system”) according to the first embodiment of the present application.
  • the picker module is one of the first to third picker modules (41, 42, 43).
  • the sound pressure transmission plate structure (112 and 112 is the sound pressure transmission plate structure for the table of the table module 11 (112) and the sound pressure transmission plate structure for the picker of the picker module (41) (including at least one of 112 ratios It can be a concept, and the product recessed part is for table product recessed part (1121 and product for picker
  • the recessed portion may be a concept including one or more of the 1121 ratio, the kit recessed portion may be a concept including one or more of the kit recessed portion 1122 and the picker kit recessed portion (11221)).
  • the first system includes a package cutting device 1 for cutting a stream into a package.
  • the package cutting device 1 may include a table module 11, The strip transferred to the table module 11 of the package cutting device 1 can be cut into individual packages using blades not shown.
  • the first system includes a drying device 2 for drying the package.
  • the package cut in the package cutting device 1 is transferred to the drying device 2 It can be cleaned, washed and then dried.
  • This drying device 2 may comprise a loading module 21 and a polypper module 22.
  • the first system is a vision in which the package is seated.
  • the first system is a picker device (4) that adsorbs strips or packages and transfers them between the package cutting device (1), the dryer (2) and the vision table (3).
  • the picker device 4 may include a first picker module 41, a second picker module 42, and a third picker module 43.
  • the first picker module 41 The stream can be transferred to the package cutting device (1), the second picker module (42) can transfer the package from the package cutting device (1) to the drying device (2), and the third picker module (43) is a drying device.
  • the package can be transferred from (2) to the vision table (3).
  • Table (3) may contain table modules (11), e.g. package cutting
  • the device (1) includes two table modules (11), the drying device (2) includes two table modules (11), and the vision table (3) may include two table modules (11).
  • a strip or package can be placed on the table module (11), for example, a strip can be placed on the table module (11) of the package cutting device (1), and the table of the drying device (2) and the vision table (3).
  • a package may be placed on the module 11. More specifically, the first picker module 41 receives a strip from the loading and unloading device 5 and is applied to the table module 11 of the package cutting device 1.
  • It can be lacing, and the strip can be cut by the blade while being placed on the table module 11 of the package cutting device 1, and a plurality of packages formed by cutting are transferred by the second picker module 41 to dry It can be loaded on the table module 11 of the device 2 (a washing process can be performed during the transfer process), and the dried package is notified by the third picker module 43 and thus the table module of the vision table 3 Can be placed on (11).
  • the table module 11 may include a conversion kit 111 in which a plurality of vacuum holes 1111 are formed in the ⁇ axial direction. Placing on the table module 11 The resulting strip or package can be placed on the conversion kit 111.
  • the conversion kit 111 may include a first plate 111 and a second plate 1112, and the vacuum hole 1111 is a first tube portion formed by passing through the first plate 111 in the ⁇ axial direction. It is extended from (11111) and the first sub-section (11111), and the second
  • It may include a second pipe portion 11112 formed by passing through the plate 1112 in the ⁇ axial direction.
  • the axial direction of the original conversion kit 111 The direction setting related to one side and the other side of the ⁇ axis direction is based on the first plate 111 and the second plate 11 2 of the conversion kit 111.
  • the direction toward the plate 111 may be set to the other side in the ⁇ -axis direction, and the direction toward the second plate (11 2) in the 7-axis direction. Accordingly, one side in the two-axis direction of the conversion kit 111 is the second pipe part. It can mean the side on which (11112) is formed, and the other side in the ⁇ axial direction of the conversion kit (111) is the side on which the first tube part (11111) is formed (strip or
  • the table module 11 is a negative pressure transmission plate
  • a conversion kit 111 can be arranged on the other surface of the structure 112 in the ⁇ -axis direction, and a negative pressure transmission plate structure for a table (112 is a negative pressure transmission plate for a table) 2020/175863 1» (:1 ⁇ 1 ⁇ 2020/002574
  • a negative pressure generator (not shown) located on the structure (one side in the lower axial direction of 112)) can communicate with the vacuum hole 1111.
  • the negative pressure transmission plate structure 112 for a table is a product depression 1121 for a table formed by a portion of the conversion kit 111 in which a plurality of vacuum holes 1111 are formed is depressed in one side in the axial direction. Table product depression (1121 ⁇ , sound pressure action by the sound pressure generator and sound pressure relief can be transmitted to the vacuum hole 1111).
  • the negative pressure transmission plate structure 112 for the table may include a communication port for communicating the product depression 1121 with the negative pressure generator for the table, and the negative pressure generator sucks the gas (negative pressure When generated), the gas in the table product depression 1121 flows into the negative pressure generator side, and accordingly, the gas in the vacuum hole 1111 flows into the negative pressure generator side through the table product depression 1121, accordingly, A negative pressure is formed in the vacuum hole 1111 so that the package or strip placed on the conversion kit 111 can be adsorbed.
  • the negative pressure transmission plate structure for the table Through 112, the generation of sound pressure in the vacuum hole 1111 communicated with the sound pressure generator is stopped, and adsorption of the vacuum hole 1111 may be stopped.
  • the structure 112 may include a table kit depression 1122 in which at least a portion of the edge of the conversion kit 111 is depressed toward one side in the axial direction to allow vacuum adsorption to the conversion kit 111.
  • the sound pressure transmission plate structure for a table (112 may include a communication port for communicating the sound pressure generator with the table kit depression (1122).
  • the table kit depression ()) The gas inside 1122 flows into the negative pressure generator side, and the negative pressure is formed in the table kit depression (1122), so that the table kit depression (1122) can be in a state capable of adsorbing the lower surface of the edge of the conversion kit (111).
  • the negative pressure transmission plate structure for a table (in the case of vacuum adsorption to the conversion kit 111 of 112 squares, the conversion kit 111 is a negative pressure transmission plate for a table)
  • the structure can be fixed to the position at 112)
  • the sound pressure transmission plate structure for a table (when vacuum adsorption is released for the conversion kit 111 of the table 112, the conversion kit 111 is removable from the sound pressure transmission plate structure for the table) Can be
  • the table kit recessed portion (1122 ⁇ may have a long hole-shaped cross section extending in the longitudinal direction of the conversion kit 111 (X-axis direction in FIG. 5).
  • the sound pressure transmission plate structure on which the conversion kit 111 is mounted (hereinafter, the sound pressure transmission plate structure of the first to third picker modules 41, 42, 43) 2020/175863 1» (:1 ⁇ 1 (referred to as 2020/002574 plate structure (113 ⁇ 4)))
  • Negative pressure transmission plate structure for pickers (conversion kit 111) by vacuum adsorption of 112 non-gas conversion kit (111)
  • a sound pressure transmission plate structure for a picker may be mounted on the 112 ratio. Accordingly, the conversion kit 111 may be mounted on a negative pressure transmission plate structure for a picker (one side in the ⁇ axial direction of the 112 ratio (bottom in FIG. 7)).
  • the sound pressure transmission plate structure for a picker (the 112 ratio is
  • At least a part of the part facing the part in which the plurality of vacuum holes (1111) of the conversion kit (111) is formed is recessed to the other side in the axial direction, and the product for pickers that transmits sound pressure action and release of sound pressure by the sound pressure generator to the vacuum hole (1111) Part (within 112) may be included.
  • the structure (112 ratio may include a communication port for communicating the product depression (inside 112) for the picker) and the sound pressure generator. Accordingly, the sound pressure transmission plate structure for the picker (a pick on one side in the axial direction of the conversion kit 111 in the 112 ratio) Acoustic pressure transmission plate structure for a picker (if the conversion kit 111 is mounted to face one side in the X-axis direction of the 112 ratio (fixed), the conversion kit 111 is a negative pressure transmission plate structure for a picker (a product for a 112 ratio picker)
  • the package can be vacuum-adsorbed by the action of the depression (inside 112) and the vacuum hole (1111).
  • the details of the communication port, the product depression for the picker (1121 boiling, etc., correspond to the above-described table negative pressure transmission plate structure (112), so detailed explanations are omitted.
  • the negative piezoelectric transmission plate for the picker module is for reference only.
  • the picker module is provided with a conversion kit 111 in a state in which one side of the conversion kit 111 in the axial direction faces the other side in the axial direction, and the conversion kit ( The conversion kit 111 is vacuum-installed with the conversion kit 111 so that one side in the ⁇ axis direction of 111) faces the one side in the ⁇ axis direction of the 112 ratio (11221).
  • the conversion kit 111 mounted on the picker module is accommodated in the magazine so as to face at least one side of the conversion kit 111 in the ⁇ axial direction, and can be withdrawn from the magazine.
  • a negative pressure transmission plate structure for a picker (the part facing the edge part of the conversion kit 111 is recessed toward the other side in the ⁇ axial direction, so that the picker kit recessed part (11221) for adsorption to the conversion kit 111
  • it may include a communication port for communicating the sound pressure generator with the sound pressure transmission plate structure for the picker (the 112 ratio is the picker kit depression (11221)).
  • the conversion kit 111 can be positioned in the negative pressure transmission plate structure (112 ratio for the picker).
  • the negative pressure transmission plate for the picker is the negative pressure transmission plate for the picker
  • the conversion kit 111 may be in a state capable of being removed from the negative pressure transmission plate structure for a picker.
  • the conversion kit 111 is a negative pressure transmission plate structure for the picker (if mounted on the 112 ratio (if fitted), the picker module may be in a state capable of holding semiconductors or strips so that one side of the ⁇ axis of the kit 111 is opposite.
  • the sound pressure transmission plate structure for pickers when the conversion kit 111 is not installed in the 112 ratio, the sound pressure transmission plate structure for pickers (the conversion kit 111) for the picker can be transported.At this time, the sound pressure transmission for pickers Plate structure (112 ratio is the negative pressure transmission plate structure for pickers (the ⁇ axis of the 112 ratio and the 7 axis of the conversion kit 111)
  • the conversion kit 111 is mounted on the sound pressure transmission plate structure for the picker (112 When installed) Conversion kit 111 can be transferred.
  • the picker kit recess (11221)) extends in the longitudinal direction of the conversion kit (111)
  • It can have a cross section of a long hole shape to be formed.
  • the picker device 4 includes a package cutting device 1, a drying device 2, a vision table 3, and a conversion kit 111 for adsorbing the package to the picker device 4
  • each of the first to third picker modules (41, 42, 43) has a respective negative pressure transmission plate structure (conversion kit 111 when the conversion kit 111 is not installed in the 112 ⁇ )
  • the first to third picker modules 41, 42, 43, respectively are package cutting devices (1) and drying devices (2).
  • it may mean removing the pre-arranged conversion kit 111 for the vision table 3, or disposing a new conversion kit 111.
  • the second picker module 42 transfers the conversion kit 111 between the package cutting device 1 and the drying device 2
  • the third picker module 43 is the drying device 2 and Conversion kit 111 can be transferred between vision tables (3).
  • the picker module (at least one of the first to third picker modules 41, 42, 43) is equipped with a negative pressure transmission plate for a picker (conversion kit 111 in 112 ⁇ ) (conversion kit 111)
  • conversion kit 111 conversion kit 112 ⁇
  • the picker module can transfer the conversion kit (111).
  • the picker device (4) is a package cutting device (1), a drying device (2) and a vision table (3) a negative pressure transmission plate structure of each of the table modules 11 (a negative pressure transmission plate for a table).
  • a negative pressure transmission plate for a table The arrangement of the conversion kit 111 in the structure 112 ratio will be described.
  • the table module 11 is the negative pressure transmission plate structure for the table (pre-positioned at the 112 ratio)
  • the previously batch conversion kit 111 may be removed. The removal of the previously batch conversion kit 111 will be described later. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit 111 is prepared
  • a loading and unloading device (5) may be included, and the first picker module (41) is provided with a conversion kit (111) from the loading and unloading device (5) and can be placed on the package cutting device (1).
  • the conversion kit 111 that needs to be installed is withdrawn from the loading and unloading device 5 by a gripper (not shown), and the conversion kit 111 which is withdrawn and located on the rail (not shown) is transferred to the first picker module.
  • a conversion kit magazine in which a plurality of conversion kits 111 are accommodated may be placed in the loading and unloading device 5.
  • the conversion kit magazine is a magazine in which a conversion kit for mounting is accommodated, and the recovered conversion.
  • the kits can be classified and operated by the magazines that accept them.
  • multiple conversion kits can be accommodated in the magazine by being classified by conversion kits classified according to the type of conversion kit or package size.
  • the second picker module 42 can pick up the conversion kit 111 placed for the package cutting device 1 and place it for the drying device 2.
  • the second picker module ( 42) After placing the conversion kit 111 for the drying device 2, it is possible to additionally pick up the conversion kit 111 placed for the package cutting device 1.
  • the third picker module 43 Picks up the conversion kit 111 placed for the drying device 2 and can be placed for the vision table 3.
  • the third picker module 43 is a conversion kit for the vision table 3. After placing (111), it is possible to additionally pick up the placed conversion kit (111) against the dry unit (2).
  • One kit (111) is required, two conversion kits (111) need to be placed on the drying device (2), one conversion kit (111) is required for the second picker module (42), and the package It is assumed that two conversion kits 111 need to be placed on the cutting device 1.
  • the first picker module 41 receives the conversion kit 111 from the loading and unloading device 5 and cuts the package.
  • One conversion kit (111) is sequentially installed in the table module (11) of the device (1) (the empty part of the table module (11) of the two package cutting devices (1)).
  • the first picker module (41) is the first conversion kit (111) placed on the package cutting device (1) and the second picker module (42) is picked up.
  • the first picker module 41 picks up the first conversion kit 111 and places it on the table module 11 of the vision table 3.
  • the transfer operation for the second conversion kit 111 can also be carried out, and the first picker module 41 is the first conversion kit 41 and the second conversion kit after transfer.
  • the second conversion kit 41 can be transferred to the table module 11 of the package cutting device 1 by the first picker module 41 and the first conversion kit 41 has been transferred.
  • the picker module When the conversion kit 111 is mounted for the picker module, the conversion kit 111 is mounted so that one side of the conversion kit 111 faces the negative pressure transmission plate structure for the picker (the one side in the ⁇ axis direction of the 112 ratio).
  • a sound pressure transmission plate structure for a picker of the third picker module 43 (the third conversion kit 111 to be fixed to the 112 ratio is the first, second, fourth, fifth, seventh and eighth conversion kit 111 to be described later)
  • it may be transferred to the package cutting device (1) with one side in the axial direction facing the other side in the ⁇ axis direction (upper side) and placed on the drying device (2) through the second picker module (42).
  • the fourth conversion kit 111 is transferred to the table module 11 of the package cutting device 1 by the first picker module 41, and then 2 of the drying device 1 by the second picker module 42. Can be placed on one of the table modules (11), the fifth conversion kit (111) is transferred to the table module (11) of the package cutting device (1) by the first picker module (41), the second picker module By 42, the rest of the two table modules 11 of the drying apparatus 1 can be placed, and accordingly, the placing of the conversion kit 111 for the drying apparatus 2 can be completed.
  • the sixth conversion kit 111 transferred to the table module 11 of the cutting device 1 can be fixedly mounted on the negative pressure transmission plate structure 112 ratio for the picker of the second picker module 42.
  • the picker module When the conversion kit (111) is mounted, the picker module is A sound pressure transmission plate structure for a picker (a conversion kit 111 is fitted to face one side in the 7-axis direction of the 112 ratio, and the sound pressure transmission plate structure for a picker of the second picker module 42 (the sixth conversion to be mounted on the 112 ratio)
  • the kit 111 is a package cutting device with one side in the axial direction facing the other side in the X-axis direction ( After that, the seventh conversion kit (111) and the eighth conversion kit (111) are each one of the table modules (11) of the package cutting device (1) by the first picker module (41). It can be placed on me, and the automatic placement of the conversion kit 111 can be achieved by this process.
  • the removal of the batch conversion kit 111 may include the following process.
  • the first picker module 41 picks up the conversion kit 111 placed for the package cutting device 1 and transfers it to the loading unloading device 5, and the second picker module 42 ) Picks up the conversion kit 111 placed for the drying device 2 and can be placed for the package cutting device 1, and the third picker module 43 is placed on the vision table 3 2020/175863 1» (:1 ⁇ 1 ⁇ 2020/002574) You can pick up the placed conversion kit (111) and place it on the dry device (2).
  • the first picker module 41 is the table module 11 of the package cutting device 1
  • the conversion kit 111 can be picked up and transferred to the loading and unloading device 5. More specifically, the first picker module 41 is the conversion kit 111 of the table module 11 of the package cutting device 1 Pick-up and place on the rail (not shown), and pushed to the magazine for collection of the conversion kit located in the loading and unloading device 5 by a gripper (not shown), so that the package cutting device can be recovered.
  • the second picker module 42 replaces the conversion kit 111 fixedly mounted on its table sound pressure transmission plate structure (112 ratio). On the table module 11 of the package cutting device 1 with the conversion kit 111 removed.
  • the first picker module 41 can be placed with a relay, and the second picker module 42 picks up the conversion kit 111 placed on the table module 11 of the package cutting device 1 to pick up the loading and unloading device 5 ), and after removing its conversion kit 111, the second picker module 42 picks up the conversion kits 111 of the table modules 11 of the drying device 2 one by one to package cutting equipment.
  • This conversion kit 111 can be placed on the removed table module 11, and the first picker module 41 sequentially loads the conversion kit 111 placed by the second picker module 42.
  • the third picker module 43 can be transferred to the unloading device 5, and the negative pressure transmission plate structure for its table ( It is possible to place the conversion kit (111) fitted to the 112 ratio on the table module (11) of the drying unit (2) with the conversion kit (111) removed, and sequentially, the table module (11) of the vision table (3).
  • the conversion kit 111 can be picked up one by one and placed on the table module 11 of the dryer 2 with the conversion kit 111 removed, and the second picker module 42 is the third picker module 43.
  • Table of the package cutting device (1) sequentially by racing conversion kit (111) one by one
  • the conversion kit of the package cutting device 1 111) may have an auxiliary line (cutting groove) between each package location to cut the strip into a plurality of packages.
  • the conversion kit 111 and the vision table 3, which are coupled to the package cutting device 1 are dry
  • the third picker module 43 and the conversion kit 111 coupled to the second picker module 42 are distinguished and recognized, 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 Vision table (3), drying unit (2), the third picker module (43) and the conversion kit (111) coupled to the second picker module (42) first, After transferring, it is necessary to transfer the conversion kit 111 which is finally coupled to the package cutting device 1.
  • the conversion kit 111 can be held and transported so that the other side of the ⁇ axis of) faces the negative pressure transmission plate structure for the picker of the picker module.
  • the table kit recessed part (1122) for sucking the kit 111 may have vacuum adsorption released, and the picker kit recessed part (11221) which sucks the conversion kit 111 of the picker module Vacuum sawing is possible for adsorption of the conversion kit 111 for transport.
  • the picker module (41, 42, 43) may include a conversion kit (111). Accordingly, a conversion kit of the sound pressure transmission plate structure (112 non-epic picker modules (41, 42, 43) for pickers) (111) gauze (in other words, sound pressure transmission plate for pickers)
  • the picker modules 41, 42, 43 use the negative pressure transmission plate structure for the table (conversion kit 111 pre-arranged for the 112 ratio). It can be removed or a new conversion kit 111 can be placed.
  • the sound pressure transmission plate structure 112 for a table may include a protrusion 1123 protruding to the other side in the axial direction, and referring to FIG.
  • a sound pressure transmission plate structure for a picker (the 112 ratio may include a protrusion 1123 protruding toward one side in the biaxial direction.
  • the 112 ratio may include a protrusion 1123 protruding toward one side in the biaxial direction.
  • the protrusion 1123 is inserted into the conversion kit 111.
  • Holes 1112 can be formed.
  • Conversion kit 111 can be gripped or placed (placed) with a positive position on the negative pressure transmission plate structure 112 112 by engagement of the projections 1123 and the holes 1112.
  • a sound pressure transmission plate structure for a picker (112 ratio may include a protrusion 1126 protruding in one side in the X-axis direction.
  • the negative pressure transmission plate structure for a table 112 may include a hole 1116 into which at least a part of the protrusion 1126 is inserted. Accordingly, the picker modules 41, 42 When placing the conversion kit 111 for the table module 11 of 43, or when placing multiple packages of the picker module 41, 42, 43 on the conversion kit 111 installed on the table module 11 ,Picker module (41, 42, 43) of the picker sound pressure transmission plate structure (112 is placed in the correct position relative to the table sound pressure transmission plate structure 112, and the conversion kit 111 is placed on the table sound pressure transmission plate structure (112). Placement, and multiple packages can be accurately placed on the conversion kit 111 installed in the table module 11. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit 111 protrudes outward from each of both sides of the conversion kit 111 in the longitudinal direction of the conversion kit 111 (X-axis direction in FIG. 4) It may include a pair of protrusions 1115 that are formed to be extended in.
  • a negative pressure transmission plate structure for a picker (the 112 ratio is a negative pressure transmission plate structure for a picker (a from each of the two sides of the 112 ratio). It may include a pair of fastening portions 1125 which are protruded to one side in the axial direction and to which the pair of protruding portions 1115 are fitted.
  • the fastening part 1125 includes one member 11251 with one side facing outward in the axial direction, and the other member 11252 bending and extending outward from the one side member 11251, and has a zigzag shape in the 7-axis direction. Accordingly, the distance between the one side member 11251 of the pair of fastening portions 1125 becomes narrower toward the other side in the ⁇ axial direction, but between the outermost end of the one side member 11251 in the ⁇ axial direction.
  • the spacing of the conversion kit 111 may be narrower than the width of the portion where the protrusion 1115 of the conversion kit 111 is formed, and the spacing between the other side members 11252 of the pair of fastening parts 1125 may increase toward the other side in the ⁇ axial direction. Accordingly, when picking up the conversion kit 111 of the picker module, the picker module moves to the ⁇ axis until the picker sound pressure transmission plate structure (one side of the ⁇ axis of 112 ratio contacts one side of the conversion kit 111) Movement) The conversion kit 111 can be adsorbed, and in this process, the conversion kit 111 passes between the one side member 11251 of the pair of fastening portions 1125, and ⁇ of the pair of one side member 11251. Thus, the protruding portion 1115 and the fastening portion 1125 are in frictional contact, and the conversion kit 111 can be physically mounted on the negative pressure transmission plate structure (112 ratio) for the picker.
  • the picker module can place the conversion kit 111 held by it on the negative pressure transmission plate structure (112 ⁇ ) for the table of the table module 11, at this time, A negative pressure transmission plate structure for the table (112 ⁇ can apply an external force in the downward direction to the conversion kit 111 by adsorbing the ball through the table kit depression 1122, and at the same time, the picker module can be moved upward, and this In the process, the protrusion 1115 of the conversion kit 111 can be removed from the negative pressure transmission plate structure for a picker (the fastening portion 1125 of the 112 ratio).
  • the conversion kit 111 is a sound pressure transmission plate structure for a picker (not separated from the 112 ratio, but the negative pressure transmission plate structure for a picker (the condition that is mounted on the 112 ratio) I can keep it.
  • the fastening portions 1125 may be alternately disposed, which is due to the vacuum adsorption of the conversion kit 111 for the negative pressure transmission plate structure 112 for the table. Sound pressure transfer plate for picker
  • Transfer plate structure (It may be to maintain a state mounted on the sound pressure transfer plate structure (113 ⁇ 4) for a picker stably without being separated from the 112 ratio.
  • this fastening part 1125 is the flipper of the drying device 2
  • the table module 11 of the module 22 can be provided in the negative pressure transmission plate structure (112 ⁇ ) because the table module 11 of the polypper module 22 rotates about the X-axis as a rotation axis.
  • the conversion kit 111 is fixed to the negative pressure transmission plate structure 112 for the table of the flipper module 22 by vacuum adsorption, and the table module 11 of the flipper module 22 is rotated 180° to vacuum When adsorption is stopped, the conversion kit (111) is replaced with a negative pressure transfer plate for the table of the polypper module (22).
  • the negative pressure transmission plate structure 112 for the table of the table module 11 of the polypper module 22 is also
  • a fastening part 1125 may be provided.
  • the structure and function of the fastening part 1125 of the table module 11 of the polypper module 22 for the negative pressure transmission plate structure 112 Since it is similar to the configuration and function, detailed explanation is omitted.
  • the conversion kit 111 is mounted on the negative pressure transmission plate structure (112 112 ratio) by vacuum adsorption of the negative pressure transmission plate structure (112 112 ratio) and the conversion kit 111 and the negative pressure transmission plate are controlled by adjusting the presence or absence of vacuum suction formation.
  • the structure (112 112) can be automatically formed in a removable state, and when it is in a removable state by releasing the vacuum adsorption, the conversion kit 111 can be removed by vacuum adsorption with the picker module, and the picker module is the conversion kit 111 ), and when the new conversion kit 111 is placed on the sound pressure transmission plate structure (112 112 B), vacuum adsorption is resumed and the sound pressure transmission plate structure (112 112 B conversion kit 111) can be fixed and mounted automatically. have.
  • the first system, the table module 11 of the picker module and the flipper module 22 includes a fastening portion 1125, even if the air adsorption caused by an unexpected problem is stopped, the conversion kit 111 ) Can be prevented from being unexpectedly removed from the table module 11 of the picker module and flipper module 22.
  • the conversion kit 111 includes information on the conversion kit 111 (for example, size information of the package seating portion of the conversion kit 111 according to the package size, each table) Identification information may be marked so that the type of the conversion kit 111 suitable for the module) is identified, the first picker module 41 may be equipped with a sensor that scans such identification information, and the first picker module 41 Conversion kit 111 withdrawn from loading and unloading device 5 by sensor scan is suitable
  • the above conversion kit 111 can be picked up, and if the conversion kit 111 is not suitable, the pickup can be stopped. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit 111 can be taken out from the loading unloading device 5 and picked up the conversion kit 111 mounted on the rail (not shown), and the conversion kit 111 is placed on the rail.
  • the first picker module 41 is rotated to hold the conversion kit 111 disposed at a shifted angle, so that the conversion kit 111 has a fixed position and can be transferred.
  • main table module 11 a table module (hereinafter referred to as a “main table module”) 11 according to an embodiment of the present application applied to the first system described above.
  • main table module 11 Regarding the description, the same drawing symbols will be used for the same or similar configurations as those described in the first system described in the previous section, and overlapping descriptions will be simplified or omitted.
  • This table module 11 may include a conversion kit 111 in which a plurality of vacuum holes 1111 are formed in the ⁇ axis direction.
  • this table module 11 has a conversion kit 111 arranged on the other surface in the ⁇ axis direction, so that the sound pressure generator (not shown) and the vacuum hole 1111 are communicated with each other for a table sound pressure transmission plate structure. (Including 112.
  • a negative pressure transmission plate structure for a table (the conversion kit 111 for 112 squares) can be vacuum-adsorbed. Accordingly, when vacuum absorption for the conversion kit 111 of the table sound pressure transmission plate structure (112), a conversion kit (111) ) Is fixed in position to the table sound pressure transmission plate structure 112. In addition, the table sound pressure transmission plate
  • the conversion kit 111 Upon release of vacuum adsorption to the conversion kit 111 of the structure 112, the conversion kit 111 is in a state that can be removed from the negative pressure transmission plate structure 112 for the table.
  • the part facing the part where the vacuum hole 1111 is formed may include a recessed part for table products (1121 ⁇ ) formed by recessing one side in the axial direction.
  • the recessed part for table products (1121 ⁇ is a negative pressure action and sound pressure by a sound pressure generator) Release can be transmitted to the vacuum hole (1111).
  • a negative pressure transmission plate structure for a table (a part facing at least a part of the edge of the conversion kit 111 is recessed to one side in the ⁇ axial direction, so that vacuum adsorption to the conversion kit 111 is performed.
  • the kit may include a depression (1122 ⁇ ).
  • the table kit recess (1122) extends in the longitudinal direction of the conversion kit (111)
  • It can have a cross section of a long hole shape to be formed.
  • a sound pressure transmission plate structure for a table (112 may include a protrusion 1123 protruding to the other side in the ⁇ axis direction, and a sound pressure transmission plate structure for a picker (112 ratio includes a protrusion 1123 protruding in one side in the 7-axis direction)
  • a hole 1112 into which at least a part of the protrusion 1123 is inserted may be formed.
  • the conversion kit automatic exchange device including the table module 11 described above, applied to the first system (hereinafter referred to as'the unit' 2020/175863 1» (: 1 ⁇ 1 (referred to as 2020/002574) will be explained.
  • the same drawing code shall be used for the same or similar configuration as described in the previous section. Redundant explanations will be abbreviated or omitted.
  • This apparatus includes a main table module (11).
  • the apparatus includes a table sound pressure transmission plate structure (conversion kit 111 pre-arranged for a table 112) from the sound pressure transmission plate structure 112 for a table.
  • the picker module may include a sound pressure transmission plate structure for a picker (112 ratio) in which a conversion kit 11 is mounted on one side in the axial direction.
  • the structure 112 is capable of vacuum adsorption of the conversion kit 111.
  • At least a portion of the portion facing the portion where the vacuum hole 1111 is formed is depressed to the other side in the ⁇ axial direction, thereby preventing the negative pressure action and sound pressure release by the
  • It may include a product depression (1121 ratio) for the picker delivered to the vacuum hole (1111).
  • a negative pressure transmission plate structure for a picker (the part facing the edge part of the conversion kit 111 is recessed toward the other side in the ⁇ axial direction, so that the picker kit recessed part 11221 is adsorbed to the conversion kit 111 )).
  • the picker kit recess (11221)) extends in the longitudinal direction of the conversion kit (111)
  • It can have a cross section of a long hole shape to be formed.
  • a sound pressure transmission plate structure for a picker (112 ratio may include a protrusion 1126 protruding in one side in the ⁇ axial direction, and at least a part of the protrusion 1126 is inserted for the table sound pressure transmission plate structure 112 It may contain a hole (1116).
  • the conversion kit 111 protrudes outward from each of both sides of the conversion kit 111 and is formed to extend in the longitudinal direction of the conversion kit 111
  • a negative pressure transmission plate for a picker may include a protrusion 1115.
  • a negative pressure transmission plate for a picker may include a protrusion 1115.
  • each ⁇ may include a pair of fastening portions 1125 which are protruded to one side in the axial direction and fitted with a pair of protruding portions 1115.
  • the picker module (41, 42, 43) may include a conversion kit (111). Accordingly, a conversion kit of the sound pressure transmission plate structure (112 non-epic picker module (41, 42, 43) for the picker) (111) gauze (in other words, sound pressure transmission plate for pickers)
  • the picker modules 41, 42, 43 use the negative pressure transmission plate structure for the table (conversion kit 111 pre-arranged for the 112 ratio). It can be removed or a new conversion kit 111 can be placed.
  • the direction toward the plate (9111) is set to one side in the X-axis direction
  • the direction toward the second plate (911 2) is set to the other side in the 7-axis direction.
  • the 7-axis other side and the other side in the axial direction) may be the side facing the other side in the ⁇ axis direction set as above, and according to the use and arrangement of the embodiments of the present application, the embodiment of the present application is arranged so as to face more than one side of the ⁇ axis or downward.
  • the upper and lower sides of the terms related to the direction or position are set based on the arrangement state of each component shown in the drawings. For example, Figs. 11 to 20 are shown in Figs. When viewed, it can be over 12 o'clock and overall below 6 o'clock.
  • the second system includes a package cutting device 1 for cutting a stream into a package.
  • the package cutting device 1 may include an adsorption module 911.
  • the suction module 911 of the package cutting device 1 of the second system can be the same, similar or correspond to the table module 11 of the package cutting device 1 of the first system described above. Accordingly, as described above, as described above.
  • the strip transferred to the suction module 911 of the package cutting device 1 can be cut into individual packages by blades not shown. For example, the strip can be seated on the adsorption module 911 and can be cut in a seated state.
  • the second system is a dry drying package
  • the drying device 2 may be the same, similar, or correspond to the drying device 2 of the first system, so a detailed description is omitted.
  • the second system is a vision in which the package is seated.
  • the vision table (3) of the second system may be the same as, similar to, or correspond to the vision table (3) of the first system described above, so detailed descriptions are omitted.
  • the second system sucks a strip or package and transfers it between the package cutting device (1), the drying device (2) and the vision table (3).
  • a picker unit 4 is included.
  • the picker unit 4 may include a first picker unit 41, a second picker unit 42, and a third picker unit 43.
  • the cursor part 4 is disposed on the other side of the package cutting device 1, the drying device 2 and the vision table 3.
  • This is the first to third picker devices 41, 42, 43 that are package cutting devices. It can mean that (1), the dryer (2) and the vision table (3) are equipped on the other side of the axis. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the picker unit 4 of the second system may be the same as, similar or correspond to the picker unit 4 of the first system, and the first picker unit 41 and the second picker unit of the second system
  • Each of the 42 and the third picker device 43 may be the same as, similar to, or correspond to each of the first picker module 41, the second picker module 42 and the third picker module 43 of the first system.
  • the first picker device 41 in the second system so as to correspond to each of the first picker module 41, the second picker module 42, and the third picker module 43 of the first system described above.
  • the third picker device 43 is dry
  • the package can be transferred from the device (2) to the vision table (3).
  • the suction module 911 includes a suction module 911 for suctioning the package.
  • the suction module 911 is a negative pressure transmission plate equipped with a conversion kit 9111 and a conversion kit 9111.
  • each suction module 911 is the same as the table module 11 of the first system described above.
  • the suction module 911 of the picker unit 4 is the same as the configuration including the negative pressure transmission plate structure 91121 for the picker and the conversion kit 9111 of the first system described above. Or it can be responded. Accordingly, detailed descriptions of the number and roles of each of the package cutting device (1), the drying device (2), and the vision table (3) of the suction modules 911 are omitted.
  • the adsorption module 911 is
  • the conversion kit (9111) may include a first plate (9111) and a second plate (911 2), the vacuum hole (91111) is formed by passing through the first plate (9111) in the axial direction. It may include a second pipe portion (911112) extending from the first pipe portion (911111) and the first pipe portion (911111) and passing through the second plate (911 2) in the ⁇ -axis direction.
  • the adsorption module 911 is a negative pressure transmission plate
  • a structure 9112 may be included.
  • the sound pressure transmission plate structure 9112 absorbs the conversion kit 9111, and a sound pressure generator (not shown, for example, located on the two shaft sides of the sound pressure transmission plate structure 9112) ) And conversion kit (9111)
  • the vacuum hole (91111) can be communicated.
  • a conversion kit 9111 may be disposed on one side of the sound pressure transmission plate structure 9112 in the ⁇ axis direction, and the sound pressure transmission plate structure 9112 is a sound pressure generator It is possible to communicate (not shown) and the vacuum hole 91111.
  • the negative pressure transmission plate structure 9112 forms a negative pressure so that adsorption to the product and the conversion kit 9111 occurs.
  • the negative pressure transmission plate structure 9112 is formed on a portion of the conversion kit 9111 that faces the portion where the plurality of vacuum holes 91111 are formed, and connects the negative pressure generator and the vacuum hole 91111 to the product adsorption connection portions 91121, 11281.
  • the product suction connection (91121, 11281) can transmit the negative pressure action and the sound pressure release by the negative pressure generator to the vacuum hole (91111).
  • the negative pressure transmission plate structure 9112 may include a communication port for communicating the product suction connection portions 91121, 911281 and the negative pressure generator, and the negative pressure generator sucks gas (generates negative pressure).
  • the gas in the product adsorption connector (91121, 11281) flows into the negative pressure generator side, and accordingly, the gas in the vacuum hole (91111) flows into the negative pressure generator through the product adsorption connector (91121, 911281), accordingly, A negative pressure is formed in the vacuum hole (91111), so that the package or strip placed on the conversion kit (9111) can be adsorbed.
  • the negative pressure transmission plate structure (9112) The generation of sound pressure in the vacuum hole 91111 that is communicated with the sound pressure generator is stopped, and adsorption of the vacuum hole 91111 may be stopped.
  • the sound pressure transmission plate structure 9112 has at least a portion of the edge of the conversion kit 9111 that faces the other side in the ⁇ axial direction, so that the conversion kit 9111 It may include a kit adsorption unit (91122) through which vacuum adsorption is performed.
  • Package cutting device (1), drying device (2) and vision table (3) A negative pressure transmission plate structure (9112) of each adsorption module (911) ) Is the same, similar, or corresponding configuration to the structure of the negative pressure transmission plate for the table of the first system described above (112), so a detailed description of the kit adsorption unit 91122 is omitted.
  • the sound pressure transmission plate structure 9112 may include a main body 91128 and a border portion 9 1 12 9 disposed on one side of the two axes of the main body 91128,
  • a portion corresponding to the portion in which the plurality of vacuum holes 91111 are formed may be recessed toward the other side of the two shafts and an adsorption recessed portion 911281 communicating with the negative pressure generator may be formed.
  • the border portion 91129 A kit adsorption part 91122 is formed in the form of a through hole passing through the two-axis direction, and a negative pressure generator and a kit adsorption part 91122 are located on the other side of the kit adsorption part 91122 of the main body 91128.
  • a communication port (not shown in the drawing) may be formed. Accordingly, a negative pressure may be formed in the kit adsorption unit 91122 by a negative pressure generator communicated through the communication port or the negative pressure may be released.
  • the border portion In 91129 a connection space 91121 that communicates the suction depression 911281 and the plurality of vacuum holes 91111 of the conversion kit 9111 may be formed. Accordingly, the vacuum hole 91111 is a connection space 91121 and absorption
  • the negative pressure may be formed or the negative pressure may be released by communicating with the negative pressure generator through the depression 911281.
  • the adsorption module 911 is directed toward the side below one side of two axes 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 can be positioned.
  • the suction of the package cutting device (1), the drying device (2) and the vision table (3) The module 911 is arranged so as to face more than one side of the two axes, and the first to third picker devices 41, 42, 43 of the picker unit 4, respectively, the adsorption modules 911 (the picks of the first system described above)
  • the negative pressure transmission plate structure for Kerr (the same, similar or corresponding to the configuration encompassing the 112 ratio and the conversion kit 9111) may be arranged so that one side of the ⁇ axis faces downward.
  • the conversion kit 9111 in the package cutting device (1), the drying device (2) and the vision table (3), the conversion kit 9111 is In addition, referring to FIG. 15, in the second picker device 42 and the third picker device 43, the conversion kit 9111 may be arranged to face more than one side thereof. Further, referring to Fig. 18, in the first picker device 41, the conversion kit 9111 may be disposed so that one side of its two shafts faces downward when the first picker device 41 is fitted.
  • the conversion kit 9111 can be mounted (fixed in position) on the negative pressure transmission plate structure 9112.
  • the conversion kit ( 9111) may be in a removable state from the negative pressure transmission plate structure.
  • the conversion kit (9111) is a two-axis one-sided joint pressure transmission plate
  • the conversion kit 9111 is a sound pressure transmission plate structure that faces the two-axis other side of the sound pressure transmission plate structure 9112 ( 9112) (positively mounted state)
  • the suction module (911) is capable of adsorbing semiconductors or strips.
  • the conversion kit 9111 is fixedly mounted on the negative pressure transmission plate structure 9112 of the first to third picker devices 41, 42, 43, the first to third picker devices 41, 42, 43 hold semiconductors or strips.
  • the adsorption module 911 of the device 2 and the vision table 3 may have a state capable of adsorbing a package or strip placed on it.
  • the conversion kit (9111) is mounted on the negative pressure transmission plate structure (9112)
  • the adsorption module 911 When in the state, the adsorption module 911 (negative pressure transmission plate structure 9112) can transport the conversion kit 9111.
  • the evacuation of the conversion kit 911 will be described in detail below.
  • the picker unit 4 is arranged with a package cutting unit 1, a drying unit 2, a vision table 3 and a conversion kit 9111 for adsorbing the package to the picker unit 4, or
  • the first to third picker devices (41, 42, 43) each have their own sound pressure 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit (9111) Adsorbing and transporting the first to third picker devices 41, 42, 43, respectively, is a conversion kit 9111 pre-arranged with respect to the package cutting device 1, the drying device 2 or the vision table 3, respectively. ), or deploying a new conversion kit (9111).
  • the first picker device 41 transfers the conversion kit 9111 between the loading unloading device and the package cutting device 1
  • the second picker device 42 is the package cutting device 1
  • the conversion kit 9111 is transferred between the dry devices 2
  • the third picker device 43 can transfer the conversion kit 9111 between the dry devices 2 and the vision table 3.
  • Negative pressure transmission plate structure of adsorption module 911 negative pressure transmission plate
  • Arranging the conversion kit (9111) on the structure (9112) means that the picker device (4) of the first system described above is a package cutting device (1), a drying device (2) and a vision table (3) each table module ( 911) (a sound pressure transmission plate structure (112 ratio) for a table) is the same, similar, or corresponds to the arrangement of the conversion kit 111, so a detailed description is omitted.
  • the ninth conversion kit 9111 mounted on the first picker device 41 may be prepared so as to face the side below one side, in other words, to face the side above the other side.
  • the conversion kit (9111) may be prepared in the conversion kit magazine.
  • the first to ninth conversion kits (9111) may be prepared in order so that sequential pickup is possible.
  • the 1st, 2nd, 4th, 5th, 7th and 8th conversion kits (9111) are prepared to face more than one side of the X axis, and the 3rd, 6th, and 9th conversion kits (9111) are ⁇ It may be prepared to face below one side of the axis.
  • the removal of the pre-batch conversion kit (9111) can be performed, which is the same as, similar to or similar to the removal process of the pre-batch conversion kit 111 of the first system described above.
  • a vision table (3), a drying device (2), a third picker device 43 and a second picker device 42, each of the conversion kit 9111 and the package cutting device Conversion kit (9111) of (1) may be of different types.
  • the kit 9111 vacuum holds a plurality of individually cut packages, but the conversion kit 9111 of the package cutting device 1 holds the strip before being cut into the package and separated.
  • Conversion kit (9111) not a conversion kit (9111) mounted on the picker unit, but a conversion kit (9111) of the unit, drying unit (2) and vision table (3) unit conversion kit (9111)
  • the conversion kit (9111) can be held and transported so that one side of the ⁇ axis of) faces the negative pressure transmission plate structure (9112) of the picker device.
  • the adsorption unit 91122 is capable of vacuum adsorption by acting on the vacuum.
  • the first to third picker devices 41, 42, 43 may include a conversion kit 9111. Accordingly, the sound pressure of the first to third picker devices 41, 42, 43
  • the conversion kit 9111 of the first to third picker devices 41, 42, 43 is not installed on the transfer plate structure 9112 (that is, conversion to the negative pressure transfer plate structure 9112)
  • the first to third picker devices (41, 42,
  • the suction module 911 includes a clamp 9113 capable of holding the conversion kit 9111.
  • the clamp 913 is The sound pressure transmission plate structure 9112 is provided on one side (one side) in the two- axis direction, and the conversion kit 9111 can be held in the basic state.
  • the basic state of the clamp 9113 (or the basic state of the clamp unit 91131) State) may mean a state in which the clamp unit 91131 is erected in the ⁇ -axis direction.
  • the clamp unit 91131 may have an lateral movement state, but lateral movement The state is not shown in detail in the drawings, but referring to FIG. 1, in the standing state of the clamp unit 91131 shown in FIG. 1, one side of the clamp unit 91131 in the ⁇ axis direction is moved outward, and the clamp unit 91131 It may mean a state rotated around this hinge (91132).
  • the clamp 9113 transmits at least some additional negative pressure
  • It may include a clamp unit 91131 in which a protrusion 911319 protruding from one side of the plate structure 9112 protruding from one surface in the two axial directions and protruding inward toward a portion in which the conversion kit 9111 is disposed is formed.
  • 91131 may have a hook shape.
  • a depression 91119 to which a protrusion 911319 of the clamp unit 91131 is fastened may be formed on the outer surface of the conversion kit 9111.
  • the clamp unit 91131 can hold the conversion kit 9111 by engaging the protrusion 911319 of the unit 91131 into the recessed portion 91119. 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the clamp 9113 is the clamp unit 91131 transmits negative pressure
  • It may include a unit 91132. Clamped by such a hinge unit 91132
  • the unit 91131 is rotatable, and accordingly, the end of the clamp unit 91131 facing the biaxial direction is converted from the state holding the conversion kit 9111
  • the clamp 9113 includes an elastic member 91133 for providing an external force to the clamp unit 9113 inside (a direction toward the conversion kit 9111)
  • the elastic member (91133) is the outer surface (conversion) of the clamp unit (9113).
  • the clamp unit 91131 It is placed in a compressed state on the surface facing the opposite direction (outer side) of the direction facing the kit 9111, and is capable of elastic behavior. Accordingly, when the clamp unit 91131 is rotated by a predetermined angle, the elastic member 91133 has its elastic restoring force By providing the clamp unit 91131 to the clamp unit 91131, an internal external force can be applied to the clamp unit 91131.
  • the clamp unit 91131 is capable of gripping the conversion kit 9111 by engaging the projection 911319 in the recessed portion 91119 in the basic state, and the clamp unit 91131 ), the clamp unit 91131 is rotated by the hinge unit 91132 so that a portion facing one side in the two axial direction of the clamp unit 91131 (that is, the portion where the protrusion 911319 is formed) It can be moved outward to have an outward movement state, and in such an outward movement state, the engagement with the conversion kit 9111 can be released, so that a gripping state can be obtained. In addition, when the clamp unit 91131 is moved outward, the clamp unit can be moved outward.
  • the elastic member 91133 located on the outer surface of the 91131 is compressed in the outward direction, an external force inward by the elastic member 91133 may be applied to the clamp unit 91131, and accordingly, the clamp unit 91131 The clamp unit 91131 can be restored to its basic state when the external force to the outside of the clamp unit 91133 is less than the external force to the inside by the elastic member 91133.
  • FIGS. 1 and 12 (referring to 1, the outer surface of the clamp unit 91131)
  • a receiving depression 911311 in which at least a portion of the elastic member 91133 is accommodated may be formed. Accordingly, a stable behavior of the elastic member 91133 is possible.
  • the adsorption module 911 is a sound pressure transmission
  • the neighboring clamp (9113) will be described.
  • At least one of the first picker device 41, the second picker device 42, and the third picker device 43 is a package cutting device.
  • Drying device (2) and vision table (3) At least one suction module (911) and 2 axes 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574, which can be opposite and neighboring.
  • the first picker device 41 is one side of its adsorption module 911, and one side of the package cutting device (1)
  • the adsorption module 911 of the first picker device 41 and the adsorption module 911 of the package cutting device 1 can be arranged adjacent to each other in the two- axis direction so as to face one side of the adsorption module 911 of the Each may be a neighboring suction module 911 to each other.
  • the second picker device 42 may be configured such that one side of its suction module 911 faces one side of the suction module 911 of the package cutting device 1.
  • the adsorption module 911 of the second picker device 42 and the adsorption module 911 of the package cutting device 1 may be arranged adjacent to each other.
  • the second picker device 42 can be arranged adjacent to each other in the biaxial direction so that one side of its adsorption module 911 faces one side of the adsorption module 911 of the dry device 2, in this case.
  • the adsorption module 911 of the second picker device 42 and the adsorption module 911 of the dry device 2 may each be a neighboring adsorption module 911 to each other.
  • the third picker device 43 may be disposed adjacent to one side in the two- axis direction so as to face one side of the adsorption module 911 of the guide device 2 on one side of the adsorption module 911.
  • the third Each of the adsorption module 911 of the picker device 43 and the adsorption module 911 of the dry device 2 may be neighboring adsorption modules 911 to each other.
  • the third picker device 43 is its adsorption module. It can be arranged so that one side of the 911 faces the one side of the suction module 911 of the vision table 3, so that it can be arranged adjacent to each other in the two- axis direction.
  • Each of the adsorption modules 911 of the table 3 can be adjacent adsorption modules 911 to each other.
  • the picker unit (4) can be equipped so that its suction module 911 faces the package cutting device (1), the drying device (2) and the vision table (3) each of the suction modules 911,
  • at least one of the first to third pickers 41, 42, 43 has at least one suction module 911, a package cutting device 1, a drying device 2, and a vision table 3, and each suction module 911. It may mean that at least one of them is arranged so that neighbors in the two- axis direction as described above are possible.
  • the protrusion 9114 may be formed at a position corresponding to the clamp unit 91131 of the neighbor clamp 9113 in the two- axis direction. This, the suction module 911 and the neighbor suction suction
  • the suction module 911 and the neighbor suction module (911) may have the same or corresponding configuration, but when the adsorption module 911 and the neighbor adsorption module 911 face each other as the ⁇ axis, the protrusion (9114) of the adsorption module 911 is the neighbor adsorption module ( Opposing the clamp unit 91131 of the 911, and the clamp unit 91131 of the suction module 911 so as to face the protrusion 9114 of the neighboring suction module 911, and the protrusion 9114 of the suction module 911 clamp
  • the unit 91131 may be formed to be alternately formed with the protruding portion 9114 and the clamp unit 91131 of the neighboring suction module.
  • the module 911 is used for the package cutting device (1), the drying device (2) and the vision table (3). 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 Adsorption module (911)
  • Each and each neighboring adsorption module (911) can be.
  • a guide groove 911312 for guiding the entry of the protruding part 9114 of the neighboring suction module 911 into the inside may be formed in the inner part.
  • the protruding part 9114 may have a wedge shape.
  • the suction module 911 may have a wedge shape.
  • the protrusions (9114) of the neighbor adsorption module 911 enter the guide groove (911312) in the proximity of the D-axis direction, and the protrusions (9114) the neighbor adsorption module ( It is possible to mutually enter the guide groove (911312) of the clamp unit (91131) of the 911, and accordingly, the suction module (911) and the neighboring absorption module (911) as they get closer to each other by rising and falling, the neighboring absorption module (911) Clamp of the adsorption module 911 of the protrusion 9114 of
  • the clamp unit 91131 As the amount of entry into the inside of the unit 91131 increases, the clamp unit 91131 is brought into contact with the inner slope of the guide groove 911312 of the suction module 911 by the protrusion 9114 of the neighbor suction module 911. It moves outward, and as the amount of entry into the inside of the clamp unit 91131 of the suction module 911 increases, the neighboring of the protrusion 9114 of the suction module 911 increases.
  • the clamp unit 91131 of the neighboring suction module 911 can also be moved outward by the contact of the inclined surface of the guide groove 911312 of the suction module 911. Accordingly, the clamp 9113 of the suction module 911 and The clamp 9113 of the neighboring adsorption module 911 may be in an unlocked state.
  • the second and third picker devices (42, 43) are converted from the negative pressure transmission plate structure (9112) of the package cutting device (1), the drying device (2) and the vision table (3).
  • Movement of the unit 91131 to the outer state is possible by means of the cylinder 9116.
  • an extension part 911318 extending inward may be formed on the other side of the two shafts of the clamp unit 91131, and a cylinder 9116 may be provided on the other side of the two shafts of the extension part 911318.
  • the cylinder 9116 can be driven in two axes, and when the cylinder 9916 is moved to one side of the two axes and an external force is applied to the extension part 911318 toward one side of the seventh axis, at least a part of the extension part 911318 is moved toward one side of the two axes. It is moved and the clamp unit 91131 is rotated and can be switched to an outward moving state.
  • the first picker device 41 horizontal loading unloading device or package cutting
  • the clamp unit 91131 moves outward, so the conversion kit 9111 can be vacuum-sucked, and the first picker device 41 is converted to the loading and unloading device.
  • the grip of the conversion kit (9111) by the clamp (9113) of the first picker unit (41) by the cylinder is released and the conversion 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the cylinder The grip of the conversion kit 9111 by the clamp 9113 of the first picker device 41 is released, and the clamp 9113 of the package cutting device 1 by the protrusion 9114 of the first picker device 41 ) Is switched to the outer moving state, so that the conversion kit 9111 can be placed on the package cutting device 1.
  • the clamp The unit 91131 can be guided by the protruding portion 9114 of the neighboring suction module 911 in an outer moving state.
  • the clamp unit 91131 is
  • the sound pressure transmission plate structure 9112 may include a plurality of first protrusions 91123 protruding toward one side in the axial direction.
  • the first protrusion (91123) of the negative pressure transmission plate structure (9112) may be formed at different positions.
  • a pair of negative pressure transmission plate structures 9112 of the first to third picker devices 41, 42, 43 The line connecting the agenda first protrusion (91123) and the pair of first protrusions (91123) of the negative pressure transmission plate structure (9112) of the package cutting device (1), the drying device (2) and the vision table (3) connect each other.
  • the first protrusions 91123 include first to third picker devices 41, 42, 43, package cutting device 1, drying device 2, and vision table 3, each of the negative pressure transmission plate structures 9112
  • a plurality of holes 91112 into which at least a part of the first protrusion 91123 is inserted may be formed in the conversion kit 9111.
  • a pair of first protrusions 91123 of the negative pressure transmission plate structure 9112 may be formed at positions corresponding to each. Accordingly, four holes 91112 may be formed, and the first to third picker devices 41 , 42, 43)
  • the negative pressure transmission plate structure (9112) is a package cutting device (1), 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574 When approaching to pick up or place a conversion kit (9111) on the negative pressure transmission plate structure (9112) of the drying unit (2) and the vision table (3), Two pairs of first
  • the protrusion 91123 can be inserted into each of the four holes 91112.
  • the conversion kit 9111 is a negative pressure transmission plate by engaging the first protrusion 91123 and the hole 91112.
  • the hole 91112 can be formed in a form that passes through the conversion kit 911 in the biaxial direction, or The kit 911 may be formed on the rim in the form of a groove recessed from the outside to the inside.
  • the sound pressure transmission plate structure 9112 of the first to third picker devices 41, 42, 43 is a second protrusion 91126 protruding in one side in the axial direction.
  • the negative pressure transmission plate structure 9112 of the package cutting device 91, the drying device 2, and the vision table 3 is a second
  • the arrangement of the conversion kit (9111) for the suction module (911) of the first to third picker devices (41, 42, 43) When the first to third picker devices 41, 42, 43 are placed on the package cutting device (1), the drying device (2) and the conversion kit (9111) of the vision table (3), The negative pressure transmission plate structure (9112) of the first to third picker devices (41, 42, 43) by the insertion of the second protrusion (91126) and the hole (91116) is replaced with a package cutting device (1), a drying device (2) and The conversion kit (9111) of the vision table (3) can be guided and placed in the correct position, and the conversion kit (9111) is packaged with a cutting device (1), a drying device (2) and a negative pressure transfer plate of the vision table (3).
  • the structure 9112 can be placed, or a plurality of packages can be accurately placed on the conversion kit 9111 of the package cutting device 1, the drying device 2, and the
  • the conversion kit (9111) is mounted on the negative pressure transmission plate structure (9112) by vacuum adsorption of the negative pressure transmission plate structure (9112), and the conversion kit (9111) and the negative pressure transmission plate structure ( The removable state of the 9112) can be automatically formed, and the conversion kit (9111) can be removed by vacuum adsorption with a picker device when it is in a removable state by releasing the vacuum adsorption, and the picker device places the conversion kit (9111).
  • vacuum adsorption resumes, and the conversion kit (9111) can be automatically fixed to the negative pressure transmission plate structure (9112).
  • the adsorption module 911 of the second system physically supports the conversion kit 9111
  • the negative pressure transmission plate structure (9112) and the conversion kit improves the bonding force of the (9111) and when placing or removing the sound pressure transmission plate structure (9112) of the conversion kit (9111) 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit (9111) can be removed. Accordingly, even if the air adsorption caused by an unexpected problem is interrupted, the conversion kit (9111) can be switched off.
  • the kit 9111 can be prevented from being unexpectedly removed from the negative pressure transmission plate structure 9112.
  • the conversion kit (9111) is a vacuum hole
  • the conversion kit (9111) is shaken or moved on the negative pressure transmission plate structure (9112) when the discarded air is supplied to the inside. If the first adsorption module is used, the conversion kit (9111) is removed by the clamp (9113). Since it is gripped and fixed to the negative pressure transmission plate structure 9112, the occurrence of the above problem can be prevented.
  • the conversion kit 9111 includes information on the conversion kit 9111 (for example, size information of the package seating portion of the conversion kit 9111 according to the package size, angular adsorption) Identification information may be marked so that the type of the conversion kit 9111 suitable for the module) can be identified, the first picker device 41 may be equipped with a sensor that scans such identification information, and the first picker device 41 Conversion kit (9111) withdrawn from the loading and unloading device by scanning of the sensor is suitable for conversion
  • the conversion kit 9111 may be picked up, and if the conversion kit 9111 is not suitable, the pickup may be stopped.
  • the conversion kit 9111 can be taken out from the loading unloading device to pick up the conversion kit 9111 mounted on the rail (not shown).
  • the first picker device 41 rotates, the first picker device 41 can be moved to hold the conversion kit 9111 disposed at the shifted angle so that the conversion kit 9111 has a home position.
  • the adsorption module 911 (hereinafter referred to as the “first adsorption module”) 911 according to the first embodiment of the present application applied to the second system described above.
  • the first adsorption module ( Regarding the description of 911), the same reference numerals are used for the configurations that are the same as or similar to the configurations described in this second system and the second adsorption module to be described later, and overlapping explanations will be abbreviated or omitted.
  • the first adsorption module 911 is formed with a plurality of vacuum holes 91111 in the ⁇ axis direction.
  • the first adsorption module 911 includes a negative pressure transmission plate structure 9112.
  • the sound pressure transmission plate structure 912 is converted on one side in the 7-axis direction.
  • a kit 9111 is disposed and communicates the negative pressure generator and the vacuum hole 91111 of the conversion kit 9111.
  • the first suction module 911 includes a clamp 9113.
  • the clamp 9113 is provided so that at least a portion thereof protrudes toward one side in the ⁇ axial direction of the negative pressure transmission plate structure 912, and is in a basic state It is possible to hold the conversion kit 9111 at the time.
  • the first adsorption module 911 includes a protruding portion 9114.
  • the protrusion 9114 may be formed at a position corresponding to the clamp unit 91131 of the adjacent adsorption module 9114.
  • the clamp (9113) is provided with at least protrude from the second axial side of the part of the negative pressure transmission plate structure (9112), the projections (911 319) formal type which projects inwardly toward the portion assigned a conversion kit 9111 It may include a clamp unit (91131) to be formed.
  • the clamp (9113) is the clamp unit (91131) joint pressure transmission plate
  • It may include a hinge unit (91132) that makes the longitudinal direction of the structure (9112) rotatable about the axis.
  • clamp (9113) is clamped inward (in the direction toward the conversion kit (9111))
  • a recessed portion 91119 through which the projections 911319 of the clamping unit 91131 can be fastened, may be formed.
  • the recessed portion 91119 is an outer surface of the conversion kit 9111. It may be formed in a form that is recessed inward on the (face facing outward). In addition, the recessed portion 91119 may have a long hole shape. In addition, the outer portion of the recessed portion 91119 has a protrusion 911319 of the clamp unit 91131 A step that protrudes in the ⁇ -axis direction can be formed so that the clamp unit 91131 can be fastened.
  • the protrusion 911319 can be engaged with the stepped jaw.
  • the clamp unit 91131 can be engaged with the recessed portion 91119 so that the conversion kit 9111 can be gripped in the basic state.
  • a guide groove 911312 for guiding entry into the protrusion 9114 of the neighboring suction module 911 may be formed in the inner portion of the protrusion 911319 of the clamp unit 91131.
  • the protrusion (protrusion) 9114) can have a wedge shape.
  • the neighbor adsorption module 911 is moved to the guide groove 911312 in the proximity of the two axes.
  • the protrusion 9114 enters the guide groove 911312, and the protrusion 9114 can enter the guide groove 911312 of the clamp unit 91131 of the neighbor suction module 911, and accordingly, the suction module 911
  • the clamp unit 91131 increases as the amount of entry into the inside of the clamp unit 91131 of the suction module 911 of the protrusion 9114 of the neighbor suction module 911 increases. Is moved outward, and as the amount of entry into the inner side of the clamp unit 91131 of the neighbor suction module 911 of the protrusion 9114 of the suction module 911 increases, the clamp unit 91131 of the neighbor suction module 911 It is also possible to move outwardly.
  • the clamp 9113 of the suction module 911 and the clamp 9113 of the neighboring suction module 911 can be in a disengaged state.
  • the outside of the clamp unit 91131 can be moved outward.
  • the elastic member 91133 located on the outer surface of the clamp unit 91131 can be compressed by an external force to the outside, and the clamp 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the unit (91131) can be subjected to an internal external force by the elastic restoring force of the elastic member (91133), and accordingly, to the outside of the clamp unit (91131).
  • the unexpected force is less than or equal to the inward external force by the elastic member 91133, the clamp unit 91131 can be restored to its position by the external force acting on the elastic member 91133 in its basic state.
  • the conversion kit (9111) can be vacuum-adsorbed.
  • the low conversion kit (9111) can be removed by vacuum adsorption, and the picker device can place the conversion kit (9111), and when the new conversion kit (9111) is placed on the negative pressure transmission plate structure (9112), vacuum adsorption resumes and automatic
  • the conversion kit (9111) can be fixedly mounted on the negative pressure transmission plate structure (9112).
  • the first adsorption module physically grips the conversion kit 9111 and releases the grip by the protrusions 9114 of the neighboring adsorption module 911 and the neighboring adsorption module 911 when they are close in the ⁇ -axis direction.
  • the clamp (9113) the negative pressure transmission plate
  • the conversion kit 9111 improves the bonding force of the structure 9112 and the conversion kit 9111, and when the conversion kit 9111 is placed or removed from the sound pressure transmission plate structure 9112, the conversion kit 9111 is released by releasing the gripping force of the conversion kit 9111. Can be made removable. Accordingly, even if air adsorption caused by an unexpected problem is stopped, the conversion
  • the kit 9111 can be prevented from being unexpectedly removed from the negative pressure transmission plate structure 9112.
  • the conversion kit (9111) is shaken or moved on the negative pressure transmission plate structure (9112) when the discarded air is supplied to the inside. If the first adsorption module is used, the conversion kit (9111) is removed by the clamp (9113). Since it is gripped and fixed to the negative pressure transmission plate structure 9112, the occurrence of the above problem can be prevented.
  • the first adsorption module 911 is a second picker device 42, a third picker device 43, and a package cutting device of the conversion kit automatic exchange system according to an embodiment of the present application. It can be applied as a drying device (2) and a suction module (911) of the vision table (3).
  • the present application includes an adsorption module 911 according to the first embodiment of the present application described above.
  • a picker device according to an embodiment of the present application is provided.
  • the picker device according to an embodiment of the present application includes a second picker device 42 and a third picker device 43 of the automatic conversion kit system according to an embodiment of the present application.
  • the present application includes an adsorption module 911 according to the first embodiment of the present application described above
  • a table part according to an embodiment of the present application is included.
  • the table part according to an embodiment of the present application is applied as a package cutting device (1), a drying device (2) and a vision table (3) of the first or second system of the present application. As this has been described above, detailed explanations are omitted.
  • the module (hereinafter referred to as ⁇ the second adsorption module'') 911 will be described, provided that it is the same as the configuration described in the second system and the first adsorption module in the previous section with respect to the description of the second adsorption module 11 or
  • the same drawing code shall be used, and overlapping explanations shall be abbreviated or omitted.
  • the second adsorption module 911 is formed with a plurality of vacuum holes 91111 in the ⁇ axis direction.
  • the second adsorption module 911 includes a negative pressure transmission plate structure 9112.
  • the sound pressure transmission plate structure 912 is converted on one side in the 7-axis direction.
  • a kit 9111 is placed and communicates the sound pressure generator and the vacuum hole 91111 of the conversion kit 9111.
  • the second adsorption module 911 includes a clamp 9113.
  • the clamp 9113 is provided so that at least a portion of it protrudes toward one side in the ⁇ axial direction of the negative pressure transmission plate structure 912, the basic state The time conversion kit (9111) can be held.
  • the second adsorption module 911 includes a protruding portion 9114.
  • the neighboring suction module 911 is a suction module 911 )
  • the protrusion (9114) can have a wedge shape.
  • the protrusion 9114 enters the guide groove 911312, and the protrusion 9114 can enter the guide groove 911312 of the clamp unit 91131 of the neighbor suction module 911, and accordingly, the suction module 911 As the over-neighbor adsorption module 911 gets closer to each other, the neighbor adsorption module 911 of the protrusion 9214 of the adsorption module 911 increases in the amount of entry into the clamp unit 91131 to the inside of the neighbor adsorption module 911.
  • the clamp unit (91131) of) is also movable outward. Accordingly, the clamp (9113) of the neighboring suction module (911) can be released from its grip.
  • the clamp (9113) is provided with at least protrude from the second axial side of the part of the negative pressure transmission plate structure (9112), the projections (911 319) formal type which projects inwardly toward the portion assigned a conversion kit 9111 It may include a clamp unit (91131) to be formed.
  • the projection (911319) of the clamp unit (91131) is on the outer surface of the conversion kit (9111) 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • a cross-fastening recess (91119) can be formed.
  • the recess (91119) is recessed inward to the outer surface (face facing outward) of the conversion kit (9111).
  • the recessed portion 91119 may have a long hole shape.
  • the protrusion 911319 of the clamp unit 91131 is protruded in the ⁇ -axis direction so that the outer portion of the recessed portion 91119 can be engaged and fastened.
  • the stepped jaws can be formed. of the clamp unit 91131
  • the protrusion 911319 can be engaged with the stepped jaw.
  • the clamp unit 91131 can be engaged with the recessed portion 91119 so that the conversion kit 9111 can be gripped in the basic state.
  • clamp (9113) is the clamp unit (91131) joint pressure transmission plate
  • the clamp (9113) may have a lateral movement state or a basic state.
  • It may include a guiding cylinder 9116.
  • an extension part extending inward may be formed on the other side of the two shafts of the clamp unit 91131, and a cylinder 9116 may be provided on the other side of the shaft of the extension part.
  • the cylinder (9116) can be driven in the two-axis direction, and when the cylinder (9116) is moved to one side of the two-axis and an external force is applied to the one side of the two-axis to the extension, at least part of the extension is moved to one side of the two- axis, and the clamp unit 91131 is It is rotated and can be switched to an outward movement state.
  • the elastic member (91133) located on the outer surface of the clamp unit (91131) is caused by external force. Can be compressed, clamp
  • an external force inward may be applied by the elastic restoration force of the elastic member 91133, and accordingly, the external force to the outside by the elastic member 91133 is less than or equal to the inward external force by the elastic member 91133.
  • the clamp unit 91131 When the clamp unit 91131 is in its basic state, the position can be restored by an external force acting on the elastic member 91133.
  • the clamp unit (91131) is rotated by the external force applied by the cylinder (9116), and the end facing one side in the ⁇ axis direction may move outward to be in an outward moving state, and at this time, the elastic member (91133) is the clamp unit It can be compressed by receiving an external force from the outside by the movement of the 91131 to the outside, and can exert an external force from the inside to the clamp unit 91131.
  • the external force to the outside against the clamp unit 91131 is elastic.
  • the unit 91131 can be restored to its position by an external force acting on the elastic member 91133 to its basic state.
  • the protrusion 9114 may be formed at a position corresponding to the clamp unit 91131 of the neighbor suction module 911.
  • the clamp unit 91131 corresponds to the protrusion of the neighbor suction module 911. It can be formed in the position. Accordingly, the second adsorption module 911 and 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the protrusion (9114) of the neighboring suction module 911 in the 7-axis direction is the neighboring clamp unit (clamp unit (91131) of the neighboring suction module 911)) It enters into the inside of and can exert an external force on the neighboring clamp unit (91131).
  • the protrusion (9114) is directed to the inside of the neighboring clamp unit (91131) through the guide groove of the neighboring clamp unit (91131). As it enters, it exerts an external force on the neighboring clamp unit 91131, and by opening the end of the neighboring clamp unit 91131 in the ⁇ -axis direction and the conversion kit 9111, the neighboring clamp unit 91131 can be switched to the outward moving state.
  • the second adsorption module 911 since the conversion of the clamp unit 91131 to the outer moving state can be performed by the cylinder 9116, the second adsorption module 911 When the over-neighbor suction module 911 is approached in the X-axis direction, the clamp unit 91131 has a protruding part 9114 so that interference between the clamp unit 91131 and the protruding part 9114 of the neighboring suction module 911 does not occur.
  • An acceptable receiving part (911315) may be formed.
  • the clamp unit 91131 is the neighbor suction module 911 It may not be changed to the outward moving state by the protrusion (9114) of.
  • the negative pressure transmission plate structure 9112 is capable of vacuum adsorption of the conversion kit 9111.
  • the second adsorption module the conversion kit 9111 by vacuum adsorption of the negative pressure transmission plate structure 9112 so that the replacement of the conversion kit 9111 is automatically made, the negative pressure transmission plate structure 9112 ), and by controlling the presence or absence of vacuum adsorption, the conversion kit (9111) and the negative pressure transmission plate structure (9112) can be automatically formed in a removable state, and when the vacuum adsorption is released and the removal is possible, the picker device
  • the low conversion kit (9111) can be removed by vacuum adsorption, and the picker device can place the conversion kit (9111), and when the new conversion kit (9111) is placed on the negative pressure transmission plate structure (9112), vacuum adsorption resumes and automatic
  • the conversion kit (9111) can be fixedly mounted on the negative pressure transmission plate structure (9112).
  • the second adsorption module physically grips the conversion kit 9111 and releases the grip by the protrusions 9114 of the neighboring adsorption module 911 and the neighboring adsorption module 911 when they are close in the ⁇ -axis direction.
  • the clamp (9113) the negative pressure transmission plate
  • the conversion kit 9111 improves the bonding force between the structure 9112 and the conversion kit 9111, and when the conversion kit 9111 is placed or removed from the negative pressure transmission plate structure 9112, the conversion kit 9111 is released by releasing the gripping force of the conversion kit 9111. Can be made removable. Accordingly, it is possible to prevent the conversion kit 9111 from being unexpectedly removed from the negative pressure transmission plate structure 9112 even if the air adsorption caused by an unexpected problem is stopped.
  • the conversion kit (9111) is a conversion kit (9111) is a negative pressure transmission plate when the air is supplied to the inside of the vacuum hole 2020/175863 1»(:1 ⁇ 1 ⁇ 2020/002574
  • the conversion kit (9111) is gripped by the clamp (9113) by this first adsorption module and negative pressure Since it is fixed to the transmission plate structure 9112, the occurrence of the above problem can be prevented.
  • the present application includes an adsorption module 911 according to the second embodiment of the present application described above.
  • a picker device according to an embodiment of the present application is provided.
  • the picker device according to an embodiment of the present application can be applied as the first picker device 41 of the automatic conversion kit exchange system according to an embodiment of the present application. As described above, detailed descriptions are omitted.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention porte sur un module de table. Le module de table comprend : un kit de conversion dans lequel une pluralité de trous sous vide sont formés dans une direction d'axe Z ; et une structure de plaque de transfert de pression négative de table qui a le kit de conversion disposé sur l'autre surface dans la direction de l'axe Z, et qui permet à un générateur de pression négative et aux trous sous vide de communiquer les uns avec les autres. La structure de plaque de transfert de pression négative de table peut aspirer sous vide le kit de conversion. Tandis que la structure de plaque de transfert de pression négative de table est une aspiration sous vide du kit de conversion, le kit de conversion est fixé à la structure de plaque de transfert de pression négative de table. Lorsque l'aspiration sous vide du kit de conversion par la structure de plaque de transfert de pression négative de table est arrêtée, le kit de conversion peut être retiré de la structure de plaque de transfert de pression négative de table.
PCT/KR2020/002574 2019-02-26 2020-02-21 Module de table et appareil pour échanger automatiquement un kit de conversion WO2020175863A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
SG11202107576RA SG11202107576RA (en) 2019-02-26 2020-02-21 Table module and apparatus for automatically exchanging conversion kit
CN202080010565.1A CN113330545A (zh) 2019-02-26 2020-02-21 工作台模块以及转换套件自动更换装置

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR10-2019-0022387 2019-02-26
KR10-2019-0022654 2019-02-26
KR1020190022387A KR102057331B1 (ko) 2019-02-26 2019-02-26 테이블 모듈 및 컨버전 키트 자동 교환 장치
KR1020190022654A KR102095728B1 (ko) 2019-02-26 2019-02-26 컨버전 키트 자동 교환 시스템
KR1020190111576A KR102137996B1 (ko) 2019-09-09 2019-09-09 흡착 모듈
KR10-2019-0111576 2019-09-09
KR1020190111578A KR102167500B1 (ko) 2019-09-09 2019-09-09 흡착 모듈
KR10-2019-0111581 2019-09-09
KR1020190111581A KR102138003B1 (ko) 2019-09-09 2019-09-09 컨버전 키트 자동 교환 시스템
KR10-2019-0111578 2019-09-09

Publications (1)

Publication Number Publication Date
WO2020175863A1 true WO2020175863A1 (fr) 2020-09-03

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Application Number Title Priority Date Filing Date
PCT/KR2020/002574 WO2020175863A1 (fr) 2019-02-26 2020-02-21 Module de table et appareil pour échanger automatiquement un kit de conversion

Country Status (3)

Country Link
CN (1) CN113330545A (fr)
SG (1) SG11202107576RA (fr)
WO (1) WO2020175863A1 (fr)

Citations (5)

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KR20060016314A (ko) * 2004-08-17 2006-02-22 삼성전자주식회사 칩 스케일 패키지 분리 및 분류 장치의 척 테이블
KR20070090130A (ko) * 2007-08-16 2007-09-05 (주)선일테크론 화학기계적 연마장치용 진공 장착식 리테이너 링 구조물 및그 장착방법
KR101340831B1 (ko) * 2012-10-30 2013-12-11 세메스 주식회사 콜릿 교체 장치
KR20140066877A (ko) * 2012-11-23 2014-06-03 세메스 주식회사 다이 픽업 유닛 및 이를 포함하는 다이 본딩 장치
KR20180104800A (ko) * 2017-03-13 2018-09-27 한미반도체 주식회사 반도체 제조장치 및 이의 제어방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160110083A (ko) * 2015-03-11 2016-09-21 (주)제이티 픽커

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060016314A (ko) * 2004-08-17 2006-02-22 삼성전자주식회사 칩 스케일 패키지 분리 및 분류 장치의 척 테이블
KR20070090130A (ko) * 2007-08-16 2007-09-05 (주)선일테크론 화학기계적 연마장치용 진공 장착식 리테이너 링 구조물 및그 장착방법
KR101340831B1 (ko) * 2012-10-30 2013-12-11 세메스 주식회사 콜릿 교체 장치
KR20140066877A (ko) * 2012-11-23 2014-06-03 세메스 주식회사 다이 픽업 유닛 및 이를 포함하는 다이 본딩 장치
KR20180104800A (ko) * 2017-03-13 2018-09-27 한미반도체 주식회사 반도체 제조장치 및 이의 제어방법

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SG11202107576RA (en) 2021-08-30

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