WO2015040869A1 - 積層セラミックコンデンサおよびその製造方法 - Google Patents
積層セラミックコンデンサおよびその製造方法 Download PDFInfo
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- WO2015040869A1 WO2015040869A1 PCT/JP2014/053241 JP2014053241W WO2015040869A1 WO 2015040869 A1 WO2015040869 A1 WO 2015040869A1 JP 2014053241 W JP2014053241 W JP 2014053241W WO 2015040869 A1 WO2015040869 A1 WO 2015040869A1
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Definitions
- the present invention relates to a monolithic ceramic capacitor and a method for manufacturing the same, and more particularly to an improvement in the form of dielectric ceramic crystal grains that is advantageous for miniaturization and large capacity of monolithic ceramic capacitors.
- the dielectric ceramic layer of the multilayer ceramic capacitor is being reduced.
- the electric field strength applied per layer becomes relatively high. Therefore, the dielectric ceramic constituting the dielectric ceramic layer is required to be improved in reliability at the time of voltage application, particularly in life characteristics in a high temperature load test.
- Patent Document 1 A main component comprising barium titanate; A first subcomponent comprising at least one selected from MgO, CaO, BaO and SrO; A second subcomponent containing silicon oxide as a main component; A third subcomponent comprising at least one selected from V 2 O 5 , MoO 3 and WO 3 ; A fourth subcomponent comprising an oxide of R1, wherein R1 is at least one selected from Sc, Er, Tm, Yb and Lu; A fifth subcomponent comprising CaZrO 3 or CaO + ZrO 2 ; A sixth subcomponent comprising an oxide of R2, wherein R2 is at least one selected from Y, Dy, Ho, Tb, Gd and Eu; A seventh subcomponent containing MnO; The ratio of each subcomponent to 100 moles of the main component is First subcomponent: 0.1-3 mol, Second subcomponent: 2 to 10 mol, Third subcomponent: 0.01 to 0.5
- this ceramic composition can improve the IR temperature dependency, there is a problem in that the dielectric temperature characteristic is deteriorated as the dielectric ceramic layer of the multilayer ceramic capacitor formed using the ceramic composition becomes thinner.
- Patent Document 2 A dielectric ceramic composition composed of dielectric particles having a main component phase mainly composed of barium titanate and a diffusion phase existing around the main component phase, When the average value of the depth by which the subcomponent elements present in the diffusion phase diffuse toward the center of the dielectric particles from the surface of the diffusion phase is the average diffusion depth, The dielectric ceramic composition is characterized in that the dispersion of the average diffusion depth between the dielectric particles is 5 to 30% in terms of CV value.
- Patent Document 2 Ca is cited as an example of the subcomponent element, and by varying the thickness of the diffusion phase in which the subcomponent element diffuses within a predetermined range, the dielectric constant, high temperature accelerated lifetime, Tc bias, and IR temperature dependence It is said that well-balanced characteristics can be obtained with respect to properties and the like. However, there is a problem that reliability decreases as the thickness of the dielectric ceramic layer of the multilayer ceramic capacitor configured using the same decreases.
- Patent Documents 1 and 2 attempt to improve the electrical characteristics of the dielectric ceramic by controlling the region in which Ca is diffused into the crystal grains from the grain boundary of the dielectric ceramic. As described above, as the dielectric ceramic layer becomes thinner, there is a problem that the temperature characteristics of the dielectric constant are deteriorated and the reliability is lowered.
- an object of the present invention is to provide a multilayer ceramic capacitor and a method for manufacturing the same that can solve the above-described problems.
- the present invention is directed to a multilayer ceramic capacitor and a method for manufacturing the multilayer ceramic capacitor.
- Multilayer Ceramic Capacitor [Configuration Presupposed of the Present Invention]
- a laminated body comprising a plurality of laminated dielectric ceramic layers made of a dielectric ceramic having crystal grains and crystal grain boundaries, and a plurality of internal electrodes respectively disposed along a plurality of interfaces between the dielectric ceramic layers.
- An external electrode formed on the surface of the laminate and electrically connected to a specific one of the internal electrodes; Is first directed to a multilayer ceramic capacitor.
- This invention has a first aspect in which the perovskite type compound contained in the dielectric ceramic contains Ba and Ti, and a second aspect in the case where Ba, Ca and Ti are contained.
- the composition of the dielectric ceramic is defined by three methods in order to make it easier to specify the technical scope of the present invention.
- the laminate or the dielectric ceramic layer is A perovskite-type compound containing Ba and Ti; Ca, R (R is at least one of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Y), M (M is Mn, Co, Fe, And at least one of Cr, Cu, Mg, Al, V, Mo and W.), and Si; Containing.
- first to third defining methods as methods for defining the composition of the dielectric ceramic.
- Ti content is 100 mol parts
- Ca content is 0.5 mol part or more and 2.5 mol part or less
- R content is 0.5 mol part or more and 4 mol part or less
- M content is 0.5 mol part or more and 2 mol parts or less
- Si content is 1 mol part or more and 4 mol parts or less.
- the laminate or the dielectric ceramic layer is A perovskite compound containing Ba, Ca and Ti; Ca, R (R is at least one of La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Y), M (M is Mn, Co, Fe, And at least one of Cr, Cu, Mg, Al, V, Mo and W.), and Si; Containing.
- first to third defining methods as methods for defining the composition of the dielectric ceramic.
- Ti content is 100 mol parts
- Ca content is 2.5 mol parts or more and 15 mol parts or less
- R content is 0.5 mol part or more and 4 mol part or less
- M content is 0.5 mol part or more and 2 mol parts or less
- Si content is 1 mol part or more and 4 mol parts or less.
- the present invention has the following characteristic configuration.
- the crystal particles include perovskite type crystal particles whose main component is a perovskite type compound.
- the Ca concentration is expressed by the relative concentration of Ca with respect to 100 mole parts of Ti at the measurement point
- the distance measured from the grain boundary toward the center of the crystal grain in the region where a Ca concentration of 0.1 mol part or more relative to the Ca concentration measured near the center of the crystal grain is measured is expressed as “Ca diffusion depth”.
- “Ca diffusion depth” is within 10% of the average grain size of crystal grains, and
- the difference between the average Ca concentration in the region defining the “Ca diffusion depth” and the Ca concentration measured near the center of the crystal grain is defined as “increased Ca concentration”
- the “increased Ca concentration” is 0. .2 mol part or more and 5 mol part or less.
- R which is a rare earth element, diffuses in the same manner as Ca in the region that defines “Ca diffusion depth”. According to such a configuration, the reliability can be further improved.
- the present invention is advantageously applied to a multilayer ceramic capacitor in which each thickness of the dielectric ceramic layer is reduced to an average value of 0.8 ⁇ m or less.
- the present invention is also directed to a method for manufacturing a multilayer ceramic capacitor.
- the first aspect in the case where the perovskite type compound contained in the dielectric ceramic contains Ba and Ti.
- a second aspect in the case of containing Ba, Ca, and Ti.
- a method for manufacturing a multilayer ceramic capacitor according to the present invention includes: A main component powder mainly composed of a perovskite type compound containing Ba and Ti, a Ca compound, and R (R is La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and Y) At least one of them.) A compound, M (M is at least one of Mn, Co, Fe, Cr, Cu, Mg, Al, V, Mo, and W.) a compound, and Si Obtaining a ceramic slurry comprising a compound, and Forming a ceramic slurry into a sheet to obtain a ceramic green sheet; Forming internal electrodes on the ceramic green sheet; Obtaining a raw laminate having a structure in which a plurality of ceramic green sheets including a ceramic green sheet on which internal electrodes are formed are laminated; A plurality of dielectric ceramic layers and a plurality of internal electrodes respectively disposed along a plurality of interfaces between the dielectric ceramic layers
- the Ti content is 100 mol parts
- Ca content is 0.5 mol part or more and 2.5 mol part or less
- R content is 0.5 mol part or more and 4 mol part or less
- M content is 0.5 mol part or more and 2 mol parts or less
- Si content is 1 mol part or more and 4 mol parts or less.
- the crystal particles include perovskite type crystal particles whose main component is a perovskite type compound.
- the Ca concentration is expressed by the relative concentration of Ca with respect to 100 mole parts of Ti at the measurement point
- the distance measured from the grain boundary toward the center of the crystal grain in the region where a Ca concentration of 0.1 mol part or more relative to the Ca concentration measured near the center of the crystal grain is measured is expressed as “Ca diffusion depth”.
- “Ca diffusion depth” is within 10% of the average grain size of crystal grains, and
- the difference between the average Ca concentration in the region defining the “Ca diffusion depth” and the Ca concentration measured near the center of the crystal grain is defined as “increased Ca concentration”
- the “increased Ca concentration” is 0. .2 mol part or more and 5 mol part or less.
- a method for manufacturing a multilayer ceramic capacitor according to the present invention includes: A main component powder mainly composed of a perovskite type compound containing Ba, Ca and Ti; a Ca compound; and R (R is La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho and And at least one of Y.) Compound and M (M is at least one of Mn, Co, Fe, Cr, Cu, Mg, Al, V, Mo and W) and a compound Obtaining a ceramic slurry comprising: a Si compound; Forming a ceramic slurry into a sheet to obtain a ceramic green sheet; Forming internal electrodes on the ceramic green sheet; Obtaining a raw laminate having a structure in which a plurality of ceramic green sheets including a ceramic green sheet on which internal electrodes are formed are laminated; A plurality of dielectric ceramic layers and a plurality of internal electrodes respectively disposed along a plurality of interfaces between the dielectric ceramic
- the Ti content is 100 mol parts
- Ca content is 2.5 mol parts or more and 15 mol parts or less
- R content is 0.5 mol part or more and 4 mol part or less
- M content is 0.5 mol part or more and 2 mol parts or less
- Si content is 1 mol part or more and 4 mol parts or less.
- the crystal particles include perovskite type crystal particles whose main component is a perovskite type compound.
- the Ca concentration is expressed by the relative concentration of Ca with respect to 100 mole parts of Ti at the measurement point
- the distance measured from the grain boundary toward the center of the crystal grain in the region where a Ca concentration of 0.1 mol part or more relative to the Ca concentration measured near the center of the crystal grain is measured is expressed as “Ca diffusion depth”.
- “Ca diffusion depth” is within 10% of the average grain size of crystal grains, and
- the difference between the average Ca concentration in the region defining the “Ca diffusion depth” and the Ca concentration measured near the center of the crystal grain is defined as “increased Ca concentration”
- the “increased Ca concentration” is 0. .2 mol part or more and 5 mol part or less.
- the “Ca diffusion depth” is within 10% of the average particle diameter of the perovskite crystal particles (ABO 3 crystal particles)
- Ca as a subcomponent is substantially contained in the ABO 3 crystal particles.
- Many areas of the ABO 3 composition that are not diffused are secured. This is because even if a high electric field is applied to the dielectric ceramic layer due to the thinning of the dielectric ceramic layer, the dielectric ceramic constituting the dielectric ceramic layer has a high relative dielectric constant. Thus, it is possible to suppress a decrease in relative dielectric constant due to an increase in electric field strength.
- the high-quality multilayer ceramic is small, has a large capacity, has excellent life characteristics, and is stable. A capacitor can be obtained.
- FIG. 1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 according to an embodiment of the present invention.
- FIG. 2 is an enlarged cross-sectional view that schematically illustrates the perovskite crystal particles 11 for explaining the characteristic configuration of the present invention. It is a figure which shows LT section 21 of the laminated body for demonstrating the measuring method of the thickness of the dielectric ceramic layer 24 of the laminated ceramic capacitor calculated
- the multilayer ceramic capacitor 1 includes a multilayer body 5 having a plurality of dielectric ceramic layers 2 and a plurality of internal electrodes 3 and 4 disposed along a plurality of interfaces between the dielectric ceramic layers 2. ing.
- the internal electrodes 3 and 4 are mainly composed of Ni, for example.
- First and second external electrodes 6 and 7 are formed at different positions on the outer surface of the laminate 5, respectively.
- the external electrodes 6 and 7 are mainly composed of Ag or Cu, for example.
- a plating film is formed on the external electrodes 6 and 7 as necessary.
- the plating film is composed of, for example, a Ni plating film and a Sn plating film formed thereon.
- the first and second external electrodes 6 and 7 are formed on the end surfaces of the multi-layer body 5 facing each other.
- the internal electrodes 3 and 4 are a plurality of first internal electrodes 3 electrically connected to the first external electrode 6 and a plurality of second internal electrodes 4 electrically connected to the second external electrode 7.
- the first and second internal electrodes 3 and 4 are alternately arranged as viewed in the stacking direction.
- the multilayer ceramic capacitor 1 may be a two-terminal type including two external electrodes 6 and 7 or a multi-terminal type including a large number of external electrodes.
- the dielectric ceramic layer 2 is composed of a multilayer ceramic having crystal grains and crystal grain boundaries.
- the crystal particles are mainly perovskite crystal particles mainly composed of a perovskite compound. Therefore, the main component of the laminate 5 or the main component of the dielectric ceramic layer 2 is a perovskite compound.
- the fact that it is a perovskite type compound can be confirmed by a method such as XRD.
- the perovskite type compound may contain Ba and Ti and may contain Ba, Ca and Ti.
- the content ratio of Ca is smaller than that of Ba and Ti, but it is confirmed that Ca is present in the center part of the crystal grain by a method such as an analytical electron microscope STEM. If possible, it can be seen that the main component is barium calcium titanate, that is, a perovskite type compound containing Ba, Ca and Ti.
- the compounding molar ratio of the A site and the B site in the perovskite type compound is 1.00 stoichiometrically, it is necessary as long as it does not affect various properties, sinterability, and the like. You may mix
- the dielectric ceramic constituting the dielectric ceramic layer 2 contains Ca, R (R is La, Ce, Pr, Nd, Sm, Eu, Gd as subcomponents). , Tb, Dy, Ho and Y.), M (M is at least one of Mn, Co, Fe, Cr, Cu, Mg, Al, V, Mo and W) And Si).
- the content of these components is as follows: Ca content is 0.5 mol part or more and 2.5 mol part or less, R content is 0.5 mol part or more and 4 mol part or less, M content is 0.5 mol part or more and 2 mol parts or less, Si content is 1 mol part or more and 4 mol parts or less.
- the main component contains Ca
- Ca content is 2.5 mol parts or more and 15 mol parts or less
- R content is 0.5 mol part or more and 4 mol part or less
- M content is 0.5 mol part or more and 2 mol parts or less
- Si content is 1 mol part or more and 4 mol parts or less.
- the Ca content increases as a total amount, and as described above, compared with the case where the main component is a perovskite type compound containing no Ca. And increase.
- the laminate 5 can be dissolved and quantitatively analyzed by, for example, ICP (Emission Spectroscopic Plasma Analysis). In essence, it is preferable to define the composition of only the capacitance forming portion of the dielectric ceramic layer 2, but when the majority of the laminate 5 is occupied by the dielectric ceramic layer 2, the dielectric ceramic layer The content ratio of each element contained in the dielectric ceramic constituting 2 can be regarded as being equal to the content ratio of each element contained in the laminate 5. For this reason, it is sufficient to define the composition of the laminate 5.
- Ca as an accessory component may exist as an oxide at a grain boundary or a triple point, or may form secondary phase particles as a composite oxide containing a plurality of elements.
- R and M as subcomponents may exist as oxides at grain boundaries and triple points, or may form secondary phase particles as complex oxides containing a plurality of elements. It may exist as a perovskite type compound in the surface layer part (shell part) of the particles. In addition, it is desirable that R as a subcomponent exists as a perovskite type compound particularly in the surface layer portion (shell portion) of the crystal particles.
- FIG. 2 is an enlarged cross-sectional view showing the perovskite crystal particles 11 very schematically.
- FIG. 2 shows perovskite crystal grains 11 and crystal grain boundaries 12. Ca is present in the surface layer portion 13 of the perovskite-type crystal particles 11, and R and M are also present.
- the perovskite crystal grains 11 are mainly composed of a perovskite compound containing Ba and Ti
- Ca, R, and M are preferably present only in the surface layer portion 13 and the crystal grain boundaries 12.
- the perovskite-type crystal particles 11 are mainly composed of a perovskite-type compound containing Ba, Ca, and Ti
- Ca is present in the entire perovskite-type crystal particles 11, but Ca is a surface layer portion. 13 and the crystal grain boundary 12, and R and M are preferably present only in the surface layer portion 13 and the crystal grain boundary 12.
- the surface layer portion 13 described above is defined as follows.
- the Ca concentration is represented by the relative concentration of Ca with respect to 100 mole parts of Ti at the measurement point.
- the Ca concentration is expressed in this way, a region where a Ca concentration of 0.1 mol part or more relative to the Ca concentration measured near the center 14 of the crystal particle 11 is measured is defined as the surface layer portion 13.
- Ca diffusion depth is a crystal.
- the average particle size of the particles is within 10%.
- the difference between the average Ca concentration in the region defining the “Ca diffusion depth”, that is, the surface layer portion 13, and the Ca concentration measured in the vicinity of the center 14 of the crystal particle 11 was defined as “increased Ca concentration”.
- the “increased Ca concentration” is set to be 0.2 mol parts or more and 5 mol parts or less.
- the dielectric ceramic realizes a high relative dielectric constant, a high insulating property, a low relative dielectric constant electric field dependency, and a good life characteristic. Further, the presence of R in the region defining “Ca diffusion depth” further improves the life characteristics due to the synergistic action of Ca and R. These effects are particularly remarkable when each thickness of the dielectric ceramic layer 2 is 0.8 ⁇ m or less on average.
- a main component powder mainly comprising a perovskite type compound is prepared. Therefore, when the perovskite type compound contains Ba and Ti, for example, a method is adopted in which a Ba compound and a Ti compound are mixed and synthesized to obtain barium titanate. On the other hand, when the perovskite type compound contains Ba, Ca, and Ti, for example, a method of mixing and synthesizing a Ba compound, a Ti compound, and a Ca compound to obtain barium calcium titanate is employed.
- a solid-phase synthesis method that is, a method in which BaCO 3 powder and TiO 2 powder are mixed and heat-treated, or a method in which BaCO 3 powder, CaCO 3 powder and TiO 2 powder are mixed and heat-treated.
- Other methods include applying a solution containing Ba to the TiO 2 fine particles to synthesize barium titanate in the solution, or applying a solution containing Ba and Ca to the TiO 2 fine particles.
- a method of synthesizing barium calcium titanate a wet synthesis method such as a hydrothermal synthesis method, a hydrolysis method, and an oxalic acid method can be given.
- synthesizing barium calcium titanate there may be a method in which a highly reactive BaTiO 3 powder and a Ca compound are mixed and sufficiently heat-treated to obtain a barium calcium titanate powder.
- Ca compounds, M compounds, R compounds, and Si compounds as auxiliary components are prepared.
- the form of these compounds is not particularly limited, and may be oxide powder, carbonate powder, sol or organic metal.
- the main component powder is mixed with the Ca compound, M compound, R compound, and Si compound as subcomponents.
- Zr derived from the raw material manufacturing process may be further mixed as a subcomponent.
- the mixing form of the subcomponents is not particularly limited. For example, a plurality of subcomponents may be mixed in advance or may be synthesized by heat treatment. Moreover, you may mix a specific subcomponent in 2 steps or more. Furthermore, as long as the object of the present invention is not impaired, a part of the subcomponents may be mixed in advance when the main component is synthesized.
- the content ratio of each element of the raw material powder of the dielectric ceramic containing the main component powder and the subcomponent compound is substantially equal to the content ratio of each element of the dielectric ceramic constituting the dielectric ceramic layer 2 described above. Is the same.
- a ceramic slurry containing the main component powder and subcomponent compounds is prepared.
- a binder or the like may be mixed with the ceramic slurry when the subcomponent is mixed with the main component powder, and the process may proceed to the next sheet forming step.
- the auxiliary component may be mixed with the main component powder, and then dried to obtain a ceramic raw material, and then mixed with a solvent again to obtain a ceramic slurry.
- the ceramic raw material powder may be subjected to a heat treatment to cause the main component powder and the subcomponent to react.
- a ceramic green sheet is obtained by forming the ceramic slurry into a sheet.
- a conductive paste film to be the internal electrodes 3 and 4 is formed on the ceramic green sheet by, for example, printing a conductive paste.
- a plurality of ceramic green sheets including a ceramic green sheet on which conductive paste films to be the internal electrodes 3 and 4 are formed are laminated and pressed to obtain a raw laminate before firing.
- the obtained raw laminate is fired in an oxygen partial pressure atmosphere in which the internal electrodes 3 and 4 are not oxidized and the dielectric ceramic is not reduced after removing the binder.
- the conductive paste film to be the internal electrodes 3 and 4 is sintered, and the sintered laminate 5 including the dielectric ceramic layer 2 made of a dielectric ceramic having crystal grains and crystal grain boundaries.
- the perovskite crystal particles 11 included in the dielectric ceramic have “Ca diffusion depth” and “increased Ca concentration” as described above with reference to FIG.
- the method for controlling the “Ca diffusion depth” and “increased Ca concentration” described above is not particularly limited.
- the “Ca diffusion depth” and the “increased Ca concentration” can be controlled by the firing temperature and the heating rate in the firing step.
- “Ca diffusion depth” and “increased” can also be obtained by adjusting the crystallinity of the perovskite-type crystal particles as the main component, the form of subcomponent compounds, the mixing and grinding conditions at the time of ceramic slurry preparation, and the firing holding time. It is possible to control the “Ca concentration”.
- the multilayer ceramic capacitor 1 is completed by forming the external electrodes 6 and 7 on the end face of the multilayer body 5 where the internal electrodes 3 and 4 are exposed.
- the external electrodes 6 and 7 may be formed by applying a conductive paste in advance to the surface of the laminate before firing and baking the conductive paste during firing to obtain the laminate 5. .
- R 2 O 3 CaCO 3 , R 2 O 3 , MgCO 3 , MnO, V 2 O 5 , MoO 3, Cr 2 O 3 , CuO, Al 2 O 3 , and SiO 2 powders were prepared as subcomponents.
- R 2 O 3 powder were prepared powders of Dy 2 O 3, Y 2 O 3, La 2 O 3, Tb 2 O 3, Gd 2 O 3, and Ho 2 O 3.
- each powder of these CaCO 3 , R 2 O 3 , MgCO 3 , MnO, V 2 O 5 , MoO 3, Cr 2 O 3 , CuO, Al 2 O 3 , and SiO 2 is mixed with Ti: 100 mol parts.
- Ca, R, Mg, Mn, V, Mo, Cr, Cu, Al, and Si were weighed so that the respective mole parts shown in Table 1 were obtained, and used as subcomponent powders.
- samples 25 and 28 as shown in the column of “R type” in Table 1, two types of elements were used as R. In these samples, the total amount of two types of elements mixed in equal amounts is shown in the “R amount” column.
- the sub-component powder was added to the above-mentioned main component powder, and the mixed powder was wet-mixed with a ball mill and uniformly dispersed, and then subjected to a drying treatment to obtain a ceramic raw material.
- this ceramic slurry was formed into a sheet by a lip method to obtain a rectangular ceramic green sheet having a thickness of 1.3 ⁇ m.
- a conductive paste containing Ni was screen-printed on the ceramic green sheet to form a conductive paste film to be an internal electrode.
- the raw laminate was heated in a N 2 atmosphere at a temperature of 350 ° C. for 3 hours to burn the binder, and then the binder was burned again in a N 2 atmosphere at a temperature of 700 ° C. for 2 hours.
- the firing process was performed in the reducing atmosphere composed of H 2 —N 2 —H 2 O gas having an oxygen partial pressure of 10 ⁇ 10 MPa at the “calcination temperature” and “temperature increase rate during firing” shown in Table 1. did.
- mapping analysis was performed on the inside of the crystal particles including the surface layer portion (shell portion) and the central portion of the crystal particles, and the presence state of Ca was mainly investigated. As a result, in the vicinity of the center of the crystal grain, Ca was not detected even by point analysis by STEM, and it was confirmed that the main component of the crystal grain was composed of barium titanate.
- mapping analysis by STEM was implemented on the same conditions as the time of calculating
- the outer dimensions of the multilayer ceramic capacitor thus obtained are 1.0 mm in length, 0.5 mm in width, and 0.5 mm in thickness, and the average thickness of the dielectric ceramic layer interposed between the internal electrodes is 0. .8 ⁇ m.
- the number of effective dielectric ceramic layers was 250, and the counter electrode area per one dielectric ceramic layer was 0.27 mm 2 . Further, the average thickness of the internal electrodes was 0.5 ⁇ m.
- the thickness of the dielectric ceramic layer and the thickness of the internal electrode were measured as follows.
- the multilayer ceramic capacitor according to each sample was set up vertically, and the periphery of each multilayer ceramic capacitor was hardened with resin. Here, three samples were used for each sample number.
- the multilayer ceramic capacitor solidified with the resin was polished by a polishing machine so that the LT cross section defined by the length direction dimension and the thickness direction dimension was exposed. This polishing was finished when the depth reached half the width of the multilayer ceramic capacitor laminate. Next, ion milling was performed on the polished surface to remove sagging due to polishing. Thus, an LT cross section for observation was obtained.
- a perpendicular line 23 perpendicular to the internal electrode 22 was drawn at a position that is 1/2 of the length dimension of the LT cross section 21 (that is, 1/2 L).
- the region where the internal electrodes 22 of the multilayer ceramic capacitor as a sample are laminated is divided into three equal parts in the thickness direction (T direction), and the upper part U, the intermediate part M, and the lower part D 3 Divided into two areas.
- ten dielectric ceramic layers 24 are selected from the center of each region in the thickness direction (T direction), and the thickness of the dielectric ceramic layers 24 on the perpendicular line 23 is measured using a scanning electron microscope. And measured.
- T direction thickness direction
- a region including the ten dielectric ceramic layers in each of the upper portion U, the intermediate portion M, and the lower portion D is shown as a measurement region R1.
- the internal electrode 22 was lost on the perpendicular line 23, and therefore, the dielectric ceramic layer 24 sandwiching the internal electrode 22 was connected, and the case where measurement was impossible was excluded.
- the thickness of the internal electrode 22 was measured in the same manner, except for the portion where the internal electrode 22 was missing, measured at 90 locations, and the average value was obtained.
- Crystal particle diameter of the dielectric ceramic constituting the dielectric ceramic layer of the multilayer ceramic capacitor was determined by the following method.
- the multilayer ceramic capacitor was broken near the center in the width direction and thermally etched at 1000 ° C. Thereafter, FE-SEM observation was performed near the center of the fracture surface, 300 or more randomly extracted crystal particles were observed, the equivalent circle diameter was calculated, and the D50 value was taken as the average particle size of the crystal particles. The value is shown in the column of “Crystal particle diameter” in Table 2.
- the multilayer ceramic capacitor was processed in the vicinity of the center in the length direction, width direction, and thickness direction, and then 20 crystal particles were analyzed by STEM.
- the crystal grains to be analyzed were randomly extracted from the vicinity of the center in the length direction, width direction and thickness direction of the multilayer ceramic capacitor, and the particle diameter (equivalent to a circle) of 80% or more of the D50 value. The one with the diameter was selected.
- a crystal particle that has a relatively small particle size in a STEM thin sample is likely to show a cross section that is not near the center of the crystal grain on the thin sample, and is used to evaluate the diffusion of elements from the crystal particle surface. It was excluded because it was inappropriate.
- the crystal grains to be analyzed were selected such that the crystal interface with the adjacent crystal grains was clear and the crystal grain boundaries were considered to extend in a direction nearly perpendicular to the thin sample surface.
- the STEM analysis “JEM-2200FS” manufactured by JEOL Ltd. was used as the STEM.
- the acceleration voltage was 200 kV.
- the detector EDS is “JED-2300T” manufactured by JEOL Ltd., using a 60 mm 2- caliber SDD detector, and “Noran System 7” manufactured by Thermo Fisher Scientific is used as the EDS system.
- the thickness of the thin sample was about 100 nm.
- point analysis was performed from the grain boundary toward the center of the crystal grain.
- a point where the Si concentration is reduced to 50% or less of the Si concentration detected at the grain boundary (relative concentration of Si with respect to Ti at the measurement point) is obtained, and the distance from the grain boundary to the point is determined.
- a portion that is 5 nm or less, that is, a portion that can eliminate the influence of the grain boundary at the time of STEM analysis (the crystal grain boundary is nearly perpendicular to the surface of the flake sample) is selected, and the Ca diffusion depth of the crystal grain in that portion Was analyzed.
- the point analysis was performed within a range in which the diffusion region could be limited by measuring at least 10 points at intervals of 2 nm from the grain boundary and the grain boundary toward the center of the crystal grain.
- the same point analysis was performed on the same crystal particle and the same location for subcomponent elements other than Ca.
- the Ca concentration near the center of the crystal grain was also measured at one point by point analysis to obtain the Ca concentration in the Ca non-diffusion region.
- the term “Ca concentration” refers to the relative concentration of Ca with respect to 100 mol parts of Ti at the measurement point.
- the concentration measurement in the STEM point analysis was performed at 30 seconds per point, and the concentration of each element was determined by a simple quantitative method.
- “Ca diffusion depth” was defined from the crystal grain boundary to a place where a Ca concentration of 0.1 mol part or more relative to the Ca concentration measured near the center of the crystal grain was detected.
- the “averaged Ca concentration” is obtained by averaging the Ca concentration curve obtained by the point analysis, and this “averaged Ca concentration” is obtained. And the above-mentioned “Ca concentration near the center of the crystal grain” was determined and defined as “increased Ca concentration”.
- R diffusion region also has a concentration of 0.1 mol part or more relative to the R concentration measured near the center of the crystal grain at the same location where the Ca diffusion region was obtained.
- R is the diffusion depth of R up to the point where is detected, and the result is shown in the column of “R diffusion in Ca diffusion region” in Table 2.
- the case where R is diffused at least to the depth where Ca is diffused that is, the case where the average value of “Ca diffusion depth” ⁇ the average value of “R diffusion depth”
- the case where the depth is smaller than the depth in which Ca is diffused, that is, the average value of “Ca diffusion depth”> the average value of “R diffusion depth” is indicated by “ ⁇ ”.
- the analysis was performed by the same analysis method as that for obtaining the Ca diffusion region.
- the “Ca diffusion depth” is within 10% of the “crystal particle diameter” and the “increased Ca concentration” is 0.2 to Further, as shown in Table 1, the “Ca amount” is 0.5 to 2.5 mol parts, the “R amount” is 0.5 to 4 mol parts, and the “Mg amount” ”,“ Mn amount ”,“ V amount ”,“ Mo amount ”,“ Cr amount ”,“ Cu amount ”and“ Al amount ”, the M content is 0.5 to 2 mol parts, The condition that the “Si amount” is 1 to 4 mole parts is satisfied.
- this blended powder was wet-mixed with a ball mill and uniformly dispersed, and then subjected to a drying treatment to obtain an adjusted powder. Subsequently, the obtained adjusted powder was calcined at a temperature of 1000 ° C. to 1200 ° C. (the optimum temperature was set depending on the sample) to obtain a main component powder having an average particle size of 0.13 ⁇ m.
- R 2 O 3 CaCO 3 , R 2 O 3 , MgCO 3 , MnO, V 2 O 5 , WO 3, Co 2 O 3 , CuO, Al 2 O 3 , and SiO 2 powders were prepared as subcomponents.
- R 2 O 3 powder were prepared powders of Dy 2 O 3, Y 2 O 3, La 2 O 3, Sm 2 O 3, Gd 2 O 3, and Ho 2 O 3.
- each powder of these CaCO 3 , R 2 O 3 , MgCO 3 , MnO, V 2 O 5 , WO 3, Co 2 O 3 , CuO, Al 2 O 3 , and SiO 2 is mixed with 100 mol parts of Ti.
- Ca, R, Mg, Mn, V, W, Co, Cu, Al, and Si were weighed so that the respective molar parts shown in Table 3 were obtained, and used as subcomponent powders.
- the sub-component powder was added to the above-mentioned main component powder, and the mixed powder was wet-mixed with a ball mill and uniformly dispersed, and then subjected to a drying treatment to obtain a ceramic raw material.
- this laminate was polished, and the vicinity of the central portion in the length direction, width direction and thickness direction was processed into a thin piece, and then 20 crystal particles were analyzed by STEM.
- the STEM analysis method was the same as in Experimental Example 1. Ca was clearly detected in the vicinity of the center of the main component crystal particles, and it was confirmed that the main component of the crystal particles was composed of barium calcium titanate.
- the outer dimensions of the multilayer ceramic capacitor thus obtained are 1.0 mm in length, 0.5 mm in width, and 0.5 mm in thickness, and the average thickness of the dielectric ceramic layer interposed between the internal electrodes is 0. .8 ⁇ m.
- the number of effective dielectric ceramic layers was 250, and the counter electrode area per one dielectric ceramic layer was 0.27 mm 2 .
- the average thickness of the internal electrodes was 0.5 ⁇ m.
- the thickness of the dielectric ceramic layer and the thickness of the internal electrode were measured by the same method as in Experimental Example 1.
- the “Ca diffusion depth” is within 10% of the “crystal particle diameter”, and the “increased Ca concentration” is 0.2 to Further, as shown in Table 3, “Ca total amount” is 2.5 to 15 mol parts, “R amount” is 0.5 to 4 mol parts, “Mg amount”, “Mn amount”, “V amount”, “W amount”, “Co amount”, “Cu amount” and “Al amount”, the M content is 0.5 to 2 mol parts, and “Si amount” Is 1 to 4 mole parts.
- Samples 41 to 58 were also measured for R concentration by STEM point analysis at locations where Ca concentration was measured by STEM analysis. As a result, it was confirmed that R diffused in the diffusion region where the Ca concentration was high in any of the samples 41 to 58.
Abstract
Description
チタン酸バリウムを含む主成分と、
MgO、CaO、BaOおよびSrOから選択される少なくとも1種を含む第1副成分と、
酸化シリコンを主成分として含有する第2副成分と、
V2O5、MoO3およびWO3から選択される少なくとも1種を含む第3副成分と、
R1の酸化物(ただし、R1はSc、Er、Tm、YbおよびLuから選択される少なくとも1種)を含む第4副成分と、
CaZrO3またはCaO+ZrO2を含む第5副成分と、
R2の酸化物(ただし、R2はY、Dy、Ho、Tb、GdおよびEuから選択される少なくとも1種)を含む第6副成分と、
MnOを含む第7副成分とを有し、
前記主成分100モルに対する各副成分の比率が、
第1副成分:0.1~3モル、
第2副成分:2~10モル、
第3副成分:0.01~0.5モル、
第4副成分:0.5~7モル(ただし、第4副成分のモル数は、R1単独での比率である)、
第5副成分:0<第5副成分≦5モル、
第6副成分:9モル以下(ただし、第6副成分のモル数は、R2単独での比率である)、
第7副成分:0.5モル以下、であり、かつ
複数の結晶粒を含んで構成される誘電体セラミック組成物であって、
前記結晶粒には、少なくとも前記Caが該結晶粒の表面から内部に向けて拡散したCa拡散領域が形成してあり、
平均粒径D50の値を示す結晶粒を対象とした場合に、前記Ca拡散領域の平均深さTが、前記D50の10~30%の範囲に制御された、
誘電体セラミック組成物が示されている。
チタン酸バリウムを主成分とする主成分相と、前記主成分相の周囲に存在する拡散相とを有する誘電体粒子から構成される誘電体磁器組成物であって、
前記拡散相に存在する副成分元素が、前記拡散相の表面から前記誘電体粒子の中心に向けて拡散した深さの平均値を平均拡散深さとした場合に、
各誘電体粒子相互間の平均拡散深さのばらつきが、CV値で、5~30%であることを特徴とする誘電体セラミック組成物が示されている。
[本発明の前提となる構成]
この発明は、
結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
積層体の表面に形成され、かつ内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサにまず向けられる。
第1の局面では、上記積層体または上記誘電体セラミック層が、
BaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有する。
積層体において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
積層体を溶解処理して溶液とした場合において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
誘電体セラミック層において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
第2の局面では、上記積層体または上記誘電体セラミック層が、
Ba、CaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有する。
積層体において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
積層体を溶解処理して溶液とした場合において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
誘電体セラミック層において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
上述した構成に加えて、この発明は以下の特徴的構成を備える。
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である。
この発明は、積層セラミックコンデンサの製造方法にも向けられるが、この製造方法においても、誘電体セラミックに含まれるペロブスカイト型化合物が、BaおよびTiを含む場合の第1の局面と、Ba、CaおよびTiを含む場合の第2の局面とがある。
第1の局面では、この発明に係る積層セラミックコンデンサの製造方法は、
BaおよびTiを含むぺロブスカイト型化合物を主成分とする主成分粉末と、Ca化合物と、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)化合物と、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)化合物と、Si化合物と、を含む、セラミックスラリーを得る工程と、
セラミックスラリーをシート状に成形してセラミックグリーンシートを得る工程と、
セラミックグリーンシート上に内部電極を形成する工程と、
内部電極が形成されたセラミックグリーンシートを含む複数のセラミックグリーンシートを積層した構造の生の積層体を得る工程と、
生の積層体を焼成して、結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の誘電体セラミック層と、誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体を得る工程と、
内部電極の特定のものに電気的に接続されるように、積層体の表面に外部電極を形成する工程と、
を備え、さらに以下の構成を備える。
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である。
第2の局面では、この発明に係る積層セラミックコンデンサの製造方法は、
Ba、CaおよびTiを含むぺロブスカイト型化合物を主成分とする主成分粉末と、Ca化合物と、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)化合物と、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)化合物と、Si化合物と、を含む、セラミックスラリーを得る工程と、
セラミックスラリーをシート状に成形してセラミックグリーンシートを得る工程と、
セラミックグリーンシート上に内部電極を形成する工程と、
内部電極が形成されたセラミックグリーンシートを含む複数のセラミックグリーンシートを積層した構造の生の積層体を得る工程と、
生の積層体を焼成して、結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の誘電体セラミック層と、誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体を得る工程と、
内部電極の特定のものに電気的に接続されるように、積層体の表面に外部電極を形成する工程と、
を備え、さらに以下の構成を備える。
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である。
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下である。
実験例1では、誘電体セラミックに主成分として含まれるペロブスカイト型化合物をBaTiO3とした。
まず、主成分であるBaTiO3を得るための出発原料として、高純度のBaCO3、およびTiO2の各粉末を準備し、これらの粉末をボールミルで湿式混合し、均一に分散させた後、乾燥処理を施して、混合粉末を得た。次いで、得られた混合粉末を1100℃の温度で仮焼し、平均粒径が0.14μmである主成分粉末を得た。
次に、上記セラミック原料に、ポリビニルブチラール系バインダ、可塑剤および有機溶剤としてのエタノールを加え、これらをボールミルにより湿式混合し、セラミックスラリーを作製した。このセラミックスラリーをICP分析したところ、表1に示した調合組成と同一であることが確認された。
次に、各試料に係る積層セラミックコンデンサについて、以下のような評価を行なった。
積層セラミックコンデンサの誘電体セラミック層を構成する誘電体セラミックの結晶粒子径を以下の方法で求めた。
上記破断した試料から、積層セラミックコンデンサの長さ方向、幅方向および厚さ方向の中央部付近を薄片加工した後、STEMにて20個の結晶粒子を分析した。分析の対象とした結晶粒子は、積層セラミックコンデンサの長さ方向、幅方向および厚さ方向のそれぞれの中央付近から無作為に抽出したもので、上記D50値の80%以上の粒子径(円相当径)を持ったものを選択した。STEM薄片試料において粒子径が比較的小さく見られる結晶粒子は、薄片試料上で結晶粒の中心付近ではない断面を見せている可能性が高く、結晶粒子表面からの元素の拡散を評価するのに不適当であるので除外した。また、分析の対象とした結晶粒子は、隣接する結晶粒子との結晶界面が明瞭で、結晶粒界が薄片試料表面に対して垂直に近い方向で延びていると考えられるものを選択した。
Rの拡散領域についても、Caの拡散領域を求めたのと同じ箇所において、結晶粒子の中心付近で測定されたR濃度に対して0.1モル部以上多い濃度でRが検出された所までをRの拡散深さとし、表2の「Ca拡散領域でのRの拡散」の欄にその結果を示す。同欄において、少なくともCaが拡散している深さまでRが拡散している場合、つまり、「Ca拡散深さ」の平均値≦「Rの拡散深さ」の平均値、となる場合を「○」、Caが拡散している深さよりも浅い場合、つまり、「Ca拡散深さ」の平均値>「Rの拡散深さ」の平均値、となる場合を「△」と表示した。分析は、Caの拡散領域を求めたときと同様の分析法にて実施した。
積層セラミックコンデンサの静電容量を、自動ブリッジ式測定機を用い、25℃、1.0Vrmsおよび1kHzの条件にて測定した。30個の試料について静電容量を測定し、得られた平均測定値より、比誘電率を算出した。その結果が表2の「比誘電率」の欄に示されている。
温度条件を除いて、上記「比誘電率」測定の場合と同様の条件で、30個の積層セラミックコンデンサについて、-55℃から+125℃の範囲において、温度を変化させながら静電容量を測定し、25℃での静電容量値(C25)を基準として、変化量が最大となった静電容量値(CTC)について、そのときの変化率(ΔCTC)を、ΔCTC={(CTC-C25)/C25}×100[%]の式により算出した。その結果が表2の「静電容量温度特性」の欄に示されている。
積層セラミックコンデンサについて、自動ブリッジ式測定機を用い、温度25℃において、直流バイアスを印加していない状態での静電容量C0V、および2Vの直流バイアスを印加した状態での静電容量C2Vを測定した。そして、容量変化率={(C2V-C0V)/C0V}×100[%]を、30個の試料について平均して求めた。その結果が表2の「DC印加時容量変化」の欄に示されている。
絶縁抵抗計を用い、積層セラミックコンデンサに、25℃において10Vの直流電圧を120秒印加し、絶縁抵抗値を求めた。30個の試料について平均した絶縁抵抗値から比抵抗log(ρ/Ω・m)を算出した。その結果が表2の「比抵抗」の欄に示されている。
36個の積層セラミックコンデンサについて、150℃において15Vの直流電圧を印加し、絶縁抵抗の経時変化を観察した。各積層セラミックコンデンサの絶縁抵抗値が0.1MΩ以下になった時点を故障とした。故障時間をワイブルプロットにより解析し、平均故障時間(MTTF)を求めた。その結果が表2の「MTTF」の欄に示されている。
「比誘電率」…3000以上を合格と判断した。
「静電容量温度特性」…±15.0%以内を合格と判断した。
「DC印加時容量変化」…±10%以内を合格と判断した。
「比抵抗」…10以上を合格と判断した。
「MTTF」…100時間以上を合格と判断した。
実験例2では、誘電体セラミックに主成分として含まれるペロブスカイト型化合物を(Ba1-xCax)TiO3とした。
まず、主成分である(Ba1-xCax)TiO3の出発原料として、高純度のBaCO3、CaCO3およびTiO2の各粉末を準備し、これらを、(Ba1-xCax)TiO3における「x」が表3に示す「x量」となるように調合した。
次に、上記セラミック原料を用いて、実験例1の場合と同じ製造工程にて、セラミックスラリーを作製し、積層体を得た。なお、このセラミックスラリーをICP分析したところ、表3に示した調合組成と同一であることが確認された。
次に、各試料に係る積層セラミックコンデンサについて、実験例1の場合と同様の方法にて、「結晶粒子径」、「Ca拡散深さ」、「増加Ca濃度」、「比誘電率」、「DC印加時容量変化」、「比抵抗」、および「MTTF」を評価した。その結果が表4に示されている。
2 誘電体セラミック層
3,4 内部電極
5 積層体
6,7 外部電極
11 ペロブスカイト型結晶粒子
12 結晶粒界
13 表層部分
14 中心
15 Ca拡散深さ
Claims (10)
- 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記積層体が、
BaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記積層体において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記積層体が、
BaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記積層体を溶解処理して溶液とした場合において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記誘電体セラミック層が、
BaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記誘電体セラミック層において、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記積層体が、
Ba、CaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記積層体において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記積層体が、
Ba、CaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記積層体を溶解処理して溶液とした場合において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の積層された誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体と、
前記積層体の表面に形成され、かつ前記内部電極の特定のものに電気的に接続された外部電極と、
を備える、積層セラミックコンデンサであって、
前記誘電体セラミック層が、
Ba、CaおよびTiを含むペロブスカイト型化合物と、
Ca、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)、およびSiと、
を含有し、
前記誘電体セラミック層において、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサ。 - 「Ca拡散深さ」を規定する領域には、Rが同様に拡散している、請求項1ないし6のいずれかに記載の積層セラミックコンデンサ。
- 前記誘電体セラミック層は、各々の厚みの平均値が0.8μm以下である、請求項1ないし7のいずれかに記載の積層セラミックコンデンサ。
- BaおよびTiを含むぺロブスカイト型化合物を主成分とする主成分粉末と、Ca化合物と、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)化合物と、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)化合物と、Si化合物と、を含む、セラミックスラリーを得る工程と、
前記セラミックスラリーをシート状に成形してセラミックグリーンシートを得る工程と、
前記セラミックグリーンシート上に内部電極を形成する工程と、
前記内部電極が形成された前記セラミックグリーンシートを含む複数の前記セラミックグリーンシートを積層した構造の生の積層体を得る工程と、
前記生の積層体を焼成して、結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体を得る工程と、
前記内部電極の特定のものに電気的に接続されるように、前記積層体の表面に外部電極を形成する工程と、
を備える、積層セラミックコンデンサの製造方法であって、
前記セラミックスラリーにおいて、Ti含有量を100モル部としたとき、
Ca含有量が0.5モル部以上かつ2.5モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサの製造方法。 - Ba、CaおよびTiを含むぺロブスカイト型化合物を主成分とする主成分粉末と、Ca化合物と、R(Rは、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、HoおよびYのうちの少なくとも1種である。)化合物と、M(Mは、Mn、Co、Fe、Cr、Cu、Mg、Al、V、MoおよびWのうちの少なくとも1種である。)化合物と、Si化合物と、を含む、セラミックスラリーを得る工程と、
前記セラミックスラリーをシート状に成形してセラミックグリーンシートを得る工程と、
前記セラミックグリーンシート上に内部電極を形成する工程と、
前記内部電極が形成された前記セラミックグリーンシートを含む複数の前記セラミックグリーンシートを積層した構造の生の積層体を得る工程と、
前記生の積層体を焼成して、結晶粒子および結晶粒界を有する誘電体セラミックからなる、複数の誘電体セラミック層と、前記誘電体セラミック層間の複数の界面に沿ってそれぞれ配置された複数の内部電極と、を有する積層体を得る工程と、
前記内部電極の特定のものに電気的に接続されるように、前記積層体の表面に外部電極を形成する工程と、
を備える、積層セラミックコンデンサの製造方法であって、
前記セラミックスラリーにおいて、Ti含有量を100モル部としたとき、
Ca含有量が2.5モル部以上かつ15モル部以下であり、
R含有量が0.5モル部以上かつ4モル部以下であり、
M含有量が0.5モル部以上かつ2モル部以下であり、
Si含有量が1モル部以上かつ4モル部以下であり、
前記結晶粒子は、前記ペロブスカイト型化合物を主成分とするペロブスカイト型結晶粒子を含み、
前記ペロブスカイト型結晶粒子において、測定点でのTiの100モル部に対するCaの相対濃度でCa濃度を表わした場合、
結晶粒子の中心付近で測定されたCa濃度に対して0.1モル部以上多いCa濃度が測定された領域の、結晶粒界から結晶粒子の中心に向かって測定した距離を「Ca拡散深さ」と定義したとき、「Ca拡散深さ」が結晶粒子の平均粒径の10%以内であり、かつ、
「Ca拡散深さ」を規定する領域での平均Ca濃度と、結晶粒子の中心付近で測定されたCa濃度と、の差を「増加Ca濃度」と定義したとき、「増加Ca濃度」が0.2モル部以上かつ5モル部以下である、
積層セラミックコンデンサの製造方法。
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