WO2017164300A1 - 印刷配線板およびその製造方法 - Google Patents
印刷配線板およびその製造方法 Download PDFInfo
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- WO2017164300A1 WO2017164300A1 PCT/JP2017/011693 JP2017011693W WO2017164300A1 WO 2017164300 A1 WO2017164300 A1 WO 2017164300A1 JP 2017011693 W JP2017011693 W JP 2017011693W WO 2017164300 A1 WO2017164300 A1 WO 2017164300A1
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- resin
- hole
- wiring board
- printed wiring
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/036—Multilayers with layers of different types
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
- H05K1/116—Lands, clearance holes or other lay-out details concerning the surrounding of a via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0094—Filling or covering plated through-holes or blind plated vias, e.g. for masking or for mechanical reinforcement
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/429—Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/06—Thermal details
- H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09563—Metal filled via
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09627—Special connections between adjacent vias, not for grounding vias
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2072—Anchoring, i.e. one structure gripping into another
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Definitions
- FIG. (A)-(d) is process drawing which shows the manufacturing method of the printed wiring board which concerns on one Embodiment of this indication.
- (E) And (f) is process drawing which shows the manufacturing method of the printed wiring board which concerns on one Embodiment of this indication.
- (A)-(d) is process drawing which shows the manufacturing method of the printed wiring board which concerns on other embodiment of this indication.
- (E) And (f) is process drawing which shows the manufacturing method of the printed wiring board which concerns on other embodiment of this indication. It is explanatory drawing which shows an example of the several filled via
- the conductor filled in the filled via 6 is not particularly limited, and for example, a conductor having a smaller thermal expansion coefficient than the second resin is effective.
- a conductor having a smaller thermal expansion coefficient than the second resin examples include copper, aluminum, gold, silver, cobalt, iron, and palladium.
- the conductor is copper in order not to contaminate the cost and the copper surface mainly used for forming the through hole 5 and the wiring pattern.
- the diameter of the opening of filled via 6 is not limited.
- the diameter of the opening of the filled via 6 is smaller than the diameter of the opening of the through hole 5.
- the diameter of the opening of the filled via 6 is about 20 to 40% of the diameter of the opening of the through hole 5.
- the distance d2 between the wall surfaces of adjacent filled vias 6 is not particularly limited. It is effective to arrange the distance d2 between the wall surfaces of adjacent filled vias 6 and 6 to be at least 0.3 mm. By setting the distance d2 to be at least 0.3 mm, the utility as a rivet is exerted more strongly, and the thermal expansion of the second resin can be reduced more efficiently.
- the upper limit is about 0.5 mm although it depends on the space around the through hole 5 and the types of the first resin and the second resin.
- a method for manufacturing a printed wiring board includes the following steps (I) to (V).
- (I) A step of obtaining a core layer by forming a conductor circuit on the surface of the insulator.
- (II) A step of laminating at least one first buildup layer containing the first resin on at least one surface of the core layer.
- (III) The process of laminating
- IV A step of forming a through hole penetrating the core layer and the first and second buildup layers.
- (V) A step of forming a plurality of filled vias filled with a conductor around the opening of the through hole in the second buildup layer.
- the core layer 10 with the layers laid up is subjected to hot pressing to obtain a laminate 11 in which the layers are laminated on the upper and lower surfaces of the core layer 10 as shown in FIG.
- the via 4 is filled with the molten resin contained in the first prepreg 32 ′.
- the hole 6a for forming the filled via 6 is formed around the opening of the through-hole lower hole 5a by, for example, the laser processing described above.
- a plurality of the holes 6a are provided around the opening of the through-hole lower hole 5a. Resin residues (not shown) at the time of opening may remain around the opening of the hole 6a, the inner wall surface, and the like. In that case, the residue is removed by desmear treatment.
- a dry film is stuck on the surface of the laminate 11 under vacuum. Thereafter, exposure and development are performed to remove the dry film other than the formation positions of the hole 4'a for forming the via 4 ', the hole 6a for forming the filled via 6, and the through-hole lower hole 5a. After etching the conductor, the dry film where the conductor circuit or the like is formed is peeled off. As a result, the via 4 ′ electrically connected to the conductor circuit 20, the through-hole 5 and the filled via 6 in which the conductor layer 7 is formed around the inner wall surface and the opening through the upper and lower surfaces of the laminate 11 are obtained. Can do. Finally, when the solder resist layer 8 is formed in a desired portion and surface treatment is performed, a printed wiring board 100 shown in FIG. 3F is obtained.
- FIGS. 4A and 4B are the same as FIGS. 2A and 2B, and a description thereof will be omitted.
- the first prepreg 32 ′ and the copper foil 21 a are laid up on the surface of the insulating resin layer 31 formed on the upper surface side of the core layer 10. Further, the first prepreg 32 ′ and the two-layer substrate 3 b are laid up on the surface of the insulating resin layer 31 formed on the lower surface side of the core layer 10.
- the first prepreg 32 ′ becomes the insulating resin layer 32 after hot pressing.
- the insulating resin layer 31 and the insulating resin layer 32 are formed of the same insulating resin.
- the two-layer substrate 3b includes an insulator 3b 'and conductor layers 3b "and 3b" formed on both upper and lower surfaces of the insulator 3b'. Note that the conductor layer 3b '' on one surface is a desired conductor circuit.
- the insulator 3b ' becomes the second buildup layer 3' after hot pressing.
- the two-layer substrate 3b needs to be processed in advance as follows before layup. Materials constituting the two-layer substrate 3b include RO3003 (Rogers Corporation), NPC-F275 (Nippon Pillar Industries Co., Ltd.), R-F705T (Panasonic Corporation), R-5785 (Panasonic Corporation). And Astra MT (Isola) are commercially available.
- a hole for forming a filled via 6 is formed in the two-layer substrate 3b by, for example, the laser processing described above.
- a plurality of holes are provided around the through hole 5, that is, around the opening of the through hole 5. Resin residue (not shown) at the time of opening may remain around the opening of the hole and the inner wall surface. In that case, the residue is removed by desmear treatment.
- the hole is filled with a conductor (such as copper) by the above-described plating, and the filled via 6 is formed. Note that the filled via 6 may not be formed at this stage.
- the filled via 6 is formed by hot-pressing the two-layer substrate 3b after forming the hole for forming the filled via 6 and then filling the hole with a conductor as in FIGS. 3 (e) and 3 (f). May be.
- the through-hole prepared holes 5 a are formed by drilling or the above-described laser processing so as to penetrate the upper and lower surfaces of the laminated plate 12.
- the hole 4 ′ a for forming the via 4 ′ electrically connected to the conductor circuit 20 of the insulating resin layer 31 is formed in the insulating resin layer 32 by the laser processing described above.
- Resin residues (not shown) at the time of opening may remain around the opening of the through-hole lower hole 5a and the hole 4'a, the inner wall surface, and the like. In that case, the residue is removed by desmear treatment.
- a dry film is stuck on the surface of the laminate 12 under vacuum. Thereafter, exposure and development are performed to remove the dry film other than the formation positions of the hole 4'a for forming the via 4 'and the through-hole lower hole 5a.
- the conductor is etched, when the dry film where the conductor circuit 21 or the like is formed is peeled off, the via 4 ′ electrically connected to the conductor circuit 20 and the upper and lower surfaces of the laminate 12 are penetrated, and the inner wall surface and the opening
- the through hole 5 having the conductor layer 7 formed in the periphery can be obtained.
- a solder resist layer 8 is formed in a desired portion and surface treatment is performed, a printed wiring board 110 shown in FIG. 5F is obtained.
- the occurrence of corner cracks is reduced even if the thickness of the conductor layer formed around the inner wall surface of the through hole and the opening is thin.
- the thickness of the conductor layer formed on the inner wall surface of the through hole and the periphery of the opening is as thin as about 10 ⁇ m, even if 300 cycles of the thermal cycle test at 260 ° C. for 15 seconds and 20 ° C. for 20 seconds, Did not occur.
- the resistance value before the heat cycle test was compared with the resistance value after 300 cycles, the resistance change rate hardly changed within 3% from the initial value. Therefore, the printed wiring board according to an embodiment of the present disclosure does not cause a through-hole disconnection, and the through-hole connection reliability is improved.
Abstract
Description
(I)絶縁体の表面に導体回路を形成してコア層を得る工程。
(II)コア層の少なくとも一つの面に、第1の樹脂を含む少なくとも1層の第1ビルドアップ層を積層させる工程。
(III)第1ビルドアップ層の表面に、第2の樹脂を含む第2ビルドアップ層を積層させる工程。
(IV)コア層と第1および第2ビルドアップ層とを貫通するスルーホールを形成する工程。
(V)第2ビルドアップ層におけるスルーホールの開口部周辺に、導体が充填されたフィルドビアを複数形成する工程。
以下、本開示の一実施形態に係る印刷配線板の製造方法を、図2(a)~(d)および図3(e)および(f)に基づいて説明する。
1a 孔部
10 コア層
2、20、21 導体回路
21a 銅箔
3 第1ビルドアップ層
31、32 絶縁樹脂層
32’ 第1のプリプレグ
3' 第2ビルドアップ層
3a 樹脂付き銅箔
3a' 樹脂(半硬化樹脂)
3a'' 銅箔
3b 2層基板
3b' 絶縁体
3b'' 導体層
4、4’ ビア
4’a ビア形成用の穴部
5 スルーホール
5a スルーホール下孔
6 フィルドビア
6a フィルドビア形成用の穴部
7 導体層
8 ソルダーレジスト層
11、12 積層板
100、110 印刷配線板
Claims (13)
- 絶縁体の表面に導体回路が位置するコア層と、
該コア層の表面に積層された第1の樹脂を含む第1ビルドアップ層と、
該第1ビルドアップ層の表面に積層された第2の樹脂を含む第2ビルドアップ層と、
前記コア層、前記第1ビルドアップ層および前記第2ビルドアップ層を貫通するスルーホールと、を備え、
前記第1の樹脂と前記第2の樹脂とは互いに異なる樹脂であり、
前記第2ビルドアップ層は、前記スルーホールの開口部周辺に、導体が充填された複数のフィルドビアを有していることを特徴とする印刷配線板。 - 前記フィルドビアが、前記スルーホールの開口部周辺に少なくとも2個配置されている請求項1に記載の印刷配線板。
- 複数の前記フィルドビアが、前記スルーホールを中心にして同一円周上に配置されている請求項1または2に記載の印刷配線板。
- 前記スルーホールの壁面と前記フィルドビアの壁面とが、少なくとも0.3mmの距離を設けて位置している請求項1~3のいずれかに記載の印刷配線板。
- 隣接する前記フィルドビアの壁面同士の距離が、少なくとも0.3mm離れて位置している請求項1~4のいずれかに記載の印刷配線板。
- 前記コア層の前記絶縁体を形成する樹脂と前記第1ビルドアップ層を形成する前記第1の樹脂とが、同じ樹脂である請求項1~5のいずれかに記載の印刷配線板。
- 前記第1ビルドアップ層は、前記コア層の上下両面に位置しており、
前記第2ビルドアップ層は、片方または両方の前記第1ビルドアップ層の表面に位置している請求項1~6のいずれかに記載の印刷配線板。 - 前記第2ビルドアップ層が、前記コア層の一つの面に位置する前記第1ビルドアップ層の表面に位置している請求項1~7のいずれかに記載の印刷配線板。
- 前記第1ビルドアップ層が、前記第1の樹脂を含む少なくとも一層により構成される請求項1~8のいずれかに記載の印刷配線板。
- 前記第2の樹脂は、前記第1の樹脂よりも大きい熱膨張係数を有する請求項1~9のいずれかに記載の印刷配線板。
- 絶縁体の表面に導体回路を形成してコア層を得る工程と、
コア層の少なくとも一つの面に、第1の樹脂を含む第1ビルドアップ層を積層する工程と、
第1ビルドアップ層の表面に、第2の樹脂を含む第2ビルドアップ層を積層する工程と、
前記コア層と第1および第2ビルドアップ層とを貫通するスルーホールを形成する工程と、
前記第2ビルドアップ層における前記スルーホールの開口部周辺に、導体が充填されたフィルドビアを複数形成する工程と、
を含むことを特徴とする印刷配線板の製造方法。 - 前記第2ビルドアップ層が、樹脂付き銅箔である請求項11に記載の印刷配線板の製造方法。
- 前記第2ビルドアップ層が、2層基板である請求項11に記載の印刷配線板の製造方法。
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JP2018507407A JP6674016B2 (ja) | 2016-03-24 | 2017-03-23 | 印刷配線板およびその製造方法 |
EP17770340.2A EP3435747A4 (en) | 2016-03-24 | 2017-03-23 | PRINTED CIRCUIT BOARD AND MANUFACTURING METHOD THEREFOR |
US16/087,975 US10952320B2 (en) | 2016-03-24 | 2017-03-23 | Printed wiring board and method for manufacturing same |
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JP2016-060655 | 2016-03-24 | ||
JP2016060655 | 2016-03-24 |
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WO2020241831A1 (ja) * | 2019-05-31 | 2020-12-03 | 京セラ株式会社 | 印刷配線板及び印刷配線板の製造方法 |
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US20200279814A1 (en) * | 2019-02-28 | 2020-09-03 | Advanced Semiconductor Engineering, Inc. | Wiring structure and method for manufacturing the same |
US10790241B2 (en) | 2019-02-28 | 2020-09-29 | Advanced Semiconductor Engineering, Inc. | Wiring structure and method for manufacturing the same |
Citations (2)
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JP2004172329A (ja) * | 2002-11-20 | 2004-06-17 | Toshiba Corp | 多層プリント配線板、回路モジュールおよび電子機器 |
JP2013197245A (ja) * | 2012-03-19 | 2013-09-30 | Ibiden Co Ltd | プリント配線板 |
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Also Published As
Publication number | Publication date |
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EP3435747A4 (en) | 2019-11-27 |
US20190098755A1 (en) | 2019-03-28 |
EP3435747A1 (en) | 2019-01-30 |
JPWO2017164300A1 (ja) | 2019-01-10 |
JP6674016B2 (ja) | 2020-04-01 |
US10952320B2 (en) | 2021-03-16 |
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