WO2015147294A1 - 表面粗化方法 - Google Patents

表面粗化方法 Download PDF

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Publication number
WO2015147294A1
WO2015147294A1 PCT/JP2015/059755 JP2015059755W WO2015147294A1 WO 2015147294 A1 WO2015147294 A1 WO 2015147294A1 JP 2015059755 W JP2015059755 W JP 2015059755W WO 2015147294 A1 WO2015147294 A1 WO 2015147294A1
Authority
WO
WIPO (PCT)
Prior art keywords
organic resin
layer
substrate
surface roughening
etching
Prior art date
Application number
PCT/JP2015/059755
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
安信 染谷
坂本 力丸
高広 岸岡
Original Assignee
日産化学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日産化学工業株式会社 filed Critical 日産化学工業株式会社
Priority to JP2016510567A priority Critical patent/JP6551691B2/ja
Priority to CN201580011270.5A priority patent/CN106061627B/zh
Priority to KR1020167020998A priority patent/KR102358180B1/ko
Publication of WO2015147294A1 publication Critical patent/WO2015147294A1/ja

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259Multistep manufacturing methods
    • H01L27/1262Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • H10K50/854Arrangements for extracting light from the devices comprising scattering means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/331Nanoparticles used in non-emissive layers, e.g. in packaging layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/875Arrangements for extracting light from the devices
    • H10K59/877Arrangements for extracting light from the devices comprising scattering means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

Definitions

  • An object of the present invention is to provide a method for roughening the surface of a substrate.
  • the present invention utilizes a layer in which an inorganic substance and an organic substance are mixed on the substrate, and utilizes a difference in etching rate between the inorganic and organic oxygen gas to etch the surface of the substrate where oxygen gas is etched and the surface roughness not etched.
  • the surface of the substrate can be roughened by etching with oxygen gas or fluorine-based gas using the surface roughened layer as a mask, for example, fine irregularities can be formed on the substrate,
  • the organic resin layer (A) has a thickness of 0.001 to 10 ⁇ m, or 0.005 to 3.0 ⁇ m
  • the organic resin layer (B) has a thickness of 0.001 to 10 ⁇ m, or 0.005. It has a film thickness of ⁇ 3.0 ⁇ m.
  • the solution was added to 0.38 g, tetramethoxymethyl glycoluril 0.13 g, and propylene glycol monomethyl ether 28.8 g. Thereafter, the solution was filtered using a polyethylene microfilter having a pore diameter of 0.2 ⁇ m to prepare a solution of the composition (a3-4).

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Materials For Photolithography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2015/059755 2014-03-28 2015-03-27 表面粗化方法 WO2015147294A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016510567A JP6551691B2 (ja) 2014-03-28 2015-03-27 表面粗化方法
CN201580011270.5A CN106061627B (zh) 2014-03-28 2015-03-27 表面粗化方法
KR1020167020998A KR102358180B1 (ko) 2014-03-28 2015-03-27 표면조화방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-068009 2014-03-28
JP2014068009 2014-03-28

Publications (1)

Publication Number Publication Date
WO2015147294A1 true WO2015147294A1 (ja) 2015-10-01

Family

ID=54195798

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/059755 WO2015147294A1 (ja) 2014-03-28 2015-03-27 表面粗化方法

Country Status (5)

Country Link
JP (1) JP6551691B2 (ko)
KR (1) KR102358180B1 (ko)
CN (1) CN106061627B (ko)
TW (1) TWI651017B (ko)
WO (1) WO2015147294A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017099596A1 (en) 2015-12-08 2017-06-15 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Improved light emission in oleds

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102492366B1 (ko) * 2015-09-15 2023-01-27 닛산 가가쿠 가부시키가이샤 습식처리에 의한 표면조화방법
TWI803390B (zh) * 2022-07-15 2023-05-21 三福化工股份有限公司 蝕刻液組成物及其蝕刻方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539583A (ja) * 1991-08-02 1993-02-19 Dainippon Printing Co Ltd 部分蒸着化粧シートの製造方法
JP2013525253A (ja) * 2010-04-30 2013-06-20 コーニング インコーポレイテッド 防眩表面処理方法およびその物品
WO2013148129A1 (en) * 2012-03-26 2013-10-03 3M Innovative Properties Company Article and method of making the same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
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JP2006107744A (ja) 2004-09-30 2006-04-20 Toshiba Corp 有機エレクトロルミネッセンス表示装置
JP4887612B2 (ja) * 2004-10-20 2012-02-29 日油株式会社 減反射材及びそれを用いた電子画像表示装置
CN1921156A (zh) * 2005-08-26 2007-02-28 鸿富锦精密工业(深圳)有限公司 发光二极体光源模组及其制造方法
JP5214284B2 (ja) 2008-03-10 2013-06-19 株式会社東芝 発光装置用光取り出し層、およびそれを用いた有機エレクトロルミネッセンス素子
JP6174300B2 (ja) * 2008-12-30 2017-08-02 スリーエム イノベイティブ プロパティズ カンパニー 反射防止物品及びこれを作製する方法
US8933526B2 (en) * 2009-07-15 2015-01-13 First Solar, Inc. Nanostructured functional coatings and devices
WO2011118108A1 (ja) * 2010-03-23 2011-09-29 株式会社朝日ラバー シリコーン樹脂製反射基材、その製造方法、及びその反射基材に用いる原材料組成物
JP2012175052A (ja) * 2011-02-24 2012-09-10 Stanley Electric Co Ltd 半導体発光装置の製造方法
US8692446B2 (en) * 2011-03-17 2014-04-08 3M Innovative Properties Company OLED light extraction films having nanoparticles and periodic structures
JP2013072929A (ja) * 2011-09-27 2013-04-22 Toshiba Corp 表示装置
CN102540562A (zh) * 2012-01-06 2012-07-04 中国电子科技集团公司第五十五研究所 液晶显示屏高透过低反射电磁屏蔽结构及制作方法
JP6371032B2 (ja) * 2012-08-01 2018-08-08 スリーエム イノベイティブ プロパティズ カンパニー 反射防止ハードコートおよび反射防止物品
KR102492366B1 (ko) * 2015-09-15 2023-01-27 닛산 가가쿠 가부시키가이샤 습식처리에 의한 표면조화방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0539583A (ja) * 1991-08-02 1993-02-19 Dainippon Printing Co Ltd 部分蒸着化粧シートの製造方法
JP2013525253A (ja) * 2010-04-30 2013-06-20 コーニング インコーポレイテッド 防眩表面処理方法およびその物品
WO2013148129A1 (en) * 2012-03-26 2013-10-03 3M Innovative Properties Company Article and method of making the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017099596A1 (en) 2015-12-08 2017-06-15 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Improved light emission in oleds
CN108770378A (zh) * 2015-12-08 2018-11-06 荷兰应用自然科学研究组织Tno 改善的oled中的发光
US20180358586A1 (en) * 2015-12-08 2018-12-13 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Improved light emission in oleds

Also Published As

Publication number Publication date
CN106061627A (zh) 2016-10-26
KR102358180B1 (ko) 2022-02-04
JPWO2015147294A1 (ja) 2017-04-13
CN106061627B (zh) 2020-08-04
TW201611659A (zh) 2016-03-16
KR20160137958A (ko) 2016-12-02
JP6551691B2 (ja) 2019-07-31
TWI651017B (zh) 2019-02-11

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