WO2019174345A1 - 基板承载装置的底框、基板承载装置及基板输送机构 - Google Patents

基板承载装置的底框、基板承载装置及基板输送机构 Download PDF

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Publication number
WO2019174345A1
WO2019174345A1 PCT/CN2018/122311 CN2018122311W WO2019174345A1 WO 2019174345 A1 WO2019174345 A1 WO 2019174345A1 CN 2018122311 W CN2018122311 W CN 2018122311W WO 2019174345 A1 WO2019174345 A1 WO 2019174345A1
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WO
WIPO (PCT)
Prior art keywords
vertical rod
substrate
bottom frame
carrying device
extension
Prior art date
Application number
PCT/CN2018/122311
Other languages
English (en)
French (fr)
Inventor
李桥东
Original Assignee
惠科股份有限公司
重庆惠科金渝光电科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 惠科股份有限公司, 重庆惠科金渝光电科技有限公司 filed Critical 惠科股份有限公司
Priority to US16/979,891 priority Critical patent/US11705352B2/en
Publication of WO2019174345A1 publication Critical patent/WO2019174345A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34—Devices for discharging articles or materials from conveyor 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Definitions

  • the present application relates to the field of display device manufacturing technologies, and in particular, to a substrate carrying device bottom frame, a substrate carrying device, and a substrate transport mechanism.
  • the manufacturing process of the display panel involves the manufacturing process of the substrate.
  • the manufacturing of the substrate requires a plurality of processes, and it is necessary to complete the flow of the substrate through a plurality of conveying mechanisms, specifically, the device for carrying the substrate is placed in the conveying mechanism, and the conveying is performed.
  • a roller is arranged on the machine platform, and the substrate is transferred by the conveyor to the roller of the machine, and then stored in the carrying device.
  • the carrying device comprises a bottom frame and a multi-layer structure for carrying the substrate disposed on the bottom frame.
  • a bottom frame of the substrate carrying device including:
  • a second vertical rod extending portion connected to one end of the second vertical rod corresponding to the inflow of the substrate; the first vertical rod extending portion and the second vertical rod extending portion can accommodate at least one set of rolling elements for conveying the substrate .
  • first upright extension and the second upright extension are identical in structure and mirror symmetrical.
  • first vertical rod extension is integrally formed with the first vertical rod
  • second vertical rod extension and the second vertical rod are integrally formed.
  • the first vertical rod extension comprises:
  • first vertical rod extension extending coaxially from the first vertical rod
  • a first vertical rod bending section formed by bending the first vertical rod extension by 90°
  • the second vertical rod extension includes:
  • a second vertical rod bending section formed by bending the second vertical rod extension by 90°
  • the end of the first vertical rod bending section is disposed opposite to the end of the second vertical rod bending section.
  • first vertical rod extension is coupled to the first vertical rod by a first adjustable member
  • second vertical rod extension is passed through the second adjustable member and the second vertical rod
  • the movable connection adjusts the spacing between the first vertical rod extension and the second vertical rod extension.
  • an end of the first vertical rod flowing away from the substrate is provided with a third vertical rod extension, and an end of the second vertical rod flowing away from the substrate is provided with a fourth vertical rod extension.
  • the third upright extension and the fourth upright extension are identical in structure and mirror symmetrical.
  • first upright extension, the second upright extension, the third upright extension, and the fourth upright extension are identical in construction.
  • a plurality of the crossbars are equally spaced.
  • the pitch of the two crossbars of the head of the bottom frame is equal to the pitch of the two crossbars of the tail and less than the pitch of the middle crossbar of the bottom frame.
  • the first vertical rod extension is movably coupled to the first vertical rod by a first adjustable member
  • the second vertical rod extending portion is movable by the second adjustable member and the second vertical rod connection.
  • Another object of the present application is to provide a substrate carrying device comprising a bottom frame and a plurality of supporting structures, the bottom frame comprising:
  • a second vertical rod extending portion connected to one end of the second vertical rod corresponding to the inflow of the substrate; the first vertical rod extending portion and the second vertical rod extending portion can accommodate at least one set of rolling elements for conveying the substrate ;
  • the support structure is disposed side by side on the bottom frame, and is supported by the cross bar to be disposed as a carrier substrate;
  • Each of the support structures includes a plurality of support members stacked in a stack, and the support members of the plurality of support structures form a multi-layer bearing surface.
  • the support structure further includes:
  • a frame comprising two support arms and a plurality of reinforcing arms connected between the two support arms;
  • the reinforcing arm is parallel to the support member
  • a reinforcing arm adjacent to the bottom frame is located on the crossbar;
  • Two of the support arms are coupled to the first vertical rod and the second vertical rod, respectively.
  • a portion of the support arm that is connected to the first vertical rod and the second vertical rod is provided with a notch; the first vertical rod is provided with a first connecting strip, and the second vertical rod is provided A second connecting strip is provided, and the first connecting strip and the second connecting strip are respectively embedded in the notch.
  • the support member comprises a smooth steel wire
  • the support arm has a plurality of through holes extending in a length direction thereof, and the through holes formed by the two support arms are opposite in height and the same height, and each of the two opposite sides And the same height through hole connects one of the wires.
  • the crossbar is provided with a locator.
  • Another object of the present application is to provide a substrate transport mechanism, including:
  • a rolling device disposed on the machine and configured to transmit a substrate
  • a substrate carrying device disposed as a carrier substrate
  • a lifting device configured to drive the substrate carrying device to move up and down, so that a plurality of bearing surfaces of the substrate carrying device are aligned with the rolling device to transfer the substrate to a corresponding bearing surface
  • the substrate carrying device comprises a bottom frame and a plurality of supporting structures, the bottom frame comprising:
  • a second vertical rod extending portion connected to one end of the second vertical rod corresponding to the inflow of the substrate; the first vertical rod extending portion and the second vertical rod extending portion can accommodate at least one set of rolling elements for conveying the substrate ;
  • the support structure is disposed side by side on the bottom frame, and is supported by the cross bar to be disposed as a carrier substrate;
  • Each of the support structures includes a plurality of support members stacked in a stack, and the support members of the plurality of support structures form a multi-layer bearing surface;
  • the rolling device includes a plurality of rows of rolling members, and at a portion of the inflow of the substrate, a corresponding region between the first vertical rod extending portion and the second vertical rod extending portion of the bottom frame is provided with at least one row of rolling members.
  • the bottom frame of the substrate carrying device is connected to the first vertical rod extending portion and the second vertical rod extending portion at one end of the first vertical rod and the second vertical rod corresponding to the substrate, and the bottom portion can accommodate at least A set of rolling elements for transporting the substrate, that is, there is a vacant space between the two, and one or more sets of rolling elements can be added to the area between the two on the machine of the substrate conveying mechanism, narrowing the conveyor belt and rolling
  • the spacing between the components allows the substrate to smoothly flow into the rolling member and flow into the substrate carrying device, thereby solving the problem of fragmentation.
  • the design of the first vertical rod extension and the second vertical rod extension makes the bottom frame suitable for different types of storage modes, making the bottom frame and the substrate carrying device including the bottom frame more suitable.
  • the substrate transport mechanism provided by the embodiment of the present application can reduce the width of the connecting region by adding a rolling member at the place where the machine is engaged with the conveyor belt, thereby avoiding the substrate fragmentation.
  • FIG. 1 is a schematic structural view of a bottom frame of a substrate carrying device according to an embodiment of the present application
  • FIG. 2 is another schematic structural diagram of a bottom frame of a substrate carrying device according to an embodiment of the present application.
  • FIG. 3 is a schematic structural diagram of a substrate carrying device according to an embodiment of the present application.
  • FIG. 4 is a schematic diagram of a support structure of a substrate carrying device provided by an embodiment of the present application.
  • FIG. 5 is a partial structural schematic view of a support arm of a substrate carrying device provided by an embodiment of the present application.
  • FIG. 6 is a schematic structural diagram of a substrate transport mechanism provided by an embodiment of the present application.
  • the embodiment of the present application provides a bottom frame 11 of a substrate carrying device, which is a part of the substrate carrying device 10 , and the bottom frame 11 and the supporting structure 12 connected by the bottom frame 11 constitute a substrate bearing.
  • the device 10 is for carrying a substrate 20, such as a sheet of glass substrate.
  • the substrate carrier bottom frame 11 (hereinafter simply referred to as "bottom frame 11") includes a first vertical rod 111 and a second vertical rod 112; and a plurality of cross bars 113 along the first vertical rod 111 and the second The longitudinal direction of the vertical rods 112 are sequentially arranged, and are connected between the first vertical rods 111 and the second vertical rods 112.
  • the bottom frame 11 further includes a first vertical rod extending portion 114 connected to the first vertical rod 111 corresponding to the substrate 20 One end of the inflow; the second vertical rod extending portion 115 is connected to one end of the second vertical rod 112 corresponding to the inflow of the substrate 20; wherein the first vertical rod extending portion 114 and the second vertical rod extending portion 115 can be used to accommodate at least A set of rolling elements for transporting the substrate 20.
  • the first vertical rod 111 and the second vertical rod 112 and the plurality of cross bars 113 connected therein constitute a two-dimensional frame structure, and the spacing between the plurality of cross bars 113 depends on the width of the substrate 20 to be carried, usually smaller than the substrate. 20 is one-half of the dimension in the length direction of the first vertical rod 111 and the second vertical rod 112 in order to enable the support structure 12 mounted on the crossbar 113 to stabilize the carrier substrate 20.
  • the first vertical rod extending portion 114 and the second vertical rod extending portion 115 are directly or indirectly connected to the first vertical rod 111 and the second vertical rod 112, respectively, and the ends of the two are not connected, and the spacing between the two is greater than
  • the width of the rolling member of the transfer substrate 20 is designed to provide a escaping space for mounting the rolling member to prevent the substrate 20 from being broken, the principle of which will be described later.
  • the conventional bottom frame 11 is a rectangular frame structure.
  • a plurality of cross bars are disposed inside the rectangular frame, and a cross bar is respectively connected at both ends of the first vertical rod and the second vertical rod, that is, the two ends do not extend outward.
  • the bottom frame 11 of the embodiment of the present application is equivalent to moving the cross bar 113 of the first vertical rod 111 and the second vertical rod 112 corresponding to the inflow end of the substrate 20 by a certain distance, and ensuring that the number of the cross bars 113 is not reduced.
  • the front end of the first vertical rod 111 and the second vertical rod 112 (the end corresponding to the inflow of the substrate 20) is freely extended such that the front end between the first vertical rod 111 and the second vertical rod 112 is vacant, so that when it is used In the case of the substrate carrying device 10, the above-mentioned fragmentation problem can be solved by the cooperation of the rolling elements.
  • the specific principles are as follows:
  • the system includes a transfer belt 30 and a substrate transport mechanism that are coupled to each other, and the substrate carrying device 10 is in the substrate transport mechanism.
  • the conveyor belt 30 is used to transport the substrate 20, and the substrate transport mechanism is used to finally load the substrate 20 into the substrate carrier 10.
  • the substrate conveying mechanism comprises at least a machine table 40 and a lifting device 50 capable of lifting and lowering.
  • the machine table 40 is provided with a rolling device, and the rolling device comprises a plurality of rows of rolling members 60.
  • the machine table 40 and its rolling members 60 and the conveyor belt 30 are highly uniform and connected. .
  • the substrate carrying device 10 is mounted on the lifting device 50.
  • the rolling member 60 is inserted into the gap of the substrate carrying device 10.
  • the lifting device 50 can be lifted and lowered relative to the machine table 40 to drive the substrate carrying device 10 up and down.
  • the structure of the machine 40 is not The upper and lower movement of the interference lifting device 50 is performed.
  • the support structure 12 of the substrate carrying device 10 forms a plurality of bearing surfaces of different heights parallel to the bottom frame 11.
  • the plurality of bearing surfaces of the substrate carrying device 10 are aligned with the rolling member 60, and the substrate 20 is introduced into the corresponding bearing surface through the rolling member 60, and then loaded into the substrate carrying device 10. .
  • the cross bar 113 at the foremost end of the bottom frame 11 (ie, the junction of the machine table 40 and the conveyor belt 30) is located at the foremost end of the machine table 40, and a support structure 12 is mounted thereon to avoid the cross bar 113 or the cross bar.
  • the support structure 12 on the 113 interferes with the rolling member 60, where the rolling member 60 is not mounted, and the width of the portion is large, and no rolling member 60 is received nearby, and the substrate 20 flows into the rolling member 60 by the conveyor belt 30.
  • the leading edge is easy to sink there, and then hits the crossbar 113, the rolling member 60 or the machine table 40, causing fragmentation.
  • the front end rail 113 is moved backward, and there is a vacant space between the first vertical rod extending portion 114 and the second vertical rod extending portion 115, so that the two can be corresponding to the machine 40.
  • the inter-region increases one or more sets of rolling members 60, narrowing the spacing between the conveyor belt 30 and the rolling members 60, allowing the substrate 20 to smoothly flow into the rolling members 60 and into the support structure 12, thereby solving the fragmentation problem.
  • the inflow and outflow of the substrate 20 are reciprocal processes. Both ends of the machine 40 are connected to the conveyor belt 30, one end serves as an inflow port, the other end serves as an outflow port, or the same end serves as an inflow port and an outflow port respectively in different processes, and when the substrate 20 is stored in the substrate carrying device 10,
  • the substrate carrier device 10 can be moved up and down, and the substrate 20 on each bearing surface is sequentially brought into contact with the rolling member 60, and is driven by the rolling member 60 to the conveyor belt 30 to transport the substrate 20.
  • the substrate 20 can also be prevented from hitting the conveyor belt 30 when flowing out, thereby avoiding fragmentation. .
  • first vertical rod extension 114 and the second vertical rod extension 115 are adapted for different types of storage modes, for example in a storage mode, the first vertical rod extension 114 and the second vertical rod extension may not be utilized 115 is moved or placed, and in another storage mode, it is necessary to move or position with the first vertical rod extension 114 and the second vertical rod extension 115, so that the suitability of the bottom frame 11 is better.
  • the first vertical rod 111 and the second vertical rod 112 are parallel, and the horizontal rod 113 is perpendicular to the first vertical rod 111 and the second vertical rod 112.
  • the first vertical rod 111 and the second vertical rod 112 are 112.
  • the crossbar 113 constitutes a bottom frame 11 of a two-dimensional shape, and the support structure 12 is attached to the crossbar 113 to form the substrate carrying device 10.
  • the first vertical rod extending portion 114 and the first vertical rod 111 are integrally formed
  • the second vertical rod extending portion 115 and the second vertical rod 112 are integrally formed.
  • the first vertical rod 111, the second vertical rod 112, and the cross rod 113 may be connected by welding, or the bottom frame 11 may be directly formed by integral molding.
  • first upright extension 114 and the second upright extension 115 are structurally identical and symmetrically disposed for ease of manufacture and facilitate storage management.
  • the lengths of the first vertical rod 111, the second vertical rod 112, and the cross rod 113 depend on the size of the substrate 20, and the lengths of the first vertical rod 111 and the second vertical rod 112 are greater than the length of the substrate 20 at the first vertical rod 111 and the second
  • the length of the vertical rod 112 in the longitudinal direction, the length of the crossbar 113 is larger than the dimension of the substrate 20 in the longitudinal direction of the crossbar 113.
  • the size and shape of the first upright extension 114 and the second upright extension 115 are dictated by ease of placement or retrieval in storage management.
  • a positioner 1131 may be disposed on the outer wall of one or several cross bars 113 for positioning the corresponding carrier device when transporting the substrate carrying device 10 to ensure the substrate carrying device. 10 does not shake.
  • the positioner 1131 can be a bump structure, and the corresponding carrier can be provided with a concave block to cooperate with it.
  • the positioner 1131 can also be a card slot, and the corresponding carrier is provided with a buckle to cooperate with it.
  • Other forms of locators can also be used, which are not enumerated in this embodiment.
  • the first vertical rod extension 114 is integrally formed with the first vertical rod 111, the second vertical rod extension 115 and the second vertical rod 112 integrated molding. In this way, the bottom frame is easy to manufacture, and the structure is strong and not easily damaged.
  • the first vertical rod extension 114 includes a first vertical rod extension 1141 that is coaxially extended by the first vertical rod 111, and further includes a first vertical rod bending portion 1142 extending from the first vertical rod
  • the segment 1141 is formed by bending 90°
  • the second vertical rod extension 115 includes a second vertical rod extension 1151 formed by the second vertical rod 112 extending coaxially, and further comprising a second vertical rod bending portion 1152, by the second
  • the vertical rod extension 1151 is formed by bending 90°
  • the first vertical rod bending portion 1142 is disposed opposite to the second vertical rod bending portion 1152.
  • first vertical rod extension 114 and the second vertical rod extension 115 are both rectangular and symmetrical, such that the design facilitates the placement and management of the substrate carrying device 10, such as in a storage system, with the aid of the first The vertical rod extension 114 and the second vertical rod extension 115 place or move the substrate carrier 10.
  • the total length of the bottom frame (the length of the substrate inflow direction) is 2720 ⁇ 2 mm, and the total width is 2410 mm.
  • the length of the first vertical rod 111 and the second vertical rod 112 is 2590 ⁇ 2 mm
  • the length of the horizontal rod 113 is 2310 mm
  • the length of the first vertical rod extension 1141 and the second vertical rod extension 1151 is 65 mm
  • the length of the bent section 1142 and the second vertical rod bending section 1152 is 35 mm
  • the farthest length of the outer side wall of the first vertical rod extension 1141 to the end of the first vertical rod bending section 1142 is 85 mm.
  • the first vertical rod bending section 1142 and the second vertical rod bending section 1152 and the diameter may be the same as the diameters of the first vertical rod extension 1141 and the second vertical rod extension 1151, respectively, both being 50 mm.
  • the bottom frame can carry a diagonal of a maximum size of 3629 ⁇ 3 mm.
  • the first vertical rod bending section 1142 and the second vertical rod bending section 1152 and the diameter may be larger than the diameters of the first vertical rod extension 1141 and the second vertical rod extension 1151, respectively; or the first vertical rod is bent
  • the segment 1142 and the second vertical rod bending section 1152 and the diameter may be smaller than the diameters of the first vertical rod extension 1141 and the second vertical rod extension 1151, respectively.
  • both the first vertical rod extension 114 and the second vertical rod extension 115 may be designed as a movable connection structure. That is, the first vertical rod extension 114 may be, but is not limited to, connected to the first vertical rod 111 by the first adjustable member 1101, such that the first vertical rod extending portion 114 may move, the moving direction may include being perpendicular to the first vertical rod
  • the second vertical rod extension 115 may be, but is not limited to, movably connected to the second vertical rod 112 by the second adjustable member 1102, such that the second vertical rod extension 115 may Moving, the direction of movement may include a direction perpendicular to the second vertical rod 112 and a direction parallel to the second vertical rod 112.
  • first vertical rod extending portion 114 and the second vertical rod extending portion 115 respectively move relative to each other based on the adjustment of the first adjustable member 1101 and the second adjustable member 1102, thereby changing the spacing between the two, and The distance between a vertical rod extension 114 and the first vertical rod 111, and the distance between the second vertical rod extension 115 and the second vertical rod 112.
  • This design enables the bottom frame 11 and the substrate carrying device 10 using the bottom frame 11 to be adapted to storage devices of different configurations and sizes. For example, when the widths of the clamping mechanisms of the substrate carrying device 10 are varied, the positions of the first vertical rod extension 114 and the second vertical rod extension 115 can be adjusted to accommodate different clamping mechanisms.
  • the first adjusting member 1101 and the second adjusting member 1102 may be a retractable kit structure including at least two mutually sleeved telescopic rods, wherein One rod connects the end of the first vertical rod 111, and the other rod connects the first vertical rod extension 114, and the position of the first vertical rod extension 114 is adjusted by the telescopic movement.
  • the structure and principle of the second adjusting member can be referred to the first adjusting member.
  • the first adjusting member 1101 includes a block connected to the first vertical rod, and is disposed on the block. Slide rails on.
  • the first vertical rod extending portion 114 is provided with a sliding structure such as a sliding groove connected to the sliding rail. Through the cooperation of the slide rail and the sliding slot, the first vertical rod extending portion 114 can slide on the sliding rail toward or away from the first vertical rod 111.
  • the first vertical member can be used by the locking member.
  • the rod extension 114 is locked.
  • the positions of the first upright extension 114 and the second upright extension 115 are then adjusted.
  • the structure and principle of the second adjusting member 1102 can be referred to the first adjusting member.
  • one end of the first vertical rod 111 flowing away from the substrate 20 is provided with a third vertical rod extending portion 116, and the end of the second vertical rod 112 flowing away from the substrate 20 is provided with a fourth portion.
  • Vertical rod extension 117 The first vertical rod extension 114, the second vertical rod extension 115, the third vertical rod extension 116, and the fourth vertical rod extension 117 are identical in structure and centrally symmetrical. That is, the third vertical rod extending portion 116 and the fourth vertical rod extending portion 117 may be integrally formed with the first vertical rod 111 and the second vertical rod 112, respectively, or may be movably connected. As shown in FIG.
  • the third vertical rod extension 116 and the fourth vertical rod extension 117 are connected to the first vertical rod 111 and the second vertical rod 112 by a third adjustment member 1103 and a fourth adjustment member 1104, respectively.
  • a third vertical rod extension portion 116 and a fourth vertical rod extension portion 117 are provided, corresponding to the tail end of the bottom frame 11 (the end from which the substrate 20 flows in)
  • the cross bar 113 moves inwardly, vacating the trailing ends of the first upright rod 111 and the second upright rod 112, such that between the third upright rod extension 116 and the fourth upright rod extension 117 on the machine table 40
  • one or more sets of rolling members 60 may be added to transmit the substrate 20 more stably.
  • the structure of the bottom frame 11 is symmetrical, easy to manufacture, and convenient for storage management.
  • one ends of the first vertical rod extension 114 and the second vertical rod extension 115 may serve as the inflow end of the substrate 20, and the third vertical rod One end of the extending portion 116 and the fourth vertical rod extending portion 117 may serve as an outflow end, or may be one end of the third vertical rod extending portion 116 and the fourth vertical rod extending portion 117 as the inflow end of the substrate 20, the first vertical rod extending portion One end of the first vertical rod extending portion 115 and the second vertical rod extending portion 115 are used as the outflow end, and the first vertical rod extending portion 114 and the second vertical rod extending portion 115 are respectively used as the inflow end and the outflow end of the substrate 20 in different processes. It is also possible that one ends of the third vertical rod extension 116 and the fourth vertical rod extension 117 serve as the inflow end and the outflow end of the substrate 20, respectively, in different processes.
  • the bottom frame 11 provided in the embodiment of the present application is equivalent to the fact that the number of the cross bars 113 of the bottom frame 11 remains unchanged, and the rolling member 60 can be added to the machine table 40, so that it can be maintained based on convenient manufacturing considerations.
  • the manufacturing process of the bottom frame 11 only the position of the crossbar 113 of the foremost end and the last end of the bottom frame 11 is adjusted, and the shapes of the first upright extension 114 and the second upright extension 115 are designed.
  • the position of the other crossbars 113 can also be changed so that the pitches of the crossbars 113 are uniform, which is not limited in this embodiment.
  • the present application further provides a substrate carrying device 10, as shown in FIG. 2, the substrate carrying device 10 includes the above-mentioned bottom frame 11 and a plurality of supporting structures 12, and a plurality of supporting structures 12 are arranged side by side on the bottom frame.
  • the support structure 12 is supported by the cross bar 113.
  • the support structure 12 is generally a two-dimensional planar structure, and each support structure 12 includes a plurality of support members 121 stacked in a stack.
  • the support member 121 and the cross bar 113 are parallel, and the entire support structure 12 and the cross bar 113 are in the same plane, and the plurality of support structures 12 are disposed in parallel.
  • the support members 121 of the plurality of support structures 12 at the same height form a bearing surface, such that the multilayer support members 121 can form a plurality of bearing surfaces.
  • the load bearing surface can vary from several layers to hundreds of layers or even more layers.
  • the support member 121 may be a rigid wire and the surface is smooth to avoid scratching the substrate 20, the strength of which is required to stabilize the carrier substrate 20, and a plurality of rigid wires at the same height form a bearing surface.
  • the support member 121 may include a steel wire and a soft smooth cladding wrapped around the outer surface of the steel wire for protecting the surface of the substrate 20 from scratches.
  • the cladding can be made of PEEK (polyetheretherketone) material.
  • the support structure 12 further includes a frame including at least two support arms 122 and a plurality of reinforcing arms 123 connected between the two support arms 122.
  • the support arms 122 and the reinforcing arms 123 are formed in a grid shape. frame.
  • the reinforcing arm 123 is parallel to the support member 121. Both ends of the support member 121 are also connected to the support arm 122.
  • the reinforcing arm 123 near the bottom frame 11 is directly mounted on the cross bar 113.
  • the two support arms 122 are respectively connected to the first vertical rod.
  • the 111 and the second vertical rod 112 are fixed to the first vertical rod 111 and the second vertical rod 112 by a joint or the like to maintain the stability of the entire substrate carrying device 10.
  • a plurality of through holes 1221 are defined in the length direction of the support arm 122, and the through holes 1221 formed by the two support arms 122 are opposite to each other.
  • the height is the same, and each of the two opposite and equal-shaped through holes 1221 is for connecting a support member 121.
  • One end of the support member 121 passes through the through hole 1221 and is fixed by the locking member, and the other end is connected to the spring.
  • the hole 1221 is fixed by the locking member, so that the spring is connected at one end, so that the tension of the support member 121 can be adjusted, and the tensioning member at the other end can achieve different degrees of tension.
  • a first connecting strip 118 is disposed on the first vertical rod 111 of the bottom frame 11, and a second connecting strip 119 is disposed on the second vertical rod 112 to support
  • One end of the two support arms 122 of the structure 12 is provided with a notch 1222.
  • the notch 1222 is aligned with the first connecting strip 118 and the second connecting strip 119, so that the first connecting strip 118 and the second connecting strip 119 are respectively embedded in the two notches 1222, and then the first connecting strip 118 and a support are connected through the connecting member.
  • the arms 122 are connected to connect the second connecting strip 119 with the other supporting arm 122.
  • the present application further provides a substrate transport mechanism, with reference to FIG. 5, including a machine table 40; a rolling device disposed on the machine table 40 for transporting the substrate 20; and a lifting device 50 for driving
  • the substrate carrying device 10 is lifted and lowered to make the plurality of bearing surfaces of the substrate carrying device 10 corresponding to the rolling device step by step, and the substrate 20 is transferred to the corresponding bearing surface; wherein the rolling device comprises a plurality of rows of rolling members 60 flowing in the substrate 20 At one end, a corresponding area between the first vertical rod extension 114 and the second vertical rod extension 115 of the bottom frame 11 is provided with at least one row of rolling members 60.
  • the two ends of the rolling member 60 are connected to the two mounting members 70 of the machine table 40.
  • the substrate carrying device 10 is between the two mounting members 70, and the rolling members 60 are inserted into the supporting structure 12 of the substrate carrying device 10. Between, and the rolling member 60 and the support structure 12 are misaligned to avoid interference with the support member 121.
  • the lifting device 50 drives the substrate carrying device 10 to move up and down and the rolling member 60 does not move, so that the rolling member 60 corresponds to the supporting members 121 of different heights, and the substrate 20 is placed into the substrate carrying device 10 piece by piece.
  • the machine table 40 is provided with at least one row of rolling members 60 in a corresponding region between the first vertical rod extending portion 114 and the second vertical rod extending portion 115, the substrate 20 can be smoothly connected when the substrate 20 is fed into the rolling member 60 by the conveyor belt 30. To avoid bumps.
  • the lifting device 50 can be coupled to the machine table 40 or can be disposed independently of the machine table 40.
  • first vertical rod 111 and the second vertical rod 112 of the corresponding bottom frame 11 are respectively provided with a third vertical rod extending portion 116 and a fourth vertical rod extending portion 117, and the corresponding position on the machine 40
  • the area between the third vertical rod extension 116 and the fourth vertical rod extension 117 is also provided with at least one row of rolling members 60 to make the transfer of the substrate 20 more stable.

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Abstract

一种基板承载装置的底框（11），具有第一竖杆（111）和第二竖杆（112）；多个横杆（113），沿着第一竖杆（111）和第二竖杆（112）的长度方向排布，且连接于第一竖杆（111）和第二竖杆（112）之间；第一竖杆延伸部（114），连接于第一竖杆（111）对应基板（20）流入的一端；第二竖杆延伸部（115），连接于第二竖杆（112）对应基板（20）流入的一端；第一竖杆延伸部（114）和第二竖杆延伸部（115）之间可容纳至少一组用于传送基板（20）的滚动件。

Description

基板承载装置的底框、基板承载装置及基板输送机构
本申请要求于2018年3月12日提交中国专利局，申请号为201810199082.5，发明名称为“一种基板承载装置的底框、基板承载装置及基板输送机构”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及显示设备制造技术领域，特别涉及一种基板承载装置底框、基板承载装置及基板输送机构。
背景技术
这里的陈述仅提供与本申请有关的背景信息，而不必然构成现有技术。显示面板的制造过程中涉及到基板的制造加工，基板的制造需要经过多道工序，必然需要经过若干个输送机构完成基板的流转，具体是将用于承载基板的装置放置于输送机构中，输送机构的机台上设有滚轮，由传送带将基板传送到机台的滚轮上，再流入承载装置中存放。承载装置包括底框和设置于底框上的用于承载基板的多层结构，在传送带和机台对接的位置，存在较宽的缝隙，基板由传送带流入滚轮上时，前沿容易下沉导致撞片或流歪，造成基板破片，影响基板良率，造成浪费。
申请内容
本申请的一个目的在于提供一种基板承载装置的底框，包括但不限于防止基板在传送时发生撞片或流歪。
本申请实施例采用的技术方案是：一种基板承载装置的底框，包括：
第一竖杆和第二竖杆；
多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件。
在一个实施例中，所述第一竖杆延伸部和第二竖杆延伸部结构相同且镜像对称设置。
在一个实施例中，所述第一竖杆延伸部与所述第一竖杆一体成型，所述第二竖杆延伸部和所述第二竖杆一体成型。
在一个实施例中，所述第一竖杆延伸部包括：
第一竖杆延长段，由所述第一竖杆同轴延伸而成；
第一竖杆弯折段，由所述第一竖杆延长段弯折90°形成；
所述第二竖杆延伸部包括：
第二竖杆延长段，由所述第二竖杆同轴延伸而成；
第二竖杆弯折段，由所述第二竖杆延长段弯折90°形成；
所述第一竖杆弯折段的末端与所述第二竖杆弯折段的末端相向设置。
在一个实施例中，所述第一竖杆延伸部通过第一可调件与所述第一竖杆连接，所述第二竖杆延伸部通过第二可调件与所述第二竖杆活动连接，使所述第一竖杆延伸部和第二竖杆延伸部之间的间距可调。
在一个实施例中，所述第一竖杆远离所述基板流入的一端设有第三竖杆延伸部，所述第二竖杆远离所述基板流入的一端设有第四竖杆延伸部。
在一个实施例中，所述第三竖杆延伸部和第四竖杆延伸部结构相同且镜像对称设置。
在一个实施例中，所述第一竖杆延伸部、第二竖杆延伸部、第三竖杆延伸部和第四竖杆延伸部的结构相同。
在一个实施例中，多个所述横杆等间距排布。
在一个实施例中，所述底框的首部两个横杆的间距和尾部两个横杆的间距相等且小于所述底框的中间横杆的间距。
在一个实施例中，所述第一竖杆延伸部通过第一可调件与第一竖杆可移动连接，所述第二竖杆延伸部通过第二可调件与第二竖杆可移动连接。
本申请的另一目的在于提供一种基板承载装置，包括底框和多个支撑结构，所述底框包括：
第一竖杆和第二竖杆；
多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件；
所述支撑结构并排设置于所述底框上，通过所述横杆支撑，设置为承载基板；
每个所述支撑结构包括层叠设置的多个支撑件，多个所述支撑结构的支撑件形成多层承载面。
在一个实施例中，所述支撑结构还包括：
框架，包括两个支撑臂以及连接于所述两个支撑臂之间的多个加强臂；
所述加强臂与所述支撑件平行；
靠近所述底框的加强臂位于所述横杆上；
两个所述支撑臂分别连接于所述第一竖杆和第二竖杆上。
在一个实施例中，所述支撑臂与所述第一竖杆和第二竖杆连接的部位设有缺口；所述第一竖杆上设有第一连接条，所述第二竖杆上设有第二连接条，所述第一连接条和第二连接条分别嵌入所述缺口中。
在一个实施例中，所述支撑件包括表柔滑的钢丝，所述支撑臂延其长度方向开设有多个通孔，两个支撑臂开设的通孔两两相对且高度相同，每两个相对且等高的通孔连接一根所述钢丝。
在一个实施例中，所述横杆上设有定位器。
本申请的又一目的在于提供一种基板输送机构，包括：
机台；
滚动装置，设置于所述机台上，设置为传送基板；
基板承载装置，设置为承载基板；
升降装置，设置为带动所述基板承载装置升降，使所述基板承载装置的多个承载面逐级与所述滚动装置对齐，以将所述基板传送至相应承载面；
其中，所述基板承载装置包括底框和多个支撑结构，所述底框包括：
第一竖杆和第二竖杆；
多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖 杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件；
所述支撑结构并排设置于所述底框上，通过所述横杆支撑，设置为承载基板；
每个所述支撑结构包括层叠设置的多个支撑件，多个所述支撑结构的支撑件形成多层承载面；
所述滚动装置包括多排滚动件，在所述基板流入的一端，所述底框的第一竖杆延伸部和第二竖杆延伸部之间对应的区域设有至少一排滚动件。
本申请实施例提供的基板承载装置的底框，在第一竖杆和第二竖杆对应基板流入的一端连接第一竖杆延伸部和第二竖杆延伸部，二者之间可容纳至少一组用于传送基板的滚动件即，在二者之间存在空置空间，可以在基板输送机构的机台上对应二者之间的区域增加一组或者多组滚动件，缩窄传送带和滚动件之间的间距，使基板顺利流入滚动件并流入基板承载装置中，进而解决了破片问题。另外，第一竖杆延伸部和第二竖杆延伸部的设计使该底框适用于不同类型的仓储模式，使该底框及包括该底框的基板承载装置的适用性更好。
本申请实施例提供的基板输送机构由于能够在机台上与传送带衔接之处增设滚动件，缩窄了该衔接区域的宽度，进而避免了基板破片。
附图说明
为了更清楚地说明本申请实施例中的技术方案，下面将对实施例或示范性技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其它的附图。
图1是本申请实施例提供的基板承载装置的底框的一种结构示意图；
图2是本申请实施例提供的基板承载装置的底框的另一种结构示意图；
图3是本申请实施例提供的基板承载装置的结构示意图；
图4是本申请实施例提供的基板承载装置的支撑结构示意图；
图5是本申请实施例提供的基板承载装置的支撑臂的部分结构示意图；
图6是本申请实施例提供的基板输送机构的结构示意图。
具体实施方式
为了使本申请的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本申请进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，并不用于限定本申请。
需说明的是，当部件被称为“固定于”或“设置于”另一个部件，它可以直接在另一个部件上或者间接在该另一个部件上。当一个部件被称为是“连接于”另一个部件，它可以是直接或者间接连接至该另一个部件上。术语“上”、“下”、“左”、“右”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制，对于本领域的普通技术人员而言，可以根据具体情况理解上述术语的具体含义。术语“第一”、“第二”仅用于便于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明技术特征的数量。“多个”的含义是两个或两个以上，除非另有明确具体的限定。
为了说明本申请所述的技术方案，以下结合具体附图及实施例进行详细说明。
请参阅图1至图4，本申请实施例提供一种基板承载装置的底框11，其是基板承载装置10的一部分，底框11和由该底框11所连接的支撑结构12构成 基板承载装置10，用于承载基板20，例如玻璃基板等板材。该基板承载装置底框11(以下简称为“底框11”)包括第一竖杆111和第二竖杆112；以及多个横杆113，横杆113沿着第一竖杆111和第二竖杆112的长度方向依次排布，且连接于第一竖杆111和第二竖杆112之间；底框11还包括第一竖杆延伸部114，连接于第一竖杆111对应基板20流入的一端；第二竖杆延伸部115，连接于第二竖杆112对应基板20流入的一端；其中，第一竖杆延伸部114和第二竖杆延伸部115之间可以用于容纳至少一组用于传送基板20的滚动件。
上述第一竖杆111和第二竖杆112以及其中连接的多个横杆113构成了二维的框架结构，多个横杆113之间的间距视承载的基板20宽度而定，通常小于基板20在第一竖杆111和第二竖杆112长度方向的尺寸的二分之一，以便于使横杆113上安装的支撑结构12能够稳定承载基板20。上述第一竖杆延伸部114和第二竖杆延伸部115分别直接或者间接连接于第一竖杆111和第二竖杆112，二者的末端不连接，二者之间的间距大于用于传送基板20的滚动件的宽度，其目的在于提供避让空间安装滚动件，以防基板20破片，其原理如后文所述。
传统的底框11是矩形框结构，在矩形框内侧设有若干横杆，在第一竖杆和第二竖杆的两末端分别连接一横杆，即两端未向外延伸。本申请实施例的底框11相当于将第一竖杆111和第二竖杆112对应基板20流入一端的横杆113向内移动一定距离，在保证横杆113数量不减少的情况下，使第一竖杆111和第二竖杆112最前端(对应基板20流入的一端)自由延伸，使得第一竖杆111和第二竖杆112的前端之间为空置状态，这样，当其用于基板承载装置10中时，可以配合滚动件解决上述破片问题。具体原理如下：
参考图6，首先说明基板输送系统的基本架构和工作方式，该系统包括传 送带30和基板输送机构，二者衔接，基板承载装置10至于基板输送机构中。传送带30用于输送基板20，基板输送机构用于最终将基板20装入基板承载装置10中。基板输送机构至少包括机台40和能够升降的升降装置50，机台40上设有滚动装置，该滚动装置包括多排滚动件60，机台40及其滚动件60和传送带30高度一致并衔接。升降装置50上安装上述基板承载装置10，滚动件60穿插于基板承载装置10的间隙内部，升降装置50可相对机台40升降，带动基板承载装置10升降，当然，机台40的结构不会干涉升降装置50的上下移动。另外参考图3和图4，基板承载装置10的支撑结构12形成多个不同高度的平行于底框11的承载面。在基板承载装置10的升降过程中，使基板承载装置10的若干个承载面一一和滚动件60高度对齐，通过滚动件60将基板20传入相应承载面，进而装入基板承载装置10中。
在范例技术中，底框11最前端(即机台40和传送带30的衔接处)的横杆113位于机台40最前端，其上安装一支撑结构12，为了避免该横杆113或者横杆113上的支撑结构12和滚动件60干涉，此处不会安装滚动件60，那么该处的宽度较大，又没有滚动件60就近承接，基板20在由传送带30流入滚动件60的过程中，前沿容易在该处下沉，进而撞到横杆113、滚动件60或者机台40上，造成破片。本实施例中，将最前端的横杆113后移，形成的第一竖杆延伸部114和第二竖杆延伸部115之间存在空置空间，这样，可以在机台40上对应二者之间的区域增加一组或者多组滚动件60，缩窄传送带30和滚动件60之间的间距，使基板20顺利流入滚动件60并流入支撑结构12中，进而解决了破片问题。
在本实施例中，基板20的流入和流出为互逆过程。机台40的两端均衔接传送带30，一端作为流入口，另一端作为流出口，或者同一端在不同制程中 分别作为流入口和流出口，基板20存储在基板承载装置10时，若要将其取出，可以使基板承载装置10上下移动，依次使每一承载面上的基板20与滚动件60接触，通过滚动件60传动到传送带30，将基板20输送出去。同理，由于底框11的第一竖杆延伸部114和第二竖杆延伸部115之间增设了至少一排滚动件60，使基板20在流出时同样能够避免撞击传送带30，进而避免破片。
同时，第一竖杆延伸部114和第二竖杆延伸部115适用于不同类型的仓储模式，例如在一种仓储模式中，可以不利用第一竖杆延伸部114和第二竖杆延伸部115进行移动或者安置，在另一种仓储模式中，需要利用第一竖杆延伸部114和第二竖杆延伸部115进行移动或者安置，使该底框11的适用性更好。
在本申请的一个实施例中，第一竖杆111和第二竖杆112平行，横杆113与第一竖杆111及第二竖杆112垂直，第一竖杆111、第二竖杆112和横杆113构成二维形态的底框11，横杆113处安装支撑结构12便形成了基板承载装置10。具体地，第一竖杆延伸部114和第一竖杆111一体成型，第二竖杆延伸部115和第二竖杆112一体成型。第一竖杆111、第二竖杆112和横杆113之间可以通过焊接的方式连接，也可以通过一体成型的方式直接成型底框11。
在一种实施例中，第一竖杆延伸部114和第二竖杆延伸部115结构相同且对称设置，便于制造，且利于仓储管理。第一竖杆111、第二竖杆112和横杆113的长度视基板20的尺寸而定，第一竖杆111和第二竖杆112的长度大于基板20在第一竖杆111和第二竖杆112的长度方向的尺寸，横杆113的长度大于基板20在横杆113长度方向的尺寸。第一竖杆延伸部114和第二竖杆延伸部115的尺寸和形状以仓储管理中便于放置或者取件而定。
如图1，在一种实施例中，可以在一个或若干个横杆113的外壁上设置定位器1131，用于在输送基板承载装置10时，供相应的运载设备定位，以保证 基板承载装置10不晃动。例如，该定位器1131可以是凸块结构，相应的运载机构上可以设置凹块与其配合。在其他实施例中，定位器1131还可以是卡位，相应运载装置上设有卡扣与之配合。还可采用其他形式的定位器，本实施例不再一一列举。
作为第一竖杆延伸部114和第二竖杆延伸部115的一种实施例，第一竖杆延伸部114与第一竖杆111一体成型，第二竖杆延伸部115和第二竖杆112一体成型。这样，便于底框制造，且结构强度大，不易损坏。
参考图1，第一竖杆延伸部114包括第一竖杆延长段1141，其由第一竖杆111同轴延伸而成，还包括第一竖杆弯折段1142，由第一竖杆延长段1141弯折90°形成；第二竖杆延伸部115包括第二竖杆延长段1151，由第二竖杆112同轴延伸而成，还包括第二竖杆弯折段1152，由第二竖杆延长段1151弯折90°形成；第一竖杆弯折段1142与第二竖杆弯折段1152相向设置。这样，第一竖杆延伸部114和第二竖杆延伸部115均是直角形且对称，这样设计可便于基板承载装置10的安置和管理，例如在一种仓储系统中，需要借助该第一竖杆延伸部114和第二竖杆延伸部115放置或移动基板承载装置10。
作为本实施例的一种实现方式，底框总长(延基板流入方向的长度)为2720±2mm，总宽为2410mm。第一竖杆111和第二竖杆112的长度为2590±2mm，横杆113的长度为2310mm，第一竖杆延长段1141和第二竖杆延长段1151的长度为65mm，第一竖杆弯折段1142与第二竖杆弯折段1152的长度为35mm，第一竖杆延长段1141的外侧壁至第一竖杆弯折段1142的端部的最远长度为85mm。第一竖杆弯折段1142与第二竖杆弯折段1152和直径可以分别和第一竖杆延长段1141和第二竖杆延长段1151的直径相同，均为50mm。该底框可以承载最大尺寸基板的对角线长度为3629±3mm。当然，第一竖杆弯折段1142 与第二竖杆弯折段1152和直径可以分别大于第一竖杆延长段1141和第二竖杆延长段1151的直径；或者，第一竖杆弯折段1142与第二竖杆弯折段1152和直径可以分别小于第一竖杆延长段1141和第二竖杆延长段1151的直径。
参考图2，作为第一竖杆延伸部114和第二竖杆延伸部115的另一种实施例，可以将第一竖杆延伸部114和第二竖杆延伸部115均设计为活动连接结构，即第一竖杆延伸部114可以但不限于通过第一可调件1101与第一竖杆111连接，使得第一竖杆延伸部114可以移动，该移动方向可以包括垂直于第一竖杆111的方向和平行于第一竖杆111的方向，第二竖杆延伸部115可以但不限于通过第二可调件1102与第二竖杆112活动连接，使得第二竖杆延伸部115可以移动，该移动方向可以包括垂直于第二竖杆112的方向和平行于第二竖杆112的方向。这样，第一竖杆延伸部114和第二竖杆延伸部115分别基于第一可调件1101和第二可调件1102的调节发生相对移动，进而可以改变二者之间的间距，以及第一竖杆延伸部114与第一竖杆111之间的距离，和第二竖杆延伸部115与第二竖杆112之间的距离。这样设计可以使底框11以及采用该底框11的基板承载装置10能够适应不同结构和尺寸的仓储设备。例如，当安置基板承载装置10的夹持机构宽度各异时，可以通过调节第一竖杆延伸部114和第二竖杆延伸部115的位置适应不同的夹持机构。
作为第一调节件和第二调节件的一种实施例，该第一调节件1101和第二调节件1102可以是可伸缩的套件结构，包括至少两个相互套接的可伸缩的杆体，其中一个杆体连接第一竖杆111的端部，另一个杆体连接第一竖杆延伸部114，通过伸缩运动调节第一竖杆延伸部114的位置。第二调节件的结构和原理可参考第一调节件。
作为第一调节件1101和第二调节件1102的另一种实施例，仍以第一调节 件为例，第一调节件1101包括与第一竖杆连接的块体，以及设置于该块体上的滑轨。对应地，第一竖杆延伸部114设有与该滑轨连接的滑槽等滑动结构。通过滑轨和滑槽的配合，第一竖杆延伸部114可以在滑轨上向靠近或远离第一竖杆111的方向滑动，滑动到预设位置时，可以采用锁紧件将第一竖杆延伸部114锁紧。进而调节第一竖杆延伸部114和第二竖杆延伸部115的位置。第二调节件1102的结构和原理可参考第一调节件。
参考图1和图2，在一种实施例中，第一竖杆111远离基板20流入的一端设有第三竖杆延伸部116，第二竖杆112远离基板20流入的一端设有第四竖杆延伸部117。第一竖杆延伸部114、第二竖杆延伸部115、第三竖杆延伸部116和第四竖杆延伸部117结构相同且中心对称。即，上述第三竖杆延伸部116和第四竖杆延伸部117可以分别和第一竖杆111和第二竖杆112一体成型，也可以活动连接。如图2，第三竖杆延伸部116和第四竖杆延伸部117分别通过第三调节件1103和第四调节件1104和第一竖杆111和第二竖杆112连接。在第一竖杆111和第二竖杆112的另一端设置了第三竖杆延伸部116和第四竖杆延伸部117，相当于将底框11的尾端(远离基板20流入的一端)的横杆113向内移动，将第一竖杆111和第二竖杆112的尾端空置，这样，在机台40上对应第三竖杆延伸部116和第四竖杆延伸部117之间的区域，还可以增设一组或多组滚动件60，可以更加稳定地传送基板20。另外，使底框11的结构对称，便于制造，也便于仓储管理。
在设置了第三竖杆延伸部116和第四竖杆延伸部117的情况下，第一竖杆延伸部114和第二竖杆延伸部115的一端可以作为基板20流入端，第三竖杆延伸部116和第四竖杆延伸部117的一端可以作为流出端，也可以是第三竖杆延伸部116和第四竖杆延伸部117的一端作为基板20流入端，第一竖杆延伸 部114和第二竖杆延伸部115的一端作为流出端，还可以由第一竖杆延伸部114和第二竖杆延伸部115的一端在不同的制程中分别作为基板20流入端和流出端，还可以是第三竖杆延伸部116和第四竖杆延伸部117的一端在不同制程中分别作为基板20流入端和流出端。
本申请实施例提供的底框11，相当于在底框11的横杆113数量保持不变的情况下，能够在机台40上增设滚动件60，那么，基于方便制造考虑，可以在保持原底框11的制造工艺基础上，仅调整底框11最前端和最后端的横杆113位置，同时设计第一竖杆延伸部114和第二竖杆延伸部115的形状。当然，也可以改变其他横杆113的位置，以使横杆113间距一致，本实施例不进行限定。
基于上述底框结构，本申请还提供一种基板承载装置10，如图2，该基板承载装置10包括上述的底框11，以及多个支撑结构12，多个支撑结构12并排设置于底框11上，该支撑结构12通过横杆113支撑，支撑结构12通常为二维的平面结构，每个支撑结构12包括层叠设置的多个支撑件121，支撑结构12安装于底框11上时，支撑件121和横杆113平行，整个支撑结构12和横杆113处于同一平面，多个支撑结构12平行设置。多个支撑结构12的位于同一高度的支撑件121形成一个承载面，这样，多层支撑件121可以形成多个承载面。在一种实施例中，承载面可以有几层至几百层甚至更多层不等。
在一种实施例中，支撑件121可以为刚性丝，且表面柔滑以免划伤基板20，其强度需满足能够稳定承载基板20，位于同一高度的多个刚性丝形成一个承载面。
作为支撑件121的一种实施例，该支撑件121可以包括钢丝以及包裹于钢丝外表面的软性光滑的包层，用于保护基板20表面免受刮伤。该包层可以采 用PEEK(polyetheretherketone，聚醚醚酮)材料制作。在一种实施例中，支撑结构12还包括框架，框架至少包括两个支撑臂122以及连接于两个支撑臂122之间的多个加强臂123，支撑臂122和加强臂123形成栅格状框架。加强臂123与支撑件121平行，支撑件121的两端也连接于支撑臂122，靠近底框11的加强臂123直接安装在横杆113上，两个支撑臂122分别连接于第一竖杆111和第二竖杆112上，与第一竖杆111和第二竖杆112通过连接件等固定，以保持整个基板承载装置10的稳定性。
在一个实施例中，如图4，为了便于支撑件121的稳定连接，在支撑臂122上延其长度方向开设有多个通孔1221，两个支撑臂122开设的通孔1221两两相对且高度相同，每两个相对且等高的通孔1221用于连接一根支撑件121，支撑件121的一端穿过通孔1221后由锁紧件固定，另一端连接弹簧，该弹簧穿过通孔1221后由锁紧件固定，这样一端连接弹簧，使支撑件121的张力可以调整，通过另一端的锁紧件实现不同程度的张紧。
参考图1，为了实现底框11和支撑结构12的稳定连接，在底框11的第一竖杆111上设置第一连接条118，在第二竖杆112上设置第二连接条119，支撑结构12的两个支撑臂122的一端(靠近横杆113的一端)开设有缺口1222，安装支撑结构12时，将底端的加强臂123坐落于横杆113上的同时，将两个支撑臂122的缺口1222对准第一连接条118和第二连接条119，使第一连接条118和第二连接条119分别嵌入两个缺口1222中，再通过连接件将第一连接条118和一个支撑臂122连接，将第二连接条119和另一支撑臂122连接。
基于上述基板承载装置10，本申请又提供了一种基板输送机构，参考图5，包括机台40；滚动装置，设置于机台40上，用于传送基板20；升降装置50，用于带动上述的基板承载装置10升降，使基板承载装置10的多个承载面逐级 与滚动装置对应，将基板20传送至相应承载面；其中，滚动装置包括多排滚动件60，在基板20流入的一端，底框11的第一竖杆延伸部114和第二竖杆延伸部115之间对应的区域设有至少一排滚动件60。
具体地，滚动件60的两端连接于机台40的两个安装件70上，基板承载装置10至于这两个安装件70之间，滚动件60则穿插于基板承载装置10的支撑结构12之间，且滚动件60和支撑结构12错位，以免与支撑件121干涉。升降装置50带动基板承载装置10升降而滚动件60不动，使得滚动件60和不同高度的支撑件121对应，进而将基板20逐片放入基板承载装置10。
由于机台40在第一竖杆延伸部114和第二竖杆延伸部115之间对应的区域设有至少一排滚动件60，使得基板20由传送带30送入滚动件60时，可以顺利衔接，避免撞片。
在一个实施例中，升降装置50可以连接于机台40，也可以独立于机台40设置。
在另一实施例中，对应底框11的第一竖杆111和第二竖杆112分别设有第三竖杆延伸部116和第四竖杆延伸部117的情况，该机台40上对应第三竖杆延伸部116和第四竖杆延伸部117之间的区域还设置至少一排滚动件60，以使得基板20的传送更加稳定。
以上仅为本申请的可选实施例而已，并不用于限制本申请。对于本领域的技术人员来说，本申请可以有各种更改和变化。凡在本申请的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本申请的权利要求范围之内。

Claims (19)

  1. 一种基板承载装置的底框，包括：
    第一竖杆和第二竖杆；
    多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
    第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
    第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件。
  2. 如权利要求1所述的基板承载装置的底框，其中，所述第一竖杆延伸部和第二竖杆延伸部结构相同且镜像对称设置。
  3. 如权利要求1所述的基板承载装置的底框，其中，所述第一竖杆延伸部与所述第一竖杆一体成型，所述第二竖杆延伸部和所述第二竖杆一体成型。
  4. 如权利要求3所述的基板承载装置的底框，其中，所述第一竖杆延伸部包括：
    第一竖杆延长段，由所述第一竖杆同轴延伸而成；
    第一竖杆弯折段，由所述第一竖杆延长段弯折90°形成；
    所述第二竖杆延伸部包括：
    第二竖杆延长段，由所述第二竖杆同轴延伸而成；
    第二竖杆弯折段，由所述第二竖杆延长段弯折90°形成；
    所述第一竖杆弯折段的末端与所述第二竖杆弯折段的末端相向设置。
  5. 如权利要求1所述的基板承载装置的底框，其中，所述第一竖杆延伸 部通过第一可调件与所述第一竖杆连接，所述第二竖杆延伸部通过第二可调件与所述第二竖杆活动连接，使所述第一竖杆延伸部和第二竖杆延伸部之间的间距可调。
  6. 如权利要求1所述的基板承载装置的底框，其中，所述第一竖杆远离所述基板流入的一端设有第三竖杆延伸部，所述第二竖杆远离所述基板流入的一端设有第四竖杆延伸部。
  7. 如权利要求6所述的基板承载装置的底框，其中，所述第三竖杆延伸部和第四竖杆延伸部结构相同且镜像对称设置。
  8. 如权利要求6所述的基板承载装置的底框，其中，所述第一竖杆延伸部、第二竖杆延伸部、第三竖杆延伸部和第四竖杆延伸部的结构相同。
  9. 如权利要求1所述的基板承载装置的底框，其中，多个所述横杆等间距排布。
  10. 如权利要求1所述的基板承载装置的底框，其中，所述底框的首部两个横杆的间距和尾部两个横杆的间距相等且小于所述底框的中间横杆的间距。
  11. 如权利要求1所述的基板承载装置的底框，其中，所述第一竖杆延伸部通过第一可调件与第一竖杆可移动连接，所述第二竖杆延伸部通过第二可调件与第二竖杆可移动连接。
  12. 一种基板承载装置，包括底框和多个支撑结构，所述底框包括：
    第一竖杆和第二竖杆；
    多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
    第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
    第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件；
    所述支撑结构并排设置于所述底框上，通过所述横杆支撑，设置为承载基板；
    每个所述支撑结构包括层叠设置的多个支撑件，多个所述支撑结构的支撑件形成多层承载面。
  13. 如权利要求12所述的基板承载装置，其中，所述支撑结构还包括：
    框架，包括两个支撑臂以及连接于所述两个支撑臂之间的多个加强臂；
    所述加强臂与所述支撑件平行；
    靠近所述底框的加强臂位于所述横杆上；
    两个所述支撑臂分别连接于所述第一竖杆和第二竖杆上。
  14. 如权利要求12所述的基板承载装置，其中，所述支撑臂与所述第一竖杆和第二竖杆连接的部位设有缺口；所述第一竖杆上设有第一连接条，所述第二竖杆上设有第二连接条，所述第一连接条和第二连接条分别嵌入所述缺口中。
  15. 如权利要求12所述的基板承载装置，其中，所述支撑件包括表柔滑的钢丝，所述支撑臂延其长度方向开设有多个通孔，两个支撑臂开设的通孔两两相对且高度相同，每两个相对且等高的通孔连接一根所述钢丝。
  16. 如权利要求12所述的基板承载装置，其中，所述横杆上设有定位器。
  17. 一种基板输送机构，包括：
    机台；
    滚动装置，设置于所述机台上，设置为传送基板；
    基板承载装置，设置为承载基板；
    升降装置，设置为带动所述基板承载装置升降，使所述基板承载装置的多个承载面逐级与所述滚动装置对齐，以将所述基板传送至相应承载面；
    其中，所述基板承载装置包括底框和多个支撑结构，所述底框包括：
    第一竖杆和第二竖杆；
    多个横杆，沿着所述第一竖杆和第二竖杆的长度方向排布，且连接于所述第一竖杆和第二竖杆之间；
    第一竖杆延伸部，连接于所述第一竖杆对应基板流入的一端；
    第二竖杆延伸部，连接于所述第二竖杆对应基板流入的一端；所述第一竖杆延伸部和第二竖杆延伸部之间可容纳至少一组用于传送基板的滚动件；
    所述支撑结构并排设置于所述底框上，通过所述横杆支撑，设置为承载基板；
    每个所述支撑结构包括层叠设置的多个支撑件，多个所述支撑结构的支撑件形成多层承载面；
    所述滚动装置包括多排滚动件，在所述基板流入的一端，所述底框的第一竖杆延伸部和第二竖杆延伸部之间对应的区域设有至少一排滚动件。
  18. 如权利要求17所述的基板输送机构，其中，所述底框的第一竖杆远离所述基板流入的一端设有第三竖杆延伸部，所述底框的第二竖杆远离所述基板流入的一端设有第四竖杆延伸部；所述第三竖杆延伸部和第四竖杆延伸部之间对应的区域设置至少一排滚动件。
  19. 如权利要求17所述的基板输送机构，其中，所述机台的相对两侧设有安装件，所述滚动件的两端连接于所述机台的两个安装件上，所述基板承载装置设置于所述两个安装件之间，所述滚动件穿插于所述基板承载装置的支撑结构之间。
PCT/CN2018/122311 2018-03-12 2018-12-20 基板承载装置的底框、基板承载装置及基板输送机构 WO2019174345A1 (zh)

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