WO2017154303A1 - 非常停止用感圧センサ、安全装置及び安全システム - Google Patents
非常停止用感圧センサ、安全装置及び安全システム Download PDFInfo
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- WO2017154303A1 WO2017154303A1 PCT/JP2016/087311 JP2016087311W WO2017154303A1 WO 2017154303 A1 WO2017154303 A1 WO 2017154303A1 JP 2016087311 W JP2016087311 W JP 2016087311W WO 2017154303 A1 WO2017154303 A1 WO 2017154303A1
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- WIPO (PCT)
- Prior art keywords
- emergency stop
- pressure sensor
- intermediate layer
- rubber
- deformation
- Prior art date
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- 229920001971 elastomer Polymers 0.000 claims abstract description 53
- 239000005060 rubber Substances 0.000 claims abstract description 53
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 229920002379 silicone rubber Polymers 0.000 claims description 26
- 239000004945 silicone rubber Substances 0.000 claims description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 229910052760 oxygen Inorganic materials 0.000 claims description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 4
- 238000007600 charging Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 22
- 230000002779 inactivation Effects 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 8
- 230000005611 electricity Effects 0.000 abstract description 3
- 238000013459 approach Methods 0.000 abstract 1
- 238000002407 reforming Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 76
- 238000011282 treatment Methods 0.000 description 44
- 238000012986 modification Methods 0.000 description 19
- 230000004048 modification Effects 0.000 description 19
- -1 etc.) Substances 0.000 description 15
- 238000005259 measurement Methods 0.000 description 13
- 238000010248 power generation Methods 0.000 description 13
- 239000005062 Polybutadiene Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 229920002857 polybutadiene Polymers 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000945 filler Substances 0.000 description 10
- 238000009832 plasma treatment Methods 0.000 description 10
- 230000002829 reductive effect Effects 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 10
- 230000006378 damage Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 229920000049 Carbon (fiber) Polymers 0.000 description 8
- 239000004917 carbon fiber Substances 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 8
- 238000010894 electron beam technology Methods 0.000 description 8
- 230000000670 limiting effect Effects 0.000 description 8
- 239000000523 sample Substances 0.000 description 8
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 7
- 239000002033 PVDF binder Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229920001940 conductive polymer Polymers 0.000 description 6
- 238000003851 corona treatment Methods 0.000 description 6
- 230000036961 partial effect Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000002861 polymer material Substances 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 229920000459 Nitrile rubber Polymers 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 229910021393 carbon nanotube Inorganic materials 0.000 description 5
- 239000002041 carbon nanotube Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 239000007822 coupling agent Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 244000043261 Hevea brasiliensis Species 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229920002367 Polyisobutene Polymers 0.000 description 4
- 229920006311 Urethane elastomer Polymers 0.000 description 4
- 229920000800 acrylic rubber Polymers 0.000 description 4
- MTAZNLWOLGHBHU-UHFFFAOYSA-N butadiene-styrene rubber Chemical compound C=CC=C.C=CC1=CC=CC=C1 MTAZNLWOLGHBHU-UHFFFAOYSA-N 0.000 description 4
- 229920005549 butyl rubber Polymers 0.000 description 4
- 239000002134 carbon nanofiber Substances 0.000 description 4
- 239000011231 conductive filler Substances 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 229920002681 hypalon Polymers 0.000 description 4
- 230000000415 inactivating effect Effects 0.000 description 4
- 238000007373 indentation Methods 0.000 description 4
- 239000011256 inorganic filler Substances 0.000 description 4
- 229910003475 inorganic filler Inorganic materials 0.000 description 4
- 229920003049 isoprene rubber Polymers 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920003052 natural elastomer Polymers 0.000 description 4
- 229920001194 natural rubber Polymers 0.000 description 4
- 229920001084 poly(chloroprene) Polymers 0.000 description 4
- 229920000058 polyacrylate Polymers 0.000 description 4
- 229920000767 polyaniline Polymers 0.000 description 4
- 239000005077 polysulfide Substances 0.000 description 4
- 229920001021 polysulfide Polymers 0.000 description 4
- 150000008117 polysulfides Polymers 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 208000027418 Wounds and injury Diseases 0.000 description 3
- 239000006230 acetylene black Substances 0.000 description 3
- 150000004703 alkoxides Chemical class 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 239000003575 carbonaceous material Substances 0.000 description 3
- 229920003244 diene elastomer Polymers 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 208000014674 injury Diseases 0.000 description 3
- 239000003273 ketjen black Substances 0.000 description 3
- 239000004745 nonwoven fabric Substances 0.000 description 3
- 239000012766 organic filler Substances 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 229920001197 polyacetylene Polymers 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000128 polypyrrole Polymers 0.000 description 3
- 229920000123 polythiophene Polymers 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000007605 air drying Methods 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 229920006127 amorphous resin Polymers 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010835 comparative analysis Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000009849 deactivation Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 150000002484 inorganic compounds Chemical group 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000002608 ionic liquid Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 150000002894 organic compounds Chemical group 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000006057 Non-nutritive feed additive Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 230000005260 alpha ray Effects 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 230000003712 anti-aging effect Effects 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000000440 bentonite Substances 0.000 description 1
- 229910000278 bentonite Inorganic materials 0.000 description 1
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 1
- 230000005250 beta ray Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- SHFGJEQAOUMGJM-UHFFFAOYSA-N dialuminum dipotassium disodium dioxosilane iron(3+) oxocalcium oxomagnesium oxygen(2-) Chemical compound [O--].[O--].[O--].[O--].[O--].[O--].[O--].[O--].[Na+].[Na+].[Al+3].[Al+3].[K+].[K+].[Fe+3].[Fe+3].O=[Mg].O=[Ca].O=[Si]=O SHFGJEQAOUMGJM-UHFFFAOYSA-N 0.000 description 1
- GDVKFRBCXAPAQJ-UHFFFAOYSA-A dialuminum;hexamagnesium;carbonate;hexadecahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Al+3].[Al+3].[O-]C([O-])=O GDVKFRBCXAPAQJ-UHFFFAOYSA-A 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000007786 electrostatic charging Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 229920005560 fluorosilicone rubber Polymers 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910001701 hydrotalcite Inorganic materials 0.000 description 1
- 229960001545 hydrotalcite Drugs 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 1
- 239000000347 magnesium hydroxide Substances 0.000 description 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- LAQFLZHBVPULPL-UHFFFAOYSA-N methyl(phenyl)silicon Chemical compound C[Si]C1=CC=CC=C1 LAQFLZHBVPULPL-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 239000010451 perlite Substances 0.000 description 1
- 235000019362 perlite Nutrition 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012779 reinforcing material Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000010456 wollastonite Substances 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
- B25J19/063—Safety devices working only upon contact with an outside object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/081—Touching devices, e.g. pressure-sensitive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/028—Piezoresistive or piezoelectric sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/06—Safety devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B25/00—Layered products comprising a layer of natural or synthetic rubber
- B32B25/20—Layered products comprising a layer of natural or synthetic rubber comprising silicone rubber
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/048—Monitoring; Safety
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/308—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/06—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of natural rubber or synthetic rubber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/202—Conductive
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/50—Machine tool, machine tool null till machine tool work handling
- G05B2219/50198—Emergency stop
Definitions
- the present invention relates to an emergency stop pressure sensor, a safety device, and a safety system.
- the present invention has been made in view of such a situation, and an object thereof is to provide a pressure sensor for emergency stop that can improve the pressure detection sensitivity at the time of contact.
- an emergency stop pressure sensor of the present invention is an emergency stop pressure sensor provided on an operating body whose operation can be changed by a signal, and includes a pair of electrodes and rubber or rubber. And an intermediate layer that is formed of the composition and is provided between the pair of electrodes and generates power by deformation due to contact.
- FIG. 1 is a schematic cross-sectional view of an element according to the first embodiment.
- FIG. 2 is a characteristic diagram showing XPS measurement results of the intermediate layer (silicone rubber) subjected to the surface modification treatment and the inactivation treatment.
- FIG. 3 is a graph showing changes in the thickness direction of the Si2p binding energy of the intermediate layer measured in FIG.
- FIG. 4 is a characteristic diagram showing an XPS measurement result of an untreated intermediate layer (silicone rubber).
- FIG. 5 is a graph showing changes in the thickness direction of the Si2p binding energy of the intermediate layer measured in FIG.
- FIG. 6 is a schematic cross-sectional view for explaining the characteristics of an element having an intermediate layer subjected to surface modification treatment and inactivation treatment.
- FIG. 1 is a schematic cross-sectional view of an element according to the first embodiment.
- FIG. 2 is a characteristic diagram showing XPS measurement results of the intermediate layer (silicone rubber) subjected to the surface modification treatment and the inactivation treatment.
- FIG. 7 is a schematic diagram illustrating an example of a robot according to the second embodiment.
- 8 is a cross-sectional view of the emergency stop pressure sensor taken along line BB in FIG. 9A and 9B are plan views of the safety system, in which FIG. 9A is a diagram illustrating a turning range of the robot arm, and FIG. 9B is a diagram illustrating a contact state when an operator enters the turning range of the robot arm.
- FIG. 10 is a block diagram showing a configuration of an evaluation experiment of the emergency stop pressure sensor.
- FIG. 11 is a cross-sectional view showing a configuration in which a probe is pressed against a pressure sensor by a tacking tester as an evaluation machine.
- FIG. 12 is a graph of experimental data in a comparison experiment of signal output start time.
- FIG. 10 is a block diagram showing a configuration of an evaluation experiment of the emergency stop pressure sensor.
- FIG. 11 is a cross-sectional view showing a configuration in which a probe is pressed against a pressure sensor by
- FIG. 13 is an enlarged view of a signal output start portion in FIG.
- FIG. 14 is a graph showing the correlation between the Young's modulus and the signal output start time.
- FIG. 15 is a schematic diagram illustrating an example of a safety system according to the third embodiment.
- FIG. 16 is a schematic diagram illustrating another example of the safety system according to the third embodiment.
- FIG. 1 is a schematic cross-sectional view of an element according to this embodiment.
- the element 1 includes a first electrode 2 and a second electrode 3 facing each other, and an intermediate layer 4 disposed between the first and second electrodes and formed of rubber or a rubber composition. .
- “Details” [First electrode and second electrode] There is no restriction
- the material, shape, size, and structure of the first electrode and the second electrode may be the same or different, but are preferably the same.
- Examples of the material for the first electrode and the second electrode include metals, carbon-based conductive materials, conductive rubber compositions, conductive polymers, and oxides.
- Examples of the metal include gold, silver, copper, aluminum, stainless steel, tantalum, nickel, and phosphor bronze.
- Examples of the carbon-based conductive material include carbon nanotubes, carbon fibers, and graphite.
- Examples of the conductive rubber composition include a composition containing a conductive filler and rubber.
- Examples of the conductive polymer include polyethylene dioxythiophene (PEDOT), polypyrrole, polyaniline, and the like.
- Examples of the oxide include indium tin oxide (ITO), indium oxide / zinc oxide (IZO), and zinc oxide.
- Examples of the conductive filler include carbon materials (for example, ketjen black, acetylene black, graphite, carbon fiber, carbon fiber (CF), carbon nanofiber (CNF), carbon nanotube (CNT), graphene, etc.), metal Filler (gold, silver, platinum, copper, aluminum, nickel, etc.), conductive polymer material (polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and polyparaphenylene vinylene derivatives, or derivatives thereof) And the like, and ionic liquids. These may be used individually by 1 type and may use 2 or more types together.
- carbon materials for example, ketjen black, acetylene black, graphite, carbon fiber, carbon fiber (CF), carbon nanofiber (CNF), carbon nanotube (CNT), graphene, etc.
- metal Filler gold, silver, platinum, copper, aluminum, nickel, etc.
- conductive polymer material polythiophene, polyacetylene, polyaniline, polypyr
- Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluorine rubber, isoprene rubber, butadiene rubber, styrene / butadiene rubber, Examples include acrylonitrile / butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone. These may be used individually by 1 type and may use 2 or more types together.
- Examples of the shape of the first electrode and the shape of the second electrode include a thin film.
- the structure of the first electrode and the structure of the second electrode may be, for example, a woven fabric, a nonwoven fabric, a knitted fabric, a mesh, a sponge, or a nonwoven fabric formed by overlapping fibrous carbon materials.
- the average thickness of the electrode is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 ⁇ m to 1 mm, more preferably 0.1 ⁇ m to 500 ⁇ m from the viewpoint of conductivity and flexibility. .
- the average thickness is 0.01 ⁇ m or more, the mechanical strength is appropriate and the conductivity is improved. Further, when the average thickness is 1 mm or less, the element can be deformed and the power generation performance is good.
- the intermediate layer has flexibility.
- at least one of the following conditions (1) and (2) is satisfied.
- Condition (1) When the intermediate layer is pressed from the direction orthogonal to the plane of the intermediate layer, the deformation amount on the first electrode side (one side) in the intermediate layer and the second electrode in the intermediate layer The amount of deformation on the side (the other side) is different.
- Condition (2) Universal hardness (H1) at the time of 10 ⁇ m indentation on the first electrode side of the intermediate layer is different from universal hardness (H2) at the time of 10 ⁇ m indentation on the second electrode side of the intermediate layer.
- the deformation amount is the maximum indentation depth of the indenter when the intermediate layer is pressed under the following conditions.
- Measuring machine Microhardness tester WIN-HUD manufactured by Fischer Indenter: Square pyramid diamond indenter with a face angle of 136 °
- Initial load 0.02 mN
- Maximum load 1mN Load increase time from initial load to maximum load: 10 seconds
- the ratio (H1 / H2) of universal hardness (H1) to universal hardness (H2) is preferably 1.01 or more, more preferably 1.07 or more, and particularly preferably 1.13 or more.
- the upper limit of the ratio (H1 / H2) is not particularly limited, and is appropriately selected depending on, for example, the degree of flexibility required in the use state, the load in the use state, etc., but is preferably 1.70 or less.
- H1 is the universal hardness of the relatively hard surface
- H2 is the universal hardness of the relatively soft surface.
- the material for the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose.
- examples thereof include rubber and rubber composition.
- rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluorine rubber, isoprene rubber, butadiene rubber, styrene / butadiene rubber, and acrylonitrile.
- the silicone rubber is not particularly limited as long as it is a rubber having a siloxane bond, and can be appropriately selected according to the purpose.
- the silicone rubber include dimethyl silicone rubber, methylphenyl silicone rubber, fluorosilicone rubber, and modified silicone rubber (for example, acrylic modification, alkyd modification, ester modification, and epoxy modification). These may be used individually by 1 type and may use 2 or more types together.
- the rubber composition include a composition containing a filler and the rubber. Among these, the silicone rubber composition containing the silicone rubber is preferable because of its high power generation performance.
- the filler examples include organic fillers, inorganic fillers, and organic-inorganic composite fillers.
- the organic filler is not particularly limited as long as it is an organic compound, and can be appropriately selected according to the purpose.
- examples of the organic filler include acrylic fine particles, polystyrene fine particles, melamine fine particles, fluororesin fine particles such as polytetrafluoroethylene, silicone powder (silicone resin powder, silicone rubber powder, silicone composite powder), rubber powder, wood powder, and pulp. And starch.
- silicone powder silicon resin powder, silicone rubber powder, silicone composite powder
- rubber powder wood powder, and pulp.
- starch There is no restriction
- examples of the inorganic filler include oxides, hydroxides, carbonates, sulfates, silicates, nitrides, carbons, metals, and other compounds.
- Examples of the oxide include silica, diatomaceous earth, alumina, zinc oxide, titanium oxide, iron oxide, and magnesium oxide.
- Examples of the hydroxide include aluminum hydroxide, calcium hydroxide, and magnesium hydroxide.
- Examples of the carbonate include calcium carbonate, magnesium carbonate, barium carbonate, and hydrotalcite.
- Examples of the sulfate include aluminum sulfate, calcium sulfate, and barium sulfate.
- Examples of the silicate include calcium silicate (wollastonite, zonotlite), zircon silicate, kaolin, talc, mica, zeolite, perlite, bentonite, montmoronite, sericite, activated clay, glass, hollow glass. Examples include beads.
- Examples of the nitride include aluminum nitride, silicon nitride, and boron nitride.
- Examples of the carbons include ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofiber, carbon nanotube, fullerene (including derivatives), graphene, and the like.
- Examples of the metal include gold, silver, platinum, copper, iron, aluminum, and nickel.
- Examples of the other compounds include potassium titanate, barium titanate, strontium titanate, lead zirconate titanate, silicon carbide, molybdenum sulfide, and the like.
- the inorganic filler may be surface treated.
- the organic-inorganic composite filler can be used without particular limitation as long as it is a compound in which an organic compound and an inorganic compound are combined at a molecular level.
- examples of the organic / inorganic composite filler include silica / acryl composite fine particles and silsesquioxane.
- the average particle size of the filler is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.01 ⁇ m to 30 ⁇ m, more preferably 0.1 ⁇ m to 10 ⁇ m. When the average particle size is 0.01 ⁇ m or more, the power generation performance may be improved. Further, when the average particle size is 30 ⁇ m or less, the intermediate layer can be deformed, and the power generation performance can be increased.
- the average particle size can be measured according to a known method using a known particle size distribution measuring device such as Microtrac HRA (manufactured by Nikkiso Co., Ltd.).
- the content of the filler is preferably 0.1 to 100 parts by mass, more preferably 1 to 50 parts by mass with respect to 100 parts by mass of rubber.
- power generation performance may be improved.
- the intermediate layer can be deformed, and the power generation performance can be increased.
- limiting in particular as another component According to the objective, it can select suitably, For example, an additive etc. are mentioned. Content of the said other component can be suitably selected in the grade which does not impair the objective of this invention.
- the additive examples include a crosslinking agent, a reaction control agent, a filler, a reinforcing material, an anti-aging agent, a conductivity control agent, a colorant, a plasticizer, a processing aid, a flame retardant, an ultraviolet absorber, and a tackifier. And thixotropic agent.
- a crosslinking agent e.g., a crosslinking agent, a reaction control agent, a filler, a reinforcing material, an anti-aging agent, a conductivity control agent, a colorant, a plasticizer, a processing aid, a flame retardant, an ultraviolet absorber, and a tackifier.
- thixotropic agent thixotropic agent.
- the rubber composition can be prepared by mixing and kneading and dispersing the rubber, the filler, and, if necessary, the other components.
- the average thickness of the intermediate layer is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1 ⁇ m to 10 mm, more preferably 20 ⁇ m to 1 mm from the viewpoint of deformation followability. In addition, when the average thickness is within a preferable range, film formability can be ensured and deformation is not hindered, so that good power generation can be performed.
- the intermediate layer is preferably insulating.
- the insulating property preferably has a volume resistivity of 10 8 ⁇ cm or more, and more preferably has a volume resistivity of 10 10 ⁇ cm or more.
- the intermediate layer may have a multilayer structure.
- Examples of the method of varying the deformation amount or hardness on both surfaces in the intermediate layer include surface modification treatment and inactivation treatment. Both of these processes may be performed, or only one of them may be performed.
- ⁇ Surface modification treatment> Examples of the surface modification treatment include plasma treatment, corona discharge treatment, electron beam irradiation treatment, ultraviolet ray irradiation treatment, ozone treatment, radiation (X-ray, ⁇ -ray, ⁇ -ray, ⁇ -ray, neutron ray) irradiation treatment and the like. It is done. Among these treatments, plasma treatment, corona discharge treatment, and electron beam irradiation treatment are preferable from the viewpoint of processing speed, but are not limited to these as long as they have a certain amount of irradiation energy and can modify the material. .
- ⁇ Plasma treatment In the case of plasma processing, as the plasma generator, for example, a parallel plate type, a capacitive coupling type, an inductive coupling type, or an atmospheric pressure plasma apparatus can be used. From the viewpoint of durability, reduced pressure plasma treatment is preferred.
- the reaction pressure in the plasma treatment is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.05 Pa to 100 Pa, more preferably 1 Pa to 20 Pa.
- the reaction atmosphere in the plasma treatment is not particularly limited and can be appropriately selected according to the purpose. For example, an inert gas, a rare gas, oxygen or the like is effective, but argon is effective in sustaining the effect. preferable.
- the oxygen partial pressure is preferably 5,000 ppm or less.
- production of ozone can be suppressed as the oxygen partial pressure in reaction atmosphere is 5,000 ppm or less, and use of an ozone treatment apparatus can be refrained.
- the irradiation power amount in the plasma processing is defined by (output ⁇ irradiation time).
- the irradiation power amount is preferably 5 Wh to 200 Wh, and more preferably 10 Wh to 50 Wh. When the amount of irradiation power is within the preferred range, a power generation function can be imparted to the intermediate layer, and durability is not reduced by excessive irradiation.
- corona discharge treatment The applied energy in corona discharge treatment (cumulative energy), preferably 6J / cm 2 ⁇ 300J / cm 2, 12J / cm 2 ⁇ 60J / cm 2 is more preferable.
- a power generation function can be imparted to the intermediate layer, and durability is not reduced by excessive irradiation.
- the dose in the electron beam irradiation treatment is preferably 1 kGy or more, more preferably 300 kGy to 10 MGy.
- a power generation function can be imparted to the intermediate layer, and durability is not reduced by excessive irradiation.
- limiting in particular as reaction atmosphere in an electron beam irradiation process Although it can select suitably according to the objective, It fills with inert gas, such as argon, neon, helium, nitrogen, and oxygen partial pressure is 5,000 ppm or less. It is preferable that Generation
- the ultraviolet ray in the ultraviolet irradiation treatment is preferably 200 nm or more at a wavelength of 365 nm or less, and more preferably 240 nm or more at a wavelength of 320 nm or less.
- the integrated light intensity in the ultraviolet irradiation treatment preferably 5J / cm 2 ⁇ 500J / cm 2, 50J / cm 2 ⁇ 400J / cm 2 is more preferable.
- a power generation function can be imparted to the intermediate layer, and durability is not reduced by excessive irradiation.
- reaction atmosphere in an ultraviolet irradiation process there is no restriction
- production of ozone can be suppressed as the oxygen partial pressure in reaction atmosphere is 5,000 ppm or less, and use of an ozone treatment apparatus can be refrained.
- an active group is formed by excitation or oxidation by plasma treatment, corona discharge treatment, ultraviolet irradiation treatment, electron beam irradiation treatment, etc., and the interlayer adhesion is increased.
- the technique is limited to application between layers, and application to the outermost surface has been found to be unfavorable because it rather reduces mold release.
- the reaction is performed in an oxygen-rich state, and a reactive group (hydroxyl group) is effectively introduced. Therefore, such a conventional technique is different in nature from the surface modification treatment of the present embodiment.
- the surface modification treatment of the present embodiment promotes re-crosslinking and bonding of the surface because of treatment (for example, plasma treatment) in a reaction environment with a reduced amount of oxygen and reduced pressure.
- treatment for example, plasma treatment
- Si—O bond with high binding energy Durability is improved due to the "increase in”.
- the releasability is improved due to “densification by improving crosslinking density”.
- some active groups are also formed, but the active groups are inactivated by a coupling agent or air drying treatment described later.
- the surface of the intermediate layer may be appropriately inactivated using various materials.
- the deactivation treatment is not particularly limited as long as it is a treatment that inactivates the surface of the intermediate layer, and can be appropriately selected according to the purpose.
- the deactivation agent is applied to the surface of the intermediate layer.
- Inactivation means changing the surface of the intermediate layer to a property that does not easily cause a chemical reaction. This change is caused by reacting an active group (for example, —OH) generated by excitation or oxidation caused by plasma treatment, corona discharge treatment, ultraviolet irradiation treatment, electron beam irradiation treatment, etc., with an inactivating agent, and thereby the surface of the intermediate layer. It can be obtained by lowering the activity.
- an active group for example, —OH
- Examples of the deactivator include an amorphous resin and a coupling agent.
- Examples of the amorphous resin include a resin having a perfluoropolyether structure in the main chain.
- Examples of the coupling agent include metal alkoxides and solutions containing metal alkoxides.
- Examples of the metal alkoxide include a compound represented by the following general formula (1), a partially hydrolyzed polycondensate having a polymerization degree of about 2 to 10, or a mixture thereof.
- R 1 (4-n) Si (OR 2 ) n General formula (1)
- R 1 and R 2 each independently represents any of a linear or branched alkyl group having 1 to 10 carbon atoms, an alkyl polyether chain, and an aryl group.
- . n represents an integer of 2 to 4.
- the inactivation treatment may be performed, for example, by impregnating the surface of the intermediate layer precursor with an inactivating agent by coating or dipping after the surface modification treatment is performed on the intermediate layer precursor such as rubber. it can.
- an inactivating agent such as silicone rubber
- after the surface modification treatment it may be deactivated by standing in air and air drying.
- the profile of the oxygen concentration in the thickness direction of the intermediate layer preferably has a maximum value.
- the carbon concentration profile in the thickness direction of the intermediate layer preferably has a minimum value.
- the oxygen concentration profile and the carbon concentration profile can be obtained by X-ray photoelectron spectroscopy (XPS). Examples of the measurement method include the following methods.
- Measuring apparatus Ulvac-PHI Quantera SXM, manufactured by ULVAC-PHI Co., Ltd.
- Measuring light source Al (mono) Measurement output: 100 ⁇ m ⁇ , 25.1 W Measurement area: 500 ⁇ m ⁇ 300 ⁇ m Pass energy: 55 eV (narrow scan) Energy step: 0.1 eV (narrow scan)
- Relative sensitivity coefficient PHI relative sensitivity coefficient is used.
- XPS X-ray photoelectron effect
- Silicone rubber has a siloxane bond, and the main components are Si, O, and C. Therefore, when silicone rubber is used as the material in the intermediate layer, the XPS wide scan spectrum is measured, and the relative concentration ratio of each element to the existing concentration ratio of each atom existing from the surface layer in the depth direction. Can be requested.
- An example is shown in FIG.
- each atom is Si, O, and C, and the existence concentration ratio is (atomic%).
- FIG. 2 is a sample of an intermediate layer obtained by using silicone rubber and further performing the surface modification treatment (plasma treatment) and the inactivation treatment.
- the horizontal axis represents the analysis depth from the surface to the inside
- the vertical axis represents the concentration ratio.
- the element bonded to silicon and the bonding state can be known by measuring the energy at which the electrons of the 2p orbit of Si jump out. Therefore, peak separation was performed from the narrow scan spectrum in the Si2p orbital indicating the Si bonding state to obtain the chemical bonding state.
- FIG. 3 is the sample used for the measurement in FIG.
- the horizontal axis is the binding energy
- the vertical axis is the intensity ratio.
- the measurement spectrum in the depth direction is shown from the bottom to the top.
- the amount of peak shift depends on the bonding state, and in the case of silicone rubber related to the present case, the peak shift to the high energy side in the Si2p orbit means that the number of oxygen bonded to Si. Indicates an increase.
- oxygen increases from the surface layer toward the inside to have a maximum value, and carbon decreases to have a minimum value. Further analysis in the depth direction causes oxygen to decrease and carbon to increase, resulting in an atomic concentration equivalent to that of untreated silicone rubber. Further, the maximum value of oxygen detected at the position of ⁇ in FIG. 2 coincides with the shift of the Si2p bond energy shift to the higher energy side (position of ⁇ in FIG. 3), and the increase in oxygen was bonded to Si. It has been shown to be due to the number of oxygen.
- FIG. 4 The results of the same analysis on the untreated silicone rubber are shown in FIG. 4 and FIG. FIG. 4 does not show the maximum value of oxygen concentration and the minimum value of carbon concentration as seen in FIG. Further, from FIG. 5, it was confirmed that the number of oxygen bonded to Si did not change because the Si2p bond energy shift did not shift to the high energy side.
- the inactivating agent soaks into the intermediate layer by applying or dipping the inactivating agent such as a coupling agent to the surface of the intermediate layer and allowing it to penetrate.
- the coupling agent is a compound represented by the general formula (1)
- the polyorganosiloxane is present in the intermediate layer with a concentration distribution, and this distribution is deep in the oxygen atoms contained in the polyorganosiloxane. The distribution has a maximum value in the vertical direction.
- the intermediate layer will contain a polyorganosiloxane having silicon atoms bonded to 3-4 oxygen atoms.
- the inactivation treatment method is not limited to the dipping method.
- Plasma CVD, PVD, sputtering, vacuum deposition, combustion chemical vapor deposition A method such as
- the intermediate layer does not need to have an initial surface potential in a stationary state.
- the initial surface potential in the stationary state can be measured under the following measurement conditions.
- having no initial surface potential means ⁇ 10 V or less when measured under the following measurement conditions.
- electrostatic charging due to a mechanism similar to frictional charging and generation of a surface potential difference due to internal charge retention are caused by a difference in deformation amount based on a difference in hardness between both surfaces of the intermediate layer. It is presumed that the electric charge moves to generate electricity by creating the bias of.
- the element preferably has a space between the intermediate layer and at least one of the first electrode and the second electrode. By doing so, the amount of power generation can be increased.
- the method for providing the space is not particularly limited and may be appropriately selected depending on the purpose. For example, a spacer is disposed between the intermediate layer and at least one of the first electrode and the second electrode. The method etc. are mentioned.
- the material of the spacer include a polymer material, rubber, metal, a conductive polymer material, and a conductive rubber composition.
- the polymer material include polyethylene, polypropylene, polyethylene terephthalate, polyvinyl chloride, polyimide resin, fluorine resin, and acrylic resin.
- the rubber examples include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluorine rubber, isoprene rubber, butadiene rubber, styrene / butadiene rubber, Examples include acrylonitrile / butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.
- Examples of the metal include gold, silver, copper, aluminum, stainless steel, tantalum, nickel, and phosphor bronze.
- Examples of the conductive polymer material include polythiophene, polyacetylene, polyaniline, and the like.
- Examples of the conductive rubber composition include a composition containing a conductive filler and rubber.
- Examples of the conductive filler include carbon materials (eg, ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofiber, carbon nanotube, graphene, etc.), metal (eg, gold, silver, platinum, Conductive polymer materials such as copper, iron, aluminum, nickel (eg, polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and polyparaphenylene vinylene derivatives, or their derivatives represented by anions or cations) And the like, and ionic liquids.
- carbon materials eg, ketjen black, acetylene black, graphite, carbon fiber, carbon fiber, carbon nanofiber, carbon nanotube, graphene, etc.
- metal eg, gold, silver, platinum
- Conductive polymer materials such as copper, iron, aluminum, nickel (eg, polythiophene, polyacetylene, polyaniline, polypyrrole, polyparaphenylene, and polyparaphenylene
- Examples of the rubber include silicone rubber, acrylic rubber, chloroprene rubber, polysulfide rubber, urethane rubber, butyl rubber, natural rubber, ethylene / propylene rubber, nitrile rubber, fluorine rubber, isoprene rubber, butadiene rubber, styrene / butadiene rubber, Examples include acrylonitrile / butadiene rubber, ethylene / propylene / diene rubber, chlorosulfonated polyethylene rubber, polyisobutylene, and modified silicone.
- Examples of the form of the spacer include a sheet, a film, a woven fabric, a nonwoven fabric, a mesh, and a sponge. The shape, size, thickness, and installation location of the spacer can be appropriately selected according to the structure of the element.
- the surface modification treatment or inactivation treatment is performed on the first electrode a side of the intermediate layer b. Is performed, the first electrode a side of the intermediate layer b becomes harder than the second electrode c side. Accordingly, the universal hardness is H1> H2.
- FIG. 7 shows a robot as an operating body according to the present embodiment.
- the robot 5 has a configuration in which the operation can be changed by control based on a signal, and is an assembly robot used in a production line, for example.
- “Operation change” means the reverse operation of stopping the operation or releasing the contact state.
- the robot 5 includes a base 7 on which a component 6 as an object to be grasped is placed, a support shaft 8 fixed to the base 7, a fixed link 9 fixed to the support shaft 8, and movable links 10, 11, 12. And a gripping device 13 provided on the movable link 12 at the tip.
- the support shaft 8, the fixed link 9, the movable links 10, 11, 12 and the gripping device 13 constitute a robot arm 14 as a movable part.
- the component 6 gripped by the gripping device 13 is transferred to the assembly position by the displacement operation of the robot arm 14.
- the gripping device 13 has a pair of gripping portions 15 and 16 that can be opened and closed.
- a film-like emergency stop pressure sensor 17 is provided on the outer surface of the movable link 11 by means such as adhesion.
- the emergency stop pressure-sensitive sensor 17 includes the element 1 shown in FIG. 1, and as shown in FIG. 8, the first electrode 2 and the second electrode 3 constituting a pair of electrodes, the intermediate layer 4, And a cover 18.
- the intermediate layer 4 is a piezoelectric body that is formed of rubber or a rubber composition, is provided between the pair of electrodes, and generates electricity by deformation due to contact with the contacted body.
- the cover 18 has flexibility and covers at least the surface of the first electrode 2 on the side in contact with the contacted body among the pair of electrodes. In the present embodiment, the entire periphery of the laminated structure in which both sides in the thickness direction of the intermediate layer 4 are sandwiched between a pair of electrodes is covered with the cover 18.
- the cover 18 is mainly intended to protect the first electrode 2 by contact with the contacted body, and has a thickness and a material (hardness) that do not hinder the transmission of contact pressure to the intermediate layer 4.
- a material of the cover 18 for example, PET (polyethylene terephthalate) can be adopted.
- PET polyethylene terephthalate
- the thickness is exaggerated in FIG. 8, the actual thickness t of the emergency stop pressure sensor 17 is at most several hundred ⁇ m.
- the first electrode 2 and the second electrode 3 and the intermediate layer 4 may be joined or may not be joined. Further, only a part of the joint may be used.
- the intermediate layer 4 is made of rubber or a rubber composition, and has a surface on one side in the stacking direction so that the degree of deformation with respect to the same deformation imparting force is different between the one side and the other side and charge can be accumulated. A modification process and / or an inactivation process is performed. When deformation occurs in the unjoined portion between the first electrode 2 and the second electrode 3 and the intermediate layer 4, friction or peeling electrification occurs between the intermediate layer 4 and the electrode opposed thereto at the time of deformation.
- the electric charge is stored and the capacitance is changed between the intermediate layer 4 and the electrode to generate electric power.
- a change in capacitance occurs between the intermediate layer 4 and the electrode to generate power.
- FIG. 9 is a plan view of the robot 5 shown in FIG. 9A, a region Ra indicated by a two-dot chain line is a movement range (turning range) of the robot 5.
- the emergency stop pressure sensor 17 is provided on both sides of the movable link 11. In FIG. 9, the thickness of the emergency stop pressure sensor 17 is exaggerated.
- the base 7 is provided with a control means 19 as a microcomputer.
- a drive source for turning the robot arm 14 and the electrodes of each emergency stop pressure sensor 17 are electrically connected to the control means 19 by lead wires. Transmission and reception of signals between the control means 19 and a drive source for driving the robot arm 14 to turn may be performed wirelessly.
- Each emergency stop pressure sensor 17 and the control means 19 constitute a safety device 20, and a safety system 21 is constructed by the safety device 20 and the robot 5 as an operating body.
- the control means 19 and the lead wires are omitted.
- FIG. 9B when the worker S unexpectedly enters the turning range of the robot arm 14 during the operation of the robot 5, the movable link 11 of the robot arm 14 and the worker S collide with each other, resulting in injury. There is a risk of doing.
- the emergency stop pressure sensor 17 according to the present embodiment has a very high pressure detection sensitivity at the time of contact. For this reason, when the emergency stop pressure sensor 17 contacts the worker S, a detection signal is output to the control means 19 almost simultaneously with the contact, and the control means 19 cuts off the power supply to the turning drive source of the robot arm 14, The turning of the robot arm 14 is stopped.
- the robot arm 14 may be moved in the opposite direction so as to cancel the contact state. Since contact can be detected quickly, damage such as injury and breakage due to the progress of the collision state can be reduced or avoided.
- the movable link 11 is provided with the pressure sensor 17 for emergency stop.
- the present invention is not limited to this. It can be provided as appropriate in a range where people or objects may come into contact. Since the emergency stop pressure-sensitive sensor 17 according to the present embodiment is a thin sheet, it is possible to simultaneously eliminate the bulkiness and inferiority of the appearance due to the provision of a plurality of hollow bodies as in Patent Document 1 and the like.
- a comparative evaluation of the sensitivity of the emergency stop pressure sensor 17 according to the present embodiment was performed.
- the comparative evaluation was performed by pressing the probe with a tacking tester and comparing the time for detecting the pressurization.
- As an outline of the evaluation method the following three procedures were performed with each sensor, and data was acquired.
- a pressure-sensitive sensor is attached on the stage 42 of the tacking tester 40 and connected to the oscilloscope 46 through the charge amplifier 44.
- a sponge 50 is attached to the tip of the probe 48 and tacking is performed.
- the voltage waveform displayed on the oscilloscope 46 is recorded, and the average data repeated three times is used as the acquired waveform.
- Table 1 shows the comparison of the pressure sensor specifications
- Table 2 shows the specifications of the sponge used in the evaluation
- Table 3 shows the settings of the charge amplifier
- Table 4 shows the settings of the oscilloscope
- Table 5 shows the evaluation conditions of the tacking tester. Respectively.
- the Young's modulus of PVDF is 2 GPa
- the Young's modulus of the mid layer 4 of the emergency stop pressure sensor 17 according to the present embodiment is 0.01 GPa.
- a grounded aluminum tape 52 is arranged on the upper surface of the emergency stop pressure sensor 17 to suppress the generation of noise due to unnecessary charges.
- the comparison results are shown in FIG. 12 and FIG. 13 which is a partially enlarged view thereof.
- the voltage signal is output after the sponge 50 attached to the probe 48 contacts the emergency stop pressure sensor 17. It starts after about 0.01 sec (10 msec). On the other hand, the pressure sensor using PVDF starts after about 0.04 sec (40 msec).
- FIG. 14 is a diagram in which the Young's modulus of the intermediate layer 4 and PVDF of this embodiment is measured, and the correlation with the signal output start time is plotted. It was confirmed that the Young's modulus of the intermediate layer and the signal output start time have a linear correlation.
- the Young's modulus of the intermediate layer 4 was measured using a measuring machine (Fischer, ultra-micro hardness tester WIN-HUD) measuring the hardness in the detailed description of the rubber composition described later, and the same measurement conditions. A value converted from a hardness of 10 ⁇ m depth is used.
- the emergency stop pressure sensor 17 By arranging the emergency stop pressure sensor 17 in the movable part of the robot 5, contact with a contacted object such as a person or an object is quickly detected, and a control signal is hardly delayed in a control means for controlling the operating body. It can be sent quickly in the absence. Thereby, damage such as injury or breakage can be reduced or avoided with high accuracy. As described above, in the case of a pressure-sensitive sensor using PVDF, a detection delay of several tens of msec occurs, so that a certain amount of damage cannot be avoided.
- FIG. 15 and 16 show a third embodiment.
- the application example of the emergency stop pressure sensor 17 to the movable part of the robot 5 whose position is fixed is shown.
- FIG. 15 shows a humanoid robot 22 as an operating body.
- An emergency stop pressure sensor 17 is provided on the arm 23 and the foot 24 which are movable parts of the humanoid robot 22.
- the main body of the humanoid robot 22 is provided with control means for receiving a signal from the emergency stop pressure sensor 17.
- the control means cuts off the power supply to the driving source of the humanoid robot 22. Since the detection time by the emergency stop pressure sensor 17 is very short as described above, the time from contact to drive stop is short, and damage due to contact or collision can be reduced. As shown in FIG. 16, the same effect as described above can be obtained even if the emergency stop pressure sensor 17 is disposed, for example, on the front surface of the transport vehicle 25 which is a self-propelled robot as an operating body.
- the transport vehicle 25 is provided with control means. When the transport vehicle 25 comes into contact with a person or an object and a signal is issued from the emergency stop pressure sensor 17, the control means cuts off the power supply to the drive source of the transport vehicle 25. To do.
- First electrode that is one of a pair of electrodes
- Second electrode that is the other of a pair of electrodes 4
- Intermediate layer 5 22, 25
- Operating body 17 Pressure sensor for emergency stop 19
- Safety device 21 Safety system
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Abstract
Description
このような不意の接触ないし衝突によるダメージを軽減ないし回避するためには、接触を迅速に感知し、できるだけ早く動作体側の駆動力を遮断したり、接触方向とは逆方向に移動させる必要がある。
しかしながら、特許文献1で提案されているようなセンサ構成では、まず中空体自体が変形し、これに伴って中空体内の流体が圧縮され、その後圧力計が信号を出力するため、接触時の圧力検出感度が低い。空気等の圧縮性流体を使用する場合には検出感度の低下は顕著となる。
このため、可動部の駆動が停止するまでに接触、衝突状態が進行し、ダメージを軽減することは困難であった。
図1は、本実施形態に係る素子の模式的断面図である。素子1は、互いに対向する第1の電極2及び第2の電極3と、第1及び第2の電極間に配置され、ゴムまたはゴム組成物で形成された中間層4とを有している。
[第1の電極、及び第2の電極]
第1の電極、及び第2の電極の材質、形状、大きさ、構造としては、特に制限はなく、目的に応じて適宜選択することができる。
第1の電極、及び第2の電極において、その材質、形状、大きさ、構造は、同じであってもよいし、異なっていてもよいが、同じであることが好ましい。
第1の電極、及び第2の電極の材質としては、例えば、金属、炭素系導電材料、導電性ゴム組成物、導電性高分子、酸化物などが挙げられる。
第1の電極の形状、及び第2の電極の形状としては、例えば、薄膜などが挙げられる。第1の電極の構造、及び第2の電極の構造としては、例えば、織物、不織布、編物、メッシュ、スポンジ、繊維状の炭素材料が重なって形成された不織布であってもよい。
中間層は、可撓性を有する。
中間層においては、以下の条件(1)及び条件(2)の少なくともいずれかを満たす。
条件(1):中間層の面に対して直交する方向から中間層が加圧された際に、中間層における第1の電極側(一方側)の変形量と、中間層における第2の電極側(他方側)の変形量とが、異なる。
条件(2):中間層の第1の電極側における10μm押し込み時のユニバーサル硬度(H1)と、中間層の第2の電極側における10μm押し込み時のユニバーサル硬度(H2)とが、異なる。
本実施形態において、変形量とは、以下の条件で中間層を押し付けた際の、圧子の最大押し込み深さである。
測定機:フィッシャー社製、超微小硬度計WIN-HUD
圧子:対面角度136°の四角錐ダイヤモンド圧子
初期荷重:0.02mN
最大荷重:1mN
初期荷重から最大荷重までの荷重増加時間:10秒間
{測定条件}
測定機:フィッシャー社製、超微小硬度計WIN-HUD
圧子:対面角度136°の四角錐ダイヤモンド圧子
押し込み深さ:10μm
初期荷重:0.02mN
最大荷重:100mN
初期荷重から最大荷重までの荷重増加時間:50秒間
前記ゴム組成物としては、例えば、フィラーと前記ゴムとを含有する組成物などが挙げられる。これらの中でも、前記シリコーンゴムを含有するシリコーンゴム組成物は発電性能が高いため好ましい。
前記無機フィラーとしては、例えば、酸化物、水酸化物、炭酸塩、硫酸塩、ケイ酸塩、窒化物、炭素類、金属、又はその他の化合物などが挙げられる。
前記水酸化物としては、例えば、水酸化アルミニウム、水酸化カルシウム、水酸化マグネシウムなどが挙げられる。
前記炭酸塩としては、例えば、炭酸カルシウム、炭酸マグネシウム、炭酸バリウム、ハイドロタルサイトなどが挙げられる。
前記硫酸塩としては、例えば、硫酸アルミニウム、硫酸カルシウム、硫酸バリウムなどが挙げられる。
前記ケイ酸塩としては、例えば、ケイ酸カルシウム(ウォラストナイト、ゾノトライト)、ケイ酸ジルコン、カオリン、タルク、マイカ、ゼオライト、パーライト、ベントナイト、モンモロナイト、セリサイト、活性白土、ガラス、中空ガラスビーズなどが挙げられる。
前記炭素類としては、例えば、ケッチェンブラック、アセチレンブラック、黒鉛、炭素繊維、カーボンファイバー、カーボンナノファイバー、カーボンナノチューブ、フラーレン(誘導体を含む)、グラフェンなどが挙げられる。
前記金属としては、例えば、金、銀、白金、銅、鉄、アルミニウム、ニッケルなどが挙げられる。
前記その他の化合物としては、例えば、チタン酸カリウム、チタン酸バリウム、チタン酸ストロンチウム、チタン酸ジルコン酸鉛、炭化ケイ素、硫化モリブテン、などが挙げられる。なお、前記無機フィラーは、表面処理をしていてもよい。
前記有機無機複合フィラーとしては、例えば、シリカ・アクリル複合微粒子、シルセスキオキサンなどが挙げられる。
前記フィラーの平均粒径は、特に制限はなく、目的に応じて適宜選択することができるが、0.01μm~30μmが好ましく、0.1μm~10μmがより好ましい。前記平均粒径が、0.01μm以上であると、発電性能が向上することがある。また、前記平均粒径が、30μm以下であると、中間層が変形可能であり、発電性能の増加を図ることができる。
前記フィラーの含有量は、ゴム100質量部に対して、0.1質量部~100質量部が好ましく、1質量部~50質量部がより好ましい。前記含有量が、0.1質量部以上であると、発電性能が向上することがある。また、前記含有量が、100質量部以下であると、中間層が変形可能であり、発電性能の増加を図ることができる。
その他の成分としては、特に制限はなく、目的に応じて適宜選択することができ、例えば添加剤などが挙げられる。前記その他の成分の含有量は、本発明の目的を損なわない程度で適宜選定することができる。
前記中間層を構成する材料の調製方法としては、特に制限はなく、目的に応じて適宜選択することができる。例えば、前記ゴム組成物の調製方法としては、前記ゴム及び前記フィラー、更に必要に応じて前記その他の成分を混合し、混錬分散することにより調製することができる。
前記中間層の形成方法としては、特に制限はなく、目的に応じて適宜選択することができる。例えば、前記ゴム組成物の薄膜の形成方法としては、前記ゴム組成物を、基材上にブレード塗装、ダイ塗装、ディップ塗装などで塗布し、その後、熱や電子線などで硬化する方法が挙げられる。
中間層において、両面での変形量、又は硬度を異ならせる方法としては、例えば、表面改質処理、不活性化処理などが挙げられる。これらの処理は、両方を行ってもよいし、片方のみを行ってもよい。
表面改質処理としては、例えば、プラズマ処理、コロナ放電処理、電子線照射処理、紫外線照射処理、オゾン処理、放射線(X線、α線、β線、γ線、中性子線)照射処理などが挙げられる。これらの処理の中でも、処理スピードの点から、プラズマ処理、コロナ放電処理、電子線照射処理が好ましいが、ある程度の照射エネルギーを有し、材料を改質しうるものであれば、これらに限定されない。
プラズマ処理の場合、プラズマ発生装置としては、例えば、平行平板型、容量結合型、誘導結合型のほか、大気圧プラズマ装置でも可能である。耐久性の観点から、減圧プラズマ処理が好ましい。
プラズマ処理における反応圧力としては、特に制限はなく、目的に応じて適宜選択することができるが、0.05Pa~100Paが好ましく、1Pa~20Paがより好ましい。
プラズマ処理における反応雰囲気としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、不活性ガス、希ガス、酸素などのガスが有効であるが、効果の持続性においてアルゴンが好ましい。
プラズマ処理における照射電力量は、(出力×照射時間)により規定される。前記照射電力量としては、5Wh~200Whが好ましく、10Wh~50Whがより好ましい。照射電力量が、好ましい範囲内であると、中間層に発電機能を付与でき、かつ照射過剰により耐久性を低下させることもない。
コロナ放電処理における印加エネルギー(積算エネルギー)としては、6J/cm2~300J/cm2が好ましく、12J/cm2~60J/cm2がより好ましい。印加エネルギーが、好ましい範囲内であると、中間層に発電機能を付与でき、かつ照射過剰により耐久性を低下させることもない。
電子線照射処理における照射量としては、1kGy以上が好ましく、300kGy~10MGyがより好ましい。照射量が、好ましい範囲内であると、中間層に発電機能を付与でき、かつ照射過剰により耐久性を低下させることもない。
電子線照射処理における反応雰囲気としては、特に制限はなく、目的に応じて適宜選択することができるが、アルゴン、ネオン、ヘリウム、窒素等の不活性ガスが充填し酸素分圧を5,000ppm以下とすることが好ましい。反応雰囲気における酸素分圧が、5,000ppm以下であると、オゾンの発生を抑制でき、オゾン処理装置の使用を控えることができる。
紫外線照射処理における紫外線としては、波長365nm以下で200nm以上が好ましく、波長320nm以下で240nm以上がより好ましい。
紫外線照射処理における積算光量としては、5J/cm2~500J/cm2が好ましく、50J/cm2~400J/cm2がより好ましい。積算光量が、好ましい範囲内であると、中間層に発電機能を付与でき、かつ照射過剰により耐久性を低下させることもない。
さらに加えて「架橋密度向上による緻密化」に起因して離型性が向上すると考えられる。なお、本実施形態においても一部活性基は形成されてしまうが、後述するカップリング剤や風乾処理にて、活性基を不活性化させている。
中間層の表面は、各種材料を用いて、適宜不活性化処理が施されてもよい。
不活性化処理としては、中間層の表面を不活性化させる処理であれば、特に制限はなく、目的に応じて適宜選択することができ、例えば、不活性化剤を前記中間層の表面に付与する処理が挙げられる。不活性化とは、中間層の表面を、化学反応を起こしにくい性質に変化させることを意味する。この変化は、プラズマ処理、コロナ放電処理、紫外線照射処理、電子線照射処理などによる励起又は酸化によって発生した活性基(例えば、-OHなど)を不活性化剤と反応させて、中間層の表面の活性度を下げることで得られる。
カップリング剤としては、例えば、金属アルコキシド、金属アルコキシドを含む溶液などが挙げられる。
R1 (4-n)Si(OR2)n・・・一般式(1)
ただし、一般式(1)中、R1及びR2は、それぞれ独立に、炭素数1~10の直鎖状又は分枝状のアルキル基、アルキルポリエーテル鎖、及びアリール基のいずれかを表す。nは、2~4の整数を表す。
中間層前駆体としてシリコーンゴムを用いた場合は、前記表面改質処理を行った後に、空気中に静置して風乾することにより、失活させてもよい。
中間層において、酸素濃度のプロファイルが極大値を示す位置と、炭素濃度のプロファイルが極小値を示す位置とは、一致することがより好ましい。
酸素濃度のプロファイル、及び炭素濃度のプロファイルは、X線光電子分光分析法(XPS)によって求めることができる。
測定方法は、例えば、以下の方法が挙げられる。
測定装置:Ulvac-PHI QuanteraSXM、アルバック・ファイ株式会社製
測定光源:Al(mono)
測定出力:100μmφ、25.1W
測定領域:500μm×300μm
パスエネルギー:55eV(narrow scan)
エネルギーstep:0.1eV(narrow scan)
相対感度係数:PHIの相対感度係数を使用
スパッタ源:C60クラスターイオン
Ion Gun 出力:10kV、10nA
Raster Control:(X=0.5,Y=2.0)mm
スパッタレート:0.9nm/min(SiO2換算)
XPSでは、光電子効果により飛び出す電子を捕捉することにより、測定対象物中の原子の存在濃度比や結合状態を知ることができる。
図2は、シリコーンゴムを用い、更に前記表面改質処理(プラズマ処理)及び前記不活性化処理を行って得られた中間層のサンプルである。図2において、横軸は表面から内部方向への分析深さであり、縦軸は存在濃度比である。
その結果を図3に示す。図3の測定対象は、図2の測定に用いたサンプルである。図3において、横軸は結合エネルギーであり、縦軸は強度比である。また、下から上に向かっては深さ方向での測定スペクトルを示している。
一般に、ピークシフトの量は結合状態に依存することが知られており、本件に関するシリコーンゴムの場合、Si2p軌道において高エネルギー側にピークがシフトするということは、Siに結合している酸素の数が増えていることを示す。
さらに図2のαの位置で検出された酸素の極大値は、Si2p結合エネルギーシフトが高エネルギー側にシフトすることと一致(図3のαの位置)しており、酸素増加がSiに結合した酸素の数に起因することが示されている。
図4には、図2にみられたような酸素濃度の極大値、及び炭素濃度の極小値は見られない。更に、図5より、Si2p結合エネルギーシフトが高エネルギー側にシフトする様子もみられないことから、Siに結合した酸素の数も変化していないことが確認された。
結果として、中間層は、3つ~4つの酸素原子と結合したケイ素原子を有するポリオルガノシロキサンを含有することとなる。
前処理:温度30℃相対湿度40%雰囲気に24h静置後、除電を60sec(Keyence製のSJ-F300を使用)
装置:Treck Model344
測定プローブ:6000B-7C
測定距離:2mm
測定スポット径:直径10mm
素子は、中間層と、第1の電極及び第2の電極の少なくともいずれかとの間に空間を有することが好ましい。そうすることにより、発電量を増やすことができる。
前記空間を設ける方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、中間層と、第1の電極及び第2の電極の少なくともいずれかとの間にスペーサを配置する方法などが挙げられる。
前記高分子材料としては、例えば、ポリエチレン、ポリプロピレン、ポリエチレンテレフタレート、ポリ塩化ビニル、ポリイミド樹脂、フッ素樹脂、アクリル樹脂などが挙げられる。前記ゴムとしては、例えば、シリコーンゴム、アクリルゴム、クロロプレンゴム、多硫化ゴム、ウレタンゴム、ブチルゴム、天然ゴム、エチレン・プロピレンゴム、ニトリルゴム、フッ素ゴム、イソプレンゴム、ブタジエンゴム、スチレン・ブタジエンゴム、アクリロニトリル・ブタジエンゴム、エチレン・プロピレン・ジエンゴム、クロロスルホン化ポリエチレンゴム、ポリイソブチレン、変成シリコーンなどが挙げられる。
前記スペーサの形態としては、例えば、シート、フィルム、織布、不織布、メッシュ、スポンジなどが挙げられる。
前記スペーサの形状、大きさ、厚み、設置場所は、素子の構造に応じて適宜選択することができる。
これにより、同じ変形付与力である加圧力Fが第1の電極a側と第2の電極c側に作用した場合、中間層bの第1の電極a側の変形の度合いが、第2の電極c側よりも小さくなる。
「動作の変更」とは、動作の停止や接触状態を解除する逆動作を意味する。
支軸8、固定リンク9、可動リンク10、11、12及び把持装置13により、可動部としてのロボットアーム14が構成されている。
可動リンク11の外側面には、フィルム状の非常停止用感圧センサ17が接着等の手段により設けられている。
本実施形態では、中間層4の厚み方向における両側を一対の電極で挟む積層構造の周囲全体がカバー18で覆われた構成となっている。
図8では厚みを誇張して表示しているが、非常停止用感圧センサ17の実際の厚みtは、せいぜい数百μmである。
上記の通り、中間層4はゴム又はゴム組成物からなり、積層方向における一方側が、該一方側と他方側とで同じ変形付与力に対する変形の度合いが異なるように且つ電荷を蓄積できるように表面改質処理及び/又は不活性化処理がなされている。
第1の電極2及び第2の電極3と中間層4との間の未接合部では、変形が生じると、変形時に中間層4とこれに対向する電極との間に摩擦ないし剥離帯電が生じ、電荷が蓄えられるとともに、中間層4と電極との間に静電容量の変化が生じて発電がなされる。
また、第1の電極2及び第2の電極3と中間層4との間の接合部では、変形が生じると、中間層4と電極との間に静電容量の変化が生じて発電がなされる。
制御手段19とロボットアーム14を旋回駆動する駆動源等との信号の授受は無線で行われてもよい。
図9(b)に示すように、ロボット5の動作中にロボットアーム14の旋回範囲に不意に作業者Sが進入した場合、ロボットアーム14の可動リンク11と作業者Sとが衝突し、怪我をする恐れがある。
後述するように、本実施形態に係る非常停止用感圧センサ17は接触時の圧力検出感度が非常に高い。このため、非常停止用感圧センサ17が作業者Sに接触すると、接触とほぼ同時に検出信号が制御手段19へ出力され、制御手段19はロボットアーム14の旋回駆動源への通電を遮断し、ロボットアーム14の旋回を停止させる。
本実施形態では可動リンク11に非常停止用感圧センサ17を設ける構成としたが、これに限定される趣旨ではない。人や物が接触する可能性のある範囲に適宜に設けることができる。
本実施形態に係る非常停止用感圧センサ17は薄肉のシート状であるので、特許文献1等のように中空体を複数設けることによる外観の嵩張りや見劣りも同時に解消することができる。
さらに、セラミック系のピエゾ素子では衝突時に破損してその都度交換をしなければならない事態も想定される。
比較評価は、タッキング試験機によりプローブを押し当て、その加圧を検知する時間を比較することで行った。
評価方法の概要としては、以下の3つの手順をそれぞれのセンサで実施し、データを取得した。
(2)図11に示すように、プローブ48の先端にスポンジ50を貼り付け、タッキングを行う。
(3)オシロスコープ46に表示された電圧波形を記録し、3回繰り返した平均データを取得波形とする。
表1に示すように、PVDFのヤング率が2GPaであるのに対し、本実施形態に係る非常停止用感圧センサ17の中間層4のヤング率は0.01GPaである。
比較結果を図12及びその部分拡大図である図13に示す。ゴム組成物からなる中間層4を有する本実施形態の非常停止用感圧センサ17では、電圧信号の出力が、プローブ48に取り付けられたスポンジ50が非常停止用感圧センサ17に接触してから約0.01sec(10msec)後に開始している。
これに対し、PVDFを用いた感圧センサでは、約0.04sec(40msec)後に開始している。すなわち、本実施形態に係る非常停止用感圧センサ17に対して、約0.03sec(30msec)の遅延を生じている。
センサ感度において、この大きな遅延が生じる理由は、上記のようにPVDFは中間層4に比べてヤング率が大きく硬いため、電圧信号の出力が開始する変形が生じるまで時間がかかるためである。
図14は、本実施形態の中間層4とPVDFのヤング率を測定し、信号出力開始時間との相関をプロットした図である。中間層のヤング率と信号出力開始時間はリニアな相関を持つことが確認された。
なお、中間層4のヤング率は、後述するゴム組成物の詳細な記載において硬度を測定している測定機(フィッシャー社製、超微小硬度計WIN-HUD)、及び同測定条件を用い、10μm深さの硬度より換算した値を用いている。
上記のように、PVDFを用いた感圧センサの場合、数十msecの検知遅れが生じるので、ある程度のダメージの進行を避けられない。
第2の実施形態では、位置固定されたロボット5の可動部分への非常停止用感圧センサ17の適用例を示したが、本実施形態では移動可能なロボットへの適用例を示す。
図15は、動作体としての人型ロボット22を示している。人型ロボット22の可動部である腕23や足24には、非常停止用感圧センサ17が設けられている。人型ロボット22の本体部には非常停止用感圧センサ17からの信号を受ける制御手段が設けられている。
上記のように非常停止用感圧センサ17による検知時間が非常に短いので、接触してから駆動停止までの時間が短く、接触ないし衝突によるダメージを軽減できる。
図16に示すように、動作体としての自走式ロボットである搬送車25の、例えば前面に非常停止用感圧センサ17を配置しても上記と同様の効果を得ることができる。
搬送車25には制御手段が設けられ、搬送車25が人や物に接触して非常停止用感圧センサ17から信号が発せられると、制御手段は搬送車25の駆動源への通電を遮断する。
本発明の実施の形態に記載された効果は、本発明から生じる最も好適な効果を例示したに過ぎず、本発明による効果は、本発明の実施の形態に記載されたものに限定されるものではない。
3 一対の電極の他方である第2の電極
4 中間層
5、22、25 動作体
17 非常停止用感圧センサ
19 制御手段
20 安全装置
21 安全システム
Claims (8)
- 信号により動作の変更が可能な動作体に設けられる非常停止用感圧センサであって、
一対の電極と、
ゴム又はゴム組成物で形成されて前記一対の電極間に設けられ、接触による変形で発電する中間層と、
を有する非常停止用感圧センサ。 - 請求項1に記載の非常停止用感圧センサにおいて、
前記中間層の厚み方向における両側を前記一対の電極で挟む積層構造を有している非常停止用感圧センサ。 - 請求項2に記載の非常停止用感圧センサにおいて、
前記中間層の積層方向における一方側と他方側とで同じ変形付与力に対する変形の度合いが異なる非常停止用感圧センサ。 - 請求項3に記載の非常停止用感圧センサにおいて、
前記中間層の前記一方側と他方側のうち前記変形の度合いが小さい側とこれに対向する電極とが、前記変形時に摩擦ないし剥離帯電が生じるように設けられている非常停止用感圧センサ。 - 請求項3に記載の非常停止用感圧センサにおいて、
前記中間層がシリコーンゴムである非常停止用感圧センサ。 - 請求項5に記載の非常停止用感圧センサにおいて、
前記シリコーンゴムは、シロキサン結合を有し、前記一方側と他方側のうち前記変形の度合いが小さい側から内部に向かって酸素が増加して極大値を持ち、且つ、前記変形の度合いが小さい側から内部に向かって炭素が減少して極小値を持つ濃度プロファイルを有している非常停止用感圧センサ。 - 請求項1に記載の非常停止用感圧センサと、
前記非常停止用感圧センサからの検出信号により前記動作体の動作を制御する制御手段と、
を備えた安全装置。 - 請求項7に記載の安全装置と、前記動作体とからなる安全システム。
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- 2016-12-14 CN CN201680083362.9A patent/CN108780014B/zh not_active Expired - Fee Related
- 2016-12-14 US US16/080,902 patent/US11534929B2/en active Active
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Also Published As
Publication number | Publication date |
---|---|
KR20180108817A (ko) | 2018-10-04 |
KR102097646B1 (ko) | 2020-04-06 |
US20190061179A1 (en) | 2019-02-28 |
EP3428595A4 (en) | 2019-03-20 |
CN108780014B (zh) | 2021-03-16 |
CN108780014A (zh) | 2018-11-09 |
US11534929B2 (en) | 2022-12-27 |
JP6493622B2 (ja) | 2019-04-03 |
EP3428595A1 (en) | 2019-01-16 |
JPWO2017154303A1 (ja) | 2018-09-20 |
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