WO2019065398A1 - 紫外線硬化型シリコーン粘着剤組成物およびその硬化物 - Google Patents
紫外線硬化型シリコーン粘着剤組成物およびその硬化物 Download PDFInfo
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- WO2019065398A1 WO2019065398A1 PCT/JP2018/034610 JP2018034610W WO2019065398A1 WO 2019065398 A1 WO2019065398 A1 WO 2019065398A1 JP 2018034610 W JP2018034610 W JP 2018034610W WO 2019065398 A1 WO2019065398 A1 WO 2019065398A1
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
- C09J183/06—Polysiloxanes containing silicon bound to oxygen-containing groups
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/70—Siloxanes defined by use of the MDTQ nomenclature
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/36—Silica
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
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- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
- C08L83/06—Polysiloxanes containing silicon bound to oxygen-containing groups
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/04—Polysiloxanes
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J183/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
- C09J183/10—Block or graft copolymers containing polysiloxane sequences
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2433/00—Presence of (meth)acrylic polymer
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- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2483/00—Presence of polysiloxane
Definitions
- the present invention relates to a UV-curable silicone pressure-sensitive adhesive composition and a cured product thereof, and more specifically, a UV-curable silicone pressure-sensitive adhesive composition which can be suitably used as a temporary fixing material for transferring an object and a cured product thereof About.
- Non-Patent Document 1 a technology capable of selectively transferring such miniaturized elements or parts at one time has been developed and received attention.
- This technology called micro transfer printing technology, is a technology in which fine parts are picked up uniformly by the adhesive force of an elastomer and transferred to a desired place with higher adhesive strength.
- a pressure-sensitive adhesive article obtained by applying a silicone pressure-sensitive adhesive composition to a substrate or the like by spin coating, screen printing or the like and then curing it is used.
- Patent Documents 1 to 3 As a pressure-sensitive adhesive material used for this application, silicone elastomers are known, and many heat-curable solvent-free silicone-based pressure-sensitive adhesives have been proposed (Patent Documents 1 to 3). However, when a heat-curable non-solvent silicone pressure-sensitive adhesive is used, there is a problem that the cured product shrinks when it is cooled to room temperature after heat-hardening, and the dimensional error of the applied pattern becomes large.
- Patent Document 4 In order to suppress such shrinkage of the material, development of a silicone resin which can be cured in a short time at room temperature by ultraviolet irradiation has also been conducted (Patent Document 4).
- Patent Document 4 there has been a problem that after the material is applied in a desired pattern, the material flows when moving to the next step or with the passage of time, and an adhesive article having a desired shape can not be obtained after curing.
- the adhesive strength of the silicone material itself since the adhesive strength is insufficient, and there is a problem that applicable elements and parts are limited. Therefore, in addition to being curable in a short time at room temperature by ultraviolet irradiation, an ultraviolet-curable adhesive silicone material having excellent shape retention and adhesion is desired.
- the present invention has been made in view of the above-mentioned circumstances, and has a UV curable silicone pressure sensitive adhesive composition which is excellent in shape retentivity and curability and gives a cured product having excellent adhesiveness as a temporary fixing material, and a cured product thereof Intended to be provided.
- organopolysiloxanes having a specific (meth) acryloyloxy-containing group, monofunctional (meth) acrylate compounds not containing a siloxane structure, or predetermined organo By using a polysiloxane resin and fine powder silica as a thixotropic agent, an ultraviolet-curable silicone composition can be obtained which cures rapidly by ultraviolet irradiation while maintaining a desired shape, and has good adhesiveness. And completed the present invention.
- R 1 independently represents a monovalent hydrocarbon group having 1 to 20 carbon atoms
- R 2 represents an oxygen atom or an alkylene group having 1 to 20 carbon atoms
- R 3 represents Represents an acryloyloxyalkyl group, a methacryloyloxyalkyl group, an acryloyloxyalkyloxy group, or a methacryloyloxyalkyloxy group
- p represents a number satisfying 0 ⁇ p ⁇ 10
- a is a number satisfying 1 ⁇ a ⁇ 3
- B Monofunctional (meth) acrylate compound not containing a siloxane structure: 1 to 500 parts by mass
- C (a) R 4 3 SiO 1/2 units (wherein R 4 represents a monovalent hydrocarbon group having 1 to 10 carbon atoms) and (b) SiO 4/2 units
- a UV-curable silicone pressure-sensitive adhesive composition according to 1, wherein the ratio (thixo ratio) of viscosity A at 2 rpm to viscosity B at 10 rpm at 23 ° C. is A / B 1.1 to 10, 3.
- Adhesive consisting of the cured product of 4, 6.
- Adhesive sheet consisting of the cured product of 4, 7.
- a micropattern transfer stamp consisting of the cured product of 4, 8. 7.
- a microstructure transfer device provided with a 7 or 8 microstructure transfer stamp.
- the adhesive UV-curable silicone rubber composition of the present invention is excellent in shape-retaining property and curability at the time of application, and its cured product has excellent adhesiveness as a temporary fixing material.
- the ultraviolet-curable silicone pressure-sensitive adhesive composition comprises (A) 100 parts by mass of organopolysiloxane having two groups represented by the following general formula (1) in one molecule: (B) Monofunctional (meth) acrylate compound not containing a siloxane structure: 1 to 500 parts by mass, (C) (a) R 4 3 SiO 1/2 units (wherein R 4 represents an unsubstituted or substituted monovalent hydrocarbon group having 1 to 10 carbon atoms) and (b) SiO 4 / Organopolysiloxane resin consisting of 2 units and having a molar ratio of (a) units to (b) units in the range of 0.6 to 1.2: 1: 1 to 5,000 parts by mass, (D) Fine powder silica: 1 to 100 parts by mass, and (E) photopolymerization initiator: 0.01 to 20 parts by mass.
- A 100 parts by mass of organopolysiloxane having two groups represented by the following general formula (1) in one molecule:
- the component (A) used in the present invention is a crosslinking component of the present composition, has two groups represented by the following general formula (1) in one molecule, and has a main chain Organopolysiloxanes consisting essentially of repeating diorganosiloxane units.
- R 1 independently of one another is a monovalent hydrocarbon group having 1 to 20 carbon atoms, preferably 1 to 10 carbon atoms, more preferably 1 to 10, excluding aliphatic unsaturated groups.
- 8 represents a monovalent hydrocarbon group
- R 2 represents an oxygen atom or an alkylene group having 1 to 20 carbon atoms, preferably 1 to 10, more preferably 1 to 5 and more preferably 1 to 5,
- R 3 represents an acryloyloxyalkyl group A methacryloyloxyalkyl group, an acryloyloxyalkyloxy group, or a methacryloyloxyalkyloxy group
- p represents a number satisfying 0 ⁇ p ⁇ 10
- a represents a number satisfying 1 ⁇ a ⁇ 3.
- the monovalent hydrocarbon group having 1 to 20 carbon atoms of R 1 may be linear, branched or cyclic, and specific examples thereof include methyl, ethyl, n-propyl, isopropyl, Alkyl groups such as n-butyl, isobutyl, tert-butyl, n-hexyl, cyclohexyl, n-octyl, 2-ethylhexyl and n-decyl; vinyl, allyl (2-propenyl), 1-propenyl, isopropenyl and butenyl And alkenyl groups such as groups; aryl groups such as phenyl, tolyl, xylyl and naphthyl groups; and aralkyl groups such as benzyl, phenylethyl and phenylpropyl groups.
- part or all of hydrogen atoms bonded to carbon atoms of these monovalent hydrocarbon groups may be substituted with other substituents, and specific examples thereof include chloromethyl, bromoethyl, trifluoropropyl, Examples thereof include halogen-substituted hydrocarbon groups such as cyanoethyl group and cyano-substituted hydrocarbon groups.
- R 1 an alkyl group having 1 to 5 carbon atoms and a phenyl group are preferable, and a methyl group, an ethyl group and a phenyl group are more preferable.
- alkylene group having 1 to 20 carbon atoms of R 2 may be linear, branched or cyclic, and specific examples thereof include methylene, ethylene, propylene, trimethylene, tetramethylene, tetramethylene, isobutylene, pentamethylene and hexa Methylene, heptamethylene, octamethylene, nonamethylene, decylene groups and the like can be mentioned.
- R 2 an oxygen atom, methylene, ethylene or trimethylene group is preferable, and an oxygen atom or an ethylene group is more preferable.
- the carbon number of the alkyl (alkylene) group in the acryloyloxyalkyl group, methacryloyloxyalkyl group, acryloyloxyalkyloxy group, or methacryloyloxyalkyloxy group of R 3 is not particularly limited, but is preferably 1 to 10 is preferable, and 1 to 5 is more preferable.
- Specific examples of these alkyl groups include those having 1 to 10 carbon atoms among the groups exemplified for R 1 above.
- Specific examples of R 3 include, but are not limited to, those represented by the following formulae.
- p represents a number satisfying 0 ⁇ p ⁇ 10, 0 or 1 is preferable, and a represents a number satisfying 1 ⁇ a ⁇ 3, but 1 or 2 is preferable.
- the bonding position of the group represented by the above general formula (1) in the organopolysiloxane molecule of the component (A) used in the present invention is not at the end of the molecular chain, even at the molecular chain end (that is, It may be a chain side chain) or both of them, but in terms of flexibility, it is desirable that it be present only at the end.
- Examples of the organic group bonded to a silicon atom other than the group represented by the above general formula (1) in the organopolysiloxane molecule of the component (A) include, for example, the same groups as the above R 1.
- the monovalent hydrocarbon group having 1 to 12 carbon atoms, preferably 1 to 10 carbon atoms excluding unsaturated groups is preferred. Specific examples thereof include the same groups as those exemplified for R 1 above, but an alkyl group, an aryl group and a halogenated alkyl group are preferable, and a methyl group, a phenyl group and a trifluoro group are preferable from the easiness of synthesis. Propyl is more preferred.
- the molecular structure of the component (A) is basically a linear or branched chain whose main chain is composed of repeating diorganosiloxane units (including a linear chain having a branch in part of the main chain)
- linear diorganopolysiloxanes in which both molecular chain terminals are blocked with a group represented by the above general formula (1) are preferred.
- the component (A) may be a single polymer having these molecular structures, a copolymer consisting of these molecular structures, or a mixture of two or more of these polymers.
- the viscosity of the organopolysiloxane of component (A) at 25 ° C. is preferably 10 to 100,000 mPa ⁇ s, and more preferably 10 to 50,000 mPa, in consideration of further improving the workability of the composition and the mechanical properties of the cured product. S is more preferable.
- This viscosity range usually corresponds to about 10 to 2,000, preferably about 50 to 1,100 in number average degree of polymerization in the case of linear organopolysiloxane.
- the viscosity can be measured by a rotational viscometer (for example, BL type, BH type, BS type, cone plate type, rheometer, etc.) (the same applies hereinafter).
- the degree of polymerization (or molecular weight) can be determined, for example, as a polystyrene-equivalent number average degree of polymerization (or number average molecular weight) in gel permeation chromatography (GPC) analysis using toluene or the like as a developing solvent (following , As well).
- GPC gel permeation chromatography
- organopolysiloxane of the component (A) include those shown by the following (2) to (4), but are not limited thereto.
- R 1 , R 5 and b are as defined above, and n is a number based on the viscosity of the organopolysiloxane described above, preferably 1 to 800, more preferably 50 to 600). More preferable)
- organopolysiloxanes can be produced by known methods.
- the polysiloxane represented by the above-mentioned formula (2) is obtained by reacting 2-hydroxyethyl acrylate with a hydrosilylation reaction product of dimethyldimethylsiloxy-terminated dimethylvinylsiloxy group copolymer and chlorodimethylsilane. You can get it.
- the organopolysiloxane represented by the above formula (3) is a copolymer of dimethylvinylsiloxy group-terminated dimethylsiloxane / diphenylsiloxane and 3- (1,1,3,3-tetramethyldisiloxanyl) propyl methacrylate.
- the organopolysiloxane represented by the above formula (4) is obtained by reacting 2-hydroxyethyl acrylate with a hydrosilylation reaction product of dimethylvinylsiloxy group-terminated dimethylsiloxane / diphenylsiloxane copolymer and dichloromethylsilane. be able to.
- the monofunctional (meth) acrylate compound (B) not having a siloxane structure include isoamyl acrylate, lauryl acrylate, stearyl acrylate, ethoxy-diethylene glycol acrylate, Methoxy-triethylene glycol acrylate, 2-ethylhexyl-diglycol acrylate, phenoxyethyl acrylate, phenoxydiethylene glycol acrylate, tetrahydrofurfuryl acrylate, isobornyl acrylate, etc. may be mentioned, and these may be used alone or in combination of two or more. You may use. Among these, isobornyl acrylate is particularly preferable.
- the addition amount of the monofunctional (meth) acrylate compound of the component (B) is in the range of 1 to 500 parts by mass with respect to 100 parts by mass of the component (A).
- the amount of component (B) added is less than 1 part by mass with respect to 100 parts by mass of component (A)
- the curability of the composition and the strength and adhesiveness of the cured product are insufficient.
- the viscosity of the whole composition can be adjusted by increasing the addition amount of the (B) component
- the addition amount exceeds 500 parts by mass with respect to 100 parts by mass of the (A) component the hardness of the cured product Is higher than necessary, and the desired tackiness can not be obtained.
- the addition amount of the component (B) is preferably 10 to 200 parts by mass with respect to 100 parts by mass of the component (A).
- Organopolysiloxane resin (C) is a component that imparts tackiness to a cured product, and (a) R 4 3 SiO 1/2 units (wherein R 4 has 1 to 10 carbon atoms) Organopolysiloxane comprising a monovalent hydrocarbon group) and (b) SiO 4/2 units, and the molar ratio of (a) units to (b) units is in the range of 0.6 to 1.2: 1 It is a resin.
- the monovalent hydrocarbon group having 1 to 10 carbon atoms for R 4 include those having 1 to 10 carbon atoms among the groups exemplified for R 1 above, among which methyl, ethyl, n Alkyl groups having 2 to 6 carbon atoms such as -propyl and n-butyl; aryl groups having 6 to 10 carbons such as phenyl and tolyl; and aralkyl groups having 7 to 10 carbons such as benzyl; vinyl Preferred are alkenyl groups having 2 to 6 carbon atoms, such as groups, allyl groups and butenyl groups.
- part or all of the hydrogen atoms bonded to carbon atoms in the monovalent hydrocarbon group of R 4 may be substituted by the above-mentioned other substituents.
- the addition amount of the organopolysiloxane resin of the component (C) is in the range of 1 to 5,000 parts by mass with respect to 100 parts by mass of the component (A), preferably 10 to 1,000 parts by mass, 500 parts by mass is more preferable.
- the component (D) is a component that mainly imparts thixotropy to the composition, and examples thereof include fumed silica (dry silica) and precipitated silica (wet silica). Silica is preferred. Moreover, the hardness of hardened
- the specific surface area is less than 50 m 2 / g, the thixotropy of the composition may be insufficient, and if it exceeds 400 m 2 / g, the viscosity of the composition may be excessively high, resulting in poor workability. There is a case.
- the specific surface area is a value measured by the BET method.
- the finely powdered silica of component (D) may be used alone or in combination of two or more.
- these fine powder silicas may be used as they are, those treated with a surface hydrophobizing agent may be used.
- the surface treatment agent may be added at the time of kneading of the fine powder silica to simultaneously perform the kneading and the surface treatment.
- These surface treatment agents include alkyl alkoxysilanes, alkyl chlorosilanes, alkyl silazanes, silane coupling agents, etc. These may be used alone or in combination of two or more simultaneously or at different times. .
- the addition amount of the component (D) is in the range of 1 to 100 parts by mass with respect to 100 parts by mass of the component (A), preferably 5 to 80 parts by mass, and 10 to 50 parts Part is more preferred.
- the addition amount of the component (D) is less than 1 part by mass, sufficient thixotropy is not expressed, and the shape retention is inferior.
- the addition amount exceeds 100 parts by mass the viscosity of the composition becomes too high, and the workability is remarkably deteriorated.
- (E) Photopolymerization Initiator As specific examples of the photopolymerization initiator usable in the present invention, 2,2-diethoxyacetophenone, 2,2-dimethoxy-1,2-diphenylethane-1-one (manufactured by BASF) Irgacure 651), 1-hydroxy-cyclohexyl-phenyl-ketone (Irgacure 184 from BASF), 2-hydroxy-2-methyl-1-phenyl-propan-1-one (Irgacure 1173 from BASF), 2-hydroxy-1-hydroxy-1-phenyl-propan-1-one ⁇ 4- [4- (2-Hydroxy-2-methyl-propionyl) -benzyl] -phenyl ⁇ -2-methyl-propan-1-one (Irgacure 127 from BASF), phenylglyoxylic acid methyl ester (from BASF) Irgacure MBF), 2-Methyl-1- [4- (methyl) E) Phen
- the addition amount of the photopolymerization initiator is in the range of 0.01 to 20 parts by mass with respect to 100 parts by mass of (A). When the amount is less than 0.01 parts by mass, the curability is insufficient, and when it is added in an amount exceeding 20 parts by mass, the deep part curability is deteriorated.
- composition of the present invention a coloring material (pigment or dye), a silane coupling agent, an adhesion aiding agent, a polymerization inhibitor, an antioxidant, a light resistance stabilizer, to the extent that the effects of the present invention are not impaired.
- Additives such as certain UV absorbers and light stabilizers can be blended.
- the composition of the present invention can be used as appropriate mixed with other resin compositions.
- the ultraviolet-curable silicone pressure-sensitive adhesive composition of the present invention can be obtained by mixing and stirring the above-mentioned components (A) to (E) and, if necessary, other components in an arbitrary order.
- the apparatus used for operation of stirring etc. is not specifically limited, A grinder, 3 rolls, a ball mill, a planetary mixer etc. can be used. Moreover, you may combine these apparatuses suitably.
- the viscosity of the ultraviolet-curable silicone pressure-sensitive adhesive composition of the present invention is 10 to 5,000 Pa at a rotation speed of 10 rpm measured at 23 ° C. using a rotational viscometer from the viewpoint of shape retention during application and workability.
- the range of s is preferable, 50 to 3,000 Pa ⁇ s is more preferable, and 100 to 1,500 Pa ⁇ s is still more preferable. If the pressure is less than 10 Pa ⁇ s, the composition may flow easily, and if it exceeds 5,000 Pa ⁇ s, the workability may be significantly deteriorated.
- the tacky UV curable silicone composition of the present invention cures rapidly upon irradiation with UV light.
- a light source of the ultraviolet light to be irradiated for example, a UV LED lamp, a high pressure mercury lamp, an ultra high pressure mercury lamp, a metal halide lamp, a carbon arc lamp, a xenon lamp and the like can be mentioned.
- the irradiation amount (integrated light amount) of the ultraviolet light is, for example, preferably 1 to 10,000 mJ / cm 2 , more preferably 10 to 10 with respect to a sheet obtained by forming the composition of the present invention to a thickness of about 2.0 mm. It is 6,000 mJ / cm 2 .
- the ultraviolet light when ultraviolet light with an illuminance of 100 mW / cm 2 is used, the ultraviolet light may be irradiated for about 0.01 to 100 seconds.
- the adhesive force of the cured product obtained by the ultraviolet irradiation is not particularly limited, but preferably 0.01 to 100 MPa in consideration of the balance between the releasability of the transfer material and the retentivity. More preferred is .02 to 50 MPa.
- the ultraviolet curable silicone adhesive composition of this invention can be utilized as adhesive articles
- a plastic film, glass, metal, etc. can be used without particular limitation.
- a plastic film polyethylene film, polypropylene film, polyester film, polyimide film, polyvinyl chloride film, polyvinylidene chloride film, polyvinyl alcohol film, polycarbonate film, polystyrene film, ethylene-vinyl acetate copolymer film, ethylene-vinyl alcohol Copolymer films, triacetyl cellulose films and the like can be mentioned.
- the thickness and type of glass is not particularly limited, and may be chemically strengthened.
- the coating method is, for example, a known spin coater, comma coater, lip coater, roll coater, die coater, knife coater, blade coater, rod coater, kiss coater, gravure coater, screen coating, dip coating, cast coating, etc. It can select suitably from the coating methods of, and can use.
- the UV-curable silicone pressure-sensitive adhesive composition of the present invention is solventless, and potting using a mold is also possible as a method for producing a cured product. Air bubbles may be entrained when poured into molds in potting, but can be degassed by reduced pressure.
- a mold for example, a resist mold in which desired unevenness is provided by a photoresist on a silicon wafer can be used.
- a release agent treatment As the releasing agent, fluorine-based or silicone-based ones can be used.
- the UV-curable silicone pressure-sensitive adhesive composition of the present invention is usually used as it is, but in the range where the properties of the present invention are not impaired when it is necessary to improve handling properties, coating properties on a substrate, etc. It is also acceptable to use it after diluting it with an organic solvent.
- the cured product of the ultraviolet-curable silicone pressure-sensitive adhesive composition of the present invention is used as a micropattern transfer stamp 100, 101 for transferring minute elements, parts and the like. Can.
- the microstructure for example, various electronic devices such as an LED element, a driver IC, a resistor, a coil, a capacitor, and a light receiving element can be used.
- the microstructure is not limited to an electric circuit element. It may be a structure of a size and weight which can be transferred by the micropattern transfer stamp.
- the micropattern transfer stamp according to the present invention can improve the productivity particularly in the transfer process of microelements and parts on the micrometer scale.
- the microstructure transfer stamp 100 is configured to have a cured product layer 300 of the ultraviolet curable silicone pressure sensitive adhesive composition of the present invention on a substrate 200.
- the size of the cured product layer 300 may be a size that fits into the substrate 200, and may be the same size.
- the method of producing the cured product 300 on the substrate 200 for example, a method of directly applying and curing an uncured UV curable silicone adhesive composition onto the substrate 200, and the substrate 200 Any of the methods of laminating a sheet-shaped cured product of the ultraviolet-curable silicone pressure-sensitive adhesive composition onto the surface may be used.
- the silicone pressure-sensitive adhesive composition is applied onto the substrate 200 and then cured by ultraviolet radiation to thereby achieve a micropattern transfer stamp You can get 100.
- a coating method for example, known methods such as spin coater, comma coater, lip coater, roll coater, die coater, knife coater, blade coater, rod coater, kiss coater, gravure coater, screen coating, dip coating, cast coating, etc. It can select suitably from the coating methods of, and can use.
- curing is performed by ultraviolet irradiation while performing press molding, compression molding, etc., to obtain a microstructure transfer stamp 100 with high flatness. it can.
- the material is molded into a sheet, and then bonded to the substrate 200 to obtain a micropattern transfer stamp 100.
- molding an ultraviolet curable silicone adhesive composition to a sheet form it can select suitably from molding methods, such as roll molding, press molding, transfer molding, compression molding, etc., for example, and it can use.
- the sheet-like cured product is preferably molded in such a manner as to be sandwiched by a plastic film in order to prevent adhesion of dust and the like and oxygen inhibition during curing.
- cured material is larger than desired, it is also possible to cut to a desired magnitude
- plasma treatment, excimer treatment, chemical treatment or the like may be performed on either or both of these bonding surfaces.
- an adhesive, an adhesive or the like may be used.
- the pressure-sensitive adhesive and the adhesive those of silicone type, acrylic type, epoxy type and the like can be used.
- a bonding method, roll bonding, a vacuum press, etc. can be used.
- the thickness of the cured silicone pressure-sensitive adhesive layer 300 in the microstructure transfer stamp 100 is preferably 1 ⁇ m to 1 cm, and more preferably 10 ⁇ m to 5 mm, from the viewpoint of moldability and flatness.
- the micropattern transfer stamp 101 is configured to have a cured product layer 310 of the ultraviolet curable silicone pressure sensitive adhesive composition of the present invention on a substrate 201.
- the substrate 201 the same one as the substrate 200 can be used.
- the silicone adhesive cured product layer 310 has a protrusion structure 311 on the surface.
- a base layer 312 may be provided below the protrusion structure 311.
- the method for producing the cured product layer 310 on the base material 201 For example, a method for molding the cured product layer 310 directly on the base material 201 by molding or the like, and the projection structure 311 on the base material 201. The method of bonding together the sheet-like hardened
- the silicone pressure-sensitive adhesive composition of the present invention is filled between the substrate 201 and the mold 401; After curing by ultraviolet irradiation, the mold 401 is removed to obtain a micropattern transfer stamp 101.
- the mold 401 for example, a resist type in which desired unevenness is provided by a photoresist on a silicon wafer or a quartz substrate, or a resin type in which unevenness is provided by pattern exposure to an ultraviolet curable resin can be used.
- a resin type various plastic films can be used as a substrate.
- Examples of the method for filling the silicone pressure-sensitive adhesive composition between the substrate 201 and the mold 401 include a method in which the silicone pressure-sensitive adhesive composition is applied to one or both of the substrate 201 and the mold 401 and then bonded.
- the above-mentioned methods can be used as the coating method and the bonding method.
- micro bubbles may remain in the mold 401 at the time of application, but this can be solved by vacuum bonding or degassing by reduced pressure.
- the microstructure transfer stamp 101 can be obtained by curing the composition by ultraviolet irradiation while performing press molding, compression molding, roll press molding, and the like.
- the silicone pressure-sensitive adhesive composition is molded into a sheet-like cured product having the protrusion structure 311 and then attached to the substrate 201. Then, the micropattern transfer stamp 101 can be obtained.
- a method of forming the UV curable silicone pressure sensitive adhesive composition into a sheet-like cured product having the projection structure 311 roll molding, press molding, transfer molding, compression molding, etc. using a mold having the same unevenness as the mold 401 It can be selected appropriately from the molding methods.
- the sheet-like cured product is preferably sandwiched and molded in a plastic film or the like to prevent adhesion of dust or the like and oxygen inhibition during curing.
- cured material is larger than desired, it is also possible to cut to a desired magnitude
- these bonded surfaces may be subjected to plasma treatment, excimer treatment, chemical treatment or the like.
- the various pressure-sensitive adhesives and adhesives described above may be used. As a bonding method, roll bonding, a vacuum press, etc. can be used.
- the size and arrangement of the protrusion structures 311 can be designed according to the size and desired arrangement of the microstructures to be transferred.
- the upper surface of the projection structure 311 is flat, and the shape of the surface is not limited, and may be circular, oval, square or the like. In the case of a square or the like, there is no problem even if the edge is rounded.
- the width of the top surface of the projection structure 311 is preferably 0.1 ⁇ m to 1 cm, and more preferably 1 ⁇ m to 1 mm.
- the height of the projection structure 311 is preferably 0.1 ⁇ m to 1 cm, and more preferably 1 ⁇ m to 1 mm.
- the pitch distance between the projection structures 311 adjacent to each other across a space is preferably 0.1 ⁇ m to 10 cm, and more preferably 1 ⁇ m to 1 mm.
- the thickness of the base layer 312 is preferably 0.1 ⁇ m to 1 cm, and more preferably 1 ⁇ m to 5 mm.
- the microstructure transfer stamp as described above can be attached to a device and used as a microstructure transfer device. Although there is no restriction
- the microstructure transfer device can achieve transfer of the microstructure by picking up a microstructure such as an element or the like by the tackiness of the microstructure transfer stamp, moving it to a desired position, and releasing it. It is.
- Examples 1 to 3 The components (A) to (E) were mixed according to the composition shown in Table 1, and toluene was distilled off at 100 ° C. under reduced pressure to prepare each silicone composition shown in Table 1.
- the viscosities of the compositions in Table 1 are values at a rotational speed of 10 rpm measured at 23 ° C. using a rotational viscometer, and the thixo ratio is a viscosity A at a rotational speed of 2 rpm and a viscosity B at a rotational speed of 10 rpm at 23 ° C. It calculated from ratio A / B with.
- the prepared silicone composition was irradiated with an ultraviolet light having a wavelength of 365 nm at room temperature (25 ° C.) under a nitrogen atmosphere using an eye UV electronic controller (model UBX0601-01) manufactured by I GRAPH Co., Ltd. It was irradiated with ultraviolet light to be 000 mJ / cm 2 and cured.
- the hardness of the cured product was measured according to Japan Rubber Association Standard Standard SRIS0101.
- the tackiness of the cured product was measured by a small-size desktop tester EZ-SX manufactured by Shimadzu Corporation. Specifically, it is a value obtained by measuring a load applied when the 1 mm square SUS probe is pressed at 1 MPa for 15 seconds at 1 MPa and then pulled at a speed of 200 mm / min.
- the ultraviolet-curable silicone pressure-sensitive adhesive compositions prepared in Examples 1 to 3 have appropriate viscosity and thixotropy, and have good shape retention. Furthermore, the hardened
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Abstract
Description
この技術は、マイクロ・トランスファー・プリンティング技術と呼ばれ、エラストマーの粘着力で微細な部品を一遍にピックアップし、より粘着力の強い所望の場所に移送させるという技術である。
しかし、加熱硬化型の無溶剤シリコーン粘着剤を用いると、加熱硬化後に室温まで冷却した時に硬化物が収縮してしまい、塗布パターンの寸法誤差が大きくなってしまうという問題がある。
しかし、材料を所望のパターンに塗布後、次工程へ移動する際や時間の経過とともに材料が流動してしまい、硬化後に目的の形状を有する粘着性物品が得られないという課題があった。また、シリコーン素材自体が有する粘着力を利用するものであるため粘着力が不十分であり、適用可能な素子や部品が限られるという問題があった。
そのため、紫外線照射により室温にて短時間で硬化可能であることに加え、優れた形状保持性と粘着力を有する紫外線硬化型粘着シリコーン材料が望まれている。
1. (A)下記一般式(1)
で示される基を1分子中に2個有するオルガノポリシロキサン:100質量部、
(B)シロキサン構造を含まない単官能(メタ)アクリレート化合物:1~500質量部、
(C)(a)R4 3SiO1/2単位(式中、R4は、炭素原子数1~10の一価炭化水素基を表す。)と(b)SiO4/2単位からなり、(a)単位と(b)単位とのモル比が0.6~1.2:1の範囲にあるオルガノポリシロキサンレジン:1~5,000質量部、
(D)微粉末シリカ:1~100質量部、および
(E)光重合開始剤:0.01~20質量部
を含有してなることを特徴とする紫外線硬化型シリコーン粘着剤組成物、
2. 23℃において、回転数2rpmの粘度Aと回転数10rpmの粘度Bとの比(チクソ比)がA/B=1.1~10である1の紫外線硬化型シリコーン粘着剤組成物、
3. 前記回転数10rpmの粘度Bが、10~5,000Pa・sの範囲である1または2の紫外線硬化型シリコーン粘着剤組成物、
4. 1~3のいずれかの紫外線硬化型シリコーン粘着剤組成物の硬化物、
5. 4の硬化物からなる粘着剤、
6. 4の硬化物からなる粘着シート、
7. 4の硬化物からなる微小構造体転写用スタンプ、
8. 少なくとも1つの突起構造を有する7の微小構造体転写用スタンプ、
9. 7または8の微小構造体転写用スタンプを備えた微小構造体転写装置
を提供する。
本発明に係る紫外線硬化型シリコーン粘着剤組成物は、(A)下記一般式(1)で示される基を1分子中に2個有するオルガノポリシロキサン:100質量部、
(B)シロキサン構造を含まない単官能(メタ)アクリレート化合物:1~500質量部、
(C)(a)R4 3SiO1/2単位(式中、R4は、炭素原子数1~10の非置換もしくは置換の一価炭化水素基を表す。)と(b)SiO4/2単位からなり、(a)単位と(b)単位とのモル比が0.6~1.2:1の範囲にあるオルガノポリシロキサンレジン:1~5,000質量部、
(D)微粉末シリカ:1~100質量部、および
(E)光重合開始剤:0.01~20質量部
を含有してなることを特徴とする。
本発明に使用される(A)成分は、本組成物の架橋成分であり、下記一般式(1)で示される基を1分子中に2個有し、主鎖が実質的にジオルガノシロキサン単位の繰返しからなるオルガノポリシロキサンである。
また、これら一価炭化水素基の炭素原子に結合した水素原子の一部または全部は、その他の置換基で置換されていてもよく、その具体例としては、クロロメチル、ブロモエチル、トリフルオロプロピル、シアノエチル基等のハロゲン置換炭化水素基や、シアノ置換炭化水素基などが挙げられる。
これらの中でも、R1としては、炭素原子数1~5のアルキル基、フェニル基が好ましく、メチル基、エチル基、フェニル基がより好ましい。
これらの中でも、R2としては、酸素原子、メチレン、エチレン、トリメチレン基が好ましく、酸素原子またはエチレン基がより好ましい。
R3の具体例としては、下記式で示されるものが挙げられるが、これらに限定されるものではない。
これらの具体例としては、上記R1で例示した基と同様のものが挙げられるが、合成の簡便さから、アルキル基、アリール基、ハロゲン化アルキル基が好ましく、メチル基、フェニル基、トリフロロプロピル基がより好ましい。
(A)成分は、これらの分子構造を有する単一の重合体、これらの分子構造からなる共重合体、またはこれらの重合体の2種以上の混合物であってもよい。
本発明において、重合度(または分子量)は、例えば、トルエン等を展開溶媒として、ゲルパーミエーションクロマトグラフィ(GPC)分析におけるポリスチレン換算の数平均重合度(または数平均分子量)として求めることができる(以下、同様)。
上記式(3)で表されるオルガノポリシロキサンは、両末端ジメチルビニルシロキシ基封鎖ジメチルシロキサン・ジフェニルシロキサン共重合体と3-(1,1,3,3- テトラメチルジシロキサニル)プロピルメタクリラート(CAS No.96474-12-3)とのヒドロシリル化反応物として得られる。
上記式(4)で表されるオルガノポリシロキサンは、両末端ジメチルビニルシロキシ基封鎖ジメチルシロキサン・ジフェニルシロキサン共重合体とジクロロメチルシランとのヒドロシリル化反応物に2-ヒドロキシエチルアクリレートを反応させて得ることができる。
シロキサン構造を含まない単官能(メタ)アクリレート化合物(B)の具体例としては、イソアミルアクリレート、ラウリルアクリレート、ステアリルアクリレート、エトキシ-ジエチレングリコールアクリレート、メトキシ-トリエチレングリコールアクリレート、2-エチルヘキシル-ジグリコールアクリレート、フェノキシエチルアクリレート、フェノキシジエチレングリコールアクリレート、テトラヒドロフルフリルアクリレート、イソボルニルアクリレート等が挙げられ、これらは単独で用いても2種以上混合して用いてもよい。
これらの中でも、特にイソボルニルアクリレートが好ましい。
特に、(B)成分の添加量は、(A)成分100質量部に対し、10~200質量部が好ましい。
(C)成分は、硬化物に粘着性を付与する成分であり、(a)R4 3SiO1/2単位(式中、R4は、炭素原子数1~10の一価炭化水素基である)と(b)SiO4/2単位からなり、(a)単位と(b)単位のモル比が0.6~1.2:1の範囲にあるオルガノポリシロキサンレジンである。
R4における炭素原子数1~10の一価炭化水素基の具体例としては、上記R1で例示した基のうち、炭素原子数1~10のものが挙げられるが、中でもメチル、エチル、n-プロピル、n-ブチル基等の炭素原子数2~6のアルキル基;フェニル、トリル基等の炭素原子数6~10のアリール基、ベンジル基等の炭素原子数7~10のアラルキル基;ビニル基、アリル基、ブテニル基等の炭素原子数2~6のアルケニル基などが好ましい。
なお、上記R4の一価炭化水素基も、R1と同様に、炭素原子に結合した水素原子の一部または全部が、上述したその他の置換基で置換されていてもよい。
硬化物の粘着力、保持力およびタック性をより適切な範囲とすることを考慮すると、M単位とQ単位のモル比は、M単位:Q単位=0.7~1.2:1が好ましい。
(D)成分は、主に組成物にチクソ性を付与する成分であり、ヒュームドシリカ(乾式シリカ)や沈殿シリカ(湿式シリカ)が挙げられるが、ヒュームドシリカ(乾式シリカ)が好ましい。また、(D)成分を配合することで硬化物の硬度を高め、部品等を移送する際の位置ずれを抑制する効果もある。
(D)成分の比表面積は、特に限定されるものではないが、50~400m2/gが好ましく、100~350m2/gがより好ましい。比表面積が50m2/g未満であると、組成物のチクソ性が不十分となる場合があり、また400m2/gを超えると、組成物の粘度が過剰に高くなり、作業性が悪くなる場合がある。なお、比表面積は、BET法による測定値である。
この(D)成分の微粉末シリカは、1種単独で用いても、2種以上を組み合わせて用いてもよい。
この場合、予め表面処理剤で処理した微粉末シリカを用いても、微粉末シリカの混練時に表面処理剤を添加し、混練と表面処理を同時に行ってもよい。
これら表面処理剤は、アルキルアルコキシシラン、アルキルクロロシラン、アルキルシラザン、シランカップリング剤等が挙げられ、これらは、1種単独で用いても、2種以上を同時に、または異なるタイミングで用いてもよい。
(D)成分の添加量が1質量部未満では十分なチクソ性が発現せず、形状保持性に劣る。添加量が100質量部を超えると、組成物の粘度が高くなり過ぎ、著しく作業性が悪くなる。
本発明で使用可能な光重合開始剤の具体例としては、2,2-ジエトキシアセトフェノン、2,2-ジメトキシ-1,2-ジフェニルエタン-1-オン(BASF製Irgacure 651)、1-ヒドロキシ-シクロヘキシル-フェニル-ケトン(BASF製Irgacure 184)、2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン(BASF製Irgacure 1173)、2-ヒドロキシ-1-{4-[4-(2-ヒドロキシ-2-メチループロピオニル)-ベンジル]-フェニル}-2-メチループロパン-1-オン(BASF製Irgacure 127)、フェニルグリオキシリックアシッドメチルエステル(BASF製Irgacure MBF)、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノプロパン-1-オン(BASF製Irgacure 907)、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)-1-ブタノン(BASF製Irgacure 369)、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイド(BASF製Irgacure 819)、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(BASF製Irgacure TPO)等が挙げられ、これらは単独で用いても、2種以上組み合わせて用いてもよい。
これらの中でも、(A)成分との相溶性の観点から、2,2-ジエトキシアセトフェノン、2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン(BASF製Irgacure 1173)、ビス(2,4,6-トリメチルベンゾイル)-フェニルフォスフィンオキサイド(BASF製Irgacure 819)、2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(BASF製Irgacure TPO)が好ましい。
また、本発明の組成物はその他の樹脂組成物と適宜混合して使用することもできる。
この場合、照射する紫外線の光源としては、例えば、UVLEDランプ、高圧水銀灯、超高圧水銀灯、メタルハライドランプ、カーボンアークランプ、キセノンランプ等が挙げられる。
紫外線の照射量(積算光量)は、例えば、本発明の組成物を2.0mm程度の厚みに成形したシートに対して、好ましくは1~10,000mJ/cm2であり、より好ましくは10~6,000mJ/cm2である。すなわち、照度100mW/cm2の紫外線を用いた場合、0.01~100秒程度紫外線を照射すればよい。
本発明において、紫外線照射によって得られた硬化物の粘着力は、特に限定されるものではないが、移送物の剥離性と保持性とのバランスを考慮すると、0.01~100MPaが好ましく、0.02~50MPaがより好ましい。
基材としては、プラスチックフィルム、ガラス、金属等、特に制限なく使用できる。
プラスチックフィルムとしては、ポリエチレンフィルム、ポリプロピレンフィルム、ポリエステルフィルム、ポリイミドフィルム、ポリ塩化ビニルフィルム、ポリ塩化ビニリデンフィルム、ポリビニルアルコールフィルム、ポリカーボネートフィルム、ポリスチレンフィルム、エチレン-酢酸ビニル共重合体フィルム、エチレン-ビニルアルコール共重合体フィルム、トリアセチルセルロースフィルム等が挙げられる。
ガラスについても、厚みや種類などについて特に制限はなく、化学強化処理などをしたものでもよい。
なお、基材と粘着剤層の密着性を向上させるために、基材に予めプライマー処理、プラズマ処理等を施したものを用いてもよい。
ポッティングにおける型へ流し込む際に気泡を巻き込むことがあるが、減圧により脱泡することができる。型としては、例えば、シリコンウエハー上にフォトレジストにより所望の凹凸をつけたレジスト型を用いることができる。
硬化後、型から硬化物を取り出したい場合には、組成物を流し込む前に容器に離型剤処理を施す方が好ましい。離型剤としてはフッ素系、シリコーン系等のものが使用可能である。
基材200の材質には特に制限はなく、その具体例としては、プラスチックフィルム、ガラス、合成石英、金属等が挙げられる。厚みや種類などについても特に制限はなく、化学強化処理などをしたものでもよい。なお、基材と粘着剤層の密着性を向上させるために、基材に予めプライマー処理、プラズマ処理等を施したものを用いてもよい。微小構造体移送時の位置ずれを抑制し、移送精度を高めるためには、平坦度の高い合成石英を使用することが好ましい。
基材200上に紫外線硬化型シリコーン粘着剤組成物を直接塗布して硬化させる方法では、基材200上へシリコーン粘着剤組成物を塗布後、紫外線照射により硬化することで微小構造体転写用スタンプ100を得ることができる。
塗布方法としては、例えば、スピンコーター、コンマコーター、リップコーター、ロールコーター、ダイコーター、ナイフコーター、ブレードコーター、ロッドコーター、キスコーター、グラビアコーター、スクリーン塗工、浸漬塗工、キャスト塗工等の公知の塗工方法から適宜選択して用いることができる。
また、これらの方法でシリコーン粘着剤組成物を基材に塗布後、プレス成型やコンプレッション成型等を行いながら紫外線照射により硬化させることで、平坦性の高い微小構造体転写用スタンプ100を得ることもできる。
紫外線硬化型シリコーン粘着剤組成物をシート状に成型する方法としては、例えば、ロール成形、プレス成型、トランスファー成型、コンプレッション成型等の成型方法から適宜選択して用いることができる。シート状硬化物は、ホコリ等の付着防止や硬化時の酸素阻害抑制のために、プラスチックフィルムに挟み込む形で成型することが好ましい。また、得られたシート状硬化物が所望よりも大きい場合、所望の大きさにカットすることも可能である。
また、シート状硬化物と基材200との密着性を上げるため、これらのいずれか、または両方の貼り合せ面にプラズマ処理、エキシマ処理、化学処理等を施してもよい。さらに、貼り合せ強度を向上させるために、粘着剤・接着剤等を使用してもよい。粘着剤・接着剤の具体例としては、シリコーン系、アクリル系、エポキシ系等のものが使用可能である。
貼り合せ方法としては、ロール貼り合せや真空プレス等を用いることができる。
基材201上に硬化物層310を作製する方法に特に制限はなく、例えば、基材201上にモールド成型等により直接硬化物層310を成型する方法と、基材201上に突起構造311を有するシート状硬化物を貼り合せる方法が挙げられる。
型401としては、例えば、シリコンウエハーや石英基板上にフォトレジストにより所望の凹凸をつけたレジスト型、紫外線硬化型樹脂にパターン露光して凹凸をつけた樹脂型等を用いることができる。樹脂型の場合、基材として各種プラスチックフィルムを用いることができる。
基材201と型401の間にシリコーン粘着剤組成物を満たす方法としては、基材201と型401のいずれか、もしくは両方にシリコーン粘着剤組成物を塗布してから貼り合せる方法が挙げられる。塗布方法や貼り合せ方法は上述の方法を用いることができる。塗布時に型401に微小な気泡が残る可能性があるが、真空貼り合せや減圧による脱泡により解決できる。
これらの方法でシリコーン粘着剤組成物を基材に塗布後、プレス成型、コンプレッション成型、ロールプレス成型等を行いながら紫外線照射により硬化させることで、微小構造体転写用スタンプ101を得ることができる。
紫外線硬化型シリコーン粘着剤組成物を突起構造311を有するシート状硬化物に成型する方法としては、型401と同様な凹凸を有する型を用いたロール成形、プレス成型、トランスファー成型、コンプレッション成型等の成型方法から適宜選択して用いることができる。
シート状硬化物は、ホコリ等の付着防止や硬化時の酸素阻害抑制のために、プラスチックフィルム等に挟み込んで成型することが好ましい。また、得られたシート状硬化物が所望よりも大きい場合、所望の大きさにカットすることも可能である。
さらに、シート状硬化物と基材201との密着性を上げるため、これらの貼り合せ面にプラズマ処理、エキシマ処理、化学処理等を施してもよい。また、貼り合せ強度を向上させるために、上述した各種粘着剤・接着剤等を使用してもよい。
貼り合せ方法としては、ロール貼り合せや真空プレス等を用いることができる。
突起構造311の上面は平坦であり、また、その面形状に制限はなく、円形、楕円形、四角形等が挙げられる。四角形等の場合、エッジに丸みをつけても問題ない。突起構造311の上面の幅は、0.1μm~1cmが好ましく、1μm~1mmがより好ましい。
また、突起構造311の側面の形態にも制限はなく、垂直面、斜面等を問わない。
突起構造311の高さは、0.1μm~1cmが好ましく、1μm~1mmがより好ましい。
空間を隔てて隣り合う突起構造311同士のピッチ距離は、0.1μm~10cmが好ましく、1μm~1mmがより好ましい。
また、ベース層312の厚さは、0.1μm~1cmが好ましく、1μm~5mmがより好ましい。
なお、実施例で使用した各成分の化合物は以下のとおりである。
(A)成分
(B-1)
イソボルニルアクリレート(共栄社化学(株)製ライトアクリレートIB-XA)
(C-1)Me3SiO1/2単位およびSiO2単位を含有し、(Me3SiO1/2単位)/(SiO2単位)のモル比が0.85であるオルガノポリシロキサンレジン(数平均分子量3,500)の60質量%トルエン溶液
(D)成分
(D-1)乾式シリカ((株)トクヤマ製レオロシールDM-30S、比表面積230m2/g)
(E)成分
(E-1)2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン(BASFジャパン(株)製Irgacure 1173)
上記(A)~(E)成分を表1の組成で混合し、減圧下にて100℃でトルエンを留去し、表1記載の各シリコーン組成物を調製した。なお、表1における組成物の粘度は回転粘度計を用いて23℃で測定した回転数10rpmでの値であり、チクソ比は23℃での回転数2rpmの粘度Aと回転数10rpmの粘度Bとの比A/Bより算出した。
調製したシリコーン組成物を、アイグラフィック(株)製アイUV電子制御装置(型式UBX0601-01)を用い、窒素雰囲気下、室温(25℃)で、波長365nmの紫外光での照射量が4,000mJ/cm2となるように紫外線を照射し、硬化させた。硬化物の硬度は日本ゴム協会標準規格SRIS0101に準じて測定した。
硬化物の粘着性は、(株)島津製作所製小型卓上試験機EZ-SXにより測定した。具体的には、1mm厚の硬化物に1mm角SUS製プローブを1MPaで15秒間押し付けた後、200mm/minの速度で引っ張った際にかかる負荷を測定した値である。
200,201 基材
300,310 硬化物層
311 突起構造
312 ベース層
401 型
Claims (9)
- (A)下記一般式(1)
で示される基を1分子中に2個有するオルガノポリシロキサン:100質量部、
(B)シロキサン構造を含まない単官能(メタ)アクリレート化合物:1~500質量部、
(C)(a)R4 3SiO1/2単位(式中、R4は、炭素原子数1~10の一価炭化水素基を表す。)と(b)SiO4/2単位からなり、(a)単位と(b)単位とのモル比が0.6~1.2:1の範囲にあるオルガノポリシロキサンレジン:1~5,000質量部、
(D)微粉末シリカ:1~100質量部、および
(E)光重合開始剤:0.01~20質量部
を含有してなることを特徴とする紫外線硬化型シリコーン粘着剤組成物。 - 23℃において、回転数2rpmの粘度Aと回転数10rpmの粘度Bとの比(チクソ比)がA/B=1.1~10である請求項1記載の紫外線硬化型シリコーン粘着剤組成物。
- 前記回転数10rpmの粘度Bが、10~5,000Pa・sの範囲である請求項1または2記載の紫外線硬化型シリコーン粘着剤組成物。
- 請求項1~3のいずれか1項記載の紫外線硬化型シリコーン粘着剤組成物の硬化物。
- 請求項4記載の硬化物からなる粘着剤。
- 請求項4記載の硬化物からなる粘着シート。
- 請求項4記載の硬化物からなる微小構造体転写用スタンプ。
- 少なくとも1つの突起構造を有する請求項7記載の微小構造体転写用スタンプ。
- 請求項7または8記載の微小構造体転写用スタンプを備えた微小構造体転写装置。
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CN111164177B (zh) | 2022-05-17 |
TW201925409A (zh) | 2019-07-01 |
US20200270481A1 (en) | 2020-08-27 |
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CN111164177A (zh) | 2020-05-15 |
US11180680B2 (en) | 2021-11-23 |
EP3689995B1 (en) | 2022-03-23 |
JPWO2019065398A1 (ja) | 2020-11-05 |
KR20200061358A (ko) | 2020-06-02 |
JP6901003B2 (ja) | 2021-07-14 |
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