WO2019090695A1 - 柔性面板的制作方法、柔性面板和显示装置 - Google Patents

柔性面板的制作方法、柔性面板和显示装置 Download PDF

Info

Publication number
WO2019090695A1
WO2019090695A1 PCT/CN2017/110452 CN2017110452W WO2019090695A1 WO 2019090695 A1 WO2019090695 A1 WO 2019090695A1 CN 2017110452 W CN2017110452 W CN 2017110452W WO 2019090695 A1 WO2019090695 A1 WO 2019090695A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective film
flexible panel
flexible
substrate
face
Prior art date
Application number
PCT/CN2017/110452
Other languages
English (en)
French (fr)
Inventor
周启豪
叶昱均
Original Assignee
深圳市柔宇科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市柔宇科技有限公司 filed Critical 深圳市柔宇科技有限公司
Priority to CN201780092075.9A priority Critical patent/CN110741427B/zh
Priority to PCT/CN2017/110452 priority patent/WO2019090695A1/zh
Priority to TW107139742A priority patent/TWI689807B/zh
Publication of WO2019090695A1 publication Critical patent/WO2019090695A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/165—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field
    • G02F1/166—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field characterised by the electro-optical or magneto-optical effect
    • G02F1/167—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on translational movement of particles in a fluid under the influence of an applied field characterised by the electro-optical or magneto-optical effect by electrophoresis

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a method for fabricating a flexible panel, a flexible panel, and a display device.
  • a flexible panel generally needs to fabricate a flexible substrate on a rigid substrate, prepare a device layer on the flexible substrate, and cover the protective film, and finally separate the flexible substrate from the rigid substrate by a laser scanning method, thereby Form a flexible panel.
  • the flexible substrate After the laser scanning, the flexible substrate has been separated from the rigid substrate, but since the adhesiveness of the protective film is not affected by the laser and covers over the flexible substrate, the flexible substrate, the device layer, and the protective film are still attached to the rigid On the substrate.
  • the adhesive layer between the protective film and the rigid substrate is generally cut by a blade, but this operation requires precise alignment and the blade is scratched by the flexible panel. risk.
  • Embodiments of the present invention provide a method of fabricating a flexible panel, a flexible panel, and a display device.
  • the rigid substrate including a first face and a second face opposite the first face, forming a flexible substrate on the first face;
  • the protective film by cooling the protective film, the protective film can be reduced in viscosity and warp, so that the protective film can be separated from the first surface of the rigid substrate, and then the flexible panel and the rigid substrate can be separated.
  • a flexible panel separation that is fast, non-destructive and does not require precise alignment can be achieved, while at the same time avoiding the risk of scratching the flexible panel.
  • a flexible panel according to an embodiment of the present invention which is produced by the manufacturing method according to any one of the above embodiments.
  • the separation of the flexible panel from the rigid substrate does not require precise alignment, and the risk of scratching the flexible panel can be avoided.
  • a display device includes the flexible panel described in the above embodiment.
  • the separation of the flexible panel from the rigid substrate does not require precise alignment, and the risk of scratching the flexible panel can be avoided.
  • FIG. 1 is a schematic flow chart of a method for fabricating a flexible panel according to an embodiment of the present invention
  • FIG. 2 is a schematic structural view of a flexible panel according to an embodiment of the present invention.
  • FIG. 3 is a schematic view showing a flexible panel formed on a rigid substrate according to an embodiment of the present invention.
  • FIG. 4 is a schematic view of a laser lift-off process according to an embodiment of the present invention.
  • FIG. 5 is a schematic view showing the separation of a flexible panel and a rigid substrate according to an embodiment of the present invention
  • Fig. 6 is a schematic view showing a movement locus of a spray device according to an embodiment of the present invention.
  • Flexible panel 10 flexible substrate 12, device layer 14, protective film 16, rigid substrate 20, first side 22, second side 24, suction cup 30, spray device 40.
  • first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
  • features defining “first” or “second” may include one or more of the described features either explicitly or implicitly.
  • the meaning of "a plurality” is two or more unless specifically and specifically defined otherwise.
  • connection In the description of the present invention, it should be noted that the terms “installation”, “connected”, and “connected” are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; may be mechanically connected, may be electrically connected or may communicate with each other; may be directly connected, or may be indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship.
  • Connected, or integrally connected may be mechanically connected, may be electrically connected or may communicate with each other; may be directly connected, or may be indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship.
  • the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
  • the first feature "on” or “under” the second feature may include direct contact of the first and second features, and may also include first and second features, unless otherwise specifically defined and defined. It is not in direct contact but through additional features between them.
  • the first feature "above”, “above” and “above” the second feature includes the first feature directly above and above the second feature, or merely indicating that the first feature level is higher than the second feature.
  • the first feature “below”, “below” and “below” the second feature includes the first feature directly below and below the second feature, or merely the first feature level being less than the second feature.
  • a method for manufacturing a flexible panel 10 includes:
  • Step S11 providing a rigid substrate 20, the rigid substrate 20 includes a first surface 22 and a second surface 24 opposite the first surface 22, forming a flexible substrate 12 on the first surface 22;
  • Step S13 forming the device layer 14 on the flexible substrate 12, and forming a protective film 16 on the device layer 14, the protective film 16 is attached to the rigid substrate 20, and the flexible substrate 12, the device layer 14 and the protective film 16 form the flexible panel 10. ;
  • Step S15 performing a laser lift-off process from one side of the second surface 24 to separate the flexible substrate 12 from the first surface 22;
  • Step S17 cooling the protective film 16 to separate the protective film 16 from the first face 22;
  • Step S19 separating the flexible panel 10 from the rigid substrate 20.
  • the protective film 16 by cooling the protective film 16, the protective film 16 can be reduced in viscosity and warp, so that the protective film 16 can be separated from the first face 22 of the rigid substrate 20, and then separated.
  • the flexible panel 10 and the rigid substrate 20 In this way, a flexible panel 10 that is fast, non-destructive and does not require precise alignment is achieved, while at the same time avoiding the risk of scratching the flexible panel 10.
  • the flexible panel 10 includes a flexible substrate 12, a device layer 14, and a protective film 16.
  • the flexible substrate 12 has been separated from the rigid substrate 20, but since the protective film 16 is attached to the rigid substrate 20 and the adhesiveness of the protective film 16 is not affected by the laser, the protective film 16 And the rigid substrate 20 is still not separated from The flexible panel 10 is still attached to the rigid substrate 20. Since the thermal expansion coefficient of the protective film 16 and the rigid substrate 20 does not match, the protective film 16 can be cooled, and the protective film 16 can be depressed and warped to desorb the rigid substrate 20. Then, the flexible panel 10 is completely separated from the rigid substrate 20, and the flexible panel 10 is handed over into the tray.
  • the protective film 16 is re-flattened after returning to normal temperature.
  • the flexible panel 10 can be separated from the rigid substrate 20 without using a blade to cut the adhesive layer between the protective film 16 and the rigid substantially, thereby realizing a flexible panel that is fast, non-destructive, and does not require precise alignment. 10 separation mode, at the same time, the risk of scratching the flexible panel 10 is also avoided.
  • the flexible panel 10 is a flexible OLED panel.
  • the flexible OLED panel fabricates a display device layer 14 on a flexible substrate 12 that includes a stacked ITO anode, an organic functional layer, and a metal cathode.
  • forming the flexible substrate 12 on the first face 22 includes coating a polyimide liquid on the first face 22 to form the flexible substrate 12.
  • polyimide (PI) is an organic polymer material with excellent mechanical properties, high temperature resistance up to 400 ° C, and long-term use temperature range of -200 to 300 ° C, which is the most commonly used for making flexible substrate 12. material. Therefore, the flexible substrate 12 formed of the polyimide liquid is resistant to impact, is not easily broken, and is light and thin. During the fabrication of the flexible panel 10, the flexible substrate 12 is less susceptible to temperature variations.
  • the flexible substrate 12 may not be limited to the above embodiments, but in other embodiments, other suitable materials may be used as needed, for example, polyethylene naphthalate (PEN), polyethylene terephthalate. Ester (PET).
  • PEN polyethylene naphthalate
  • PET polyethylene terephthalate
  • PET polyethylene terephthalate
  • a rigid substrate 20 is provided, including: facing the first face 22 upward and the second face 24 facing downward;
  • Performing a laser lift-off process from one side of the second face 24 to separate the flexible substrate 12 from the first face 22 includes: flipping the rigid substrate 20 such that the first face 22 faces downward and the second face 24 faces upward, from the second A side of the face 24 is subjected to a laser lift-off process to separate the flexible substrate 12 from the first face 22.
  • the flexible substrate 12, the device layer 14 and the protective film 16 are laminated on the first surface 22 of the rigid substrate 20, from the side of the second surface 24 of the rigid substrate 20.
  • the laser lift-off process can both separate the flexible substrate 12 from the first face 22 and also reduce the effect of the laser on the device layer 14.
  • the rigid substrate 20 is flipped such that the first side 22 faces downward and the second side 24 faces upward.
  • the laser light is irradiated from the top to the bottom and penetrates from the rigid substrate 20 to the flexible substrate 12, and the flexible substrate 12 chemically reacts with the laser to detach the flexible substrate 12 from the rigid substrate 20.
  • the rigid substrate 20 may not be turned over, and the first surface 22 faces upward and the second surface 24 faces downward.
  • the laser light is irradiated from the bottom up and penetrates from the rigid substrate 20 to the flexible substrate 12, and the flexible substrate 12 chemically reacts with the laser to detach the flexible substrate 12 from the rigid substrate 20.
  • the flexible panel 10 prior to cooling the protective film 16, is fabricated by flipping the rigid substrate 20 with the first side 22 facing up and the second side 24 facing downward.
  • the rigid substrate 20 is reversed before the laser lift-off process is performed. Therefore, before the protective film 16 is cooled, the rigid substrate 20 is turned over so that the first face 22 faces upward and the second face 24 faces downward. It is convenient to cool the protective film 16.
  • cooling the protective film 16 includes spraying a cryogen along the edge of the protective film 16 to cool the protective film 16.
  • spraying the refrigerant along the edge of the protective film 16 to cool the protective film 16 is simple and feasible, and the cost is low.
  • spraying a cryogen along the edge of the protective film 16 to cool the protective film 16 includes spraying the refrigerant 360 degrees along the edge of the protective film 16 to cool the protective film 16.
  • the cooling agent can be sprayed by the spray device 40 to cool the edges of the protective film 16, which is simple and easy to implement.
  • the spraying device 40 can be moved in a dashed path in FIG. 6, and the refrigerant is sprayed 360 degrees along the edge of the protective film 16 to cool the protective film 16 to reduce the viscosity.
  • the spray device 40 can be moved clockwise or counterclockwise in accordance with the dashed path in FIG.
  • the spray head of the spray device 40 can control the spray amount and the spray distance to indirectly control the cooling temperature.
  • a plurality of spray devices 40 can be used to simultaneously spray the refrigerant for cooling, thereby speeding up the cooling.
  • a plurality can be understood as two or more.
  • the cooling method may not be limited to the above embodiment, and in other embodiments, other suitable manners may be adopted according to requirements.
  • a pipe may be placed beside the edge of the protective film 16 that surrounds the edge of the protective film 16 360 degrees.
  • a refrigerant is introduced into the pipe.
  • the temperature of the refrigerant is transmitted to the edge of the protective film 16 through the pipe, thereby cooling the edge of the protective film 16.
  • the cryogen comprises liquid nitrogen.
  • liquid nitrogen is a common and widely used refrigerant.
  • the liquid nitrogen temperature was -196 ° C under normal pressure.
  • liquid nitrogen can rapidly cool the edges of the protective film 16.
  • the refrigerant may not be limited to the above embodiments, while in other embodiments other suitable refrigerants may be employed as needed.
  • separating the flexible panel 10 from the rigid substrate 20 includes absorbing the protective film 16 using the suction cup 30 to separate the flexible panel 10 from the rigid substrate 20.
  • the suction of the protective film 16 by the suction cup 30 separates the flexible panel 10 from the rigid substrate 20, which is convenient and quick.
  • the number of the suction cups 30 is plural, and the plurality of suction cups 30 adsorb the protective film 16 evenly at intervals.
  • the suction cup 30 utilizes the difference in internal and external atmospheric pressure to adsorb the object.
  • the suction of the plurality of suction cups 30 is stronger.
  • the plurality of suction cups 30 can be understood as two or more, and the number of suction cups 30 can be selected according to actual needs.
  • the suction cup 30 can be a vacuum chuck.
  • the vacuum chuck absorbs the protective film 16 by the vacuum principle, that is, vacuum negative pressure, to achieve the purpose of lifting the flexible panel 10.
  • the vacuum chuck includes a vent, and the vent is connected to the vacuum generating device. When the vacuum generating device is activated, the vent is vented, and the air inside the suction cup 30 is evacuated to form a vacuum state with a pressure of P2. At this time, the pressure P2 inside the suction cup 30 is lower than the atmospheric pressure P1 outside the suction cup 30, that is, P2 ⁇ P1, and the protective film 16 is adsorbed by the external pressure. The higher the degree of vacuum inside the suction cup 30, the tighter the gap between the suction cup 30 and the protective film 16.
  • the rigid substrate 20 is a glass substrate, a ceramic substrate, or a quartz substrate.
  • the preferred rigid substrate 20 is a glass substrate.
  • the flexible substrate 12 is smaller in size than the rigid substrate 20.
  • the protective film 16 covers the flexible substrate 12.
  • the protective film 16 covers the flexible substrate 12 and that the size of the device layer 14 is less than or equal to the size of the flexible substrate 12. As such, the protective film 16 can prevent impurities such as moisture and dust in the air from contaminating the device layer 14 and the flexible substrate 12.
  • the size of the device layer 14 is smaller than the size of the flexible substrate 12 such that the upper surface of the flexible substrate 12 has an edge portion free of the device layer 14, and the protective film 16 covers the flexible substrate 12, so that The protective film 16 covers the upper surface of the flexible substrate 12 without the edge portion of the device layer 14 and the side of the flexible substrate 12.
  • the suction cup 30 includes a transparent soft suction cup.
  • the transparent soft rubber has a low cost
  • the suction cup 30 made thereof has strong adsorption force. Specifically, the suction cup 30 sucks the protective film 16 above the flexible panel 10, and then transfers the flexible panel 10 to the tray. The suction force of the suction cup 30 is strong, and the flexible panel 10 can be prevented from falling.
  • a flexible panel 10 according to an embodiment of the present invention is produced by the manufacturing method of any of the above embodiments.
  • the separation of the flexible panel 10 from the rigid substrate 20 does not require precise alignment, and the risk of scratching the flexible panel 10 can be avoided.
  • a display device includes the flexible panel 10 of the above embodiment.
  • the separation of the flexible panel 10 from the rigid substrate 20 does not require precise alignment, and the risk of scratching the flexible panel 10 can be avoided.
  • the display device includes, but is not limited to, a mobile phone, a tablet computer, and a wearable electronic device with a display function.

Abstract

一种柔性面板（10）的制作方法、一种柔性面板（10）和显示装置。柔性面板（10）的制作方法包括：提供刚性基板（20），刚性基板（20）包括第一面（22）和与第一面（22）相背的第二面（24），在第一面（22）上形成柔性衬底（12）；在柔性衬底（12）上形成器件层（14），在器件层（14）上形成保护膜（16），保护膜（16）贴附刚性基板（20），柔性衬底（12）、器件层（14）和保护膜（16）形成柔性面板（10）；从第二面（24）的一侧进行激光剥离制程以使柔性衬底（12）与第一面（22）分离；冷却保护膜（16）使保护膜（16）与第一面（22）分离；和分离柔性面板（10）与刚性基板（20）。

Description

柔性面板的制作方法、柔性面板和显示装置 技术领域
本发明涉及显示技术领域，特别涉及一种柔性面板的制作方法、柔性面板和显示装置。
背景技术
在相关技术中，柔性面板一般需要在刚性基板上制作一层柔性衬底，并在柔性衬底上制备器件层以及覆盖保护膜，最后再采用激光扫描方法将柔性衬底与刚性基板分离，从而形成柔性面板。
在激光扫描后，柔性衬底已经与刚性基板分离，但是由于保护膜的黏性不受激光的影响并且覆盖在柔性衬底的上方，使得柔性衬底、器件层以及保护膜仍贴附在刚性基板上。为了将柔性衬底、器件层以及保护膜彻底与玻璃基板分离，一般使用刀片切开保护膜与刚性基板之间的胶层，但是，这种操作需要精确对位且存在刀片刮伤柔性面板的风险。
发明内容
本发明的实施方式提供一种柔性面板的制作方法、柔性面板和显示装置。
本发明实施方式的柔性面板的制作方法，包括：
提供刚性基板，所述刚性基板包括第一面和与所述第一面相背的第二面，在所述第一面上形成柔性衬底；
在所述柔性衬底上形成器件层，并在所述器件层上形成保护膜，所述保护膜贴附所述刚性基板，所述柔性衬底、所述器件层和所述保护膜形成所述柔性面板；
从所述第二面的一侧进行激光剥离制程以使所述柔性衬底与所述第一面分离；
冷却所述保护膜使所述保护膜与所述第一面分离；和
分离所述柔性面板与所述刚性基板。
本发明实施方式的柔性面板的制作方法，通过冷却保护膜，可使保护膜降低黏性并产生翘曲，这样保护膜可与刚性基板的第一面分离，然后再分离柔性面板与刚性基板。如此，可实现快速、无损且无需精确对位的柔性面板分离方式，同时，也避免对柔性面板造成刮伤的风险。
本发明实施方式的柔性面板，所述柔性面板采用上述实施方式任一项所述的制作方法制成。
本发明实施方式的柔性面板，柔性面板与刚性基板的分离无需精确对位，且可避免对柔性面板造成刮伤的风险。
本发明实施方式的显示装置，包括上述实施方式所述的柔性面板。
本发明实施方式的显示装置，柔性面板与刚性基板的分离无需精确对位，且可避免对柔性面板造成刮伤的风险。
本发明的实施方式的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本发明的实施方式的实践了解到。
附图说明
本发明的上述和/或附加的方面和优点从结合下面附图对实施方式的描述中将变得明显和容易理解，其中：
图1是本发明实施方式的柔性面板的制作方法的流程示意图；
图2是本发明实施方式的柔性面板的结构示意图；
图3是本发明实施方式在刚性基板上形成柔性面板的示意图；
图4是本发明实施方式的激光剥离制程的示意图；
图5是本发明实施方式的柔性面板与刚性基板分离的示意图；
图6是本发明实施方式的喷洒装置的运动轨迹的示意图。
主要元件符号附图说明：
柔性面板10、柔性衬底12、器件层14、保护膜16、刚性基板20、第一面22、第二面24、吸盘30、喷洒装置40。
具体实施方式
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接或可以相互通讯；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开，下文中对特定例子的部件和设置进行描述。当然，它们仅仅为示例，并且目的不在于限制本发明。此外，本发明可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。此外，本发明提供了的各种特定的工艺和材料的例子，但是本领域普通技术人员可以意识到其它工艺的应用和/或其它材料的使用。
请参阅图1至图5，本发明实施方式的柔性面板10的制作方法，包括：
步骤S11：提供刚性基板20，刚性基板20包括第一面22和与第一面22相背的第二面24，在第一面22上形成柔性衬底12；
步骤S13：在柔性衬底12上形成器件层14，并在器件层14上形成保护膜16，保护膜16贴附刚性基板20，柔性衬底12、器件层14和保护膜16形成柔性面板10；
步骤S15：从第二面24的一侧进行激光剥离制程以使柔性衬底12与第一面22分离；
步骤S17：冷却保护膜16使保护膜16与第一面22分离；和
步骤S19：分离柔性面板10与刚性基板20。
本发明实施方式的柔性面板10的制作方法，通过冷却保护膜16，可使保护膜16降低黏性并产生翘曲，这样保护膜16可与刚性基板20的第一面22分离，然后再分离柔性面板10与刚性基板20。如此，可实现快速、无损且无需精确对位的柔性面板10分离方式，同时，也避免对柔性面板10造成刮伤的风险。
可以理解，柔性面板10包括柔性衬底12、器件层14和保护膜16。在本发明的实施方式中，进行激光剥离制程后，柔性衬底12已经与刚性基板20分离，但是由于保护膜16贴附刚性基板20且保护膜16的黏性不受激光影响，保护膜16和刚性基板20仍未分离，从 而导致柔性面板10仍贴附在刚性基板20上。由于保护膜16与刚性基板20的热膨胀系数不一致，可通过冷却保护膜16，使保护膜16降低黏性并产生翘曲从而脱附刚性基板20。然后，将柔性面板10与刚性基板20彻底分离，并将柔性面板10移交至托盘中。保护膜16恢复常温后会重新变得平整。如此，进行激光剥离制程后，无需使用刀片切开保护膜16与刚性基本之间的胶层便可将柔性面板10与刚性基板20分离，从而实现了快速、无损且无需精确对位的柔性面板10分离方式，同时，也避免了对柔性面板10造成刮伤的危险。
在某些实施方式中，柔性面板10为柔性OLED面板。柔性OLED面板在柔性衬底12上制作显示器件层14，器件层14包括层叠设置的ITO阳极、有机功能层和金属阴极。
在某些实施方式中，在第一面22上形成柔性衬底12，包括：在第一面22上涂布聚酰亚胺液以形成柔性衬底12。
可以理解，聚酰亚胺(PI)是一种有机高分子材料，其力学性能优异、耐高温达400℃以上，长期使用温度范围为-200至300℃，是制作柔性衬底12最常用的材料。因此，由聚酰亚胺液形成的柔性衬底12耐撞击、不易破碎且轻薄。在柔性面板10的制作过程中，柔性衬底12不易受温度变化的影响。
当然，柔性衬底12可以不限于上述实施方式，而在其他实施方式中可以根据需求采用其他合适的材料，例如，聚对萘二甲酸乙二醇酯(PEN)、聚对苯二甲酸乙二酯(PET)。
在某些实施方式中，请参阅图3和图4，提供刚性基板20，包括：使第一面22朝上及第二面24朝下；
从第二面24的一侧进行激光剥离制程以使柔性衬底12与第一面22分离，包括：翻转刚性基板20，使第一面22朝下及第二面24朝上，从第二面24的一侧进行激光剥离制程以使柔性衬底12与第一面22分离。
可以理解，在本发明的实施方式中，在刚性基板20的第一面22上层叠形成有柔性衬底12、器件层14和保护膜16，从刚性基板20的第二面24的一侧进行激光剥离制程，既可使柔性衬底12与第一面22分离，也可减弱激光对器件层14的影响。
在一个实施例中，在进行激光剥离制程时，将刚性基板20翻转使第一面22朝下及第二面24朝上。此时，激光从上往下照射并由刚性基板20穿透至柔性衬底12，柔性衬底12与激光发生化学反应使柔性衬底12脱离刚性基板20。当然，在另一个实施例中，在进行激光剥离制程时，也可不翻转刚性基板20，保持第一面22朝上及第二面24朝下。此时，激光从下往上照射并由刚性基板20穿透至柔性衬底12，柔性衬底12与激光发生化学反应使柔性衬底12脱离刚性基板20。
在某些实施方式中，在冷却保护膜16前，柔性面板10的制作方法包括：翻转刚性基板20，使第一面22朝上及第二面24朝下。
可以理解，在图示的实施方式中，进行激光剥离制程前，翻转了刚性基板20，因此，在冷却保护膜16前，翻转刚性基板20使第一面22朝上和第二面24朝下，方便冷却保护膜16。
在某些实施方式中，请参阅图5，冷却保护膜16，包括：沿保护膜16的边缘喷洒冷冻剂以冷却保护膜16。
如此，沿保护膜16的边缘喷洒冷冻剂来冷却保护膜16，方法简单可行，成本低。
在某些实施方式中，请参阅图6，沿保护膜16的边缘喷洒冷冻剂以冷却保护膜16，包括：沿保护膜16的边缘360度喷洒冷冻剂以冷却保护膜16。
可以理解，可通过喷洒装置40喷洒冷冻剂来冷却保护膜16的边缘，方法简单且容易实现。在本发明实施方式中，喷洒装置40可按图6中虚线轨迹运动，沿保护膜16的边缘360度喷洒冷冻剂以冷却保护膜16使其黏性降低。具体地，喷洒装置40可按图6中虚线轨迹顺时针运动或逆时针运动。如此，皆可实现沿保护膜16的边缘360度喷洒冷冻剂。
进一步地，喷洒装置40的喷头可控制喷洒量和喷洒距离，从而间接控制冷却温度。可以使用多个喷洒装置40同时喷洒冷冻剂进行冷却，从而加快冷却速度。多个可以理解为两个或两个以上。
当然，冷却方式可以不限于上述实施方式，而在其他实施方式中可以根据需求采用其他合适的方式。例如，可以在保护膜16的边缘旁边放置管道，管道360度围绕保护膜16的边缘。进行冷却时，向管道中通入冷冻剂。冷冻剂的温度透过管道传递到保护膜16的边缘，从而冷却保护膜16的边缘。
在某些实施方式中，冷冻剂包括液氮。
可以理解，液氮是一种常见且应用比较多的冷冻剂。在常压下，液氮的温度为-196℃。如此，液氮可以迅速冷却保护膜16的边缘。
当然，冷冻剂可以不限于上述实施方式，而在其他实施方式中可以根据需求采用其他合适的冷冻剂。
在某些实施方式中，分离柔性面板10与刚性基板20包括：使用吸盘30吸附保护膜16使柔性面板10与刚性基板20分离。
可以理解，利用吸盘30吸附保护膜16使柔性面板10与刚性基板20分离，方便快捷。在本发明的一个示例中，吸盘30的数量是多个，多个吸盘30均匀间隔地吸附保护膜16。吸盘30利用内外大气压力的差别来吸附物体。多个吸盘30的吸附力更强。在吸盘30吸附保护膜16使柔性面板10与刚性基板20分离的过程中，多个吸盘30吸附保护膜16，确保柔性面板10不易掉落。多个吸盘30可以理解为两个或两个以上，可以根据实际需求选择吸盘30的数量。
在某些实施方式中，吸盘30可为真空吸盘。真空吸盘利用真空原理，即真空负压来吸附保护膜16以达到提起柔性面板10的目的。真空吸盘包括通气口，通气口与真空发生装置连接。当真空发生装置启动后，通气口通气，将吸盘30内部的空气抽走，形成了压力为P2的真空状态。此时，吸盘30内部的压力P2低于吸盘30外部的大气压力P1，即P2<P1，保护膜16在外部压力的作用下被吸附住。吸盘30内部的真空度越高，吸盘30与保护膜16之间贴的越紧。
在某些实施方式中，刚性基板20为玻璃基板、陶瓷基板或石英基板。
可以理解，多种刚性基板20可供选择，当缺少某一类型的刚性基板20时，可以选择另一类型替代。在本发明的实施方式中，优选的刚性基板20为玻璃基板。
在某些实施方式中，柔性衬底12的尺寸小于刚性基板20的尺寸。
如此，确保能够在刚性基板20上制作柔性面板10。
在某些实施方式中，保护膜16覆盖柔性衬底12。
可以理解，保护膜16覆盖柔性衬底12，且器件层14的尺寸小于或等于柔性衬底12的尺寸。如此，保护膜16可以防止空气中的水气和灰尘等杂质污染器件层14和柔性衬底12。
具体地，在图2的示例中，器件层14的尺寸小于柔性衬底12的尺寸，使得柔性衬底12的上表面存在没有器件层14的边缘部位，保护膜16覆盖柔性衬底12，使得保护膜16包覆柔性衬底12的上表面没有器件层14的边缘部位和柔性衬底12的侧面。
在某些实施方式中，吸盘30包括透明软胶吸盘。
可以理解，透明软胶的成本低，其制成的吸盘30吸附力强。具体的，吸盘30将柔性面板10上方的保护膜16吸附住，然后将柔性面板10移交至托盘。吸盘30的吸附力强，可避免柔性面板10掉落。
本发明实施方式的一种柔性面板10采用上述任一实施方式的制作方法制成。
本发明实施方式的柔性面板10，柔性面板10与刚性基板20的分离无需精确对位，且可避免对柔性面板10造成刮伤的风险。
本发明实施方式的一种显示装置，包括上述实施方式的柔性面板10。
本发明实施方式的显示装置，柔性面板10与刚性基板20的分离无需精确对位，且可避免对柔性面板10造成刮伤的风险。
具体地，显示装置包括但不限于手机、平板电脑、带显示功能的可穿戴式电子装置。
在本说明书的描述中，参考术语“某些实施方式”、“一个实施方式”、“一些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”的描述意指结合实施方式或示例描述的具体特征、结构、材料或者特点包含于本发明的至 少一个实施方式或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。
尽管上面已经示出和描述了本发明的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本发明的限制，本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型，本发明的范围由权利要求及其等同物限定。

Claims (14)

  1. 一种柔性面板的制作方法，其特征在于，包括：
    提供刚性基板，所述刚性基板包括第一面和与所述第一面相背的第二面，在所述第一面上形成柔性衬底；
    在所述柔性衬底上形成器件层，并在所述器件层上形成保护膜，所述保护膜贴附所述刚性基板，所述柔性衬底、所述器件层和所述保护膜形成所述柔性面板；
    从所述第二面的一侧进行激光剥离制程以使所述柔性衬底与所述第一面分离；
    冷却所述保护膜使所述保护膜与所述第一面分离；和
    分离所述柔性面板与所述刚性基板。
  2. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述在所述第一面上形成柔性衬底，包括：在所述第一面上涂布聚酰亚胺液以形成所述柔性衬底。
  3. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述提供刚性基板，包括：使所述第一面朝上及所述第二面朝下；
    所述从所述第二面的一侧进行激光剥离制程以使所述柔性衬底与所述第一面分离，包括：翻转所述刚性基板，使所述第一面朝下及所述第二面朝上，从所述第二面的一侧进行激光剥离制程以使所述柔性衬底与所述第一面分离。
  4. 如权利要求3所述的柔性面板的制作方法，其特征在于，在冷却所述保护膜前，所述柔性面板的制作方法包括：翻转所述刚性基板，使所述第一面朝上及所述第二面朝下。
  5. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述冷却所述保护膜，包括：沿所述保护膜的边缘喷洒冷冻剂以冷却所述保护膜。
  6. 如权利要求5所述的柔性面板的制作方法，其特征在于，所述沿所述保护膜的边缘喷洒冷冻剂以冷却所述保护膜，包括：沿所述保护膜的边缘360度喷洒冷冻剂以冷却所述保护膜。
  7. 如权利要求5所述的柔性面板的制作方法，其特征在于，所述冷冻剂包括液氮。
  8. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述分离所述柔性面板与 所述刚性基板包括：使用吸盘吸附所述保护膜使所述柔性面板与所述刚性基板分离。
  9. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述刚性基板为玻璃基板、陶瓷基板或石英基板。
  10. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述柔性衬底的尺寸小于所述刚性基板的尺寸。
  11. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述保护膜覆盖所述柔性衬底。
  12. 如权利要求1所述的柔性面板的制作方法，其特征在于，所述吸盘包括透明软胶吸盘。
  13. 一种柔性面板，其特征在于，所述柔性面板采用权利要求1-12任一项所述的制作方法制成。
  14. 一种显示装置，其特征在于，包括权利要求13所述的柔性面板。
PCT/CN2017/110452 2017-11-10 2017-11-10 柔性面板的制作方法、柔性面板和显示装置 WO2019090695A1 (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780092075.9A CN110741427B (zh) 2017-11-10 2017-11-10 柔性面板的制作方法、柔性面板和显示装置
PCT/CN2017/110452 WO2019090695A1 (zh) 2017-11-10 2017-11-10 柔性面板的制作方法、柔性面板和显示装置
TW107139742A TWI689807B (zh) 2017-11-10 2018-11-08 柔性面板之製作方法、柔性面板和顯示裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2017/110452 WO2019090695A1 (zh) 2017-11-10 2017-11-10 柔性面板的制作方法、柔性面板和显示装置

Publications (1)

Publication Number Publication Date
WO2019090695A1 true WO2019090695A1 (zh) 2019-05-16

Family

ID=66437371

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/110452 WO2019090695A1 (zh) 2017-11-10 2017-11-10 柔性面板的制作方法、柔性面板和显示装置

Country Status (3)

Country Link
CN (1) CN110741427B (zh)
TW (1) TWI689807B (zh)
WO (1) WO2019090695A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111276052A (zh) * 2020-02-18 2020-06-12 深圳市华星光电半导体显示技术有限公司 柔性显示面板及其制备方法
CN112420969A (zh) * 2020-11-13 2021-02-26 深圳市华星光电半导体显示技术有限公司 柔性oled显示面板的制作方法及显示装置
CN113036065B (zh) * 2021-03-08 2024-02-20 京东方科技集团股份有限公司 柔性显示基板及其制备方法、显示装置
CN115691350A (zh) * 2021-07-30 2023-02-03 京东方科技集团股份有限公司 一种驱动基板及其制备方法、发光装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101574759A (zh) * 2008-05-05 2009-11-11 元太科技工业股份有限公司 承载装置及软性显示面板的制造方法
US20150171354A1 (en) * 2013-12-12 2015-06-18 Electronics And Telecommunications Research Institute Method for fabricating flexible display
CN104793780A (zh) * 2014-01-16 2015-07-22 达鸿先进科技股份有限公司 触控面板的工艺方法及其触控面板结构
CN105690974A (zh) * 2016-01-21 2016-06-22 京东方科技集团股份有限公司 柔性薄膜贴合与剥离方法、柔性基板制备方法、衬底基板
CN106847862A (zh) * 2016-12-28 2017-06-13 深圳市华星光电技术有限公司 一种柔性显示器基板及其制备方法，柔性显示器制备方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6774010B2 (en) * 2001-01-25 2004-08-10 International Business Machines Corporation Transferable device-containing layer for silicon-on-insulator applications
JP2002341307A (ja) * 2001-05-16 2002-11-27 Toshiba Corp 液晶表示装置の製造方法及び製造装置
JP2003217832A (ja) * 2002-01-28 2003-07-31 Mitsumi Electric Co Ltd 有機エレクトロルミネッセンス素子の製造方法、及び有機エレクトロルミネッセンスディスプレイ
JP5345303B2 (ja) * 2007-08-13 2013-11-20 株式会社ジャパンディスプレイ 表示装置とその製造方法
CN101722620A (zh) * 2008-10-31 2010-06-09 广达电脑股份有限公司 塑料成型品及塑料成型的方法
TWI444945B (zh) * 2011-08-23 2014-07-11 E Ink Holdings Inc 用於製作軟性顯示裝置之基板、結構及軟性顯示裝置的製作方法
CN102005517B (zh) * 2009-08-26 2013-09-18 首尔Opto仪器股份有限公司 利用激光剥离技术制造发光二极管的方法和激光剥离装置
JP5414462B2 (ja) * 2009-10-30 2014-02-12 シチズン電子株式会社 半導体素子の製造方法
CN104698658A (zh) * 2010-05-26 2015-06-10 旭硝子株式会社 带粘附层的透明面材、显示装置及它们的制造方法
CN102618016B (zh) * 2011-01-31 2013-10-16 中国科学院过程工程研究所 一种透光的隔热薄膜及其制备方法及其应用
US8748296B2 (en) * 2011-06-29 2014-06-10 International Business Machines Corporation Edge-exclusion spalling method for improving substrate reusability
CN102830524A (zh) * 2012-09-04 2012-12-19 京东方科技集团股份有限公司 一种模组组装设备
KR101640356B1 (ko) * 2012-09-25 2016-07-15 미쓰이 가가쿠 가부시키가이샤 올레핀 중합체의 제조 방법 및 올레핀 중합체
KR101462724B1 (ko) * 2012-09-27 2014-11-17 삼성전기주식회사 리지드 플렉시블 인쇄회로기판 제조방법
KR102075486B1 (ko) * 2013-04-11 2020-02-11 삼성디스플레이 주식회사 표시장치 접착층 냉각 장치 및 이를 이용한 표시장치 패널 분리 방법
JP6374221B2 (ja) * 2013-06-05 2018-08-15 株式会社半導体エネルギー研究所 半導体装置
CN104282546A (zh) * 2013-07-08 2015-01-14 上海和辉光电有限公司 一种提高多晶硅层均匀性的方法
US10446690B2 (en) * 2013-11-28 2019-10-15 Tohoku University Method of production of semiconductor device
CN204546443U (zh) * 2015-03-20 2015-08-12 昆山龙腾光电有限公司 触控显示面板拆解治具
CN205563007U (zh) * 2015-11-02 2016-09-07 苏州蒂珀克制冷科技有限公司 液晶屏总成分离装置
CN106876424A (zh) * 2015-12-14 2017-06-20 上海和辉光电有限公司 一种有机发光显示器及其制备方法
CN106410029B (zh) * 2016-11-04 2019-10-08 上海天马微电子有限公司 一种柔性显示面板及其制作方法、柔性显示装置
CN206348770U (zh) * 2016-12-22 2017-07-21 江西联创电子有限公司 新型触控显示面板
CN106783688A (zh) * 2016-12-28 2017-05-31 京东方科技集团股份有限公司 一种剥离装置及其剥离方法
CN106893125A (zh) * 2017-03-23 2017-06-27 武汉华星光电技术有限公司 一种改性聚酰亚胺薄膜及其制备方法
CN107225840A (zh) * 2017-04-21 2017-10-03 深圳市立德通讯器材有限公司 全贴合显示屏的拆解分离方法
CN107195643B (zh) * 2017-07-12 2020-11-03 武汉天马微电子有限公司 柔性显示面板及其制作方法、柔性显示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101574759A (zh) * 2008-05-05 2009-11-11 元太科技工业股份有限公司 承载装置及软性显示面板的制造方法
US20150171354A1 (en) * 2013-12-12 2015-06-18 Electronics And Telecommunications Research Institute Method for fabricating flexible display
CN104793780A (zh) * 2014-01-16 2015-07-22 达鸿先进科技股份有限公司 触控面板的工艺方法及其触控面板结构
CN105690974A (zh) * 2016-01-21 2016-06-22 京东方科技集团股份有限公司 柔性薄膜贴合与剥离方法、柔性基板制备方法、衬底基板
CN106847862A (zh) * 2016-12-28 2017-06-13 深圳市华星光电技术有限公司 一种柔性显示器基板及其制备方法，柔性显示器制备方法

Also Published As

Publication number Publication date
CN110741427A (zh) 2020-01-31
TW201918823A (zh) 2019-05-16
CN110741427B (zh) 2021-10-22
TWI689807B (zh) 2020-04-01

Similar Documents

Publication Publication Date Title
WO2019090695A1 (zh) 柔性面板的制作方法、柔性面板和显示装置
JP6136909B2 (ja) 樹脂層付き支持基板の製造方法、ガラス積層体の製造方法、電子デバイスの製造方法
CN102156360B (zh) 柔性显示装置及其制造方法
JP5991373B2 (ja) ガラス積層体および電子デバイスの製造方法
TWI638397B (zh) 剝離方法及剝離裝置
TWI511275B (zh) 可撓性顯示裝置的製造方法
US9583732B2 (en) Organic light emitting display apparatus and method of manufacturing the same
CN108188590B (zh) 柔性介质的切割方法
JP2018201034A (ja) 積層体の作製装置
KR20110126102A (ko) 유연성 기판 조립체의 제조 방법 및 그것으로부터의 유연성 기판 조립체
KR20150054692A (ko) 유리 적층체의 제조 방법 및 전자 디바이스의 제조 방법
JP2015093405A (ja) ガラス積層体および電子デバイスの製造方法
TWI533034B (zh) 軟性彩色濾光片及軟性彩色顯示元件之製造方法
US20170266943A1 (en) Substrate suction device, substrate bonding device, substrate bonding method, and electronic device manufacturing method
US11289675B2 (en) Display panel with support structure and method of manufacturing the same
JP2016016983A (ja) 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP5907168B2 (ja) 積層体の製造方法、および積層体
WO2018119752A1 (zh) 显示面板的制造方法
JP6003604B2 (ja) 積層板の加工方法、加工された積層板
JP6459145B2 (ja) 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP2016011210A (ja) 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
CN105765645B (zh) 柔性基底接合方法
JP6365086B2 (ja) ガラスフィルムの剥離方法および電子デバイスの製造方法
JP2015223810A (ja) 樹脂層付き支持基板およびガラス積層体
CN113471261B (zh) 显示面板的制备方法和显示面板

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17931387

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17931387

Country of ref document: EP

Kind code of ref document: A1