WO2019235169A1 - 水素リサイクルシステム及び水素リサイクル方法 - Google Patents
水素リサイクルシステム及び水素リサイクル方法 Download PDFInfo
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- WO2019235169A1 WO2019235169A1 PCT/JP2019/019628 JP2019019628W WO2019235169A1 WO 2019235169 A1 WO2019235169 A1 WO 2019235169A1 JP 2019019628 W JP2019019628 W JP 2019019628W WO 2019235169 A1 WO2019235169 A1 WO 2019235169A1
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- hydrogen
- discharge space
- exhaust gas
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- ammonia
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Definitions
- the nitride compound production apparatus is preferably an organometallic vapor phase growth apparatus.
- a palladium alloy thin film can be particularly preferably used.
- Other applicable materials for the hydrogen separation membrane 34 include zirconium-nickel (Zr—Ni) alloy thin film, vanadium-nickel (V—Ni) alloy thin film, niobium-nickel (Nb—Ni) alloy thin film, And one or more metals selected from the group consisting of niobium (Nb), nickel (Ni), cobalt (Co) and molybdenum (Mo), vanadium (V), titanium (Ti), zirconium (Zr), tantalum A thin film made of an alloy with one or more metals selected from the group consisting of (Ta) and hafnium (Hf).
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Electrochemistry (AREA)
- Sustainable Energy (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Chemical Vapour Deposition (AREA)
- Separation Of Gases By Adsorption (AREA)
- Fuel Cell (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201980029047.1A CN112135790A (zh) | 2018-06-05 | 2019-05-17 | 氢回收系统和氢回收方法 |
| US17/056,265 US12024427B2 (en) | 2018-06-05 | 2019-05-17 | Hydrogen recycle system and hydrogen recycle method |
| KR1020207033549A KR102469291B1 (ko) | 2018-06-05 | 2019-05-17 | 수소 리사이클 시스템 및 수소 리사이클 방법 |
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| US18/598,591 US12246963B2 (en) | 2018-06-05 | 2024-03-07 | Hydrogen recycle system and hydrogen recycle method |
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| WO2020261872A1 (ja) * | 2019-06-27 | 2020-12-30 | 国立大学法人東海国立大学機構 | 水素製造装置及び水素製造方法 |
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| JP2022045188A (ja) * | 2020-09-08 | 2022-03-18 | キオクシア株式会社 | ガス回収装置、半導体製造システムおよびガス回収方法 |
| CN116412406A (zh) * | 2021-12-31 | 2023-07-11 | 隆基绿能科技股份有限公司 | 尾气处理系统和尾气处理方法 |
| JP2025528866A (ja) * | 2022-08-24 | 2025-09-02 | ラム リサーチ コーポレーション | ガスリサイクルシステムをもつプラズマ処理システム |
| US20240175126A1 (en) * | 2022-11-28 | 2024-05-30 | Applied Materials, Inc. | Gas recycling systems, substrate processing systems, and related apparatus and methods for semiconductor manufacturing |
| CN116146453A (zh) * | 2023-01-05 | 2023-05-23 | 西安交通大学 | 一种具有超高增压比的自驱动氢气增压系统及操作方法 |
| CN116854034B (zh) * | 2023-07-19 | 2025-04-25 | 西安理工大学 | 板-孔dbd等离子体协同质子交换膜氨气制氢的装置 |
| JP7602682B1 (ja) | 2024-04-09 | 2024-12-18 | 株式会社三井E&S | 水素ガス製造装置、水素ガス供給装置、燃料電池システム、移動体、及び水素ガス製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11285613A (ja) * | 1998-04-03 | 1999-10-19 | Mitsubishi Research Institute Inc | 水素透過膜ポンプシステム |
| JP2007307514A (ja) * | 2006-05-22 | 2007-11-29 | Sharp Corp | 気体浄化装置 |
| JP2014070012A (ja) * | 2012-10-02 | 2014-04-21 | Gifu Univ | 水素生成装置及び水素生成装置を備えた燃料電池システム |
| JP2014214060A (ja) * | 2013-04-26 | 2014-11-17 | 日本パイオニクス株式会社 | 水素の回収方法及びそれを用いた水素の再利用方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7037484B1 (en) * | 2002-06-21 | 2006-05-02 | University Of Central Florida Research Foundation, Inc. | Plasma reactor for cracking ammonia and hydrogen-rich gases to hydrogen |
| US20050214181A1 (en) | 2004-03-26 | 2005-09-29 | Canon Kabushiki Kaisha | Dielectric, gas treatment apparatus using the same, and plasma generator |
| JP4235580B2 (ja) | 2004-04-30 | 2009-03-11 | キヤノン株式会社 | 誘電体 |
| GB0618016D0 (en) * | 2006-09-13 | 2006-10-18 | Boc Group Plc | Method of recycling hydrogen |
| US20080131744A1 (en) | 2006-10-20 | 2008-06-05 | Charles Terrel Adams | Methods and systems of producing molecular hydrogen using a low-temperature plasma system |
| US8220440B2 (en) | 2006-10-20 | 2012-07-17 | Tetros Innovations, Llc | Methods and systems for producing fuel for an internal combustion engine using a low-temperature plasma system |
| AU2007351434A1 (en) | 2006-10-20 | 2008-10-23 | Semgreen, L.P. | Methods and systems of producing molecular hydrogen using a plasma system |
| US7946258B2 (en) | 2006-10-20 | 2011-05-24 | Tetros Innovations, Llc | Method and apparatus to produce enriched hydrogen with a plasma system for an internal combustion engine |
| US20080131360A1 (en) | 2006-10-20 | 2008-06-05 | Charles Terrel Adams | Methods and systems of producing molecular hydrogen using a plasma system at various pressures |
| US20080138676A1 (en) | 2006-10-20 | 2008-06-12 | Charles Terrel Adams | Methods and systems of producing molecular hydrogen using a plasma system in combination with a membrane separation system |
| US8211276B2 (en) | 2006-10-20 | 2012-07-03 | Tetros Innovations, Llc | Methods and systems of producing fuel for an internal combustion engine using a plasma system at various pressures |
| JP2011084422A (ja) * | 2009-10-14 | 2011-04-28 | Shin-Etsu Chemical Co Ltd | 水素ガス回収システムおよび水素ガスの分離回収方法 |
| CN102179169B (zh) | 2011-03-15 | 2012-12-26 | 浙江大学 | 吸附与等离子体选择催化还原脱除氮氧化物的方法 |
| TWI522164B (zh) | 2013-04-26 | 2016-02-21 | Japan Pionics | And a method of treating the exhaust gas discharged from the manufacturing step of the gallium nitride-based compound semiconductor |
| US20150211378A1 (en) | 2014-01-30 | 2015-07-30 | Boxer Industries, Inc. | Integration of plasma and hydrogen process with combined cycle power plant, simple cycle power plant and steam reformers |
| JP6241803B1 (ja) | 2017-01-30 | 2017-12-06 | 国立大学法人岐阜大学 | 水素生成装置 |
-
2018
- 2018-06-05 JP JP2018107532A patent/JP7072168B2/ja active Active
-
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-
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- 2024-03-07 US US18/598,591 patent/US12246963B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11285613A (ja) * | 1998-04-03 | 1999-10-19 | Mitsubishi Research Institute Inc | 水素透過膜ポンプシステム |
| JP2007307514A (ja) * | 2006-05-22 | 2007-11-29 | Sharp Corp | 気体浄化装置 |
| JP2014070012A (ja) * | 2012-10-02 | 2014-04-21 | Gifu Univ | 水素生成装置及び水素生成装置を備えた燃料電池システム |
| JP2014214060A (ja) * | 2013-04-26 | 2014-11-17 | 日本パイオニクス株式会社 | 水素の回収方法及びそれを用いた水素の再利用方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020261872A1 (ja) * | 2019-06-27 | 2020-12-30 | 国立大学法人東海国立大学機構 | 水素製造装置及び水素製造方法 |
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| US20240217811A1 (en) | 2024-07-04 |
| KR20200143489A (ko) | 2020-12-23 |
| DE112019002865T5 (de) | 2021-03-11 |
| US12024427B2 (en) | 2024-07-02 |
| JP2019210185A (ja) | 2019-12-12 |
| JP7072168B2 (ja) | 2022-05-20 |
| US20210238034A1 (en) | 2021-08-05 |
| KR102469291B1 (ko) | 2022-11-18 |
| CN112135790A (zh) | 2020-12-25 |
| DE112019002865B4 (de) | 2023-01-26 |
| US12246963B2 (en) | 2025-03-11 |
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