WO2016204061A1 - Liquid material coating device - Google Patents

Liquid material coating device Download PDF

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Publication number
WO2016204061A1
WO2016204061A1 PCT/JP2016/067189 JP2016067189W WO2016204061A1 WO 2016204061 A1 WO2016204061 A1 WO 2016204061A1 JP 2016067189 W JP2016067189 W JP 2016067189W WO 2016204061 A1 WO2016204061 A1 WO 2016204061A1
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WIPO (PCT)
Prior art keywords
application
needle
liquid material
application needle
light
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Application number
PCT/JP2016/067189
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French (fr)
Japanese (ja)
Inventor
博明 大庭
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Ntn株式会社
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Publication of WO2016204061A1 publication Critical patent/WO2016204061A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/06—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length by rubbing contact, e.g. by brushes, by pads
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

Definitions

  • the present invention relates to a liquid material coating apparatus, and more particularly to a liquid material coating apparatus that can be used for forming fine patterns such as semiconductors, electronic circuits, and flat panel displays.
  • a technique that has been conventionally used for correction work of a flat panel display, scribing work of a solar cell, and the like for example, JP 2007-233299 A, JP 2009-122259 A, JP 2012-6077 A). (See Patent Documents 1 to 3).
  • the technique using an application needle can be applied even with high-viscosity ink, which is not good for an ink jet dispenser, and has recently been used to form a thick film of 10 ⁇ m or thicker than a flat panel display pattern.
  • This technology is used, for example, for forming electronic circuit patterns and printed circuit board wiring of semiconductor devices such as MEMS (Micro Electro Mechanical Systems) and sensors. Patterns produced by printed electronics technology, which is a promising manufacturing technology in the future, are also classified as thick films. Therefore, the technique of applying a liquid material using an application needle is a processing technique that is expected to be used in the future.
  • FIG. 10 is an external view showing the configuration of the color filter defect correcting apparatus disclosed in Japanese Patent Laid-Open No. 2007-233299.
  • this color filter defect correcting apparatus includes a host computer 1, a control computer 2, an image processing unit 3, a Z-axis stage 4, an XY stage 5, a chuck base 6, and a cutting device.
  • a laser irradiation unit 7, a variable slit unit 8, an ink application unit 9, a monitor 10, and an objective lens 21 are provided.
  • the cutting laser irradiation unit 7, the variable slit unit 8, and the ink application unit 9 constitute a correction processing unit 50.
  • the Z axis stage 4 and the XY stage 5 constitute a positioning mechanism 51.
  • the operator confirms the defect displayed on the monitor of the host computer 1 and instructs the ink application position.
  • the image on the monitor is enlarged and displayed by the objective lens 21, and the application position on the XY plane is designated by clicking a point on the monitor with a mouse or the like.
  • the host computer 1 converts the clicked position into the coordinate value P of the XY stage 5 and stores it inside.
  • the operator moves the Z-axis stage 4 by manual operation to adjust the focus, or moves the Z-axis stage 4 by automatic focusing by the image processing unit 3. match the focal point.
  • the relative positional relationship in the Z-axis direction between the ink application unit 9 and the surface of the application target is set to an appropriate positional relationship.
  • the operator instructs the host computer 1 to perform a coating operation.
  • the host computer 1 calculates the coordinate P ′ by adding the relative coordinate value of the ink application unit 9 to the objective lens 21 to the stored coordinate value P.
  • the host computer 1 moves the XY stage 5 based on the coordinates P ′, controls the ink application unit 9 to apply ink, and then moves the XY stage 5 to the original position. Finally, the operator confirms the state of the ink displayed on the monitor of the host computer 1.
  • the ink application unit 9 is attached at a position offset in the horizontal direction with respect to the objective lens 21, the object to be applied is the objective lens during alignment in the Z-axis direction. It is necessary to move below the ink application part 9 at the time of application.
  • FIG. 11 is a schematic diagram for explaining the surface shape of an object to be coated, which is a problem in the conventional apparatus.
  • movement cannot be performed with respect to the application
  • the reason is that the lowering amount of the application needle of the ink application unit 9 is set to a predetermined value, and is the same height for one alignment operation in the Z-axis direction for focusing under the objective lens. This is because the coating can be performed only on the flat surface.
  • the present invention has been made to solve such a problem, and an object of the present invention is to have means for accurately measuring the relative distance between the ink application part and the application target part of the application object.
  • An object of the present invention is to provide a liquid material coating apparatus capable of positioning the positional relationship in the Z-axis direction between the coating section and the surface of the coating target portion of the coating target object with high accuracy.
  • the present invention is a liquid material application device, an application needle for applying a liquid material to a tip and applying it to an object, and an application needle in the vertical direction along the application needle with respect to the object.
  • the measuring apparatus includes a projector that emits laser light and a light receiver that receives the reflected light of the laser light reflected by the surface of the object.
  • the application needle, the light projecting axis of the light projector, and the light receiving axis of the light receiver are arranged on the same plane.
  • the application needle is disposed between the light projector and the light receiver on the plane.
  • the application portion is a contact point on the surface of the object where the tip of the application needle contacts the object.
  • the spot of the laser beam emitted from the projector is adjusted so as to substantially coincide with the contact point.
  • the drive device includes a first drive mechanism that moves the application needle in the vertical direction and a second drive mechanism that moves the support member to which the first drive mechanism and the measurement device are fixed in the vertical direction.
  • the movement distance is the sum of the first movement distance of the application needle by the first drive mechanism and the second movement distance of the support member by the second drive mechanism.
  • the control device sets the first movement distance as a fixed length and changes the second movement distance based on the relative distance.
  • the measuring device is fixed to the support member, irradiates the portion to be coated with laser light, and acquires the relative distance based on the reflected light.
  • the relative position of the tip of the application needle and the application target portion of the object can be positioned with high accuracy.
  • the needle contact position and the laser beam spot are substantially coincident with each other, it is not necessary to perform the focusing operation even on surfaces with different heights, and the operating time of the driving mechanism of the coating apparatus can be shortened. Can do.
  • FIG. It is a figure which shows the structure of the liquid material coating device which concerns on this Embodiment. It is a figure which shows the detailed structure of the application
  • FIG. It is a figure showing signs that the locus of reflected light R changes on a plane including laser light L and reflected light R in order to explain the principle of detecting the distance in the Z direction. It is a figure which shows the structure of the control block of a liquid material coating device.
  • FIG. 5 is a flowchart showing control contents executed by a control device that controls the application mechanism unit 101; It is a 1st figure for demonstrating the raising / lowering operation
  • 1 is an external view showing a configuration of a color filter defect correcting device disclosed in Japanese Patent Application Laid-Open No. 2007-233299. It is a schematic diagram for demonstrating the surface shape of the coating target object which becomes a problem in the conventional apparatus.
  • FIG. 1 is a diagram showing a configuration of a liquid material coating apparatus according to the present embodiment.
  • the present embodiment is characterized in that the ink application unit 9 in FIG. 10 is replaced with an application mechanism unit 101 shown in FIG.
  • a liquid material coating apparatus 300 includes a monitor 10 that displays an image observed by an observation optical system that observes the surface of an object to be coated with ink (such as a circuit board), and an observation.
  • a laser irradiation unit for cutting 7 that irradiates an object with laser light through an optical system to cut unnecessary portions; and an application mechanism unit 101 that applies ink to a target region of an object by attaching ink to the tip of an application needle;
  • the image processing unit 3 for recognizing the target area, the host computer 1 for controlling the entire apparatus, and the control computer 2 for controlling the operation of the coating mechanism unit 101 are included.
  • the liquid material coating apparatus 300 further includes an XY stage 5 that moves an object having a target area in the XY direction (horizontal direction), a chuck base 6 that holds the object on the XY stage 5, and an observation optical system. And a Z stage 4 that moves the coating mechanism 101 in the Z direction (vertical direction).
  • the XY stage 5 is used to relatively move an object to an appropriate position when applying ink to the object area by the application mechanism 101 or observing the surface of the object by an observation optical system.
  • the XY stage 5 has a configuration in which two uniaxial stages are stacked in a perpendicular direction.
  • the XY stage 5 is not limited as long as it can move the object relative to the observation optical system and the coating mechanism unit 101, and is limited to the configuration of the XY stage 5 shown in FIG. is not.
  • a gantry-type XY stage that can move independently in the X-axis direction and the Y-axis direction may be used.
  • FIG. 2 is a diagram showing a detailed configuration of the coating mechanism unit 101 of the liquid material coating apparatus according to the present embodiment.
  • an application mechanism unit 101 is provided with a container 107 into which a liquid material is injected, an application needle 106 for applying the liquid material to a tip portion and applying it to an object, and an application needle 106.
  • a slide mechanism 105 for sliding the application needle 106 in the Z direction, a second drive mechanism 104 for attaching the slide mechanism 105 and positioning the slide mechanism 105 in the Z direction, and a second drive mechanism 104 are attached.
  • a first drive mechanism 103 for positioning the support member 102 in the Z direction.
  • FIG. 3 is an enlarged view of the application needle 106 and the container 107.
  • FIG. 3 shows the dimensional relationship between the first hole 21 a opened in the bottom of the container 107, the second hole 23 a opened in the lid 23, and the application needle 106.
  • the diameter of the first hole 21a is Dd
  • the diameter of the second hole 23a is Du
  • the diameter of the application needle 106 is D
  • Dd and Du are larger than D and Dd> Du> D.
  • This relational expression is valid when the application needle 106 is not a step but a straight type.
  • half of the difference (one-side gap) between the diameter Dd of the first hole 21a and the diameter D of the application needle 106 is ⁇ d
  • half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 106 is ⁇ d
  • half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 106 is ⁇ u
  • ⁇ d> ⁇ u there is a relationship of ⁇ d> ⁇ u, and the first hole opened at the bottom of the container 107 rather than the gap between the second hole 23a opened at the lid 23 and the application needle 106.
  • the gap between 21a and application needle 106 is set larger.
  • the posture of the container 107 can be maintained by the second hole 23a and the application needle 106, and even if the application needle 106 is in contact with the inner surface of the second hole 23a, the application needle 106 is Since it does not contact the inner surface of the first hole 21a, deformation due to wear of the first hole 21a can be suppressed. Accordingly, since the amount of the ink 22 adhering to the tip end portion 24a of the application needle 106 does not change, stable application is possible.
  • the coating mechanism unit 101 further includes a measuring device 111 that detects the relative distance between the coating mechanism unit 101 and the object 108.
  • the measuring device 111 includes a projector 109 and a light receiver 110.
  • a light projector 109 and a light receiver 110 are attached to the support member 102.
  • This measuring device 111 is for detecting the distance in the Z direction between the vicinity including the contact point P on the object 108 (scheduled application portion) and the measuring device 111 based on the known triangulation principle. It is.
  • the light projector 109 is fixed on the support member 102 so that the spot of the laser light L emitted from the point A substantially coincides with the point P.
  • the light receiver 110 is fixed on the support member 102 so that the optical axes of the laser light L and the reflected light R are symmetric with respect to the Z direction. Thereby, the reflected light R at the point P of the laser light L is incident on the point B of the light receiver 110.
  • FIG. 4 is a diagram showing how the locus of the reflected light R changes on the plane including the laser light L and the reflected light R in order to explain the principle of detecting the distance in the Z direction.
  • a semiconductor laser emitter is disposed at point A
  • a linear image sensor is disposed at point P.
  • the Z axis coincides with the trajectory through which the application needle 106 passes.
  • a point P is a contact point of the object 108 when the application target portion of the object 108 is at an optimal position with respect to the application mechanism unit 101.
  • the correspondence between the shift amount of the light receiving position and the distance is calculated in advance and stored as a map in the measuring device controller 215 in FIG. 5, and the distance is referred to the map from the shift amount of the light receiving position at the time of measurement. You may ask for it.
  • the light receiving surface of the light receiver is set to the same height as the point A, the angle of the triangle ⁇ BAP and ⁇ ABP formed by the three points A, B, and P is fixed. Based on the position (the length of the side AB), the distance (the height of the triangle PAB) may be calculated by the measuring device controller 215 in FIG.
  • FIG. 5 is a diagram showing the configuration of the control block of the liquid material coating apparatus. Referring to FIG. 5, in order to control the first drive mechanism 103, the second drive mechanism 104, and the measurement device 111, the first drive mechanism driver 213, the second drive mechanism driver 214, and the measurement device Controller 215 and controller 212 are provided.
  • the first drive mechanism 103 operates based on an electrical command from the first drive mechanism driver 213.
  • the second drive mechanism 104 operates based on an electrical command from the second drive mechanism driver 214.
  • the measurement device controller 215 measures the distance by controlling the irradiation of the laser light L of the projector 109 and analyzing the reflected light R incident on the light receiver 110.
  • the control device 212 outputs a command to the first drive mechanism driver 213 and the second drive mechanism driver 214 to control the coating operation.
  • the distance is acquired from the measurement device controller 215, and the amount of movement of the first drive mechanism 103 is determined based on the acquired distance.
  • the support member 102 of the application mechanism unit 101 is previously attached and fixed to the liquid material application apparatus 300 using the application mechanism unit 101, and the distance between the application target portion of the object 108 and the tip of the application needle is set.
  • the distance from the reference plane of the measuring apparatus for example, the plane orthogonal to the Z axis and passing through points A and B) to the point P when the optimum distance is set is obtained from the measuring apparatus controller 215, and as shown in FIG. far.
  • the first drive mechanism 103 and the second drive mechanism 104 are controlled, and the amount of movement of the first drive mechanism 103 when the application needle 106 is moved in the + Z direction and brought into contact with the point P is determined. Let it be Z0.
  • the movement amount K (K ⁇ 0) of the second drive mechanism 104 is fixed.
  • FIG. 6 is a flowchart showing the contents of control executed by the control device that controls the coating mechanism unit 101.
  • control device 212 obtains a current distance D ⁇ b> 1 from measurement device controller 215 to point P immediately before the application operation.
  • the distance D1 changes as shown in D1 (+) when the application target portion of the object 108 is shifted in the + direction of the Z axis as shown in FIG. Changes as indicated by D1 ( ⁇ ) when is shifted in the negative direction of the Z-axis.
  • D1-D0 indicates the amount by which the current distance between the application target part and the application mechanism part 101 is deviated from the reference distance Z0.
  • control apparatus 212 calculates
  • Z1 D1-D0 + Z0 (1)
  • the control device 212 designates a positive movement amount + K to the second drive mechanism driver 214 and moves the second drive mechanism 104 in the + Z direction.
  • the state of the coating mechanism after the movement is shown in FIG. If a positive value is designated as the movement amount, the second drive mechanism 104 moves in the + Z direction.
  • + Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the + Z direction.
  • the state of the coating mechanism after movement is shown in FIG.
  • the application needle 106 contacts the object 108. If a positive value is specified as the movement amount, the first drive mechanism 103 moves in the + Z direction. Further, depending on the liquid material, the application needle 106 may not be in contact with the object 108. In such a case, the value of Z1 can be further reduced. Thereby, since the moving amount
  • step S4 the application needle 106 is in contact with the object 108 and waits for a predetermined time. As a result, the liquid material is filled from the tip of the application needle 106 to the surface of the object 108.
  • step S5 -Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the -Z direction.
  • step S6 the negative movement amount -K is designated to the second drive mechanism driver 214, and the second drive mechanism 104 is moved in the -Z direction.
  • the state of the coating mechanism 101 after the movement returns to the state shown in FIG.
  • step S1 As described above, a series of coating operations are completed by sequentially executing the processing from step S1 to step S6.
  • FIG. 9 is a diagram for specifically explaining the lifting operation.
  • the measurement device 111 is omitted in FIG. 9, but the projector 109 of the measurement device 111 is disposed on the front side of the container 107, and is opposite to the projector 109 with respect to the container 107.
  • the light receiver 110 of the measuring device is arranged, and the container 107 and the measuring device 111 are moved up and down integrally.
  • the coating mechanism shown in FIG. 9 includes a sub-Z stage 34 that lowers and raises the coating unit 20 in the Z-axis direction (vertical direction, the length direction of the coating needle 106), and a support base 29 attached to the drive shaft 34a. And an air cylinder 30 for moving the application needle 106 in the Z-axis direction with respect to the support base 29, and a linear motion guide member 26 for sliding the application needle 106 relative to the support base 29.
  • the sub-Z stage 34 has a drive shaft 34 a that expands and contracts in the Z-axis direction, and the tip of the drive shaft 34 a is fixed to the upper end of the support base 29.
  • the sub Z stage 34 has a function of moving the drive shaft 34a from a first coordinate in an arbitrary Z-axis direction to a second coordinate in an arbitrary Z-axis direction at a desired speed.
  • the linear motion guide member 26 corresponds to the slide mechanism 105 of FIG.
  • the air cylinder 30 corresponds to the second drive mechanism 104 for positioning the slide mechanism 105 in FIG. 2 in the Z direction.
  • the support base 29 corresponds to the support member 102 to which the second drive mechanism 104 in FIG. 2 is attached.
  • the sub Z stage 34 corresponds to the first drive mechanism 103 for positioning the support member 102 of FIG. 2 in the Z direction.
  • the substrate 35 corresponds to the target object 108, and the target area 35a corresponds to the application planned portion.
  • the coating unit 20 and the substrate 35 are moved relative to each other using the XY stage 5 and the Z stage 4 of FIG. 1, and the tip of the coating needle 106 is located above the target area 35a of the substrate 35. Place.
  • the output shaft 30a of the air cylinder 30 is moved downward (in the direction in which the output shaft 30a is pulled in), and the drive plate 31 that moves integrally with the output shaft 30a is moved.
  • the pin 31 a fixed to the tip of the drive plate 31 is in contact with a notch 25 a provided on the application needle fixing plate 25 from below, and the application needle fixing plate 25 moves along the linear motion guide member 26 as the drive plate 31 descends.
  • Move down Accordingly, the application needle 106 also moves downward, and the distal end portion 24a of the application needle 106 protrudes from the first hole 21a opened at the bottom of the container 107.
  • the ink 22 is attached to the distal end portion 24a of the application needle 106, and the application needle 106 can be applied.
  • the tip of the application needle 106 is disposed immediately above the target region 35a, and the distance between the tip of the application needle 106 and the surface of the target region 35a is set to a predetermined distance. That is, the tip of the application needle 106 is arranged at a predetermined position above the target area 35a.
  • the entire coating unit 20 is lowered at a predetermined speed using the sub Z stage 34, and the tip of the coating needle 106 to which the ink 22 has adhered contacts the target area 35 a of the substrate 35.
  • the ink 22 of the application needle tip 24a is applied to the target area 35a, and the ink layer 22a is formed.
  • the output shaft 30a of the air cylinder 30 is moved upward (in the direction in which the output shaft 30a protrudes).
  • the tip 24a of the application needle 106 is returned to the state immersed in the ink 22 of the container 107, and the drive shaft 34a of the sub-Z stage 34 is moved upward to move the entire application unit 20 upward.
  • the coating operation is completed.
  • liquid material application apparatus 300 includes application needle 106, drive apparatus 120, measurement apparatus 111, and control apparatus 212.
  • the application needle 106 applies a liquid material to the tip 108 by applying it to the tip.
  • the driving device 120 moves the application needle 106 relative to the object 108 in the vertical direction (Z-axis direction) along the application needle 106.
  • the measuring device 111 is configured so that the application portion of the object 108 is positioned so that the planned application portion of the object 108 is positioned below the application needle 106. Detect relative distance.
  • the control device 212 obtains the movement distance of the application needle 106 based on the relative distance detected by the measuring device 111, moves the application needle 106 by the movement distance and brings the tip into contact with the object 108, and then applies the application needle.
  • the driving device 120 is controlled so as to move the tip 106 and detach the tip from the object 108.
  • the measuring device 111 includes a projector 109 that emits the laser light L and a light receiver 110 that receives the reflected light R of the laser light reflected by the surface of the object 108.
  • the application needle 106, the light projecting axis of the light projector 109, and the light receiving axis of the light receiver 110 are arranged on the same plane. As shown in FIG. 2, the application needle 106 is disposed between the light projector 109 and the light receiver 110 on the plane.
  • the application scheduled portion is a contact point P on the surface of the object 108 where the tip of the application needle 106 contacts the object 108.
  • the spot of the laser light L emitted from the projector 109 is adjusted so as to substantially coincide with the contact point P.
  • the driving device 120 includes a first driving mechanism 103 that moves the application needle 106 in the vertical direction, and a support member to which the first driving mechanism 103 and the measuring device 111 are fixed. And a second drive mechanism 104 that moves the sensor vertically.
  • the movement distance of the application needle 106 is the sum of the first movement distance of the application needle 106 by the first drive mechanism 103 and the second movement distance of the support member by the second drive mechanism 104.
  • the control device 212 sets the first movement distance to a fixed length K (K ⁇ 0) and changes the second movement distance Z1 based on the relative distance.
  • the measuring device 111 is fixed to the support member 102, irradiates the application target portion with the laser light L, and acquires the relative distance based on the reflected light R.
  • the tip of the needle can be positioned with high accuracy with respect to the object to be coated. Further, as described with reference to FIGS. 2 and 4, since the needle contact position and the laser beam spot are substantially matched, the focusing operation as in Patent Document 1 is unnecessary, and the operation time of the coating mechanism is shortened. can do.

Abstract

Provided is a liquid material coating device (300) comprising a drive device (120), a measurement device (111), and a control device (212). The drive device (120) causes a coating needle (106) to move in the vertical direction with respect to an object (108). The measurement device (111) detects the relative distance between a part to be coated of the object (108) and a tip section (24a) while in a state in which the object (108) is positioned so that the part to be coated is positioned below the coating needle (106). The control device (212) determines the movement distance of the coating needle (106) on the basis of the relative distance detected by the measurement device (111), moves the coating needle (106) by the movement distance, brings the tip section into contact with the object (108), and subsequently controls the drive device (120) so that the tip section of the coating needle (106) is separated from the object (108). Configuring in this manner provides a liquid material coating device capable of positioning the Z-axis positional relationship between an ink coating section and the surface of an object to be coated with high precision.

Description

液状材料塗布装置Liquid material applicator
　この発明は、液状材料塗布装置に関し、特に、半導体や電子回路、フラットパネルディスプレイなどの微細パターンの形成に用いることが可能な液状材料塗布装置に関する。 The present invention relates to a liquid material coating apparatus, and more particularly to a liquid material coating apparatus that can be used for forming fine patterns such as semiconductors, electronic circuits, and flat panel displays.
　先端径が数十μｍの塗布針を用いてインクのような液状材料を塗布する技術や、スポット径が数μｍ～数十μｍのレーザ光を用いてパターンを加工する技術を、マイクロメートル精度の精密位置決め技術と組み合わせると、微細なパターンを作成したり、パターンの所定の位置を正確に加工することが可能となる。このような技術は、フラットパネルディスプレイの修正作業や太陽電池のスクライブ作業などに従来から利用されている（たとえば、特開２００７－２３３２９９号公報、特開２００９－１２２２５９号公報、特開２０１２－６０７７号公報（特許文献１～３）参照）。 A technology that applies a liquid material such as ink using a coating needle with a tip diameter of several tens of μm, and a technology that processes a pattern using laser light with a spot diameter of several μm to several tens of μm. When combined with precision positioning technology, it is possible to create a fine pattern and accurately process a predetermined position of the pattern. Such a technique has been conventionally used for correction work of a flat panel display, scribing work of a solar cell, and the like (for example, JP 2007-233299 A, JP 2009-122259 A, JP 2012-6077 A). (See Patent Documents 1 to 3).
　特に塗布針を用いる技術は、インクジェット式のディスペンサが不得意とする粘度の高いインクでも塗布できるので、最近では、フラットパネルディプレイのパターンなどよりも厚い１０μｍ以上の厚膜の形成にも利用されている。この技術は、たとえば、ＭＥＭＳ（Micro　Electro　Mechanical　Systems）やセンサなどの半導体デバイスの電子回路パターンやプリント基板配線の形成に用いられる。また、将来的に有望な製造技術であるプリンテッドエレクトロニクス技術で作製されるパターンも厚膜に分類される。したがって、塗布針を用いて液状材料を塗布する技術は、今後の用途拡大が期待される加工技術である。 In particular, the technique using an application needle can be applied even with high-viscosity ink, which is not good for an ink jet dispenser, and has recently been used to form a thick film of 10 μm or thicker than a flat panel display pattern. Yes. This technology is used, for example, for forming electronic circuit patterns and printed circuit board wiring of semiconductor devices such as MEMS (Micro Electro Mechanical Systems) and sensors. Patterns produced by printed electronics technology, which is a promising manufacturing technology in the future, are also classified as thick films. Therefore, the technique of applying a liquid material using an application needle is a processing technique that is expected to be used in the future.
特開２００７－２３３２９９号公報JP 2007-233299 A 特開２００９－１２２２５９号公報JP 2009-122259 A 特開２０１２－６０７７号公報JP 2012-6077 A
　本発明が解決しようとする課題について、特開２００７－２３３２９９号公報（特許文献１）の図を用いて説明する。図１０は、特開２００７－２３３２９９号公報に開示されたカラーフィルタ欠陥修正装置の構成を示す外観図である。図１０を参照して、このカラーフィルタ欠陥修正装置は、ホストコンピュータ１と、制御用コンピュータ２と、画像処理部３と、Ｚ軸ステージ４と、ＸＹステージ５と、チャック台６と、カット用レーザ照射部７と、可変スリット部８と、インク塗布部９と、モニタ１０と、対物レンズ２１とを備える。カット用レーザ照射部７と、可変スリット部８と、インク塗布部９とは、修正処理部５０を構成する。Ｚ軸ステージ４と、ＸＹステージ５とは、位置決め機構５１を構成する。 The problem to be solved by the present invention will be described with reference to the figure of JP 2007-233299 A (Patent Document 1). FIG. 10 is an external view showing the configuration of the color filter defect correcting apparatus disclosed in Japanese Patent Laid-Open No. 2007-233299. Referring to FIG. 10, this color filter defect correcting apparatus includes a host computer 1, a control computer 2, an image processing unit 3, a Z-axis stage 4, an XY stage 5, a chuck base 6, and a cutting device. A laser irradiation unit 7, a variable slit unit 8, an ink application unit 9, a monitor 10, and an objective lens 21 are provided. The cutting laser irradiation unit 7, the variable slit unit 8, and the ink application unit 9 constitute a correction processing unit 50. The Z axis stage 4 and the XY stage 5 constitute a positioning mechanism 51.
　次に、インクの塗布手順について説明する。作業者は、ホストコンピュータ１のモニタに表示された欠陥を確認し、インクの塗布位置を指示する。モニタ上の画像は対物レンズ２１により拡大表示されており、マウスなどでモニタ上の点をクリックすることによりＸＹ平面における塗布位置を指定する。この際、ホストコンピュータ１は、クリックされた位置をＸＹステージ５の座標値Ｐに変換して内部に記憶する。 Next, the ink application procedure will be described. The operator confirms the defect displayed on the monitor of the host computer 1 and instructs the ink application position. The image on the monitor is enlarged and displayed by the objective lens 21, and the application position on the XY plane is designated by clicking a point on the monitor with a mouse or the like. At this time, the host computer 1 converts the clicked position into the coordinate value P of the XY stage 5 and stores it inside.
　このときに画像の焦点が合っていない場合は、作業者は、マニュアル操作によってＺ軸ステージ４を移動させて焦点を合わせるか、画像処理部３による自動焦点合わせによってＺ軸ステージ４を移動させて焦点を合わせる。この動作によって、インク塗布部９と塗布対象物の表面とのＺ軸方向の相対位置関係が適切な位置関係に設定される。この後、作業者はホストコンピュータ１に塗布動作を指示する。 If the image is out of focus at this time, the operator moves the Z-axis stage 4 by manual operation to adjust the focus, or moves the Z-axis stage 4 by automatic focusing by the image processing unit 3. match the focal point. By this operation, the relative positional relationship in the Z-axis direction between the ink application unit 9 and the surface of the application target is set to an appropriate positional relationship. Thereafter, the operator instructs the host computer 1 to perform a coating operation.
　インクの塗布動作が指示されると、ホストコンピュータ１は、記憶しておいた座標値Ｐにインク塗布部９の対物レンズ２１に対する相対座標値を加えて座標Ｐ’を算出する。ホストコンピュータ１は、座標Ｐ’に基づいてＸＹステージ５を移動させインク塗布部９を制御してインクを塗布した後、ＸＹステージ５を元の位置に移動させる。最後に、作業者は、ホストコンピュータ１のモニタに表示されたインクの状態を確認する。 When the ink application operation is instructed, the host computer 1 calculates the coordinate P ′ by adding the relative coordinate value of the ink application unit 9 to the objective lens 21 to the stored coordinate value P. The host computer 1 moves the XY stage 5 based on the coordinates P ′, controls the ink application unit 9 to apply ink, and then moves the XY stage 5 to the original position. Finally, the operator confirms the state of the ink displayed on the monitor of the host computer 1.
　以上のように、特許文献１の構成では、インク塗布部９が対物レンズ２１に対して水平方向にオフセットした位置に取り付けられているので、塗布対象物は、Ｚ軸方向の位置合わせ時に対物レンズの下に移動し、塗布時にはインク塗布部９の下に移動する必要がある。 As described above, in the configuration of Patent Document 1, since the ink application unit 9 is attached at a position offset in the horizontal direction with respect to the objective lens 21, the object to be applied is the objective lens during alignment in the Z-axis direction. It is necessary to move below the ink application part 9 at the time of application.
　図１１は、従来の装置において問題となる塗布対象物の表面形状を説明するための模式図である。図１１（ａ）のように表面に段差があったり、図１１（ｂ）のように表面が傾斜している塗布対象物に対しては、連続した塗布動作はできない。その理由は、インク塗布部９の塗布針の下降量は予め定められた値に設定されており、対物レンズの下で焦点を合わせるＺ軸方向の位置合わせ操作１回に対して、同一高さの平面にしか塗布を行なうことができないからである。 FIG. 11 is a schematic diagram for explaining the surface shape of an object to be coated, which is a problem in the conventional apparatus. A continuous application | coating operation | movement cannot be performed with respect to the application | coating target object which has a level | step difference on the surface like Fig.11 (a), or the surface inclined like FIG.11 (b). The reason is that the lowering amount of the application needle of the ink application unit 9 is set to a predetermined value, and is the same height for one alignment operation in the Z-axis direction for focusing under the objective lens. This is because the coating can be performed only on the flat surface.
　したがって、図１１に示したような形状の塗布対象物に対しては、同一高さの平面上の塗布動作が完了したら、再度対物レンズ２１で塗布対象物を確認して、次の高さの対象面に焦点を合わせることによって対象面とインク塗布部９とのＺ軸方向の位置関係を合わせてから塗布する必要がある。このため、タクトタイムの短縮が難しい。 Therefore, for a coating object having a shape as shown in FIG. 11, when the coating operation on the same height plane is completed, the object to be coated is confirmed again with the objective lens 21, and the next height is applied. It is necessary to apply after adjusting the positional relationship in the Z-axis direction between the target surface and the ink application unit 9 by focusing on the target surface. For this reason, it is difficult to shorten the tact time.
　本発明は、このような課題を解決するためになされたものであって、その目的は、インク塗布部と塗布対象物の塗布予定部との相対距離を正確に測定する手段を有し、インク塗布部と塗布対象物の塗布予定部の表面とのＺ軸方向の位置関係を高精度に位置決めすることが可能な液状材料塗布装置を提供することである。 The present invention has been made to solve such a problem, and an object of the present invention is to have means for accurately measuring the relative distance between the ink application part and the application target part of the application object. An object of the present invention is to provide a liquid material coating apparatus capable of positioning the positional relationship in the Z-axis direction between the coating section and the surface of the coating target portion of the coating target object with high accuracy.
　この発明は、要約すると、液状材料塗布装置であって、液状材料を先端部に付着させて対象物に塗布するための塗布針と、塗布針に沿う上下方向に塗布針を対象物に対して相対的に移動させる駆動装置と、対象物の塗布予定部が塗布針の下に位置するように対象物が位置決めされた状態で、塗布予定部と先端部との相対距離を検出する測定装置と、測定装置によって検出された相対距離に基づいて塗布針を移動させて先端部を対象物に接触させた後、塗布針を移動させて先端部を対象物から離脱させるように駆動装置を制御する制御装置とを備える。 In summary, the present invention is a liquid material application device, an application needle for applying a liquid material to a tip and applying it to an object, and an application needle in the vertical direction along the application needle with respect to the object. A drive device for relatively moving, and a measuring device for detecting a relative distance between the planned application portion and the tip portion in a state where the target object is positioned so that the predetermined application portion of the target object is positioned below the application needle; Then, after moving the application needle based on the relative distance detected by the measuring device to bring the tip portion into contact with the object, the drive device is controlled so as to move the application needle and remove the tip portion from the object. And a control device.
　好ましくは、測定装置は、レーザ光を出射する投光器と、対象物の表面で反射されたレーザ光の反射光を受光する受光器とを含む。 Preferably, the measuring apparatus includes a projector that emits laser light and a light receiver that receives the reflected light of the laser light reflected by the surface of the object.
　より好ましくは、塗布針と、投光器の投光軸と、受光器の受光軸は同一の平面上に配置される。塗布針は、その平面上において、投光器と受光器の中間に配置される。 More preferably, the application needle, the light projecting axis of the light projector, and the light receiving axis of the light receiver are arranged on the same plane. The application needle is disposed between the light projector and the light receiver on the plane.
　さらに好ましくは、塗布予定部は、塗布針の先端部が対象物に接触する対象物の表面上の接触点である。投光器から出射されるレーザ光のスポットは、接触点に略一致するように調整されている。 More preferably, the application portion is a contact point on the surface of the object where the tip of the application needle contacts the object. The spot of the laser beam emitted from the projector is adjusted so as to substantially coincide with the contact point.
　好ましくは、駆動装置は、塗布針を上下方向に移動させる第一の駆動機構と、第一の駆動機構および測定装置が固定された支持部材を上下方向に移動させる第二の駆動機構とを含む。移動距離は、第一の駆動機構による塗布針の第１の移動距離と、第二の駆動機構による支持部材の第２の移動距離との合計である。制御装置は、第１の移動距離を固定長とし、第２の移動距離を相対距離に基づいて変化させる。 Preferably, the drive device includes a first drive mechanism that moves the application needle in the vertical direction and a second drive mechanism that moves the support member to which the first drive mechanism and the measurement device are fixed in the vertical direction. . The movement distance is the sum of the first movement distance of the application needle by the first drive mechanism and the second movement distance of the support member by the second drive mechanism. The control device sets the first movement distance as a fixed length and changes the second movement distance based on the relative distance.
　より好ましくは、測定装置は、支持部材に固定され、塗布予定部にレーザ光を照射し反射光に基づいて相対距離を取得する。 More preferably, the measuring device is fixed to the support member, irradiates the portion to be coated with laser light, and acquires the relative distance based on the reflected light.
　本発明によれば、塗布針の先端部と対象物の塗布予定部の相対位置を高精度に位置決めすることができる。さらに、針接触位置とレーザ光のスポットを略一致させる構成のため、高さが異なる面に対してもその都度の焦点合わせ動作は不要であり、塗布装置の駆動機構の動作時間を短くすることができる。 According to the present invention, the relative position of the tip of the application needle and the application target portion of the object can be positioned with high accuracy. In addition, since the needle contact position and the laser beam spot are substantially coincident with each other, it is not necessary to perform the focusing operation even on surfaces with different heights, and the operating time of the driving mechanism of the coating apparatus can be shortened. Can do.
本実施の形態に係る液状材料塗布装置の構成を示す図である。It is a figure which shows the structure of the liquid material coating device which concerns on this Embodiment. 本実施の形態に係る液状材料塗布装置の塗布機構部１０１の詳細な構成を示す図である。It is a figure which shows the detailed structure of the application | coating mechanism part 101 of the liquid material application | coating apparatus which concerns on this Embodiment. 塗布針１０６と容器１０７を拡大した図である。It is the figure which expanded the application needle | hook 106 and the container 107. FIG. Ｚ方向の距離を検出する原理を説明するためにレーザ光Ｌと反射光Ｒを含む平面上において、反射光Ｒの軌跡が変化する様子を示した図である。It is a figure showing signs that the locus of reflected light R changes on a plane including laser light L and reflected light R in order to explain the principle of detecting the distance in the Z direction. 液状材料塗布装置の制御ブロックの構成を示す図である。It is a figure which shows the structure of the control block of a liquid material coating device. 塗布機構部１０１を制御する制御装置で実行される制御内容を示すフローチャートである。5 is a flowchart showing control contents executed by a control device that controls the application mechanism unit 101; 塗布針の昇降動作を説明するための第１の図である。It is a 1st figure for demonstrating the raising / lowering operation | movement of a coating needle. 塗布針の昇降動作を説明するための第２の図である。It is a 2nd figure for demonstrating the raising / lowering operation | movement of a coating needle. 昇降動作を具体的に説明するための図である。It is a figure for demonstrating concrete raising / lowering operation | movement. 特開２００７－２３３２９９号公報に開示されたカラーフィルタ欠陥修正装置の構成を示す外観図である。1 is an external view showing a configuration of a color filter defect correcting device disclosed in Japanese Patent Application Laid-Open No. 2007-233299. 従来の装置において問題となる塗布対象物の表面形状を説明するための模式図である。It is a schematic diagram for demonstrating the surface shape of the coating target object which becomes a problem in the conventional apparatus.
　以下、図面に基づいてこの発明の実施の形態を説明する。なお、以下の図面において、同一または相当する部分には同一の参照番号を付し、その説明は繰返さない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated.
　図１は、本実施の形態に係る液状材料塗布装置の構成を示す図である。本実施の形態では、図１０のインク塗布部９を、図１に示す塗布機構部１０１で置き換えたことが特徴である。 FIG. 1 is a diagram showing a configuration of a liquid material coating apparatus according to the present embodiment. The present embodiment is characterized in that the ink application unit 9 in FIG. 10 is replaced with an application mechanism unit 101 shown in FIG.
　図１を参照して、本実施の形態に係る液状材料塗布装置３００は、インク塗布の対象物（回路基板など）の表面を観察する観察光学系で観察された画像を映し出すモニタ１０と、観察光学系を介して対象物にレーザ光を照射し不要部をカットするカット用レーザ照射部７と、インクを塗布針の先端部に付着させて対象物の対象領域に塗布する塗布機構部１０１と、対象領域を認識する画像処理部３と、装置全体を制御するホストコンピュータ１と、塗布機構部１０１の動作を制御する制御用コンピュータ２とを含む。液状材料塗布装置３００は、さらに、その他に対象領域を有する対象物をＸＹ方向（水平方向）に移動させるＸＹステージ５と、ＸＹステージ５上で対象物を保持するチャック台６と、観察光学系および塗布機構部１０１をＺ方向（垂直方向）に移動させるＺステージ４などを含む。 Referring to FIG. 1, a liquid material coating apparatus 300 according to the present embodiment includes a monitor 10 that displays an image observed by an observation optical system that observes the surface of an object to be coated with ink (such as a circuit board), and an observation. A laser irradiation unit for cutting 7 that irradiates an object with laser light through an optical system to cut unnecessary portions; and an application mechanism unit 101 that applies ink to a target region of an object by attaching ink to the tip of an application needle; The image processing unit 3 for recognizing the target area, the host computer 1 for controlling the entire apparatus, and the control computer 2 for controlling the operation of the coating mechanism unit 101 are included. The liquid material coating apparatus 300 further includes an XY stage 5 that moves an object having a target area in the XY direction (horizontal direction), a chuck base 6 that holds the object on the XY stage 5, and an observation optical system. And a Z stage 4 that moves the coating mechanism 101 in the Z direction (vertical direction).
　ＸＹステージ５は、塗布機構部１０１によってインクを対象領域に塗布する際や、観察光学系によって対象物の表面を観察する際などに、対象物を適切な位置に相対移動させるために用いられる。ＸＹステージ５は、２つの一軸ステージを直角方向に重ねた構成を有している。ただし、このＸＹステージ５は、観察光学系や塗布機構部１０１に対して対象物を相対的に移動させることができるものであればよく、図１に示すＸＹステージ５の構成に限定されるものではない。対象物のサイズが大きい場合には、Ｘ軸方向とＹ軸方向にそれぞれ独立して移動可能なガントリ型のＸＹステージを用いてもよい。 The XY stage 5 is used to relatively move an object to an appropriate position when applying ink to the object area by the application mechanism 101 or observing the surface of the object by an observation optical system. The XY stage 5 has a configuration in which two uniaxial stages are stacked in a perpendicular direction. However, the XY stage 5 is not limited as long as it can move the object relative to the observation optical system and the coating mechanism unit 101, and is limited to the configuration of the XY stage 5 shown in FIG. is not. When the size of the object is large, a gantry-type XY stage that can move independently in the X-axis direction and the Y-axis direction may be used.
　図２は、本実施の形態に係る液状材料塗布装置の塗布機構部１０１の詳細な構成を示す図である。図２を参照して、塗布機構部１０１は、液状材料が注入された容器１０７と、液状材料を先端部に付着させて対象物に塗布するための塗布針１０６と、塗布針１０６が取り付けられ塗布針１０６をＺ方向にスライドするためのスライド機構１０５と、スライド機構１０５が取り付けられスライド機構１０５をＺ方向に位置決めするための第二の駆動機構１０４と、第二の駆動機構１０４が取り付けられた支持部材１０２と、支持部材１０２をＺ方向に位置決めするための第一の駆動機構１０３とを含む。 FIG. 2 is a diagram showing a detailed configuration of the coating mechanism unit 101 of the liquid material coating apparatus according to the present embodiment. Referring to FIG. 2, an application mechanism unit 101 is provided with a container 107 into which a liquid material is injected, an application needle 106 for applying the liquid material to a tip portion and applying it to an object, and an application needle 106. A slide mechanism 105 for sliding the application needle 106 in the Z direction, a second drive mechanism 104 for attaching the slide mechanism 105 and positioning the slide mechanism 105 in the Z direction, and a second drive mechanism 104 are attached. And a first drive mechanism 103 for positioning the support member 102 in the Z direction.
　図３は、塗布針１０６と容器１０７を拡大した図である。図３には、容器１０７の底に開口された第１の孔２１ａと、その蓋２３に開口された第２の孔２３ａと、塗布針１０６との寸法関係を表したものである。第１の孔２１ａの径をＤｄとし、第２の孔２３ａの径をＤｕとし、塗布針１０６の径をＤとすると、ＤｄとＤｕはＤよりも大きく、Ｄｄ＞Ｄｕ＞Ｄの関係にある。なお、この関係式は、塗布針１０６が段付ではなく、ストレートのタイプの場合に成り立つ。 FIG. 3 is an enlarged view of the application needle 106 and the container 107. FIG. 3 shows the dimensional relationship between the first hole 21 a opened in the bottom of the container 107, the second hole 23 a opened in the lid 23, and the application needle 106. When the diameter of the first hole 21a is Dd, the diameter of the second hole 23a is Du, and the diameter of the application needle 106 is D, Dd and Du are larger than D and Dd> Du> D. . This relational expression is valid when the application needle 106 is not a step but a straight type.
　また、第１の孔２１ａの径Ｄｄと塗布針１０６の径Ｄとの差の半分（片側隙間）をΔｄとし、第２の孔２３ａの径Ｄｕと塗布針１０６の径Ｄとの差の半分（片側隙間）をΔｕとすると、Δｄ＞Δｕの関係にあり、蓋２３に開口された第２の孔２３ａと塗布針１０６との隙間よりも、容器１０７の底に開口された第１の孔２１ａと塗布針１０６との隙間の方が大きく設定されている。このため、第２の孔２３ａと塗布針１０６で容器１０７の姿勢を保つことができ、さらに、塗布針１０６が第２の孔２３ａの内面に接触した状態にあっても、塗布針１０６が第１の孔２１ａの内面に接触しないため、第１の孔２１ａの磨耗による変形を抑制できる。したがって、塗布針１０６の先端部２４ａに付着するインク２２の液量が変化しないので安定した塗布が可能となる。 Further, half of the difference (one-side gap) between the diameter Dd of the first hole 21a and the diameter D of the application needle 106 is Δd, and half of the difference between the diameter Du of the second hole 23a and the diameter D of the application needle 106. When (one-side gap) is Δu, there is a relationship of Δd> Δu, and the first hole opened at the bottom of the container 107 rather than the gap between the second hole 23a opened at the lid 23 and the application needle 106. The gap between 21a and application needle 106 is set larger. For this reason, the posture of the container 107 can be maintained by the second hole 23a and the application needle 106, and even if the application needle 106 is in contact with the inner surface of the second hole 23a, the application needle 106 is Since it does not contact the inner surface of the first hole 21a, deformation due to wear of the first hole 21a can be suppressed. Accordingly, since the amount of the ink 22 adhering to the tip end portion 24a of the application needle 106 does not change, stable application is possible.
　再び図２に戻って、塗布機構部１０１は、塗布機構部１０１と対象物１０８との相対距離を検出する測定装置１１１をさらに含む。測定装置１１１は、投光器１０９と受光器１１０とを含む。支持部材１０２には、投光器１０９と受光器１１０が取り付けられる。この測定装置１１１は、対象物１０８上の接触点Ｐを含む近傍（塗布予定部）と測定装置１１１との間のＺ方向の距離を、公知の三角測量の原理に基づいて検出するためのものである。 2 again, the coating mechanism unit 101 further includes a measuring device 111 that detects the relative distance between the coating mechanism unit 101 and the object 108. The measuring device 111 includes a projector 109 and a light receiver 110. A light projector 109 and a light receiver 110 are attached to the support member 102. This measuring device 111 is for detecting the distance in the Z direction between the vicinity including the contact point P on the object 108 (scheduled application portion) and the measuring device 111 based on the known triangulation principle. It is.
　投光器１０９は、点Ａから出射されるレーザ光Ｌのスポットが点Ｐに略一致するように支持部材１０２上に固定される。また、受光器１１０は、レーザ光Ｌと反射光Ｒの光軸がＺ方向に対して対称になるように支持部材１０２上に固定される。これにより、レーザ光Ｌの点Ｐでの反射光Ｒは受光器１１０の点Ｂに入射する。 The light projector 109 is fixed on the support member 102 so that the spot of the laser light L emitted from the point A substantially coincides with the point P. The light receiver 110 is fixed on the support member 102 so that the optical axes of the laser light L and the reflected light R are symmetric with respect to the Z direction. Thereby, the reflected light R at the point P of the laser light L is incident on the point B of the light receiver 110.
　図４は、Ｚ方向の距離を検出する原理を説明するためにレーザ光Ｌと反射光Ｒを含む平面上において、反射光Ｒの軌跡が変化する様子を示した図である。図２、図４を参照して、点Ａには半導体レーザ発光器が配置され、点Ｐにはリニアイメージセンサが配置される。Ｚ軸は、塗布針１０６が通過する軌跡と一致している。点Ｐは、対象物１０８の塗布予定部が塗布機構部１０１に対して最適な位置にあるときの対象物１０８の接触点である。 FIG. 4 is a diagram showing how the locus of the reflected light R changes on the plane including the laser light L and the reflected light R in order to explain the principle of detecting the distance in the Z direction. 2 and 4, a semiconductor laser emitter is disposed at point A, and a linear image sensor is disposed at point P. The Z axis coincides with the trajectory through which the application needle 106 passes. A point P is a contact point of the object 108 when the application target portion of the object 108 is at an optimal position with respect to the application mechanism unit 101.
　対象物１０８の塗布予定部が最適な位置からＺ＋方向に遠ざかると、レーザ光Ｌの反射位置は点Ｐから点Ｐ（＋）に変化する。すると、反射光Ｒの軌跡が平行移動し受光器における受光位置が点Ｂから点Ｂ（＋）に変化する。 When the application portion of the object 108 moves away from the optimum position in the Z + direction, the reflection position of the laser light L changes from the point P to the point P (+). Then, the locus of the reflected light R moves in parallel, and the light receiving position in the light receiver changes from the point B to the point B (+).
　逆に、対象物１０８の塗布予定部が最適な位置からＺ－方向に遠ざかると、レーザ光Ｌの反射位置は点Ｐから点Ｐ（－）に変化する。すると、反射光Ｒの軌跡が平行移動し受光器における受光位置が点Ｂから点Ｂ（－）に変化する。 Conversely, when the application portion of the object 108 moves away from the optimum position in the Z-direction, the reflection position of the laser light L changes from the point P to the point P (-). Then, the locus of the reflected light R moves in parallel, and the light receiving position in the light receiver changes from the point B to the point B (−).
　このように、受光器における受光位置と塗布機構部１０１から対象物の塗布予定部までの距離との間には相関関係がある。したがって、たとえば、受光位置のずれ量と距離との対応関係を予め計算してマップにして図５の測定装置用コントローラ２１５に記憶しておき、測定時に受光位置のずれ量から距離をマップを参照して求めても良い。また、受光器の受光面を点Ａと同じ高さになるようにしておけば、３つの点Ａ、Ｂ、Ｐで構成される三角形の∠ＢＡＰと∠ＡＢＰの角度が固定であるので、受光位置（辺ＡＢの長さ）に基づいて、その距離（三角形ＰＡＢの高さ）を図５の測定装置用コントローラ２１５で算出しても良い。 Thus, there is a correlation between the light receiving position in the light receiver and the distance from the coating mechanism unit 101 to the target coating target portion. Therefore, for example, the correspondence between the shift amount of the light receiving position and the distance is calculated in advance and stored as a map in the measuring device controller 215 in FIG. 5, and the distance is referred to the map from the shift amount of the light receiving position at the time of measurement. You may ask for it. In addition, if the light receiving surface of the light receiver is set to the same height as the point A, the angle of the triangle ∠BAP and ∠ABP formed by the three points A, B, and P is fixed. Based on the position (the length of the side AB), the distance (the height of the triangle PAB) may be calculated by the measuring device controller 215 in FIG.
　図５は、液状材料塗布装置の制御ブロックの構成を示す図である。図５を参照して、第一の駆動機構１０３、第二の駆動機構１０４、測定装置１１１を制御するために、第一の駆動機構用ドライバ２１３、第二の駆動機構用ドライバ２１４、測定装置用コントローラ２１５および制御装置２１２が設けられる。 FIG. 5 is a diagram showing the configuration of the control block of the liquid material coating apparatus. Referring to FIG. 5, in order to control the first drive mechanism 103, the second drive mechanism 104, and the measurement device 111, the first drive mechanism driver 213, the second drive mechanism driver 214, and the measurement device Controller 215 and controller 212 are provided.
　第一の駆動機構１０３は、第一の駆動機構用ドライバ２１３の電気的指令に基づいて動作する。第二の駆動機構１０４も同様に、第二の駆動機構用ドライバ２１４の電気的指令に基づいて動作する。測定装置用コントローラ２１５は、投光器１０９のレーザ光Ｌの照射制御や、受光器１１０に入射する反射光Ｒの解析を行ない、距離を測定する。 The first drive mechanism 103 operates based on an electrical command from the first drive mechanism driver 213. Similarly, the second drive mechanism 104 operates based on an electrical command from the second drive mechanism driver 214. The measurement device controller 215 measures the distance by controlling the irradiation of the laser light L of the projector 109 and analyzing the reflected light R incident on the light receiver 110.
　制御装置２１２は、第一の駆動機構用ドライバ２１３および第二の駆動機構用ドライバ２１４に指令を出力し、塗布動作を制御する。このとき、測定装置用コントローラ２１５から距離を取得し、取得した距離に基づいて第一の駆動機構１０３の移動量を決定する。 The control device 212 outputs a command to the first drive mechanism driver 213 and the second drive mechanism driver 214 to control the coating operation. At this time, the distance is acquired from the measurement device controller 215, and the amount of movement of the first drive mechanism 103 is determined based on the acquired distance.
　次に、フローチャートを用いて、塗布機構部１０１による液状材料の塗布動作について説明する。その前処理として、あらかじめ、塗布機構部１０１の支持部材１０２を、塗布機構部１０１を使用する液状材料塗布装置３００に取り付けて固定し、対象物１０８の塗布予定部と塗布針先端との距離を最適距離に設定したときの測定装置の基準面（たとえばＺ軸に直交し点Ａ、Ｂを通る面）から点Ｐまでの距離を測定装置用コントローラ２１５から取得し、図４に示すようにＤ０とおく。また、このとき、第一の駆動機構１０３および第二の駆動機構１０４を制御し、塗布針１０６を＋Ｚ方向に移動させて点Ｐに接触させたときの第一の駆動機構１０３の移動量をＺ０とおく。なお、ここでは、第二の駆動機構１０４の移動量Ｋ（Ｋ≧０）は固定とする。 Next, the operation of applying the liquid material by the application mechanism unit 101 will be described using a flowchart. As the pretreatment, the support member 102 of the application mechanism unit 101 is previously attached and fixed to the liquid material application apparatus 300 using the application mechanism unit 101, and the distance between the application target portion of the object 108 and the tip of the application needle is set. The distance from the reference plane of the measuring apparatus (for example, the plane orthogonal to the Z axis and passing through points A and B) to the point P when the optimum distance is set is obtained from the measuring apparatus controller 215, and as shown in FIG. far. At this time, the first drive mechanism 103 and the second drive mechanism 104 are controlled, and the amount of movement of the first drive mechanism 103 when the application needle 106 is moved in the + Z direction and brought into contact with the point P is determined. Let it be Z0. Here, the movement amount K (K ≧ 0) of the second drive mechanism 104 is fixed.
　図６は、塗布機構部１０１を制御する制御装置で実行される制御内容を示すフローチャートである。図６を参照して、制御装置２１２は、塗布動作のステップＳ１において、塗布動作の直前に、現在の測定装置用コントローラ２１５から点Ｐまでの距離Ｄ１を取得する。距離Ｄ１は、図４に示すように対象物１０８の塗布対象部がＺ軸の＋方向にずれているときは、Ｄ１（＋）に示すように変化し、逆に対象物１０８の塗布対象部がＺ軸の－方向にずれているときは、Ｄ１（－）に示すように変化する。Ｄ１－Ｄ０は、塗布対象部と塗布機構部１０１との現在の距離が基準距離Ｚ０からずれている量を示す。 FIG. 6 is a flowchart showing the contents of control executed by the control device that controls the coating mechanism unit 101. Referring to FIG. 6, in step S <b> 1 of the application operation, control device 212 obtains a current distance D <b> 1 from measurement device controller 215 to point P immediately before the application operation. The distance D1 changes as shown in D1 (+) when the application target portion of the object 108 is shifted in the + direction of the Z axis as shown in FIG. Changes as indicated by D1 (−) when is shifted in the negative direction of the Z-axis. D1-D0 indicates the amount by which the current distance between the application target part and the application mechanism part 101 is deviated from the reference distance Z0.
　そして、制御装置２１２は、下記式（１）に基づいて第一の駆動機構１０３の移動量Ｚ１を求める。
Ｚ１＝Ｄ１－Ｄ０＋Ｚ０　　…（１）
　続いて、制御装置２１２は、ステップＳ２において、第二の駆動機構用ドライバ２１４に正の移動量＋Ｋを指定し、第二の駆動機構１０４を＋Ｚ方向に移動する。移動後の塗布機構の状態を図７に示す。なお、移動量として正の値を指定すると、第二の駆動機構１０４は＋Ｚ方向に移動する。 And the control apparatus 212 calculates | requires the movement amount Z1 of the 1st drive mechanism 103 based on following formula (1).
Z1 = D1-D0 + Z0 (1)
Subsequently, in step S2, the control device 212 designates a positive movement amount + K to the second drive mechanism driver 214 and moves the second drive mechanism 104 in the + Z direction. The state of the coating mechanism after the movement is shown in FIG. If a positive value is designated as the movement amount, the second drive mechanism 104 moves in the + Z direction.
　ステップＳ３では、第一の駆動機構用ドライバ２１３に第一の駆動機構１０３の移動量として＋Ｚ１を指定し、第一の駆動機構１０３を＋Ｚ方向に移動する。移動後の塗布機構の状態を図８に示す。このとき、塗布針１０６が対象物１０８に接触する。なお、移動量として正の値を指定すると、第一の駆動機構１０３は＋Ｚ方向に移動する。また、液状材料によっては塗布針１０６を対象物１０８に接触させなくてもよい場合があり、このような場合はＺ１の値をより小さくすることができる。これにより、第一の駆動機構１０３の移動量を小さくできるので、塗布動作時間を短縮することができる。 In step S3, + Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the + Z direction. The state of the coating mechanism after movement is shown in FIG. At this time, the application needle 106 contacts the object 108. If a positive value is specified as the movement amount, the first drive mechanism 103 moves in the + Z direction. Further, depending on the liquid material, the application needle 106 may not be in contact with the object 108. In such a case, the value of Z1 can be further reduced. Thereby, since the moving amount | distance of the 1st drive mechanism 103 can be made small, application | coating operation time can be shortened.
　ステップＳ４では、塗布針１０６が対象物１０８に接触した状態で、あらかじめ決められた時間だけ待機する。これにより、塗布針１０６の先から対象物１０８の表面に液状材料が充填される。 In step S4, the application needle 106 is in contact with the object 108 and waits for a predetermined time. As a result, the liquid material is filled from the tip of the application needle 106 to the surface of the object 108.
　ステップＳ５では、第一の駆動機構用ドライバ２１３に第一の駆動機構１０３の移動量として－Ｚ１を指定し、第一の駆動機構１０３を－Ｚ方向に移動する。移動後の塗布機構の状態は、再び図７に示した状態となる。 In step S5, -Z1 is designated as the movement amount of the first drive mechanism 103 to the first drive mechanism driver 213, and the first drive mechanism 103 is moved in the -Z direction. The state of the coating mechanism after the movement again becomes the state shown in FIG.
　ステップＳ６では、第二の駆動機構用ドライバ２１４に負の移動量－Ｋを指定し、第二の駆動機構１０４を－Ｚ方向に移動する。移動後の塗布機構部１０１の状態は、図２に示した状態に戻る。 In step S6, the negative movement amount -K is designated to the second drive mechanism driver 214, and the second drive mechanism 104 is moved in the -Z direction. The state of the coating mechanism 101 after the movement returns to the state shown in FIG.
　以上説明したように、一連の塗布動作は、ステップＳ１からステップＳ６までの処理を順次実行することにより完了する。 As described above, a series of coating operations are completed by sequentially executing the processing from step S1 to step S6.
　なお、図２、図７、図８は、模式的に塗布機構部１０１の構造を記載しているので塗布針の昇降動作についてやや理解しにくい面がある。このため、塗布機構部１０１の昇降動作について、より具体的な形状を示した図を例示しておく。図９は、昇降動作を具体的に説明するための図である。なお、図示の簡単のため、図９では、測定装置１１１は省略されているが、容器１０７の紙面手前側に測定装置１１１の投光器１０９が配置され、容器１０７に対して投光器１０９と反対側に測定装置の受光器１１０が配置されており、容器１０７と測定装置１１１とは一体的に昇降する。 2, 7, and 8 schematically illustrate the structure of the application mechanism unit 101, and therefore, it is somewhat difficult to understand the raising and lowering operation of the application needle. For this reason, the figure which showed the more specific shape about the raising / lowering operation | movement of the application | coating mechanism part 101 is illustrated. FIG. 9 is a diagram for specifically explaining the lifting operation. For simplicity of illustration, the measurement device 111 is omitted in FIG. 9, but the projector 109 of the measurement device 111 is disposed on the front side of the container 107, and is opposite to the projector 109 with respect to the container 107. The light receiver 110 of the measuring device is arranged, and the container 107 and the measuring device 111 are moved up and down integrally.
　図９に示された塗布機構は、塗布ユニット２０をＺ軸方向（垂直方向、塗布針１０６の長さ方向）に下降および上昇させる副Ｚステージ３４と、駆動軸３４ａに取り付けられた支持台２９と、塗布針１０６を支持台２９に対してＺ軸方向に移動させるためのエアシリンダ３０と、支持台２９に対して塗布針１０６をスライドさせるための直動案内部材２６とを含む。 The coating mechanism shown in FIG. 9 includes a sub-Z stage 34 that lowers and raises the coating unit 20 in the Z-axis direction (vertical direction, the length direction of the coating needle 106), and a support base 29 attached to the drive shaft 34a. And an air cylinder 30 for moving the application needle 106 in the Z-axis direction with respect to the support base 29, and a linear motion guide member 26 for sliding the application needle 106 relative to the support base 29.
　副Ｚステージ３４は、Ｚ軸方向に伸縮する駆動軸３４ａを有し、駆動軸３４ａの先端部が支持台２９の上端部に固定されている。副Ｚステージ３４は、駆動軸３４ａを任意のＺ軸方向の第１座標から任意のＺ軸方向の第２座標まで所望の速度で移動させる機能を有する。 The sub-Z stage 34 has a drive shaft 34 a that expands and contracts in the Z-axis direction, and the tip of the drive shaft 34 a is fixed to the upper end of the support base 29. The sub Z stage 34 has a function of moving the drive shaft 34a from a first coordinate in an arbitrary Z-axis direction to a second coordinate in an arbitrary Z-axis direction at a desired speed.
　以下の説明において、直動案内部材２６は、図２のスライド機構１０５に相当する。エアシリンダ３０は、図２のスライド機構１０５をＺ方向に位置決めするための第二の駆動機構１０４に相当する。支持台２９は、図２の第二の駆動機構１０４が取り付けられた支持部材１０２に相当する。副Ｚステージ３４は、図２の支持部材１０２をＺ方向に位置決めするための第一の駆動機構１０３に相当する。基板３５は、対象物１０８に相当し、対象領域３５ａは塗布予定部に相当する。 In the following description, the linear motion guide member 26 corresponds to the slide mechanism 105 of FIG. The air cylinder 30 corresponds to the second drive mechanism 104 for positioning the slide mechanism 105 in FIG. 2 in the Z direction. The support base 29 corresponds to the support member 102 to which the second drive mechanism 104 in FIG. 2 is attached. The sub Z stage 34 corresponds to the first drive mechanism 103 for positioning the support member 102 of FIG. 2 in the Z direction. The substrate 35 corresponds to the target object 108, and the target area 35a corresponds to the application planned portion.
　まず、図９（Ａ）に示すように、図１のＸＹステージ５およびＺステージ４を用いて塗布ユニット２０と基板３５を相対移動させ、基板３５の対象領域３５ａの上方に塗布針１０６の先端を配置する。 First, as shown in FIG. 9A, the coating unit 20 and the substrate 35 are moved relative to each other using the XY stage 5 and the Z stage 4 of FIG. 1, and the tip of the coating needle 106 is located above the target area 35a of the substrate 35. Place.
　次に図９（Ｂ）に示すように、エアシリンダ３０の出力軸３０ａを下方（図では、出力軸３０ａを引き込む方向）に移動させ、出力軸３０ａと一体となって移動する駆動板３１を下方に移動させる。駆動板３１の先端に固着したピン３１ａは、塗布針固定板２５に設けた切り欠き部２５ａに下方から接しており、駆動板３１の下降により塗布針固定板２５は直動案内部材２６に沿って下方に移動する。それに合わせて塗布針１０６も下方に移動し、容器１０７の底に開口された第１の孔２１ａから塗布針１０６の先端部２４ａが突出する。この状態で、塗布針１０６の先端部２４ａにはインク２２が付着しており、塗布できる状態となる。このとき、塗布針１０６の先端は対象領域３５ａの真上に配置され、塗布針１０６の先端と対象領域３５ａの表面との間隔は所定の距離に設定されている。つまり、対象領域３５ａの上方の予め定められた位置に塗布針１０６の先端が配置される。 Next, as shown in FIG. 9B, the output shaft 30a of the air cylinder 30 is moved downward (in the direction in which the output shaft 30a is pulled in), and the drive plate 31 that moves integrally with the output shaft 30a is moved. Move down. The pin 31 a fixed to the tip of the drive plate 31 is in contact with a notch 25 a provided on the application needle fixing plate 25 from below, and the application needle fixing plate 25 moves along the linear motion guide member 26 as the drive plate 31 descends. Move down. Accordingly, the application needle 106 also moves downward, and the distal end portion 24a of the application needle 106 protrudes from the first hole 21a opened at the bottom of the container 107. In this state, the ink 22 is attached to the distal end portion 24a of the application needle 106, and the application needle 106 can be applied. At this time, the tip of the application needle 106 is disposed immediately above the target region 35a, and the distance between the tip of the application needle 106 and the surface of the target region 35a is set to a predetermined distance. That is, the tip of the application needle 106 is arranged at a predetermined position above the target area 35a.
　その後、図９（Ｃ）に示すように、副Ｚステージ３４を用いて塗布ユニット２０全体を所定の速度で下降させ、インク２２が付着した塗布針１０６の先端を基板３５の対象領域３５ａに接触させる。これにより、塗布針先端部２４ａのインク２２が対象領域３５ａに塗布され、インク層２２ａが形成される。 Thereafter, as shown in FIG. 9C, the entire coating unit 20 is lowered at a predetermined speed using the sub Z stage 34, and the tip of the coating needle 106 to which the ink 22 has adhered contacts the target area 35 a of the substrate 35. Let Thereby, the ink 22 of the application needle tip 24a is applied to the target area 35a, and the ink layer 22a is formed.
　塗布針１０６の先端を一定時間、対象領域３５ａに接触させた後、図９（Ｄ）に示すように、エアシリンダ３０の出力軸３０ａを上方（図では、出力軸３０ａを突出させる方向）に移動させ、塗布針１０６の先端部２４ａを容器１０７のインク２２中に浸漬した状態に戻すとともに、副Ｚステージ３４の駆動軸３４ａを上方に移動させて塗布ユニット２０全体を上方に移動させ、１回の塗布動作が終了する。 After the tip of the application needle 106 is brought into contact with the target region 35a for a certain period of time, as shown in FIG. 9D, the output shaft 30a of the air cylinder 30 is moved upward (in the direction in which the output shaft 30a protrudes). The tip 24a of the application needle 106 is returned to the state immersed in the ink 22 of the container 107, and the drive shaft 34a of the sub-Z stage 34 is moved upward to move the entire application unit 20 upward. The coating operation is completed.
　最後に、再び本実施の形態の液状材料塗布装置について総括する。図１、図２を参照して、本実施の形態に係る液状材料塗布装置３００は、塗布針１０６と、駆動装置１２０と、測定装置１１１と、制御装置２１２とを含む。塗布針１０６は、液状材料を先端部に付着させて対象物１０８に塗布する。駆動装置１２０は、塗布針１０６に沿う上下方向（Ｚ軸方向）に塗布針１０６を対象物１０８に対して相対的に移動させる。測定装置１１１は、対象物１０８の塗布予定部が塗布針１０６の下に位置するように対象物１０８が位置決めされた状態で、図４で説明したように、塗布予定部と先端部２４ａとの相対距離を検出する。制御装置２１２は、測定装置１１１によって検出された相対距離に基づいて塗布針１０６の移動距離を求め、塗布針１０６を移動距離だけ移動させて先端部を対象物１０８に接触させた後、塗布針１０６を移動させて先端部を対象物１０８から離脱させるように駆動装置１２０を制御する。 Finally, the liquid material applicator of this embodiment will be summarized again. Referring to FIGS. 1 and 2, liquid material application apparatus 300 according to the present embodiment includes application needle 106, drive apparatus 120, measurement apparatus 111, and control apparatus 212. The application needle 106 applies a liquid material to the tip 108 by applying it to the tip. The driving device 120 moves the application needle 106 relative to the object 108 in the vertical direction (Z-axis direction) along the application needle 106. As described with reference to FIG. 4, the measuring device 111 is configured so that the application portion of the object 108 is positioned so that the planned application portion of the object 108 is positioned below the application needle 106. Detect relative distance. The control device 212 obtains the movement distance of the application needle 106 based on the relative distance detected by the measuring device 111, moves the application needle 106 by the movement distance and brings the tip into contact with the object 108, and then applies the application needle. The driving device 120 is controlled so as to move the tip 106 and detach the tip from the object 108.
　好ましくは、図２に示すように、測定装置１１１は、レーザ光Ｌを出射する投光器１０９と、対象物１０８の表面で反射されたレーザ光の反射光Ｒを受光する受光器１１０とを含む。 Preferably, as shown in FIG. 2, the measuring device 111 includes a projector 109 that emits the laser light L and a light receiver 110 that receives the reflected light R of the laser light reflected by the surface of the object 108.
　より好ましくは、図２、図４に示すように、塗布針１０６と、投光器１０９の投光軸と、受光器１１０の受光軸は同一の平面上に配置される。図２に示すように、塗布針１０６は、その平面上において、投光器１０９と受光器１１０の中間に配置される。 More preferably, as shown in FIGS. 2 and 4, the application needle 106, the light projecting axis of the light projector 109, and the light receiving axis of the light receiver 110 are arranged on the same plane. As shown in FIG. 2, the application needle 106 is disposed between the light projector 109 and the light receiver 110 on the plane.
　さらに好ましくは、塗布予定部は、塗布針１０６の先端部が対象物１０８に接触する対象物１０８の表面上の接触点Ｐである。図２、図４に示すように、投光器１０９から出射されるレーザ光Ｌのスポットは、接触点Ｐに略一致するように調整されている。 More preferably, the application scheduled portion is a contact point P on the surface of the object 108 where the tip of the application needle 106 contacts the object 108. As shown in FIGS. 2 and 4, the spot of the laser light L emitted from the projector 109 is adjusted so as to substantially coincide with the contact point P.
　好ましくは、図２、図４に示すように駆動装置１２０は、塗布針１０６を上下方向に移動させる第一の駆動機構１０３と、第一の駆動機構１０３および測定装置１１１が固定された支持部材を上下方向に移動させる第二の駆動機構１０４とを含む。塗布針１０６の移動距離は、第一の駆動機構１０３による塗布針１０６の第１の移動距離と、第二の駆動機構１０４による支持部材の第２の移動距離との合計である。制御装置２１２は、図７、図８に示すように、第１の移動距離を固定長Ｋ（Ｋ≧０）とし、第２の移動距離Ｚ１を相対距離に基づいて変化させる。 Preferably, as shown in FIGS. 2 and 4, the driving device 120 includes a first driving mechanism 103 that moves the application needle 106 in the vertical direction, and a support member to which the first driving mechanism 103 and the measuring device 111 are fixed. And a second drive mechanism 104 that moves the sensor vertically. The movement distance of the application needle 106 is the sum of the first movement distance of the application needle 106 by the first drive mechanism 103 and the second movement distance of the support member by the second drive mechanism 104. As shown in FIGS. 7 and 8, the control device 212 sets the first movement distance to a fixed length K (K ≧ 0) and changes the second movement distance Z1 based on the relative distance.
　より好ましくは、図２に示すように、測定装置１１１は、支持部材１０２に固定され、塗布予定部にレーザ光Ｌを照射し反射光Ｒに基づいて相対距離を取得する。 More preferably, as shown in FIG. 2, the measuring device 111 is fixed to the support member 102, irradiates the application target portion with the laser light L, and acquires the relative distance based on the reflected light R.
　本発明によれば、針先端部を塗布対象物に対して高精度に位置決めすることができる。さらに、図２、図４で説明したように、針接触位置とレーザ光のスポットを略一致させる構成のため、特許文献１のような焦点合わせ動作は不要であり、塗布機構の動作時間を短くすることができる。 According to the present invention, the tip of the needle can be positioned with high accuracy with respect to the object to be coated. Further, as described with reference to FIGS. 2 and 4, since the needle contact position and the laser beam spot are substantially matched, the focusing operation as in Patent Document 1 is unnecessary, and the operation time of the coating mechanism is shortened. can do.
　今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
　１　ホストコンピュータ、２　制御用コンピュータ、３　画像処理部、４，５，３４　ステージ、６　チャック台、７　カット用レーザ照射部、８　可変スリット部、９　インク塗布部、１０　モニタ、２０　塗布ユニット、２１　対物レンズ、２１ａ　第１の孔、２２　インク、２２ａ　インク層、２３　蓋、２３ａ　第２の孔、２５　塗布針固定板、２６　直動案内部材、２９　支持台、３０　エアシリンダ、３０ａ　出力軸、３１　駆動板、３１ａ　ピン、３４ａ　駆動軸、３５　基板、３５ａ　対象領域、５０　修正処理部、５１　位置決め機構、１０１　塗布機構部、１０２　支持部材、１０３　第一の駆動機構、１０４　第二の駆動機構、１０５　スライド機構、１０６　塗布針、１０７　容器、１０８　対象物、１０９　投光器、１１０　受光器、１１１　測定装置、１２０　駆動装置、２１２　制御装置、２１３　第一の駆動機構用ドライバ、２１４　第二の駆動機構用ドライバ、２１５　測定装置用コントローラ、３００　液状材料塗布装置。 1 host computer, 2 control computer, 3 image processing unit, 4, 5, 34 stage, 6 chuck base, 7 cutting laser irradiation unit, 8 variable slit unit, 9 ink coating unit, 10 monitor, 20 coating unit, 21 Objective lens, 21a first hole, 22 ink, 22a ink layer, 23 lid, 23a second hole, 25 application needle fixing plate, 26 linear motion guide member, 29 support base, 30 air cylinder, 30a output shaft, 31 Drive plate, 31a pin, 34a drive shaft, 35 substrate, 35a target area, 50 correction processing section, 51 positioning mechanism, 101 coating mechanism section, 102 support member, 103 first drive mechanism, 104 second drive mechanism, 105 Slide mechanism, 106 coating needle, 107 container, 108 object, 109 throw Vessel, 110 photodetector, 111 measuring device, 120 drive, 212 control unit, 213 first drive mechanism driver, 214 a second drive mechanism for the driver, 215 measuring device controller, 300 a liquid material application apparatus.

Claims (6)

  1. 　液状材料を先端部に付着させて対象物に塗布するための塗布針と、
    　前記塗布針に沿う上下方向に前記塗布針を前記対象物に対して相対的に移動させる駆動装置と、
    　前記対象物の塗布予定部が前記塗布針の下に位置するように前記対象物が位置決めされた状態で、前記塗布予定部と前記先端部との相対距離を検出する測定装置と、
    　前記測定装置によって検出された前記相対距離に基づいて前記塗布針を移動させて前記先端部を前記対象物に接触させた後、前記塗布針を移動させて前記先端部を前記対象物から離脱させるように前記駆動装置を制御する制御装置とを備える、液状材料塗布装置。     An application needle for attaching a liquid material to the tip and applying it to an object;
    A drive device that moves the application needle relative to the object in the vertical direction along the application needle;
    A measuring device for detecting a relative distance between the planned application part and the tip part in a state where the target object is positioned such that the planned application part of the target object is located below the application needle;
    The application needle is moved based on the relative distance detected by the measuring device to bring the tip portion into contact with the object, and then the application needle is moved to detach the tip portion from the object. A liquid material application device comprising: a control device for controlling the drive device.
  2. 　前記測定装置は、
    　レーザ光を出射する投光器と、
    　前記対象物の表面で反射された前記レーザ光の反射光を受光する受光器とを含む、請求項１に記載の液状材料塗布装置。     The measuring device is
    A projector that emits laser light;
    The liquid material application device according to claim 1, further comprising: a light receiver that receives reflected light of the laser light reflected by the surface of the object.
  3. 　前記塗布針と、前記投光器の投光軸と、前記受光器の受光軸は同一の平面上に配置され、
    　前記塗布針は、前記平面上において、前記投光器と前記受光器の中間に配置される、請求項２に記載の液状材料塗布装置。     The coating needle, the light projecting axis of the light projector, and the light receiving axis of the light receiver are arranged on the same plane,
    The liquid material applicator according to claim 2, wherein the applicator needle is disposed between the light projector and the light receiver on the plane.
  4. 　前記塗布予定部は、前記塗布針の前記先端部が前記対象物に接触する前記対象物の表面上の接触点であり、
    　前記投光器から出射されるレーザ光のスポットは、前記接触点に略一致するように調整されている、請求項３に記載の液状材料塗布装置。     The application portion is a contact point on the surface of the object where the tip of the application needle contacts the object;
    The liquid material coating apparatus according to claim 3, wherein a spot of the laser beam emitted from the projector is adjusted so as to substantially coincide with the contact point.
  5. 　前記駆動装置は、
    　前記塗布針を上下方向に移動させる第一の駆動機構と、
    　前記第一の駆動機構および前記測定装置が固定された支持部材を上下方向に移動させる第二の駆動機構とを含み、
    　前記塗布針の移動距離は、前記第一の駆動機構による前記塗布針の第１の移動距離と、前記第二の駆動機構による前記支持部材の第２の移動距離との合計であり、
    　前記制御装置は、前記第１の移動距離を固定長とし、前記第２の移動距離を前記相対距離に基づいて変化させる、請求項１に記載の液状材料塗布装置。     The driving device includes:
    A first drive mechanism for moving the application needle in the vertical direction;
    A first drive mechanism and a second drive mechanism for moving the support member to which the measuring device is fixed in the up-down direction,
    The movement distance of the application needle is the sum of the first movement distance of the application needle by the first drive mechanism and the second movement distance of the support member by the second drive mechanism,
    2. The liquid material coating apparatus according to claim 1, wherein the control device sets the first moving distance as a fixed length and changes the second moving distance based on the relative distance.
  6. 　前記測定装置は、前記支持部材に固定され、前記塗布予定部にレーザ光を照射し反射光に基づいて前記相対距離を取得する、請求項５に記載の液状材料塗布装置。 The liquid material coating apparatus according to claim 5, wherein the measurement apparatus is fixed to the support member, irradiates the application scheduled portion with laser light, and acquires the relative distance based on reflected light.
PCT/JP2016/067189 2015-06-18 2016-06-09 Liquid material coating device WO2016204061A1 (en)

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JP2003279721A (en) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd Method and apparatus for correcting defect of color filter
JP2004281328A (en) * 2003-03-18 2004-10-07 Dainippon Printing Co Ltd Defective correction method and defective correction device of electrode for organic el panel
JP2007268354A (en) * 2006-03-30 2007-10-18 Ntn Corp Pattern-correcting device and its application unit
JP2010194490A (en) * 2009-02-26 2010-09-09 Micronics Japan Co Ltd Coating device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003279721A (en) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd Method and apparatus for correcting defect of color filter
JP2004281328A (en) * 2003-03-18 2004-10-07 Dainippon Printing Co Ltd Defective correction method and defective correction device of electrode for organic el panel
JP2007268354A (en) * 2006-03-30 2007-10-18 Ntn Corp Pattern-correcting device and its application unit
JP2010194490A (en) * 2009-02-26 2010-09-09 Micronics Japan Co Ltd Coating device

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