WO2016204061A1 - Dispositif de recouvrement avec un matériau liquide - Google Patents

Dispositif de recouvrement avec un matériau liquide Download PDF

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Publication number
WO2016204061A1
WO2016204061A1 PCT/JP2016/067189 JP2016067189W WO2016204061A1 WO 2016204061 A1 WO2016204061 A1 WO 2016204061A1 JP 2016067189 W JP2016067189 W JP 2016067189W WO 2016204061 A1 WO2016204061 A1 WO 2016204061A1
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WIPO (PCT)
Prior art keywords
application
needle
liquid material
application needle
light
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Application number
PCT/JP2016/067189
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English (en)
Japanese (ja)
Inventor
博明 大庭
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Ntn株式会社
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Application filed by Ntn株式会社 filed Critical Ntn株式会社
Publication of WO2016204061A1 publication Critical patent/WO2016204061A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/06—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length by rubbing contact, e.g. by brushes, by pads
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

Definitions

  • the present invention relates to a liquid material coating apparatus, and more particularly to a liquid material coating apparatus that can be used for forming fine patterns such as semiconductors, electronic circuits, and flat panel displays.
  • a technique that has been conventionally used for correction work of a flat panel display, scribing work of a solar cell, and the like for example, JP 2007-233299 A, JP 2009-122259 A, JP 2012-6077 A). (See Patent Documents 1 to 3).
  • the technique using an application needle can be applied even with high-viscosity ink, which is not good for an ink jet dispenser, and has recently been used to form a thick film of 10 ⁇ m or thicker than a flat panel display pattern.
  • This technology is used, for example, for forming electronic circuit patterns and printed circuit board wiring of semiconductor devices such as MEMS (Micro Electro Mechanical Systems) and sensors. Patterns produced by printed electronics technology, which is a promising manufacturing technology in the future, are also classified as thick films. Therefore, the technique of applying a liquid material using an application needle is a processing technique that is expected to be used in the future.
  • FIG. 10 is an external view showing the configuration of the color filter defect correcting apparatus disclosed in Japanese Patent Laid-Open No. 2007-233299.
  • this color filter defect correcting apparatus includes a host computer 1, a control computer 2, an image processing unit 3, a Z-axis stage 4, an XY stage 5, a chuck base 6, and a cutting device.
  • a laser irradiation unit 7, a variable slit unit 8, an ink application unit 9, a monitor 10, and an objective lens 21 are provided.
  • the cutting laser irradiation unit 7, the variable slit unit 8, and the ink application unit 9 constitute a correction processing unit 50.
  • the Z axis stage 4 and the XY stage 5 constitute a positioning mechanism 51.
  • the operator confirms the defect displayed on the monitor of the host computer 1 and instructs the ink application position.
  • the image on the monitor is enlarged and displayed by the objective lens 21, and the application position on the XY plane is designated by clicking a point on the monitor with a mouse or the like.
  • the host computer 1 converts the clicked position into the coordinate value P of the XY stage 5 and stores it inside.
  • the operator moves the Z-axis stage 4 by manual operation to adjust the focus, or moves the Z-axis stage 4 by automatic focusing by the image processing unit 3. match the focal point.
  • the relative positional relationship in the Z-axis direction between the ink application unit 9 and the surface of the application target is set to an appropriate positional relationship.
  • the operator instructs the host computer 1 to perform a coating operation.
  • the host computer 1 calculates the coordinate P ′ by adding the relative coordinate value of the ink application unit 9 to the objective lens 21 to the stored coordinate value P.
  • the host computer 1 moves the XY stage 5 based on the coordinates P ′, controls the ink application unit 9 to apply ink, and then moves the XY stage 5 to the original position. Finally, the operator confirms the state of the ink displayed on the monitor of the host computer 1.
  • the ink application unit 9 is attached at a position offset in the horizontal direction with respect to the objective lens 21, the object to be applied is the objective lens during alignment in the Z-axis direction. It is necessary to move below the ink application part 9 at the time of application.
  • FIG. 11 is a schematic diagram for explaining the surface shape of an object to be coated, which is a problem in the conventional apparatus.
  • movement cannot be performed with respect to the application
  • the reason is that the lowering amount of the application needle of the ink application unit 9 is set to a predetermined value, and is the same height for one alignment operation in the Z-axis direction for focusing under the objective lens. This is because the coating can be performed only on the flat surface.
  • the present invention has been made to solve such a problem, and an object of the present invention is to have means for accurately measuring the relative distance between the ink application part and the application target part of the application object.
  • An object of the present invention is to provide a liquid material coating apparatus capable of positioning the positional relationship in the Z-axis direction between the coating section and the surface of the coating target portion of the coating target object with high accuracy.
  • the present invention is a liquid material application device, an application needle for applying a liquid material to a tip and applying it to an object, and an application needle in the vertical direction along the application needle with respect to the object.
  • the measuring apparatus includes a projector that emits laser light and a light receiver that receives the reflected light of the laser light reflected by the surface of the object.
  • the application needle, the light projecting axis of the light projector, and the light receiving axis of the light receiver are arranged on the same plane.
  • the application needle is disposed between the light projector and the light receiver on the plane.
  • the application portion is a contact point on the surface of the object where the tip of the application needle contacts the object.
  • the spot of the laser beam emitted from the projector is adjusted so as to substantially coincide with the contact point.
  • the drive device includes a first drive mechanism that moves the application needle in the vertical direction and a second drive mechanism that moves the support member to which the first drive mechanism and the measurement device are fixed in the vertical direction.
  • the movement distance is the sum of the first movement distance of the application needle by the first drive mechanism and the second movement distance of the support member by the second drive mechanism.
  • the control device sets the first movement distance as a fixed length and changes the second movement distance based on the relative distance.
  • the measuring device is fixed to the support member, irradiates the portion to be coated with laser light, and acquires the relative distance based on the reflected light.
  • the relative position of the tip of the application needle and the application target portion of the object can be positioned with high accuracy.
  • the needle contact position and the laser beam spot are substantially coincident with each other, it is not necessary to perform the focusing operation even on surfaces with different heights, and the operating time of the driving mechanism of the coating apparatus can be shortened. Can do.
  • FIG. It is a figure which shows the structure of the liquid material coating device which concerns on this Embodiment. It is a figure which shows the detailed structure of the application
  • FIG. It is a figure showing signs that the locus of reflected light R changes on a plane including laser light L and reflected light R in order to explain the principle of detecting the distance in the Z direction. It is a figure which shows the structure of the control block of a liquid material coating device.
  • FIG. 5 is a flowchart showing control contents executed by a control device that controls the application mechanism unit 101; It is a 1st figure for demonstrating the raising / lowering operation
  • 1 is an external view showing a configuration of a color filter defect correcting device disclosed in Japanese Patent Application Laid-Open No. 2007-233299. It is a schematic diagram for demonstrating the surface shape of the coating target object which becomes a problem in the conventional apparatus.
  • FIG. 1 is a diagram showing a configuration of a liquid material coating apparatus according to the present embodiment.
  • the present embodiment is characterized in that the ink application unit 9 in FIG. 10 is replaced with an application mechanism unit 101 shown in FIG.
  • a liquid material coating apparatus 300 includes a monitor 10 that displays an image observed by an observation optical system that observes the surface of an object to be coated with ink (such as a circuit board), and an observation.
  • a laser irradiation unit for cutting 7 that irradiates an object with laser light through an optical system to cut unnecessary portions; and an application mechanism unit 101 that applies ink to a target region of an object by attaching ink to the tip of an application needle;
  • the image processing unit 3 for recognizing the target area, the host computer 1 for controlling the entire apparatus, and the control computer 2 for controlling the operation of the coating mechanism unit 101 are included.
  • the liquid material coating apparatus 300 further includes an XY stage 5 that moves an object having a target area in the XY direction (horizontal direction), a chuck base 6 that holds the object on the XY stage 5, and an observation optical system. And a Z stage 4 that moves the coating mechanism 101 in the Z direction (vertical direction).
  • the XY stage 5 is used to relatively move an object to an appropriate position when applying ink to the object area by the application mechanism 101 or observing the surface of the object by an observation optical system.
  • the XY stage 5 has a configuration in which two uniaxial stages are stacked in a perpendicular direction.
  • the XY stage 5 is not limited as long as it can move the object relative to the observation optical system and the coating mechanism unit 101, and is limited to the configuration of the XY stage 5 shown in FIG. is not.
  • a gantry-type XY stage that can move independently in the X-axis direction and the Y-axis direction may be used.
  • FIG. 2 is a diagram showing a detailed configuration of the coating mechanism unit 101 of the liquid material coating apparatus according to the present embodiment.
  • an application mechanism unit 101 is provided with a container 107 into which a liquid material is injected, an application needle 106 for applying the liquid material to a tip portion and applying it to an object, and an application needle 106.
  • a slide mechanism 105 for sliding the application needle 106 in the Z direction, a second drive mechanism 104 for attaching the slide mechanism 105 and positioning the slide mechanism 105 in the Z direction, and a second drive mechanism 104 are attached.
  • a first drive mechanism 103 for positioning the support member 102 in the Z direction.
  • FIG. 3 is an enlarged view of the application needle 106 and the container 107.
  • FIG. 3 shows the dimensional relationship between the first hole 21 a opened in the bottom of the container 107, the second hole 23 a opened in the lid 23, and the application needle 106.
  • the diameter of the first hole 21a is Dd
  • the diameter of the second hole 23a is Du
  • the diameter of the application needle 106 is D
  • Dd and Du are larger than D and Dd> Du> D.
  • This relational expression is valid when the application needle 106 is not a step but a straight type.
  • half of the difference (one-side gap) between the diameter Dd of the first hole 21a and the diameter D of the application needle 106 is ⁇ d
  • half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 106 is ⁇ d
  • half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 106 is ⁇ u
  • ⁇ d> ⁇ u there is a relationship of ⁇ d> ⁇ u, and the first hole opened at the bottom of the container 107 rather than the gap between the second hole 23a opened at the lid 23 and the application needle 106.
  • the gap between 21a and application needle 106 is set larger.
  • the posture of the container 107 can be maintained by the second hole 23a and the application needle 106, and even if the application needle 106 is in contact with the inner surface of the second hole 23a, the application needle 106 is Since it does not contact the inner surface of the first hole 21a, deformation due to wear of the first hole 21a can be suppressed. Accordingly, since the amount of the ink 22 adhering to the tip end portion 24a of the application needle 106 does not change, stable application is possible.
  • the coating mechanism unit 101 further includes a measuring device 111 that detects the relative distance between the coating mechanism unit 101 and the object 108.
  • the measuring device 111 includes a projector 109 and a light receiver 110.
  • a light projector 109 and a light receiver 110 are attached to the support member 102.
  • This measuring device 111 is for detecting the distance in the Z direction between the vicinity including the contact point P on the object 108 (scheduled application portion) and the measuring device 111 based on the known triangulation principle. It is.
  • the light projector 109 is fixed on the support member 102 so that the spot of the laser light L emitted from the point A substantially coincides with the point P.
  • the light receiver 110 is fixed on the support member 102 so that the optical axes of the laser light L and the reflected light R are symmetric with respect to the Z direction. Thereby, the reflected light R at the point P of the laser light L is incident on the point B of the light receiver 110.
  • FIG. 4 is a diagram showing how the locus of the reflected light R changes on the plane including the laser light L and the reflected light R in order to explain the principle of detecting the distance in the Z direction.
  • a semiconductor laser emitter is disposed at point A
  • a linear image sensor is disposed at point P.
  • the Z axis coincides with the trajectory through which the application needle 106 passes.
  • a point P is a contact point of the object 108 when the application target portion of the object 108 is at an optimal position with respect to the application mechanism unit 101.
  • the correspondence between the shift amount of the light receiving position and the distance is calculated in advance and stored as a map in the measuring device controller 215 in FIG. 5, and the distance is referred to the map from the shift amount of the light receiving position at the time of measurement. You may ask for it.
  • the light receiving surface of the light receiver is set to the same height as the point A, the angle of the triangle ⁇ BAP and ⁇ ABP formed by the three points A, B, and P is fixed. Based on the position (the length of the side AB), the distance (the height of the triangle PAB) may be calculated by the measuring device controller 215 in FIG.
  • FIG. 5 is a diagram showing the configuration of the control block of the liquid material coating apparatus. Referring to FIG. 5, in order to control the first drive mechanism 103, the second drive mechanism 104, and the measurement device 111, the first drive mechanism driver 213, the second drive mechanism driver 214, and the measurement device Controller 215 and controller 212 are provided.
  • the first drive mechanism 103 operates based on an electrical command from the first drive mechanism driver 213.
  • the second drive mechanism 104 operates based on an electrical command from the second drive mechanism driver 214.
  • the measurement device controller 215 measures the distance by controlling the irradiation of the laser light L of the projector 109 and analyzing the reflected light R incident on the light receiver 110.
  • the control device 212 outputs a command to the first drive mechanism driver 213 and the second drive mechanism driver 214 to control the coating operation.
  • the distance is acquired from the measurement device controller 215, and the amount of movement of the first drive mechanism 103 is determined based on the acquired distance.
  • the support member 102 of the application mechanism unit 101 is previously attached and fixed to the liquid material application apparatus 300 using the application mechanism unit 101, and the distance between the application target portion of the object 108 and the tip of the application needle is set.
  • the distance from the reference plane of the measuring apparatus for example, the plane orthogonal to the Z axis and passing through points A and B) to the point P when the optimum distance is set is obtained from the measuring apparatus controller 215, and as shown in FIG. far.
  • the first drive mechanism 103 and the second drive mechanism 104 are controlled, and the amount of movement of the first drive mechanism 103 when the application needle 106 is moved in the + Z direction and brought into contact with the point P is determined. Let it be Z0.
  • the movement amount K (K ⁇ 0) of the second drive mechanism 104 is fixed.
  • FIG. 6 is a flowchart showing the contents of control executed by the control device that controls the coating mechanism unit 101.
  • control device 212 obtains a current distance D ⁇ b> 1 from measurement device controller 215 to point P immediately before the application operation.
  • the distance D1 changes as shown in D1 (+) when the application target portion of the object 108 is shifted in the + direction of the Z axis as shown in FIG. Changes as indicated by D1 ( ⁇ ) when is shifted in the negative direction of the Z-axis.
  • D1-D0 indicates the amount by which the current distance between the application target part and the application mechanism part 101 is deviated from the reference distance Z0.
  • control apparatus 212 calculates
  • Z1 D1-D0 + Z0 (1)
  • the control device 212 designates a positive movement amount + K to the second drive mechanism driver 214 and moves the second drive mechanism 104 in the + Z direction.
  • the state of the coating mechanism after the movement is shown in FIG. If a positive value is designated as the movement amount, the second drive mechanism 104 moves in the + Z direction.
  • + Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the + Z direction.
  • the state of the coating mechanism after movement is shown in FIG.
  • the application needle 106 contacts the object 108. If a positive value is specified as the movement amount, the first drive mechanism 103 moves in the + Z direction. Further, depending on the liquid material, the application needle 106 may not be in contact with the object 108. In such a case, the value of Z1 can be further reduced. Thereby, since the moving amount
  • step S4 the application needle 106 is in contact with the object 108 and waits for a predetermined time. As a result, the liquid material is filled from the tip of the application needle 106 to the surface of the object 108.
  • step S5 -Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the -Z direction.
  • step S6 the negative movement amount -K is designated to the second drive mechanism driver 214, and the second drive mechanism 104 is moved in the -Z direction.
  • the state of the coating mechanism 101 after the movement returns to the state shown in FIG.
  • step S1 As described above, a series of coating operations are completed by sequentially executing the processing from step S1 to step S6.
  • FIG. 9 is a diagram for specifically explaining the lifting operation.
  • the measurement device 111 is omitted in FIG. 9, but the projector 109 of the measurement device 111 is disposed on the front side of the container 107, and is opposite to the projector 109 with respect to the container 107.
  • the light receiver 110 of the measuring device is arranged, and the container 107 and the measuring device 111 are moved up and down integrally.
  • the coating mechanism shown in FIG. 9 includes a sub-Z stage 34 that lowers and raises the coating unit 20 in the Z-axis direction (vertical direction, the length direction of the coating needle 106), and a support base 29 attached to the drive shaft 34a. And an air cylinder 30 for moving the application needle 106 in the Z-axis direction with respect to the support base 29, and a linear motion guide member 26 for sliding the application needle 106 relative to the support base 29.
  • the sub-Z stage 34 has a drive shaft 34 a that expands and contracts in the Z-axis direction, and the tip of the drive shaft 34 a is fixed to the upper end of the support base 29.
  • the sub Z stage 34 has a function of moving the drive shaft 34a from a first coordinate in an arbitrary Z-axis direction to a second coordinate in an arbitrary Z-axis direction at a desired speed.
  • the linear motion guide member 26 corresponds to the slide mechanism 105 of FIG.
  • the air cylinder 30 corresponds to the second drive mechanism 104 for positioning the slide mechanism 105 in FIG. 2 in the Z direction.
  • the support base 29 corresponds to the support member 102 to which the second drive mechanism 104 in FIG. 2 is attached.
  • the sub Z stage 34 corresponds to the first drive mechanism 103 for positioning the support member 102 of FIG. 2 in the Z direction.
  • the substrate 35 corresponds to the target object 108, and the target area 35a corresponds to the application planned portion.
  • the coating unit 20 and the substrate 35 are moved relative to each other using the XY stage 5 and the Z stage 4 of FIG. 1, and the tip of the coating needle 106 is located above the target area 35a of the substrate 35. Place.
  • the output shaft 30a of the air cylinder 30 is moved downward (in the direction in which the output shaft 30a is pulled in), and the drive plate 31 that moves integrally with the output shaft 30a is moved.
  • the pin 31 a fixed to the tip of the drive plate 31 is in contact with a notch 25 a provided on the application needle fixing plate 25 from below, and the application needle fixing plate 25 moves along the linear motion guide member 26 as the drive plate 31 descends.
  • Move down Accordingly, the application needle 106 also moves downward, and the distal end portion 24a of the application needle 106 protrudes from the first hole 21a opened at the bottom of the container 107.
  • the ink 22 is attached to the distal end portion 24a of the application needle 106, and the application needle 106 can be applied.
  • the tip of the application needle 106 is disposed immediately above the target region 35a, and the distance between the tip of the application needle 106 and the surface of the target region 35a is set to a predetermined distance. That is, the tip of the application needle 106 is arranged at a predetermined position above the target area 35a.
  • the entire coating unit 20 is lowered at a predetermined speed using the sub Z stage 34, and the tip of the coating needle 106 to which the ink 22 has adhered contacts the target area 35 a of the substrate 35.
  • the ink 22 of the application needle tip 24a is applied to the target area 35a, and the ink layer 22a is formed.
  • the output shaft 30a of the air cylinder 30 is moved upward (in the direction in which the output shaft 30a protrudes).
  • the tip 24a of the application needle 106 is returned to the state immersed in the ink 22 of the container 107, and the drive shaft 34a of the sub-Z stage 34 is moved upward to move the entire application unit 20 upward.
  • the coating operation is completed.
  • liquid material application apparatus 300 includes application needle 106, drive apparatus 120, measurement apparatus 111, and control apparatus 212.
  • the application needle 106 applies a liquid material to the tip 108 by applying it to the tip.
  • the driving device 120 moves the application needle 106 relative to the object 108 in the vertical direction (Z-axis direction) along the application needle 106.
  • the measuring device 111 is configured so that the application portion of the object 108 is positioned so that the planned application portion of the object 108 is positioned below the application needle 106. Detect relative distance.
  • the control device 212 obtains the movement distance of the application needle 106 based on the relative distance detected by the measuring device 111, moves the application needle 106 by the movement distance and brings the tip into contact with the object 108, and then applies the application needle.
  • the driving device 120 is controlled so as to move the tip 106 and detach the tip from the object 108.
  • the measuring device 111 includes a projector 109 that emits the laser light L and a light receiver 110 that receives the reflected light R of the laser light reflected by the surface of the object 108.
  • the application needle 106, the light projecting axis of the light projector 109, and the light receiving axis of the light receiver 110 are arranged on the same plane. As shown in FIG. 2, the application needle 106 is disposed between the light projector 109 and the light receiver 110 on the plane.
  • the application scheduled portion is a contact point P on the surface of the object 108 where the tip of the application needle 106 contacts the object 108.
  • the spot of the laser light L emitted from the projector 109 is adjusted so as to substantially coincide with the contact point P.
  • the driving device 120 includes a first driving mechanism 103 that moves the application needle 106 in the vertical direction, and a support member to which the first driving mechanism 103 and the measuring device 111 are fixed. And a second drive mechanism 104 that moves the sensor vertically.
  • the movement distance of the application needle 106 is the sum of the first movement distance of the application needle 106 by the first drive mechanism 103 and the second movement distance of the support member by the second drive mechanism 104.
  • the control device 212 sets the first movement distance to a fixed length K (K ⁇ 0) and changes the second movement distance Z1 based on the relative distance.
  • the measuring device 111 is fixed to the support member 102, irradiates the application target portion with the laser light L, and acquires the relative distance based on the reflected light R.
  • the tip of the needle can be positioned with high accuracy with respect to the object to be coated. Further, as described with reference to FIGS. 2 and 4, since the needle contact position and the laser beam spot are substantially matched, the focusing operation as in Patent Document 1 is unnecessary, and the operation time of the coating mechanism is shortened. can do.

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  • Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)

Abstract

L'invention concerne un dispositif de recouvrement avec un matériau liquide (300) comprenant un dispositif d'entraînement (120), un dispositif de mesure (111) et un dispositif de commande (212). Le dispositif d'entraînement (120) amène une aiguille de recouvrement (106) à se déplacer dans la direction verticale par rapport à un objet (108). Le dispositif de mesure (111) détecte la distance relative entre une partie devant être recouverte de l'objet (108) et une section de pointe (24a) dans un état dans lequel l'objet (108) est positionné de telle sorte que la partie devant être recouverte est placée sous l'aiguille de recouvrement (106). Le dispositif de commande (212) détermine la distance de déplacement de l'aiguille de recouvrement (106) sur la base de la distance relative détectée par le dispositif de mesure (111), déplace l'aiguille de recouvrement (106) selon la distance de déplacement, amène la section de pointe en contact avec l'objet (108) et commande le dispositif d'entraînement (120) de telle sorte que la section de pointe de l'aiguille de recouvrement (106) est séparée de l'objet (108). Une telle configuration permet d'obtenir un dispositif de recouvrement avec un matériau liquide susceptible de positionner avec une grande précision la relation de position de l'axe Z entre une section de recouvrement avec de l'encre et la surface d'un objet devant être recouverte.
PCT/JP2016/067189 2015-06-18 2016-06-09 Dispositif de recouvrement avec un matériau liquide WO2016204061A1 (fr)

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JP2015122792A JP6599655B2 (ja) 2015-06-18 2015-06-18 液状材料塗布装置
JP2015-122792 2015-06-18

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003279721A (ja) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd カラーフィルタの欠陥修正方法およびカラーフィルタの欠陥修正用装置
JP2004281328A (ja) * 2003-03-18 2004-10-07 Dainippon Printing Co Ltd 有機ｅｌパネル用電極の欠陥修正方法および欠陥修正装置
JP2007268354A (ja) * 2006-03-30 2007-10-18 Ntn Corp パターン修正装置およびその塗布ユニット
JP2010194490A (ja) * 2009-02-26 2010-09-09 Micronics Japan Co Ltd 塗布装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003279721A (ja) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd カラーフィルタの欠陥修正方法およびカラーフィルタの欠陥修正用装置
JP2004281328A (ja) * 2003-03-18 2004-10-07 Dainippon Printing Co Ltd 有機ｅｌパネル用電極の欠陥修正方法および欠陥修正装置
JP2007268354A (ja) * 2006-03-30 2007-10-18 Ntn Corp パターン修正装置およびその塗布ユニット
JP2010194490A (ja) * 2009-02-26 2010-09-09 Micronics Japan Co Ltd 塗布装置

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JP2017009692A (ja) 2017-01-12
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