WO2019026484A1 - Système et procédé de transport - Google Patents

Système et procédé de transport Download PDF

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Publication number
WO2019026484A1
WO2019026484A1 PCT/JP2018/024583 JP2018024583W WO2019026484A1 WO 2019026484 A1 WO2019026484 A1 WO 2019026484A1 JP 2018024583 W JP2018024583 W JP 2018024583W WO 2019026484 A1 WO2019026484 A1 WO 2019026484A1
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WO
WIPO (PCT)
Prior art keywords
transport
container
overhead
conveyance
unloading
Prior art date
Application number
PCT/JP2018/024583
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English (en)
Japanese (ja)
Inventor
義明 藤原
光哉 徳本
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村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2019026484A1 publication Critical patent/WO2019026484A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transfer system and a transfer method.
  • a transport system In a semiconductor production factory, a transport system is used which transports an article such as a transport container (FOUP) containing a semiconductor wafer by a ceiling transport vehicle traveling along a track laid in the vicinity of a ceiling.
  • a transport container In a semiconductor manufacturing process, a plurality of processes are performed on a semiconductor wafer by a predetermined processing apparatus.
  • the transport system may comprise multiple trajectories.
  • an identification ID carrier ID
  • transport management is performed by this ID.
  • Patent Document 1 includes a plurality of tracks along which a ceiling transport vehicle travels, a transport device which transports a transport container unloaded by the ceiling transport vehicle between a plurality of tracks, and a transport container unloaded by the transport device. And a reader for reading the ID of the carrier.
  • An object of the present invention is to provide a transport system and a transport method capable of quickly reading the ID of an article without restricting the structure of the transport device.
  • the transport system includes a ceiling transport which transports an article, a transport apparatus which transports an article unloaded by the ceiling transport, and IDs of articles held by the ceiling transport stopped at the unloading position. And a reading device for reading at a position before unloading by the overhead carriage is completed.
  • the reading device may be disposed at a position where the ID of the article at the position before the overhead transportation vehicle performs unloading can be read.
  • a control device may be provided that instructs the overhead conveyance vehicle to execute unloading or conveyance to another conveyance destination.
  • the reading device may be fixed and disposed at a position out of the conveyance space of the article by the overhead conveyance vehicle and a position out of the conveyance space of the article by the conveyance device.
  • a support member may be provided which extends upward from the side of the transport device and places the reading device above the transport space of the article by the transport device.
  • a plurality of reading devices may be provided corresponding to different types of IDs.
  • the transport method according to the present invention is a transport method in a transport system including a ceiling transport for transporting an article and a transport apparatus for transporting an article unloaded by the ceiling transport, wherein the transportation system is stopped at the unloading position. Reading the ID of the article held by the overhead carriage at a position before unloading by the overhead carriage is completed.
  • the transport system and the transport method of the present invention can quickly read the ID of an article without any restriction on the structure of the transport apparatus.
  • the reading device if the reading device is placed at a position where it can read the ID of the item before the overhead vehicle performs unloading, the reading device reads the ID before the overhead vehicle performs unloading. You can read the ID quickly.
  • the overhead conveyance vehicle is provided with a control device that instructs the overhead conveyance vehicle to execute unloading or conveyance to another conveyance destination according to the reading result of the reading device, the conveyance destination of the article can be confirmed from the reading result. Even if the transport destination is incorrect, it can be quickly corrected to the correct transport destination.
  • the reading device when the reading device is fixedly disposed at a position out of the conveyance space of the article by the overhead conveyance vehicle and at a position out of the conveyance space of the article by the conveyance device, the conveyance space of the article by the overhead conveyance vehicle and the conveyance device.
  • the structure of the system can be simplified because it does not interfere with the transport space of the articles by the.
  • the support member extends upward from the side of the transfer device and places the reading device above the transfer space of the article by the transfer device, it does not interfere with the transfer space of the overhead transfer vehicle and the transfer space of the transfer device.
  • the reading device can be placed near an article held by the overhead transport vehicle, and the reading of the ID can be reliably performed.
  • a plurality of reading devices are provided corresponding to different types of IDs, it is possible to correspond to various IDs, so the versatility of the system can be enhanced.
  • FIG. 5 It is a figure which shows the operation
  • FIG. 1 is a view showing an example of a transfer system according to the present embodiment.
  • FIG. 2 is a view in the direction of arrow A shown in FIG.
  • FIG. 3 is a view in the direction of arrow B shown in FIG.
  • the transport system 1 of the present embodiment includes tracks 2 a and 2 b, a plurality of ceiling transport vehicles 3, transport devices 4 a and 4 b, a reader 5, and a control device 6.
  • the transfer system 1 is, for example, a transfer system installed in a semiconductor device manufacturing plant, and is a container F (article) such as a FOUP containing a semiconductor wafer used for manufacturing a semiconductor device or a reticle pod containing a reticle. Transport
  • the container F shows an example of the FOUP.
  • the container F is provided with the main-body part 8, the lid 9, the flange 10, and ID12, as shown in FIG.
  • the container F is standardized by the SEMI standard.
  • the main body 8 accommodates the semiconductor wafer therein.
  • the lid 9 is detachably provided on one of the side surfaces of the main body 8.
  • the flange 10 is provided on the top of the main body 8.
  • the ID 12 is an identification ID (carrier ID).
  • the ID 12 is used to manage transport of the container F and the like.
  • the ID 12 is provided at the lower part of the surface opposite to the lid 9 according to the standard.
  • the ID 12 is, for example, a bar code or a two-dimensional code, or an RFID (radio frequency identifier), and any of these may be used.
  • the transfer system 1 includes a plurality of tracks 2a and 2b as shown in FIG. Note that FIG. 1 shows a part of the tracks 2a and 2b.
  • Each overhead transport vehicle 3 travels along the tracks 2a and 2b and transports the container F (see FIG. 1).
  • Each of the tracks 2a and 2b is a traveling rail provided on the ceiling of the clean room or in the vicinity of the ceiling.
  • Each of the tracks 2a and 2b is laid, for example, from a ceiling of a clean room via a hanging bracket (see FIG. 2).
  • Each track 2a, 2b is provided adjacent to, for example, a processing apparatus such as an exposure apparatus, a coater developer, a film forming apparatus, or a film forming apparatus, or a stocker (automatic warehouse) for storing the container F.
  • the trajectories 2a and 2b are loop trajectories that are not connected to each other and are independent.
  • the tracks 2a, 2b are, for example, arranged in another building.
  • the overhead transport vehicle 3 is set to travel in the arrow direction on the tracks 2a and 2b. Further, the ceiling transport vehicle 3 is set so as to travel while holding the container F so that the lid 9 is directed in a predetermined one direction as shown in FIG. 1 on the tracks 2a and 2b.
  • the trajectories 2a and 2b are not limited to the above-described example, and can be set arbitrarily.
  • the tracks 2a, 2b may be connected to one another. Further, either one of the orbits 2a and 2b may not be present. Further, three or more of the plurality of tracks 2a and 2b may be provided.
  • Each ceiling carriage 3 includes a traveling unit 14, a main unit 15, and a control unit 16 as shown in FIG. 2.
  • the traveling unit 14 causes the main body unit 15 to travel.
  • the traveling unit 14 includes traveling wheels 14 a arranged to be in contact with the tracks 2 a and 2 b.
  • the traveling unit 14 travels along the tracks 2a and 2b by a traveling drive device (not shown) such as an electric motor or a linear motor.
  • the driving of the traveling unit 14 is controlled by the control unit 16.
  • the main body portion 15 is provided below the traveling portion 14 via a support shaft 18.
  • the main body unit 15 has an article holding unit 20 for holding the container F, an elevation driving unit 21 for raising and lowering the article holding unit 20 in the vertical direction, and a roll-out mechanism 22 for moving the elevation driving unit 21 to the side. .
  • the article holding unit 20 suspends and holds the container F by holding the flange 10 of the container F.
  • the article holding portion 20 is, for example, a chuck having a claw portion 20a which can be opened and closed in the horizontal direction, and the container F is made to enter by moving the claw portion 20a below the flange 10 of the container F. Hold in the suspended state.
  • the article holding unit 20 is connected to a hanging member 21 a such as a wire or a belt.
  • the raising and lowering drive unit 21 is, for example, a hoist, and lowers the article holding unit 20 by drawing out the hanging member 21a, and raises the article holding unit 20 by winding the hanging member 21a.
  • the elevation driving unit 21 is controlled by the control unit 16 to lower or raise the article holding unit 20 at a predetermined speed. Further, the elevation driving unit 21 is controlled by the control unit 16 to hold the article holding unit 20 at a target height.
  • the lifting drive unit 21 performs transfer operation (loading and unloading) of the container F with respect to the transport devices 4a and 4b described later, temporary storage rack of the container F (eg, side track storage; STS, under track storage; UTS) And a transfer operation of the container F to a load port of a processing apparatus for processing a semiconductor wafer stored in the container F.
  • temporary storage rack of the container F eg, side track storage; STS, under track storage; UTS
  • the side projection mechanism 22 has, for example, a plurality of movable plates 22 a arranged so as to overlap in the vertical direction (Z direction). Each of the plurality of movable plates 22a is guided by a guide (not shown) and is movable in the Y direction.
  • a lift drive unit 21 is attached to the lower movable plate 22a.
  • the side-out mechanism 22 has a Y-direction drive such as an electric motor, and the movable plate 22a is slid by the driving force from the Y-direction drive to move the elevation drive 21 between the projecting position and the storage position. It is movable.
  • the protruding position is a position where the lift driving unit 21 protrudes from the main body 15 to the side (Y direction) of the tracks 2 a and 2 b.
  • the storage position is a position where the lifting and lowering drive unit 21 is stored in the main body unit 15. Note that it is optional whether or not to provide the crossing mechanism 22.
  • a pivoting unit (not shown) may be provided between the side-lifting mechanism 22 and the elevation driving unit 21.
  • the rotation unit has, for example, a rotation member and a rotation drive unit, and rotates the elevation drive unit 21 around an axis in the vertical direction (Z direction) by driving the rotation drive unit. .
  • the article holding unit 20 (container F) suspended by the lifting and lowering drive unit 21 can be rotated, and the direction of the container F can be changed. It is optional whether or not to provide the above-mentioned pivoting portion.
  • the main body unit 15 moves integrally with the traveling unit 14 along the tracks 2a and 2b.
  • covers 24 are provided on the ⁇ X side and the + X side (the front side and the rear side in the traveling direction) of the main body portion 15, respectively.
  • the cover 24 is supported by the overhead transportation vehicle 3 via the support shaft 18 and moves integrally with the traveling unit 14.
  • the control unit 16 controls each part of the overhead conveyance vehicle 3.
  • the control unit 16 controls a traveling drive device (not shown) to cause the overhead transport vehicle 3 to travel.
  • the control unit 16 is disposed inside the traveling unit 14.
  • the control unit 16 includes a computer system.
  • the computer system includes a CPU, a main memory, a storage device, a communication device, and the like, and executes various processes.
  • the control unit 16 sets the departure point (starting point) and the destination (end point) for transporting the container given from the control device 6 or the like, map information stored in advance in the storage device, and current location information detected by a detection unit (not shown). Based on the travel route, the overhead transport vehicle 3 is made to travel based on the travel route built on its own. In addition, the overhead transport vehicle 3 includes a sensor (not shown) for detecting the front state, a sensor for detecting the speed, and a sensor for detecting the current position, and based on the detection results of these sensors, the front ceiling transport The control unit 16 travels by adjusting the speed and the like so as not to collide with the car 3 and the like.
  • the transport system 1 of the present embodiment includes a plurality of transport devices 4 a and 4 b.
  • the transport devices 4 a and 4 b respectively transport the containers F unloaded by the overhead transport vehicle 3.
  • the transfer devices 4a and 4b are used to transfer the container F between the tracks 2a and 2b, respectively.
  • the transport device 4a transports the container F in the -Y direction, and is used to transport the container F from the track 2a to the track 2b (see FIG. 1).
  • the transport device 4b transports the container F in the + Y direction, and is used to transport the container F from the track 2b to the track 2a (see FIG. 1).
  • FIG. 2 is a view in the direction of arrow A shown in FIG.
  • FIG. 3 is a view in the direction of arrow B shown in FIG.
  • the transport device 4 a is supported by a member such as the frame 25 and provided at a position lower than the lower end of the overhead transport vehicle 3 traveling on the tracks 2 a and 2 b.
  • the transfer device 4 a includes a moving unit 27 that places and moves the container F on the top surface.
  • the transport device 4a is a roller conveyor, a belt conveyor, or the like.
  • the moving unit 27 moves by a predetermined amount at a predetermined timing by a drive mechanism (not shown).
  • the transfer device 4b is also configured in the same manner as the above-described transfer device 4a.
  • Delivery of the container F between the overhead transport vehicle 3 and the transport devices 4a and 4b is performed at a predetermined position as shown in FIG.
  • the ceiling transport vehicle 3 performs “unloading” to lower the container F to be held and place the container F on the transport devices 4 a and 4 b at a predetermined position.
  • the predetermined position is set immediately below the tracks 2a and 2b and at a position where the transport devices 4a and 4b exist.
  • the container F is delivered from the overhead transport vehicle 3 to the transport devices 4a and 4b by unloading.
  • the ceiling transport vehicle 3 performs “loading” that holds the container F placed on the transport devices 4 a and 4 b at a predetermined position and raises the container F to the height at the time of track traveling.
  • the container F is delivered from the transfer devices 4a and 4b to the overhead transfer vehicle 3 by unloading.
  • the overhead conveyance vehicle 3 is set to execute unloading of the container F to the transport device 4a at the unloading position P1, as shown in FIG.
  • the container F unloaded at the unloading position P1 is transported by the transport device 4a in the -Y direction, and is lifted by the overhead transportation vehicle 3 at the unloading position P2.
  • the container F is transported from the track 2a to the track 2b.
  • the overhead transport vehicle 3 is set to execute unloading of the container F to the transport device 4 b at the unloading position P3.
  • the container F unloaded at the unloading position P3 is transported by the transport device 4b in the + Y direction, and is unloaded by the overhead transport vehicle 3 at the unloading position P4.
  • the container F is transported from the track 2b to the track 2a.
  • the above-described transfer devices 4a and 4b are each an example, and may be in another aspect.
  • one of the transport devices 4a and 4b may not be provided.
  • the unloading positions P1 and P3 and the unloading positions P2 and P4 by the above-described overhead transportation vehicle 3 are not limited to the above-described example, and may be other positions.
  • the unloading position P1a and the unloading position P2a may be used instead of or in addition to the unloading position P1 and the unloading position P2 described above.
  • the unloading position P3a and the unloading position P4a may be used instead of or in addition to the unloading position P3 and the unloading position P4 described above.
  • the transport device 4a (4b) is not a path for transporting the container F between the two tracks 2a and 2b, but the container so as to short-cut one track 2a (2b) and the track 2a (2b) It may be a route for conveying F.
  • each reading device 5 is disposed near the unloading position P1, P3.
  • Each reading device 5 reads the ID 12 of the container F at a position before the overhead transportation vehicle 3 is unloaded.
  • the position before unloading means the position before unloading is completed.
  • each reading device 5 is disposed at a position where it can read the ID 12 of the container F at a position before the overhead transportation vehicle 3 executes unloading.
  • Each reading device 5 reads the ID 12 of the container F before the overhead transportation vehicle 3 executes unloading.
  • Each reading device 5 reads the ID 12 in the same state as the state (position) in which the overhead conveyance vehicle 3 holds the container F when traveling. That is, each reading device 5 reads the ID 12 of the container F in a state of being accommodated in the cover 24 without lowering the container F in the ceiling transport vehicle 3.
  • Each reading device 5 is, for example, a barcode reader, an RF tag reader, or the like, and is appropriately set according to the type of the ID 12.
  • the ID 12 of the container F is associated with the information of the transfer destination of the container F by the control device 6, as will be described later.
  • the reading result of the ID 12 read by the reading device 5 is transmitted to the control device 6 and the control device 6 collates the information of the transport destination of the container F to obtain the container by the ceiling carrier 3 The transfer destination of F can be confirmed.
  • an error in the transport destination can be detected.
  • the reading device 5 since the reading device 5 reads the ID 12 of the container F at a position before the overhead conveyance vehicle 3 unloads, reading the ID 12 quickly and efficiently without any restriction on the structure of the conveyance device. Can. Further, in the present embodiment, since the reading device 5 reads the ID 12 of the container F at a position before the overhead transportation vehicle 3 performs unloading, the ID can be read quickly.
  • each reading device 5 is fixedly disposed at a position deviated from the conveyance space R1 of the container F by the overhead conveyance vehicle 3 and a position deviated from the conveyance space R2 of the container F by the conveyance devices 4a and 4b. Ru.
  • Each reader 5 is supported by a support member 26 and disposed as shown in FIG.
  • the support member 26 is connected to the first member 26a extending upward from the side (the -Y side, the side without the cover 24) of the conveying device 4 and the upper side of the first member 26a.
  • a member 26 b extending horizontally to the side and supporting the reading device 5.
  • the first member 26 a is supported by a support member 26 such as a frame.
  • Each reading device 5 is supported by the support member 26 and disposed above the transfer space R2.
  • Each reading device 5 is arranged in the vicinity of the ID 12 of the container F held by the overhead transport vehicle 3 located at the unloading position P1, P3.
  • each reader 5 is disposed at a distance of about 30 mm to the ID 12. With this configuration, each reader 5 can reliably read the ID 12.
  • the above-described support member 26 is an example, and another aspect may be sufficient.
  • the first member 26a may be supported by a floor surface or may be supported by a ceiling or the like.
  • the reading device 5 is disposed at a position deviated from the transfer spaces R1 and R2, and the reading device 5 does not interfere with the transfer space R1 and the transfer space R2 of the container F by the transfer device 4.
  • the structure of the system can be simplified.
  • the reading device 5 since the reading device 5 is disposed by the support member 26 described above, the reading device 5 includes the conveyance space R1 of the container F by the ceiling conveyance vehicle 3 and the conveyance space R2 of the container F by the conveyance device 4
  • the reader 5 can be arranged near the container F which does not interfere with it and which the overhead carriage 3 holds. By this configuration, the ID 12 can be read reliably.
  • Each reader 5 is communicably connected to the controller 6, as shown in FIG.
  • Each reading device 5 transmits the reading result obtained by reading the ID 12 to the control device 6.
  • the control device 6 of FIG. 1 controls the overhead conveyance vehicle 3 and the conveyance devices 4a and 4b.
  • the controller 6 includes a plurality of computer systems.
  • the computer system includes a CPU, a main memory, a storage device, a communication device, and the like, and executes various processes.
  • the control device 6 is provided for each predetermined area.
  • the control device 6 controls the overhead transport vehicle 3 and the transport devices 4a and 4b in the area where the control device 6 is provided.
  • the control device 6 is communicably connected to the other control devices, such as the overhead transport vehicle 3, the reading device 5, and the transport devices 4a and 4b via a wired or wireless communication system.
  • the control device 6 receives state information indicating the current position, the destination, the traveling state, the luggage state, the front state, and the like from the overhead conveyance vehicle 3. Further, the control device 6 receives the reading result of the ID 12 from the reading device 5. Further, the control device 6 instructs the overhead transport vehicle 3 of an origin (start point) and a destination (end point) for transporting the container F, and an operation (for example, unloading and unloading). Further, the control device 6 controls the driving timing, the movement amount, and the like of the moving unit 27 of the conveyance devices 4a and 4b.
  • the control device 6 instructs the ceiling transport vehicle 3 to execute unloading or transport to another transport destination in accordance with the reading result of the reading device 5.
  • the control device 6 collates the reading result of the ID 12 read by the reading device 5 with the information (the transfer destination information of the container) in which the ID 12 of the container F and the transfer destination of the container F are associated.
  • a determination unit (not shown) for determining whether or not the transfer destination is correct is provided.
  • the control device 6 instructs the overhead conveyance vehicle 3 to execute unloading.
  • the determination unit determines that the transport destination of the container F is incorrect, the overhead transport vehicle 3 is instructed to transport the container F to another transport destination.
  • the transport destination information of the container is, for example, generated in advance by a generation unit (not shown) and stored in a storage device (not shown). As described above, when the control device 6 instructs the overhead transport vehicle 3 to execute unloading or transport to another transport destination according to the reading result of the reading device 5, the container F with the wrong transport destination is Even if there is, it can be quickly corrected to the correct transport destination.
  • FIG. 4 is a flowchart showing the operation of the transfer system.
  • 5 and 6 are diagrams for explaining the operation of the transport system.
  • the overhead transfer vehicle 3 unloads the container F to the transfer device 4a at the unloading position P1, and the transfer device 4a transfers the container F in the -Y direction.
  • 3 carries out the loading at the loading position P2 will be described.
  • step S1 the reading device 5 reads the ID of the container F held by the ceiling transport vehicle 3 stopped at the unloading position at a position before unloading.
  • the overhead transport vehicle 3 holds the container F, travels along the track 2a, and stops at the unloading position P1.
  • the reading device 5 reads the ID 12 of the container F at a position before the overhead transport vehicle 3 executes unloading.
  • the reading result of the reading device 5 is sent to the control device 6.
  • the conveyance device 4a detects that the ceiling conveyance vehicle 3 is stopped at the unloading position P1 by the detection unit (not shown), and stops the driving of the moving unit 27.
  • step S2 in accordance with the reading result of the reading device 5, it is determined whether or not the transfer destination of the container F is correct.
  • the determination unit of the control device 6 collates the reading result of the ID 12 read by the reading device 5 with the transfer destination information of the container to determine whether the transfer destination of the container F is correct.
  • step S3 When the determination unit determines that the transport destination of the container F is correct (YES in step S2), in step S3, the control device 6 instructs the ceiling transport vehicle 3 to execute unloading. Subsequently, in step S4, when the overhead conveyance vehicle 3 receives an instruction to execute unloading of the control device 6, as shown in FIG. 5, the control unit 16 of the ceiling conveyance vehicle 3 starts the unloading operation. Let At this time, the control unit 16 drives the lift drive unit 21 to lower the container F and place it on the upper surface of the moving unit 27 (see FIG. 2). Subsequently, as shown in FIG.
  • the transfer device 4 a drives the moving unit 27 in the ⁇ Y direction by detecting that the container F has been placed by the detection unit (not shown), and the container F is Move to just below the loading position P2.
  • the control device 6 instructs the overhead transport vehicle 3 located near the loading position P2 to move to the loading position P2 and stop at the loading position P2.
  • the overhead transport vehicle 3 stops at the loading position P2 by receiving the loading execution instruction of the control device 6, and raises and lowers the container F by the raising and lowering driving unit 21 to accommodate the container F in the cover 24. Hold. By this operation, the container F is unloaded. Subsequently, the overhead transport vehicle 3 travels along the track 2b to transport the container F to a predetermined transport destination.
  • step S5 the control device 6 causes the ceiling transport vehicle 3 to transfer the container F to another transfer destination.
  • the control device 6 instructs the ceiling transport vehicle 3 to transport the correct container F to the transport destination based on the above-described “container transport destination information”. By this operation, the transfer destination of the container F is correctly corrected.
  • step S6 the control device 6 determines whether to unload the container F when transporting the container F to another destination. For example, in the case where unloading is faster and the sheet can be transported to another destination, the control device 6 instructs the overhead transport vehicle 3 to unload.
  • step S7 the control device 6 instructs execution of unloading.
  • Step S7 is the same as step S3.
  • the overhead transport vehicle 3 places the container F on the transport device 4 in step S8.
  • Step S8 is the same as step S4.
  • step S9 the control device 6 instructs the overhead conveyance vehicle 3 to unload the container F without unloading the container F to the correct destination. Do.
  • the transport system 1 and the transport method of the present embodiment can quickly read the ID 12 of the container F without any restriction on the structure of the transport devices 4a and 4b.
  • FIGS. 7 to 9 are diagrams showing a reading device according to first to third modifications.
  • the reading device 5 is not limited to the configuration illustrated in FIG. 2 as long as it can read the ID 12 of the container F held by the overhead transport vehicle 3 stopped at the unloading positions P1 and P3 at the position before unloading.
  • the “position before unloading” means any position before the unloading of the containers F with respect to the transfer devices 4 a and 4 b is completed.
  • the reading device 5 is at a position where the container F is lowered by the lift drive unit 21 and at any position before unloading of the container F with respect to the transport devices 4 a and 4 b is completed.
  • the configuration may be such that the ID 12 of the container F to be held is read.
  • the reading device 5 may be configured to read the ID 12 of the container F to be held at the position where the container F is moved in the ⁇ Y direction by the roll-out mechanism 22.
  • reading devices 5a and 5b corresponding to different types of IDs may be provided.
  • two readers 5a and 5b are supported by the support member 26 instead of the reader 5 of FIG.
  • the container F shown in FIG. 9 is provided with ID12a and ID12b instead of ID12 of FIG.
  • the reader 5a reads IDa.
  • the reader 5b reads the IDb.
  • the ID 12a and the ID 12b of the container F are read at the same timing by the readers 5a and 5b.
  • ID of the container F does not need to be ID12a and ID12b shown in FIG.
  • the ID of the container F may be only the ID 12a or only the ID 12b.
  • the transport system 1 includes the reading devices 5a and 5b corresponding to different types of IDs, it is possible to correspond to various IDs, so that the versatility of the system can be enhanced.
  • the reader 5 may also be used to confirm the ID 12 of the container F temporarily stored in a temporary storage rack or the like.
  • the overhead transportation vehicle 3 sequentially transports the plurality of containers F temporarily stored in the above-described temporary storage rack to the unloading positions P1 and P3. Then, by reading the ID 12 of the container F by the reading device 5, it is possible to confirm the ID 12 of the container F temporarily stored in the above-mentioned temporary storage shelf. As a result, the container F temporarily stored in the above-mentioned temporary storage rack can be checked easily and quickly.

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

[Problème] Lire rapidement l'ID d'un article sans imposer de contrainte sur une structure du côté dispositif de transport. [Solution] L'invention porte sur un système de transport 1 qui es pourvu : de supports aériens 3 transportant chacun un contenant F (article) ; de dispositifs de transport 4a, 4b destinés à transporter les contenants F déchargés par les supports aériens 3 ; et de dispositifs de lecture 5 qui lisent chacun un ID 12 du contenant F maintenu par le support aérien 3 arrêté à une position de déchargement P1, P3, l'ID 12 étant lu au niveau d'une position dans laquelle le déchargement par le support aérien 3 n'a pas été achevé.
PCT/JP2018/024583 2017-08-03 2018-06-28 Système et procédé de transport WO2019026484A1 (fr)

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JP2017150370 2017-08-03
JP2017-150370 2017-08-03

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WO2019026484A1 true WO2019026484A1 (fr) 2019-02-07

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0274100A (ja) * 1988-09-09 1990-03-14 Fujitsu Ltd プリント板ユニット管理システム
JPH02286502A (ja) * 1989-04-27 1990-11-26 Fuji Electric Co Ltd 物品格納庫
JPH0724816U (ja) * 1993-10-25 1995-05-12 神鋼電機株式会社 物品保管庫
JPH1035881A (ja) * 1996-07-23 1998-02-10 Fuji Photo Film Co Ltd ワーク搬送装置
WO2006025235A1 (fr) * 2004-09-03 2006-03-09 Murata Kikai Kabushiki Kaisha Système d’entrepôt automatique
JP2006298565A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車システム
JP2006298566A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車とそのシステム
JP2008117112A (ja) * 2006-11-02 2008-05-22 Murata Mach Ltd 天井走行車
US7992734B2 (en) * 2008-01-11 2011-08-09 International Business Machines Corporation Semiconductor automation buffer storage identification system and method
JP2016037352A (ja) * 2014-08-07 2016-03-22 本田技研工業株式会社 自動倉庫

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0274100A (ja) * 1988-09-09 1990-03-14 Fujitsu Ltd プリント板ユニット管理システム
JPH02286502A (ja) * 1989-04-27 1990-11-26 Fuji Electric Co Ltd 物品格納庫
JPH0724816U (ja) * 1993-10-25 1995-05-12 神鋼電機株式会社 物品保管庫
JPH1035881A (ja) * 1996-07-23 1998-02-10 Fuji Photo Film Co Ltd ワーク搬送装置
WO2006025235A1 (fr) * 2004-09-03 2006-03-09 Murata Kikai Kabushiki Kaisha Système d’entrepôt automatique
JP2006298565A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車システム
JP2006298566A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車とそのシステム
JP2008117112A (ja) * 2006-11-02 2008-05-22 Murata Mach Ltd 天井走行車
US7992734B2 (en) * 2008-01-11 2011-08-09 International Business Machines Corporation Semiconductor automation buffer storage identification system and method
JP2016037352A (ja) * 2014-08-07 2016-03-22 本田技研工業株式会社 自動倉庫

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