WO2020079904A1 - Matériau conducteur électrique, article moulé et composant électronique - Google Patents

Matériau conducteur électrique, article moulé et composant électronique Download PDF

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Publication number
WO2020079904A1
WO2020079904A1 PCT/JP2019/028332 JP2019028332W WO2020079904A1 WO 2020079904 A1 WO2020079904 A1 WO 2020079904A1 JP 2019028332 W JP2019028332 W JP 2019028332W WO 2020079904 A1 WO2020079904 A1 WO 2020079904A1
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Prior art keywords
conductive material
resin
plating
plating layer
alloy
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PCT/JP2019/028332
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English (en)
Japanese (ja)
Inventor
佐々木　康則
高広 川村
良聡 小林
相場　玲宏
Original Assignee
Ｊｘ金属株式会社
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Priority to CN201980064733.2A priority Critical patent/CN112912546B/zh
Priority to KR1020217010425A priority patent/KR102565186B1/ko
Publication of WO2020079904A1 publication Critical patent/WO2020079904A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/615—Microstructure of the layers, e.g. mixed structure
    • C25D5/617—Crystalline layers
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • C22C9/06—Alloys based on copper with nickel or cobalt as the next major constituent
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10—Electroplating with more than one layer of the same or of different metals
    • C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34—Pretreatment of metallic surfaces to be electroplated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60—Electroplating characterised by the structure or texture of the layers
    • C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
    • H01L23/49582—Metallic layers on lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads

Definitions

  • the present invention relates to conductive materials, molded products, and electronic parts.
  • Patent Documents 1 to 3 disclose a plating surface of a lead frame in order to improve adhesion between a lead frame and a molding resin in a resin-sealed semiconductor device. A roughening technique has been proposed.
  • Patent Document 4 proposes a technique focusing on the specific surface area and the oxide film thickness of the surface layer in order to improve the adhesion between metal and resin.
  • JEDEC-LEVEL1 in a high temperature and high humidity test, but in recent years, due to computerization of automobiles and the like, it may have durability in a more severe environment, for example, a heat cycle test. It is required, and there are some situations in which the characteristics cannot be said to be sufficient with the conventional technology.
  • the present invention has been made to solve the above problems, and provides a conductive material exhibiting excellent resin adhesion even in a harsh environment.
  • the inventors of the present invention have formed a metal surface on which a resin is molded or sealed with a resin, and by controlling the surface in a predetermined form, a conductive material that can solve the problem is obtained. It was found that it can be obtained.
  • the present invention completed based on the above findings is a conductive material in which a resin is molded on the surface or the surface is sealed with a resin,
  • the surface is made of a metal and is a conductive material satisfying the following conditions (1) and (2).
  • Arithmetic mean surface roughness height Sa is 0.25 to 0.4 ⁇ m
  • the peak density Spd of ridges is 2.5 million or more per 1 mm 2 .
  • the maximum surface roughness height Sz of the surface is 3.5 to 6.5 ⁇ m.
  • the conductive material includes a base material and a plating layer formed on the base material, and the surface is the plating layer.
  • the base material is made of any one of copper, copper alloy, aluminum, aluminum alloy, iron and iron alloy.
  • the plating layer is composed of one or more kinds of plating layers.
  • the plating layer has a first plating layer formed on the base material, and the first plating layer is copper, copper alloy, nickel and nickel alloy. It is composed of either.
  • the plating layer has a second plating layer formed on the first plating layer, and the second plating layer is palladium, a palladium alloy, gold and Composed of any of the gold alloys.
  • the total thickness of the plating layers formed of the one or more plating layers is 1 to 7 ⁇ m.
  • the conductive material of the present invention partially has a surface that satisfies the above conditions (1) and (2).
  • the present invention is a molded article comprising the conductive material of the present invention, wherein the surface is resin-molded or the surface is sealed with resin.
  • the present invention is an electronic component including the conductive material of the present invention.
  • FIG. 3 is a schematic cross-sectional view showing the configuration of a conductive material according to Embodiment 1.
  • FIG. 5 is a schematic cross-sectional view showing the configuration of a conductive material according to Embodiment 2.
  • FIG. 7 is a schematic cross-sectional view showing the configuration of a conductive material according to Embodiment 3.
  • the conductive material according to the embodiment of the present invention is a conductive material in which a resin is molded on the surface or the surface is sealed with a resin, and the surface is made of metal, and the following (1) and (2) Satisfy the condition of.
  • Arithmetic mean surface roughness height Sa is 0.25 to 0.4 ⁇ m
  • the peak density Spd of ridges is 2.5 million or more per 1 mm 2 .
  • the conductive material may be made of metal, details thereof will be described later, but the conductive material may be formed of one kind of metal material, and the base material and the metal layer on the surface may be formed. It may be formed separately.
  • the arithmetic average surface roughness height Sa of the surface of the conductive material according to the embodiment of the present invention is controlled to 0.25 to 0.4 ⁇ m. If Sa of the surface of the conductive material is less than 0.25 ⁇ m, the anchor effect becomes insufficient due to insufficient roughening of the surface, and the adhesiveness with the resin decreases. When Sa of the surface of the conductive material is more than 0.4 ⁇ m, the roughened tip portion of the surface of the conductive material is easily broken. Sa of the surface of the conductive material is preferably 0.27 to 0.38 ⁇ m, more preferably 0.3 to 0.35 ⁇ m.
  • the resin When the metal surface of the conductive material according to the embodiment of the present invention and the resin are in close contact with each other, the resin has a larger coefficient of thermal expansion than the metal, and therefore the thermal expansion of the resin needs to be suppressed by the metal anchor.
  • the peak density Spd of the ridges on the surface of the conductive material is controlled to 2.5 million or more per 1 mm 2 against the problem of the difference in thermal expansion coefficient from the resin. If the Spd on the surface of the conductive material is less than 2,500,000 per mm 2 , the anchor effect becomes insufficient and the difference in thermal expansion coefficient may be lost, resulting in peeling from the resin.
  • the Spd on the surface of the conductive material is not particularly limited because it exhibits an effect in combination with Sa, but it is preferably 5.5 million or less per 1 mm 2 . Further, Spd the surface of the conductive material is preferably 260 to 6 million per 1 mm 2, and more preferably from 300 to 5,500,000 per 1 mm 2.
  • the maximum surface roughness height Sz (ISO25178-2: 2012) of the surface of the conductive material according to the embodiment of the present invention is preferably 3.5 to 6.5 ⁇ m. If the Sz of the surface of the conductive material is less than 3.5 ⁇ m, the anchoring effect becomes insufficient due to insufficient roughening of the surface, and the adhesion with the resin decreases. If the Sz of the surface of the conductive material is more than 6.5 ⁇ m, the resin may not easily enter the gap between the heights of the surface of the conductive material.
  • the Sa of the surface of the conductive material is preferably 3.7 to 6.0 ⁇ m, more preferably 4.5 to 5.0 ⁇ m.
  • the conductive material according to the embodiment of the present invention is not particularly limited as long as the surface has at least a metal, and includes the following three patterns (Embodiments 1 to 3).
  • FIG. 1 is a schematic cross-sectional view showing the configuration of a conductive material 10 according to Embodiment 1 of the present invention.
  • the conductive material 10 is made of a metal material and has a surface 11 that satisfies the above conditions (1) and (2).
  • An enlarged view of the portion surrounded by the dotted line frame 12 in FIG. 1 is shown in the right figure.
  • the right diagram of FIG. 1 shows an example of the roughened surface of the conductive material 10, and the roughened surface having such a shape is not limited. According to such a configuration, since the material forming the conductive material is one kind of metal material, the manufacturing efficiency or the manufacturing cost is improved.
  • the metal material of the conductive material 10 for example, any of copper, copper alloy, aluminum, aluminum alloy, iron, iron alloy, nickel, nickel alloy, palladium, palladium alloy, gold and gold alloy can be used. Further, between the metal and the resin, the resin has a larger coefficient of thermal expansion. At this time, if the metal (metal material of the conductive material 10) that adheres to the resin has a high thermal conductivity, the heat trapped in the resin can be efficiently released. As a result, the thermal expansion of the resin can be suppressed. From such a viewpoint, it is preferable that the conductivity of the conductive material 10 which is proportional to the thermal conductivity of the metal material is 10% IACS or more.
  • the conductive material 10 is prepared by preparing a predetermined metal material, and subjecting the surface of the metal material to etching treatment, blasting treatment, or transfer treatment with a rolling roll having an uneven surface to obtain the above (1) and (2). It is possible to form the surface 11 satisfying the condition (1).
  • the etching treatment include commercially available etching solutions such as CZ8101 (product name) manufactured by MEC Co., Ltd., CPE900 (product name) manufactured by Mitsubishi Gas Chemical Co., Inc., and NR1870 (product name) manufactured by MEC Co., Ltd. It can be used to control the desired shape.
  • As the etching method various methods such as an immersion method, a spray method, and an electrolytic method can be adopted.
  • FIG. 2 is a schematic cross-sectional view showing the configuration of the conductive material 20 according to Embodiment 2 of the present invention.
  • the conductive material 20 includes a base material 22 and a plating layer 23 formed on the base material 22, and the surface 21 that satisfies the above conditions (1) and (2) is the plating layer 23.
  • An enlarged view of the dotted frame 24 portion of FIG. 2 is shown in the right figure.
  • the right diagram of FIG. 2 shows an example of the roughened surface of the conductive material 20, and the roughened surface of such a shape is not limited. According to such a configuration, the surface satisfying the above conditions (1) and (2) can be controlled by the plating layer, and the thickness of the surface (surface layer, that is, plating layer) can be easily controlled. .
  • the base material 22 may be made of resin, and may be made of any metal of copper, copper alloy, aluminum, aluminum alloy, iron and iron alloy. Further, the base material 22 may be made of the same kind of metal as the metal of the plating layer 23.
  • the plating layer 23 may be made of any one of copper, copper alloy, nickel and nickel alloy. Further, if the metal (base material 22 of the conductive material 20) that indirectly adheres to the resin has a high thermal conductivity, the heat trapped in the resin can be efficiently released. As a result, the thermal expansion of the resin can be suppressed. From such a viewpoint, it is preferable that the conductivity of the conductive material 20 that is proportional to the thermal conductivity of the base material 22 is 10% IACS or more.
  • a base material 22 formed of a predetermined material is prepared, and a plating layer 23 is formed on the base material 22 under predetermined plating conditions.
  • the surface 21 satisfying the above conditions (1) and (2) can be formed by controlling the plating conditions such as the composition of the plating bath, the plating temperature, the current density, and the plating thickness.
  • FIG. 3 is a schematic cross-sectional view showing the configuration of the conductive material 30 according to the third embodiment of the present invention.
  • the conductive material 30 is composed of a base material 32 and two types of plating layers (first plating layer 33, second plating layer 34).
  • the first plating layer 33 is formed on the base material 32
  • the second plating layer 34 is formed on the first plating layer 33
  • the surface 31 that satisfies the above conditions (1) and (2) is the second plating.
  • the layer 34 An enlarged view of the portion surrounded by the dotted line frame 35 in FIG. 3 is shown in the right figure.
  • the surface satisfying the above conditions (1) and (2) can be controlled by the plating layer, and the thickness of the surface (surface layer, that is, plating layer) can be easily controlled. .
  • the base material 32 may be made of resin, and may be made of any metal of copper, copper alloy, aluminum, aluminum alloy, iron and iron alloy. Further, the base material 32 may be made of the same kind of metal as the metal of the first plating layer 33.
  • the first plating layer 33 may be made of any one of copper, copper alloy, nickel and nickel alloy.
  • the second plating layer may be composed of any one of palladium, palladium alloy, gold and gold alloy.
  • the metal (base material 32 of the conductive material 30) that indirectly adheres to the resin has a high thermal conductivity, the heat trapped in the resin can be efficiently released. As a result, the thermal expansion of the resin can be suppressed. From such a viewpoint, it is preferable that the conductivity of the base material 32 of the conductive material 30 is 10% IACS or more, which is proportional to the thermal conductivity.
  • a base material 32 formed of a predetermined material is prepared, a first plating layer 33 is formed on the base material 32 under a predetermined plating condition, and then a second plating layer 34 is formed.
  • the surface 31 satisfying the above conditions (1) and (2) can be formed by controlling the plating conditions such as the composition of the plating bath, the plating temperature, the current density, and the plating thickness.
  • the first plating layer 33 satisfying the above conditions (1) and (2) is formed by controlling the plating conditions such as the composition of the plating bath, the plating temperature, the current density, and the plating thickness.
  • a thin second plating layer 34 is formed on the plating layer 33. As a result, the surface profile of the second plating layer 34 becomes substantially equal to the surface profile of the first plating layer 33. In this way, the surface 31 that satisfies the above conditions (1) and (2) may be formed.
  • the plating layer may be formed of one layer or two layers as in the second or third embodiment, or may be formed of three layers or four layers or more. Further, the outermost surfaces of the conductive materials 10, 20, 30 of Embodiments 1 to 3 should be treated with a phosphoric acid ester-based treatment liquid or the like as long as the above conditions (1) and (2) are satisfied. Then, the function related to the antioxidant of plating may be added. If necessary, a sealing treatment may be applied to suppress corrosion due to pinholes in plating.
  • the total thickness of the plating layers composed of one or more plating layers is 1 to 7 ⁇ m. If the total thickness of the plating layer is less than 1 ⁇ m, a roughened surface shape cannot be sufficiently formed, and diffusion of the base material components may easily proceed. If the total thickness of the plating layer is more than 7 ⁇ m, cracks may easily occur in the plating layer of the conductive material during pressing or bending.
  • the conductive material according to the embodiment of the present invention may partially have a surface that satisfies the above conditions (1) and (2).
  • the surface is partially provided, so that the resin can be easily removed from the portion where resin adhesion is unnecessary. can do.
  • the surface since the surface is partially provided, it is possible to easily remove the resin (burr) that has leaked from the target location.
  • a surface having a roughened shape that satisfies the above conditions (1) and (2) has a characteristic that the wire bonding property is deteriorated. Therefore, by partially providing the surface, the wire bonding property can be improved. The deterioration can be suppressed.
  • the partially provided surface may be stripe-shaped, spot-shaped, or ring-shaped.
  • the use of the conductive material according to the embodiment of the present invention is not particularly limited, but it can be used as a material of an electronic component that requires good adhesiveness with a resin, and is particularly protected from factors such as impact, temperature, and humidity. Therefore, it can be used as a material for an electronic component that is subjected to resin molding, resin sealing of which the surface is hardened with a resin, or molding. Examples of the electronic component include metal electronic components such as lead frames and buzz bar modules.
  • the conductive material according to the embodiment of the present invention has a very high adhesion between the surface of the conductive material and the resin, even if the surface is resin-molded, resin-sealed, or molded as such. Therefore, good durability can be expected even when used as a material for an electronic component used in a harsh environment such as a vehicle-mounted engine room, for example.
  • cathode electrolytic degreasing was performed at 5 A / dm 2 for 60 seconds in an alkaline degreasing bath containing 50 g / L of sodium hydroxide, and then 10%. Acid pickling was performed for 30 seconds with a pickling solution of sulfuric acid and ammonium fluoride of 50 g / L, and each plating step was performed.
  • cathodic electrolytic degreasing was carried out for 10 seconds at 5 A / dm 2 in the alkaline degreasing bath described above, followed by 10 seconds of acid cleaning with a 10% sulfuric acid and 50 g / L ammonium fluoride pickling solution, and then water.
  • a zinc substitution bath containing 50 g / L of sodium oxide, 5 g / L of zinc oxide, 2 g / L of ferric chloride and 50 g / L of Rochelle salt, treated at a bath temperature of 25 ° C. for a treatment time of 10 seconds.
  • Zinc substitution was carried out, and the above-mentioned acid cleaning and zinc substitution were repeated once again to shift to each plating step.
  • Each plating treatment was performed by electroplating by adjusting the composition of the plating bath, the temperature of the plating solution, the current density and the plating time.
  • Table 2 shows the electroplating conditions used in Examples 1 to 5, respectively.
  • the plating bath components were Ni metal content 130 g / L, boric acid 25 g / L, and pH 3.3.
  • the Ni metal component is composed of nickel sulfamate tetrahydrate and Ni chloride as Ni salts.
  • the surface plating of Examples 6 to 14 and 17 to 20, the conventional example 1 and the comparative examples 1 to 2, and the undercoating and the surface plating of Examples 15 to 16 were used in Table 2 of the above Examples 1 to 5. It was formed by adjusting the composition of the plating bath, the temperature of the plating solution, the current density, the plating time, and the degree of stirring, based on the plating conditions. At this time, the plating conditions used in Table 2 of Examples 1 to 5 and the evaluation results described later were referred to so that Sa, Spd, and Sz of the surface of the test piece of the conductive material would have desired values. Moreover, adjustment of each plating condition was performed based on the following knowledge.
  • Film thickness As the film thickness increases, the crystal grains preferentially grow in the film thickness direction (the growth speed in the film thickness direction is faster than in the horizontal direction), so Sa and Sz increase. On the other hand, with respect to Spd, adjacent crystals are likely to coalesce, so that the maximum value is around 5 ⁇ m, and the film thickness beyond that tends to decrease.
  • Type of plating solution By increasing the chlorine concentration in the plating solution, that is, the Ni chloride concentration, the crystals are easily sharpened and the surface irregularities are increased, so that Sa, Sz, and Spd increase, respectively.
  • Plating solution temperature If the solution temperature in the plating bath is high, crystals grow isotropically and crystal grains tend to become large, so that Sa, Sz, and Spd increase respectively.
  • a test piece of a conductive material was prepared under the following conditions based on the example of Patent Document 3. Specifically, in the Ni plating of Conventional Example 2, nickel sulfate was 260 g / L, nickel chloride was 50 g / L, boric acid was 35 g / L, pH 4.5, bath temperature was 50 ° C., current density was 5 A / dm 2 , It was produced under the condition that the plating time was 200 seconds. Further, regarding the Au plating described in Examples 15 and 16 and Conventional Example 2, 20 g / L of potassium gold cyanide, 50 g / L of potassium citrate, pH 5, bath temperature of 60 ° C., and current density of 1 A / dm 2 were set.
  • the plating time is adjusted so that the film thickness becomes, and in Pd plating, 20 g / L of diamminedichloropalladium as a Pd component, 75 g / L of ammonium chloride, pH 9, bath temperature 40 ° C., current density of 1.5 A / It was produced by adjusting the plating time so as to obtain a predetermined film thickness in dm 2 .
  • the plating thickness of Conventional Example 2 was 1 ⁇ m.
  • a fluorescent X-ray film thickness meter (SFT9500 manufactured by Hitachi High-Tech Co., Ltd.) was used for arbitrary 5 points, and an average value at a collimator diameter of 0.2 mm and each film thickness measurement time of 30 seconds was calculated. did.
  • Example 21 after performing 6 ⁇ m Ni plating under the same conditions as in Example 1, etching was performed under the following conditions until the Ni plating thickness became 5 ⁇ m.
  • -Etching conditions Etching solution: NR1870 manufactured by MEC, etching solution temperature: 25 ° C, etching time: 30 seconds
  • the shear strength was measured by a pudding cup mold test using a resin-molded surface of a test piece of a conductive material as a sample.
  • the test conditions were resin: GE-7470LA resin manufactured by Hitachi Chemical Co., Ltd., bottom surface area of pudding cup: 10 mm 2 , resin molding time: 120 seconds, mold cure: 175 ° C. for 8 hours, and 10 shear force measurements (N10).
  • the average value of was calculated as the shear strength (initial).
  • the shear was measured with a bond tester (Series 4000) manufactured by Daiji at a shear rate of 100 ⁇ m / sec.
  • the evaluation criteria are as follows. ⁇ : 20 kg or more ⁇ : 15 kg or more and less than 20 kg ⁇ : less than 15 kg
  • ⁇ Share strength (high temperature and high humidity test) The shear strength was similarly measured after the sample produced as described above was allowed to stand in an environment of a temperature of 85 ° C. and a humidity of 85% for 168 hours.
  • the evaluation criteria are as follows. ⁇ : No peeling ⁇ : Peeling rate less than 20% ⁇ : Peeling rate of 20% or more The peeling rate indicates the rate at which the surface of the conductive material and the resin are peeled from the image by ultrasonic flaw detection. Calculated and evaluated.
  • the surface of the conductive material satisfied the following conditions (1) and (2), so that the shear strength in both the initial and high temperature and high humidity tests was very good, and the heat cycle test was performed.
  • the evaluation criteria for the shear strength of are any of ⁇ , ⁇ , and ⁇ , and it was found that the resin exhibits excellent resin adhesion even in a harsh environment.
  • Arithmetic mean surface roughness height Sa is 0.25 to 0.4 ⁇ m
  • the peak density Spd of the ridges is 2.5 million or more per 1 mm 2
  • the surface of the conductive material is at least 1 of the above conditions (1) and (2). Since it did not satisfy these requirements, at least the shear strength of the heat cycle test was poor.

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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
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  • Electroplating Methods And Accessories (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Laminated Bodies (AREA)

Abstract

Cette invention concerne un matériau conducteur électrique présentant une excellente adhérence à la résine même dans un environnement rude. Plus particulièrement, l'invention concerne un matériau conducteur électrique à la surface duquel est moulée une résine, ou dont la surface est scellée par une résine, la surface du matériau conducteur électrique étant constituée d'un métal, et satisfait les conditions (1) et (2). (1) : la hauteur moyenne arithmétique de la rugosité de surface Sa est de 0,25 à 0,4 µm. (2) : la densité de pics Spd des pics est d'au moins 2 500 000 pour 1 mm2.
PCT/JP2019/028332 2018-10-18 2019-07-18 Matériau conducteur électrique, article moulé et composant électronique WO2020079904A1 (fr)

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