WO2019026484A1

WO2019026484A1 - Conveying system and conveying method

Info

Publication number: WO2019026484A1
Application number: PCT/JP2018/024583
Authority: WO
Inventors: 義明藤原; 光哉徳本
Original assignee: 村田機械株式会社
Priority date: 2017-08-03
Filing date: 2018-06-28
Publication date: 2019-02-07
Also published as: TW201911212A

Abstract

[Problem] To quickly read the ID of an article without imposing any constraint on a structure on the conveying device side. [Solution] A conveying system 1 is provided with: overhead carriers 3 each conveying a container F (article); conveying devices 4a, 4b for conveying the containers F unloaded by the overhead carriers 3; and reading devices 5 each reading an ID 12 of the container F held by the overhead carrier 3 stopped at an unloading position P1, P3, the ID 12 being read at a position where unloading by the overhead carrier 3 has not been completed.

Description

Transport system and transport method

The present invention relates to a transfer system and a transfer method.

In a semiconductor production factory, a transport system is used which transports an article such as a transport container (FOUP) containing a semiconductor wafer by a ceiling transport vehicle traveling along a track laid in the vicinity of a ceiling. In a semiconductor manufacturing process, a plurality of processes are performed on a semiconductor wafer by a predetermined processing apparatus. In order to accommodate selective transport to such multiple processors, the transport system may comprise multiple trajectories. In addition, an identification ID (carrier ID) is provided at a predetermined position in a transport container for storing a semiconductor wafer, and transport management is performed by this ID. For example, Patent Document 1 includes a plurality of tracks along which a ceiling transport vehicle travels, a transport device which transports a transport container unloaded by the ceiling transport vehicle between a plurality of tracks, and a transport container unloaded by the transport device. And a reader for reading the ID of the carrier.

Patent No. 4858673

Since an RFID, a bar code or the like is used as the above-mentioned ID, it is necessary to bring the ID close to the vicinity of the reader at the time of reading. In the transport system of Patent Document 1, since the direction of the transport container unloaded by the transport device is not constant, when the ID is read by the reading device, the transport container is turned so that the ID is disposed in the vicinity of the reading device. It is necessary for the transport device to have a mechanism for rotating the In addition, in the transfer system of Patent Document 1, since the ID is read after the transfer container is rotated as described above, it takes time to read the ID.

An object of the present invention is to provide a transport system and a transport method capable of quickly reading the ID of an article without restricting the structure of the transport device.

The transport system according to the present invention includes a ceiling transport which transports an article, a transport apparatus which transports an article unloaded by the ceiling transport, and IDs of articles held by the ceiling transport stopped at the unloading position. And a reading device for reading at a position before unloading by the overhead carriage is completed.

In addition, the reading device may be disposed at a position where the ID of the article at the position before the overhead transportation vehicle performs unloading can be read. Further, according to the reading result of the reading device, a control device may be provided that instructs the overhead conveyance vehicle to execute unloading or conveyance to another conveyance destination. Further, the reading device may be fixed and disposed at a position out of the conveyance space of the article by the overhead conveyance vehicle and a position out of the conveyance space of the article by the conveyance device. In addition, a support member may be provided which extends upward from the side of the transport device and places the reading device above the transport space of the article by the transport device. Also, a plurality of reading devices may be provided corresponding to different types of IDs.

The transport method according to the present invention is a transport method in a transport system including a ceiling transport for transporting an article and a transport apparatus for transporting an article unloaded by the ceiling transport, wherein the transportation system is stopped at the unloading position. Reading the ID of the article held by the overhead carriage at a position before unloading by the overhead carriage is completed.

The transport system and the transport method of the present invention can quickly read the ID of an article without any restriction on the structure of the transport apparatus.

Also, if the reading device is placed at a position where it can read the ID of the item before the overhead vehicle performs unloading, the reading device reads the ID before the overhead vehicle performs unloading. You can read the ID quickly. In addition, in the case where the overhead conveyance vehicle is provided with a control device that instructs the overhead conveyance vehicle to execute unloading or conveyance to another conveyance destination according to the reading result of the reading device, the conveyance destination of the article can be confirmed from the reading result. Even if the transport destination is incorrect, it can be quickly corrected to the correct transport destination. Further, when the reading device is fixedly disposed at a position out of the conveyance space of the article by the overhead conveyance vehicle and at a position out of the conveyance space of the article by the conveyance device, the conveyance space of the article by the overhead conveyance vehicle and the conveyance device The structure of the system can be simplified because it does not interfere with the transport space of the articles by the. In addition, in the case where the support member extends upward from the side of the transfer device and places the reading device above the transfer space of the article by the transfer device, it does not interfere with the transfer space of the overhead transfer vehicle and the transfer space of the transfer device. In addition, the reading device can be placed near an article held by the overhead transport vehicle, and the reading of the ID can be reliably performed. In addition, when a plurality of reading devices are provided corresponding to different types of IDs, it is possible to correspond to various IDs, so the versatility of the system can be enhanced.

It is a conceptual diagram showing a conveyance system concerning an embodiment. It is an arrow line view of the A direction shown in FIG. It is an arrow line view of the B direction shown in FIG. It is a flow chart which shows operation of a conveyance system concerning an embodiment. It is a figure which shows operation | movement of a conveyance system. [FIG. 5] It is a figure which shows the operation | movement of a conveyance system following FIG. It is a figure which shows the reader concerning a 1st modification. It is a figure which shows the reader concerning a 2nd modification. It is a figure which shows the reader concerning the 3rd modification.

Hereinafter, embodiments will be described with reference to the drawings. In each of the following drawings, directions in the drawings will be described using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is taken as the Z direction, and the horizontal direction is taken as the X direction and the Y direction. In each of the X direction, the Y direction, and the Z direction, the tip side of the arrow is referred to as the + side (eg, + X side), and the opposite side is referred to as the − side (eg, −X side).

[Embodiment]
FIG. 1 is a view showing an example of a transfer system according to the present embodiment. FIG. 2 is a view in the direction of arrow A shown in FIG. FIG. 3 is a view in the direction of arrow B shown in FIG. The transport system 1 of the present embodiment includes

tracks

2 a and 2 b, a plurality of ceiling transport vehicles 3,

transport devices

4 a and 4 b, a reader 5, and a control device 6.

The transfer system 1 is, for example, a transfer system installed in a semiconductor device manufacturing plant, and is a container F (article) such as a FOUP containing a semiconductor wafer used for manufacturing a semiconductor device or a reticle pod containing a reticle. Transport In the present embodiment, the container F shows an example of the FOUP.

The container F is provided with the main-body part 8, the lid 9, the flange 10, and ID12, as shown in FIG. The container F is standardized by the SEMI standard. The main body 8 accommodates the semiconductor wafer therein. The lid 9 is detachably provided on one of the side surfaces of the main body 8. The flange 10 is provided on the top of the main body 8. The ID 12 is an identification ID (carrier ID). The ID 12 is used to manage transport of the container F and the like. The ID 12 is provided at the lower part of the surface opposite to the lid 9 according to the standard. The ID 12 is, for example, a bar code or a two-dimensional code, or an RFID (radio frequency identifier), and any of these may be used.

The transfer system 1 includes a plurality of

tracks

2a and 2b as shown in FIG. Note that FIG. 1 shows a part of the

tracks

2a and 2b. Each overhead transport vehicle 3 travels along the

tracks

2a and 2b and transports the container F (see FIG. 1). Each of the

tracks

2a and 2b is a traveling rail provided on the ceiling of the clean room or in the vicinity of the ceiling. Each of the

tracks

2a and 2b is laid, for example, from a ceiling of a clean room via a hanging bracket (see FIG. 2). Each

track

2a, 2b is provided adjacent to, for example, a processing apparatus such as an exposure apparatus, a coater developer, a film forming apparatus, or a film forming apparatus, or a stocker (automatic warehouse) for storing the container F. The

trajectories

2a and 2b are loop trajectories that are not connected to each other and are independent. The

tracks

2a, 2b are, for example, arranged in another building. The overhead transport vehicle 3 is set to travel in the arrow direction on the

tracks

2a and 2b. Further, the ceiling transport vehicle 3 is set so as to travel while holding the container F so that the lid 9 is directed in a predetermined one direction as shown in FIG. 1 on the

tracks

2a and 2b.

The

trajectories

2a and 2b are not limited to the above-described example, and can be set arbitrarily. For example, the

tracks

2a, 2b may be connected to one another. Further, either one of the

orbits

2a and 2b may not be present. Further, three or more of the plurality of

tracks

2a and 2b may be provided.

Each ceiling carriage 3 includes a traveling unit 14, a main unit 15, and a control unit 16 as shown in FIG. 2. The traveling unit 14 causes the main body unit 15 to travel. The traveling unit 14 includes traveling wheels 14 a arranged to be in contact with the

tracks

2 a and 2 b. The traveling unit 14 travels along the

tracks

2a and 2b by a traveling drive device (not shown) such as an electric motor or a linear motor. The driving of the traveling unit 14 is controlled by the control unit 16.

The main body portion 15 is provided below the traveling portion 14 via a support shaft 18. The main body unit 15 has an article holding unit 20 for holding the container F, an elevation driving unit 21 for raising and lowering the article holding unit 20 in the vertical direction, and a roll-out mechanism 22 for moving the elevation driving unit 21 to the side. .

The article holding unit 20 suspends and holds the container F by holding the flange 10 of the container F. The article holding portion 20 is, for example, a chuck having a claw portion 20a which can be opened and closed in the horizontal direction, and the container F is made to enter by moving the claw portion 20a below the flange 10 of the container F. Hold in the suspended state. The article holding unit 20 is connected to a hanging member 21 a such as a wire or a belt.

The raising and lowering drive unit 21 is, for example, a hoist, and lowers the article holding unit 20 by drawing out the hanging member 21a, and raises the article holding unit 20 by winding the hanging member 21a. The elevation driving unit 21 is controlled by the control unit 16 to lower or raise the article holding unit 20 at a predetermined speed. Further, the elevation driving unit 21 is controlled by the control unit 16 to hold the article holding unit 20 at a target height. The lifting drive unit 21 performs transfer operation (loading and unloading) of the container F with respect to the

transport devices

4a and 4b described later, temporary storage rack of the container F (eg, side track storage; STS, under track storage; UTS) And a transfer operation of the container F to a load port of a processing apparatus for processing a semiconductor wafer stored in the container F.

The side projection mechanism 22 has, for example, a plurality of movable plates 22 a arranged so as to overlap in the vertical direction (Z direction). Each of the plurality of movable plates 22a is guided by a guide (not shown) and is movable in the Y direction. A lift drive unit 21 is attached to the lower movable plate 22a. The side-out mechanism 22 has a Y-direction drive such as an electric motor, and the movable plate 22a is slid by the driving force from the Y-direction drive to move the elevation drive 21 between the projecting position and the storage position. It is movable. The protruding position is a position where the lift driving unit 21 protrudes from the main body 15 to the side (Y direction) of the

tracks

2 a and 2 b. The storage position is a position where the lifting and lowering drive unit 21 is stored in the main body unit 15. Note that it is optional whether or not to provide the crossing mechanism 22.

In addition, a pivoting unit (not shown) may be provided between the side-lifting mechanism 22 and the elevation driving unit 21. The rotation unit has, for example, a rotation member and a rotation drive unit, and rotates the elevation drive unit 21 around an axis in the vertical direction (Z direction) by driving the rotation drive unit. . By rotating the lifting and lowering drive unit 21 by the rotation unit, the article holding unit 20 (container F) suspended by the lifting and lowering drive unit 21 can be rotated, and the direction of the container F can be changed. It is optional whether or not to provide the above-mentioned pivoting portion.

The main body unit 15 moves integrally with the traveling unit 14 along the

tracks

2a and 2b. As shown in FIG. 3, covers 24 are provided on the −X side and the + X side (the front side and the rear side in the traveling direction) of the main body portion 15, respectively. The cover 24 is supported by the overhead transportation vehicle 3 via the support shaft 18 and moves integrally with the traveling unit 14.

The control unit 16 controls each part of the overhead conveyance vehicle 3. The control unit 16 controls a traveling drive device (not shown) to cause the overhead transport vehicle 3 to travel. The control unit 16 is disposed inside the traveling unit 14. The control unit 16 includes a computer system. The computer system includes a CPU, a main memory, a storage device, a communication device, and the like, and executes various processes.

The control unit 16 sets the departure point (starting point) and the destination (end point) for transporting the container given from the control device 6 or the like, map information stored in advance in the storage device, and current location information detected by a detection unit (not shown). Based on the travel route, the overhead transport vehicle 3 is made to travel based on the travel route built on its own. In addition, the overhead transport vehicle 3 includes a sensor (not shown) for detecting the front state, a sensor for detecting the speed, and a sensor for detecting the current position, and based on the detection results of these sensors, the front ceiling transport The control unit 16 travels by adjusting the speed and the like so as not to collide with the car 3 and the like.

Next, the transport device will be described. As shown in FIG. 1, the transport system 1 of the present embodiment includes a plurality of

transport devices

4 a and 4 b. The

transport devices

4 a and 4 b respectively transport the containers F unloaded by the overhead transport vehicle 3. The

transfer devices

4a and 4b are used to transfer the container F between the

tracks

2a and 2b, respectively. The transport device 4a transports the container F in the -Y direction, and is used to transport the container F from the track 2a to the track 2b (see FIG. 1). The transport device 4b transports the container F in the + Y direction, and is used to transport the container F from the track 2b to the track 2a (see FIG. 1).

FIG. 2 is a view in the direction of arrow A shown in FIG. FIG. 3 is a view in the direction of arrow B shown in FIG. As shown in FIGS. 2 and 3, the transport device 4 a is supported by a member such as the frame 25 and provided at a position lower than the lower end of the overhead transport vehicle 3 traveling on the

tracks

2 a and 2 b. The transfer device 4 a includes a moving unit 27 that places and moves the container F on the top surface. The transport device 4a is a roller conveyor, a belt conveyor, or the like. The moving unit 27 moves by a predetermined amount at a predetermined timing by a drive mechanism (not shown). The transfer device 4b is also configured in the same manner as the above-described transfer device 4a.

Delivery of the container F between the overhead transport vehicle 3 and the

transport devices

4a and 4b is performed at a predetermined position as shown in FIG. The ceiling transport vehicle 3 performs “unloading” to lower the container F to be held and place the container F on the

transport devices

4 a and 4 b at a predetermined position. The predetermined position is set immediately below the

tracks

2a and 2b and at a position where the

transport devices

4a and 4b exist. The container F is delivered from the overhead transport vehicle 3 to the

transport devices

4a and 4b by unloading. In addition, the ceiling transport vehicle 3 performs “loading” that holds the container F placed on the

transport devices

4 a and 4 b at a predetermined position and raises the container F to the height at the time of track traveling. The container F is delivered from the

transfer devices

4a and 4b to the overhead transfer vehicle 3 by unloading.

The overhead conveyance vehicle 3 is set to execute unloading of the container F to the transport device 4a at the unloading position P1, as shown in FIG. The container F unloaded at the unloading position P1 is transported by the transport device 4a in the -Y direction, and is lifted by the overhead transportation vehicle 3 at the unloading position P2. As a result, the container F is transported from the track 2a to the track 2b.

Further, as shown in FIG. 1, the overhead transport vehicle 3 is set to execute unloading of the container F to the transport device 4 b at the unloading position P3. The container F unloaded at the unloading position P3 is transported by the transport device 4b in the + Y direction, and is unloaded by the overhead transport vehicle 3 at the unloading position P4. As a result, the container F is transported from the track 2b to the track 2a.

The above-described

transfer devices

4a and 4b are each an example, and may be in another aspect. For example, one of the

transport devices

4a and 4b may not be provided. Further, the unloading positions P1 and P3 and the unloading positions P2 and P4 by the above-described overhead transportation vehicle 3 are not limited to the above-described example, and may be other positions. For example, in the transfer device 4a, the unloading position P1a and the unloading position P2a may be used instead of or in addition to the unloading position P1 and the unloading position P2 described above. In the transfer device 4b, the unloading position P3a and the unloading position P4a may be used instead of or in addition to the unloading position P3 and the unloading position P4 described above. Further, the transport device 4a (4b) is not a path for transporting the container F between the two

tracks

2a and 2b, but the container so as to short-cut one track 2a (2b) and the track 2a (2b) It may be a route for conveying F.

Next, the reader will be described. As shown in FIG. 1, a plurality of reading devices 5 are arranged at each unloading position P <b> 1 and P <b> 3. Each reading device 5 is disposed near the unloading position P1, P3. Each reading device 5 reads the ID 12 of the container F at a position before the overhead transportation vehicle 3 is unloaded. The position before unloading means the position before unloading is completed. In the present embodiment, each reading device 5 is disposed at a position where it can read the ID 12 of the container F at a position before the overhead transportation vehicle 3 executes unloading. Each reading device 5 reads the ID 12 of the container F before the overhead transportation vehicle 3 executes unloading. Each reading device 5 reads the ID 12 in the same state as the state (position) in which the overhead conveyance vehicle 3 holds the container F when traveling. That is, each reading device 5 reads the ID 12 of the container F in a state of being accommodated in the cover 24 without lowering the container F in the ceiling transport vehicle 3. Each reading device 5 is, for example, a barcode reader, an RF tag reader, or the like, and is appropriately set according to the type of the ID 12. The ID 12 of the container F is associated with the information of the transfer destination of the container F by the control device 6, as will be described later. In the transport system 1 of the present embodiment, the reading result of the ID 12 read by the reading device 5 is transmitted to the control device 6 and the control device 6 collates the information of the transport destination of the container F to obtain the container by the ceiling carrier 3 The transfer destination of F can be confirmed. When there is an error in the transport destination of the container F by the overhead transport vehicle 3, an error in the transport destination can be detected. In the present embodiment, since the reading device 5 reads the ID 12 of the container F at a position before the overhead conveyance vehicle 3 unloads, reading the ID 12 quickly and efficiently without any restriction on the structure of the conveyance device. Can. Further, in the present embodiment, since the reading device 5 reads the ID 12 of the container F at a position before the overhead transportation vehicle 3 performs unloading, the ID can be read quickly.

As shown in FIG. 2, each reading device 5 is fixedly disposed at a position deviated from the conveyance space R1 of the container F by the overhead conveyance vehicle 3 and a position deviated from the conveyance space R2 of the container F by the

conveyance devices

4a and 4b. Ru. Each reader 5 is supported by a support member 26 and disposed as shown in FIG. The support member 26 is connected to the first member 26a extending upward from the side (the -Y side, the side without the cover 24) of the conveying device 4 and the upper side of the first member 26a. And a member 26 b extending horizontally to the side and supporting the reading device 5. The first member 26 a is supported by a support member 26 such as a frame. Each reading device 5 is supported by the support member 26 and disposed above the transfer space R2. Each reading device 5 is arranged in the vicinity of the ID 12 of the container F held by the overhead transport vehicle 3 located at the unloading position P1, P3. For example, each reader 5 is disposed at a distance of about 30 mm to the ID 12. With this configuration, each reader 5 can reliably read the ID 12. In addition, the above-described support member 26 is an example, and another aspect may be sufficient. For example, the first member 26a may be supported by a floor surface or may be supported by a ceiling or the like.

In the present embodiment, as described above, the reading device 5 is disposed at a position deviated from the transfer spaces R1 and R2, and the reading device 5 does not interfere with the transfer space R1 and the transfer space R2 of the container F by the transfer device 4. , The structure of the system can be simplified. Further, in the present embodiment, since the reading device 5 is disposed by the support member 26 described above, the reading device 5 includes the conveyance space R1 of the container F by the ceiling conveyance vehicle 3 and the conveyance space R2 of the container F by the conveyance device 4 The reader 5 can be arranged near the container F which does not interfere with it and which the overhead carriage 3 holds. By this configuration, the ID 12 can be read reliably.

Each reader 5 is communicably connected to the controller 6, as shown in FIG. Each reading device 5 transmits the reading result obtained by reading the ID 12 to the control device 6.

The control device 6 of FIG. 1 controls the overhead conveyance vehicle 3 and the

conveyance devices

4a and 4b. The controller 6 includes a plurality of computer systems. The computer system includes a CPU, a main memory, a storage device, a communication device, and the like, and executes various processes. The control device 6 is provided for each predetermined area. The control device 6 controls the overhead transport vehicle 3 and the

transport devices

4a and 4b in the area where the control device 6 is provided. The control device 6 is communicably connected to the other control devices, such as the overhead transport vehicle 3, the reading device 5, and the

transport devices

4a and 4b via a wired or wireless communication system.

The control device 6 receives state information indicating the current position, the destination, the traveling state, the luggage state, the front state, and the like from the overhead conveyance vehicle 3. Further, the control device 6 receives the reading result of the ID 12 from the reading device 5. Further, the control device 6 instructs the overhead transport vehicle 3 of an origin (start point) and a destination (end point) for transporting the container F, and an operation (for example, unloading and unloading). Further, the control device 6 controls the driving timing, the movement amount, and the like of the moving unit 27 of the

conveyance devices

4a and 4b.

In the present embodiment, the control device 6 instructs the ceiling transport vehicle 3 to execute unloading or transport to another transport destination in accordance with the reading result of the reading device 5. For example, the control device 6 collates the reading result of the ID 12 read by the reading device 5 with the information (the transfer destination information of the container) in which the ID 12 of the container F and the transfer destination of the container F are associated. A determination unit (not shown) for determining whether or not the transfer destination is correct is provided. When the determination unit determines that the transfer destination of the container F is correct, the control device 6 instructs the overhead conveyance vehicle 3 to execute unloading. In addition, when the determination unit determines that the transport destination of the container F is incorrect, the overhead transport vehicle 3 is instructed to transport the container F to another transport destination. The transport destination information of the container is, for example, generated in advance by a generation unit (not shown) and stored in a storage device (not shown). As described above, when the control device 6 instructs the overhead transport vehicle 3 to execute unloading or transport to another transport destination according to the reading result of the reading device 5, the container F with the wrong transport destination is Even if there is, it can be quickly corrected to the correct transport destination.

Next, based on the operation of the conveyance system 1, the conveyance method according to the embodiment will be described. FIG. 4 is a flowchart showing the operation of the transfer system. 5 and 6 are diagrams for explaining the operation of the transport system. Hereinafter, as an example of the operation of the transfer system 1, the overhead transfer vehicle 3 unloads the container F to the transfer device 4a at the unloading position P1, and the transfer device 4a transfers the container F in the -Y direction. An example in which 3 carries out the loading at the loading position P2 will be described.

In the transport method according to the present embodiment, first, in step S1, the reading device 5 reads the ID of the container F held by the ceiling transport vehicle 3 stopped at the unloading position at a position before unloading. For example, as shown in FIG. 1, the overhead transport vehicle 3 holds the container F, travels along the track 2a, and stops at the unloading position P1. Then, as described above, the reading device 5 reads the ID 12 of the container F at a position before the overhead transport vehicle 3 executes unloading. The reading result of the reading device 5 is sent to the control device 6. At this time, the conveyance device 4a detects that the ceiling conveyance vehicle 3 is stopped at the unloading position P1 by the detection unit (not shown), and stops the driving of the moving unit 27.

Next, in step S2, in accordance with the reading result of the reading device 5, it is determined whether or not the transfer destination of the container F is correct. For example, as described above, the determination unit of the control device 6 collates the reading result of the ID 12 read by the reading device 5 with the transfer destination information of the container to determine whether the transfer destination of the container F is correct.

When the determination unit determines that the transport destination of the container F is correct (YES in step S2), in step S3, the control device 6 instructs the ceiling transport vehicle 3 to execute unloading. Subsequently, in step S4, when the overhead conveyance vehicle 3 receives an instruction to execute unloading of the control device 6, as shown in FIG. 5, the control unit 16 of the ceiling conveyance vehicle 3 starts the unloading operation. Let At this time, the control unit 16 drives the lift drive unit 21 to lower the container F and place it on the upper surface of the moving unit 27 (see FIG. 2). Subsequently, as shown in FIG. 6, the transfer device 4 a drives the moving unit 27 in the −Y direction by detecting that the container F has been placed by the detection unit (not shown), and the container F is Move to just below the loading position P2. Subsequently, the control device 6 instructs the overhead transport vehicle 3 located near the loading position P2 to move to the loading position P2 and stop at the loading position P2. The overhead transport vehicle 3 stops at the loading position P2 by receiving the loading execution instruction of the control device 6, and raises and lowers the container F by the raising and lowering driving unit 21 to accommodate the container F in the cover 24. Hold. By this operation, the container F is unloaded. Subsequently, the overhead transport vehicle 3 travels along the track 2b to transport the container F to a predetermined transport destination.

In addition, when the determination unit determines that the transfer destination of the container F is incorrect (NO in step S2), in step S5, the control device 6 causes the ceiling transport vehicle 3 to transfer the container F to another transfer destination. To convey the For example, the control device 6 instructs the ceiling transport vehicle 3 to transport the correct container F to the transport destination based on the above-described “container transport destination information”. By this operation, the transfer destination of the container F is correctly corrected.

In step S6, the control device 6 determines whether to unload the container F when transporting the container F to another destination. For example, in the case where unloading is faster and the sheet can be transported to another destination, the control device 6 instructs the overhead transport vehicle 3 to unload.

When it is determined that the control device 6 unloads (YES in step S6), in step S7, the control device 6 instructs execution of unloading. Step S7 is the same as step S3. Subsequently, the overhead transport vehicle 3 places the container F on the transport device 4 in step S8. Step S8 is the same as step S4.

When it is determined that the control device 6 does not unload (NO in step S6), in step S9, the control device 6 instructs the overhead conveyance vehicle 3 to unload the container F without unloading the container F to the correct destination. Do.

As described above, the transport system 1 and the transport method of the present embodiment can quickly read the ID 12 of the container F without any restriction on the structure of the

transport devices

4a and 4b.

The technical scope of the present invention is not limited to the aspect described in the above-described embodiment and the like. One or more of the requirements described in the above embodiments and the like may be omitted. Further, the requirements described in the above-described embodiment and the like can be combined as appropriate. In addition, the disclosures of Japanese Patent Application No. 2017-150370, which is a Japanese patent application, and all the documents cited in the above-described embodiments and the like are incorporated as part of the description of the text as far as the laws and regulations permit.

The above-described reading devices 5 are each an example, and may be another aspect. FIGS. 7 to 9 are diagrams showing a reading device according to first to third modifications.

For example, the reading device 5 is not limited to the configuration illustrated in FIG. 2 as long as it can read the ID 12 of the container F held by the overhead transport vehicle 3 stopped at the unloading positions P1 and P3 at the position before unloading. . The “position before unloading” means any position before the unloading of the containers F with respect to the

transfer devices

4 a and 4 b is completed.

For example, as shown in FIG. 7, the reading device 5 is at a position where the container F is lowered by the lift drive unit 21 and at any position before unloading of the container F with respect to the

transport devices

4 a and 4 b is completed. The configuration may be such that the ID 12 of the container F to be held is read.

Further, for example, as shown in FIG. 8, the reading device 5 may be configured to read the ID 12 of the container F to be held at the position where the container F is moved in the −Y direction by the roll-out mechanism 22.

Further, as shown in FIG. 9,

reading devices

5a and 5b corresponding to different types of IDs may be provided. For example, in the example shown in FIG. 9, two

readers

5a and 5b are supported by the support member 26 instead of the reader 5 of FIG. Moreover, the container F shown in FIG. 9 is provided with ID12a and ID12b instead of ID12 of FIG. The reader 5a reads IDa. The reader 5b reads the IDb. In such a configuration, the ID 12a and the ID 12b of the container F are read at the same timing by the

readers

5a and 5b. In addition, as shown in FIG. 9, when two

reader

5a, 5b is supported by the supporting member 26, ID of the container F does not need to be ID12a and ID12b shown in FIG. For example, the ID of the container F may be only the ID 12a or only the ID 12b. As described above, when the transport system 1 includes the

reading devices

5a and 5b corresponding to different types of IDs, it is possible to correspond to various IDs, so that the versatility of the system can be enhanced.

The reader 5 may also be used to confirm the ID 12 of the container F temporarily stored in a temporary storage rack or the like. In this case, the overhead transportation vehicle 3 sequentially transports the plurality of containers F temporarily stored in the above-described temporary storage rack to the unloading positions P1 and P3. Then, by reading the ID 12 of the container F by the reading device 5, it is possible to confirm the ID 12 of the container F temporarily stored in the above-mentioned temporary storage shelf. As a result, the container F temporarily stored in the above-mentioned temporary storage rack can be checked easily and quickly.

DESCRIPTION OF SYMBOLS 1 ...... conveyance system 2a ... track 2b ... track 3 ...

ceiling conveyance vehicle

4a, 4b ... conveyance apparatus 5 ... reading apparatus 6 ... control apparatus F ... container (article )
26: Support member 26a: First member 26b:

Second member

12, 12a, 12b: ID
P1, P3 ... unloading position P2, P4 ... unloading position R1 ... transport space (ceiling transport)
R2 ... Transport space (Transport device)

Claims

An overhead carriage for transporting articles;
A transport device for transporting the article unloaded by the overhead transport vehicle;
And a reading device for reading the ID of the article held by the overhead carriage stopped at the unloading position at a position before unloading by the overhead carriage is completed.
The transport system according to claim 1, wherein the reading device is disposed at a position where the ID of the article can be read at a position before the overhead transport vehicle performs unloading.
The transport system according to claim 1 or 2, further comprising: a control device that instructs the overhead transport vehicle to perform unloading or transport to another destination according to the reading result of the reading device.
The reader according to any one of claims 1 to 3, wherein the reading device is fixed at a position out of the conveyance space of the article by the ceiling carriage and a position out of the conveyance space of the article by the conveyance device. The conveyance system according to one item.
The conveyance system according to claim 4 provided with a support member which extends upward from the side of said conveyance device and arranges said reading device above conveyance space of said article by said conveyance device.
The transport system according to any one of claims 1 to 5, wherein a plurality of the reading devices are provided corresponding to different types of the IDs.
An overhead carriage for transporting articles;
And a conveyance device for conveying the article unloaded by the overhead conveyance vehicle.
A transportation method including: reading an ID of the article held by the ceiling carriage stopped at the unloading position at a position before unloading by the ceiling carriage is completed.