WO2017064948A1 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
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- H01L29/66068—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
Definitions
- the present invention relates to a semiconductor device and a method of manufacturing the semiconductor device.
- a vertical MOSFET Metal Oxide Semiconductor Field Effect Transistor
- a trench structure in which the channel is formed perpendicular to the substrate surface can increase the cell density per unit area rather than a planar structure in which the channel is formed parallel to the substrate surface . Therefore, the trench structure can increase the current density per unit area rather than the planar structure, which is advantageous in cost.
- the entire inner wall of the trench is covered with the gate insulating film in order to form the channel in the vertical direction, and the portion of the trench bottom of the gate insulating film approaches the drain electrode.
- a high electric field is likely to be applied to the bottom portion of the trench.
- a wide band gap semiconductor a semiconductor having a wider band gap than silicon, for example, silicon carbide (SiC)
- SiC silicon carbide
- a p-type region is formed in contact with the p-type base region and reaching a deeper position than the trench bottom.
- a structure has been proposed in which a pn junction is formed at a position close to a trench (see, for example, Patent Document 1 below).
- a structure has been proposed in which a p-type region is formed at the bottom of the trench (see, for example, Patent Document 2 below).
- a structure that forms both of these has been proposed (see, for example, Patent Document 3 (FIG. 7) described below).
- Patent No. 5539931 gazette U.S. Pat. No. 6,180,958 JP, 2009-260253, A
- the present invention provides a semiconductor device and a method of manufacturing the semiconductor device, which can be easily formed and can reduce the on-resistance while securing the withstand voltage of the active portion, in order to solve the problems due to the above-mentioned prior art.
- the purpose is to
- a semiconductor device comprises a wide band gap semiconductor substrate of the first conductivity type and a first wide band gap semiconductor of the first conductivity type described later.
- Layer, first base region of second conductivity type, second base region of second conductivity type, region of first conductivity type, wide band gap semiconductor layer of second conductivity type, and first conductivity type A source region, a trench, a gate electrode, an interlayer insulating film, a source electrode, and a drain electrode are provided, and the following features are provided.
- the wide band gap semiconductor substrate of the first conductivity type is made of a semiconductor having a wider band gap than silicon.
- the first wide band gap semiconductor layer of the first conductivity type is formed on the front surface of the wide band gap semiconductor substrate, is made of a semiconductor having a wider band gap than silicon, and has a lower impurity concentration than the wide band gap semiconductor substrate. It is.
- the first base region of the second conductivity type is selectively formed in the surface layer opposite to the wide band gap semiconductor substrate side of the first wide band gap semiconductor layer of the first conductivity type.
- the second base region of the second conductivity type is selectively formed in the inside of the first wide band gap semiconductor layer of the first conductivity type.
- the region of the first conductivity type is selectively formed in the surface layer opposite to the wide band gap semiconductor substrate side of the first wide band gap semiconductor layer of the first conductivity type, and the first conductivity type
- the impurity concentration is higher than that of the first wide band gap semiconductor layer.
- the wide band gap semiconductor layer of the second conductivity type is formed on the surface of the first wide band gap semiconductor layer of the first conductivity type opposite to the wide band gap semiconductor substrate, and has a wider band gap than silicon. It consists of a semiconductor.
- the source region of the first conductivity type is selectively formed in the wide band gap semiconductor layer of the second conductivity type. The trench penetrates the wide band gap semiconductor layer of the second conductivity type to reach the region of the first conductivity type.
- the gate electrode is formed inside the trench via a gate insulating film.
- An interlayer insulating film is formed on the gate electrode.
- the source electrode is in contact with the wide band gap semiconductor layer of the second conductivity type and the source region of the first conductivity type.
- the drain electrode is provided on the back surface of the high concentration wide band gap semiconductor substrate of the first conductivity type. The depth of the region of the first conductivity type is deeper than the depth of the first base region of the second conductivity type and the second base region of the second conductivity type.
- the depth of the first conductive type region is the depth of the first conductive type first base region and the second conductive type second base region. And is deeper than 0.2 ⁇ m to 0.5 ⁇ m.
- the semiconductor having a wider band gap than silicon is silicon carbide.
- a method of manufacturing a semiconductor device has the following features.
- the first region of the first conductivity type is deeper than the first base region of the second conductivity type and the second base region of the second conductivity type.
- the method further includes the step of selectively forming a second region of the first conductivity type in contact with the first region of the first conductivity type on the surface layer of the second wide band gap semiconductor layer of the 1 conductivity type.
- the second region of the first conductivity type is formed by ion implantation.
- the second wide band gap semiconductor layer of the first conductivity type is higher in impurity than the first wide band gap semiconductor layer of the first conductivity type. It is characterized by forming in concentration.
- the first wide band gap semiconductor layer of the first conductive type, the second wide band gap semiconductor layer of the first conductive type, and the second conductive layer is formed by epitaxial growth.
- the depth of the first region of the first conductivity type may be the first base region of the second conductivity type and the first base region of the second conductivity type.
- the second base region is formed to be deeper than 0.2 ⁇ m to 0.5 ⁇ m than the depth of the second base region.
- the semiconductor having a wider band gap than silicon is silicon carbide.
- the depth of the region of the first conductivity type is deeper than the depths of the first base region of the second conductivity type and the second base region of the second conductivity type. In the high state, the on resistance can be reduced.
- the electric field strength of the gate insulating film at the bottom of the trench can be relaxed and the on-resistance can be reduced while securing the withstand voltage of the active portion by a simple method. It plays an effect.
- FIG. 1 is a cross-sectional view showing the configuration of the silicon carbide semiconductor device according to the embodiment.
- FIG. 2 is a view showing the relationship between the withstand voltage and the on resistance with respect to the depth difference D of the silicon carbide semiconductor device according to the embodiment.
- FIG. 3 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 1).
- FIG. 4 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 2).
- FIG. 5 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 3).
- FIG. 6 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 4).
- FIG. 7 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 5).
- FIG. 8 is a cross-sectional view schematically showing the state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment (part 6).
- n and p in the layer or region having n or p, it is meant that electrons or holes are majority carriers, respectively.
- + and-attached to n and p mean that the impurity concentration is higher and the impurity concentration is lower than that of the layer or region to which it is not attached, respectively.
- the notation of n and p including + and-is the same it indicates that the concentration is close, and the concentration is not necessarily the same.
- Embodiment The semiconductor device according to the present invention is configured using a wide band gap semiconductor.
- a silicon carbide semiconductor device manufactured using, for example, silicon carbide (SiC) as a wide band gap semiconductor will be described by taking a MOSFET as an example.
- FIG. 1 is a cross-sectional view showing the configuration of the silicon carbide semiconductor device according to the embodiment.
- the silicon carbide semiconductor device includes a first main surface (front surface) of an n + -type silicon carbide substrate (wide band gap semiconductor substrate of the first conductivity type) 1, for example An n-type silicon carbide epitaxial layer (a first wide band gap semiconductor layer of a first conductivity type) 2 is deposited on the (0001) plane (Si plane).
- the n + -type silicon carbide substrate 1 is, for example, a silicon carbide single crystal substrate doped with nitrogen (N).
- the n-type silicon carbide epitaxial layer 2 is a low concentration n-type drift layer doped with, for example, nitrogen at an impurity concentration lower than that of the n + -type silicon carbide substrate 1.
- An n-type high concentration region (a region of the first conductivity type of high impurity concentration) 5 is formed on the surface side opposite to the n + -type silicon carbide substrate 1 side of the n-type silicon carbide epitaxial layer 2 .
- the n-type high concentration region 5 is a high concentration n-type drift layer doped with, for example, nitrogen at an impurity concentration lower than the n + -type silicon carbide substrate 1 and higher than the n-type silicon carbide epitaxial layer 2.
- the n + -type silicon carbide substrate 1, the n-type silicon carbide epitaxial layer 2 and a p-type base layer (second conductivity type wide band gap semiconductor layer) 6 described later are combined to form a silicon carbide semiconductor substrate.
- a back surface electrode (drain electrode) 13 is provided on the second main surface (the back surface, ie, the back surface of the silicon carbide semiconductor substrate) of n + -type silicon carbide substrate 1.
- the back surface electrode 13 constitutes a drain electrode.
- a drain electrode pad 15 is provided on the surface of the back surface electrode 13.
- a trench structure is formed on the first main surface side (p-type base layer 6 side) of the silicon carbide semiconductor substrate. Specifically, trench 16 penetrates p-type base layer 6 from the surface of p-type base layer 6 on the opposite side to the n + -type silicon carbide substrate 1 side (the first main surface side of the silicon carbide semiconductor substrate) Then, the n-type high concentration region 5 is reached.
- a gate insulating film 9 is formed on the bottom and sidewalls of the trench 16 along the inner wall of the trench 16, and a gate electrode 10 is formed inside the gate insulating film 9 in the trench 16. Gate insulating film 9 insulates gate electrode 10 from n-type silicon carbide epitaxial layer 2 and p-type base layer 6. A part of the gate electrode 10 may project from above the trench 16 (on the side of the source electrode pad 14) to the side of the source electrode pad 14.
- a first p + -type base region (second conductivity type) is formed on the surface layer of n-type silicon carbide epitaxial layer 2 on the opposite side to the n + -type silicon carbide substrate 1 side (the first main surface side of the silicon carbide semiconductor substrate).
- the first base region 3) and the second p + -type base region (second base region of the second conductivity type) 4 are selectively provided.
- the first p + -type base region 3 is apart from the trench 16 and reaches a deeper position on the drain side than the bottom of the trench 16.
- the distance from the first p + -type base region 3 to the sidewall of the trench 16 is, for example, the optimum JFET (for each impurity concentration of the first p + -type base region 3, the second p + -type base region 4 and the n-type high concentration region 5).
- it is determined by the junction FET width.
- the second p + -type base region 4 is formed at a position opposed to the bottom of the trench 16 in the depth direction.
- the width of the second p + -type base region 4 is equal to or wider than the width of the trench 16.
- the bottom of the trench 16 may reach the second p + -type base region 4, or may be located in the n-type high concentration region 5 sandwiched between the p-type base layer 6 and the second p + -type base region 4. Good.
- the first p + -type base region 3 and the second p + -type base region 4 are doped with, for example, aluminum (Al). A part of the first p + -type base region 3 may be extended to the trench side to be connected to the second p + -type base region 4.
- FIG. 1 illustrates the case where the first p + -type base region 3 and the second p + -type base region 4 are arranged separately (the same applies to FIGS. 4 to 8).
- a p-type base layer (second-conductivity-type wide band gap semiconductor layer) 6 is provided on the base first main surface side of n-type silicon carbide epitaxial layer 2.
- the p-type base layer 6 is in contact with the first p + -type base region 3.
- the impurity concentration of the p-type base layer 6 may be lower than, for example, the impurity concentration of the first p + -type base region 3.
- the p-type impurity concentration of the portion (p-type base layer 6) in which the n-type inversion layer (channel) is formed at the time of on in the base region including the first p + -type base region 3 and the p-type base layer 6 Since the voltage can be lowered, the gate threshold voltage Vth and the on-resistance can be prevented from becoming high.
- the p-type impurity concentration of the drain side portion (first p + -type base region 3) of the base region can be increased, a predetermined breakdown voltage can be secured.
- an n + source region (source region of the first conductivity type) 7 and a p ++ contact region (contact region of the second conductivity type) 8 are selectively provided on the first main surface side of the substrate.
- the n + source region 7 and the p ++ contact region 8 are in contact with each other.
- An n-type high concentration region 5 is provided in a region sandwiched by the base region 4, and the n-type high concentration region 5 is located deeper than the first p + -type base region 3 and the second p + -type base region 4. It is formed.
- the depth (thickness) of the n-type high concentration region 5 is larger than the depth (thickness) of the first p + -type base region 3 and the depth (thickness) of the second p + -type base region 4.
- the first p + -type base region 3 and the second p + -type base region 4 may be formed to the same depth.
- D is a difference obtained by subtracting the depths of the first p + -type base region 3 and the second p + -type base region 4 from the depth of the n-type high concentration region 5.
- n-type high-concentration region 5 the drain side of the 1p + -type base region 3 and the 2p + -type base region 4, provided so as to surround the first 1p + -type base region 3 and the 2p + -type base region 4 It may be done.
- trench MOS gates metal-oxide-semiconductor insulated gate
- Interlayer insulating film 11 is provided on the entire surface on the first main surface side of the silicon carbide semiconductor base so as to cover gate electrode 10 embedded in the trench.
- Source electrode 12 is in contact with n + source region 7 and p ++ contact region 8 through a contact hole opened in interlayer insulating film 11.
- Source electrode 12 is electrically insulated from gate electrode 10 by interlayer insulating film 11.
- a source electrode pad 14 is provided on the source electrode 12.
- FIG. 2 is a view showing the relationship between the withstand voltage and the on resistance with respect to the depth difference D of the silicon carbide semiconductor device according to the embodiment.
- FIG. 2 shows the result of verification of the depth of the n-type high concentration region 5 when an element having a withstand voltage of 3300 V class is assumed as an example in the present embodiment.
- FIG. 2 is a graph plotting withstand voltage against difference D obtained by subtracting the depths of the first p + -type base region 3 and the second p + -type base region 4 from the depth of the n-type high concentration region 5 (black circles It is a graph (a graph connecting triangles) in which the connection graph and the on-resistance are plotted.
- FIG. 2 is a view showing the relationship between the withstand voltage and the on resistance with respect to the depth difference D of the silicon carbide semiconductor device according to the embodiment.
- FIG. 2 shows the result of verification of the depth of the n-type high concentration region 5 when an element having a withstand voltage of 3300 V
- the left vertical axis is the withstand voltage (unit: V)
- the right vertical axis is the on resistance (unit: m ⁇ cm 2 )
- the horizontal axis is the first p + type from the depth of the n-type high concentration region 5
- the difference D (unit: ⁇ m) obtained by subtracting the depths of the base region 3 and the second p + -type base region 4.
- the withstand voltage tends to be high, but the on resistance is rapidly high.
- the withstand voltage tends to decrease, but does not decrease rapidly. The withstand voltage is high, and the on resistance tends to be low.
- the depth of the n-type high concentration region 5 is preferably equal to or greater than the depth of the first p + -type base region 3 and the depth of the second p + -type base region 4 (D) 0.0) .
- the difference between the depth of the n-type high concentration region 5 and the depths of the first p + -type base region 3 and the second p + -type base region 4 is set to 0.2 ⁇ m or more. Can be maintained.
- the difference D obtained by subtracting the depths of the first p + -type base region 3 and the second p + -type base region 4 from the depth of the n-type high concentration region 5 exceeds 0.5 ⁇ m, the desired withstand voltage (3300 V) Becomes difficult to achieve. More preferably, the difference D obtained by subtracting the depths of the first p + -type base region 3 and the second p + -type base region 4 from the depth of the n-type high concentration region 5 is 0.2 ⁇ m or more and 0.5 ⁇ m or less It is understood that the range of (0.2 ⁇ D ⁇ 0.5) is appropriate.
- FIG. 3 to FIG. 8 are cross sectional views schematically showing a state in the middle of manufacturing the silicon carbide semiconductor device according to the embodiment.
- an n + -type silicon carbide substrate 1 made of n-type silicon carbide is prepared.
- the wide band gap semiconductor layer 2a is epitaxially grown to a thickness of, for example, about 30 ⁇ m.
- the first n-type silicon carbide epitaxial layer 2 a becomes the n-type silicon carbide epitaxial layer 2.
- the state up to here is shown in FIG.
- a mask (not shown) having a desired opening is formed of, for example, an oxide film by photolithography.
- p-type impurities such as aluminum atoms are ion-implanted by the ion implantation method using the oxide film as a mask.
- a portion of the surface region of first n-type silicon carbide epitaxial layer 2a for example, a first p-type region (first base region of second conductivity type) 3a having a depth of about 0.5 ⁇ m.
- the distance between the first 2p + -type base region (second base region of a second conductivity type) 4, the 1p-type region 3a and the 2p + -type base region 4, for example, adjacent is about 1.5 ⁇ m To be formed.
- the dose during ion implantation for forming the first p-type region 3a and the second p + -type base region 4 may be set, for example, to have an impurity concentration of about 5 ⁇ 10 18 / cm 3 .
- the mask used at the time of ion implantation for forming the first p-type region 3a and the second p + -type base region 4 is removed.
- n-type impurities such as nitrogen atoms are ion-implanted by the ion implantation method.
- the first n-type region (first region of the first conductivity type) 5 a is formed to a position 0.2 to 0.5 ⁇ m deeper than the mold base region 4.
- first p-type region 3a and second p + -type base are formed over the entire surface layer of first n-type silicon carbide epitaxial layer 2a.
- First n-type region 5a is formed to surround the lower side (the n + -type silicon carbide substrate 1 side) of region 4.
- the dose during ion implantation for forming the first n-type region 5a may be set, for example, to have an impurity concentration of about 5 ⁇ 10 16 / cm 3 . The situation up to here is shown in FIG.
- a second n-type silicon carbide epitaxial layer (first conductive type second layer) is doped on the surface of the first n-type silicon carbide epitaxial layer 2a while doping n-type impurities such as nitrogen atoms.
- the wide band gap semiconductor layer 2 b is epitaxially grown to a thickness of, for example, about 0.5 ⁇ m.
- the second n-type silicon carbide epitaxial layer 2 b and the first n-type silicon carbide epitaxial layer 2 a are combined to form the n-type silicon carbide epitaxial layer 2.
- the conditions of the epitaxial growth for forming the second n-type silicon carbide epitaxial layer 2b may be set, for example, such that the impurity concentration of the second n-type silicon carbide epitaxial layer 2b is about 3 ⁇ 10 15 / cm 3 .
- a mask (not shown) having a desired opening is formed by, for example, an oxide film by photolithography.
- p-type impurities such as aluminum atoms are ion-implanted by the ion implantation method using the oxide film as a mask.
- a second p-type region (third base region of second conductivity type) 3b having a depth of, for example, about 0.5 ⁇ m is formed in a part of the surface region of n-type silicon carbide epitaxial layer 2. For example, it is formed to overlap the upper part of the first p-type region 3a.
- the second p-type region 3 b and the first p-type region 3 a are combined to form a first p + -type base region 3.
- the dose during ion implantation for forming the second p-type region 3b may be set, for example, to have an impurity concentration of about 5 ⁇ 10 18 / cm 3 .
- n-type impurities such as nitrogen atoms are ion-implanted by the ion implantation method.
- a portion of the surface layer of second n-type silicon carbide epitaxial layer 2b is in contact with first p-type region 3a, second p + -type base region 4 and first n-type region 5a.
- a second n-type region (a second region of the first conductivity type) 5 b having a depth of about 0.5 ⁇ m is formed.
- the dose during ion implantation for providing the second n-type region 5 b may be set, for example, to have an impurity concentration of about 5 ⁇ 10 16 / cm 3 .
- the second n-type region 5 b and the first n-type region 5 a are combined to form an n-type high concentration region 5. The state up to here is shown in FIG.
- a p-type impurity such as an aluminum atom is doped on the surface of n-type silicon carbide epitaxial layer 2 (that is, the surfaces of first p + -type base region 3 and second n-type region 5b).
- the p-type base layer (second-conductivity-type wide band gap semiconductor layer) 6 is epitaxially grown to a thickness of, for example, about 1.3 ⁇ m.
- the conditions of the epitaxial growth for forming the p-type base layer 6 may be set, for example, to be about 4 ⁇ 10 17 / cm 3, in which the impurity concentration is lower than the impurity concentration of the first p + -type base region 3.
- n + source region (source region of first conductivity type) 7 is formed in part of the surface layer of p type base layer 6.
- the dose during ion implantation for forming the n + source region 7 may be set, for example, so that the impurity concentration is higher than that of the first p + -type base region 3.
- the mask used at the ion implantation for forming the n + source region 7 is removed.
- a mask (not shown) having a desired opening is formed, for example, with an oxide film by photolithography, and this oxide film is used as a mask on the surface of p-type base layer 6.
- a p-type impurity such as aluminum is ion implanted.
- the p ++ contact region (contact region of the second conductivity type) 8 is formed in a part of the surface region of the p-type base layer 6.
- the dose amount at the time of ion implantation for forming the p ++ contact region 8 may be set so that the impurity concentration is higher than, for example, the second p + -type base region 4. Subsequently, the mask used at the time of ion implantation for forming p ++ contact region 8 is removed. The order of ion implantation for forming the n + source region 7 and ion implantation for forming the p ++ contact region 8 may be reversed. The state up to here is shown in FIG.
- heat treatment is performed to activate, for example, the first p-type region 3a, the second p-type region 3, the n + source region 7 and the p ++ contact region 8.
- the temperature of the heat treatment may be, for example, about 1700.degree.
- the heat treatment time may be, for example, about 2 minutes.
- each ion implantation region may be activated collectively by one heat treatment, or may be activated by heat treatment every time ion implantation is performed.
- a mask not shown having a desired opening by photolithography Is formed of, for example, an oxide film.
- a trench 16 which penetrates the n + source region 7 and the p-type base layer 6 and reaches the n-type high concentration region 5 is formed by dry etching.
- the bottom of the trench 16 may reach the second p + -type base region 4, or may be located in the n-type high concentration region 5 sandwiched between the p-type base layer 6 and the second p + -type base region 4. Good.
- the mask used to form the trench 16 is removed. The state up to here is shown in FIG.
- gate insulating film 9 is formed along the surfaces of n + source region 7 and p ++ contact region 8 and the bottom and sidewalls of trench 16.
- the gate insulating film 9 may be formed by thermal oxidation by heat treatment at a temperature of about 1000 ° C. in an oxygen atmosphere. Further, the gate insulating film 9 may be formed by a method of depositing by a chemical reaction such as high temperature oxidation (HTO) or the like.
- HTO high temperature oxidation
- a polycrystalline silicon layer doped with, for example, phosphorus atoms is formed on the gate insulating film 9.
- the polycrystalline silicon layer is formed to fill in the trench 16.
- gate electrode 10 is formed. A part of the gate electrode 10 may project from above the trench 16 (on the side of the source electrode pad 14) to the side of the source electrode pad 14.
- phosphorus glass is deposited to a thickness of about 1 ⁇ m so as to cover the gate insulating film 9 and the gate electrode 10, and the interlayer insulating film 11 is formed.
- contact holes are formed to expose n + source region 7 and p ++ contact region 8.
- heat treatment is performed to planarize the interlayer insulating film 11. The state up to here is shown in FIG.
- the source electrode 12 in contact with the n + source region 7 and the p ++ contact region 8 is formed by sputtering, for example.
- an aluminum film for example, is provided to a thickness of, for example, about 5 ⁇ m so as to cover the source electrode 12 and the interlayer insulating film 11, for example, by sputtering. Thereafter, the aluminum film is selectively removed, and the source electrode pad 14 is formed by leaving it so as to cover the active portion of the entire device.
- the drain electrode 13 is formed on the second main surface of the n + -type silicon carbide substrate 1 by sputtering, for example.
- a drain electrode pad 15 is formed by sequentially laminating, for example, titanium (Ti), nickel (Ni) and gold (Au) on the surface of the drain electrode 13. As described above, the semiconductor device shown in FIG. 1 is completed.
- the second n-type region 5b is formed by ion implantation, but the second n-type silicon carbide epitaxial layer 2b may be formed as the second n-type region 5b. That is, the manufacturing method is performed such that the impurity concentration of nitrogen is about 5 ⁇ 10 16 / cm 3 which is the impurity concentration of second n-type region 5 b at the time of epitaxial growth of second n-type silicon carbide epitaxial layer 2 b and ion implantation is omitted.
- n + silicon carbide substrate 1 and n type silicon carbide epitaxial layer 2 are combined to form a silicon carbide semiconductor substrate, and p type base layer 6 is formed on the surface layer on the substrate first main surface side of n type silicon carbide epitaxial layer 2. It may be formed by ion implantation. Further, the n + -type silicon carbide substrate 1 alone and the silicon carbide semiconductor substrate, all the regions (n-type high-concentration region constituting the MOS gate structure on the surface layer of the first main surface side of the n + -type silicon carbide substrate 1 5 The first p + -type base region 3 and the second p + -type base region 4 may be formed by ion implantation.
- the present invention has described the case where the first main surface of the silicon carbide substrate made of silicon carbide is the (0001) plane and the MOS gate structure is formed on the (0001) plane, the present invention is not limited thereto.
- the type of wide band gap semiconductor for example, gallium nitride (GaN) or the like
- the plane orientation of the main surface of the substrate, and the like can be variously changed.
- the first conductivity type is n-type and the second conductivity type is p-type, but in the present invention, the first conductivity type is p-type and the second conductivity type is n-type The same holds true.
- the drain side of the trench from the bottom between adjacent trenches is provided.
- a pn junction between the first p + -type base region and the n-type drift layer can be formed.
- the bottom of the trench is A pn junction between the second p + -type base region and the n-type drift layer can be formed at a close position.
- the pn junction between the first p, 2p + -type base region and the n-type drift layer By thus forming the pn junction between the first p, 2p + -type base region and the n-type drift layer, application of a high electric field to the gate insulating film at the bottom of the trench can be prevented. Therefore, even when a wide band gap semiconductor is used as a semiconductor material, high withstand voltage can be achieved.
- the second p + -type base region wider than the trench width the electric field at the corner of the bottom of the trench can be relaxed, so that the withstand voltage can be further increased.
- the electric field in the JFET region formed between the first 1p + -type base region and the 2p + -type base region can be relaxed.
- the first p + -type base region can be formed at a position separated in the lateral direction (direction parallel to the main surface of the base) from the bottom of the trench than in the prior art (for example, Patent Document 1 above). Therefore, the trench and the first p + -type base region can be formed at predetermined positions with high position accuracy. Therefore, a semiconductor device having a high withstand voltage and a low on-resistance can be manufactured by a simpler manufacturing method than the conventional method only by epitaxial growth and ion implantation or ion implantation.
- the semiconductor device according to the present invention is useful for a high breakdown voltage semiconductor device used for a power conversion device or a power supply device such as various industrial machines.
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Abstract
Description
本発明にかかる半導体装置は、ワイドバンドギャップ半導体を用いて構成される。実施の形態においては、ワイドバンドギャップ半導体として例えば炭化珪素(SiC)を用いて作製された炭化珪素半導体装置について、MOSFETを例に説明する。図1は、実施の形態にかかる炭化珪素半導体装置の構成を示す断面図である。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について説明する。図3~図8は、実施の形態にかかる炭化珪素半導体装置の製造途中の状態を模式的に示す断面図である。
2 n型炭化珪素エピタキシャル層
2a 第1n型炭化珪素エピタキシャル層
2b 第2n型炭化珪素エピタキシャル層
3 第1p+型ベース領域
3a 第1p型領域
3b 第2p型領域
4 第2p+型ベース領域
5 n型高濃度領域
5a 第1n型領域
5b 第2n型領域
6 p型ベース層
7 n+ソース領域
8 p++コンタクト領域
9 ゲート絶縁膜
10 ゲート電極
11 層間絶縁膜
12 ソース電極
13 裏面電極
14 ソース電極パッド
15 ドレイン電極パッド
16 トレンチ
Claims (10)
- シリコンよりもバンドギャップが広い半導体からなる第1導電型のワイドバンドギャップ半導体基板と、
前記ワイドバンドギャップ半導体基板のおもて面に形成された、シリコンよりもバンドギャップが広い半導体からなる、前記ワイドバンドギャップ半導体基板より低不純物濃度の第1導電型の第1ワイドバンドギャップ半導体層と、
前記第1導電型の第1ワイドバンドギャップ半導体層の前記ワイドバンドギャップ半導体基板側に対して反対側の表面層に選択的に形成された第2導電型の第1ベース領域と、
前記第1導電型の第1ワイドバンドギャップ半導体層の内部に選択的に形成された第2導電型の第2ベース領域と、
前記第1導電型の第1ワイドバンドギャップ半導体層の前記ワイドバンドギャップ半導体基板側に対して反対側の表面層に選択的に形成された、前記第1導電型の第1ワイドバンドギャップ半導体層より高不純物濃度の第1導電型の領域と、
前記第1導電型の第1ワイドバンドギャップ半導体層の前記ワイドバンドギャップ半導体基板に対して反対側の表面に形成された、シリコンよりもバンドギャップが広い半導体からなる第2導電型のワイドバンドギャップ半導体層と、
前記第2導電型のワイドバンドギャップ半導体層の内部に選択的に形成された第1導電型のソース領域と、
前記第2導電型のワイドバンドギャップ半導体層を貫通して前記第1導電型の領域に達するトレンチと、
前記トレンチ内部にゲート絶縁膜を介して形成されたゲート電極と、
前記ゲート電極上に形成された層間絶縁膜と、
前記第2導電型のワイドバンドギャップ半導体層および前記第1導電型のソース領域に接触するソース電極と、
前記第1導電型の高濃度ワイドバンドギャップ半導体基板の裏面に設けられたドレイン電極と、
を備え、
前記第1導電型の領域の深さは、前記第2導電型の第1ベース領域および前記第2導電型の第2ベース領域の深さよりも深いことを特徴とする半導体装置。 - 前記第1導電型の領域の深さは、前記第2導電型の第1ベース領域および前記第2導電型の第2ベース領域の深さよりも、0.2μm以上0.5μm以下深いことを特徴とする請求項1に記載の半導体装置。
- シリコンよりもバンドギャップが広い半導体は、炭化珪素であることを特徴とする請求項1または2に記載の半導体装置。
- シリコンよりもバンドギャップが広い半導体からなる第1導電型のワイドバンドギャップ半導体基板のおもて面に、前記ワイドバンドギャップ半導体基板より低不純物濃度の第1導電型の第1ワイドバンドギャップ半導体層を形成する工程と、
前記第1導電型の第1ワイドバンドギャップ半導体層の表面層に、第2導電型の第1ベース領域および第2導電型の第2ベース領域を選択的に形成する工程と、
前記第1導電型の第1ワイドバンドギャップ半導体層の表面層に、前記第2導電型の第1ベース領域および前記第2導電型の第2ベース領域よりも深く第1導電型の第1領域を形成する工程と、
前記第1導電型の第1ワイドバンドギャップ半導体層の表面に、シリコンよりもバンドギャップが広い半導体からなる、前記ワイドバンドギャップ半導体基板より低不純物濃度の第1導電型の第2ワイドバンドギャップ半導体層を形成する工程と、
前記第1導電型の第2ワイドバンドギャップ半導体層の表面層に、前記第2導電型の第1ベース領域に接する第2導電型の第3ベース領域を選択的に形成する工程と、
前記第1導電型の第2ワイドバンドギャップ半導体層の表面に、シリコンよりもバンドギャップが広い半導体からなる第2導電型のワイドバンドギャップ半導体層を形成する工程と、
前記第2導電型のワイドバンドギャップ半導体層の内部に第1導電型のソース領域を選択的に形成する工程と、
前記第1導電型のソース領域および前記第2導電型のワイドバンドギャップ半導体層を貫通して前記第1導電型の第1領域に達するトレンチを形成する工程と、
前記トレンチの内部にゲート絶縁膜を介してゲート電極を形成する工程と、
前記ゲート電極上に層間絶縁膜を形成する工程と、
前記第2導電型のワイドバンドギャップ半導体層および前記第1導電型のソース領域に接するソース電極を形成する工程と、
前記ワイドバンドギャップ半導体基板の裏面にドレイン電極を形成する工程と
を含むことを特徴とする半導体装置の製造方法。 - 前記第2導電型の第3ベース領域の形成後、前記第2導電型のワイドバンドギャップ半導体層の形成前に、
前記第1導電型の第2ワイドバンドギャップ半導体層の表面層に、前記第1導電型の第1領域に接する第1導電型の第2領域を選択的に形成する工程、
をさらに含むことを特徴とする請求項4に記載の半導体装置の製造方法。 - 前記第1導電型の第2領域は、イオン注入によって形成することを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記第1導電型の第2ワイドバンドギャップ半導体層は、前記第1導電型の第1ワイドバンドギャップ半導体層よりも高不純物濃度に形成することを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記第1導電型の第1ワイドバンドギャップ半導体層、前記第1導電型の第2ワイドバンドギャップ半導体層および前記第2導電型のワイドバンドギャップ半導体層は、エピタキシャル成長によって形成することを特徴とする請求項4に記載の半導体装置の製造方法。
- 前記第1導電型の第1領域の深さは、前記第2導電型の第1ベース領域および前記第2導電型の第2ベース領域の深さよりも、0.2μm以上0.5μm以下深く形成することを特徴とする請求項4に記載の半導体装置の製造方法。
- シリコンよりもバンドギャップが広い半導体は、炭化珪素であることを特徴とする請求項4~9のいずれか一つに記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2017545119A JP6572423B2 (ja) | 2015-10-16 | 2016-09-08 | 半導体装置および半導体装置の製造方法 |
DE112016003509.8T DE112016003509B4 (de) | 2015-10-16 | 2016-09-08 | Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung |
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JP2018206872A (ja) * | 2017-05-31 | 2018-12-27 | 国立研究開発法人産業技術総合研究所 | 半導体装置 |
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DE112016003509T5 (de) | 2018-05-24 |
US20190206985A1 (en) | 2019-07-04 |
US10403713B2 (en) | 2019-09-03 |
JP6572423B2 (ja) | 2019-09-11 |
US10276653B2 (en) | 2019-04-30 |
JPWO2017064948A1 (ja) | 2018-06-21 |
CN108028282B (zh) | 2021-06-15 |
CN108028282A (zh) | 2018-05-11 |
US20180197947A1 (en) | 2018-07-12 |
DE112016003509B4 (de) | 2023-07-20 |
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