WO2018150452A1 - 窒化膜成膜方法 - Google Patents
窒化膜成膜方法 Download PDFInfo
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- WO2018150452A1 WO2018150452A1 PCT/JP2017/005289 JP2017005289W WO2018150452A1 WO 2018150452 A1 WO2018150452 A1 WO 2018150452A1 JP 2017005289 W JP2017005289 W JP 2017005289W WO 2018150452 A1 WO2018150452 A1 WO 2018150452A1
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- nitride film
- gas
- processing chamber
- film forming
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- 150000004767 nitrides Chemical class 0.000 title claims abstract description 106
- 238000000034 method Methods 0.000 title claims abstract description 72
- 239000007789 gas Substances 0.000 claims abstract description 106
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 40
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910000077 silane Inorganic materials 0.000 claims abstract description 35
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 13
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000004888 barrier function Effects 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 150000003254 radicals Chemical class 0.000 description 34
- 238000005121 nitriding Methods 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 13
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- 238000009413 insulation Methods 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000002831 nitrogen free-radicals Chemical class 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
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- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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Abstract
Description
図1はこの発明の実施の形態1である窒化膜成膜方法を実行する成膜装置51の概略構成を示す説明図である。
窒素ガス・ガス流量:1slm(standard L/min)、
ウエハーステージ温度:400℃、
処理時間:60min、
処理室圧力:133Pa、
ラジカル発生器電力:100Wである。
図3はこの発明の実施の形態2である窒化膜成膜方法を実行する成膜装置52の概略構成を示す説明図である。
窒素ガス・ガス流量:1slm(standard L/min)、
水素ガス・ガス流量:10sccm、
ウエハーステージ温度:400℃、
処理時間:60min、
処理室圧力:133Pa、
ラジカル発生器電力:100Wである。
図4は実施の形態1及び実施の形態2の窒化膜成膜方法に関する、実験時の処理条件を表形式で示す説明図である。
実施の形態1の処理条件1及び処理条件1Aや実施の形態の処理条件2及び処理条件2Aでは、シラン系ガス(シリコンと水素を含む化合物で構成されたガス)としてジシランを示した。シラン系ガスとしてジシランに限らず、実施の形態2の処理条件2Bのようにモノシランを使用しても、トリシラン等の他のシラン系ガスを使用してもよい。
2 ウエハーステージ
10,10B 処理室
11,12,21 ガス供給口
16 排出口
20 ラジカル発生器
25 ラジカルガス通過口
51,52 成膜装置
Claims (5)
- 処理室(10)内に配置された基板(1)上に窒化膜を成膜する窒化膜成膜方法であって、
(a) シラン系ガスを前記処理室に供給するステップと、
(b) 窒素ラジカルガスを前記処理室に供給するステップと、
(c) 前記処理室内でプラズマ現象を生じさせることなく、前記ステップ(a) で供給されるシラン系ガスと前記ステップ(b) で供給される窒素ラジカルガスとを反応させて、前記基板上に窒化膜を成膜するステップとを備える、
窒化膜成膜方法。 - 請求項1記載の窒化膜成膜方法であって、
(d) 水素を前記処理室に供給するステップをさらに備える、
窒化膜成膜方法。 - 請求項1または請求項2記載の窒化膜成膜方法であって、
前記ステップ(b) は、前記処理室とは別に設けられたラジカル発生器(20)内で窒素ガスから窒素ラジカルガスを生成し、生成した窒素ラジカルガスを前記処理室に供給するステップを含み、
前記ラジカル発生器を加熱することで400℃以下の状態で窒素ラジカルガスを生成することを特徴とする、
窒化膜成膜方法。 - 請求項3記載の窒化膜成膜方法であって、
前記ラジカル発生器は、互いに対向した一対の電極間において誘電体を介して放電空間を形成し、前記一対の電極間に交流電圧を印加し、前記放電空間に誘電体バリア放電を発生させ、前記放電空間内に窒素ガスを通過させることにより、窒素ラジカルガスを得ることを特徴する、
窒化膜成膜方法。 - 請求項1または請求項2記載の窒化膜成膜方法において、
前記ステップ(c) は、シラン系ガスが分解する温度以上に前記基板の表面温度を加熱する加熱処理をさらに実行する、
窒化膜成膜方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2017/005289 WO2018150452A1 (ja) | 2017-02-14 | 2017-02-14 | 窒化膜成膜方法 |
JP2019500060A JP6963264B2 (ja) | 2017-02-14 | 2017-02-14 | 窒化膜成膜方法 |
KR1020197023474A KR102306573B1 (ko) | 2017-02-14 | 2017-02-14 | 질화막 성막 방법 |
US16/480,942 US10927454B2 (en) | 2017-02-14 | 2017-02-14 | Method of forming nitride film |
EP17896582.8A EP3588538B1 (en) | 2017-02-14 | 2017-02-14 | Method of forming nitride films |
CN201780086342.1A CN110352474B (zh) | 2017-02-14 | 2017-02-14 | 氮化膜成膜方法 |
TW106114470A TWI668740B (zh) | 2017-02-14 | 2017-05-02 | 氮化膜成膜方法 |
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- 2017-02-14 US US16/480,942 patent/US10927454B2/en active Active
- 2017-02-14 WO PCT/JP2017/005289 patent/WO2018150452A1/ja unknown
- 2017-02-14 CN CN201780086342.1A patent/CN110352474B/zh active Active
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Also Published As
Publication number | Publication date |
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KR102306573B1 (ko) | 2021-09-30 |
CN110352474B (zh) | 2023-03-17 |
JPWO2018150452A1 (ja) | 2019-11-07 |
TW201830485A (zh) | 2018-08-16 |
JP6963264B2 (ja) | 2021-11-05 |
EP3588538A1 (en) | 2020-01-01 |
US20190390332A1 (en) | 2019-12-26 |
KR20190102275A (ko) | 2019-09-03 |
CN110352474A (zh) | 2019-10-18 |
EP3588538A4 (en) | 2020-10-28 |
US10927454B2 (en) | 2021-02-23 |
TWI668740B (zh) | 2019-08-11 |
EP3588538B1 (en) | 2024-03-27 |
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