WO2020111709A1 - Connecteur pour connexion électrique - Google Patents

Connecteur pour connexion électrique Download PDF

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Publication number
WO2020111709A1
WO2020111709A1 PCT/KR2019/016324 KR2019016324W WO2020111709A1 WO 2020111709 A1 WO2020111709 A1 WO 2020111709A1 KR 2019016324 W KR2019016324 W KR 2019016324W WO 2020111709 A1 WO2020111709 A1 WO 2020111709A1
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WO
WIPO (PCT)
Prior art keywords
connector
elastic
vertical direction
carbon nanotubes
electromagnetic wave
Prior art date
Application number
PCT/KR2019/016324
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English (en)
Korean (ko)
Inventor
정영배
Original Assignee
주식회사 아이에스시
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Priority to CN201980077828.8A priority Critical patent/CN113169495B/zh
Publication of WO2020111709A1 publication Critical patent/WO2020111709A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R33/00—Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
    • H01R33/74—Devices having four or more poles, e.g. holders for compact fluorescent lamps
    • H01R33/76—Holders with sockets, clips, or analogous contacts adapted for axially-sliding engagement with parallely-arranged pins, blades, or analogous contacts on counterpart, e.g. electronic tube socket
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/646—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00 specially adapted for high-frequency, e.g. structures providing an impedance match or phase match

Definitions

  • the present disclosure relates to a connector that contacts two electronic devices and electrically connects the two electronic devices.
  • a connector that is in contact with the device under test and the inspection device to electrically connect the device under test and the inspection device is used in the art.
  • the connector transmits the electrical signal of the inspection device to the device under test, and transmits the electrical signal of the device under test to the inspection device.
  • a conductive rubber sheet is known in the art.
  • the conductive rubber sheet can be elastically deformed in response to an external force applied to the device under test.
  • the conductive rubber sheet has a plurality of conductive parts that electrically connect the device under test and the inspection device and transmit electrical signals, and an insulating part that separates and insulates the conductive parts.
  • the insulation may be made of cured silicone rubber.
  • Korean Patent Application Publication No. 10-2010-0020793 proposes that a ground plate made of a metal material such as stainless steel is embedded in an insulating portion.
  • the above-mentioned documents require a process of embedding a grounding plate of a metallic material into an insulating part and a process of grounding the grounding plate, thereby increasing the number of manufacturing processes and the manufacturing cost of the connector.
  • the elasticity of the connector must be maintained at a predetermined level or higher, but the ground plate embedded in the insulating portion significantly degrades the elasticity of the connector.
  • a connector such as a conductive rubber sheet needs to be provided with a high level of electromagnetic wave shielding structure for conductive parts.
  • it is important that such an electromagnetic wave shielding structure is provided with a low cost and simple structure in the connector without deteriorating the elasticity of the connector.
  • the electromagnetic wave shielding structure of the connector according to the prior art not only increases the number of manufacturing processes of the connector, but also deteriorates the elasticity of the connector.
  • One embodiment of the present disclosure provides a connector that electrically connects two electronic devices and has an electromagnetic wave shielding structure.
  • One embodiment of the present disclosure provides a connector that electrically connects two electronic devices and has a conductive portion supporting structure and an electromagnetic wave shielding structure that are simultaneously molded.
  • Embodiments of the present disclosure relate to a connector positioned between two electronic devices to electrically connect the two electronic devices.
  • the connector according to an embodiment includes a plurality of elastic conductive parts and an elastic insulating part.
  • the plurality of elastic conductive portions can be conductive in the vertical direction.
  • the elastic insulation part spaces and insulates the plurality of elastic conductive parts in the horizontal direction.
  • the elastic insulating portion includes a plurality of electromagnetic wave shielding portions.
  • the plurality of electromagnetic wave shielding parts include a plurality of carbon nanotubes having magnetic properties distributed and arranged along the vertical direction.
  • the elastic insulation portion includes a plurality of first separation portions surrounding each of the plurality of elastic conductive portions, extending in the vertical direction, and separating the plurality of elastic conductive portions and the plurality of electromagnetic wave shielding portions in the horizontal direction.
  • the plurality of electromagnetic wave shielding portions have a cylindrical shape extending in the vertical direction, and the plurality of first separation portions are respectively located inside each of the plurality of electromagnetic wave shielding portions.
  • the elastic insulation portion includes a second spaced portion disposed at the top or bottom of each electromagnetic wave shield.
  • the connector includes an insulating member.
  • the insulating member includes through holes corresponding to the plurality of elastic conductive portions, and is attached to the elastic insulating portion.
  • each of the plurality of carbon nanotubes includes a plurality of magnetic particles.
  • a plurality of carbon nanotubes are distributed and arranged along the vertical direction by a force in which a plurality of magnetic particles are arranged in a magnetic field.
  • the plurality of magnetic particles are located inside each of the plurality of carbon nanotubes.
  • the plurality of magnetic particles are chemically bonded to the carbon atom outside each of the plurality of carbon nanotubes.
  • each of the plurality of carbon nanotubes has a plurality of hexagonal holes, and each of some of the plurality of hexagonal holes has one of a plurality of magnetic particles.
  • the plurality of magnetic particles is made of any one of nickel, cobalt, chromium, iron, iron carbide, iron oxide, chromium oxide, nickel oxide, nickel cobalt oxide, cobalt iron, and single molecule magnetic materials.
  • one of the two electronic devices is an inspection device and the other of the two electronic devices is a device under test that is inspected by the inspection device.
  • the elastic insulating portion a plurality of electromagnetic waves from a first liquid molding material including a plurality of carbon nanotubes each containing a plurality of magnetic particles and a first liquid silicone rubber material in which a plurality of carbon nanotubes are dispersed It is formed together with the shield.
  • the plurality of electromagnetic wave shielding parts are formed by applying a magnetic field in the vertical direction to the first liquid molding material, and by distributing and arranging a plurality of carbon nanotubes along the vertical direction by a force in which magnetic particles are arranged in the magnetic field.
  • a plurality of elastic conductive parts, a magnetic field is applied in a vertical direction to a second liquid molding material including a plurality of conductive metal particles and a second liquid silicone rubber material in which a plurality of conductive metal particles are dispersed, and a plurality of conductive metal particles are in the vertical direction It is formed by being contacted so as to be electrically conductive.
  • a magnetic field is applied to the first liquid molding material in the vertical direction by each pair of ring-shaped magnet units disposed opposite to each other in the vertical direction, so that each of the plurality of electromagnetic wave shields may be formed in a cylindrical shape. have.
  • a connector according to an embodiment of the present disclosure includes an elastic insulation part enclosing an electromagnetic wave shielding part. Since the electromagnetic shielding portion may be formed when the elastic insulating portion is formed, the connector of one embodiment may have an electromagnetic shielding structure in a simple structure without a separate manufacturing process. According to one embodiment, the electromagnetic shield included in the elastic insulating portion is made of a plurality of carbon nanotubes, does not degrade the elasticity of the elastic insulating portion. According to one embodiment, the electromagnetic wave shield of the elastic insulation portion is made up of a plurality of carbon nanotubes which are distributed and arranged along the vertical direction and have magnetic properties. Due to the electromagnetic shielding portion of this structure, the connector of one embodiment may have an improved electromagnetic shielding effect and an improved crosstalk prevention effect.
  • each of the carbon nanotubes having magnetic properties includes a plurality of magnetic particles, and the carbon nanotubes having magnetic particles have an excellent electromagnetic shielding effect than pure carbon nanotubes.
  • the carbon nanotubes having magnetic particles may be disposed in a desired region in the connector using a magnetic field applied in the vertical direction.
  • the electromagnetic wave shielding properties can be changed to various levels by changing the size of the electromagnetic wave shielding portion.
  • FIG. 1 is a cross-sectional view schematically showing an example to which a connector according to an embodiment is applied.
  • FIG. 2 is a plan view schematically showing a connector according to an embodiment.
  • FIG 3 is a cross-sectional view schematically showing a part of a connector according to an embodiment.
  • FIG. 4 is a cross-sectional view schematically showing another example in which carbon nanotubes are distributed and arranged along the vertical direction.
  • FIG. 5 is a cross-sectional view schematically showing an example of manufacturing the connector shown in FIG. 2.
  • FIG. 6 is a cross-sectional view schematically showing an example of manufacturing the connector shown in FIG. 2, and shows a material corresponding to the connector.
  • FIG. 7 shows an example in which a through hole corresponding to the elastic conductive portion is formed in the material shown in FIG. 6.
  • FIG. 8 shows an example in which a liquid molding material is injected into the through-hole shown in FIG. 7 to form a connector according to an embodiment.
  • FIG. 9 is a cross-sectional view schematically showing a modification of the connector according to an embodiment.
  • FIG. 10 is a cross-sectional view schematically showing a connector according to another embodiment.
  • FIG. 11 is a cross-sectional view schematically showing an example of manufacturing the connector shown in FIG. 10.
  • FIG. 12 is a cross-sectional view schematically showing an example of manufacturing the connector shown in FIG. 10, and shows a material corresponding to the connector.
  • FIG. 13 illustrates an example in which a through hole corresponding to an elastic conductive portion is formed in the material shown in FIG. 12.
  • FIG. 14 illustrates an example in which a liquid molding material is injected into the through-hole shown in FIG. 13 to form a connector according to another embodiment.
  • 15 is a perspective view schematically showing a part of a connector according to another embodiment.
  • 16 is a cross-sectional view schematically showing a part of a connector according to another embodiment.
  • 17 is a cross-sectional view schematically showing an example of manufacturing the connector shown in FIG. 15.
  • FIG. 18 shows an example in which a through hole corresponding to an elastic conductive portion is formed in a material.
  • 19 is a cross-sectional view schematically showing a modification of the connector according to another embodiment.
  • FIG. 20 shows an example of a carbon nanotube containing magnetic particles.
  • FIG. 21 schematically illustrates an example of forming the carbon nanotube illustrated in FIG. 20.
  • FIG. 22 schematically shows another example of forming the carbon nanotube illustrated in FIG. 20.
  • FIG. 23 schematically shows another example of forming the carbon nanotube illustrated in FIG. 20.
  • FIG. 24 schematically shows another example of forming the carbon nanotube illustrated in FIG. 20.
  • FIG. 25 schematically shows another example of forming the carbon nanotube illustrated in FIG. 20.
  • 26 schematically shows a carbon nanotube having a closed end.
  • FIG. 27 shows another example of a carbon nanotube containing magnetic particles.
  • FIG. 28 schematically illustrates an example of forming the carbon nanotube illustrated in FIG. 27.
  • FIG. 29 schematically shows another example of forming the carbon nanotube illustrated in FIG. 27.
  • FIG. 30 shows another example of a carbon nanotube containing magnetic particles.
  • FIG. 31 schematically shows an example of forming the carbon nanotube illustrated in FIG. 30.
  • a component when referred to as being “connected” or “coupled” to another component, the component is capable of being directly connected to or connected to the other component, or new It should be understood that they can be connected or combined through other components.
  • the "direction" direction directive is based on the direction in which the connector is positioned relative to the inspection device, and the "downward” direction directive means the opposite direction upward. It should be understood that the direction directives of the "up and down direction” used in the present disclosure include the up direction and the down direction, but do not mean a specific one of the up direction and the down direction.
  • one of the two electronic devices may be an inspection device, and the other of the two electronic devices may be an inspection device to be inspected by the inspection device.
  • the application example is not limited to this.
  • the connector of the embodiments can be used to effect electrical connection through contact to any two electronic devices that require electrical connection.
  • the connectors of the embodiments When the connectors of the embodiments are applied to the inspection device and the device under test, the connectors of the embodiments can be used for electrical connection between the inspection device and the device under test during electrical inspection of the device under test.
  • the connector of the embodiments may be used for a final and timely inspection of the device under test in a post process during the manufacturing process of the semiconductor device.
  • the example of the inspection to which the connector of the embodiments is applied is not limited to the above-described inspection.
  • 1 shows an example in which a connector according to an embodiment is applied.
  • 1 shows an exemplary shape of a connector, an electronic device on which the connector is disposed, and an electronic device in contact with the connector, for description of the embodiment.
  • the connector 100 is disposed between two electronic devices, and performs electrical connection between the two electronic devices through contact.
  • one of the two electronic devices may be the inspection device 10, and the other may be the device under test 20 inspected by the inspection device 10.
  • the connector 100 is in contact with the device 10 and the device under test 20, respectively, and electrically connects the device 10 and the device under test 20 with each other. Order.
  • the connector 100 may be coupled to the test socket 30 as a sheet-shaped structure.
  • the test socket 30 may have a frame 31 that holds and supports the connector 100, and may be removably attached to the socket housing 40 through the frame 31.
  • the socket housing 40 may be removably mounted to the inspection device 10.
  • the socket housing 40 accommodates the device under test 20 carried by the transport device to the device 10 and places the device under test 20 in the device 10.
  • the device under test 20 may be a semiconductor package, but is not limited thereto.
  • the semiconductor package is a semiconductor device in which a semiconductor IC chip, a plurality of lead frames, and a plurality of terminals are packaged in a hexahedron shape using a resin material.
  • the semiconductor IC chip may be a memory IC chip or a non-memory IC chip.
  • As the terminal a pin or a solder ball can be used.
  • the device under test 20 illustrated in FIG. 1 has a plurality of hemispherical terminals 21 on its lower side.
  • the inspection apparatus 10 may inspect electrical characteristics, functional characteristics, operating speed, etc. of the device under test 20.
  • the inspection device 10 may have a plurality of terminals 11 capable of outputting an electrical test signal and receiving a response signal in a board on which inspection is performed.
  • the connector 100 may be arranged to contact the terminal 11 of the inspection device 10 by the test socket 30 and the socket housing 40.
  • the terminal 21 of the device under test 20 is electrically connected to the terminal 11 of the corresponding inspection device 10 through the connector 100. That is, the connector 100 is electrically connected to the terminal under test (10) by the connector 100 by electrically connecting the terminal 21 of the device under test and the terminal 11 of the device under test in the vertical direction (VD). 20) is performed.
  • the connector 100 may be made of an elastic polymer material, and the connector 100 may have elasticity in the vertical direction (VD) and the horizontal direction (HD).
  • VD vertical direction
  • HD horizontal direction
  • the connector 100 may be elastically deformed in the downward direction and the horizontal direction HD.
  • the external force may be generated by the pusher device pressing the device under test 20 toward the inspection device 10.
  • the terminal 21 of the device under test and the connector 100 can be contacted in the vertical direction (VD), and the connector 100 and the terminal 11 of the inspection device are contacted in the vertical direction (VD). Can be.
  • the connector 100 can be restored to its original shape.
  • the connector 100 includes a plurality of elastic conductive parts 110 and an elastic insulating part 120.
  • the plurality of elastic conductive parts 110 are positioned in the vertical direction VD, and are configured to be conductive in the vertical direction VD.
  • the elastic insulating part 120 separates the plurality of elastic conductive parts 110 from the horizontal direction HD and insulates the plurality of elastic conductive parts 110 from each other.
  • the elastic conductive portion 110 is in contact with the terminal 21 of the device under test at its upper end and in contact with the terminal 11 of the test device at its lower end. Accordingly, a conductive path in the vertical direction is formed between the terminal 11 and the terminal 21 corresponding to one elastic conductive portion 110 via the elastic conductive portion 110. Accordingly, the test signal of the inspection apparatus can be transmitted from the terminal 11 to the terminal 21 of the device under test 20 through the elastic conductive portion 110, and the response signal of the device under test 20 is the terminal ( From 21) may be transmitted to the terminal 11 of the inspection device 10 through the elastic conductive portion 110.
  • the upper and lower ends of the elastic conductive portion 110 may form the same plane as the upper and lower surfaces of the elastic insulating portion 120 or may slightly protrude therefrom.
  • the planar arrangement of the elastic conductive parts 110 may vary according to the planar arrangement of the terminals 21 of the device under test 20.
  • the elastic conductive parts 110 may be arranged in a matrix form or a pair of matrix forms within the rectangular elastic insulation part 120.
  • the elastic conductive parts 110 may be arranged in a plurality of rows along each side of the rectangular elastic conductive part 120.
  • the elastic insulation portion 120 is provided with a plurality of electromagnetic wave shielding portion 121 therein, the plurality of electromagnetic wave shielding portions 121 are disposed between the plurality of elastic conductive portions 110 and up and down It extends in the direction VD. That is, the elastic insulation unit 120 spaces and insulates the plurality of elastic conductive parts 110 in the horizontal direction HD while enclosing the plurality of electromagnetic wave shield parts 121.
  • the plurality of electromagnetic wave shielding parts 121 include a magnetic shielding material to shield electromagnetic waves from each elastic conductive part 110 and prevent crosstalk between adjacent elastic conductive parts 110.
  • FIGS. 2 to 19 schematically show the shape of the connector, the shape of the elastic conductive portion, the shape of the element constituting the elastic conductive portion, the shape of the elastic insulating portion, and the shape of the element constituting the electromagnetic wave shield, and these are selected for understanding the embodiment It is just an example.
  • FIG. 2 is a plan view showing a part of the connector of one embodiment
  • FIG. 3 is a cross-sectional view schematically showing a part of the connector of one embodiment. 2 and 3, the connector 100 according to an embodiment includes the above-described elastic conductive portion 110 and the above-described elastic insulating portion 120.
  • Each elastic conductive portion 110 functions as a conductive portion between the inspection apparatus and the device under test and performs signal transmission in the vertical direction VD.
  • the elastic conductive portion 110 may have a cylindrical shape extending in the vertical direction (VD). In this cylindrical shape, the diameter at the middle may be smaller than the diameter at the top and bottom.
  • Each elastic conductive portion 110 includes a plurality of conductive metal particles 111 that are conductively contacted in the vertical direction VD.
  • the conductive metal particles 111 that are electrically conductively contacted in the vertical direction form a conductive path that performs signal transmission in the vertical direction VD in the elastic conductive portion 110.
  • Between the conductive metal particles 111 may be filled with an elastic polymer material forming the elastic insulating portion 120.
  • each elastic conductive portion 110 has a particle holding portion 112 that holds the conductive metal particles 111 contacted in the vertical direction (VD).
  • the particle holding part 112 may be made of an elastic polymer material constituting the elastic insulating part 120, and the conductive metal particles 111 may be maintained in the shape of the elastic conductive part 110.
  • the elastic conductive portion 110 has elasticity in the vertical direction (VD) and the horizontal direction (HD1, HD2).
  • VD vertical direction
  • HD1, HD2 horizontal direction
  • the elastic conductive portion 110 may be slightly expanded in the horizontal direction (HD1, HD2), and the elastic insulating portion ( 120) may allow such expansion of the elastic conductive portion 110.
  • the conductive metal particles 111 may be formed by coating the surface of the core particles with a highly conductive metal.
  • the core particles may be made of a metal material such as iron, nickel, or cobalt, or may be made of a resin material having elasticity.
  • gold, silver, rhodium, platinum, chromium, and the like can be used as the highly conductive metal coated on the surface of the core particles.
  • the elastic insulation part 120 may form a rectangular elastic region of the connector 100.
  • the plurality of elastic conductive parts 110 are spaced apart from each other at equal intervals or at equal intervals in the horizontal directions HD1 and HD2 by the elastic insulation parts 120.
  • the elastic insulating part 120 is formed as one elastic body, and the plurality of elastic conductive parts 110 are embedded in the elastic insulating part 120 in the thickness direction (vertical direction VD) of the elastic insulating part 120. .
  • the elastic insulating part 120 is made of an elastic polymer material, and has elasticity in the vertical direction (VD) and the horizontal direction (HD).
  • the elastic insulating portion 120 not only maintains the elastic conductive portion 110 in its shape, but also maintains the elastic conductive portion 110 in the vertical direction.
  • the elastic insulation portion 120 may be made of a cured silicone rubber material.
  • a liquid silicone rubber is injected into a molding mold for molding the connector 100 and cured, so that the elastic insulation portion 120 can be formed.
  • a liquid silicone rubber material for molding the elastic insulating portion 120 an additive liquid silicone rubber, a condensed liquid silicone rubber, a liquid silicone rubber including a vinyl group or a hydroxy group, or the like can be used.
  • the liquid silicone rubber material may include dimethylsilicone raw rubber, methylvinylsilicone raw rubber, methylphenylvinylsilicone raw rubber, and the like.
  • the elastic insulation portion 120 includes a plurality of electromagnetic wave shielding portions 121 to shield electromagnetic waves from the elastic conductive portion 110 and prevent crosstalk between the elastic conductive portions 110.
  • the plurality of electromagnetic wave shielding parts 121 are separated from each elastic conductive part 110 in at least horizontal directions (HD1, HD2).
  • the elastic insulation portion 120 includes a plurality of first spaced portions 124 surrounding each of the plurality of elastic conductive portions 110.
  • the first separation portion 124 has a substantially cylindrical shape, and may extend between the upper and lower ends of the elastic insulating portion 120 in the vertical direction (VD).
  • the elastic conductive portion 110 is positioned in the first separation portion 124.
  • the electromagnetic wave shield parts 121 are located outside of one first spaced part 124.
  • the first separation portion 124 separates the elastic conductive portion 110 and the electromagnetic wave shielding portion 121 in the horizontal direction (HD1, HD2) to isolate the elastic conductive portion 110 and the electromagnetic wave shielding portion 121.
  • the first separation portion 124 is made of the same material as the above-described elastic polymer material constituting the elastic insulating portion 120.
  • the electromagnetic wave shielding portion 121 includes a plurality of carbon nanotubes 122 having a magnetic distribution and arranged along the vertical direction VD. Due to the magnetic carbon nanotube 122, the electromagnetic wave shielding portion 121 realizes the function of electromagnetic wave shielding. For example, an armchair-type carbon nanotube, a single-walled carbon nanotube, or a multi-walled carbon nanotube may be used as a carbon nanotube constituting the electromagnetic wave shielding part 121.
  • the magnetic particles of the ferromagnetic material that is magnetized in the absence of an external magnetic field are included in the pure carbon nanotubes, so that the carbon nanotubes 122 are magnetic. That is, the carbon nanotube 122 includes a plurality of magnetic particles that exhibit magnetic properties.
  • the electromagnetic wave shielding part 121 including a plurality of carbon nanotubes 122 may be randomly arranged at equal intervals in the horizontal direction (HD1, HD2) within the elastic insulation part 120. have.
  • the electromagnetic wave shield parts 121 may have different shapes and sizes.
  • the planar arrangement of the electromagnetic wave shields 121 shown in FIG. 2 is exemplary.
  • the electromagnetic wave shields 121 are disposed more densely outside each of the plurality of first spacers 124 than the arrangement illustrated in FIG. 2, so that they can be adjacent to each other with almost no gaps.
  • the plurality of carbon nanotubes 122 is maintained in the shape of the electromagnetic wave shielding portion 121 by an elastic polymer material constituting the elastic insulating portion 120. Therefore, the electromagnetic wave shielding portion 121 may be made of a plurality of carbon nanotubes 122 and the elastic polymer material. As shown in FIG. 3, in the electromagnetic wave shielding part 121, the plurality of carbon nanotubes 122 are evenly distributed and arranged along the vertical direction VD. In addition, in the carbon nanotubes 122 evenly distributed and arranged along the vertical direction VD, the adjacent at least two carbon nanotubes 122 may have a vertical direction VD, a horizontal direction HD, or a vertical direction. It can be in contact with each other in the inclined direction between the horizontal direction.
  • the uniform distribution and arrangement of the carbon nanotubes along the vertical direction means that the carbon nanotubes 122 belonging to one electromagnetic wave shield are slightly inclined in the vertical direction (VD) or in the vertical direction (VD). It may include those distributed and arranged in a direction or in a direction orthogonal to the vertical direction VD.
  • a plurality of carbon nanotubes 122 are positioned in any one of the vertical direction, the horizontal direction, and the inclined direction, and are distributed along the vertical direction. Can be arranged.
  • the plurality of carbon nanotubes 122 positioned as described above may be held by a liquid silicone rubber that is cured, for example, during molding of the connector 100. That is, while the liquid silicone rubber is cured to form the elastic insulating portion 120, a plurality of carbon nanotubes 122 are lined up and down, and each of the carbon nanotubes 122 is in the vertical direction, horizontal direction, and It can be located in any one of the inclined directions.
  • the plurality of carbon nanotubes 122 are distributed and arranged along the vertical direction VD by a force in which the plurality of magnetic particles included in each carbon nanotube 122 are arranged in a magnetic field.
  • a force in which the plurality of magnetic particles included in each carbon nanotube 122 are arranged in a magnetic field For example, when a magnetic field is applied in the vertical direction VD, a plurality of carbon nanotubes 122 are distributed, arranged, and contacted in the vertical direction by a force in which the magnetic particles are arranged along a magnetic force line by a magnetic force in the magnetic field. Can be.
  • the carbon nanotubes 122 may be evenly distributed and arranged along the vertical direction while being positioned in the vertical direction, horizontal direction, or inclined direction.
  • the position of the magnetic particles in the carbon nanotubes, the amount of magnetic particles contained in the carbon nanotubes, the amount of carbon nanotubes having the magnetic particles, and the viscosity of the liquid silicone rubber material affect the behavior of the carbon nanotubes.
  • the plurality of carbon nanotubes 122 may be arranged in a linear shape along the vertical direction VD in the electromagnetic wave shielding part 121.
  • the carbon nanotube may take a straight shape in the electromagnetic wave shielding part 121.
  • the carbon nanotubes 122 may be arranged in a curved shape along the vertical direction VD.
  • the carbon nanotubes 122 may take a curved shape in the electromagnetic wave shielding part 121.
  • Carbon nanotubes 122 having a curved shape may be located in the vertical direction, horizontal direction or inclined direction.
  • a plurality of carbon nanotubes 122 are distributed and arranged along the vertical direction VD by a force in which the magnetic particles are arranged along a magnetic force line by a magnetic force.
  • 5 to 8 showing an example of manufacturing a connector of an embodiment, with reference to the formation of an electromagnetic shield by the distribution and arrangement of the carbon nanotubes.
  • the connector of one embodiment may be molded using a molding die 411 and magnetic field applying portions 421 and 422 disposed vertically on the molding die 411.
  • the first liquid molding material 413 may be injected as an elastic polymer material forming a connector in the molding cavity 412 of the molding mold 411.
  • the first liquid molding material 413 includes a first liquid silicone rubber material and a plurality of carbon nanotubes 122 described above, and the plurality of carbon nanotubes are dispersed in the first liquid silicone rubber material.
  • the first liquid silicone rubber material may be one of the liquid silicone rubber materials exemplified above.
  • Each carbon nanotube 122 includes a plurality of magnetic particles described above.
  • the first and second magnetic field applying units 421 and 422. are disposed to face each other in the vertical direction (ie, the vertical direction of the connector) of the molding die 411.
  • the first and second magnetic field applying parts 421 and 422 have magnet parts 423 and 424 for applying a magnetic field and a plurality of hole parts 425 and 426 to which a magnetic field is not applied.
  • the magnet parts 423 and 424 and the hole parts 425 and 426 may be formed in a shape in which a hole is formed in a square plate.
  • Each of the plurality of hole portions 425 and 426 is positioned in the vertical direction for each elastic conductive portion of the connector. Therefore, a magnetic field is not applied to the hole portions 425 and 426 positioned vertically in the vertical direction VD.
  • each carbon nanotube 122 When a magnetic field is applied by the magnet parts 423 and 424, the magnetic particles included in each carbon nanotube 122 are attracted by the magnetic force of the magnetic field and are arranged along a magnetic force line within the magnetic field.
  • the carbon nanotubes 122 are evenly distributed and arranged along the vertical direction VD by the force in which the magnetic particles are arranged along the magnetic force line in the magnetic field.
  • the carbon nanotubes 122 moved by the magnetic particles form an electromagnetic wave shielding part 121. Since a magnetic field is not applied to the hole portions 425 and 426 arranged in the vertical direction, the carbon nanotube 122 is hardly present in the hole portions 425 and 426 facing up and down in the forming cavity 412.
  • the viscosity of the first liquid silicone rubber material can exert resistance to the movement of the carbon nanotubes. Accordingly, a first liquid silicone rubber material having a viscosity that allows the carbon nanotubes to be positioned in a vertical direction at a desired level can be selected. For example, in consideration of the shielding property of the electromagnetic wave shielding part according to the direction of the carbon nanotube, a liquid silicone rubber material having a suitable viscosity may be selected.
  • the size of the carbon nanotubes 122 may be adjusted. Accordingly, the size and shielding property of the electromagnetic wave shielding portion can be adjusted.
  • the first liquid silicone rubber material of the first liquid molding material 413 is cured. Then, as shown in FIG. 6, a workpiece 430 corresponding to the connector may be molded.
  • a silicon rubber portion 431 made of only a silicone rubber material is formed in the vertical direction due to the hole portions 425 and 426 corresponding to the elastic conductive portion of the connector.
  • a portion of the material 430 except for the silicon rubber portion 431 may be an elastic insulating portion containing an electromagnetic wave shield formed by carbon nanotubes distributed and arranged in the vertical direction (VD). Accordingly, the elastic insulating portion of the connector may be formed together with the electromagnetic wave shielding portion while enclosing the electromagnetic wave shielding portion.
  • through holes 432 are formed in the vertical direction VD for each silicon rubber portion 431 of the material 430.
  • a through hole 432 may be formed by irradiating a laser to the material 430 in the vertical direction VD.
  • the portion excluding the through hole 432 from the silicon rubber portion 431 may be the first separation portion of the elastic insulation portion.
  • a second liquid molding material 414 is injected into the through hole 432 to fill the through hole 432.
  • the second liquid molding material 414 includes the second liquid silicone rubber material and the plurality of conductive metal particles 111 described above, and the plurality of conductive metal particles 111 are dispersed in the second liquid silicone rubber material.
  • the second liquid silicone rubber material may be one of the liquid silicone rubber materials exemplified above, and may be the same as the first liquid silicone rubber material. Then, when a magnetic field is applied in the vertical direction (VD) to the second liquid molding material 414 filled in the through hole 432, the conductive metal particles 111 in the second liquid molding material 414 are arranged in the magnetic field.
  • the conductive metal particles 111 contacting each other in the vertical direction VD may form an elastic conductive portion of the connector.
  • the liquid silicone rubber material excluding the conductive metal particles 111 of the second liquid molding material 414 in the through hole 432 may form the particle holding portion of the elastic conductive portion described above. Thereafter, the liquid silicone rubber material in the through-hole 432 is cured, so that the connector 100 shown in FIG. 2 can be molded.
  • the connector 100 of one embodiment may be molded from the first liquid molding material 413 and the second liquid molding material 414.
  • the first liquid molding material 413 includes a plurality of carbon nanotubes 122 each including a plurality of magnetic particles, and the aforementioned first liquid silicone rubber material in which the plurality of carbon nanotubes 122 are dispersed.
  • the second liquid molding material 414 includes a plurality of conductive metal particles 111 and a second liquid silicone rubber material in which the plurality of conductive metal particles 111 are dispersed.
  • the elastic insulation part 120 is formed from the first liquid molding material 413 and may be formed together with a plurality of electromagnetic wave shield parts 121.
  • the plurality of electromagnetic wave shielding parts 121 are applied with a magnetic field in a vertical direction (VD) to the first liquid molding material 413, and a plurality of carbon nanoparticles are formed by a force in which the magnetic particles are arranged by a magnetic force in the magnetic field.
  • the tube 122 may be formed by being distributed and arranged along the vertical direction VD. That is, the plurality of electromagnetic wave shielding parts 121 may be formed by distributing and arranging a plurality of carbon nanotubes 122 along the vertical direction VD by application of a magnetic field and behavior of magnetic particles in the applied magnetic field. Can be.
  • the elastic insulating portion 120 of the connector 100 after a plurality of electromagnetic wave shielding portions 121 formed of a plurality of carbon nanotubes 122 are formed, the first liquid silicone rubber in the first liquid molding material 413
  • the material can be formed by curing.
  • the plurality of elastic conductive parts 110 are vertically formed on the second liquid molding material 414 including the plurality of conductive metal particles 111 and the second liquid silicone rubber material in which the plurality of conductive metal particles 111 are dispersed.
  • a magnetic field is applied in the direction VD, and a plurality of conductive metal particles 111 can be conductively contacted and formed along the vertical direction VD.
  • the elastic insulating portion 120 for each of the plurality of elastic conductive portions 110
  • the second liquid molding material 414 may be injected into the formed through holes 452.
  • the elastic insulation part 120 includes second separation parts 125 disposed at upper and lower ends of each electromagnetic wave shield part 121.
  • the second spacer 125 may be disposed above the upper end of the electromagnetic wave shielding part 121 and below the lower end of the electromagnetic wave shielding part 121 in the vertical direction VD.
  • the upper surface of the second separation portion 125 located on the upper side may be a part of the upper surface of the elastic insulation portion 120, and the lower surface of the second separation portion 125 located on the lower side is a part of the lower surface of the elastic insulation portion 120 Can be.
  • the second separation portion 125 does not expose the top and bottom of the electromagnetic wave shielding portion 121, and when inspecting the device under test (see FIG.
  • the second separation portion 125 may be formed to cover the upper and lower ends of the electromagnetic wave shielding portion 121 during molding of the elastic conductive portion 110.
  • the second liquid silicone rubber material of the second liquid molding material covers the upper and lower surfaces of the material 430.
  • the second liquid silicone rubber material positioned above and below the upper end of the electromagnetic wave shield 121 may be cured to form the second spacer 125.
  • the second separation portion 125 is disposed above and below the upper end of the electromagnetic wave shielding portion 121.
  • the second separation unit 125 may be disposed only above or below the upper end of the electromagnetic wave shield 121.
  • FIG. 10 is a cross-sectional view schematically showing a connector according to another embodiment.
  • the connector 200 illustrated in FIG. 10 includes an insulating member 230 covering the elastic insulating portion 120, and the insulating member 230 is elastically insulated to cover the upper and lower surfaces of the elastic insulating portion 120, respectively. It may be attached to the upper and lower surfaces of the unit 120. Since the insulating member 230 covers the upper and lower surfaces of the elastic insulating part 120, the upper and lower ends of the electromagnetic wave shielding part 121 are located inside the insulating member 230.
  • the insulating member 230 may be formed in a thin film shape.
  • the insulating member 230 includes a plurality of through holes 231 drilled in the vertical direction VD.
  • the plurality of through holes 231 respectively correspond to the plurality of elastic conductive parts 110.
  • the upper or lower portion of each elastic conductive portion 110 fills the through hole 231.
  • the upper and lower portions of each elastic conductive portion 110 may be positioned at the same level as the upper or lower surface of the insulating member 230. As another example, the upper and lower portions of each elastic conductive portion 110 may protrude more than the upper or lower surface of the insulating member 230.
  • the insulating member 230 may include a polyimide film having insulating properties or a film made of a polymer having insulating properties.
  • the terminal 21 (see FIG. 1) of the device under test is in contact with the upper end of the elastic conductive portion 110.
  • the insulating member 230 is a terminal of the device under test ( 21) can be prevented from contacting the electromagnetic shield 121.
  • the insulating member 230 is provided on both the upper and lower surfaces of the elastic insulating portion 120.
  • the insulating member 230 may be provided only on the upper surface of the elastic insulating portion 120 facing the device under test.
  • the through hole 231 of the insulating member 230 may be formed during molding of the connector 200.
  • the insulating member 230 through which the through hole 231 is drilled may be adhered to the upper and lower surfaces of the elastic insulating portion 120 of the connector 200 formed.
  • the inner circumferential surface of the through hole 231 may be vertical.
  • the inner circumferential surface of the through hole 231 may be inclined at a predetermined angle with respect to the vertical direction VD.
  • the insulating member 230 may be introduced into the molding cavity 412 together with the first liquid molding material 413.
  • the above-described through hole is not formed in the insulating member 230 shown in FIG. 11.
  • the carbon nanotubes 122 are distributed and arranged along the vertical direction VD by applying a magnetic field, thereby forming an electromagnetic shield of the connector according to this embodiment. 12 after the first liquid silicone rubber material of the first liquid molding material 413 is cured, the material 430A is molded.
  • the insulating member 230 covers the upper and lower surfaces of the material 430A.
  • a through hole 432 is formed in the material 430A by laser processing.
  • the through hole 432 may be formed by laser processing.
  • a part of the insulating member 230 is removed, and accordingly, the above-described through hole 231 is formed in the insulating member 230.
  • a portion excluding the through hole 432 from the silicon rubber portion 431 may be the first spaced portion of the elastic insulation portion.
  • the second liquid molding material 414 is injected into the through hole 432.
  • a magnetic field is applied in the vertical direction (VD) to the second liquid molding material 414 filling the through hole 432, and the conductive metal particles 111 are electrically contactable in the vertical direction (VD) by the magnetic force of the magnetic field. . Thereafter, the second liquid silicone rubber material in the through hole 432 is cured. Accordingly, the connector 200 illustrated in FIG. 10 may be molded.
  • FIG. 15 is a perspective view schematically showing a part of a connector according to another embodiment
  • FIG. 16 is a cross-sectional view schematically showing a part of a connector according to another embodiment.
  • the electromagnetic shielding portion 121 of the connector 300 has a cylindrical shape or a ring shape, and between the top and bottom of the elastic insulating portion 120 in the vertical direction (VD) Extends from.
  • the first separation portion 124 of the elastic insulation portion 120 is located inside the electromagnetic wave shielding portion 121. That is, the electromagnetic wave shielding portion 121 is formed in a cylindrical shape or a ring shape surrounding the first separation portion 124.
  • the electromagnetic wave shielding portion 121 in this embodiment is formed as one structure that completely surrounds one elastic conductive portion 110.
  • the plurality of electromagnetic wave shields 121 in a cylindrical shape or a ring shape may be spaced at equal intervals in the horizontal direction HD1 or in the horizontal direction HD2.
  • the connector 300 shown in FIGS. 15 and 16 forms an electromagnetic wave shield by a plurality of carbon nanotubes distributed and arranged along the vertical direction by applying a magnetic field, as in the above-described embodiment, to the molded material It can be formed by forming a through hole for forming an elastic conductive portion, and conductively contacting the conductive metal particles by applying a magnetic field.
  • the first and second magnetic field applying parts 421 and 422 include magnet parts 463 and 464 arranged opposite to each other in the vertical direction VD for each position of the elastic conductive part.
  • the magnet parts 463 and 464 have a cylindrical shape or a ring shape, and circular hole portions 465 and 466 are formed inside the ring shape.
  • the carbon nanotubes 122 are gathered in a cylindrical shape, and evenly distributed and arranged along the vertical direction VD, thereby forming the electromagnetic wave shield 121 of the cylindrical shape shown in FIG. 15. That is, according to this embodiment, by applying the magnetic field in the vertical direction (VD) to the first liquid molding material 413 by the cylindrical magnet portions 463 and 464 disposed opposite to the vertical direction (VD), The electromagnetic shielding portion may be formed in a cylindrical shape or a ring shape. In addition, by adjusting the diameters of the magnet portions 463 and 464 and the sizes of the hole portions 465 and 466, the size and shielding properties of the electromagnetic wave shield portion can be variously changed.
  • a cylindrical or ring-shaped electromagnetic wave shielding portion 121 is formed on a material 430B corresponding to the connector according to this embodiment, and a silicon rubber portion is formed inside the electromagnetic wave shielding portion 121.
  • 431 is formed.
  • a through hole 432 for forming the elastic conductive portion is formed in the silicon rubber portion 431 by laser processing.
  • a portion of the silicon rubber portion 431 except for the through hole 432 may be the first spaced portion of the elastic insulation portion.
  • the above-described second liquid molding material is injected into the through-hole 432, and conductive metal particles are electrically contacted along the vertical direction VD by application of a magnetic field, and the second liquid in the second liquid molding material The silicone rubber material is cured. Accordingly, the connector 300 shown in FIG. 15 may be molded.
  • the connector 300 according to this embodiment may include the insulating member 230 shown in FIG. 10.
  • the connector 300 having an insulating member may be molded.
  • Carbon nanotubes that are evenly distributed and arranged along the vertical direction to form an electromagnetic wave shield may have magnetic particles in various forms.
  • the magnetic particles particles made of a ferromagnetic material that is magnetized in the absence of an external magnetic field may be used.
  • the magnetic particles may be made of any one of nickel, cobalt, chromium, iron, iron carbide, iron oxide, chromium oxide, nickel oxide, nickel cobalt oxide, cobalt iron, and single molecule magnetic materials.
  • the iron carbide triiron carbide (Fe3C) may be used.
  • iron oxide iron trioxide (Fe2O3), triiron tetraoxide (Fe3O4), or ferrite may be used.
  • the single-molecule magnet material a Mn12 single-molecule magnet, dysprosium(III) acetylacetonate hydrate, terbium(III) bis-phthalocyanine (Terbium(III) bis-phthalocyanine) can be used. have.
  • FIG. 20 shows an example of a carbon nanotube containing magnetic particles.
  • a plurality of magnetic particles 123 may be located inside one carbon nanotube 122. That is, the magnetic particle 123 is inserted into the inner space of the carbon nanotube 122, and the carbon nanotube 122 may include the magnetic particle 123.
  • FIGS. 21 to 25 are referred to.
  • Carbon nanotubes can be produced and grown by chemical vapor deposition (CVD).
  • CVD chemical vapor deposition
  • the magnetic particles can be used as a catalyst and inserted into the interior space of the carbon nanotubes.
  • the generation and growth of carbon nanotubes using chemical vapor deposition may be performed by supplying hydrocarbon gas as a transport gas to a reactor for chemical vapor deposition and growing carbon nanotubes vertically from a substrate installed in the reactor.
  • . 21 to 23 schematically illustrate an example in which magnetic particles are inserted into a space inside a carbon nanotube as carbon nanotubes are generated and grown by chemical vapor deposition.
  • a magnetic particle 123 or a cluster of magnetic particles 123 is weakly coupled to a surface of a substrate 511 made of silicon or aluminum.
  • the hydrocarbon supplied as the transport gas is decomposed into carbon and hydrogen by exothermic decomposition at the top of the magnetic particles 123. Due to exothermic decomposition, the temperature and carbon concentration at the top of the magnetic particles 123 increase, and the magnetic particles 123 are separated from the substrate 511. As the carbon diffuses and precipitates into the cooler region, the carbon nanotube 122 may be formed while enclosing the magnetic particles 123 in the vertical direction from the substrate 511.
  • a magnetic particle cluster 513 is deposited on the surface of the substrate 511.
  • the magnetic particle cluster 513 on the surface of the substrate 511 is exposed to hydrocarbons.
  • Hydrocarbons are catalytically exothermic decomposed on the surface of the cluster 513 and decomposed into hydrogen and carbon.
  • the decomposed carbon diffuses and precipitates from the higher concentration of the high temperature region to the cold region of the cluster 513, so that the carbon nanotube 122 is formed in the vertical direction from the substrate 511 while containing the magnetic particle cluster 513.
  • carbon nanotubes may be grown by chemical vapor deposition, and the inside of the carbon nanotubes may be filled with magnetic particles. While the carbon nanotube 122 is growing at a slow rate, a cluster of magnetic particles contained in the crucible may be vaporized and introduced into the growing carbon nanotube. The cluster of magnetic particles is attached to the open end of the carbon nanotube 122, so that the carbon nanotube 122 can grow at a rapid rate. The cluster 513 is deformed by the force of the rapidly growing carbon nanotubes around the cluster 513 of magnetic particles. When the supply of the cluster 513 of magnetic particles, which are catalytic materials, is stopped, the carbon nanotube 122 may grow slowly again.
  • the carbon nanotubes in which the magnetic particles are inserted into the inner space may be formed by rolling a graphene sheet to which the magnetic particles are attached to become carbon nanotubes.
  • 24 schematically shows an example of forming a carbon nanotube by rolling a graphene sheet to which magnetic particles are attached. 24, the magnetic particles 123 are attached to the graphene sheet 521 using arc discharge, and the carbon nanotubes 122 into which the magnetic particles are inserted are formed by rolling the graphene sheets 521.
  • a solution containing magnetic particles is introduced into a container having a negative electrode and a positive electrode made of graphite, and direct current is supplied to the negative electrode and the positive electrode to perform arc discharge between the negative electrode and the positive electrode.
  • the temperature inside the container can rise to about 3000 degrees by arc discharge. At this temperature, the magnetic particles are ionized into nanoparticles, a graphene sheet is formed from an electrode made of graphite, and magnetic particles can be attached to the graphene sheet.
  • Carbon nanotubes in which magnetic particles are inserted into the inner space may be formed using a capillary effect.
  • 25 shows an example of inserting magnetic particles into the inside of a carbon nanotube using a capillary phenomenon.
  • carbon nanotubes 532 are grown by chemical vapor deposition on the surface of the hole of the substrate 513 made of alumina.
  • a transport fluid 533 containing the magnetic particles is dropped on the carbon nanotube 532.
  • the carrier fluid 533 fills the carbon nanotubes 532 by the capillary effect.
  • the carrier fluid 533 may fill the carbon nanotubes 532 in whole or in part. Thereafter, when the carrier fluid 533 is dried, magnetic particles 123 are introduced into the carbon nanotube 532.
  • the carbon nanotube 122 in which the magnetic particles 123 are inserted into the inner space may be formed.
  • the substrate 531 made of alumina is dissolved with a sodium hydroxide (NaOH) solution
  • the carbon nanotube 122 in which the magnetic particles 123 are inserted into the interior space can be obtained.
  • the substrate 531 is dissolved in a sodium hydroxide (NaOH) solution, thereby removing the substrate from the substrate 531. To separate.
  • the aforementioned transport fluid 533 is dropped onto the carbon nanotube 532 and the inside of the carbon nanotube 532 is filled with the transport fluid 533 with a capillary effect. Then, by drying the carrier fluid 533, the carbon nanotubes 122 in which the magnetic particles 123 are inserted into the inner space can be obtained.
  • the carbon nanotube 122 may have a closed end.
  • 26 shows a carbon nanotube in which magnetic particles are inserted and one end is closed. Referring to FIG. 26, the carbon nanotube 122 having one end closed may prevent the magnetic particles 123 inserted in the inner space from being separated from the carbon nanotube 122.
  • FIG. 27 shows another example of a carbon nanotube containing magnetic particles.
  • the magnetic particle 123 may be coupled to the carbon nanotube 122 from the outside of one carbon nanotube 122.
  • each magnetic particle 123 may be combined with a carbon atom of the carbon nanotube 122 by chemical bonding.
  • 28 and 29 schematically show examples in which magnetic particles are bonded to a carbon atom of a carbon nanotube by chemical bonding.
  • the pure carbon nanotube 541 is treated with nitric acid (HNO 3 ), hydroxy groups (OH) and carboxy groups (COOH) are attached to carbon atoms of the carbon nanotubes 541.
  • nickel and cobalt are attached as precursors to the carbon nanotube 541 having a hydroxy group (OH) and a carboxy group (COOH).
  • the carbon nanotube 122 shown in FIG. 27 that is, the magnetic particles 123 are chemically bonded to the carbon atom of the carbon nanotube Nanotubes 122 can be obtained.
  • the magnetic particles 123 at this time may be nickel cobalt oxide (NiCo 2 O 4 ).
  • FIG. 29 shows another example in which magnetic particles are bonded by chemical bonding with carbon atoms of a carbon nanotube, and shows that magnetic particles are combined with carbon atoms of a carbon nanotube by a so-called click chemical reaction.
  • a carbon nanotube 542 modified with alkyne and a dendrimer having an azide containing magnetic particles 123 are combined.
  • sodium ascorbate and copper sulfate (CuSO4) were added to a solution in which the carbon nanotube 542 and the dendrimer were mixed in a ratio of 3:1 with tetrahydrofolic acid and water (H2O). And reacted together.
  • the magnetic particles 123 are bonded to the carbon atoms of the carbon nanotubes 122, that is, the carbon particles are bonded to the outer surface of the carbon nanotubes Nanotubes 122 can be obtained.
  • the carbon nanotube 122 has a plurality of hexagonal holes formed by six carbon atoms in a graphite wall. Each of the hexagonal holes of some of the multiple hexagonal holes has one of the multiple magnetic particles 123. Each of the plurality of magnetic particles 123 is randomly located in one of the plurality of hexagonal holes.
  • magnetic particles are not located in the inner space of the carbon nanotube or outside the carbon nanotube, and the magnetic particles 123 are located in the hexagonal hole of the carbon nanotube and are trapped in the hexagonal hole. . That is, the carbon nanotube 122 shown in FIG. 30 has a structure of a particle-free surface, and does not affect contact between the carbon nanotubes 122.
  • FIG. 31 schematically shows an example of a carbon nanotube in which magnetic particles are located in a hexagonal hole of the carbon nanotube.
  • the substrate 551 can be used.
  • Carbon nanotubes may be created along the cylindrical wall surface 555 of the hole 554 of the template 553.
  • the cylindrical wall surface 555 is coated with the aforementioned magnetic particles (eg, triiron tetraoxide (Fe 3 O 4 )).
  • a substrate 551 coated with magnetic particles on a cylindrical wall surface 555 is disposed in a chemical vapor deposition reactor. Fe3O4 is reduced to FeC by heating in the reactor. As shown on the right side of FIG.
  • carbon nanotubes 122 are generated and grown along the cylindrical wall surface 555 by chemical vapor deposition. Since there is no space between the cylindrical wall surface 555 and the carbon nanotube 122, the magnetic particles cannot escape outside the carbon nanotube 122, and are trapped in the hexagonal hole of the carbon nanotube 122.

Landscapes

  • Details Of Connecting Devices For Male And Female Coupling (AREA)

Abstract

L'invention concerne un connecteur qui est situé entre un dispositif de test et un dispositif testé et connecte électriquement le dispositif de test et le dispositif testé. Le connecteur comprend une pluralité de parties conductrices élastiques et une partie isolante élastique. La pluralité de parties conductrices élastiques sont conductrices dans une direction verticale (VD). La partie isolante élastique sépare et isole la pluralité de parties conductrices élastiques dans une direction horizontale (HD). La partie isolante élastique comprend une pluralité de parties de blindage contre les ondes électromagnétiques, et la pluralité de parties de blindage contre les ondes électromagnétiques comprend une pluralité de nanotubes de carbone magnétiques distribués et agencés dans une direction verticale.
PCT/KR2019/016324 2018-11-27 2019-11-26 Connecteur pour connexion électrique WO2020111709A1 (fr)

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KR20200062528A (ko) 2020-06-04
TW202027351A (zh) 2020-07-16
KR102127229B1 (ko) 2020-06-29
CN113169495A (zh) 2021-07-23
TWI739219B (zh) 2021-09-11

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