WO2017181860A1 - 柔性基板的剥离方法 - Google Patents
柔性基板的剥离方法 Download PDFInfo
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- WO2017181860A1 WO2017181860A1 PCT/CN2017/079893 CN2017079893W WO2017181860A1 WO 2017181860 A1 WO2017181860 A1 WO 2017181860A1 CN 2017079893 W CN2017079893 W CN 2017079893W WO 2017181860 A1 WO2017181860 A1 WO 2017181860A1
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- WO
- WIPO (PCT)
- Prior art keywords
- flexible substrate
- substrate
- base substrate
- protective film
- ultraviolet light
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3475—Displays, monitors, TV-sets, computer screens
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/02—2 layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/44—Number of layers variable across the laminate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/748—Releasability
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
Definitions
- the present disclosure relates to the field of flexible display technologies, and in particular, to a method of peeling a flexible substrate.
- the flexible display device is a display device formed based on a flexible substrate.
- Flexible display devices are becoming more and more widely used due to their characteristics of being deformable and bendable.
- the flexible substrate In the process of fabricating the flexible display device, the flexible substrate needs to be peeled off from the base substrate. Before the flexible substrate is peeled off, the protective film needs to be adhered to the flexible substrate through the adhesive, and then the flexible substrate is irradiated by laser stripping technology. The flexible substrate is separated from the substrate, and finally the tool is inserted from the side of the adhesive between the protective film and the substrate to cut the adhesive to remove the flexible substrate.
- the adhesive adheres again due to the high adhesive adhesion, making the peeling of the flexible substrate less efficient.
- a method of stripping a flexible substrate comprising the steps of:
- the method further includes:
- the barrier layer pattern Located at the periphery of the flexible substrate.
- step (c) includes:
- the ultraviolet light is transmitted through the base substrate to illuminate a predetermined area in the area covered by the protective film on the base substrate, and the predetermined area is a partial area around the flexible substrate.
- the barrier layer pattern comprises a plurality of sub-blocking structures arranged on a periphery of the flexible substrate.
- the sub-blocking structure is a rectangular structure.
- the width of the rectangular structure ranges from 0.1 mm to 1.0 mm, and the width direction of the rectangular structure is parallel to the arrangement direction of the rectangular structure.
- the ratio of the width of the rectangular structure to the width of the gap ranges from 1:1 to 1:5, and the width direction of the rectangular structure is parallel to the arrangement direction of the rectangular structure, and the gap width is The distance between the gaps of the adjacent two sub-blocking structures.
- the barrier layer pattern is formed of a metal material.
- the thickness of the barrier layer is in a range of to
- the flexible substrate is a transparent substrate.
- the method further includes:
- a display element is formed on the flexible substrate.
- FIG. 1 is a flow chart of a method for peeling a flexible substrate according to an embodiment of the present disclosure
- FIG. 2 is a side view of a laminate in a process of preparing a flexible substrate according to an embodiment of the present disclosure
- FIG. 3 is a side view of a laminate in a process of preparing a flexible substrate according to an embodiment of the present disclosure
- FIG. 4 is a top plan view of a laminate in a process of preparing a flexible substrate according to an embodiment of the present disclosure
- FIG. 5 is a laminate in a process of preparing a flexible substrate according to an embodiment of the present disclosure. Side view.
- FIG. 1 is a flow chart of a method for peeling a flexible substrate according to an embodiment of the present disclosure. As shown in FIG. 1, the method includes:
- Step 101 Form a flexible substrate on the base substrate, wherein a planar area of the flexible substrate is smaller than a planar area of the base substrate.
- a flexible substrate 2 is prepared on the base substrate 1. Further, the planar area of the flexible substrate 2 is smaller than the planar area of the base substrate 1, and the base substrate 1 completely covers the flexible substrate 2.
- the base substrate 1 is a transparent substrate. Preferably, the base substrate 1 is a glass substrate.
- the barrier layer pattern 3 may be formed on the base substrate 1 on which the flexible substrate 2 is formed, so that in the subsequent step, the periphery of the flexible substrate 2 is also That is, the region of the barrier layer pattern 3 and the base substrate 1 still have a certain adhesive force to prevent the flexible substrate 2 from falling off the base substrate 1.
- a patterning process such as photoresist coating, exposure, development, etching, and stripping of the photoresist may be performed.
- a barrier layer pattern 3 is formed on the base substrate 1. As shown in FIG. 4, the barrier pattern 3 is located on the periphery of the flexible substrate 2.
- the barrier layer pattern 3 includes a plurality of sub-barrier structures arranged on the periphery of the flexible substrate 2.
- the sub-blocking structure may be a rectangular structure or other graphic structure, which is not limited by the embodiments of the present disclosure.
- the width of the rectangular structure ranges from 0.1 mm (mm) to 1.0 mm, and the width direction of the rectangular structure is parallel to the arrangement direction of the rectangular structure, that is, The width direction of the rectangular structure is parallel to the boundary of the adjacent flexible substrate 2.
- the width of the rectangular structure is the distance between the two sides a and b of the sub-blocking structure.
- the width of the rectangular structure and the gap width between two adjacent sub-blocking structures may be arranged according to a certain ratio, the gap width being two adjacent sub-blocking structures.
- the width of the rectangular structure is The ratio of the gap width ranges from 1:1 to 1:5, and the sub-barrier structure can be arranged in different ratios in order to carry out the adhesion between the periphery of the flexible substrate 2 and the substrate 1 in a subsequent step. control.
- the barrier layer pattern 3 is formed of a metal material, and the metal material is selected from the group consisting of Ag, Al, Mo, and the like.
- the thickness of the barrier layer pattern 3 ranges from (A) to
- the display element may be formed on the flexible substrate 2 before the barrier layer pattern 3 is formed, or may be formed while forming the barrier layer pattern 3.
- a display element is formed on the flexible substrate 2.
- Step 102 attaching a protective film by ultraviolet light-reducing adhesive on the base substrate on which the flexible substrate is formed, wherein a planar area of the flexible substrate is smaller than a planar area of the protective film, and the protective film passes through The ultraviolet light reducing adhesive is adhered to the base substrate.
- the protective film 5 is pasted on the base substrate 1 on which the flexible substrate 2 is formed by ultraviolet (UV) degreaser 4 so that the protective film 5 can cover the area where the flexible substrate 2 is located and The area around the periphery of the flexible substrate 2.
- UV ultraviolet
- the "ultraviolet light-reducing adhesive” mentioned in the present disclosure which means an adhesive which can significantly reduce the viscosity when irradiated with ultraviolet light.
- the ultraviolet light reducing adhesive are, for example, an aliphatic urethane acrylate oligomer, an aromatic urethane acrylate oligomer, and the like.
- a commercially available product of the ultraviolet light-reducing adhesive is, for example, PL2360UV produced by Hongrui New Materials Co., Ltd.
- the planar area of the flexible substrate 2 is smaller than the planar area of the protective film 5. After the ultraviolet light-reducing adhesive 4 is irradiated with ultraviolet light, the adhesive force is greatly reduced to remove the flexible substrate 2 from the base substrate 1.
- Step 103 irradiate the substrate substrate with an area covered by the protective film on the substrate by ultraviolet light.
- the barrier layer pattern 3 may be disposed on the base substrate 1, the barrier layer pattern 3 may not be provided, in order to prevent the flexible substrate 2 from appearing on the substrate substrate 1 before the separation of the protective film 5 and the flexible substrate 2 is performed.
- all regions or partial regions covered by the protective film 5 on the base substrate 1 may be irradiated with ultraviolet light, and embodiments of the present disclosure are exemplified by the following two aspects:
- the barrier layer pattern 3 when the barrier layer pattern 3 is formed on the base substrate 1, it can be irradiated with ultraviolet light.
- the substrate substrate 1 may be irradiated with ultraviolet light from the substrate substrate 1 side toward the flexible substrate 2 side, and the irradiation region is the entire region covered by the protective film 5, and after being irradiated with ultraviolet light, the ultraviolet light is irradiated.
- the adhesion of the ultraviolet light-reducing adhesive 4 is largely lowered, so that the flexible substrate 2 can be easily removed from the base substrate 1 in a subsequent step.
- the barrier layer pattern 3 blocks the ultraviolet light during the ultraviolet light irradiation to prevent the ultraviolet light from being irradiated onto the barrier layer pattern 3 by the ultraviolet light.
- the glue 4 since the ultraviolet light-reducing adhesive 4 at the corresponding barrier pattern 3 is not irradiated by ultraviolet light, the adhesive force remains unchanged, so that the flexible substrate 2 and the substrate substrate 1 have a certain adhesive force, which can be protected. Before the film 5 and the flexible substrate 2 are peeled off, the occurrence of the flexible substrate 2 falling from the base substrate 1 or the like is prevented from occurring.
- a portion of the substrate substrate 1 covered by the protective film 5 may be irradiated with ultraviolet light:
- a predetermined area in a region covered by the protective film 5 on the base substrate 1 may be irradiated with ultraviolet light through the base substrate 1.
- the predetermined area is a partial area covered by the protective film 5, for example, the pre- The area may be a region where the flexible substrate 2 is located and a partial region of the periphery of the flexible substrate 2, that is, a portion covered by the protective film 5 except for a partial region of the periphery of the flexible substrate 2; the preset region is also It may be a partial area of the periphery of the flexible substrate 2, which is not limited by the embodiment of the present disclosure.
- the ultraviolet light-reducing adhesive 4 located in the predetermined area is greatly reduced in adhesion after being irradiated with ultraviolet light, so that the flexible substrate 2 can be easily peeled off from the base substrate 1 in a subsequent step.
- the ultraviolet light-reducing adhesive located outside the preset area is not irradiated by ultraviolet light, and the adhesive force remains unchanged, so that the flexible substrate 2 and the base substrate 1 have a certain adhesive force, and the protective film 5 and the flexible film can be performed. Before the substrate 2 is peeled off, the occurrence of the flexible substrate 2 falling from the base substrate 1 or the like is prevented from occurring.
- the substrate surface of the flexible substrate 2 may be rectangular, has four sides, and correspondingly has four peripheral regions.
- the region covered by the protective film 5 is irradiated with ultraviolet light, a part of the four peripheral regions may not be irradiated. Only the region where the flexible substrate 2 is located and the region of the remaining portion of the four peripheral regions of the periphery of the flexible substrate 2 are irradiated.
- the flexible substrate 2 can absorb ultraviolet light. Energy is transmitted through the flexible substrate 2 to the ultraviolet light located in the corresponding region of the flexible substrate 2 The amount of ultraviolet light on the viscous adhesive 4 is greatly reduced, and is close to none. Therefore, the ultraviolet viscous adhesive 4 located in the flexible substrate 2 region still maintains an effective adhesive force, and the adhesion of the protective film 5 and the flexible substrate 2 can be ensured. Keep the relative position of the two after peeling off.
- the barrier layer pattern 3 when the barrier layer pattern 3 is formed on the base substrate 1, a portion of the substrate substrate 1 covered by the protective film 5 may be irradiated with ultraviolet light, and the partial region may be referred to the second aspect.
- the definition of the preset area Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the above two aspects are intended to be included within the scope of the present invention. The embodiments of the present disclosure do not describe this.
- the ultraviolet light irradiation process may be continued for a preset duration, and the preset duration may be set by a specific case, which is not limited by the embodiment of the present disclosure.
- Step 104 After the ultraviolet light irradiation is completed, the protective film and the flexible substrate are peeled off from the base substrate.
- the flexible substrate 2 can absorb the energy of the ultraviolet light to generate heat, which can cause a gap between the flexible substrate 2 and the base substrate 1, and the adhesion between the flexible substrate 2 and the substrate 1 decreases.
- the flexible substrate 2 can be peeled off from the base substrate 1 with a small external force, and since the adhesion of the ultraviolet light-reducing adhesive 4 is lowered by the ultraviolet light, the blade can be easily peeled off from the base substrate 1 at the same time.
- the substrate 2 and the protective film 5 are adhered to each other, and the flexible substrate 2 and the protective film 5 are peeled off from each other, and the relative positions are not changed.
- a method for peeling off a flexible substrate provided by an embodiment of the present disclosure, by forming a flexible substrate on a base substrate, pasting a protective film on the base substrate on which the flexible substrate is formed by ultraviolet light ultraviolet light reducing adhesive, using ultraviolet light
- the region covered by the protective film on the substrate is irradiated through the base substrate, and after the ultraviolet light irradiation is completed, the protective film and the flexible substrate are peeled off from the substrate.
- the viscosity of the ultraviolet light reducing adhesive can be adjusted by the difference of the patterning of the barrier layer pattern, and the viscosity of the ultraviolet light reducing adhesive can also be adjusted by the difference of the ultraviolet irradiation region, thereby The integrated peeling of the flexible substrate and the protective film is achieved.
- the hardware may be used to execute the related hardware, and the program may be stored in a computer readable storage medium.
- the storage medium mentioned above may be a read only memory, a magnetic disk or an optical disk.
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Abstract
Description
Claims (11)
- 一种柔性基板的剥离方法,所述方法包括下列步骤:(a)在衬底基板上形成柔性基板,其中所述柔性基板的平面面积小于所述衬底基板的平面面积;(b)在形成有所述柔性基板的衬底基板上通过紫外光减黏胶粘贴保护膜,其中所述柔性基板的平面面积小于所述保护膜的平面面积,并且所述保护膜还通过所述紫外光减黏胶粘贴到所述衬底基板;(c)用紫外光透过所述衬底基板照射所述衬底基板上所述保护膜覆盖的区域;和(d)在所述紫外光照射完成后,从所述衬底基板剥离所述保护膜和所述柔性基板。
- 根据权利要求1所述的方法,其中在步骤(b)之前,所述方法还包括:在形成有所述柔性基板的衬底基板上形成阻挡层图形,所述阻挡层图形位于所述柔性基板的外围。
- 根据权利要求1所述的方法,其中步骤(c)包括:用所述紫外光透过所述衬底基板照射所述衬底基板上所述保护膜覆盖的区域中的预设区域,所述预设区域为所述柔性基板外围的部分区域。
- 根据权利要求2所述的方法,其中所述阻挡层图形包括多个子阻挡结构,所述多个子阻挡结构阵列排布在所述柔性基板的外围。
- 根据权利要求4所述的方法,其中所述子阻挡结构为矩形结构。
- 根据权利要求5所述的方法,其中所述矩形结构的宽度的取值范围为0.1mm至1.0mm,所述矩形结构的宽度方向与所述矩形结构的排布方向平行。
- 根据权利要求5所述的方法,其中所述矩形结构的宽度与空隙宽度的比例的取值范围为1∶1至1∶5,所述矩形结构的宽度方向与所述矩形结构的排布方向平行,所述空隙宽度为相邻两个子阻挡结构的间隙的距离。
- 根据权利要求2所述的方法,其中所述阻挡层图形由金属材料形成。
- 根据权利要求1所述的方法,其中所述柔性基板是透明基板。
- 根据权利要求1所述的方法,其中在步骤(b)之前,所述方法还包括:在所述柔性基板上形成显示元件。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US15/574,068 US10882221B2 (en) | 2016-04-18 | 2017-04-10 | Peeling method of flexible substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN201610244839.9 | 2016-04-18 | ||
CN201610244839.9A CN105895573B (zh) | 2016-04-18 | 2016-04-18 | 柔性基板的剥离方法 |
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WO2017181860A1 true WO2017181860A1 (zh) | 2017-10-26 |
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PCT/CN2017/079893 WO2017181860A1 (zh) | 2016-04-18 | 2017-04-10 | 柔性基板的剥离方法 |
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US (1) | US10882221B2 (zh) |
CN (1) | CN105895573B (zh) |
WO (1) | WO2017181860A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2019178746A1 (zh) * | 2018-03-20 | 2019-09-26 | 深圳市柔宇科技有限公司 | 柔性部件、电子装置及柔性盖板的剥离方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105895573B (zh) * | 2016-04-18 | 2018-09-04 | 京东方科技集团股份有限公司 | 柔性基板的剥离方法 |
JP2018152191A (ja) * | 2017-03-10 | 2018-09-27 | 株式会社ジャパンディスプレイ | 表示装置の製造方法、可撓性フィルム |
KR102356792B1 (ko) * | 2017-06-28 | 2022-01-27 | 엘지디스플레이 주식회사 | 보호필름 및 이를 이용한 표시장치의 제조방법 |
CN108648621B (zh) * | 2018-04-20 | 2021-03-02 | 广州国显科技有限公司 | 异形曲面盖板与柔性屏的贴合方法 |
CN110570754B (zh) * | 2018-06-05 | 2022-01-04 | 上海和辉光电股份有限公司 | 柔性显示面板的制作方法以及柔性显示面板 |
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