WO2015135802A1 - Tialcn-schichten mit lamellenstruktur - Google Patents

Tialcn-schichten mit lamellenstruktur Download PDF

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Publication number
WO2015135802A1
WO2015135802A1 PCT/EP2015/054450 EP2015054450W WO2015135802A1 WO 2015135802 A1 WO2015135802 A1 WO 2015135802A1 EP 2015054450 W EP2015054450 W EP 2015054450W WO 2015135802 A1 WO2015135802 A1 WO 2015135802A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
tii
cvd
crystallographic
particularly preferably
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2015/054450
Other languages
German (de)
English (en)
French (fr)
Inventor
Dirk Stiens
Thorsten MANNS
Sakari Ruppi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Walter AG
Original Assignee
Walter AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=52682680&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2015135802(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Walter AG filed Critical Walter AG
Priority to JP2016551749A priority Critical patent/JP6568092B2/ja
Priority to EP15709872.4A priority patent/EP3117021B1/de
Priority to KR1020167022138A priority patent/KR102384099B1/ko
Priority to CN201580010559.5A priority patent/CN106062243B/zh
Priority to US15/112,899 priority patent/US10214810B2/en
Priority to ES15709872.4T priority patent/ES2679123T3/es
Publication of WO2015135802A1 publication Critical patent/WO2015135802A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148—Composition of the cutting inserts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/403—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
    • B23B2222/16—Cermet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2222/00—Materials of tools or workpieces composed of metals, alloys or metal matrices
    • B23B2222/84—Steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2226/00—Materials of tools or workpieces not comprising a metal
    • B23B2226/18—Ceramic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/04—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by chemical vapour deposition [CVD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B23B2228/105—Coatings with specified thickness

Definitions

  • At least one further layer of hard material is arranged above the Ti x Al x CyNz layer, preferably at least one Al 2 O 3 layer of the modification Y-Al 2 O 3, K-Al 2 O 3 or which is deposited by means of high temperature CVD (CVD) or medium temperature CVD (MT-CVD).
  • CVD high temperature CVD
  • MT-CVD medium temperature CVD
  • FIG. 2 shows a further scanning electron micrograph (SEM) of the inventive layer according to FIG. 1 at a higher magnification.
  • SEM scanning electron micrograph

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
PCT/EP2015/054450 2014-03-11 2015-03-03 Tialcn-schichten mit lamellenstruktur Ceased WO2015135802A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016551749A JP6568092B2 (ja) 2014-03-11 2015-03-03 層状構造を備えるＴｉＡｌＣＮ層
EP15709872.4A EP3117021B1 (de) 2014-03-11 2015-03-03 Tialcn-schichten mit lamellenstruktur
KR1020167022138A KR102384099B1 (ko) 2014-03-11 2015-03-03 라멜라 구조를 가지는 TiAlCN 층들
CN201580010559.5A CN106062243B (zh) 2014-03-11 2015-03-03 具有片晶结构的TiAlCN层
US15/112,899 US10214810B2 (en) 2014-03-11 2015-03-03 TiAlCN layers with lamellar structure
ES15709872.4T ES2679123T3 (es) 2014-03-11 2015-03-03 Capas de TiAlCN con estructura laminar

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014103220.9A DE102014103220A1 (de) 2014-03-11 2014-03-11 TiAIN-Schichten mit Lamellenstruktur
DE102014103220.9 2014-03-11

Publications (1)

Publication Number Publication Date
WO2015135802A1 true WO2015135802A1 (de) 2015-09-17

Family

ID=52682680

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2015/054450 Ceased WO2015135802A1 (de) 2014-03-11 2015-03-03 Tialcn-schichten mit lamellenstruktur

Country Status (8)

Country Link
US (1) US10214810B2 (enExample)
EP (1) EP3117021B1 (enExample)
JP (1) JP6568092B2 (enExample)
KR (1) KR102384099B1 (enExample)
CN (1) CN106062243B (enExample)
DE (1) DE102014103220A1 (enExample)
ES (1) ES2679123T3 (enExample)
WO (1) WO2015135802A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018001784A1 (en) 2016-07-01 2018-01-04 Walter Ag Cutting tool with textured alumina layer
WO2018135513A1 (ja) 2017-01-18 2018-07-26 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
EP3415255A4 (en) * 2016-04-08 2019-04-03 Sumitomo Electric Hardmetal Corp. SURFACE-CUTTED CUTTING TOOL AND METHOD FOR THE PRODUCTION THEREOF
US20200002819A1 (en) * 2017-01-26 2020-01-02 Walter Ag Coated cutting tool
US11040402B2 (en) 2017-01-18 2021-06-22 Mitsubishi Materials Corporation Surface-coated cutting tool having hard coating layer exhibiting excellent chipping resistance and wear resistance

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JP6120229B2 (ja) * 2015-01-14 2017-04-26 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
WO2017090540A1 (ja) 2015-11-25 2017-06-01 三菱日立ツール株式会社 窒化チタンアルミニウム硬質皮膜、硬質皮膜被覆工具、及びそれらの製造方法
JP6210346B1 (ja) * 2016-11-02 2017-10-11 株式会社タンガロイ 被覆切削工具
US10502550B2 (en) * 2016-12-21 2019-12-10 Kennametal Inc. Method of non-destructive testing a cutting insert to determine coating thickness
CN110382146B (zh) * 2017-02-28 2021-09-10 住友电工硬质合金株式会社 表面被覆切削工具及其制造方法
US11123802B2 (en) * 2017-02-28 2021-09-21 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and method for manufacturing the same
EP3590637A4 (en) * 2017-02-28 2021-04-21 Sumitomo Electric Hardmetal Corp. SURFACE COATED CUTTING TOOL AND RELATED PRODUCTION PROCESS
US12031207B2 (en) * 2017-04-07 2024-07-09 Sandvik Intellectual Property Ab Coated cutting tool
JP7063206B2 (ja) * 2017-09-29 2022-05-17 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
WO2019065682A1 (ja) * 2017-09-29 2019-04-04 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
CN111971138B (zh) 2018-03-22 2023-02-21 住友电工硬质合金株式会社 表面被覆切削工具及其制造方法
KR102350219B1 (ko) 2018-03-22 2022-01-17 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구 및 그 제조 방법
US11274366B2 (en) 2018-03-22 2022-03-15 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and method for manufacturing same
JP6565093B1 (ja) * 2018-03-22 2019-08-28 住友電工ハードメタル株式会社 表面被覆切削工具およびその製造方法
US10875101B2 (en) 2018-03-22 2020-12-29 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and method for manufacturing same
KR20200119334A (ko) 2018-03-22 2020-10-19 스미또모 덴꼬오 하드메탈 가부시끼가이샤 표면 피복 절삭 공구 및 그 제조 방법
JP6583762B1 (ja) * 2018-03-22 2019-10-02 住友電工ハードメタル株式会社 表面被覆切削工具及びその製造方法
WO2020067402A1 (ja) * 2018-09-28 2020-04-02 三菱マテリアル株式会社 硬質被覆層が優れた耐チッピング性を発揮する表面被覆切削工具
JP7231885B2 (ja) * 2018-09-28 2023-03-02 三菱マテリアル株式会社 硬質被覆層が優れた耐チッピング性を発揮する表面被覆切削工具
CN110468412A (zh) * 2019-08-23 2019-11-19 湖南摩尔硬质合金有限公司 一种硬质合金涂层刀片及制备方法
KR102356224B1 (ko) 2019-12-24 2022-01-27 한국야금 주식회사 내박리성이 우수한 절삭 공구용 경질피막
KR102399559B1 (ko) 2019-12-27 2022-05-18 한국야금 주식회사 내박리성이 향상된 절삭 공구용 피막
CN111482622B (zh) * 2020-05-22 2022-02-18 株洲钻石切削刀具股份有限公司 一种涂层切削刀具及其制备方法
CN111893459A (zh) * 2020-07-17 2020-11-06 株洲钻石切削刀具股份有限公司 具有织构取向的涂层切削刀具及其制备方法
KR102509585B1 (ko) 2020-12-24 2023-03-14 한국야금 주식회사 내마모성과 내치핑성이 향상된 cvd 절삭공구용 피막
KR102497484B1 (ko) 2020-12-30 2023-02-08 한국야금 주식회사 내박리성이 우수한 cvd 절삭공구용 피막
WO2022264198A1 (ja) * 2021-06-14 2022-12-22 住友電工ハードメタル株式会社 切削工具
US11534837B1 (en) 2021-06-14 2022-12-27 Sumitomo Electric Hardmetal Corp. Cutting tool
WO2022264196A1 (ja) * 2021-06-14 2022-12-22 住友電工ハードメタル株式会社 切削工具
KR102629997B1 (ko) 2021-08-26 2024-01-29 한국야금 주식회사 내박리성과 내마모성이 우수한 경질 피막을 구비한 절삭 인서트
KR102663474B1 (ko) 2021-08-26 2024-05-07 한국야금 주식회사 내마모성이 우수한 cvd 절삭공구용 피막
CN115351279B (zh) * 2022-08-30 2023-11-21 株洲钻石切削刀具股份有限公司 一种涂层硬质合金切削刀具
AT528040A1 (de) * 2024-02-28 2025-09-15 Boehlerit Gmbh & Co Kg Beschichtetes Objekt und Verfahren zu dessen Herstellung

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ES2679123T3 (es) 2018-08-22
US10214810B2 (en) 2019-02-26
CN106062243A (zh) 2016-10-26
KR20160130752A (ko) 2016-11-14
EP3117021B1 (de) 2018-06-06
JP6568092B2 (ja) 2019-08-28
US20160333473A1 (en) 2016-11-17
KR102384099B1 (ko) 2022-04-06
JP2017508632A (ja) 2017-03-30
EP3117021A1 (de) 2017-01-18

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