WO2017130363A1 - 荷電粒子線装置およびその光軸調整方法 - Google Patents
荷電粒子線装置およびその光軸調整方法 Download PDFInfo
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- WO2017130363A1 WO2017130363A1 PCT/JP2016/052558 JP2016052558W WO2017130363A1 WO 2017130363 A1 WO2017130363 A1 WO 2017130363A1 JP 2016052558 W JP2016052558 W JP 2016052558W WO 2017130363 A1 WO2017130363 A1 WO 2017130363A1
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- particle beam
- focusing lens
- reduction ratio
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1475—Scanning means magnetic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1472—Deflecting along given lines
- H01J37/1474—Scanning means
- H01J37/1477—Scanning means electrostatic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
- H01J2237/1501—Beam alignment means or procedures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/15—Means for deflecting or directing discharge
- H01J2237/152—Magnetic means
Definitions
- the present invention relates to a charged particle beam apparatus, and more particularly, to a charged particle beam apparatus suitable for stably obtaining a high-intensity image by suppressing optical axis deviation.
- a charged particle beam apparatus represented by a scanning electron microscope or a transmission electron microscope
- a charged particle beam finely focused by an electrostatic lens, an electromagnetic lens, or the like is scanned on a sample, and desired information (for example, a sample image) is detected from the sample. Get.
- the off-axis chromatic aberration of the lens increases.
- An increase in aberration significantly reduces the resolution and resolution of the sample image.
- the optical axis shift causes a decrease in luminance of the sample image and a visual field shift during focus adjustment.
- the filament is cut in about several tens to several hundred hours.
- filament replacement work occurs. Since the position of the charged particle source changes before and after the filament exchange, it is necessary to adjust the axis to correct the change in position. The position of the charged particle source particularly affects the luminance when obtaining a sample image.
- an axis adjustment deflector (aligner) is used to minimize the movement of the sample image due to changes in the excitation current when the excitation current of the objective lens is periodically changed.
- a method of manually adjusting the operating conditions is known.
- Patent Document 1 by changing the excitation setting value of the aligner based on the transition of the electron beam irradiation position that changes between two excitation conditions of the objective lens, A technique for automatically adjusting the optical axis is disclosed.
- Patent Document 2 automatically sets the virtual position of the charged particle source electromagnetically so that the brightness of the sample image is increased by a gun alignment coil installed at the lower stage of the charged particle source.
- the technique of adjusting with is disclosed.
- optical conditions such as a focusing lens installed on the optical path are changed in order to adjust the dose of charged particles with which the sample is irradiated.
- the reduction ratio of the focusing lens is reduced to, for example, 1/300 to 1/2 when high resolution is obtained and when high brightness is required for elemental analysis or the like. 3 to change greatly.
- the optical condition is changed, the trajectory of the electron beam is changed and the optical axis is shifted.
- Patent Documents 1 and 2 can automatically adjust the optical axis of a charged particle beam, the virtual position of a charged particle source, and the like, but they do not cope with changes in optical conditions. That is, each time the optical condition is changed, the operator needs to adjust the optical axis and the virtual position of the charged particle source.
- the methods of Patent Documents 1 and 2 there is a possibility that a sample image with deteriorated luminance, resolution, or the like may be observed without realizing that the optical axis is shifted due to a change in optical conditions.
- the optical axis shift causes a visual field shift. Therefore, when the operator changes the optical axis condition, there is a possibility that the observation target may be lost due to a visual field shift.
- An object of the present invention relates to suppressing optical axis deviation even when optical conditions are changed.
- an embodiment of the present invention includes at least one charged particle source that emits a charged particle beam irradiated on a sample and a focusing lens that focuses the charged particle beam at a predetermined reduction ratio.
- the deflector is controlled to move the virtual position of the charged particle source.
- the present invention even when the optical conditions of a charged particle beam are changed, it is possible to suppress the optical axis shift of the charged particle beam.
- FIG. Flow chart of adjustment order in the first embodiment Schematic diagram of a circular image Simulation results of the magnitude of the optical axis deviation that occurs when the reduction ratio changes Simulation result of the optical axis deviation suppression rate when the beam center trajectory is matched between the maximum reduction rate and an arbitrary reduction rate The enlarged view between the 2nd focusing lens 8 and the objective aperture 9 in Example 2.
- FIG. Simulation results of optical axis misalignment that occurs when the reduction ratio is changed in Examples 1 and 2 Flow chart of adjustment order in the third embodiment In Example 3, an image displayed on the display device 29 Flowchart of adjustment order in the fourth embodiment
- FIG. 1 is a schematic view of a scanning electron microscope, which is one of charged particle beam apparatuses.
- the following description is not limited to the scanning electron microscope, but can be applied to a transmission electron microscope, a scanning transmission electron microscope, a focused ion beam apparatus, and the like.
- This scanning electron microscope has a filament 1 that emits a primary electron beam 4 for irradiating a sample 14, a Wehnelt 2 that focuses the primary electron beam 4, and a primary electron beam 4 that passes through the Wehnelt 2 at a predetermined acceleration voltage Vacc .
- the anode 3 that accelerates and guides the primary electron beam 4 to the downstream (rear stage) electron optical system, the stage 15 for placing the sample 14 controlled by the stage control circuit 27, the computer 28 that controls the entire apparatus, and the like.
- the current flowing through the filament 1, the voltage applied to the Wehnelt 2, the acceleration voltage V acc and the like are controlled by the high voltage control circuit 19.
- the optical axis adjustment method in the embodiment is particularly effective when the filament 1 is a heat emission type.
- the filament 1 is not limited to the heat emission type, and may be a field emission type or a Schottky type.
- the electron optical system focuses the upper and lower gun alignment coils 5 and 6 and the primary electron beam 4 that can adjust the virtual position of the filament 1 and the inclination of the primary electron beam 4 at a predetermined reduction rate.
- the first focusing lens 7 and the second focusing lens 8, the upper deflection coil 11 and the lower deflection coil 12 for scanning the primary electron beam 4 two-dimensionally on the sample 14, and the primary electron beam 4 are focused on the sample 14.
- Objective lens 13 and the like are provided.
- the electron optical system includes an aligner 10 for passing the primary electron beam 4 to the center of the objective lens 13.
- the elements of these electron optical systems are to adjust the irradiation conditions of the specimen of the primary electron beam 4 by applying an electromagnetic force to the primary electron beam 4.
- the electrostatic induction method and the electromagnetic induction method are used according to the purpose. Can be combined freely.
- Each control circuit controls the operation of each element by adjusting the current amount and voltage value of each element.
- the electron optical system includes an objective aperture 9 for limiting the amount of irradiation of the sample 14 of the primary electron beam 4.
- the objective aperture 9 is disposed closer to the filament 1 than the objective lens 13, and is desirably disposed between the second focusing lens 8 and the objective lens 13.
- An aperture other than the objective lens aperture 9 may exist in the electron optical system.
- the number of stages of the gun alignment coil is two, but the number of stages of the gun alignment coil may be one or more. However, two or more stages are desirable for the following reasons.
- the primary electron beam 4 When the filament 1 is attached obliquely, the primary electron beam 4 is emitted with an inclination. In that case, in order to use the brightest part of the primary electron beam 4, it is necessary to deflect the primary electron beam 4 using a gun alignment coil to compensate for the inclination of the primary electron beam 4.
- the gun alignment coil deflector
- the inclination of the primary electron beam 4 is compensated and the virtual position of the filament 1 is also changed.
- the change in the virtual position of the filament 1 also affects the optical axis.
- the gun alignment coil has two or more stages, it is possible to control to change only the tilt angle of the primary electron beam 4 without changing the virtual light source position. Therefore, when there are two or more gun alignment coils, adjustment can be made so that the luminance of the sample image is maximized while maintaining the optical axis.
- the first focusing lens 7 and the second focusing lens 8 change the reduction rate of the primary electron beam 4 by controlling the excitation of the electromagnetic lens.
- the reduction ratio changes, the spread angle of the primary electron beam 4 when passing through the objective aperture 9 changes.
- the divergence angle of the primary electron beam 4 is large (when the reduction ratio is large)
- the amount of blocking of the primary electron beam 4 by the objective aperture 9 is large, so that the amount of irradiation of the primary electron beam 4 onto the sample 14 is small.
- the divergence angle of the primary electron beam 4 is small (when the reduction ratio is small)
- the irradiation amount to the sample 14 is large. That is, the amount of irradiation of the primary electron beam 4 onto the sample 14 can be adjusted by changing the reduction ratio of the primary electron beam 4 using the focusing lens.
- the reduction ratio of the primary electron beam 4 by the focusing lens may be referred to as “the reduction ratio of the primary electron beam 4” or “the reduction ratio of the focusing lens”.
- the number of stages of the focusing lens is two, but the number of stages of the focusing lens may be one or more.
- a larger reduction ratio can be obtained.
- the reduction ratio may be represented by a decimal number or a fraction (for example, 0.2 times or 1/5).
- the reduction ratio is 1.
- “when the reduction rate is large” may be said to be “when the (primary electron beam 4) is reduced more strongly”. Comparing the case where the reduction ratio is 0.2 times (1/5) and the case where it is 1, the numerical value is 0.2 times smaller, but the reduction rate is 0.2 times larger.
- the objective lens 13 is an out-lens type, it may be a semi-in-lens (snorkel lens) type or an in-lens type.
- the primary electron beam 4 that has passed through the electron optical system is irradiated onto the sample 14.
- the secondary electrons and reflected electrons generated from the primary electron beam irradiation point of the sample 14 and the signal 16 such as X-rays by the detector 17 and amplifying the signal by the amplifier 18 connected to the signal control circuit 26, Obtain an electron microscope image of the sample surface.
- the computer 28 is connected to various control circuits and controls the entire apparatus.
- Information of the signal 16 such as secondary electrons amplified by the amplifier 18 is displayed on a display device 29 connected to the computer 28.
- the computer 28 is connected to a storage means 30 for storing observation images and calculation results, and an input means 31 for inputting observation conditions and the like.
- image acquisition means for acquiring the observation image displayed on the display device 29 as image information
- image processing means for performing various image processing on the observation image
- calculation for calculating sensitivity parameters of the electron optical system, etc. Means or the like may be connected.
- the configuration of the control circuit or the like may be a configuration using a control circuit having a plurality of control functions or a configuration using a plurality of computers or display devices.
- FIG. 2 is an explanatory diagram of the principle that the optical axis shift and the visual field shift occur when the reduction ratios of the first focusing lens 7 and the second focusing lens 8 are changed.
- FIG. 2A is an overall view from the filament 1 to the sample 14, and
- FIG. 2B is an enlarged view of the vicinity of the second focusing lens 8 and the objective aperture 9.
- the filament 1, the first focusing lens 7, and the second focusing lens 8 are arranged so that the central axes thereof coincide with the central axis (optical axis 32) of the objective lens 13, and the objective aperture 9 is the second one.
- the focusing lens 8 is installed at a position separated by L C2_APT at the lower stage, and its center axis is deviated from the optical axis 32 by ⁇ r APT .
- the objective lens 13 is installed at a position separated by L OBJ_APT in the lower stage of the objective aperture 9.
- the central axis of the objective lens 13 is described as the optical axis 32.
- the optical axis 32 may be considered based on the axis of other components.
- the aligner 10 is installed on the upper stage of the objective lens 13 at a distance of L OBJ_AL .
- the aligner 10 adjusts the primary electron beam 4 so that the beam center trajectory passes through the center of the objective lens 13.
- the beam center trajectory when the reduction ratio of the first focusing lens 7 and / or the second focusing lens 8 is changed, if the center of the objective aperture 9 is displaced from the optical axis, primary electrons that can pass through the objective aperture 9 depending on the size of the reduction aperture. Since the angle of the beam 4 is different, the beam center trajectory changes.
- the beam center trajectory when the reduction ratio of the focusing lens is large will be described as a first central trajectory 33
- the beam center trajectory when the reduction ratio of the focusing lens is small will be described as a second central trajectory 34.
- the observation position changes due to the change in the focus of the objective lens 13 without changing the reduction ratio. As a result, it becomes difficult to adjust the focus of the charged particle beam apparatus.
- the aligner 10 needs to be adjusted so that the beam center trajectory passes through the optical axis 32 on the main surface 35.
- FIG. 3 is an enlarged view from the second focusing lens 8 to the objective lens 13 in FIG. However, the upper deflection coil 11 and the lower deflection coil 12 are not shown.
- the first focusing lens 7 and the second focusing lens 8 change the position of the focusing point to be formed by controlling the reduction ratio.
- the focal point O C2_HM when the reduction ratio is large is located at a distance b 2_HM from the second focusing lens 8
- the focusing point O C2 -LM when the reduction ratio is small is from the second focusing lens 8.
- the respective focusing points O C2_HM and O C2_HM are also formed on the optical axis 32.
- the central trajectory of the electron beam applied to the sample is determined by a straight trajectory connecting the focusing point and the objective aperture 9.
- the inclination ⁇ C2_HM of the first central trajectory 33 (when the reduction ratio is large) when passing through the objective aperture 9 is expressed by the following equation.
- ⁇ C2_HM ⁇ r APT / (L C2_APT -b 2_HM )
- the first central orbit 33 is off-axis from the optical axis 32 by ⁇ r AL_HM at the position of the aligner 10, and ⁇ r AL_HM is expressed by the following equation.
- ⁇ r AL_HM (L C2_APT -b 2_HM + L OBJ_APT -L OBJ_AL ) ⁇ C2_HM
- ⁇ AL ⁇ r AL_HM / L OBJ_AL + ⁇ C2_HM
- the inclination ⁇ C 2_LM of the second central orbit 34 (when the reduction ratio is small) when passing through the objective aperture 9 and the off-axis amount ⁇ r AL_LM of the second central orbit 34 in the aligner 10 are expressed by the following equations. Is done.
- the reduction rate of the primary electron beam 4 by the focusing lens is reduced. This is because, as described above, by reducing the reduction ratio, the blocking amount of the primary electron beam 4 by the objective aperture 9 is also reduced, and as a result, the irradiation amount of the primary electron beam 4 is increased.
- the reduction rate is controlled to about 1/5.
- the reduction ratio varies greatly depending on the purpose of observation.
- the difference between the focusing points O C2_HM and O C2-LM also increases, and the amount of optical axis deviation (P 1_LM -P 1_HM ) also increases .
- a charged particle source that emits a charged particle beam irradiated on a sample
- a focusing lens system that includes at least one focusing lens that focuses the charged particle beam at a predetermined reduction ratio, and the most downstream of the focusing lens systems
- a control unit for controlling the deflector and the focusing lens system, and the control unit is configured to control the focusing lens.
- a charged particle beam apparatus that controls the deflector so that the virtual position of the charged particle source is moved to a position that suppresses the deviation of the central trajectory of the charged particle beam downstream of the focusing lens system due to a change in the reduction ratio of the system.
- a charged particle beam apparatus that controls the second central trajectory of the charged particle beam downstream of the focusing lens system to have the same reduction ratio.
- the focusing lens system when there are two or more focusing lenses, and the focusing lens system has a third reduction ratio other than the first reduction ratio and the second reduction ratio, it is between the focusing lens system and the sample.
- the third central trajectory of the charged particle beam downstream of the focusing lens system when the focusing lens system has a third reduction ratio is changed to the first central trajectory or the second central trajectory.
- a charged particle beam device that is controlled so as to coincide with a central trajectory.
- the objective lens for focusing the charged particle beam on the sample and the adjusting means for adjusting the irradiation condition of the charged particle beam to the sample are provided, and the focusing lens system has the first reduction ratio.
- the adjustment means is controlled so that the first central trajectory passes through the central axis of the objective lens on the main surface of the objective lens, the first central trajectory is controlled to coincide with the second central trajectory.
- an objective lens that focuses the charged particle beam on the sample, a diaphragm disposed on the path of the charged particle beam, and detection that detects a signal obtained by scanning the charged particle beam on the diaphragm.
- signal processing means for forming an image indicating the positional relationship between the central axis of the objective lens and the central trajectory of the charged particle beam downstream of the focusing lens system from the signal of the detector and the detector, and the signal processing means Disclosed is a charged particle beam device having a display for displaying an image, an adjustment unit by a control unit, and a condition operation unit for operating a control condition of a deflector.
- a charged particle beam apparatus having a fixed aperture is disclosed.
- control condition of the adjusting means and the deflector can be independently operated when the focusing lens system has the first reduction ratio and when the focusing lens system has the second reduction ratio.
- a charged particle beam device is disclosed.
- a charged particle source that emits a charged particle beam irradiated to a sample
- a focusing lens system that includes at least one focusing lens that focuses the charged particle beam at a predetermined reduction ratio, and a focusing lens system
- a deflector that is positioned between the most downstream focusing lens and the charged particle source and moves the virtual position of the charged particle source
- an adjusting means for adjusting the irradiation condition of the charged particle beam to the sample, and the charged particle beam on the sample
- An objective lens that focuses on the object
- a detector that detects a signal obtained when the charged particle beam collides with the object, and a central axis of the objective lens and a charged particle beam downstream of the focusing lens system from the detector signal.
- It has signal processing means for collecting information on the positional relationship with the central orbit, a display, and condition operating means for operating the operating conditions of the adjusting means and the deflector, and is collected by the signal processing means on the display.
- Information on the positional relationship between the central axis of the objective lens and the central trajectory of the charged particle beam is displayed, and the charged particle beam downstream of the focusing lens system when the focusing lens system has the first reduction ratio is displayed.
- Conditional operation to match one central trajectory with the second central trajectory of the charged particle beam downstream of the focusing lens system when the focusing lens system has a second reduction ratio smaller than the first reduction ratio Disclosed is a charged particle beam device that displays on a display a user interface that prompts the user to operate the means.
- a charged particle beam device that facilitates manipulating the operating conditions of the deflector so that the first central trajectory and the second central trajectory coincide.
- the diaphragm has a diaphragm arranged on the path of the charged particle beam, the detector detects a signal obtained by scanning the charged particle beam on the diaphragm, and the signal processing means detects Disclosed is a charged particle beam apparatus that forms an image showing the positional relationship between the central axis of the objective lens and the central trajectory of the charged particle beam from the signal of the instrument, and displays the image formed by the signal processing means on the display .
- the first charged particle beam before and after the generation of the lens effect is adjusted by adjusting the deflection angle of the charged particle beam by the electron optical system.
- a method for adjusting a charged particle beam apparatus comprising: matching a second central trajectory of a charged particle beam with a first central trajectory before and after the occurrence of an effect.
- a charged particle beam apparatus that adjusts the deflection angle of the charged particle beam so that the first central trajectory passes through the center of the electromagnetic field that causes the lens effect.
- the signal processing means includes a center of an electromagnetic field that brings about a lens effect and a first center trajectory of the charged particle beam after the generation of the lens effect from a signal obtained when the charged particle beam collides with an object.
- a center of an electromagnetic field that brings about a lens effect and a first center trajectory of the charged particle beam after the generation of the lens effect from a signal obtained when the charged particle beam collides with an object.
- the signal processing means includes a center of an electromagnetic field that brings about a lens effect and a first center trajectory of the charged particle beam after the generation of the lens effect from a signal obtained when the charged particle beam collides with an object.
- the signal processing means calculates the adjustment amount of the virtual position of the charged particle source from the positional relationship information. Disclosed is a method for adjusting a particle beam device.
- the signal processing means determines the position of the center of the electromagnetic field that causes the lens effect and the center trajectory of the charged particle beam after the generation of the lens effect from the signal obtained when the charged particle beam collides with the object.
- the signal processing means displays a user interface for displaying the positional relationship between the center of the electromagnetic field and the first central trajectory.
- the signal processing means displays a user interface for displaying the positional relationship between the center of the electromagnetic field and the second central trajectory.
- the basic configuration of the charged particle beam apparatus in the present embodiment can be the same as that shown in FIG.
- the optical axis shift described so far is caused by the fact that the focusing points O C2_HM and O C2-LM formed at the subsequent stage of the second focusing lens 8 are not on the same trajectory. In other words, if the focusing points O C2_HM and O C2-LM can be positioned on the same trajectory, it is possible to suppress the optical axis shift due to the change in the reduction ratio.
- the position of the virtual electron source (virtual position 36) is moved by the gun alignment coil so that the focal point when the reduction ratio is small is placed on the beam center trajectory when the reduction ratio is large. To do.
- the gun alignment coil uses an image (filament image) obtained by scanning the primary electron beam 4 with the upper gun alignment coil 5 and / or the lower gun alignment coil 6, and the sample image under the optical conditions at that time. It has been used to maximize brightness.
- the replacement frequency of the filament 1 is high, and the virtual position 36 of the filament 1 is adjusted using a gun alignment coil or the like at that time. As a result, the optical conditions change every time adjustment is performed.
- the optical axis shift when the optical conditions change can be suppressed by adjusting the method shown in the present embodiment at the time of filament replacement.
- FIG. 4 is a beam trajectory diagram when the focusing point O ′ C2_LM when the reduction ratio is small is arranged on the first central trajectory 33 by the gun alignment coil.
- FIG. 5 is an enlarged view between the second focusing lens 8 and the objective aperture 9.
- M C_LM be the reduction ratio when the reduction ratio is small.
- a new focusing point O ′ C2_LM when the reduction ratio is small can be arranged on the first central orbit 33 (the first central orbit 33 and the second central orbit 34 are substantially the same). ).
- the movement of the virtual position 36 also affects the converging point when the reduction ratio is large, and the new converging point when the reduction ratio is large is O ′ C2_HM . Therefore, it is considered that the first central track 33 changes before and after the gun alignment coil is driven.
- the reduction rate M C_HM when the reduction rate is large is 100 times or more of M C_LM . Therefore, the movement amount ⁇ O C2_HM of the focusing point when the reduction ratio is large is 1/100 or less compared to ⁇ O C2_LM , and the influence of the movement of the virtual position 36 can be almost ignored (O C2_HM ⁇ O ′ C2_HM ). That is, when the reduction ratio is small, the focal point moves from O C2_LM to O ′ C2_LM and the beam trajectory changes, but when the reduction ratio is large, the focal point hardly moves. That is, regardless of the movement of the virtual position 36, the first central trajectory 33 is maintained.
- the first central trajectory 33 and the second central trajectory 34 are almost the same. It will be the same. As a result, even if the central axis of the objective aperture 9 is deviated from the optical axis 32, it is possible to suppress the optical axis deviation and the visual field deviation accompanying the change in optical conditions.
- an objective aperture movable mechanism for returning the objective aperture 9 to an ideal position is provided.
- the objective aperture moving mechanism is not necessary.
- FIG. 6 is a flowchart of the adjustment order in this embodiment.
- STEP601 The operator gives an instruction to start adjustment to the computer 28 via the input means 31.
- the computer 28 instructs the first focusing lens control circuit 21 and the second focusing lens control circuit 22 to set the reduction ratios of the two focusing lenses of the first focusing lens 7 and / or the second focusing lens 8 to a large state. To do.
- STEP 602 When the optical conditions with a large reduction ratio are not optimal, the operator or the computer 28 adjusts the optical conditions by a method to be described later if necessary.
- STEP 603 The computer 28 stores the optical conditions (including information on the first central trajectory 33) in the storage unit 30 in a state where the reduction ratio of the focusing lens is large as necessary.
- STEP 604 The operator or the computer 28 issues an instruction to the first focusing lens control circuit 21 and the second focusing lens control circuit 22, and sets the reduction ratios of the two focusing lenses of the first focusing lens 7 and / or the second focusing lens 8. Set to a small state.
- STEP 605 The operator or the computer 28 instructs the gun alignment control circuit 20 while referring to the optical conditions stored in the storage means 30, and adjusts the upper gun alignment coil 5 and / or the lower gun alignment coil 6. The adjustment is performed so that the first central track 33 and the second central track 34 are matched.
- the adjustment is completed by the above steps. As a result, even when the state of the charged particle beam changes, such as when the optical conditions are changed, it is possible to suppress the deviation of the optical axis and the visual field.
- the optical conditions are adjusted in a state where the reduction ratio of the focusing lens is large, and the optical conditions are recorded in the storage unit 30.
- the first central trajectory 33 and the second central trajectory 34 are set. In order to match, typically, any one of the methods described below (or a combination thereof) can be used.
- the first method is to change the excitation of the objective lens 13 in STEP 602 using the objective lens control circuit 25 (although it is desirable to change the excitation to a periodic sine wave shape, a triangular wave shape, or a rectangular wave shape, but not limited thereto).
- the aligner 10 is adjusted by using the aligner control circuit 23 so that the visual field shift of the sample image at that time is minimized.
- the focus position of the primary electron beam 4 changes.
- the visual field shift accompanying the change in the focus position increases.
- the excitation of the objective lens 13 is changed using the objective lens control circuit 25, and adjustment is performed so that the visual field shift of the sample image is minimized.
- the upper gun alignment coil 5 and / or the lower gun alignment coil 6 are adjusted using the gun alignment control circuit 20.
- the beam center orbit condition is such that the field shift due to the excitation change of the objective lens 13 is minimized. Therefore, by using this method, the first central track 33 and the second central track 34 can be matched.
- the position of the visual field displayed as the sample image is stored in the storage means 30, or the reference point of the sample image or the position of the reference figure is drawn on the display device 29. Is the method.
- the upper gun alignment coil 5 and / or the lower gun alignment coil 6 are adjusted using the gun alignment control circuit 20 in a state where the reduction ratio of the focusing lens is small, and the field of view stored in STEP 603 is matched with the current field of view.
- the third method is to scan the primary electron beam 4 on the objective lens 13 or a diaphragm (not shown) for controlling the degree of vacuum inside the electron optical system installed in the objective lens 13, and the like. This is a method using a circular image obtained at the time.
- the scanning of the primary electron beam 4 is realized by changing the ratio of the deflection currents of the upper deflection coil 11 and the lower deflection coil 12.
- FIG. 7 is a schematic diagram of a circular image obtained by this method.
- the center 38 of the circular image 37 represents the center (optical axis 32) of the objective lens.
- the center 39 of the entire image represents the center of the primary electron beam 4 (the first central trajectory 33 or the second central trajectory 34).
- the positional relationship between the optical axis 32 and the center of the primary electron beam 4 can be visualized by the circular image 37.
- FIG. 7 in order to show the center 38 of the circular image 37, a cross is drawn with a black line inside the circular image 37. This cross is drawn for convenience and is not necessarily a necessary display.
- the aligner 10 is adjusted using the aligner control circuit 23 in STEP 602, and the circular image 37 is adjusted. Assume that the center 38 and the center 39 of the entire image coincide with each other (the state shown in FIG. 7B). As a result, the primary electron beam 4 passes through the optical axis 32 on the main surface 35.
- the upper gun alignment coil 5 and the lower gun alignment coil are used by using the gun alignment control circuit 20 so that the center 38 of the circular image 37 coincides with the center 39 of the entire image using the circular image 37. Adjust 6.
- the aligner 10 is adjusted to make the center 38 of the circular image 37 coincide with the center 39 of the entire image.
- the position of the center 38 of the circular image 37 is stored in the storage means 30 in STEP 603, and the position of the center 38 of the circular image 37 in STEP 605 (the position when the reduction ratio is small) is stored. It is good also as what is made to correspond to a position (position in case a reduction rate is large).
- FIG. 8 is a simulation result of the magnitude of the optical axis deviation that occurs when the reduction ratio of the focusing lens changes. Two kinds of simulations are performed, the case where the adjustment shown in the present embodiment is performed and the case of the conventional case.
- the magnitude of the optical axis deviation (vertical axis) is represented by the amount of change in the deflection angle for the aligner 10 to pass the beam center trajectory through the center of the objective lens 13.
- the beam center trajectory at the subsequent stage of the second focusing lens 8 is obtained when the reduction ratio of the focusing lens is maximum (0.0029 times) and when the reduction ratio is minimum (0.18 times). It was assumed that they would be matched.
- the amount of optical axis deviation increases as the reduction ratio decreases.
- the first central trajectory 33 and the second central trajectory 34 are substantially matched between the maximum reduction ratio and the minimum reduction ratio.
- the amount of optical axis deviation at the point is almost zero.
- the optical axis deviation is suppressed even in the case of other reduction ratios.
- the maximum value of the optical axis deviation amount was about 0.84 milliradians (reduction ratio of about 0.1 to 0.12 times).
- the maximum value of the optical axis deviation in the conventional case is approximately 3.5 milliradians (reduction ratio 0.18 times). That is, the adjustment shown in this embodiment suppresses the maximum value of the optical axis deviation by 76%.
- the gun alignment coil is adjusted so that the beam center trajectory coincides with the case where the reduction ratio of the focusing lens is the maximum and the minimum, but the reference reduction ratio is It does not have to be the maximum or minimum.
- FIG. 9 is a simulation result of the optical axis deviation suppression rate when the beam center trajectory is matched between the maximum reduction rate and an arbitrary reduction rate.
- the suppression rate of the optical axis deviation was obtained by (1 ⁇ (maximum value of optical axis deviation) / (maximum value of optical axis deviation in the conventional case)).
- the optical axis deviation can be suppressed.
- the optical axis deviation can be suppressed by about 70%.
- the beam center trajectory is matched between the maximum reduction ratio and an arbitrary reduction ratio.
- the beam center trajectory may be matched between an arbitrary reduction ratio and the minimum reduction ratio, or the beam center trajectory may be matched between an arbitrary reduction ratio and an arbitrary reduction ratio.
- the adjustment according to the present embodiment can be performed while improving the signal / noise ratio by matching the beam center trajectories with the maximum reduction ratio as a reference, for example, by using the 0.02 times reduction ratio as a reference. it can.
- Example 2 relates to an optical axis adjustment method capable of further suppressing optical axis deviation in a charged particle beam apparatus having the same configuration as that of Example 1.
- the difference from the first embodiment will be mainly described.
- the beam center trajectories are adjusted to be the same at two predetermined reduction ratios (for example, the maximum reduction ratio and the minimum reduction ratio).
- two predetermined reduction ratios for example, the maximum reduction ratio and the minimum reduction ratio.
- FIG. 10A shows a state between the second focusing lens 8 and the objective aperture 9 when the focusing point O C2_MM of the second focusing lens 8 is at an arbitrary position b 2_MM where b 2_HM ⁇ b 2_MM ⁇ b 2_LM . It is an enlarged view.
- b A beam center trajectory passing through 2_MM is defined as a third center trajectory 40.
- the distance ⁇ O C2_MM (in the direction perpendicular to the lens central axis) between the focal point O C2_MM and the first central trajectory 33 (when the reduction ratio is large) is expressed by the following equation.
- ⁇ O C2_MM ⁇ C2_HM * (b 2 -b 2_HM )
- ⁇ C2_HM ⁇ O C2_LM / (b 2_LM -b 2_HM )
- the virtual movement amount of the electron source OG_AL and ⁇ O C2_LM have the relationship represented by the following equation.
- ⁇ O C2_LM O G_AL * M C_LM
- the moving amount ⁇ O ′ C2_MM of the focusing point in an arbitrary b 2_MM is expressed by the following equation, where the reduction ratio of the focusing lens at this time is M C_MM .
- ⁇ O ' C2_MM O G_AL * M C_MM Therefore, by adjusting the reduction rate M C_MM and the focusing point O C2_MM so that the movement amounts ⁇ O ′ C2_MM and ⁇ O C2_MM at this time coincide with each other, the optical axis deviation can be suppressed even for an arbitrary reduction rate. it can.
- the first central trajectory 33, the second central trajectory 34, and the third central trajectory 40 substantially coincide with each other.
- M C_MM M C_LM * (b 2_MM -b 2_HM ) / (b 2_LM -b 2_HM )
- FIG. 11 shows a simulation result of the optical axis deviation that occurs when the reduction ratio of the focusing lens is changed in the method shown in the first and second embodiments.
- the method of the first embodiment can also suppress the optical axis shift
- the optical axis shift can be further suppressed than the first embodiment.
- the optical axis deviation amount is kept substantially constant.
- Example 1 and Example 2 are compared at a reduction ratio (about 0.1 to 0.12 times) with the largest optical axis deviation in the case of Example 1, the optical axis deviation of Example 2 is 1 is about 1/20.
- the focal point O C2_MM of the second focusing lens 8 is located at an arbitrary position b 2_MM where b 2_HM ⁇ b 2_MM ⁇ b 2_LM has been described, but b 2_HM > b 2_MM may be used. However , b 2_MM > b 2_LM may be satisfied .
- the order of grasping information on the first central trajectory 33 and adjusting the gun alignment coil when the reduction rate is small is important.
- a method will be described in which an operator can easily adjust according to a desired order. The following description will focus on differences from the previous embodiments.
- the adjustment is performed by the method of moving the center 38 of the circular image 37 to the center 39 of the entire image described with reference to FIG. Will be described.
- the idea shown in this embodiment can be applied to other methods.
- the operator can instruct the computer 28 to start adjustment via the input means 31.
- the computer 28 receives an instruction to start adjustment from the operator, the computer 28 starts processing according to the flow of FIG.
- STEP 1201 Before adjustment, the operator observes the sample under arbitrary conditions. For this reason, when performing the adjustment according to this embodiment, it is desirable to set the optical conditions suitable for the adjustment.
- the adjustment method using the circular image 37 described in FIG. 7 is used.
- the computer 28 is set so that the primary electron beam 4 scans the objective lens 13.
- the adjustment is started from a state where the reduction ratio of the focusing lens is large. Therefore, the computer 28 instructs the first focusing lens control circuit 21, the second focusing lens control circuit 22 and the like to set a large reduction ratio of the focusing lens.
- the brightness of the circular image 37 displayed at this time varies depending on the conditions before adjustment.
- the computer 28 sets the brightness of the circular image 37 to an optimum brightness for adjustment through the signal control circuit 26.
- various parameters such as the degree of vacuum inside the apparatus, the focal position of the primary electron beam 4 and / or the position of the sample 14 may be set.
- STEP1202 The computer 28 displays the image of FIG. 13A on the display device 29.
- the center 38 of the circular image 37 represents the center (optical axis 32) of the objective lens.
- the center 39 of the entire image represents the center of the primary electron beam 4 (first central trajectory 33).
- an X slider bar 41 and a Y slider bar 42 are provided.
- the computer 28 instructs the aligner control circuit 23 or the gun alignment control circuit 20 to move the center position of the primary electron beam 4.
- the amount of movement at this time is determined according to the designated value of the X slider bar 41 and / or the Y slider bar 42.
- the means for moving the center position of the primary electron beam 4 is not limited to the slider bar.
- an input value to the control circuit or a current value of the aligner 10 or the like may be directly input. You may provide the button etc. which increase / decrease an input value.
- a controller such as a trackball or a cross key may be provided, and the center position of the primary electron beam 4 may be moved in accordance with an input from the controller.
- Various other configurations are possible.
- a reset button 43 may be provided on this screen for the convenience of the operator.
- the computer 28 controls each component so as to reset the movement of the primary electron beam 4 according to the X slider bar 41 and the Y slider bar 42 (each slider bar is in the center). Back to).
- STEP 1203 The computer 28 sets the control object by the X slider bar 41 and the Y slider bar 42 in the aligner control circuit 23 (via the aligner 10). STEP 1203 allows the operator to adjust the aligner 10 when the reduction ratio is large.
- STEP 1204 The operator uses the X slider bar 41 and / or the Y slider bar 42 to align the optical axis 32 and the first central trajectory 33 (the center 38 of the circular image 37 and the center 39 of the entire image). Match).
- FIG. 13B shows a display on the display device 29 when they match. After matching the centers, the operator presses the next step transition button 44 and proceeds to the next step.
- STEP 1205 The computer 28 issues an instruction to the first focusing lens control circuit 21, the second focusing lens control circuit 22, etc., and sets the reduction ratio of the focusing lens to be small. Since the brightness and the like can change due to the change in the reduction ratio, the computer 28 also sets the brightness and other optical condition settings.
- STEP 1206 The computer 28 displays the screen shown in FIG. 13C on the display device 29.
- the behavior of the X slider bar 41, the Y slider bar 42, and / or the reset button 43 is the same as that described in STEP 1202.
- STEP 1207 The computer 28 sets the object to be controlled by the X slider bar 41 and the Y slider bar 42 in the gun alignment control circuit 20 (the upper gun alignment coil 5 and the lower gun alignment coil 6 via the gun alignment control circuit 20). STEP 1207 allows the operator to adjust the gun alignment coil when the reduction rate is small.
- the operator must adjust each gun alignment coil. Therefore, when a plurality of gun alignment coils are provided, it is possible to reduce the parameters adjusted by the operator by determining the control ratio of the plurality of gun alignment coils in advance.
- STEP 1208 The operator uses the X slider bar 41 and the Y slider bar 42 to match the optical axis 32 and the first center trajectory 33 (the center 38 of the circular image 37 and the center 39 of the entire image are matched). ).
- FIG. 13D shows a display on the display device 29 when they match. After matching the centers, the operator presses the adjustment completion button 45 to determine the optical conditions.
- the circular image 37 is moved to an arbitrary position, and the position of the circular image 37 in STEP 1208 (the circular image when the reduction ratio is small) is changed to the position of the circular image 37 (reduction ratio) in STEP 1204. It is good also as what operates so that it may match the position of the circular image in case of large. “Move circular image to any position” may not move the circular image at all.
- Example 4 describes a method for automatically performing the adjustment shown in the above examples. The following description will focus on differences from the previous embodiments.
- FIG. 14 shows a flowchart of the adjustment method of the present embodiment. Details of the flow will be described below.
- STEP1401 The computer 28 performs processing equivalent to STEP1201 (setting of beam scanning conditions, reduction ratio, brightness, etc.).
- STEP1402 The adjustment method shown in the third embodiment requires STEP1202, in which the operator manually adjusts while viewing the screen display.
- the computer 28 since the computer 28 automatically adjusts, the step corresponding to STEP 1202 is not necessarily required. Therefore, the computer 28 sets the control target of the next step (STEP 1403) to the aligner control circuit 23 (the aligner 10 via).
- STEP1403 The computer 28 performs automatic adjustment of optical conditions, which is a process corresponding to STEP1204. According to STEP 1402, the control target at the time of automatic adjustment is the aligner control circuit 23.
- the automatic adjustment can be realized by measuring the position of the center 38 of the circular image 37 by image processing and determining the input value to the aligner control circuit 23 based on the position of the center 38 of the circular image 37.
- image processing other known image processing methods may be used, and for example, the processing may be replaced with a process for obtaining the position of the center of gravity of the circular image 37.
- image processing it is expressed as “image” processing.
- the computer 28 may receive an unimaged signal value from the detector 17 and determine an input value to the aligner control circuit 23 from the signal value.
- STEP 1404 The computer 28 performs processing equivalent to STEP 1205 (setting of beam scanning conditions, reduction ratio, brightness, etc.).
- STEP 1405 The computer 28 sets the control target of the next step (STEP 1406) to the gun alignment control circuit 20 (the upper gun alignment coil 5 and the lower gun alignment coil 6 via the gun alignment control circuit 20). As described in STEP 1402, in this embodiment, the steps corresponding to STEP 1206 are not necessarily required.
- STEP 1406 The computer 28 performs automatic adjustment of optical conditions, which is a process corresponding to STEP 1208. According to STEP 1405, the gun alignment control circuit 20 is the control target in the automatic adjustment.
- the operator adjusts the optical conditions while viewing the image on the display device 29.
- the steps corresponding to STEP 1204 and STEP 1208 of the third embodiment are automatically processed, so that the operator can save time and effort, and stable adjustment is possible regardless of the operator's skill. Even a beginner can easily make adjustments.
- the computer 28 records the position of the circular image 37 in the storage means 30, and the position of the center 38 of the circular image 37 in STEP 1406 (when the reduction ratio is small) is the position recorded in STEP 1403 (reduction ratio). May be processed so as to be consistent with the
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Abstract
Description
第一の中心軌道33は、アライナー10の位置において光軸32からΔrAL_HMだけ離軸しており、ΔrAL_HMは以下の式で表される。
第一の中心軌道33が主面35上で光軸32を通過するよう、アライナー10を調整すると、アライナー10によるビーム中心軌道の偏向角θALは以下の式で与えられる。
θAL=ΔrAL_HM/LOBJ_AL+θC2_HM
一方、対物絞り9を通過する際の第二の中心軌道34(縮小率が小さい場合)の傾きθC2_LMおよびアライナー10における第二の中心軌道34の離軸量ΔrAL_LMは、以下の式で表される。
ΔrAL_LM=(LC2_APT-b2_LM+LOBJ_APT-LOBJ_AL)θC2_LM
縮小率が小さい場合のアライナー10の動作条件が、縮小率が大きい場合と変わらないとすれば、アライナー10による偏向角θALも変わらない。そのため、主面35上では、第一の中心軌道33と第二の中心軌道34との間に、以下の式で表される光軸ずれ(P1_LM-P1_HM)が発生する。
集束レンズによる一次電子ビーム4の縮小率は、試料像の分解能にも影響する。特に熱放出型電子銃の場合、電子源の実質的な直径は数10マイクロメートル程度となる。そのため、数ナノメートルの分解能を得たい場合、一次電子ビーム4の縮小率を1/300~1/500程度にする必要がある。
ただし、STEP602の場合と異なり、STEP605では、ガンアライメント制御回路20を用いて上段ガンアライメントコイル5および/または下段ガンアライメントコイル6を調整する。
θC2_HM=ΔOC2_LM/(b2_LM-b2_HM)
図10(b)のように、第一の中心軌道33と、第二の中心軌道34(縮小率が小さい場合)を一致させるようにガンアライメントコイルを調整すると、電子源の仮想的な移動量OG_ALとΔOC2_LMには次式で表される関係がある。
一方、ガンアライメントコイルの調整後では、任意のb2_MMにある集束点の移動量ΔO’C2_MMは、このときの集束レンズの縮小率をMC_MMとすると以下の式で表される。
そこで、このときの移動量ΔO’C2_MMとΔOC2_MMを一致させるように、縮小率MC_MMと集束点OC2_MMを調整することで、任意の縮小率に対しても光軸ずれを抑制することができる。換言すると、第一の中心軌道33、第二の中心軌道34、第三の中心軌道40のそれぞれがほぼ一致することとなる。
第一集束レンズ7と第二集束レンズ8の励磁を、それぞれ相互に調整することで、集束点を保ちつつ縮小率を変化させることや、その逆(縮小率を保ちつつ集束点を変化させる)が可能であるため、任意のMC_MMについて、上記のような光軸ずれの抑制が可能になる。
Claims (15)
- 試料に照射される荷電粒子線を放出する荷電粒子源と、
前記荷電粒子線を所定の縮小率で集束する集束レンズを少なくとも一つ含む集束レンズ系と、
前記集束レンズ系のうち最も下流の集束レンズと前記荷電粒子源との間に位置し、前記荷電粒子源の仮想位置を移動させる偏向器と、
前記偏向器および前記集束レンズ系を制御する制御手段と、を有し、
前記制御手段は、前記集束レンズ系の縮小率の変化による、前記集束レンズ系の下流における前記荷電粒子線の中心軌道のずれを抑制する位置に、前記荷電粒子源の仮想位置を移動させるように、前記偏向器を制御することを特徴とする荷電粒子線装置。
- 請求項1に記載の荷電粒子線装置であって、
前記制御手段による前記偏向器の制御は、前記集束レンズ系が第一の縮小率を有する場合の前記集束レンズ系の下流における前記荷電粒子線の第一の中心軌道と、前記集束レンズ系が前記第一の縮小率よりも小さな第二の縮小率を有する場合の前記集束レンズ系の下流における前記荷電粒子線の第二の中心軌道を一致させるように行われることを特徴とする荷電粒子線装置。
- 請求項2に記載の荷電粒子線装置であって、
前記集束レンズ系は二つ以上の集束レンズを有し、
前記制御手段は、前記集束レンズ系が前記第一の縮小率および第二の縮小率以外の第三の縮小率を有する場合、前記集束レンズ系と前記試料との間における前記荷電粒子線の集束点を移動させ、前記集束レンズ系が前記第三の縮小率を有する場合の前記集束レンズ系の下流における前記荷電粒子線の第三の中心軌道を、前記第一の中心軌道または前記第二の中心軌道と一致させるようにすることを特徴とする荷電粒子線装置。
- 請求項2に記載の荷電粒子線装置であって、
前記試料に前記荷電粒子線をフォーカスする対物レンズと、
前記制御手段に接続された、前記荷電粒子線の前記試料への照射条件を調整する調整手段と、を有し、
前記制御手段は、前記集束レンズ系が第一の縮小率を有する場合に、前記第一の中心軌道が前記対物レンズの主面において前記対物レンズの中心軸を通過するように、前記調整手段を制御した後に、前記第一の中心軌道と前記第二の中心軌道を一致させるように制御することを特徴とする荷電粒子線装置。
- 請求項4に記載の荷電粒子線装置であって、
前記試料に前記荷電粒子線をフォーカスする対物レンズと、
前記荷電粒子線の進路上に配置された絞りと、
前記絞りの上で前記荷電粒子線を走査することで得られる信号を検出する検出器と、
前記検出器の信号から、前記対物レンズの中心軸と、前記集束レンズ系の下流における前記荷電粒子線の中心軌道との位置関係を示す画像を形成する信号処理手段と、
前記信号処理手段で形成された画像を表示するディスプレイと、
前記制御部による前記調整手段および前記偏向器の制御条件を操作する条件操作手段を有することを特徴とする荷電粒子線装置。
- 請求項5に記載の荷電粒子線装置であって、
前記絞りは固定式であることを特徴とする荷電粒子線装置。
- 請求項5に記載の荷電粒子線装置であって、
前記条件操作部による前記調整手段および前記偏向器の制御条件の操作は、前記集束レンズ系が前記第一の縮小率を有する場合と、前記集束レンズ系が前記第二の縮小率を有する場合とを、それぞれ独立して操作可能であることを特徴とする荷電粒子線装置。
- 試料に照射される荷電粒子線を放出する荷電粒子源と、
前記荷電粒子線を所定の縮小率で集束する集束レンズを少なくとも一つ含む集束レンズ系と、
前記集束レンズ系のうち最も下流の集束レンズと前記荷電粒子源との間に位置し、前記荷電粒子源の仮想位置を移動させる偏向器と、
前記荷電粒子線の前記試料への照射条件を調整する調整手段と、
前記試料に前記荷電粒子線をフォーカスする対物レンズと、
前記荷電粒子線が物体に衝突することにより得られる信号を検出する検出器と、
前記検出器の信号から、前記対物レンズの中心軸と、前記集束レンズ系の下流における前記荷電粒子線の中心軌道との位置関係の情報を収集する信号処理手段と、
ディスプレイと、
前記調整手段および前記偏向器の動作条件を操作する条件操作手段と、を有し、
前記信号処理手段は、前記ディスプレイに、前記信号処理手段で収集された、前記対物レンズの中心軸と、前記荷電粒子線の中心軌道との位置関係の情報を表示させ、
前記信号処理手段は、前記集束レンズ系が第一の縮小率を有する場合の前記集束レンズ系の下流における前記荷電粒子線の第一の中心軌道と、前記集束レンズ系が前記第一の縮小率よりも小さな第二の縮小率を有する場合の前記集束レンズ系の下流における前記荷電粒子線の第二の中心軌道を一致させるように、前記条件操作手段を操作するよう促すユーザーインターフェースをディスプレイに表示することを特徴とする荷電粒子線装置。
- 請求項8に記載の荷電粒子線装置であって、
前記信号処理手段は、前記集束レンズ系が第一の縮小率を有する場合に、前記第一の中心軌道が前記対物レンズの主面において前記対物レンズの中心軸を通過するよう前記調整手段の動作条件を操作した後、前記第一の中心軌道と前記第二の中心軌道を一致させるように前記偏向器の動作条件を操作することを促すことを特徴とする荷電粒子線装置。
- 請求項8に記載の荷電粒子線装置であって、
前記荷電粒子線の進路上に配置された絞りを有し、
前記検出器は、前記絞りの上で前記荷電粒子線を走査することで得られる信号を検出し、
前記信号処理手段は、前記検出器の信号から、前記対物レンズの中心軸と、前記荷電粒子線の中心軌道との位置関係を示す画像を形成し、
前記信号処理手段は、前記ディスプレイに、前記信号処理手段により形成された画像を表示させることを特徴とする荷電粒子線装置。
- 荷電粒子源から放出される荷電粒子線を、電子光学系により所定の縮小率で縮小し、静電または電磁レンズ効果により試料にフォーカスして照射する荷電粒子線装置の調整方法であって、
前記荷電粒子線が第一の縮小率で縮小される場合に、前記電子光学系による前記荷電粒子線の偏向角度を調整することで、前記レンズ効果の発生前後における前記荷電粒子線の第一の中心軌道を変化させる工程と、
前記荷電粒子線が前記第一の縮小率よりも小さな第二の縮小率で縮小される場合に、前記電子光学系により前記荷電粒子源の仮想位置を調整することで、前記レンズ効果の発生前後における前記荷電粒子線の第二の中心軌道を前記第一の中心軌道と一致させるようにする工程と、を含むことを特徴とする荷電粒子線装置の調整方法。
- 請求項11に記載の荷電粒子線装置の調整方法であって、
前記第一の中心軌道を変化させる工程において、前記第一の中心軌道が前記レンズ効果をもたらす電磁場の中心を通過するように、前記荷電粒子線の偏向角度を調整することを特徴とする荷電粒子線装置の調整方法。
- 請求項12に記載の荷電粒子線装置の調整方法であって、
前記荷電粒子線装置の信号処理手段は、前記荷電粒子線が物体に衝突することにより得られる信号から、前記レンズ効果をもたらす電磁場の中心と、前記レンズ効果の発生後における前記荷電粒子線の第一の中心軌道との位置関係の情報を収集し、
前記第一の中心軌道を変化させる工程において、前記信号処理手段が、前記位置関係の情報から前記荷電粒子源の偏向角度の調整量を算出することを特徴とする荷電粒子線装置の調整方法。
- 請求項11に記載の荷電粒子線装置の調整方法であって、
前記荷電粒子線装置の信号処理手段は、前記荷電粒子線が物体に衝突することにより得られる信号から、前記レンズ効果をもたらす電磁場の中心と、前記レンズ効果の発生後における前記荷電粒子線の第一の中心軌道との位置関係の情報を収集し、
前記第二の中心軌道を前記第一の中心軌道と一致させる工程において、前記信号処理手段が、前記位置関係の情報から前記荷電粒子源の仮想位置の調整量を算出することを特徴とする荷電粒子線装置の調整方法。
- 請求項11に記載の荷電粒子線装置の調整方法であって、
前記荷電粒子線装置の信号処理手段は、前記荷電粒子線が物体に衝突することにより得られる信号から、前記レンズ効果をもたらす電磁場の中心と、前記レンズ効果の発生後における前記荷電粒子線の中心軌道との位置関係の情報を収集し、
前記荷電粒子線の第一の中心軌道を変化させる工程において、前記信号処理手段が、前記電磁場の中心と、前記第一の中心軌道との位置関係を表示するためのユーザーインターフェースを画面上に表示し、
前記第二の中心軌道を前記第一の中心軌道と一致させる工程において、前記信号処理手段が、前記電磁場の中心と、前記第二の中心軌道との位置関係を表示するためのユーザーインターフェースを画面上に表示することを特徴とする荷電粒子線装置の調整方法。
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