WO2016084181A1 - オゾン発生装置 - Google Patents
オゾン発生装置 Download PDFInfo
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- WO2016084181A1 WO2016084181A1 PCT/JP2014/081316 JP2014081316W WO2016084181A1 WO 2016084181 A1 WO2016084181 A1 WO 2016084181A1 JP 2014081316 W JP2014081316 W JP 2014081316W WO 2016084181 A1 WO2016084181 A1 WO 2016084181A1
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- WIPO (PCT)
- Prior art keywords
- discharge tube
- dielectric discharge
- sealing lid
- dielectric
- ozone generator
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
- C01B13/115—Preparation of ozone by electric discharge characterised by the electrical circuits producing the electrical discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
- C01B2201/14—Concentric/tubular dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
Definitions
- the present invention relates to an ozone generator, and more particularly to an ozone generator that industrially generates ozonized gas used in water treatment facilities and the like.
- Ozonized gas contains ozone at a predetermined concentration.
- Ozonized gas has deodorizing and bactericidal action and is used in water treatment facilities and the like.
- a method for industrially generating ozonized gas a method in which a raw material gas is circulated in a minute space formed between a ground electrode and a dielectric discharge tube, and a silent discharge is generated by applying a high-frequency electric field to the minute space.
- Ozone is generated in a minute space from oxygen or a source gas containing oxygen by the discharge energy of silent discharge.
- the ground electrode is made of a metal tube such as stainless steel.
- the dielectric discharge tube is made of a glass tube having a high voltage electrode inside.
- the high voltage electrode is a thin film formed by spraying a metal such as aluminum on the inner surface of a dielectric discharge tube.
- a metal such as aluminum
- a ground electrode, a dielectric discharge tube, and the like are housed in a high-pressure tank.
- the high voltage electrode is a conductive thin film prepared by using a method such as application of a conductive paint.
- the left end of the dielectric discharge tube is sealed, and the right end on the ozonized gas outflow side has an open structure.
- a lid is fitted to the opening end of the dielectric discharge tube on the ozonized gas outflow side. It prevents the ozonized gas from diffusing inside the dielectric discharge tube and suppresses corrosion of the high voltage electrode by ozone.
- the gap between the dielectric discharge tube and the lid is sealed with a filler such as an adhesive or with an inorganic adhesive.
- a rod-shaped conductor (diameter 0.6 to 4.5 mm) is inserted into a cylindrical ceramic dielectric (diameter 1 to 5 mm).
- the ceramic dielectric and the rod-shaped conductor are sealed by fusing both ends with glass or joining with an adhesive.
- the side of the dielectric discharge tube through which the raw material gas flows is an opening, and the opposite end from which the ozonized gas exits is sealed. Yes.
- a gas flow plug is installed at the opening end of the dielectric discharge tube on the side where the source gas flows, and a small hole is opened in the gas flow plug.
- the ozone generator is emergency stopped, the flow of the raw material gas stops, and the ozone generated in the discharge field diffuses to the raw material gas inflow side of the dielectric discharge tube. Since the gas flow plug has only a small hole, ozone does not enter the dielectric discharge tube. In addition, since a small hole is made in the gas flow plug, there is no pressure on the dielectric discharge tube at all times, so the reliability of the dielectric discharge tube is high.
- a lid is fitted to a dielectric discharge tube.
- a dielectric discharge tube is formed of a glass tube, and there is a dimensional tolerance between an inner diameter and an outer diameter. Therefore, a gap of about 0.1 mm is always generated between the dielectric discharge tube and the lid. As a result, ozone gas diffuses and penetrates into the inside of the dielectric discharge tube through the gap between the lid and the thin film which is a high voltage electrode is corroded in the long term.
- Patent Document 2 describes the idea of sealing between a dielectric discharge tube and a lid with an adhesive, but does not disclose a specific configuration. When the dielectric discharge tube and the lid are bonded, the dielectric discharge tube is often cracked. In the configuration disclosed in Patent Document 3, the dielectric is made of ceramics, whereas in a large ozone generator used for industrial use, a glass tube is usually used as the dielectric. When the edge part of a glass tube and a center conductor are joined with an adhesive agent, a crack may arise in a glass tube.
- the present invention has been made to solve the above-described problems, and has as its object to increase the reliability of electrodes in an ozone generator and to shorten the apparatus start-up time after maintenance.
- the ozone generator according to the present invention has a dielectric discharge tube having a closed end and an open end facing each other, and an electrode formed on the inner surface thereof, and covers the open end of the dielectric discharge tube. And a sealing lid fixed with an adhesive, a power supply brush inscribed in an electrode formed on the inner surface of the dielectric discharge tube, and a ground electrode arranged concentrically with the dielectric discharge tube.
- the sealing lid has a main body portion and a cylindrical portion which are connected to each other, and the inner diameter of the cylindrical portion is larger than the outer diameter of the dielectric discharge tube.
- the ozone generator according to the present invention it is possible to prevent the dielectric discharge tube from being cracked or cracked during production and use. Since moisture does not enter the inside of the dielectric discharge tube at the time of maintenance, there is an effect that the start-up time after maintenance can be shortened.
- FIG. 4 is a cross-sectional structure diagram showing a relationship between a sealing lid and a dielectric discharge tube.
- 1 is a cross-sectional structure diagram of a dielectric discharge tube showing Embodiment 1 of the present invention. It is a cross-section figure of the dielectric discharge tube which shows Embodiment 2 of this invention. It is a cross-section figure of the dielectric discharge tube which shows Embodiment 3 of this invention. It is a cross-section figure of the dielectric discharge tube which shows Embodiment 4 of this invention. It is sectional drawing of the dielectric discharge tube which shows Embodiment 5 of this invention.
- the ozone generator according to the embodiment of the present invention will be described below with reference to the drawings.
- the same or similar components are denoted by the same reference numerals, and the sizes and scales of the corresponding components are independent.
- the configuration of the ozone generator actually includes a plurality of members, but in order to simplify the explanation, only the parts necessary for the explanation are shown, and the other parts are omitted.
- FIG. 1 is a diagram illustrating the structure of an ozone generator 100 according to an embodiment of the present invention.
- the high-pressure tank 50 that is a high-pressure vessel has an external shape in which a cylinder is placed sideways.
- a high-voltage line inlet 53 is provided for introducing the high-voltage wiring 8 from the high-voltage power source 7 into the tank.
- measures are taken to sufficiently insulate the grounded high pressure tank 50 from the high voltage wiring 8 and prevent gas from leaking.
- a raw material gas inlet 51 is provided at the lower left of the high-pressure tank 50, and an ozonized gas outlet 52 is provided at the lower right.
- the raw material gas that has entered from the raw material gas inlet 51 passes through the discharge space where silent discharge is generated, becomes an ozonized gas containing ozone generated by the discharge, and is discharged from the ozonized gas outlet 52.
- the source gas is a gas mainly composed of air or oxygen.
- the cooling water 6 is supplied into the structure 5 and discharged from the cooling water outlet 55.
- a predetermined number of dielectric discharge tubes 3 and ground electrodes 2 are arranged at a necessary interval.
- FIG. 2 is a cross-sectional view illustrating the structure of the structure 5.
- the structure 5 has a circular cross section, and is provided with a plurality of water channels 5a and through holes 5b in the axial direction.
- a cylindrical dielectric discharge tube 3 is inserted into the through hole 5b.
- the through hole 5 b becomes the inner surface of the ground electrode 2.
- the dielectric discharge tube 3 is disposed concentrically with the cylindrical ground electrode 2, and gas passes through the ground electrode 2.
- the structure 5 can be sealed, and the water channel 5 a is filled with cooling water 6 for cooling the ground electrode 2.
- FIG. 3 is a view for explaining the structure of the dielectric discharge tube, and is a cross-sectional view in a cross section parallel to the gas flow.
- the high voltage electrode 1 is an electrode formed on the inner surface of the dielectric discharge tube 3.
- the ground electrode 2 is made of a metal tube such as stainless steel. Both the dielectric discharge tube 3 and the ground electrode 2 have a cylindrical shape, and the dielectric discharge tube 3 and the ground electrode 2 are arranged concentrically. A space formed between the dielectric discharge tube 3 and the ground electrode 2 becomes a discharge space 4. Spacers 4A are provided at positions close to both ends of the dielectric discharge tube 3 in order to make the discharge space 4 have a donut-shaped cross section.
- the power supply brush 13 is inscribed in an electrode (high voltage electrode 1) formed on the inner surface of the dielectric discharge tube 3.
- a cylindrical dielectric discharge tube 3 made of glass or the like and sealed at one end has a high voltage electrode 1 on its inner surface.
- the high voltage electrode 1 also has a cylindrical shape.
- the dielectric discharge tube 3 has an open end on the side where the source gas flows, that is, on the upstream side of the source gas.
- a power supply rod 14 is connected to the high voltage electrode 1 through a power supply brush 13.
- the power feed rod 14 is connected to the high voltage wiring 8.
- the high voltage electrode 1 is composed of a thin film including at least one material selected from the group of materials consisting of chromium, gold, silver, copper, tin, zinc, nickel, carbon, and aluminum.
- the opening end and outer periphery of the dielectric discharge tube 3 are covered with a sealing lid 20.
- An adhesive 21A is applied to the gap between the sealing lid 20 and the dielectric discharge tube 3, and the sealing lid 20 and the dielectric discharge tube 3 are bonded and sealed.
- a hole is made in the central portion of the sealing lid 20 and the power feeding rod 14 is passed therethrough.
- An adhesive 21B is applied between the hole in the center of the sealing lid 20 and the power supply rod 14, and the sealing lid 20 and the power supply rod 14 are hermetically bonded.
- the glass tube used for the dielectric discharge tube 3 is DURAN (registered trademark) sold by SCHOTT.
- DURAN is a kind of borosilicate glass, and is a hard glass excellent in chemical durability having a SiO 2 content of 81% or more.
- a DURAN tube having an outer diameter of 10 to 30 mm and a thickness of 0.8 to 1.6 mm and having one end closed is used.
- the adhesives 21A and 21B a glass adhesive excellent in ozone resistance and acid resistance or an adhesive mixed with an epoxy resin and metal powder was used.
- the glass adhesive for example, Ceramer Bond 569 manufactured by Odec Co., Ltd. or 940LE manufactured by Kanetsu Co., Ltd. was used.
- an adhesive in which an epoxy resin and metal powder are mixed for example, Verometal from Dermetal or Devcon from Devcon was used.
- FIG. 4 is a view for explaining the structure of the sealing lid and the dielectric discharge tube.
- the sealing lid 20 has a main body portion 20a and a cylindrical portion 20b, and both are connected and integrated. An opening 20c is formed in the center of the disc-shaped main body 20a.
- the dielectric discharge tube 3 has a closed end 3a at one end and an open end 3b at the other end, and an electrode (high voltage electrode 1) is formed on the inner surface.
- the closed end 3a and the open end 3b are opposed to each other.
- the sealing lid 20 has a shape in which a narrow gap is formed at the outer periphery of the dielectric discharge tube 3, so that the inner diameter (ID) of the cylindrical portion 20 b of the sealing lid 20 is the outer diameter (OD) of the dielectric discharge tube 3.
- the difference between the inner diameter of the cylindrical portion 20b of the sealing lid 20 and the outer diameter of the dielectric discharge tube 3 is set to be between 0.3 mm and 2 mm.
- the adhesive 21A was also applied to the open end of the dielectric discharge tube 3 and hermetically bonded.
- the material of the sealing lid 20 was austenitic stainless steel such as SUS304, SUS304L, SUS316, SUS316L.
- the sealing lid 20 is preferably bonded on the outer periphery of the dielectric discharge tube 3.
- the sealing lid 20 is configured and bonded so that a narrow gap is formed on the inner diameter side of the dielectric discharge tube 3, a large stress is generated in the dielectric discharge tube.
- stainless steel or aluminum was used as the material of the sealing lid 20, cracks and cracks occurred in the dielectric discharge tube at the stage where the adhesive 21 ⁇ / b> A was applied and hardened.
- the high frequency high voltage supplied from the high voltage power supply 7 is applied to the high voltage electrode 1 via the high voltage wiring 8, the power supply rod 14, and the power supply brush 13.
- Silent discharge occurs in the discharge space 4 between the dielectric discharge tube 3 and the ground electrode 2, and the source gas is converted into ozone gas.
- the ozone generator 100 When the ozone generator 100 is operated, discharge deposits adhere to the surface of the ground electrode 2 and the outer peripheral surface of the dielectric discharge tube 3, and nitrogen oxides such as N 2 O 5 are adsorbed therein.
- the ozone generator is operated for a long period of time, discharge deposits accumulate on the surface of the ground electrode 2 and the outer peripheral surface of the dielectric discharge tube 3. When a large amount of discharge deposits adheres, it becomes difficult for gas to flow into the discharge space 4 and the ozone generation efficiency decreases, so that maintenance is performed periodically.
- the source gas When the source gas is air, the amount of deposits is large, so maintenance is performed every 1 to 5 years, for example.
- the raw material gas When the raw material gas is generated by an oxygen generator, the amount of discharge products is small, so that maintenance is performed, for example, every 5 to 10 years.
- the ozone generator When maintaining the ozone generator, the ozone generator is opened, the dielectric discharge tube is taken out, and discharge deposits attached to the outer peripheral surface of the dielectric discharge tube are cleaned. If the deposits are stuck, they are often washed with water. In the ozone generator 100 according to the present embodiment, since the sealing lid 20 is attached to the opening of the dielectric discharge tube 3, no cleaning water is mixed into the dielectric discharge tube 3.
- the effect of this embodiment is great.
- the same effect can be obtained when an oxygen gas generator is used. Since an ozone-resistant adhesive is used as the adhesive, there is no deterioration of the adhesive, and the reliability of the connecting portion between the sealing lid and the dielectric discharge tube is high.
- the adhesive is bonded in the gap between the outer periphery of the dielectric discharge tube and the inner periphery of the sealing lid, and stainless steel is used as the sealing lid, the glass of the dielectric discharge tube is cracked even if the temperature of the device changes. No cracking occurs.
- the material of the sealing lid 20 is austenitic stainless steel, but it goes without saying that the same effect can be obtained with other stainless steel materials.
- the same effect can be obtained by using a ceramic having high corrosion resistance against ozone and acid instead of austenitic stainless steel.
- Embodiment 2 FIG. In the first embodiment, the high voltage electrode 1 is directly connected to the high voltage power source 7.
- the high voltage electrode 1 is connected to the high voltage power source 7 through the power supply brush 13, the power supply rod 14 ⁇ / b> A, the fuse 15, the power supply rod 14 ⁇ / b> B, and the high voltage wiring 8.
- the fuse 15 immediately cuts off the excessive current when a situation occurs in which an excessive current flows between the high voltage electrode 1 and the ground electrode 2 due to dielectric breakdown occurring in the dielectric discharge tube 3.
- the dielectric discharge tube 3 is separated from the electric circuit.
- the fuse 15 is sealed inside the dielectric discharge tube 3 by a sealing lid 20. Since the conductor and the insulator constituting the fuse are not exposed to the cleaning water containing nitric acid during the maintenance of the ozone generator 100, it is not necessary to constitute the acid resistant material. Further, since the fuse is attached, even if one dielectric discharge tube 3 breaks down, the short-circuit current is interrupted by the fuse. It is possible to generate ozone only with the other plurality of dielectric discharge tubes inserted in the high-pressure tank, and the operation can be continued without stopping the ozone generator.
- Embodiment 3 In the first embodiment, power is supplied by bringing the power supply brush 13 into contact with the high voltage electrode 1.
- power feeding is performed by electrically joining the power feeding line 14 ⁇ / b> C to the high voltage electrode 1 with solder 22. Since solder is corroded by ozone or acid, it cannot normally be used inside the high-pressure tank 50. However, in the ozone generator according to the present embodiment, since the inside of the dielectric discharge tube is sealed with the sealing lid 20, corrosion does not progress even if solder is used.
- the temperature rise when the high voltage electrode 1 and the power supply line 14 ⁇ / b> C are electrically joined can be kept low, so that the DURAN used for the dielectric discharge tube 3 when electrically joining is used.
- the tube will not break with heat.
- the feed line 14C can be reliably connected to the high voltage electrode 1 inside the dielectric discharge tube 3.
- Embodiment 4 FIG.
- the feeder line 14C is directly connected to the high voltage electrode 1 inside the dielectric discharge tube.
- the fuse 15 is connected between the power supply line 14 ⁇ / b> C and the power supply line 14 ⁇ / b> D, and the power supply line 14 ⁇ / b> C and the high voltage electrode 1 are electrically joined by the solder 22. Since the terminal lines coming out of the fuse 15 can be used as the power supply lines 14C and 14D as they are, the number of parts used does not increase. Even when the fuse 15 has no terminal line, the power supply line 14C, the power supply line 14D, and the fuse 15 can be electrically joined by the solder 22, so that the reliability of electrical connectivity is improved.
- Embodiment 5 FIG.
- only one dielectric discharge tube 3 is used in the gas flow direction.
- two dielectric discharge tubes arranged in a so-called tandem are used.
- the sealed side of each dielectric discharge tube is placed in contact with the center in the longitudinal direction of the ground electrode 2.
- the opening (open end 3b) of the dielectric discharge tube 3A (first dielectric discharge tube) is placed on the raw material gas inflow side, and the opening (open end 3b) of the dielectric discharge tube 3B (second dielectric discharge tube) is placed.
- the sealing lid 20A covers the open end 3b of the dielectric discharge tube 3A.
- the sealing lid 20B (second sealing lid) covers the open end 3b of the dielectric discharge tube 3B.
- the dielectric discharge tube 3A and the dielectric discharge tube 3B are arranged with the closed end 3a facing each other.
- the inner diameter of the cylindrical portion of the sealing lid 20A is larger than the outer diameter of the dielectric discharge tube 3A.
- the inner diameter of the cylindrical portion of the sealing lid 20B is larger than the outer diameter of the dielectric discharge tube 3B.
- the open end 3b of the dielectric discharge tube 3A is sealed with a sealing lid 20A and adhesives 21A and 21B.
- the open end 3b of the dielectric discharge tube 3B is sealed with a sealing lid 20B and adhesives 21A and 21B.
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Abstract
Description
以下、この発明の実施の形態1を図面で説明する。図1は、この発明の実施の形態に係るオゾン発生装置100の構造を説明する図である。高圧容器である高圧タンク50は、円筒を横向きに置いたような外形を有する。高圧タンク50の左上には、高電圧電源7からの高電圧配線8をタンク内に導入するために、高電圧線導入口53が設けられている。高電圧線導入口53には、接地されている高圧タンク50と高電圧配線8の間を十分に絶縁し、かつガスが漏れないような対策をとる。高圧タンク50の左下には原料ガス入口51が、右下にはオゾン化ガス出口52がそれぞれ設けられている。
20bの内径と誘電体放電管3の外径の差を0.3mm~2mmの間となるようにした。密封性能をアップするために、接着剤21Aを誘電体放電管3の開放端部にも塗布し密封接着した。
実施の形態1では、高電圧電極1は高電圧電源7と直接接続されている。実施の形態2では図5に示すように、高電圧電極1は、給電ブラシ13、給電棒14A、ヒューズ15、給電棒14B、高電圧配線8を通じて高電圧電源7に接続されている。ヒューズ15は、誘電体放電管3で絶縁破壊が発生するなどして、高電圧電極1と接地電極2の間に過度の電流が流れる状況が発生した場合に、即座に過度の電流を遮断し、誘電体放電管3を電気回路から切り離す。
実施の形態1では、給電ブラシ13を高電圧電極1に接触させて給電している。実施の形態3では、図6に示すように、給電線14Cを高電圧電極1に半田22で電気接合することにより給電を行う。半田は、オゾンや酸で腐食されるので、通常は高圧タンク50の内部では使用できない。しかしながら本実施の形態によるオゾン発生装置では誘電体放電管の内部を密閉用フタ20で密封しているので、半田を使用しても腐食が進展しない。特に、半田22に低温半田を使用すれば、高電圧電極1と給電線14Cを電気接合する場合の温度上昇を低く抑えることができるので、電気接合する際に誘電体放電管3に使用するDURAN管が熱で割れることがなくなる。実施の形態1に比べると、給電線14Cを確実に誘電体放電管3の内部の高電圧電極1に接続できる。
実施の形態3では、給電線14Cを誘電体放電管の内部の高電圧電極1に直接接続している。実施の形態4では図7に示すようにヒューズ15を給電線14Cと給電線14Dの間に接続し、給電線14Cと高電圧電極1とを半田22で電気接合している。ヒューズ15から出ている端子線をそのまま給電線14C、14Dとして使用できるので、使用部品が増えることがない。ヒューズ15に端子線が無い場合においても、給電線14Cと給電線14Dとヒューズ15とを半田22で電気接合できるので電気的接続性の信頼度が向上する。
実施の形態1では、誘電体放電管3をガス流方向に1本だけ使用していた。実施の形態5では、図8に示すように、いわゆるタンデム配置された2本の誘電体放電管を用いる。それぞれの誘電体放電管の密封側を接地電極2の長手方向の中央部に突き合せて設置する。誘電体放電管3A(第1の誘電体放電管)の開口部(開放端3b)を原料ガス流入側に、誘電体放電管3B(第2の誘電体放電管)の開口部(開放端3b)をオゾン化ガス出口側にそれぞれ配置している。密閉用フタ20A(第1の密閉用フタ)は誘電体放電管3Aの開放端3bを覆っている。密閉用フタ20B(第2の密閉用フタ)は誘電体放電管3Bの開放端3bを覆っている。
3b 開放端、4 放電空間、4A スペーサ、5 構造体、5a 水路、
5b 貫通穴、6 冷却水、7 高電圧電源、8 高電圧配線、
13 給電ブラシ、14 給電棒、14C 給電線、15 ヒューズ、
20 密閉用フタ、20a 本体部、20b 円筒部、20c 開口、
21A 接着剤、21B 接着剤、22 半田、50 高圧タンク、
51 原料ガス入口、52 オゾン化ガス出口、53 高電圧線導入口、
54 冷却水入口、55 冷却水出口、100 オゾン発生装置。
Claims (5)
- 相対向する閉鎖端と開放端を有し、内面には電極が形成されている誘電体放電管と、
前記誘電体放電管の開放端を覆い、前記誘電体放電管と接着剤で固定されている密閉用フタと、
前記誘電体放電管の内面に形成されている電極に内接する給電ブラシと、
前記誘電体放電管と同心円状に配置されている接地電極と、を備え、
前記密閉用フタは相互に繋がっている本体部と円筒部を有し、
前記円筒部の内径は前記誘電体放電管の外径よりも大きいことを特徴とするオゾン発生装置。 - 前記給電ブラシと前記密閉用フタの間にヒューズが設置されていることを特徴とする請求項1に記載のオゾン発生装置。
- 相対向する閉鎖端と開放端を有し、内面には電極が形成されている誘電体放電管と、
前記誘電体放電管の開放端を覆い、前記誘電体放電管と接着剤で固定されている密閉用フタと、
前記誘電体放電管の内面に形成されている電極に半田で接続された給電線と、
前記誘電体放電管と同心円状に配置されている接地電極と、を備え、
前記密閉用フタは相互に繋がっている本体部と円筒部を有し、
前記円筒部の内径は前記誘電体放電管の外径よりも大きいことを特徴とするオゾン発生装置。 - 前記給電線と前記密閉用フタの間にヒューズが設置されていることを特徴とする請求項3に記載のオゾン発生装置。
- 相対向する閉鎖端と開放端を有し、内面には電極が形成されている第1の誘電体放電管と、
相互に繋がっている本体部と円筒部を有し、前記第1の誘電体放電管の開放端を覆い、前記第1の誘電体放電管と接着剤で固定されている第1の密閉用フタと、
相対向する閉鎖端と開放端を有し、内面には電極が形成されている第2の誘電体放電管と、
相互に繋がっている本体部と円筒部を有し、前記第2の誘電体放電管の開放端を覆い、前記第2の誘電体放電管と接着剤で固定されている第2の密閉用フタと、
前記第1の誘電体放電管および前記第2の誘電体放電管と同心円状に配置されている接地電極と、を備え、
前記第1の誘電体放電管および前記第2の誘電体放電管は閉鎖端を対面させて配置され、
前記第1の密閉用フタの円筒部の内径は前記第1の誘電体放電管の外径よりも大きく、
前記第2の密閉用フタの円筒部の内径は前記第2の誘電体放電管の外径よりも大きいことを特徴とするオゾン発生装置。
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WO2019229865A1 (ja) | 2018-05-30 | 2019-12-05 | 三菱電機株式会社 | オゾン発生装置 |
JP2021012159A (ja) * | 2019-07-09 | 2021-02-04 | 株式会社東芝 | 放電管診断装置、放電管診断方法、およびプログラム |
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BR202019005250U2 (pt) * | 2019-03-18 | 2020-09-29 | Antônio Flávio Dos Santos | Aparelho gerador de ozônio |
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