WO2018176719A1 - 一种快门装置 - Google Patents

一种快门装置 Download PDF

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Publication number
WO2018176719A1
WO2018176719A1 PCT/CN2017/096611 CN2017096611W WO2018176719A1 WO 2018176719 A1 WO2018176719 A1 WO 2018176719A1 CN 2017096611 W CN2017096611 W CN 2017096611W WO 2018176719 A1 WO2018176719 A1 WO 2018176719A1
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WO
WIPO (PCT)
Prior art keywords
blade
shading
blades
shutter device
motion
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PCT/CN2017/096611
Other languages
English (en)
French (fr)
Inventor
王彦飞
章富平
贾翔
Original Assignee
上海微电子装备（集团）股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 上海微电子装备（集团）股份有限公司 filed Critical 上海微电子装备（集团）股份有限公司
Priority to US16/499,761 priority Critical patent/US10928704B2/en
Priority to SG11201909052R priority patent/SG11201909052RA/en
Priority to EP17903787.4A priority patent/EP3605220A4/en
Priority to JP2019553064A priority patent/JP6955025B2/ja
Priority to KR1020197032388A priority patent/KR102289586B1/ko
Publication of WO2018176719A1 publication Critical patent/WO2018176719A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/58—Means for varying duration of "open" period of shutter
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters
    • G03B9/10—Blade or disc rotating or pivoting about axis normal to its plane
    • G03B9/14—Two separate members moving in opposite directions
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption

Definitions

  • the present invention relates to the field of semiconductor manufacturing technologies, and in particular, to a shutter device.
  • the exposure dose accuracy is an extremely important index.
  • the exposure dose accuracy index is required to be less than 1%, and the exposure dose precision control is controlled by the opening-closing action of the shutter blade.
  • the shutter blade open-close completion time is tens of milliseconds or even ten milliseconds. It can be seen that the working condition of the shutter is a high-speed start-stop, high-temperature and severe working condition, and has very high requirements on shutter performance and reliability.
  • the shutters mainly used in the lithography machine exposure system are a rotary shutter driven by a rotary motor and a reciprocating oscillating shutter driven by a voice coil motor. Since the rotary shutter speed is not high, the low-dose exposure cannot be satisfied, and the reciprocating oscillating shutter currently adopts an open-loop control structure, which has poor reliability, and the structure is sensitive to temperature changes, the dose precision control is unstable, and the light leakage phenomenon is frequent. hair.
  • the invention introduces a shutter device, which can effectively meet the requirements of various exposure doses, and solve the problems of low exposure dose accuracy and light leakage.
  • a shutter device includes a shading motion module and a motion control module, wherein the motion control module controls movement of the shading motion module, the shading motion module includes a shading unit, a driving unit, and a signal measuring unit, and the shading unit includes two a blade, the motion control module is configured to send a control signal, the driving unit is configured to receive the control signal and drive the two leaves The signal measuring unit is configured to measure and feed back the operating states of the two blades to the motion control module in real time, and the motion control module is configured to update the control signal according to the operating state of the feedback.
  • the shutter device comprises two driving units and two signal measuring units, which are arranged in one-to-one correspondence with the two blades.
  • the driving unit comprises a motor, and the motor drives the corresponding blade motion to realize opening and closing of the two blades.
  • the shading motion module further includes two fixed shaft units, each of the fixed shaft units includes a bearing seat, a rotating shaft and a bearing, the bearing is disposed in the bearing housing, and the rotating shaft penetrates the bearing
  • Each of the two blades is coupled to a corresponding one of the rotating shafts and disposed on one side of the rotating shaft, and each of the two driving units is coupled to the corresponding rotating shaft and disposed at the Rotate the other side of the shaft.
  • the shading unit further includes two vane adapter plates, and each of the two blades is connected to the corresponding rotating shaft by a corresponding one of the vane adapter plates.
  • a heat shield is disposed between the blade adapter plate and the corresponding rotating shaft.
  • the motion control module is configured to control the rotation angle error ⁇ of each blade according to the following formula to ensure that the two blades do not leak when closed:
  • M is the overlap of the two blades
  • M min is the minimum overlap of the two blades
  • R is the radius of rotation of each blade.
  • the signal measuring unit comprises a position sensor for detecting the position of the two blades in real time.
  • the signal measuring unit comprises a position sensor for detecting the position of the corresponding blade in real time.
  • the position sensor comprises a rotary encoder or a circular grating, and the rotary encoder or the circular grating is fixed at an end of the corresponding rotating shaft to detect the rotation angle of the corresponding blade in real time.
  • the position sensor comprises a linear encoder.
  • the motion control module includes a processor, a trigger, and a controller, and the processor issues an exposure instruction to the trigger, the trigger triggers the controller according to the exposure instruction, and the processor passes the communication interface and controls The device communicates, and the controller controls the movement of the shading motion module according to information sent by the processor.
  • the shutter device provided by the present invention includes a shading motion module and a motion control module, and the motion control module controls movement of the shading motion module, the shading motion module includes a shading unit, a driving unit, and a signal measuring unit, and the shading unit Including two blades, the motion control module sends a control signal, the driving unit receives the control signal and drives the two blades to operate, and the signal measuring unit measures and feeds back the operating states of the two blades in real time.
  • Providing a motion control module, the motion control module updating the control signal according to the operating state of the feedback solving the problem that the existing shutter exposure dose accuracy is not high and light leakage, satisfying the requirements of various exposure doses, and controlling the precision of the exposure dose .
  • the controller controls the motor to control the running state of the blade, and the position sensor feeds the state of the blade to the controller in real time, and the controller further adjusts the driving force of the motor to form a closed loop control, effectively solving the shutter closure. Light leakage problem in the state.
  • FIG. 1 is a block diagram of a shutter device according to an embodiment of the present invention.
  • FIG. 2 is a structural view of a shading motion module according to an embodiment of the present invention.
  • Figure 3 is a cross-sectional view showing a fixed shaft unit in accordance with an embodiment of the present invention.
  • FIG. 4 is a schematic view showing a blade in a closed state according to an embodiment of the present invention.
  • FIG. 5 is a timing chart of an exposure process in accordance with an embodiment of the present invention.
  • FIG. 6 is a schematic diagram of a blade position simulation trajectory according to an embodiment of the present invention.
  • Figure 7 is a simulation diagram of a blade speed according to an embodiment of the present invention.
  • Figure 8 is a simulation diagram of blade acceleration according to an embodiment of the present invention.
  • FIG. 9 is an error simulation analysis of a blade motion process according to an embodiment of the present invention.
  • the existing shutter device has problems of unstable dose control and light leakage.
  • the inventors have developed a novel shutter device through long-term research and experiments to solve the above problems.
  • the present invention provides a shutter device including a shading motion module and a motion control module, wherein the motion control module controls movement of the shading motion module, the shading motion module includes a shading unit, a driving unit, and a signal measuring unit, and the shading unit Including two blades, the motion control module sends a control signal, the driving unit receives the control signal and drives the two blades to operate, and the signal measuring unit measures and feeds back the operating states of the two blades in real time. And for the motion control module, the motion control module updates the control signal according to the operating state of the feedback.
  • FIG. 1 is a block diagram of a shutter device according to an embodiment of the present invention, as shown in FIG.
  • the device includes a shading motion module 1 and a motion control module 2, and the motion control module 2 controls the movement of the shading motion module 1;
  • FIG. 2 is a structural diagram of the shading motion module 1 according to an embodiment of the present invention, as shown in FIG.
  • the shading motion module includes a fixed shaft unit 10, a signal measuring unit 20, a shading unit 30, and a driving unit 40.
  • the shading motion module 1 includes two sets of the signal measuring unit 20, a shading unit 30, and a driving unit 40.
  • the fixed shaft unit 10 connects the two sets of the signal measuring unit 20, the shading unit 30 and the driving unit 40, and makes them substantially symmetrically distributed.
  • the shutter device is opened by the back movement of the two sets of shading units 30, and the two sets of shading are provided.
  • the unit 30 is moved toward each other to effect closure of the shutter device.
  • the fixed axis unit 10 is connected to the driving unit 40 and the light shielding unit 30, and the signal measuring unit 20 is connected to the light shielding unit 30, and continues to refer to FIG.
  • the motion control module 2 includes a processor 70, a flip flop 60 and a controller 80.
  • the processor 70 communicates with the controller 80 via a communication interface, and the processor 70 issues an exposure command to the trigger 60.
  • the controller 80 is triggered according to an exposure command, the controller 80 controls the operating state of the shading unit 30, and the signal measuring unit 20 feeds back the operating state of the shading unit 30 to the processor 70 in real time.
  • the shading unit 30 includes a blade adapter plate 301 and a blade 302 that is fixed to the blade adapter plate 301 by screws.
  • the fixed shaft unit 10 includes a bearing housing. 104.
  • the rotating shaft 102 penetrates through the bearing housing 104.
  • the bearing is preferably a ceramic bearing.
  • the bearing 101 is fixed on the bearing housing 104, and the heat insulating plate 103 is fixed.
  • the blade adapter plate 301 of the light shielding unit 30 is coupled to the rotating shaft 102 and disposed on one side of the fixed shaft unit 10, and the driving unit 40 is connected to the rotating shaft 102 and disposed at the rotating shaft 102.
  • the other side of the fixed shaft unit 10 is described.
  • the drive unit 40 includes a motor, preferably a voice coil motor.
  • the voice coil motor includes a voice coil motor magnet 401 and a voice coil motor coil 402, wherein the voice coil motor coil 402 is fixed on the rotating shaft 102, and the voice coil motor coil 402 can drive the rotating shaft 102 to rotate.
  • the outer ring of the bearing 101 is fixed to the bearing housing 104.
  • the blade adapter plate 301 is fixed on the rotating shaft 102, and the blade 302 is fixed on the blade adapter plate 301 by screws, so that the voice coil motor drives the rotating shaft 102 to drive the blade 302 to rotate, thereby realizing the opening and closing action of the blade 302.
  • the heat shield 103 is fixed to the rotating shaft 102 to block heat conduction of the blade adapter plate 301 and the blade 302.
  • the heat insulation board 103 is preferably a glass fiber heat insulation sheet fixed between the rotating shaft 102 and the blade adapter plate 301 to block heat conduction on the blade adapter plate 301, thereby minimizing the heat conduction effect of the blade 302 and improving The running performance of the shutter.
  • the voice coil motor coil 402 drives the rotating shaft 102 to rotate, and the rotating shaft 102 is coupled to the blade adapter plate 301 to drive the blade 302 to rotate to realize the opening and closing of the blade 302.
  • the signal measuring unit 20 comprises a position sensor 201, which preferably comprises a rotary encoder fixed at the end of the rotary shaft 102, which can also be used with a circular scale or a straight line Instead of the grating ruler, the position sensor 201 can detect the rotation angle and position of the blade 302 in real time, and finally feed back the information to the processor 70.
  • the processor 70 calculates the current exposure dose according to the exposure dose size and the control accuracy requirement.
  • the rotary encoder 201 always detects the rotation angle of the blade 302 in real time, and feeds the information back to the processor 70.
  • the processor 70 issues an instruction to the controller 80 according to the feedback information, and passes the controller.
  • the 80 controls the driving force of the motor to adjust the operating state of the blade to form a closed loop control that controls the exposure dose accuracy and the exposure dose size.
  • the blade After the exposure is over, the blade needs to be closed (as shown in Figure 4).
  • the overlap of the two blades is M. Since the light leakage is not allowed under the blade closing condition, the minimum overlap amount of the blade M min is required, and the blade rotation is required.
  • the radius is R, and the angular error of the blade in the closed state is ⁇ , then ⁇ must satisfy the following formula:
  • the above-mentioned blade rotation radius R refers to the linear distance from the center of rotation to the farthest end of the blade shading contour.
  • the blade rotation radius R is the longest straight line distance from the shaft or the bearing center to the shading point of the blade. The distance between that point.
  • the amount of overlap M of the two blades can be defined as the linear distance between the opposite straight contours of the two blades when the blade is in the closed state.
  • the ordinate indicates a rotation angle of the blade opening outward from the closed state, the ordinate is zero (ie, the rotation angle is 0 degrees) corresponding to the closed position of the blade;
  • the abscissa indicates time.
  • the T1 time period represents the process of opening the blade, and the exposure is started at this time;
  • the T2 time period is a process in which the blade is completely opened, at which time the blade is in a state of being fully opened and remaining stationary, and the exposure is continued;
  • the T3 time period is the blade being closed. Process, the exposure ends. The smaller the T1 and T3, the better the demand for small dose exposure, and the higher the exposure accuracy.
  • the blade opening/closing time is 12 ms
  • the stroke ie, the angle at which the blade rotates from the closed state to the fully open state
  • 20° 20° (0.349 rad)
  • the radius R of the blade rotation is 100 mm
  • the overlap amount M when the two blades are in the closed state is 8 mm.
  • the minimum overlap amount is set to 6 mm.
  • Figure 6 is a simulated trajectory of the blade position, where the abscissa represents time (s) and the ordinate represents blade position (rad).
  • FIG. 7 is a velocity simulation diagram of the blade, wherein the abscissa represents time (s) and the ordinate represents the angular velocity (rad/s) of the blade.
  • the blade is in an accelerated state for the first 6 ms, and the maximum angular velocity reaches 58.18 rad/s.
  • the blade is in a decelerating state for 6-12 ms until it is stationary, and the blade is at rest after 12 ms.
  • Figure 8 is a simulation diagram of the acceleration of the blade, where the abscissa represents time (s), the ordinate represents the acceleration of the blade (rad/s 2 ), the acceleration of the first 6 ms of the blade is 9696 rad/s 2 , and the acceleration after 6 ms of the blade is -9696 rad/s. 2 . 9 is an error simulation analysis during the movement of the blade described above, wherein the abscissa represents time (s) and the ordinate represents angle error (rad), that is, the control value of the blade rotation angle of the motion control module 2 and the actual rotation angle of the blade. The difference between the two can be seen from Fig. 9. The maximum error of the whole process is 6.776mrad.
  • the allowable angle error of the shutter without leaking is 10mrad. It can be seen that the shutter device provided by the present invention satisfies the high speed state. It does not leak light, and has high exposure accuracy, which can also meet the needs of low-dose exposure.
  • the present invention also provides a closed loop control method, which is implemented by using the above shutter device, and includes the following steps:
  • Step 1 The motion control module sends a control signal
  • Step 2 The driving unit drives the shading unit to operate
  • Step 3 The signal measuring unit detects the running state of the shading unit in real time and feeds back to the motion control module;
  • Step 4 The motion control module sends a control signal to the driving unit according to the dose requirement and the detection amount of the signal measuring unit;
  • Step 5 The driving unit adjusts the driving force according to the control signal sent by the motion control module to control the running state of the shading unit.
  • the processor 70 issues an exposure command to the trigger 60.
  • the trigger 60 issues an instruction to open the blade 302 to the controller 80.
  • the controller 80 issues an instruction to the motor.
  • the motor drives the rotating shaft 102 to open the blade 302.
  • the position sensor 201 detects the blade 302.
  • the operating state is fed back to the processor 70.
  • the processor 70 adjusts the exposure command through the trigger 60 according to the feedback information, and the controller 80 adjusts the driving command in real time according to the exposure command, and adjusts the motion state of the blade 302 in real time.
  • the blade 302 is closed, and the switch sensor feeds back the state of the blade to the processor 70,
  • the processor 70 waits to start a new exposure according to a preset condition.
  • the processor 70 is a PPC board
  • the trigger 60 is an ISB board
  • the controller 80 can be, for example, a commercial controller.
  • the ISB board is responsible for triggering the commercial controller, which is responsible for driving the motor and position sensor 201 for closed loop control of the position loop.
  • the PPC board cartoon has too many serial port RS232 communication and communication with the commercial controller.
  • the specific control process consists of the following two processes:
  • PPC board and ISB board control flow according to different doses to control: a. PPC board issued an exposure command to the ISB board; b. ISB board issued Trig open (open blade) command according to the drive command To the commercial controller; c. After calculating the different shutter hold times for different doses, the ISB board issues a Trig close command to the commercial controller according to the drive command.
  • the commercial controller performs corresponding operations according to the ISB board instruction: a. After the commercial controller is powered on, the search operation is performed, and then the state is kept closed with a certain small current; b. The servo waits for the Trig command of the ISB board, and performs corresponding Open and close the opening and closing action.
  • the blade opening/closing time is 12ms
  • the stroke is 20°, that is, the blade is in a high speed state when the blade is opened and closed
  • the radius R of the blade rotation is 100 mm
  • the coincidence amount M when the two blades are in the closed state is 8 mm, so as to ensure no light leakage in the closed state
  • the minimum overlap is set to 6mm and the servo period is set to 333 ⁇ s.
  • Figure 6 is a simulated trajectory of the blade position, where the abscissa represents time (s) and the ordinate represents blade position (rad). As can be seen from Figure 6, the blade opening time is 12 ms and the maximum running position of the blade is 0.349 rad.
  • Figure 7 is a velocity simulation diagram of the blade, wherein the abscissa represents time (s) and the ordinate represents the angular velocity (rad/s) of the blade.
  • the blade is in an accelerated state for the first 6 ms, and the maximum angular velocity reaches 58.18 rad/s.
  • the blade is in a decelerating state for 6-12 ms until it is stationary, and the blade is at rest after 12 ms.
  • Figure 8 is a simulation diagram of the acceleration of the blade, in which the abscissa represents time (s), the ordinate represents the acceleration of the blade (rad/s 2 ), the acceleration in the first 6ms of the blade is 9696rad/s 2 , and the acceleration in the 6ms after the blade is -9696rad/s. 2 .
  • Figure 9 is an error simulation analysis of the above-mentioned blade motion, in which the abscissa represents time (s) and the ordinate represents angle error (rad).
  • the maximum error of the whole process is 6.776 mrad, and according to the formula The calculation of 1 shows that the allowable angle error of the shutter without leaking is 10mrad. It can be seen that the parameters set by the sample satisfy the shutter light-free use requirement under the shutter high-speed closed-loop control state, and the reliability is good.
  • the invention provides a shutter device and method, comprising a shading motion module and a motion control module, wherein the motion control module controls movement of the shading motion module, the shading motion module comprises a shading unit, a driving unit and a signal measuring unit.
  • the motion control module sends a control signal
  • the driving unit receives the control signal and controls the operation of the shading unit
  • the signal measuring unit feeds back the running state of the shading unit to the motion control module in real time
  • the motion control module sends out according to the running state of the feedback. Real-time control signals.
  • the invention solves the problems of low precision of the shutter exposure dose and light leakage, satisfies the requirements of various exposure doses, and controls the precision of the exposure dose.
  • the controller controls the motor to control the running state of the blade, and the rotary encoder feeds the state of the blade to the controller in real time, and the controller further adjusts the driving force of the motor to form a closed loop control, effectively solving the shutter. Light leakage problem in the closed state.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shutters For Cameras (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

一种快门装置，包括遮光运动模块(1)和运动控制模块(2)，运动控制模块(2)控制遮光运动模块(1)运动，遮光运动模块(1)包括遮光单元(30)、驱动单元(40)和信号测量单元(20)，遮光单元(30)包括两个叶片(302)，运动控制模块(2)发出一控制信号，驱动单元(40)接收控制信号并驱动两个叶片(302)运行，信号测量单元(20)实时测量并反馈两个叶片(302)的运行状态给运动控制模块(2)，运动控制模块(2)依据反馈的运行状态更新控制信号，解决了现有的快门曝光剂量精度不高以及漏光的问题，满足各种曝光剂量的需求，控制曝光剂量的精度。

Description

一种快门装置 技术领域
本发明涉及半导体制造技术领域，特别涉及一种快门装置。
背景技术
光刻机曝光系统中，曝光剂量精度是一极其重要指标，一般曝光剂量精度指标要求低于1％，曝光剂量精度的控制是通过快门叶片的打开-关闭动作控制。对于高功率汞灯光源而言，快门叶片打开-关闭的完成时间为几十毫秒甚至十几毫秒。可见，快门的工作工况为高速启停、高温的较恶劣工况，对快门性能及可靠性有着非常高的要求。
目前光刻机曝光系统主要应用的快门为旋转电机驱动的旋转式快门和音圈电机驱动的往复摆动式快门。由于旋转式快门速度不高，无法满足小剂量曝光，而往复摆动式快门目前采用的是开环控制结构，其可靠性较差，且结构对温度变化敏感，剂量精度控制不稳定，漏光现象频发。
本发明介绍了一种快门装置，可有效满足各种曝光剂量的要求，解决曝光剂量精度不高及漏光等问题。
发明内容
本发明的目的在于提供一种快门装置，以解决现有的快门曝光剂量精度不高以及漏光的问题，满足各种曝光剂量的需求，控制曝光剂量的精度。
一种快门装置，包括遮光运动模块和运动控制模块，所述运动控制模块控制所述遮光运动模块运动，所述遮光运动模块包括遮光单元、驱动单元和信号测量单元，所述遮光单元包括两个叶片，所述运动控制模块用于发出一控制信号，所述驱动单元用于接收所述控制信号并驱动所述两个叶 片运行，所述信号测量单元用于实时测量并反馈所述两个叶片的运行状态给运动控制模块，所述运动控制模块用于依据反馈的运行状态更新所述控制信号。
可选的，所述快门装置包括两个驱动单元和两个信号测量单元，与所述两个叶片一一对应设置。
可选的，所述驱动单元包括电机，所述电机驱动对应的叶片运动实现所述两个叶片的开合。
可选的，所述遮光运动模块还包括两个固定轴单元，每个所述固定轴单元包括轴承座、旋转轴和轴承，所述轴承设置在轴承座中，所述旋转轴贯穿所述轴承，所述两个叶片中的每一个连接对应的所述旋转轴并设置在所述旋转轴的一侧，所述两个驱动单元中的每一个连接对应的所述旋转轴并设置在所述旋转轴的另一侧。
可选的，所述遮光单元还包括两个叶片转接板，所述两个叶片中的每一个通过对应的所述叶片转接板与对应的所述旋转轴连接。
可选的，所述叶片转接板与对应的所述旋转轴之间设有隔热板。
可选的，所述运动控制模块用于根据如下公式来控制每个叶片的旋转角度误差α，以保证所述两个叶片闭合时不漏光：
Figure PCTCN2017096611-appb-000001
其中，M为两个叶片的重合量，Mmin为两个叶片的最小重合量，R为每个叶片的旋转半径。
可选的，所述信号测量单元包括位置传感器，所述位置传感器用于实时检测所述两个叶片的位置。
可选的，所述信号测量单元包括位置传感器，所述位置传感器用于实时检测对应的所述叶片的位置。
可选的，所述位置传感器包括旋转编码器或圆形光栅尺，所述旋转编码器或圆形光栅尺固定在对应的旋转轴的末端，实时检测对应的所述叶片的旋转角度。
可选的，所述位置传感器包括直线光栅尺。
可选的，所述运动控制模块包括处理器、触发器和控制器，所述处理器给触发器下达曝光指令，所述触发器根据曝光指令触发控制器，所述处理器通过通讯接口与控制器进行通讯，所述控制器根据处理器发送的信息控制所述遮光运动模块运动。
在本发明提供的快门装置，包括遮光运动模块和运动控制模块，所述运动控制模块控制所述遮光运动模块运动，所述遮光运动模块包括遮光单元、驱动单元和信号测量单元，所述遮光单元包括两个叶片，所述运动控制模块发出一控制信号，所述驱动单元接收所述控制信号并驱动所述两个叶片运行，所述信号测量单元实时测量并反馈所述两个叶片的运行状态给运动控制模块，所述运动控制模块依据反馈的运行状态更新所述控制信号，解决了现有的快门曝光剂量精度不高以及漏光的问题，满足各种曝光剂量的需求，控制曝光剂量的精度。
进一步的，通过控制器对电机的控制，控制叶片的运行状态，并且位置传感器将叶片的状态实时反馈给控制器，控制器进而对电机的驱动力进行调整，从而形成闭环控制，有效解决快门闭合状态下的漏光问题。
附图说明
图1是本发明一实施例的快门装置的架构图；
图2是本发明一实施例的遮光运动模块结构图；
图3为本发明一实施例中固定轴单元的截面图；
图4是本发明一实施例的叶片处于闭合状态的示意图；
图5是本发明一实施例的曝光过程时间图；
图6是本发明一实施例的叶片位置仿真轨迹图；
图7是本发明一实施例的叶片速度仿真图；
图8是本发明一实施例的叶片加速度仿真图；
图9是本发明一实施例的叶片运动过程中的误差仿真分析。
图中标号：1-遮光运动模块；2-运动控制模块；10-固定轴单元；20-信号测量单元；30-遮光单元；40-驱动单元；60-处理器；70-触发器；80-控制器；101-轴承；102-旋转轴；103-隔热板；104-轴承座；201-位置传感器；301-旋转转接板；302-叶片；401-音圈电机磁铁；402-音圈电机线圈。
具体实施方式
以下结合附图和具体实施例对本发明提出的快门装置作进一步详细说明。根据下面说明和权利要求书，本发明的优点和特征将更清楚。需说明的是，附图均采用非常简化的形式且均使用非精准的比例，仅用以方便、明晰地辅助说明本发明实施例的目的。
现有的快门装置存在剂量精度控制不稳定以及漏光的问题，本发明人经过长期的研究和实验，研发了一种新型的快门装置，解决了上述问题。
本发明提供一种快门装置，包括遮光运动模块和运动控制模块，所述运动控制模块控制所述遮光运动模块运动，所述遮光运动模块包括遮光单元、驱动单元和信号测量单元，所述遮光单元包括两个叶片，所述运动控制模块发出一控制信号，所述驱动单元接收所述控制信号并驱动所述两个叶片运行，所述信号测量单元实时测量并反馈所述两个叶片的运行状态给运动控制模块，所述运动控制模块依据反馈的运行状态更新所述控制信号。
图1是本发明一实施例的快门装置的架构图，如图1所示，所述快门 装置包括遮光运动模块1和运动控制模块2，运动控制模块2控制所述遮光运动模块1运动；图2是本发明一实施例的遮光运动模块1的结构图，如图2所示，所述遮光运动模块包括固定轴单元10、信号测量单元20、遮光单元30和驱动单元40，在本实施例中，遮光运动模块1包括两套所述信号测量单元20、遮光单元30和驱动单元40，所述固定轴单元10将两套信号测量单元20、遮光单元30和驱动单元40进行连接，并使他们基本对称分布，通过两套遮光单元30相背运动实现快门装置的开启，通过两套遮光单元30相向运动来实现快门装置的闭合。为方便说明，以下将只对其中一套结构进行说明，所述固定轴单元10连接所述驱动单元40和遮光单元30，所述信号测量单元20与遮光单元30连接，继续参考图1，所述运动控制模块2包括处理器70、触发器60和控制器80，所述处理器70通过通讯接口与控制器80进行通讯，所述处理器70给触发器60下达曝光指令，所述触发器60根据曝光指令触发控制器80，所述控制器80控制遮光单元30的运行状态，信号测量单元20实时反馈遮光单元30的运行状态给处理器70。
所述遮光单元30包括叶片转接板301和叶片302，所述叶片302通过螺钉固定在叶片转接板301上。
图3为本发明一实施例中固定轴单元的截面图，沿着图2中所示A-A’的虚线切开得到图3，如图3所示，所述固定轴单元10包括轴承座104、旋转轴102、轴承101和隔热板103，所述旋转轴102贯穿轴承座104，所述轴承优选为陶瓷轴承，所述轴承101固定在轴承座104上，所述隔热板103固定在旋转轴102上，所述遮光单元30的叶片转接板301连接所述旋转轴102并设置在所述固定轴单元10一侧，所述驱动单元40连接所述旋转轴102并设置在所述固定轴单元10另一侧。
请继续参考图2和图3，所述驱动单元40包括电机，优选为音圈电机， 所述音圈电机包括音圈电机磁铁401和音圈电机线圈402，其中音圈电机线圈402固定在旋转轴102上，音圈电机线圈402可驱动旋转轴102旋转。轴承101外圈固定在轴承座104上。叶片转接板301固定在旋转轴102上，而叶片302通过螺钉固定在叶片转接板301上，这样音圈电机驱动旋转轴102，可带动叶片302旋转，实现叶片302的打开和关闭动作，隔热板103固定在旋转轴102上，阻隔叶片转接板301和叶片302的热传导。所述隔热板103优选为玻璃纤维隔热片，固定在旋转轴102和叶片转接板301之间，可以阻隔叶片转接板301上的热传导，将叶片302的热传导效应降低到最小，提高快门的运行性能。
请结合图1、图2和图3，所述音圈电机线圈402驱动旋转轴102旋转，旋转轴102与所述叶片转接板301连接，从而驱动叶片302旋转，实现叶片302的打开和关闭，所述信号测量单元20包括位置传感器201，所述位置传感器优选的包括旋转编码器，所述旋转编码器固定在旋转轴102的末端，所述旋转编码器也可以用圆形光栅尺或者直线光栅尺代替，所述位置传感器201可以实时的检测叶片302的旋转角度和位置，并将信息最终反馈到处理器70，处理器70根据曝光的剂量大小和控制精度需求，计算出当前的曝光剂量和理论曝光剂量的差值，如果差值未达到控制精度，则停止曝光并关闭快门，否则继续曝光直到满足剂量需求。在持续曝光的过程中，旋转编码器201一直实时的检测叶片302的旋转角度，并将信息反馈到处理器70中，处理器70根据反馈的信息,下达指令给控制器80，并通过控制器80控制电机的驱动力，从而调整叶片的运行状态，从而形成一个闭环控制，控制曝光剂量精度和曝光剂量大小。
曝光结束后，叶片需要处于闭合状态(如图4所示)，两叶片的重合量为M，由于叶片闭合情况下不允许有漏光现象发生，因此叶片最小重合量 Mmin有要求，设叶片旋转半径为R，关闭状态下叶片的角度误差为α，则α必须满足如下公式：
Figure PCTCN2017096611-appb-000002
上述叶片旋转半径R指旋转中心到叶片遮光处轮廓最远端的直线距离，在图2所示实施例中，叶片旋转半径R即为转轴或者轴承中心到叶片遮光处轮廓上直线距离最长的那个点之间的距离。两叶片的重合量M可定义为叶片处于闭合状态时，两叶片相对的直线轮廓之间的直线距离。
图5是本发明一实施例的曝光过程时间图，纵坐标表示叶片自闭合状态向外打开的旋转角度，纵坐标为零(即旋转角度为0度)对应叶片的闭合位置；横坐标表示时间，其中T1时间段表示叶片打开的过程，此时开始曝光；T2时间段为叶片完全打开的过程，此时的叶片处于完全打开且维持不动的状态，曝光持续；T3时间段为叶片关闭的过程，曝光结束。其中T1和T3越小，越能满足小剂量曝光的需求，曝光精度越高。
以下以一具体的仿真案例来说明本发明的有益效果，设计叶片打开/关闭的时间为12ms，行程(即叶片从闭合状态到完全打开状态所旋转的角度)为20°(0.349rad)，打开和关闭时叶片处于高速状态，叶片旋转的半径R为100mm，两叶片处于闭合状态时的重合量M为8mm，为保证关闭状态不漏光，最小重合量设置为6mm。图6是叶片位置的仿真轨迹图，其中横坐标表示时间(s)，纵坐标代表叶片位置(rad)，由图6可知，叶片打开的时间为12ms，叶片的运行的最大位置为0.349rad。图7是叶片的速度仿真图，其中横坐标表示时间(s)，纵坐标表示叶片的角速度(rad/s)，由图7可知，前6ms叶片处于加速状态，最大角速度达到58.18rad/s，6-12ms叶片处于减速状态直到静止，12ms以后叶片处于静止状态。图8是叶片的加速度仿真图，其中横坐标表示时间(s)，纵坐标表示叶片的加速度(rad/s2)，叶片 前6ms加速度为9696rad/s2，叶片后6ms加速度为-9696rad/s2。图9是上述叶片运动过程中的误差仿真分析，其中横坐标表示时间(s)，纵坐标表示角度误差(rad)，也就是运动控制模块2对叶片旋转角度的控制值与叶片实际旋转角度之间的差值，由图9可以看出，整个过程的最大误差为6.776mrad，而根据公式1的计算可知，快门不漏光的允许角度误差为10mrad，可见本发明提供的快门装置满足高速状态下不漏光的使用要求，并且具有很高的曝光精度，也能满足小剂量曝光的需求。
相应的，本发明还提供一种闭环控制方法，采用上述快门装置来实现，包括以下步骤：
步骤1：运动控制模块发出控制信号；
步骤2：驱动单元驱动遮光单元运行；
步骤3：信号测量单元实时检测遮光单元的运行状态并反馈给运动控制模块；
步骤4：运动控制模块根据剂量要求和所述信号测量单元的检测量给驱动单元发出控制信号；
步骤5：驱动单元根据运动控制模块发出控制信号调整驱动力，控制遮光单元的运行状态。
以下将结合上述实施例具体阐述闭环控制方法。
处理器70下达曝光指令给触发器60，触发器60下达打开叶片302的指令给控制器80，控制器80下达指令给电机，电机驱动旋转轴102进而使叶片302打开，位置传感器201检测叶片302的运行状态反馈给处理器70，处理器70根据反馈的信息通过触发器60调整曝光指令，进而控制器80根据曝光指令实时调整驱动指令，实时调整叶片302的运动状态。完成曝光后，叶片302关闭，开关传感器将叶片关闭的状态反馈给处理器70，所述 处理器70根据预设条件等待开始一次新的曝光。
下面结合具体器件型号进行说明，具体的，所述处理器70为PPC板卡，所述触发器60为ISB板卡，所述控制器80例如可以是商用控制器。ISB板卡负责触发商用控制器，商用控制器负责驱动电机与位置传感器201进行位置环的闭环控制。PPC板卡通过多串口卡的RS232通讯与商用控制器进行通讯交互。具体控制流程包含以下2个流程：
1)PPC板卡与ISB板卡控制流程，根据不同剂量进行相应控制：a.PPC板卡下发曝光指令给ISB板卡；b.ISB板卡根据驱动指令下发Trig open(打开叶片)指令给商用控制器；c.不同剂量下计算不同的快门保持时间之后，ISB板卡根据驱动指令下发Trig close(关闭叶片)指令给商用控制器。
2)商用控制器根据ISB板卡指令进行相应操作：a.商用控制器上电后进行搜零动作，之后以一定小电流保持关闭状态；b.伺服等待ISB板卡的Trig指令，进行相应的打开和关闭开闭动作。
为说明闭环控制快门的可靠性，特设计以下样例进行说明。叶片打开/关闭的时间为12ms，行程20°，即打开关闭时叶片处于高速状态，叶片旋转的半径R为100mm，两叶片处于闭合状态时的重合量M为8mm,为保证关闭状态不漏光，最小重合量设置为6mm，设置伺服周期为333μs。图6是叶片位置的仿真轨迹图，其中横坐标表示时间(s)，纵坐标代表叶片位置(rad)，由图6可知，叶片打开时间为12ms，叶片的运行的最大位置为0.349rad。图7是叶片的速度仿真图，其中横坐标表示时间(s)，纵坐标表示叶片的角速度(rad/s)，由图7可知，前6ms叶片处于加速状态，最大角速度达到58.18rad/s，6-12ms叶片处于减速状态直到静止，12ms以后叶片处于静止状态。图8是叶片的加速度仿真图，其中横坐标表示时间(s)，纵坐标表示叶片的加速度(rad/s2)，叶片前6ms加速度为9696rad/s2，叶片后 6ms加速度为-9696rad/s2。图9是上述叶片运动过程中的误差仿真分析，其中横坐标表示时间(s)，纵坐标表示角度误差(rad)，由图9可以看出，整个过程的最大误差为6.776mrad，而根据公式1的计算可知，快门不漏光的允许角度误差为10mrad，可见该样例设置的参数在快门高速闭环控制状态下满足快门不漏光使用要求，可靠性好。
本发明提供的一种快门装置及方法，包括遮光运动模块和运动控制模块，所述运动控制模块控制所述遮光运动模块运动，所述遮光运动模块包括遮光单元，驱动单元和信号测量单元，所述运动控制模块发出控制信号，所述驱动单元的接收所述控制信号并控制遮光单元运行，所述信号测量单元实时反馈遮光单元的运行状态给运动控制模块，运动控制模块依据反馈的运行状态发出实时控制信号。解决了现有的快门曝光剂量精度不高以及漏光的问题，满足各种曝光剂量的需求，控制曝光剂量的精度。
进一步的，通过控制器对电机的控制，控制叶片的运行状态，并且旋转编码器将叶片的状态实时反馈给控制器，控制器进而对电机的驱动力进行调整，从而形成闭环控制，有效解决快门闭合状态下的漏光问题。
上述描述仅是对本发明较佳实施例的描述，并非对本发明范围的任何限定，本发明领域的普通技术人员容易想到是用电缸、气缸来代替电机，以及其他显而易见的变更、修改均属于本发明的保护范围。

Claims (11)

  1. 一种快门装置，其特征在于，包括遮光运动模块和运动控制模块，所述运动控制模块控制所述遮光运动模块运动，所述遮光运动模块包括遮光单元、驱动单元和信号测量单元，所述遮光单元包括两个叶片，所述运动控制模块用于发出一控制信号，所述驱动单元用于接收所述控制信号并驱动所述两个叶片运行，所述信号测量单元用于实时测量并反馈所述两个叶片的运行状态给运动控制模块，所述运动控制模块用于依据反馈的运行状态更新所述控制信号。
  2. 如权利要求1所述的快门装置，其特征在于，所述快门装置包括两个驱动单元和两个信号测量单元，与所述两个叶片一一对应设置。
  3. 如权利要求2所述的快门装置，其特征在于，所述驱动单元包括电机，所述电机驱动对应的叶片运动实现所述两个叶片的开合。
  4. 如权利要求2所述的快门装置，其特征在于，所述遮光运动模块还包括两个固定轴单元，每个所述固定轴单元包括轴承座、旋转轴和轴承，所述轴承设置在轴承座中，所述旋转轴贯穿所述轴承，所述两个叶片中的每一个连接对应的所述旋转轴并设置在所述旋转轴的一侧，所述两个驱动单元中的每一个连接对应的所述旋转轴并设置在所述旋转轴的另一侧。
  5. 如权利要求4所述的快门装置，其特征在于，所述遮光单元还包括两个叶片转接板，所述两个叶片中的每一个通过对应的所述叶片转接板与对应的所述旋转轴连接。
  6. 如权利要求5所述的快门装置，其特征在于，所述叶片转接板与对应的所述旋转轴之间设有隔热板。
  7. 如权利要求1所述的一种快门装置，其特征在于，所述运动控制模 块用于根据如下公式来控制每个叶片的旋转角度误差α，以保证所述两个叶片闭合时不漏光：
    Figure PCTCN2017096611-appb-100001
    其中，M为两个叶片的重合量，Mmin为两个叶片的最小重合量，R为每个叶片的旋转半径。
  8. 如权利要求4所述的快门装置，其特征在于，所述信号测量单元包括位置传感器，所述位置传感器用于实时检测对应的所述叶片的位置。
  9. 如权利要求8所述的快门装置，其特征在于，所述位置传感器包括旋转编码器或圆形光栅尺，所述旋转编码器或圆形光栅尺固定在对应的旋转轴的末端，实时检测对应的所述叶片的旋转角度。
  10. 如权利要求8所述的快门装置，其特征在于，所述位置传感器包括直线光栅尺。
  11. 如权利要求1所述的快门装置，其特征在于，所述运动控制模块包括处理器、触发器和控制器，所述处理器给触发器下达曝光指令，所述触发器根据曝光指令触发控制器，所述处理器通过通讯接口与控制器进行通讯，所述控制器根据处理器发送的信息控制所述遮光运动模块运动。
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