WO2016004709A1 - Oled显示器及其制备方法 - Google Patents
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- WO2016004709A1 WO2016004709A1 PCT/CN2014/089908 CN2014089908W WO2016004709A1 WO 2016004709 A1 WO2016004709 A1 WO 2016004709A1 CN 2014089908 W CN2014089908 W CN 2014089908W WO 2016004709 A1 WO2016004709 A1 WO 2016004709A1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 239000010410 layer Substances 0.000 claims abstract description 132
- 239000000758 substrate Substances 0.000 claims abstract description 75
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- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 238000001312 dry etching Methods 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 3
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/813—Anodes characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/822—Cathodes characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/856—Arrangements for extracting light from the devices comprising reflective means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
- H10K59/80515—Anodes characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80521—Cathodes characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/875—Arrangements for extracting light from the devices
- H10K59/878—Arrangements for extracting light from the devices comprising reflective means
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
Definitions
- Embodiments of the present invention relate to an OLED display and a method of fabricating the same.
- OLED organic light emitting diode
- OLEDs can be classified into top-emitting OLED displays and bottom-emitting OLED displays.
- a transparent anode 11, an organic material functional layer 30, and an opaque metal cathode 12, which are sequentially disposed on the base substrate 10, are included. Since the anode of the bottom-emitting OLED display is transparent, the microcavity effect is not significant in the bottom-emitting OLED display, and the viewing angle of the bottom emission is larger than that of the top emission.
- the viewing angle of the bottom-emitting OLED display is larger than that of the top-emitting OLED display, in actual use, it is desirable to use the OLED display to have a larger viewing angle to meet the needs of different angle viewing.
- an OLED display includes a plurality of sub-pixel units, each of the sub-pixel units including a first electrode, an organic material functional layer, and a second electrode, which are sequentially disposed on a base substrate;
- the sub-pixel unit further includes: a first buffer layer disposed between the base substrate and the first electrode;
- a surface of the first buffer layer corresponding to the first electrode and away from the substrate substrate has a concave shape
- the first electrode is a transparent electrode
- the second electrode is an opaque metal electrode
- the first electrode, the organic material functional layer, and the second electrode are conformally formed at the recess of the first buffer layer.
- the surface of the recess of the first buffer layer is a curved surface that is curved toward the side of the substrate substrate.
- the surface is a curved surface.
- the first buffer layer has a thickness of 2 ⁇ m to 5 ⁇ m.
- the material of the first buffer layer comprises polyimide.
- the sub-pixel unit further includes a thin film transistor disposed between the base substrate and the first buffer layer.
- the first electrode is electrically connected to a drain of the thin film transistor through at least a via provided on the first buffer layer.
- the OLED display further includes a second buffer layer disposed between the base substrate and the thin film transistor, the second buffer layer being in contact with the substrate substrate.
- the material of the second buffer layer includes at least one of silicon oxide and silicon nitride.
- a method of fabricating an OLED display comprising:
- a first buffer layer on the base substrate; wherein, in a region corresponding to the first electrode in each of the sub-pixel units, a surface of the first buffer layer away from a side of the substrate substrate has a concave arc shape shape;
- the first electrode is a transparent electrode
- the second electrode is an opaque metal electrode
- the forming the first buffer layer on the base substrate comprises:
- the first buffer layer film corresponding to the opening of the mask is dry etched by a shielding effect of the patterned mask to form the first buffer layer having a concave shape on the surface;
- the opening of the mask corresponds to a predetermined area of the sub-pixel unit, and an area of the opening near a side of the first buffer layer film is larger than an area away from a side of the first buffer layer film.
- the method further includes forming a thin film transistor between the base substrate and the first buffer layer in each of the sub-pixel units.
- the dry etching of the first buffer layer film includes plasma etching.
- An embodiment of the present invention provides a surface having a recessed arc shape by a surface of the first buffer layer and the first electrode corresponding portion and away from the substrate substrate, so that the surface of the second electrode Forming an arcuate shape having a depression such that light emitted from the luminescent layer of the functional layer of the organic material, when reaching the opaque second electrode surface, causes the reflected light to diverge more from the side of the transparent first electrode, thereby making the difference
- the exit rate of the angled light increases, which in turn increases the viewing angle and luminous intensity of the OLED display.
- FIG. 1 is a schematic structural view of an OLED display provided by the prior art
- FIG. 2 is a schematic structural diagram 1 of an OLED display according to an embodiment of the present invention.
- FIG. 3 is a schematic diagram of an OLED display providing an increased viewing angle of an outgoing light according to an embodiment of the present invention
- FIG. 4 is a schematic structural diagram 2 of an OLED display according to an embodiment of the present disclosure.
- FIG. 5 is a schematic structural diagram 3 of an OLED display according to an embodiment of the present disclosure.
- FIGS. 6-8 are schematic diagrams showing a process of forming a first buffer layer having a curved arc shape on a surface according to an embodiment of the present invention.
- the OLED display 01 includes a plurality of sub-pixel units, and each of the sub-pixel units includes a substrate disposed in sequence. a first electrode 20 on the substrate 10, an organic material functional layer 30, and a second electrode 40; further the sub-pixel unit further includes: a first buffer disposed between the base substrate 10 and the first electrode 20 Layer 50. a surface of the first buffer layer 50 corresponding to the first electrode 20 and away from the substrate substrate 10 has a concave arc shape; the first electrode 20 is a transparent electrode, and the second electrode 40 is an opaque metal electrode.
- the recess having an arc shape means that the surface of the first buffer layer 50 at the recess is a curved surface which is curved toward the substrate substrate side.
- the surface of the first buffer layer 50 at the recess may be any suitable curved surface or other suitable shape that is curved toward the substrate substrate side.
- the interface between the organic material functional layer 30 and the second electrode 40 is a plane, and light emitted from the light-emitting layer of the organic material functional layer 30 is incident on the light in a direction approximately perpendicular to the interface.
- the surface of the second electrode 40, then the reflected light is also emitted from the first electrode 20 in a direction perpendicular to the interface, that is, for example, the outgoing light 1 in FIG.
- the interface between the organic material functional layer 30 and the second electrode 40 is an arc-shaped interface protruding toward the first electrode 20.
- the first electrode 20, the organic material functional layer 30, and the second electrode 40 are conformally formed in the recess of the first buffer layer, and therefore naturally have a shape curved toward the substrate substrate side.
- the incident light rays form a certain incidence with the normal direction.
- the angle, according to the principle of reflection, the reflected light will also exit from the first electrode 20 at an angle, that is, for example, the outgoing light 2 in FIG.
- the material of the first buffer layer 50 is not limited as long as it can form an arc shape having a recess from a side surface of the base substrate 10.
- an insulating layer is disposed between the first buffer layer 50 and the first electrode 20, and is specifically set according to actual conditions, and details are not described herein again.
- the first buffer layer 50 is located below the first electrode 20, that is, the first buffer layer 50 located below is prepared to be formed, and is formed after the first electrode 20 located above, and thus, in the first buffer
- the upper surface of the layer 50 corresponding to the first electrode 20 has a concave curved shape In the case where the first electrode 20 is formed thereon, it also has a concave arc shape, and the organic material functional layer 30 and the second electrode 40 located above the first electrode 20 also have a concave arc shape.
- the first electrode 20 can be an anode or a cathode
- the second electrode 40 can be a cathode or an anode. That is, if the first electrode 20 is an anode, the second electrode 40 is a cathode; if the first electrode 20 is a cathode, the second electrode 40 is an anode.
- the organic material functional layer 30 may include at least a light-emitting layer, and further may further include an electron transport layer and a hole transport layer, on the basis of which the organic material may be improved in efficiency of injecting the light-emitting layer into the light-emitting layer.
- the functional layer 30 may further include an electron injection layer disposed between the cathode and the electron transport layer, and a hole injection layer disposed between the hole transport layer and the anode.
- the illuminating layer of the three sub-pixel units in one pixel unit may include a luminescent material of red, green, and blue light; of course, the luminescent layer may include only luminescent materials of white light, which is not limited herein.
- the OLED display 01 may be a passive matrix type display or an active matrix type display, which is not limited herein.
- the adjacent first electrodes 20 may be separated by a pixel isolation layer, and details are not described herein again.
- An embodiment of the present invention provides an OLED display 01, including a plurality of sub-pixel units, each of the sub-pixel units including a first electrode 20, an organic material functional layer 30, and a second electrode sequentially disposed on the base substrate 10. 40. Further, the sub-pixel unit further includes: a first buffer layer 50 disposed between the base substrate 10 and the first electrode 20. a surface of the first buffer layer 50 corresponding to the first electrode 20 and away from the substrate substrate 10 has a concave arc shape; the first electrode 20 is a transparent electrode, and the second electrode 40 is an opaque metal electrode.
- the first buffer layer 50 is corresponding to the first electrode 20 and
- the surface away from the side of the base substrate 10 is disposed to have a concave arc shape such that the surface of the second electrode 40 is formed into an arc shape having a depression such that it is emitted from the light emitting layer of the organic material functional layer 30.
- the first buffer layer 50 may have a thickness of 2 ⁇ m to 5 ⁇ m.
- the OLED display 01 is not made too thick to meet the market demand for thinning, and the first buffer layer 50 having a concave curved shape surface cannot be prepared because it is too thin.
- the material of the first buffer layer 50 may be polyimide (PI).
- the structure of the PI is not dense.
- the first buffer layer 50 having a concave curved surface is formed by, for example, dry etching, the portion of the PI material to be recessed can be easily etched. Drop and etch the desired effect.
- the OLED display 01 provided by the embodiment of the present invention is an active matrix OLED display, that is, as shown in FIG. 4, considering that the passive matrix is applied to a large-size display.
- Each of the sub-pixel units of the OLED display 01 may further include a thin film transistor 60 disposed between the base substrate 10 and the first buffer layer 50.
- the thin film transistor 60 includes a gate 601, a gate insulating layer 602, a semiconductor active layer 603, a source 604, and a drain 605; and the thin film transistor 60 may be a top gate type or a bottom gate type.
- the OLED display 01 further includes a gate line electrically connected to the gate 601, a gate line lead (not shown), and the like, and a data line and a data line lead electrically connected to the source 604 (Fig. Not identified in the middle).
- the embodiment of the present invention is, for example, electrically connecting the drain 605 to the first electrode 20, and the first electrode 20 passes through a via provided on the first buffer layer 50 and the The drain 605 of the thin film transistor is electrically connected.
- the OLED display 01 further includes a substrate disposed on the substrate
- the second buffer layer 70 between the 10 and the thin film transistor 60 is in contact with the base substrate 10.
- the second buffer layer 70 may be a single layer or a multilayer structure, and the material thereof may be, for example, SiN (silicon nitride), SiOx (silicon oxide), or the like.
- the second buffer layer 70 helps to improve the surface flatness and adhesion of the base substrate 10, and also contributes to improvement of water vapor permeability resistance.
- the OLED display 01 should further include an encapsulation layer for encapsulating an organic material, wherein the encapsulation layer may be a thin film package or may be The substrate package is not limited herein.
- the embodiment of the invention further provides a method for preparing an OLED display, the OLED display 01 comprising a plurality of sub-pixel units.
- the method includes the following steps:
- a first buffer layer 50 is formed on the base substrate 10; wherein, in a region corresponding to the first electrode 20 in each of the sub-pixel units, the first buffer layer 50 is away from the The surface on one side of the base substrate 10 has a concave arc shape.
- the first electrode 20, the organic material functional layer 30, and the second layer are sequentially formed in a region of each of the sub-pixel units. Electrode 40.
- the first electrode 20 is a transparent electrode
- the second electrode 40 is an opaque metal electrode.
- the method of forming the first buffer layer 50 having a curved arcuate shape on the surface is not limited herein.
- the upper surface of the corresponding portion of the first buffer layer 50 and the first electrode 20 has a recess.
- the first electrode 20 formed thereon also has a concave arc shape
- the organic material functional layer 30 and the second electrode 40 located above the first electrode 20 also have a concave arc. Shape.
- An embodiment of the present invention provides a method for fabricating an OLED display including a plurality of sub-pixel units, including: forming a first buffer layer 50 on a substrate substrate 10; wherein, in each of the sub-pixel units, a corresponding first electrode a region of the first buffer layer 50 away from the surface of the base substrate 10 having a concave arc shape; on the substrate on which the first buffer layer 50 is formed, at each of the sub-pixels a region of the cell, which sequentially forms the first electrode 20, the organic material functional layer 30, and the The two electrodes 40; wherein the first electrode 20 is a transparent electrode, and the second electrode 40 is an opaque metal electrode.
- a curved shape having a recess is formed on a surface of the first buffer layer 50 corresponding to the first electrode 20 and away from the substrate 10 to make the second electrode 40
- the surface is formed into an arcuate shape having a depression such that light emitted from the light-emitting layer of the organic material functional layer 30 causes the reflected light to be more divergent from the side of the transparent first electrode 20 when it reaches the surface of the opaque second electrode 40.
- the emission is such that the exit rate of light at different angles is increased, thereby increasing the viewing angle and luminous intensity of the OLED display 01.
- step S10 may specifically include the following processes:
- a first buffer layer film 50a is formed on the base substrate 10.
- the structure of the PI is not dense, when the first buffer layer 50 having a concave curved surface is formed by dry etching as described below, the portion of the PI material that needs to be recessed can be easily etched away. And the desired effect is etched, and the material of the first buffer layer film 50a is a PI material.
- the first buffer layer film 50a corresponding to the opening 801 of the mask is dry etched by the shielding action of the patterned mask 80, as shown in FIG.
- the surface has the first buffer layer 50 having a concave curved shape.
- the opening 801 of the mask corresponds to a predetermined area of the sub-pixel unit, and an area of the opening 801 adjacent to the side of the first buffer layer film 50a is larger than a side away from the side of the first buffer layer film 50a. area.
- the dry etching is a technique of performing thin film etching by using a plasma.
- a mask 80 having a shape as shown in FIG. 7 is used as a shield, that is, the mask 80 is used.
- the shadow effect the region blocked by the mask plate 80 vertically (the mask plate 80 has a gap with the first buffer layer film 50a in this region) has a small plasma concentration, so the closer to the edge of the mask 80
- the etching effect is less obvious, and the etched arc structure is shallower; while the area of the opening 801 of the reticle is directly entered by the plasma, the plasma concentration thereof is large, and the plasma concentration is large.
- the effect of the etch is also more pronounced and the depth of the etch will be deeper.
- the predetermined area is an area larger than a certain recess depth in a region of the corresponding first electrode 20 of each of the sub-pixel units.
- Dry etching the first buffer layer film 50a corresponding to the opening 801 of the mask means that the plasma entering from the opening 801 is as long as the mask 80 and the first buffer layer film There is a gap between 50a, and the plasma can be reached, and the first buffer layer film 50a can be etched.
- the first buffer layer 50 may have a thickness of 2 ⁇ m to 5 ⁇ m.
- the OLED display 01 is not made too thick to meet the market demand for thinning, and the first buffer layer 50 having a concave curved shape surface cannot be prepared because it is too thin.
- the material of the first buffer layer 50 may be polyimide (PI).
- the OLED display 01 provided by the embodiment of the present invention is an active matrix OLED display, that is, as shown in FIG. 4, In each of the sub-pixel units of the OLED display 01, a thin film transistor 60 between the base substrate 10 and the first buffer layer 50 is also formed.
- the thin film transistor 60 includes a gate 601, a gate insulating layer 602, a semiconductor active layer 603, a source 604, and a drain 605; and the thin film transistor 60 may be a top gate type or a bottom gate type.
- the first electrode 20 is electrically connected to the drain 605 of the thin film transistor through at least a via formed on the first buffer layer 50.
- the method further includes: forming a second buffer layer 70 between the base substrate 10 and the thin film transistor 60, the second buffer layer 70 and the base substrate 10 contact.
- the second buffer layer 70 may be a single layer or a multilayer structure, and the material thereof may be, for example, SiN (silicon nitride), SiOx (silicon oxide), or the like.
- the second buffer layer 70 helps to improve the surface flatness and adhesion of the base substrate 10, and also contributes to improvement of water vapor permeability resistance.
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Abstract
Description
Claims (14)
- 一种OLED显示器,包括多个子像素单元,每个所述子像素单元均包括依次设置在衬底基板上的第一电极、有机材料功能层、第二电极;其中,所述子像素单元还包括:设置在所述衬底基板和所述第一电极之间的第一缓冲层;所述第一缓冲层与所述第一电极对应部分且远离所述衬底基板一侧的表面具有凹陷的形状;所述第一电极为透明电极,所述第二电极为不透明金属电极。
- 根据权利要求1所述的OLED显示器,其中,所述第一电极、所述有机材料功能层和所述第二电极共形地形成在所述第一缓冲层的所述凹陷处。
- 根据权利要求1或2所述的OLED显示器,其中,所述第一缓冲层的所述凹陷处的表面为向所述衬底基板侧弯曲的曲面。
- 根据权利要求3所述的OLED显示器,其中,所述曲面为弧面。
- 根据权利要求1至4任一项所述的OLED显示器,其中,所述第一缓冲层的厚度为2μm~5μm。
- 根据权利要求1至5任一项所述的OLED显示器,其中,所述第一缓冲层的材料包括聚酰亚胺。
- 根据权利要求1至6任一项所述的OLED显示器,其中,所述子像素单元还包括设置在所述衬底基板和所述第一缓冲层之间的薄膜晶体管。
- 根据权利要求7所述的OLED显示器,其中,所述第一电极至少通过设置在所述第一缓冲层上的过孔与所述薄膜晶体管的漏极电连接。
- 根据权利要求7所述的OLED显示器,其中,所述OLED显示器还包括设置在所述衬底基板和所述薄膜晶体管之间的第二缓冲层,所述第二缓冲层与所述衬底基板接触。
- 根据权利要求9所述的OLED显示器,其中,所述第二缓冲层的材料包括氧化硅和氮化硅中的至少一种。
- 一种OLED显示器的制备方法,所述OLED显示器包括多个子像素单元;所述方法包括:在衬底基板上形成第一缓冲层;其中,在每个所述子像素单元中对应第一电极的区域,所述第一缓冲层远离所述衬底基板一侧的表面具有凹陷的弧形形状;在形成有所述第一缓冲层的基板上,在每个所述子像素单元的区域,依次形成所述第一电极、有机材料功能层、第二电极;其中,所述第一电极为透明电极,所述第二电极为不透明金属电极。
- 根据权利要求11所述的方法,其中,所述在衬底基板上形成第一缓冲层包括:在所述衬底基板上形成第一缓冲层薄膜;利用图形化的掩模的遮蔽作用,对与所述掩模的开口对应的所述第一缓冲层薄膜进行干法刻蚀,形成表面具有凹陷的形状的所述第一缓冲层;其中,所述掩模板的开口与所述子像素单元的预定区域对应,且所述开口的靠近所述第一缓冲层薄膜一侧的面积大于远离所述第一缓冲层薄膜一侧的面积。
- 根据权利要求11或12所述的方法,还包括,在每个所述子像素单元中,在所述衬底基板和所述第一缓冲层之间形成薄膜晶体管。
- 根据权利要求11所述的方法,其中,对所述第一缓冲层薄膜进行的干法刻蚀包括等离子体蚀刻。
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