WO2019090821A1 - 基板检查设备及基板检查方法 - Google Patents

基板检查设备及基板检查方法 Download PDF

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Publication number
WO2019090821A1
WO2019090821A1 PCT/CN2017/112199 CN2017112199W WO2019090821A1 WO 2019090821 A1 WO2019090821 A1 WO 2019090821A1 CN 2017112199 W CN2017112199 W CN 2017112199W WO 2019090821 A1 WO2019090821 A1 WO 2019090821A1
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Prior art keywords
substrate
tray
support member
substrate inspection
disposed
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PCT/CN2017/112199
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English (en)
French (fr)
Inventor
朱秋虹
裴龙
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武汉华星光电半导体显示技术有限公司
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Publication of WO2019090821A1 publication Critical patent/WO2019090821A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

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  • the present invention relates to the field of display panel manufacturing, and in particular, to a substrate inspection apparatus and a substrate inspection method.
  • a macroscopic inspection process In the manufacturing process of a flat panel display (FPD) such as a liquid crystal display (LCD), there is an inspection process of visually inspecting the appearance of the transparent substrate produced in each manufacturing process, which is called macroscopic inspection.
  • a macroscopic defect inspection of a substrate product is generally performed by a Macro (macro inspection machine) device, and macroscopic illumination light is irradiated from above by a substrate holder (stage) holding the glass substrate at a predetermined angle.
  • the defect inspection on the glass substrate can be performed.
  • the general process of the macro inspection is as follows: the upstream end transfers the glass substrate to the Macro Stage, and then the inspector shakes the glass substrate up and down and left and right through the operating platform, and simultaneously discriminates the Mura (shadow) with the human eye, and then the glass substrate is taken out by the robot to enter The next step.
  • the detection of the glass substrate Mura is mainly through the visual inspection of the personnel, the requirements for the proficiency and experience of the personnel are high, the working time is long, and the missing test is easy to occur.
  • the present invention provides a substrate inspection apparatus and a substrate inspection method which are convenient to inspect and high in efficiency.
  • a substrate inspection device comprising:
  • a bracket comprising a tray and a support for carrying a substrate to be inspected, rotatably supported on the support member in a vertical direction;
  • a light source disposed obliquely above the tray for illuminating the surface of the substrate on the tray;
  • a lens group disposed above the tray and facing the tray for capturing an image of the substrate on the tray during the rotation of the tray;
  • a viewing table disposed at a distance from the tray in a horizontal direction for carrying an operator to observe a surface of the substrate on the tray;
  • a monitor is disposed beside the observation stage for displaying an image of the substrate captured by the lens group.
  • the support member further includes a first support member and a second support member, the tray being rotatably supported on the first support member in a vertical direction, the first support member being vertical
  • the second support member is movably disposed in a straight direction.
  • the second support member is provided with a hydraulic cylinder, and a piston rod of the hydraulic cylinder is fixed on the first support member.
  • the bracket further includes a base, and the support member is rotatably disposed on the base in a horizontal direction.
  • the edge of the light source is provided with an infrared transceiver for emitting infrared rays toward the tray to calibrate the orientation of the light source.
  • the bracket further includes two slide rails disposed in parallel, and the base is slidably disposed on the slide rail along an extending direction of the slide rail.
  • a sliding slot is disposed on the inner side of the sliding rail, and two ends of the base are respectively embedded in the sliding slot.
  • the lens group includes a plurality of lenses, and the lenses are arranged in a row along the extending direction of the slide rails.
  • Another object of the present invention is to provide a substrate inspection method using the substrate inspection apparatus, including:
  • the human eye observes the surface of the substrate to check the appearance of the substrate
  • the tray is rotated in the vertical direction, and the image of the substrate is photographed again, and the operator observes the image of the photographed substrate again through the monitor until the tray is rotated until the substrate is out of the photographing angle of view.
  • the substrate inspection method further includes rotating the support and taking an image of the substrate, and the operator observes the image of the captured substrate through the monitor.
  • the invention can control the orientation of the substrate to be inspected by controlling the rotation of the tray by placing the substrate to be inspected on the tray, and can observe the surface of the substrate by the human eye to check the appearance of the substrate, and can also be photographed by the monitor.
  • the image of the substrate is checked to see if there is a phenomenon of poor shadow. There is no special requirement for the inspector's experience, and the operation time is short and the efficiency is high.
  • FIG. 1 is a schematic view showing a use state of a substrate inspection apparatus according to an embodiment of the present invention
  • FIG. 2 is a main flow chart of a substrate inspection method according to an embodiment of the present invention.
  • the terms “set”, “set”, and “connected” are to be understood broadly. For example, it may be a fixed connection, a detachable connection, or a one-piece construction; it may be a mechanical connection, or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, or it may be two devices, components or components. Internal communication.
  • the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
  • the above partial terms may be used to indicate other meanings in addition to the orientation or positional relationship, for example, the term “upper” may also be used to indicate a certain dependency or connection relationship in some cases.
  • the specific meaning of these terms in the present invention can be understood on a case-by-case basis.
  • a substrate inspection apparatus mainly includes a bracket 10, a light source 20, a lens group 30, an observation stage 40, and a monitor 50.
  • the bracket 10 includes a tray 11 and a support member 12 for carrying The substrate P to be inspected is rotatably supported in a vertical direction (clockwise or counterclockwise as shown in FIG. 1) on the support member 12, and the light source 20 is located obliquely above the tray 11 to face the substrate on the tray 11.
  • the P surface illuminates the light
  • the lens group 30 is located above the tray 11 and faces the tray 11 for
  • the image of the substrate P on the tray 11 is photographed during the rotation of the tray 11, and the observation table 40 is spaced apart from the tray 11 in the horizontal direction for the operator to observe the surface of the substrate P on the tray 11 thereon, and the monitor 50 is provided.
  • an image for displaying the substrate P taken by the lens group 30 is displayed.
  • the tray 11 Since the support member 12 is supported under the tray 11, and the tray 11 can be rotated relative to the support member 12 to adjust its orientation, and the operator is located on the observation stage 40 on the side of the tray 11, during the operation of the light source 20 illuminating the tray 11, the operation is performed. On the other hand, by adjusting the orientation of the tray 11 to face the operator, the appearance of the substrate P on the tray 11 can be visually observed, and on the other hand, the orientation of the substrate P can be changed by adjusting the orientation of the tray 11, and the orientation can be utilized.
  • the lens group 30 above the substrate P captures an image of the substrate P at different rotation angles, acquires a captured image through the monitor 50, and performs Mura detection, so that the operator does not need to directly observe the substrate P to inspect the Mura, and the operator's experience is rich and required. not tall.
  • the light source 20 can also be designed to be rotatable, and the orientation of the light source 20 is adjusted in accordance with the direction of rotation of the tray 11, so that the light is always emitted toward the substrate P on the tray 11.
  • an infrared transceiver 200 may be provided at the edge of the light source 20 for emitting infrared rays toward the tray 11 to calibrate the orientation of the light source 20 in real time.
  • the infrared transceiver 200 emits infrared rays toward a certain point on the tray 11.
  • the light source 20 is considered to be oriented. Otherwise, the light source 20 needs to be rotated until the infrared transceiver 200 receives the infrared reflection signal, and the tray 11 is rotated once.
  • the light source 20 achieves one direction calibration.
  • the support member 12 includes a first support member 121 and a second support member 122.
  • the tray 11 is rotatably supported on the first support member 121 in a vertical direction, and the first support member 121 is movably disposed in the vertical direction.
  • the second support member 122 is provided with a hydraulic cylinder 122a.
  • the piston rod 121a of the hydraulic cylinder 122a is fixed on the first support member 121.
  • two hydraulic pressures are respectively provided at both ends of the tray 11 in the direction of the axis of the rotary shaft.
  • the cylinders 122a, each of the hydraulic cylinders 122a each correspond to a piston rod 121a to maintain the movement stability of the first support member 121.
  • the piston rod 121a is moved to expand and contract, and the height of the first support member 121 is adjusted, thereby achieving the purpose of adjusting the height of the tray 11, and indirectly adjusting between the substrate P and the light source 20.
  • the pitch and the focal length with the lens group 30 to correspondingly improve the illumination intensity of the surface of the substrate P and the sharpness of the image.
  • the observation table 40 can be designed to be movable up and down, the monitor 50 is fixed on the observation table 40, and is disposed between the observation table 40 and the tray 11, and the operator can observe the surface of the substrate P with the naked eye. It is very convenient to observe the monitor 50.
  • the bracket 10 further includes a base 13 and two slide rails 14 disposed in parallel.
  • the lens assembly 30 includes a plurality of lenses 300.
  • the lenses 300 are arranged in a row along the extending direction of the slide rails 14.
  • the support member 12 is rotatably disposed on the base in a horizontal direction.
  • the base 13 is slidably disposed on the slide rail 14 in the extending direction of the slide rail 14 and is provided with a recessed sliding slot.
  • the two ends of the base 13 are respectively embedded in the sliding slot.
  • a hydraulic cylinder 141 is fixed to the slide rail 14, and the base 13 is driven by the hydraulic cylinder 141 to approach or away from the observation stage 40.
  • Such an arrangement enables the tray 11 to be rotated not only 360° but also close to or away from the operator, which is convenient for the operator to observe the naked eye at a close distance, and facilitates the adjustment of the exposure amount of the light source 20 and the omnidirectional shooting of the lens group 30.
  • the illumination angle of the light source 20 and the opening of the corresponding lens 300 above the pedestal 13 can be adjusted in real time according to the position of the pedestal 13.
  • the bottom of the second support member 122 is rotatably disposed on the base 13. Specifically, a vertical rotating shaft is protruded from the top of the base 13. The bottom of the second support member 122 is fixed with a coupling through the base 13
  • the base motor drives the rotating shaft to rotate, thereby realizing the rotation of the second supporting member 122, and the rotation of the second supporting member 122 can be controlled only by controlling the rotating state of the base motor, thereby rotating the tray 11 in the horizontal direction, thereby realizing the tray 11
  • the orientation at any angle can be moved not only up and down but also close to or away from the light source 20 and the lens group 30, and can also be freely rotated in the vertical direction and the horizontal direction, so that the operator can realize all-round observation.
  • the substrate inspection apparatus of the present embodiment includes a main control center, a light source motor for controlling the rotation state of the light source 20, a tray motor for controlling the rotation state of the tray 11 with respect to the support member 12, and a driving support member.
  • a hydraulic cylinder 122a having a length change (i.e., the first support member 121 is telescopic), a base motor for driving the support member 12 to rotate (i.e., driving the second support member 122 to rotate), and a hydraulic pressure for driving the base 13 to slide along the slide rail 14.
  • the cylinder 141 and the lifting hydraulic cylinder for driving the lifting and lowering of the observation platform 40 are used for storing preset operation commands and controlling corresponding structures under corresponding triggering conditions to implement corresponding actions.
  • the operator can input a series of control commands into the main control center in advance.
  • the control device starts to work, the operator observes the appearance of the substrate P, and at the same time, the tray 11 starts to perform the predetermined action.
  • the light source 20 is automatically adjusted to a suitable illumination angle
  • the lens group 30 automatically captures an image of the lower substrate P
  • the operator observes the current image in the monitor 50 to determine the presence or absence of Mura
  • the tray 11 continues along the predetermined
  • the action changes the orientation/position
  • the observation stage 40 automatically adjusts the height according to the orientation of the tray 11, so that the operator can adapt to the position of the substrate P, in the tray 11
  • the main control center can also control the lens 300 directly above the substrate P to perform shooting.
  • the operator inspects the substrate P, it is only necessary to visually view the substrate P in accordance with a predetermined procedure. Check the appearance and analyze the Mura phenomenon by watching the image in the monitor 50 at an appropriate time. After the program is finished, the inspection is completed, the hands are released, and the inspection efficiency can be greatly improved.
  • the substrate inspection method of the present invention mainly includes:
  • the tray 11 is rotated in the vertical direction, and the image of the substrate P is photographed again, and the operator observes the image of the photographed substrate P again through the monitor 50 until the tray 11 is rotated until the substrate P is out of the photographing angle of view.
  • the process of rotating the tray 11 in the vertical direction is such that the initial orientation of the tray 11 is facing the operator, that is, the tray 11 is in a vertical state, and at this time, the operator can most intuitively see the surface of the substrate P, thereby checking The appearance of the substrate P, then, the tray 11 is tilted back, and the elevation angle is gradually increased, and the operator can continue to visually observe the surface of the substrate P while checking the appearance of the substrate P to avoid missed inspection.
  • the surface of the substrate can be observed by the human eye to check the appearance of the appearance, and on the other hand, the photograph can be inspected by the monitor.
  • the image of the substrate is checked for the occurrence of poor shadows. There is no special requirement for the inspector's experience, and the operation time is short and the efficiency is high.
  • the substrate can be freely rotated by 360° to avoid missed detection, and the height of the substrate and the distance from the operator can also be controlled, and the viewing position of the operator can be adjusted in real time according to the orientation and height of the substrate, which is very convenient.

Abstract

一种基板（P）检查设备及基板（P）检查方法，该基板（P）检查设备包括：支架（10），包括托盘（11）和支撑件（12），托盘（11）用于承载待检查的基板（P），在竖直方向上可旋转地支撑在支撑件（12）上；光源（20），设于托盘（11）斜上方，用于朝托盘（11）上的基板（P）表面照射光线；镜头组（30），设于托盘（11）上方，并朝向托盘（11），用于在托盘（11）转动的过程中拍摄托盘（11）上的基板（P）的图像；观察台（40），在水平方向上与托盘（11）间隔设置，供操作者观察托盘（11）上的基板（P）的表面；监视器（50），设于观察台（40）旁，用于显示镜头组（30）拍摄的基板（P）的图像。在托盘（11）转动过程中可以通过人眼观察基板（P）表面以检查外观完好情况，也可以通过监视器（50）检查拍摄的基板（P）的图像而检查是否有暗影不良的现象发生，对检查人员的经验并无特别要求，作业时间短、效率高。

Description

基板检查设备及基板检查方法 技术领域
本发明涉及显示面板制造领域，尤其涉及一种基板检查设备及基板检查方法。
背景技术
在液晶显示器(LCD)等平板显示器(FPD)的制造工序中，存在用目视检查在各制造工序中制造的透明基板的外观的检查工序，称为宏观检查。在该宏观检查工序中，通常采用Macro(宏观检查机)设备对基板制品进行宏观不良检查，通过将保持玻璃基板的基板保持器(Stage)立起成预定角度的状态下从上方照射宏观照明光，就能够进行该玻璃基板上的缺陷检查。
宏观检查的大致流程如下：上游端将玻璃基板传至Macro的Stage，然后由检查人员通过操作平台上下左右摇晃玻璃基板，同时用人眼辨别Mura(暗影)，再由机械手取出玻璃基板，使其进入下一工序。玻璃基板Mura的检测，主要是通过人员肉眼检查，对人员的熟练度、经验等要求较高，作业时间较长，且易出现漏检等情况。
发明内容
鉴于现有技术存在的不足，本发明提供了一种检查方便、效率高的基板检查设备及基板检查方法。
为了实现上述的目的，本发明采用了如下的技术方案：
一种基板检查设备，包括：
支架，包括托盘和支撑件，所述托盘用于承载待检查的基板，在竖直方向上可旋转地支撑在所述支撑件上；
光源，设于所述托盘斜上方，用于朝所述托盘上的所述基板表面照射光线；
镜头组，设于所述托盘上方，并朝向所述托盘，用于在所述托盘转动的过程中拍摄所述托盘上的所述基板的图像；
观察台，在水平方向上与所述托盘间隔设置，用以承载操作者观察所述托盘上的所述基板的表面；
监视器，设于所述观察台旁，用于显示所述镜头组拍摄的所述基板的图像。
作为其中一种实施方式，所述支撑件还包括第一支撑件和第二支撑件，所述托盘在竖直方向上可旋转地支撑在第一支撑件上，所述第一支撑件沿竖直方向上可移动地设于所述第二支撑件上。
作为其中一种实施方式，所述第二支撑件上设有液压缸，所述液压缸的活塞杆固定在所述第一支撑件上。
作为其中一种实施方式，所述支架还包括底座，所述支撑件沿水平方向可转动地设于所述底座上。
作为其中一种实施方式，所述光源的边缘设有红外线收发器，用于朝所述托盘发射红外线以校准所述光源的朝向。
作为其中一种实施方式，所述支架还包括两条平行设置的滑轨，所述底座沿所述滑轨的延伸方向可滑动地设于所述滑轨上。
作为其中一种实施方式，所述滑轨内侧设有凹陷的滑槽，所述底座的两端分别嵌设于所述滑槽内。
作为其中一种实施方式，所述镜头组包括多个镜头，所述镜头沿所述滑轨的延伸方向成排设置。
本发明的另一目的在于提供一种基板检查方法，使用所述的基板检查设备，包括：
利用光源照射托盘上的基板；
人眼观察基板表面，以检查基板的外观；
拍摄基板的图像，操作者通过监视器观察所拍摄的基板的图像，以检查图片中有无暗影；
在竖直方向上转动托盘，再次拍摄基板的图像，操作者再次通过监视器观察所拍摄的基板的图像，直至托盘转动至基板脱离拍摄视角。
作为其中一种实施方式，所述的基板检查方法还包括转动支撑件，并拍摄基板的图像，操作者通过监视器观察所拍摄的基板的图像。
本发明通过将待检查的基板放置到托盘上，通过控制托盘的转动而控制待检查的基板的朝向，可以通过人眼观察基板表面以检查外观完好情况，另一方面也能通过监视器检查拍摄的基板的图像，以检查是否有暗影不良的现象发生，对检查人员的经验并无特别要求，作业时间短、效率高。
附图说明
图1为本发明实施例的基板检查设备的使用状态示意图；
图2为本发明实施例的基板检查方法的主要流程框图。
具体实施方式
在本发明中，术语“设置”、“设有”、“连接”应做广义理解。例如，可以是固定连接，可拆卸连接，或整体式构造；可以是机械连接，或电连接；可以是直接相连，或者是通过中间媒介间接相连，又或者是两个装置、元件或组成部分之间内部的连通。对于本领域普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
另外，术语“上”、“下”、“左”、“右”、“前”、“后”、“顶”、“底”、“内”、“外”、“中”、“竖直”、“水平”等指示的方位或位置关系为基于附图所示的方位或位置关系。这些术语主要是为了更好地描述本发明及其实施例，并非用于限定所指示的装置、元件或组成部分必须具有特定方位，或以特定方位进行构造和操作。
并且，上述部分术语除了可以用于表示方位或位置关系以外，还可能用于表示其他含义，例如术语“上”在某些情况下也可能用于表示某种依附关系或连接关系。对于本领域普通技术人员而言，可以根据具体情况理解这些术语在本发明中的具体含义。
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
参阅图1，本发明实施例的基板检查设备主要包括支架10、光源20、镜头组30、观察台40和监视器50，其中，支架10包括托盘11和支撑件12，该托盘11用于承载待检查的基板P，在竖直方向上可旋转地(如图1所示的顺时针或逆时针方向)支撑在支撑件12上，光源20位于托盘11斜上方，可朝托盘11上的基板P表面照射光线，镜头组30位于托盘11上方，并朝向托盘11，用于 在托盘11转动的过程中拍摄托盘11上的基板P的图像，观察台40在水平方向上与托盘11间隔设置，供操作者在其上观察托盘11上的基板P的表面，监视器50设于观察台40旁，用于显示镜头组30拍摄的基板P的图像。
由于支撑件12支撑在托盘11下方，且托盘11可以相对于支撑件12旋转而调节其朝向，而操作者位于托盘11一侧的观察台40上，在光源20照射托盘11的过程中，操作者一方面可以通过调节托盘11朝向使其正对操作者，利用肉眼观察托盘11上基板P的外观情况，另一方面，还能通过调节托盘11朝向，使基板P的朝向发生改变，并利用基板P上方的镜头组30拍摄不同的旋转角度下基板P的图像，通过监视器50获取拍摄图像并进行Mura检测，无需操作者直接观察基板P来检查Mura，对操作者的经验是否丰富要求并不高。
这里，镜头组30的位置和朝向固定不变，仅托盘11的朝向发生改变，镜头组30捕捉基板P在不同朝向时的图像，操作者可以通过查看不同的图像检查出单一视角无法发现的Mura现象。光源20也可以设计成可转动的，光源20的朝向根据托盘11的旋转方向进行调节，使其光线始终朝向托盘11上的基板P射出。具体可以在光源20的边缘设有红外线收发器200，用于朝托盘11发射红外线以实时校准光源20的朝向。红外线收发器200朝托盘11上的某一点发射红外线，当收到红外线反射信号则认为光源20朝向合适，否则，则需要转动光源20直至红外线收发器200收到红外线反射信号，托盘11每转动一次，光源20则实现一次方向校准。
支撑件12包括第一支撑件121和第二支撑件122，托盘11在竖直方向上可旋转地支撑在第一支撑件121上，第一支撑件121沿竖直方向上可移动地设于第二支撑件122上。第二支撑件122上设有液压缸122a，液压缸122a的活塞杆121a固定在第一支撑件121上，本实施例中，沿托盘11的转轴轴线方向的两端，各设有两个液压缸122a，每个液压缸122a各对应一个活塞杆121a，以保持第一支撑件121的移动稳定性。在使用时，通过控制液压缸122a工作，活塞杆121a即运动而发生伸缩，实现第一支撑件121高度的调节，以此实现调节托盘11的高度的目的，间接调节基板P与光源20之间的间距以及与镜头组30之间的焦距，以相应改善基板P表面的光照强度以及图像的拍摄清晰度。
与之相应地，观察台40可被设计为可上下移动，监视器50被固定在观察台40上，设于观察台40与托盘11之间，操作者可以边凭肉眼观察基板P表面，边观察监视器50，非常方便。
支架10还包括底座13和两条平行设置的滑轨14，镜头组30包括多个镜头300，镜头300沿滑轨14的延伸方向成排设置，支撑件12沿水平方向可转动地设于底座13上，底座13沿滑轨14的延伸方向可滑动地设于滑轨14上滑轨14内侧设有凹陷的滑槽，底座13的两端分别嵌设于滑槽内。滑轨14上固定有液压缸141，底座13在液压缸141的驱动下靠近或远离观察台40。这样的设置使得托盘11不仅可以360°转动，也可以靠近或远离操作者，既方便操作者近距离肉眼观察，又方便光源20曝光量的调节以及镜头组30全方位的拍摄。在拍摄基板P的图像时，可以根据底座13的位置实时调整光源20的照射角度以及底座13上方相应镜头300的开启。
其中，第二支撑件122的底部可转动地设于底座13上，具体可在底座13顶部凸设有竖直的转动轴，第二支撑件122底部固定有联轴器，通过底座13内的底座电机带动转动轴转动，从而实现第二支撑件122的转动，只需通过控制底座电机的转动状态即可控制第二支撑件122的转动，从而在水平方向上转动托盘11，实现了托盘11在任意角度的朝向，不仅可以上下移动而靠近或远离光源20与镜头组30，也可以在竖直方向、水平方向上自由转动，方便操作者实现全方位的观察。
为实现自动化作业，提高作业效率，光源20的转动、托盘11的转动可分别通过电机驱动实现。在系统控制方面，本实施例的基板检查设备包括主控中心、用于控制光源20转动状态的光源电机、用于控制托盘11相对于支撑件12的转动状态的托盘电机、用于驱动支撑件12长度变化(即第一支撑件121伸缩)的液压缸122a、用于驱动支撑件12转动(即驱动第二支撑件122转动)的底座电机、用于驱动底座13沿滑轨14滑动的液压缸141以及用于驱动观察台40升降的升降液压缸，主控中心用于存储预设操作指令并在相应的触发条件下控制相应的结构实现对应的动作。作业前，操作者可以事先将一系列控制指令输入主控中心，当操作者站到观察台40后，控制设备开始工作，操作者观察基板P的外观情况，同时，托盘11开始按预定的动作转动至某一朝向，光源20自动调整至合适的照射角度，镜头组30自动拍摄下基板P的图像，操作者观察监视器50内的当前图像以判断有无Mura，然后托盘11继续沿预定的动作(水平方向/竖直方向旋转/前后移动/升降)改变朝向/位置，另外，观察台40根据托盘11的朝向自动实现高度的调节，以使操作者可以适应基板P的位置，在托盘11移动至滑轨14上的相应位置时，主控中心还可控制基板P正上方的镜头300工作而进行拍摄。操作者在检查基板P时，只需按照预定程序肉眼观看基板P检 查外观情况，并在适当时候通过观看监视器50内的图像分析Mura现象即可，程序运行完毕则检查完毕，解放了双手，而且检查效率可以大幅提高。
如图2所示，本发明的基板检查方法主要包括：
S01、利用光源20照射托盘11上的基板P；
S02、人眼观察基板P表面，以检查基板P的外观；
S03、拍摄基板P的图像，操作者通过监视器50观察所拍摄的基板P的图像，以检查图片中有无Mura；
S04、在竖直方向上转动托盘11，再次拍摄基板P的图像，操作者再次通过监视器50观察所拍摄的基板P的图像，直至托盘11转动至基板P脱离拍摄视角。在基板检查过程中，还需要转动和前后移动支撑件12，并拍摄基板P的图像，操作者通过监视器50观察所拍摄的基板P的图像。
这里，竖直方向上转动托盘11的过程为：托盘11的初始朝向为正对操作者，即托盘11呈竖直状态，此时，操作者能最直观地看到基板P表面，以此检查基板P的外观情况，随后，托盘11朝后仰，且仰角逐渐变大，操作者也可以在此过程中继续肉眼观察基板P表面而检查基板P的外观情况，避免漏检。
通过将待检查的基板放置到托盘上，并通过控制托盘的转动而控制待检查的基板的朝向，可以通过人眼观察基板表面以检查外观完好情况，另一方面也能通过监视器检查拍摄的基板的图像，以检查是否有暗影不良的现象发生，对检查人员的经验并无特别要求，作业时间短、效率高。并且，基板可以360°自由旋转，避免漏检，基板的高度和与操作者的间距也可以控制，操作者的观看位置可以根据基板的朝向和高度实时调整，非常方便。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (20)

  1. 一种基板检查设备，其中，包括：
    支架，包括托盘和支撑件，所述托盘用于承载待检查的基板，在竖直方向上可旋转地支撑在所述支撑件上；
    光源，设于所述托盘斜上方，用于朝所述托盘上的所述基板表面照射光线；
    镜头组，设于所述托盘上方，并朝向所述托盘，用于在所述托盘转动的过程中拍摄所述托盘上的所述基板的图像；
    观察台，在水平方向上与所述托盘间隔设置，用以承载操作者观察所述托盘上的所述基板的表面；
    监视器，设于所述观察台旁，用于显示所述镜头组拍摄的所述基板的图像。
  2. 根据权利要求1所述的基板检查设备，其中，所述支撑件还包括第一支撑件和第二支撑件，所述托盘在竖直方向上可旋转地支撑在第一支撑件上，所述第一支撑件沿竖直方向上可移动地设于所述第二支撑件上。
  3. 根据权利要求2所述的基板检查设备，其中，所述第二支撑件上设有液压缸，所述液压缸的活塞杆固定在所述第一支撑件上。
  4. 根据权利要求1所述的基板检查设备，其中，所述支架还包括底座，所述支撑件沿水平方向可转动地设于所述底座上。
  5. 根据权利要求1所述的基板检查设备，其中，所述光源的边缘设有红外线收发器，用于朝所述托盘发射红外线以校准所述光源的朝向。
  6. 根据权利要求1所述的基板检查设备，其中，所述支架还包括两条平行设置的滑轨，所述底座沿所述滑轨的延伸方向可滑动地设于所述滑轨上。
  7. 根据权利要求6所述的基板检查设备，其中，所述滑轨内侧设有凹陷的滑槽，所述底座的两端分别嵌设于所述滑槽内。
  8. 根据权利要求6所述的基板检查设备，其中，所述镜头组包括多个镜头，所述镜头沿所述滑轨的延伸方向成排设置。
  9. 根据权利要求2所述的基板检查设备，其中，所述支架还包括两条平行设置的滑轨，所述底座沿所述滑轨的延伸方向可滑动地设于所述滑轨上。
  10. 根据权利要求9所述的基板检查设备，其中，所述滑轨内侧设有凹陷的滑槽，所述底座的两端分别嵌设于所述滑槽内。
  11. 根据权利要求9所述的基板检查设备，其中，所述镜头组包括多个镜头，所述镜头沿所述滑轨的延伸方向成排设置。
  12. 一种基板检查方法，其中，使用的基板检查设备包括：
    支架，包括托盘和支撑件，所述托盘用于承载待检查的基板，在竖直方向上可旋转地支撑在所述支撑件上；
    光源，设于所述托盘斜上方，用于朝所述托盘上的所述基板表面照射光线；
    镜头组，设于所述托盘上方，并朝向所述托盘，用于在所述托盘转动的过程中拍摄所述托盘上的所述基板的图像；
    观察台，在水平方向上与所述托盘间隔设置，用以承载操作者观察所述托盘上的所述基板的表面；
    监视器，设于所述观察台旁，用于显示所述镜头组拍摄的所述基板的图像；
    所述基板检查方法包括：
    利用光源照射托盘上的基板；
    人眼观察基板表面，以检查基板的外观；
    拍摄基板的图像，操作者通过监视器观察所拍摄的基板的图像，以检查图片中有无暗影；
    在竖直方向上转动托盘，再次拍摄基板的图像，操作者再次通过监视器观察所拍摄的基板的图像，直至托盘转动至基板脱离拍摄视角。
  13. 根据权利要求12所述的基板检查方法，其中，还包括：转动支撑件，并拍摄基板的图像，操作者通过监视器观察所拍摄的基板的图像。
  14. 根据权利要求12所述的基板检查方法，其中，所述支撑件还包括第一支撑件和第二支撑件，所述托盘在竖直方向上可旋转地支撑在第一支撑件上，所述第一支撑件沿竖直方向上可移动地设于所述第二支撑件上。
  15. 根据权利要求14所述的基板检查方法，其中，所述第二支撑件上设有液压缸，所述液压缸的活塞杆固定在所述第一支撑件上。
  16. 根据权利要求12所述的基板检查方法，其中，所述支架还包括底座，所述支撑件沿水平方向可转动地设于所述底座上。
  17. 根据权利要求12所述的基板检查方法，其中，所述光源的边缘设有红外线收发器，用于朝所述托盘发射红外线以校准所述光源的朝向。
  18. 根据权利要求12所述的基板检查方法，其中，所述支架还包括两条平行设置的滑轨，所述底座沿所述滑轨的延伸方向可滑动地设于所述滑轨上。
  19. 根据权利要求18所述的基板检查方法，其中，所述滑轨内侧设有凹陷的滑槽，所述底座的两端分别嵌设于所述滑槽内。
  20. 根据权利要求18所述的基板检查方法，其中，所述镜头组包括多个镜头，所述镜头沿所述滑轨的延伸方向成排设置。
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