WO2016029396A1 - 光学镜头 - Google Patents

光学镜头 Download PDF

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Publication number
WO2016029396A1
WO2016029396A1 PCT/CN2014/085376 CN2014085376W WO2016029396A1 WO 2016029396 A1 WO2016029396 A1 WO 2016029396A1 CN 2014085376 W CN2014085376 W CN 2014085376W WO 2016029396 A1 WO2016029396 A1 WO 2016029396A1
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WO
WIPO (PCT)
Prior art keywords
lens
curved surface
optical
circular arc
curved
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PCT/CN2014/085376
Other languages
English (en)
French (fr)
Inventor
李家英
周朝明
孙博
高云峰
Original Assignee
深圳市大族激光科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 深圳市大族激光科技股份有限公司 filed Critical 深圳市大族激光科技股份有限公司
Priority to US15/324,049 priority Critical patent/US9841585B2/en
Priority to DE112014006673.7T priority patent/DE112014006673B4/de
Priority to JP2017517160A priority patent/JP2017519254A/ja
Priority to PCT/CN2014/085376 priority patent/WO2016029396A1/zh
Priority to CN201480078583.8A priority patent/CN106471414B/zh
Publication of WO2016029396A1 publication Critical patent/WO2016029396A1/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B23K26/0617—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis and with spots spaced along the common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/02—Telephoto objectives, i.e. systems of the type + - in which the distance from the front vertex to the image plane is less than the equivalent focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/12—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having three components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/34—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having four components only

Definitions

  • the present invention relates to the field of optics, and more particularly to an optical lens for use in laser processing.
  • laser processing is required to cut a thin line with a large aspect ratio or a cylindrical hole with a relatively large depth and a small aperture.
  • An optical lens comprising a first lens, a second lens and a third lens arranged in a common optical axis along a transmission direction of incident light, wherein the first lens and the second lens are both plano-convex positive lenses, the first The three lens is a meniscus type negative lens; the first lens includes a first curved surface and a second curved surface, the second lens includes a third curved surface and a fourth curved surface, and the third lens includes a fifth curved surface and a sixth curved surface, each lens The two curved surfaces are the light incident surface and the light exit surface of the lens, and the first to sixth curved surfaces are sequentially arranged along the transmission direction of the incident light; the first curved surface and the third curved surface are convex toward the transmission direction of the incident light, and the fifth The curved surface and the sixth curved surface are convex toward the transmission direction of the incident light; the third curved surface is directly connected by a plurality of circular arc surfaces having different focal points, and the focal points of the circular curved surfaces are
  • the third curved surface includes a first circular arc surface, a second circular arc surface, a third circular arc surface, a fourth circular arc surface, and a first optical axis arranged along the optical fiber in the transmission direction of the incident light.
  • the five arc faces, the first arc face, the second arc face, the third arc face, the fourth arc face, and the fifth arc face are sequentially arranged on the optical axis in the transmission direction of the incident light.
  • the first curved surface has a radius of curvature of 21 mm ⁇ 5%
  • the first lens has a central thickness of 3 mm ⁇ 5%.
  • the third curved surface has a radius of curvature of 68 mm ⁇ 5%
  • the second lens has a central thickness of 2 mm ⁇ 5%.
  • the third curved surface has a center thickness of 0.45 mm ⁇ 5%.
  • the fifth curved surface has a radius of curvature of -10 mm ⁇ 5%
  • the sixth curved surface has a radius of curvature of -30 mm ⁇ 5%
  • the third lens has a central thickness of 1 mm ⁇ 5%.
  • the second curved surface of the first lens and the third curved surface of the second lens have a pitch on the optical axis of 0.2 mm ⁇ 5%
  • the fourth curved surface and the third lens of the second lens has a pitch of 18 mm ⁇ 5% on the optical axis.
  • the optical lens further includes a fourth lens, and the first lens, the second lens, the third lens, and the fourth lens are sequentially arranged in an optical axis along a transmission direction of the incident light, the fourth lens It is a flat lens.
  • the fourth lens has a center thickness of 1 mm ⁇ 5%.
  • the fourth lens includes a seventh curved surface as a light incident surface and an eighth curved surface as a light exit surface, the seventh curved surface of the fourth lens and the sixth curved surface of the third lens are in the light
  • the spacing on the shaft is 1 mm ⁇ 5%.
  • the above optical lens can be applied to an optical system to process deep and thin holes, or to draw deep and thin lines.
  • the optical lens can be used to process a depth of 0.5 mm and a width of 0.05 mm, or to process the depth. It is a 0.5 mm round hole with a hole diameter of 0.05 mm.
  • FIG. 1 is a schematic structural view of an optical lens according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural view of a second lens of the optical lens of the embodiment shown in FIG. 1.
  • FIG. 2 is a schematic structural view of a second lens of the optical lens of the embodiment shown in FIG. 1.
  • Fig. 3 is a view showing a dispersion pattern of the optical lens of the embodiment shown in Fig. 1.
  • FIG. 4 is a diagram showing a modulation transfer function M.T.F of the optical lens of the embodiment shown in FIG. 1.
  • Fig. 5 is a graph showing the energy concentration of the optical lens of the embodiment shown in Fig. 1.
  • the positive and negative of the radius of curvature is based on the relative positional relationship between the intersection of the curved surface and the main optical axis and the spherical center of the curved surface.
  • the spherical center of the curved surface is left at the intersection, and the radius of curvature is negative; otherwise, the spherical center of the curved surface is The intersection is right and the radius of curvature is positive.
  • it is the object side on the left side of the optical lens and the image side on the right side of the optical lens.
  • a positive lens refers to a lens whose center thickness is larger than the edge thickness
  • a negative lens refers to a lens whose center thickness is smaller than the edge thickness.
  • FIG. 1 is a schematic structural diagram of an optical lens according to an embodiment of the present invention. For convenience of description, only parts related to the present invention are shown.
  • the optical lens includes a first lens L1, a second lens L2, and a third lens L3 which are sequentially arranged coaxially in the transmission direction of the incident light.
  • the first lens L1 includes a first curved surface S1 and a second curved surface S2, the second lens L2 includes a third curved surface S3 and a fourth curved surface S4, and the third lens L3 includes a fifth curved surface S5 and a sixth curved surface S6.
  • the two curved surfaces of each lens serve as a light incident surface and a light exit surface, respectively, and the first curved surface S1 to the sixth curved surface S6 are sequentially arranged in the direction in which the incident light is transmitted.
  • the first lens L1 is a plano-convex positive lens.
  • the first curved surface S1 of the first lens L1 is convex toward the object side.
  • the first curved surface S1 has a radius of curvature of 21 mm
  • the second curved surface S2 is a plane
  • the radius of curvature is infinite.
  • the center thickness d1 of the first lens L1 (i.e., the thickness of the lens on the optical axis) is 3 mm.
  • Each of the above parameters is an expected value, and it is understood that a certain tolerance is allowed, and the tolerance of each of the above parameters is 5%, that is, each parameter is allowed to vary within a range of ⁇ 5% of the expected value.
  • the second lens L2 is a plano-convex positive lens.
  • the third curved surface S3 of the second lens L2 is convex toward the object side.
  • the third curved surface S3 has a radius of curvature of 68 mm
  • the fourth curved surface S4 is a plane
  • the radius of curvature is infinite.
  • the center thickness d3 of the second lens L2 is 2 mm.
  • each of the above parameters of the second lens L2 is a desired value, allowing a certain tolerance to exist, and the tolerance range of each of the above parameters is still 5%, that is, each parameter is allowed to vary within a range of ⁇ 5% of the expected value.
  • the third curved surface S3 of the second lens L2 is directly connected by a plurality of circular arc surfaces having different focal points, and the focal points of the circular arc surfaces are all on the optical axis.
  • the third curved surface S3 includes a first circular arc ⁇ 1, a second circular arc ⁇ 2, a third circular arc ⁇ 3, a fourth circular arc ⁇ 4, and a fifth circular arc ⁇ 5 which are sequentially arranged in the optical axis along the transmission direction of the incident ray.
  • the focal points of the first arc ⁇ 1, the second arc ⁇ 2, the third arc ⁇ 3, the fourth arc ⁇ 4, and the fifth arc ⁇ 5 are respectively f1, f2, f3, f4, f5, and the transmission of these focal points along the incident ray
  • the directions are arranged in order on the optical axis.
  • the expected value of the center thickness d8 of the third curved surface S3 ie, the thickness of the third curved surface S3 on the optical axis
  • the parameter tolerance range is still 5%, that is, the parameter is allowed to be within a range of ⁇ 5% of the expected value. Change within.
  • the third lens L3 is a meniscus type negative lens.
  • the fifth curved surface S5 of the third lens L3 is convex toward the image side.
  • the radius of curvature of the fifth curved surface S5 is -10 mm.
  • the sixth curved surface S6 is convex toward the image side.
  • the sixth curved surface S6 has a radius of curvature of -30 mm.
  • the center thickness d5 of the third lens L3 is 1 mm.
  • each of the above parameters of the third lens L3 is a desired value, allowing a certain tolerance to exist, and the tolerance range of each of the above parameters is also 5%, that is, each parameter is allowed to vary within a range of ⁇ 5% of the expected value.
  • the inventors designed the distance between adjacent lenses as follows. Specifically, the expected value of the distance d2 between the exit surface of the first lens L1 (the second curved surface S2) and the incident surface of the second lens L2 (the third curved surface S3) on the optical axis is 0.2 mm, and the tolerance is 5%, that is, permission This pitch d2 varies within a range of ⁇ 5% of the expected value.
  • the expected value of the distance d4 between the exit surface of the second lens L2 (the fourth curved surface S4) and the incident surface of the third lens L3 (the fifth curved surface S5) on the optical axis is 18 mm, and the tolerance is 5%, that is, the spacing d4 is allowed to be
  • the expected value varies within a range of ⁇ 5%.
  • the optical lens further includes a fourth lens L1, and the first lens L1, the second lens L2, the third lens L3, and the fourth lens L4 are sequentially arranged coaxially along the transmission direction of the incident light.
  • the fourth lens L4 includes a seventh curved surface S7 as a light incident surface and an eighth curved surface S8 as a light outgoing surface.
  • the fourth lens L4 functions as a planar lens, and thus the radius of curvature of the seventh curved surface S7 and the eighth curved surface S8 is infinite.
  • the center thickness d7 of the fourth lens L4 is 1 mm.
  • the pitch d6 of the seventh curved surface S7 (light incident surface) of the fourth lens L4 and the sixth curved surface S6 (light emitting surface) of the third lens L3 on the optical axis is 1 mm.
  • each of the above parameters is an expected value, and a certain tolerance is allowed.
  • the tolerance range of each of the above parameters is also 5%, that is, each parameter is allowed to vary within a range of ⁇ 5% of the expected value.
  • the above lens material may be a general optical glass.
  • fused silica may be employed in order to extend the range of application to the ultraviolet laser.
  • the surface of the first lens L1 is spaced apart: 0.2 mm
  • the surface of the second lens L2 is spaced apart: 18mm
  • the surface of the third lens L3 is spaced apart: 1 mm
  • the optical system equipped with the above optical lens can use the laser of the working wavelength range of infrared light to ultraviolet light.
  • the processing quality of the optical lens to be applied will be described below with reference to FIGS. 3 to 5 for a laser having a wavelength of 550 nm.
  • Fig. 3 it is the geometric aberration diagram of the optical lens, and the diffuse ⁇ ⁇ 2 ⁇ m, indicating that the dispersion circle is very thin and the focus point energy is concentrated.
  • Fig. 5 it is the energy concentration curve of the optical lens, which is the result of special correction for the system. Due to the requirements of punching and scribe line, all the energy concentrates the aperture ⁇ or the line width is about 2 ⁇ m. Within, they have reached an ideal state.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Laser Beam Processing (AREA)

Abstract

一种光学镜头，包括沿入射光线的传输方向依次共光轴排列的第一透镜（L1）、第二透镜（L2）和第三透镜（L3），第一透镜和第二透镜均为平凸型正透镜，第三透镜为弯月型负透镜；第一透镜包括第一曲面（S1）和第二曲面（S2）、第二透镜包括第三曲面（S3）和第四曲面（S4）、第三透镜包括第五曲面（S5）和第六曲面（S6），每个透镜的两个曲面分别是透镜的光入射面和光出射面，第一至第六曲面沿入射光线的传输方向依次排布；第一曲面和第三曲面迎着入射光线的传输方向凸出，第五曲面和第六曲面向入射光线的传输方向凸出；第三曲面由多个焦点不同的圆弧面（Φ1，Φ2，Φ3，Φ4，Φ5）依次直接连接构成，且这些圆弧面的焦点（f1，f2，f3，f4，f5）均在光轴上。光学镜头可用于加工出深而细的孔，或是刻画深而细的线。

Description

光学镜头
【技术领域】
本发明涉及光学领域，尤其涉及一种应用于激光加工的光学镜头。
【背景技术】
在现代激光加工中，特殊的情况下要求激光加工能够切割出深宽比很大的细线，或者深度相对很大、孔径很小的圆柱形孔。例如，有的场合需要加工出深为0.5mm而宽度仅允许0.05mm的刻线，还有的场合需要加工出深度为0.5mm，而孔径只有0.05mm的圆柱孔。由于受到光学系统的孔径限制，若孔径太小，加工时将出现锐利的弥散斑，而且激光能量也不够。若将孔径增大，则加工出来的细线或深孔达不到既定的尺寸需求。
【发明内容】
基于此，有必要提供一种光学镜头可用于加工精细刻线或打孔。
一种光学镜头，包括沿入射光线的传输方向依次共光轴排列的第一透镜、第二透镜和第三透镜，所述第一透镜和第二透镜均为平凸型正透镜，所述第三透镜为弯月型负透镜；所述第一透镜包括第一曲面和第二曲面、第二透镜包括第三曲面和第四曲面、第三透镜包括第五曲面和第六曲面，每个透镜的两个曲面分别是透镜的光入射面和光出射面，第一至第六曲面沿入射光线的传输方向依次排布；第一曲面和第三曲面迎着入射光线的传输方向凸出，第五曲面和第六曲面向入射光线的传输方向凸出；所述第三曲面由多个焦点不同的圆弧面依次直接连接构成，且这些圆弧面的焦点均在光轴上。
在其中一个实施例中，所述第三曲面包括沿入射光线的传输方向依次共光轴排列的第一圆弧面、第二圆弧面、第三圆弧面、第四圆弧面和第五圆弧面，第一圆弧面、第二圆弧面、第三圆弧面、第四圆弧面和第五圆弧面的焦点沿入射光线的传输方向依次排布在光轴上。
在其中一个实施例中，所述第一曲面的曲率半径为21mm±5%，所述第一透镜的中心厚度为3mm±5%。
在其中一个实施例中，所述第三曲面的曲率半径为68mm±5%，所述第二透镜的中心厚度为2mm±5%。
在其中一个实施例中，所述第三曲面的中心厚度为0.45mm±5%。
在其中一个实施例中，所述第五曲面的曲率半径为-10mm±5%，所述第六曲面的曲率半径为-30mm±5%，所述第三透镜的中心厚度为1mm±5%。
在其中一个实施例中，所述第一透镜的第二曲面与第二透镜的第三曲面在光轴上的间距为0.2mm±5%，所述第二透镜的第四曲面与第三透镜的第五曲面在光轴上的间距为18mm±5%。
在其中一个实施例中，该光学镜头还包括第四透镜，所述第一透镜、第二透镜、第三透镜及第四透镜沿入射光线的传输方向依次共光轴排列，所述第四透镜为平面透镜。
在其中一个实施例中，所述第四透镜的中心厚度为1mm±5%。
在其中一个实施例中，所述第四透镜包括作为光入射面的第七曲面和作为光出射面的第八曲面，所述第四透镜的第七曲面与第三透镜的第六曲面在光轴上的间距为1mm±5%。
上述光学镜头应用至光学系统中可加工出深而细的孔，或是刻画深而细的线，例如该光学镜头可用于加工深为0.5mm而宽度为0.05mm的刻线，或者加工出深度为0.5mm，孔径为0.05mm的圆孔。
【附图说明】
通过附图中所示的本发明的优选实施例的更具体说明，本发明的上述及其它目的、特征和优势将变得更加清晰。在全部附图中相同的附图标记指示相同的部分，且并未刻意按实际尺寸等比例缩放绘制附图，重点在于示出本发明的主旨。
图1是本发明一实施例的光学镜头的结构示意图。
图2是图1所示实施例的光学镜头的第二透镜的结构示意图。
图3是图1所示实施例的光学镜头的弥散斑图。
图4是图1所示实施例的光学镜头的调制传递函数M.T.F图。
图5是图1所示实施例的光学镜头的能量集中度曲线图。
【具体实施方式】
为使本发明的目的、特征和优点能够更为明显易懂，下面结合附图对本发明的具体实施方式做详细的说明。
需要说明的是，本说明书中光的传播方向是从附图的左边向右边传播。曲率半径的正负以曲面与主光轴的交点以及曲面的球心之间的相对位置关系为准，曲面的球心在该交点以左，则曲率半径为负；反之，曲面的球心在该交点以右，则曲率半径为正。另外，位于光学镜头左边的为物方，位于光学镜头右边的为像方。正透镜是指透镜的中心厚度大于边缘厚度的透镜，负透镜是指透镜的中心厚度小于边缘厚度的透镜。
图1为本发明一实施例提供的光学镜头的结构示意图，为了便于说明，仅示出了与本发明相关的部分。该光学镜头包括沿入射光线的传输方向依次共轴排列的第一透镜L1、第二透镜L2及第三透镜L3。
其中，第一透镜L1包括第一曲面S1和第二曲面S2，第二透镜L2包括第三曲面S3和第四曲面S4，第三透镜L3包括第五曲面S5和第六曲面S6。每个透镜的两个曲面分别作为光入射面和光出射面，第一曲面S1至第六曲面S6沿入射光传输的方向依次排布。
第一透镜L1为平凸型正透镜。第一透镜L1的第一曲面S1向物方凸出。第一曲面S1的曲率半径为21mm，第二曲面S2为平面，曲率半径为无穷大。第一透镜L1的中心厚度d1（即透镜在光轴上的厚度）为3mm。上述各参数均为期望值，可以理解允许存在一定公差，上述各参数的公差范围为5%，即允许各参数在期望值±5%的范围内变化。
第二透镜L2为平凸型正透镜。第二透镜L2的第三曲面S3向物方凸出。第三曲面S3的曲率半径为68mm，第四曲面S4为平面，曲率半径为无穷大。第二透镜L2的中心厚度d3为2mm。类似的，第二透镜L2的上述各参数均为期望值，允许存在一定公差，上述各参数的公差范围仍为5%，即允许各参数在期望值±5%的范围内变化。
请同时参考图2，第二透镜L2的第三曲面S3由多个焦点不同的圆弧面依次直接连接构成，且这些圆弧面的焦点均在光轴上。该第三曲面S3包括沿入射光线的传输方向依次共光轴排列的第一圆弧Φ1、第二圆弧Φ2、第三圆弧Φ3、第四圆弧Φ4和第五圆弧Φ5。第一圆弧Φ1、第二圆弧Φ2、第三圆弧Φ3、第四圆弧Φ4和第五圆弧Φ5的焦点分别为f1，f2，f3，f4，f5，这些焦点沿入射光线的传输方向依次排布在光轴上。该第三曲面S3的中心厚度d8（即第三曲面S3在光轴上的厚度）的期望值为0.45mm，同样地该参数公差范围仍为5%，即允许该参数在期望值±5%的范围内变化。
第三透镜L3为弯月型负透镜。第三透镜L3的第五曲面S5向像方凸出。第五曲面S5的曲率半径为-10mm。第六曲面S6向像方凸出。第六曲面S6的曲率半径为-30mm。第三透镜L3的中心厚度d5为1mm。类似的，第三透镜L3的上述各参数均为期望值，允许存在一定公差，上述各参数的公差范围同样为5%，即允许各参数在期望值±5%的范围内变化。
另外，发明人对各相邻透镜之间的距离进行了如下设计。具体地，第一透镜L1的出射面（第二曲面S2）与第二透镜L2的入射面（第三曲面S3）在光轴上的间距d2的期望值为0.2mm，公差为5%，即允许该间距d2在期望值±5%的范围内变化。第二透镜L2的出射面（第四曲面S4）与第三透镜L3的入射面（第五曲面S5）在光轴上的间距d4的期望值为18mm，公差为5%，即允许该间距d4在期望值±5%的范围内变化。
在一实施例中，该光学透镜还包括第四透镜L4，第一透镜L1、第二透镜L2、第三透镜L3及第四透镜L4沿入射光线的传输方向依次共轴排列。
第四透镜L4包括作为光入射面的第七曲面S7和作为光出射面的第八曲面S8。第四透镜L4作为一保护器件，为平面透镜，因此第七曲面S7和第八曲面S8的曲率半径均是无穷大。第四透镜L4的中心厚度d7为1mm。另外，第四透镜L4的第七曲面S7（光入射面）与第三透镜L3的第六曲面S6（光出射面）在光轴上的间距d6为1mm。同样的，上述各参数均为期望值，允许存在一定公差，上述各参数的公差范围同样为5%，即允许各参数在期望值±5%的范围内变化。
上述透镜材料可为一般的光学玻璃。在一些实施例中，为了可以扩展应用到紫外激光的范围，可以采用熔石英。
通过以下简列方式对上述实施例的方案进行更清晰的说明：
第一透镜L1
第一曲面S1曲率半径：21mm
第二曲面S2曲率半径：∞
中心厚度：3
材料：SILICA
第二透镜L2
第三曲面S3曲率半径：68mm
第四曲面S4曲率半径：∞
中心厚度：2mm
材料：SILICA
与第一透镜L1曲面间隔：0.2mm
第三透镜L3
第五曲面S5曲率半径：-10mm
第六曲面S6曲率半径：-30mm
中心厚度：1mm
材料：SILICA
与第二透镜L2曲面间隔：18mm
第四透镜L4
第七曲面S7曲率半径：∞
第八曲面S8曲率半径：∞
中心厚度：1mm
材料：SILICA
与第三透镜L3曲面间隔：1mm
配备上述光学镜头的光学系统可以采用红外光到紫外光的工作波段的激光。
下面针对波长为550nm的激光，结合图3至图5说明应用该光学镜头的加工质量。该光学系统的具体参数有：f(焦距)＝60mm；D/f(相对孔径)＝1/3.5。
如图3所示，是该光学镜头的几何像差图，弥散斑ΔΦ≈2μm，说明弥散圆很细，聚焦点能量集中。
如图4所示，是该光学镜头的传递函数M.T.F图，当分辨率达到200线对时，M.T.F还有0.4。
如图5所示，是该光学镜头的能量集中度曲线图，这是为该系统特别校正的结果，由于打孔和刻线的要求，所有能量都集中孔径ΔΦ或是线宽约为2μm之内，都达到了理想状态。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种光学镜头，其特征在于，包括沿入射光线的传输方向依次共光轴排列的第一透镜、第二透镜和第三透镜，所述第一透镜和第二透镜均为平凸型正透镜，所述第三透镜为弯月型负透镜；所述第一透镜包括第一曲面和第二曲面、第二透镜包括第三曲面和第四曲面、第三透镜包括第五曲面和第六曲面，每个透镜的两个曲面分别是透镜的光入射面和光出射面，第一至第六曲面沿入射光线的传输方向依次排布；第一曲面和第三曲面迎着入射光线的传输方向凸出，第五曲面和第六曲面向入射光线的传输方向凸出；所述第三曲面由多个焦点不同的圆弧面依次直接连接构成，且这些圆弧面的焦点均在光轴上。
  2. 根据权利要求1所述的光学镜头，其特征在于，所述第三曲面包括沿入射光线的传输方向依次共光轴排列的第一圆弧面、第二圆弧面、第三圆弧面、第四圆弧面和第五圆弧面，第一圆弧面、第二圆弧面、第三圆弧面、第四圆弧面和第五圆弧面的焦点沿入射光线的传输方向依次排布在光轴上。
  3. 根据权利要求1所述的光学镜头，其特征在于，所述第一曲面的曲率半径为21mm±5%，所述第一透镜的中心厚度为3mm±5%。
  4. 根据权利要求1所述的光学镜头，其特征在于，所述第三曲面的曲率半径为68mm±5%，所述第二透镜的中心厚度为2mm±5%。
  5. 根据权利要求4所述的光学镜头，其特征在于，所述第三曲面的中心厚度为0.45mm±5%。
  6. 根据权利要求1所述的光学镜头，其特征在于，所述第五曲面的曲率半径为-10mm±5%，所述第六曲面的曲率半径为-30mm±5%，所述第三透镜的中心厚度为1mm±5%。
  7. 根据权利要求1所述的光学镜头，其特征在于，所述第一透镜的第二曲面与第二透镜的第三曲面在光轴上的间距为0.2mm±5%，所述第二透镜的第四曲面与第三透镜的第五曲面在光轴上的间距为18mm±5%。
  8. 根据权利要求1-7项中任意一项所述的光学镜头，其特征在于，还包括第四透镜，所述第一透镜、第二透镜、第三透镜及第四透镜沿入射光线的传输方向依次共光轴排列，所述第四透镜为平面透镜。
  9. 根据权利要求8所述的光学镜头，其特征在于，所述第四透镜的中心厚度为1mm±5%。
  10. 根据权利要求8所述的光学镜头，其特征在于，所述第四透镜包括作为光入射面的第七曲面和作为光出射面的第八曲面，所述第四透镜的第七曲面与第三透镜的第六曲面在光轴上的间距为1mm±5%。
PCT/CN2014/085376 2014-08-28 2014-08-28 光学镜头 WO2016029396A1 (zh)

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