WO2017037872A1 - 光学ユニット及びこれを備えた分光器 - Google Patents
光学ユニット及びこれを備えた分光器 Download PDFInfo
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- 238000004458 analytical method Methods 0.000 description 21
- 238000010586 diagram Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
Definitions
- the present invention relates to an optical unit that includes an image sensor having a plurality of light receiving elements, converts an output signal from each light receiving element of the image sensor by an A / D converter, and a spectroscope including the optical unit.
- Patent Document 1 discloses a spectrometer that includes a photodiode array detector, which is an example of an image sensor, and converts an output signal from each light receiving element of the photodiode array detector using an A / D converter. Yes.
- each light receiving element of this type of image sensor electric charges are accumulated according to the amount of received light, and an analog signal corresponding to the amount of electric charge is converted into a digital signal by an A / D converter.
- conversion processing sequentially for a plurality of light receiving elements at a high speed, one output value corresponding to the amount of light received by each light receiving element is obtained one by one, and the amount of light received at each wavelength based on these output values Are acquired as spectral data.
- FIG. 7 is a timing chart for explaining a conventional mode when converting output signals from a plurality of light receiving elements by an A / D converter.
- n is a natural number
- the waveform of the analog signal output from each light receiving element appears as a rectangular wave with a slow rise due to the influence of the time constant of the image sensor and the circuit. Therefore, the analog signal output from each light receiving element is converted by the A / D converter at a constant timing T n (n is a natural number) at which the waveform has risen sufficiently, and then switched to the next light receiving element.
- Such a process is sequentially executed at the timings T 1 to T n corresponding to the respective light receiving elements, whereby one scan operation is completed. That is, one output value for each light receiving element is acquired by one scanning operation. During the analysis, the scanning operation is repeatedly executed, so that the output value for each light receiving element is acquired at a constant period.
- the present invention has been made in view of the above circumstances, and an object thereof is to provide an optical unit that is not easily affected by noise and a spectroscope including the same.
- An optical unit includes an image sensor, an A / D converter, a conversion processing unit, and an average value calculation unit.
- the image sensor has a plurality of light receiving elements.
- the A / D converter converts an output signal from each light receiving element of the image sensor.
- the conversion processing unit performs a conversion process of acquiring two or more output values by converting an output signal from the same light receiving element twice or more by the A / D converter within a preset time range. The process is sequentially performed for a plurality of light receiving elements.
- the average value calculation unit calculates an average value of two or more output values for each light receiving element acquired by the processing of the conversion processing unit.
- the optical unit may further include an integrating unit and a signal holding unit.
- the integration unit converts an output signal from each light receiving element of the image sensor into a voltage.
- the signal holding unit holds the voltage converted by the integrating unit.
- the A / D converter may convert the voltage held by the signal holding unit into a digital value.
- the conversion process is a process of acquiring two or more output values by converting the holding voltage from the same light receiving element twice or more by the A / D converter within a preset time range. May be.
- two or more output values are acquired for each light receiving element by a series of conversion processes for a plurality of light receiving elements, and an average value of the two or more output values is obtained for each light receiving element. Calculated. Therefore, even if one of the output values becomes an inaccurate value due to the influence of noise, an average value with another accurate value is calculated, so that it is not easily affected by the noise.
- the optical unit may further include a setting receiving unit that receives setting of a cycle.
- the conversion processing unit may repeatedly execute a series of conversion processes for the plurality of light receiving elements at a cycle received by the setting receiving unit.
- the number of output values for each light receiving element acquired within the preset time range may vary according to the period received by the setting reception unit.
- a series of conversion processing for a plurality of light receiving elements is repeatedly executed at a set cycle, and for each series of conversion processing, the number of output values corresponding to the cycle is obtained for each light receiving device.
- the number corresponding to the period is, for example, a larger value as the period is longer, and a smaller value as the period is shorter. In this case, the longer the set cycle is, the more output values can be acquired and the average value can be calculated.
- the number of output values for each light receiving element acquired within the preset time range may be a fixed number.
- the optical unit may further include a setting reception unit that receives, for each light receiving element, a setting of the number of output values for each light receiving element acquired within the preset time range.
- the spectroscope according to the present invention includes the optical unit, and a diffraction grating that splits light on a grating surface and causes the light beams of the divided wavelengths to enter the plurality of light receiving elements.
- FIG. 2 is a block diagram showing an electrical configuration of the spectroscopic analyzer of FIG. 1. It is a timing chart for demonstrating the specific aspect of a conversion process. It is the flowchart which showed an example of the process by the data processing part in analysis. It is the flowchart which showed an example of the process by the data processing part in analysis in 2nd Embodiment. It is the flowchart which showed an example of the process by the data processing part in analysis in 3rd Embodiment. It is a timing chart for demonstrating the conventional aspect at the time of converting the output signal from a some light receiving element with an A / D converter.
- FIG. 1 is a schematic diagram illustrating a configuration example of a spectral analysis device according to a first embodiment of the present invention.
- the spectroscopic analysis apparatus includes an optical system 10 including a light source 1, a condenser lens 2, a slit plate 3, a diffraction grating 4, a PDA (photodiode array detector) 5, and the like.
- a sample cell 20 made of, for example, a flow cell is disposed on the optical path L formed by the optical system 10, and light such as white light is irradiated on the sample in the sample cell 20.
- the light emitted from the light source 1 is collected by the condenser lens 2 and irradiated on the sample in the sample cell 20.
- the light that has passed through the slit plate 3 enters the diffraction grating 4.
- the diffraction grating 4 has, for example, a concave grating surface 7, and the light transmitted through the sample cell 20 is split into light for each wavelength by the grating surface 7.
- the condensing lens 2 is an example of a condensing element, and may be composed of other members such as a parabolic mirror as long as it condenses the light from the light source 1.
- the PDA 5 is an example of an image sensor and includes a plurality of light receiving elements 6 arranged in a line.
- the light of each wavelength dispersed by the diffraction grating 4 is incident on different light receiving elements 6 of the PDA 5. Therefore, the light quantity of each wavelength can be calculated based on the output signal from each light receiving element 6.
- FIG. 2 is a block diagram showing the electrical configuration of the spectroscopic analyzer of FIG.
- the spectroscopic analysis apparatus includes an A / D converter 30, a data processing unit 40, a storage unit 50, an operation unit 60, and the like. Based on the operations of these units, the PDA 5 The signals from the respective light receiving elements 6 are processed.
- the PDA 5, the A / D converter 30, and the data processing unit 40 constitute an optical unit 100. Further, the optical unit 100 and the diffraction grating 4 constitute a spectroscope for spectrally dividing incident light and acquiring spectral data.
- an analog signal (output signal) from each light receiving element 6 of the PDA 5 is converted into a digital signal.
- a value representing the amount of light received by each light receiving element 6 digitally converted by the A / D converter 30 is input to the data processing unit 40 as an output value.
- the data processing unit 40 includes, for example, a CPU (Central Processing Unit), and functions as a setting reception unit 41, a conversion processing unit 42, an average value calculation unit 43, and the like when the CPU executes a program.
- the storage unit 50 is configured by, for example, a hard disk or a RAM (Random-Access Memory).
- the operation unit 60 is configured by, for example, a keyboard or a mouse.
- the setting reception unit 41 performs processing for receiving the setting. Specifically, parameters such as analysis conditions set using the operation unit 60 are received by the setting receiving unit 41, and the data processing unit 40 controls the operation of the PDA 5 or A / D based on the parameters. Processing for the output value from the converter 30 is performed.
- the conversion processing unit 42 causes the A / D converter 30 to convert the output signal from each light receiving element 6 by sequentially outputting signals from each light receiving element 6 of the PDA 5 to the A / D converter 30 (conversion processing). )I do.
- each light receiving element 6 charges are accumulated according to the amount of received light, and an output value corresponding to the amount of charge is converted by the A / D converter 30 to obtain an output value.
- the conversion process of the output signal from each light receiving element 6 is performed for all the light receiving elements 6 according to a certain order.
- a series of conversion processes (scanning operations) for all the light receiving elements 6 are repeatedly performed a plurality of times, whereby output values for the respective light receiving elements 6 are acquired at a constant period.
- a preamplifier circuit (not shown) may be provided between the PDA 5 and the A / D converter 30.
- the preamplifier circuit includes, for example, an integration unit and a signal holding unit.
- the integrator converts the output signal from each light receiving element 6 of the PDA 5 into a voltage.
- the signal holding unit holds the voltage converted by the integrating unit.
- the A / D converter 30 may convert the voltage held by the signal holding unit into a digital value.
- the conversion processing unit 42 may cause the A / D converter 30 to convert the output signal (holding voltage by the signal holding unit) from each light receiving element 6 of the PDA 5 by controlling the preamplifier circuit (signal holding unit).
- the operator can arbitrarily set the above cycle by operating the operation unit 60. That is, the conversion processing unit 42 repeatedly executes a series of conversion processing for the plurality of light receiving elements 6 at a cycle received by the setting receiving unit 41. The longer the period, the greater the amount of light received by each light receiving element 6 and the less affected by noise.
- the conversion processing unit 42 causes the A / D converter 30 to convert the output signal from the same light receiving element 6 twice or more in the series of conversion processes as described above. Thereby, two or more output values are acquired for each light receiving element 6 in one scanning operation.
- the average value calculation unit 43 calculates an average value for each light receiving element 6 by averaging two or more output values for each light receiving element 6 acquired by the processing of the conversion processing unit 42.
- the average value for each light receiving element 6 calculated as described above is stored in the storage unit 50 as spectrum data representing the amount of light received at each wavelength.
- the spectrum data stored in the storage unit 50 is output as an analysis result in various modes such as display on a display unit (not shown) or printing from a printer (not shown).
- FIG. 3 is a timing chart for explaining a specific mode of conversion processing.
- the PDA 5 includes n (n is a natural number of 2 or more) light receiving elements 6 and an analog signal from each light receiving element 6 is converted into a digital signal by the A / D converter 30 will be described. .
- each light receiving element 6 is subjected to four conversion processes within a preset time range R.
- the timing of conversion processing for each light receiving element 6 is set as much as possible within the time range R after the waveform rises sufficiently.
- the conversion process is performed for each light receiving element 6 at four timings T n1 to T n4 , but the number of conversion processes is not limited to four, It varies according to the length of the time range R.
- the time range R is set in advance according to a cycle when a series of conversion processes are repeatedly executed. Therefore, the number of output values (four in the example of FIG. 3) for each light receiving element 6 acquired within the preset time range R varies according to the period received by the setting reception unit 41. It becomes. Specifically, the number of the output values becomes larger as the period becomes longer, and becomes smaller as the period becomes shorter.
- FIG. 4 is a flowchart showing an example of processing by the data processing unit 40 under analysis.
- step S101 and S102 an output signal from the first light receiving element 6 is input to the A / D converter 30 (steps S101 and S102). Thereafter, after a predetermined time has elapsed and the waveform has risen sufficiently (Yes in step S103), A / D conversion is repeated as much as possible within a predetermined time range R, and processing for integrating the obtained output values is performed. Is performed (steps S104 to S106).
- step S106 When the predetermined time range R is exceeded (No in step S106), the integrated value of output values at that time is divided by the number of acquired output values (number of times of A / D conversion), An average value of the output values is calculated (step S107). Next, for the second light receiving element 6 (No in steps S108 and S109), the processes in steps S102 to S108 are performed.
- steps S102 to S108 are sequentially executed up to the nth light receiving element 6.
- This series of conversion processing (steps S101 to S109) is repeatedly executed at a preset cycle until the analysis is completed (until Yes in step S110).
- a series of conversion processes for a plurality of light receiving elements 6 are repeatedly executed at a set cycle, and for each series of conversion processes, a number of output values corresponding to the cycle (see FIG. (4 in the example of 3) is acquired for each light receiving element 6.
- Second Embodiment In the first embodiment, the number of output values for each light receiving element 6 acquired within a preset time range R varies according to the cycle when a series of conversion processes are repeatedly executed. The configuration as described above has been described. In contrast, the second embodiment is different in that the number of output values for each light receiving element 6 acquired within a preset time range R is a fixed number (two or more). ing.
- FIG. 5 is a flowchart showing an example of processing by the data processing unit 40 under analysis in the second embodiment.
- step S201 and S202 an output signal from the first light receiving element 6 is input to the A / D converter 30 (steps S201 and S202). Thereafter, after a certain time has elapsed and the waveform has risen sufficiently (Yes in step S203), the A / D conversion is repeated until a certain number of times (a predetermined number of times equal to or more than two) is reached. Processing for integrating the output values is performed (steps S204 to S206).
- step S206 When the number of A / D conversions reaches a certain number (Yes in step S206), the integrated value of the output values at that time is divided by the number of A / D conversions that is the certain number of times. An average value of the output values is calculated (step S207). Next, for the second light receiving element 6 (No in steps S208 and S209), the processes in steps S202 to S208 are performed.
- steps S202 to S208 are sequentially executed up to the nth light receiving element 6.
- This series of conversion processing (steps S201 to S209) is repeatedly executed at a preset period until the analysis is completed (until Yes in step S210).
- two or more output values are obtained for each light receiving element 6 by a series of conversion processes (one scan operation) for the plurality of light receiving elements 6, An average value of two or more output values is calculated for each light receiving element 6. Therefore, even if one of the output values becomes an inaccurate value due to the influence of noise, an average value with another accurate value is calculated, so that it is not easily affected by the noise.
- the number of output values for each light receiving element 6 acquired within a preset time range R varies according to the cycle when a series of conversion processes are repeatedly executed. The configuration as described above has been described.
- setting of the number of output values for each light receiving element 6 acquired within a preset time range R is received by the setting receiving unit 41 for each light receiving element 6. Is different.
- FIG. 6 is a flowchart showing an example of processing by the data processing unit 40 under analysis in the third embodiment.
- step S301 and S302 an output signal from the first light receiving element 6 is input to the A / D converter 30 (steps S301 and S302). Thereafter, after a predetermined time has elapsed and the waveform has risen sufficiently (Yes in step S303), A / D conversion is repeated until the number of times set for each light receiving element 6 (two or more set times) is reached. Then, a process of integrating the obtained output values is performed (steps S304 to S306).
- step S306 When the number of A / D conversions reaches the set number of times (Yes in step S306), the integrated value of the output value at that time is divided by the number of A / D conversions that is the set number of times. An average value of the output values is calculated (step S307). Next, for the second light receiving element 6 (No in steps S308 and S309), the processes in steps S302 to S308 are performed.
- steps S302 to S308 are sequentially executed up to the nth light receiving element 6.
- This series of conversion processes (steps S301 to S309) is repeatedly executed at a preset cycle until the analysis is completed (Yes in step S310).
- two or more output values are obtained for each light receiving element 6 by a series of conversion processes (one scan operation) for the plurality of light receiving elements 6, An average value of two or more output values is calculated for each light receiving element 6. Therefore, even if one of the output values becomes an inaccurate value due to the influence of noise, an average value with another accurate value is calculated, so that it is not easily affected by the noise.
- an average value can be calculated by obtaining a different number of output values for each light receiving element 6, if an appropriate value is set in consideration of noise for each light receiving element 6, It can be made less susceptible to noise.
- the diffraction grating 4 is not limited to the configuration having the concave grating surface 7 but may have a configuration having a grating surface of another shape such as a convex shape.
- the diffraction grating 4 is not limited to a reflection type diffraction grating that divides light when reflecting incident light, but may be a transmission type diffraction grating that divides light when transmitting incident light.
- the optical unit 100 is not limited to such a configuration, and the optical unit 100 may receive light incident from other than the diffraction grating 4 by the plurality of light receiving elements 6 and can be applied to various optical devices other than the spectroscopic analyzer. It is.
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Abstract
Description
図1は、本発明の第1実施形態に係る分光分析装置の構成例を示した概略図である。この分光分析装置は、光源1、集光レンズ2、スリット板3、回折格子4及びPDA(フォトダイオードアレイ検出器)5などを含む光学系10を備えている。分析時には、光学系10により形成される光路L上に、例えばフローセルなどからなる試料セル20が配置され、当該試料セル20内の試料に白色光などの光が照射される。
図3は、変換処理の具体的態様について説明するためのタイミングチャートである。この例では、PDA5がn個(nは2以上の自然数)の受光素子6を備えており、各受光素子6からのアナログ信号をA/D変換器30でデジタル信号に変換する場合について説明する。
図4は、分析中のデータ処理部40による処理の一例を示したフローチャートである。分析中は、PDA5におけるx番目(x=1,2,3,・・・,n)の受光素子6からの出力信号が、A/D変換器30により順次変換される。
(1)本実施形態では、複数の受光素子6についての一連の変換処理(1回のスキャン動作)により、各受光素子6について2つ以上の出力値(図3の例では4つ)が取得され、それらの2つ以上の出力値の平均値が受光素子6ごとに算出される。したがって、ノイズの影響により、いずれかの出力値が不正確な値となった場合でも、他の正確な値との平均値が算出されるため、ノイズの影響を受けにくい。
第1実施形態では、予め設定された時間範囲R内で取得される各受光素子6についての出力値の数が、一連の変換処理が繰り返し実行される際の周期に応じて変動するような構成について説明した。これに対して、第2実施形態では、予め設定された時間範囲R内で取得される各受光素子6についての出力値の数が、一定数(2以上の数)となっている点が異なっている。
第1実施形態では、予め設定された時間範囲R内で取得される各受光素子6についての出力値の数が、一連の変換処理が繰り返し実行される際の周期に応じて変動するような構成について説明した。これに対して、第3実施形態では、予め設定された時間範囲R内で取得される各受光素子6についての出力値の数の設定が、設定受付部41により受光素子6ごとに受け付けられるようになっている点が異なっている。
以上の実施形態では、複数の受光素子6を有するイメージセンサの一例として、PDA5を用いた場合について説明した。しかし、このような構成に限らず、CCD(Charge-Coupled Device)イメージセンサなどの他の各種イメージセンサを用いることが可能である。
2 集光レンズ
3 スリット板
4 回折格子
5 PDA(フォトダイオードアレイ検出器)
6 受光素子
7 格子面
10 光学系
20 試料セル
30 A/D変換器
40 データ処理部
41 設定受付部
42 変換処理部
43 平均値算出部
50 記憶部
60 操作部
100 光学ユニット
Claims (5)
- 複数の受光素子を有するイメージセンサと、
前記イメージセンサの各受光素子からの出力信号を変換するA/D変換器と、
予め設定された時間範囲内で同一の受光素子からの出力信号を前記A/D変換器により2回以上変換させて2つ以上の出力値を取得する変換処理を、前記複数の受光素子について順次実行する変換処理部と、
前記変換処理部の処理により取得された各受光素子についての2つ以上の出力値の平均値を算出する平均値算出部とを備えたことを特徴とする光学ユニット。 - 周期の設定を受け付ける設定受付部をさらに備え、
前記変換処理部は、前記複数の受光素子についての一連の変換処理を前記設定受付部により受け付けられた周期で繰り返し実行し、
前記予め設定された時間範囲内で取得される各受光素子についての出力値の数は、前記設定受付部により受け付けられた周期に応じて変動することを特徴とする請求項1に記載の光学ユニット。 - 前記予め設定された時間範囲内で取得される各受光素子についての出力値の数は、一定数であることを特徴とする請求項1に記載の光学ユニット。
- 前記予め設定された時間範囲内で取得される各受光素子についての出力値の数の設定を受光素子ごとに受け付ける設定受付部をさらに備えることを特徴とする請求項1に記載の光学ユニット。
- 請求項1~4のいずれかに記載の光学ユニットと、
格子面で光を分光し、分光した各波長の光を前記複数の受光素子に入射させる回折格子とを備えたことを特徴とする分光器。
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03156323A (ja) * | 1989-09-27 | 1991-07-04 | Shimadzu Corp | 分光光度計 |
JPH03225284A (ja) * | 1990-01-30 | 1991-10-04 | Nec Corp | 固体撮像装置の出力信号計測方法 |
JP2001324390A (ja) * | 2000-05-17 | 2001-11-22 | Denso Corp | 熱型赤外線イメージセンサ |
JP2003043369A (ja) * | 2001-08-03 | 2003-02-13 | Olympus Optical Co Ltd | レーザ走査型顕微鏡 |
JP2015141033A (ja) * | 2014-01-27 | 2015-08-03 | 株式会社デンソー | 光センサ |
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JPH08193945A (ja) | 1995-01-20 | 1996-07-30 | Shimadzu Corp | フォトダイオードアレイ検出器 |
JP2013124990A (ja) * | 2011-12-15 | 2013-06-24 | Canon Inc | 画像処理装置および画像処理方法 |
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JPH03156323A (ja) * | 1989-09-27 | 1991-07-04 | Shimadzu Corp | 分光光度計 |
JPH03225284A (ja) * | 1990-01-30 | 1991-10-04 | Nec Corp | 固体撮像装置の出力信号計測方法 |
JP2001324390A (ja) * | 2000-05-17 | 2001-11-22 | Denso Corp | 熱型赤外線イメージセンサ |
JP2003043369A (ja) * | 2001-08-03 | 2003-02-13 | Olympus Optical Co Ltd | レーザ走査型顕微鏡 |
JP2015141033A (ja) * | 2014-01-27 | 2015-08-03 | 株式会社デンソー | 光センサ |
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US20180245980A1 (en) | 2018-08-30 |
US10337919B2 (en) | 2019-07-02 |
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