WO2015019468A1 - 霧化装置 - Google Patents
霧化装置 Download PDFInfo
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- WO2015019468A1 WO2015019468A1 PCT/JP2013/071525 JP2013071525W WO2015019468A1 WO 2015019468 A1 WO2015019468 A1 WO 2015019468A1 JP 2013071525 W JP2013071525 W JP 2013071525W WO 2015019468 A1 WO2015019468 A1 WO 2015019468A1
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- WIPO (PCT)
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- container
- solution
- gas supply
- internal cavity
- cavity structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0615—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced at the free surface of the liquid or other fluent material in a container and subjected to the vibrations
Definitions
- the present invention relates to an atomization apparatus that atomizes a solution into a fine mist (mist) and conveys the mist to the outside.
- the technology for atomizing (misting) liquids using ultrasonic waves has a long history, and technologies related to various atomization devices already exist. For example, there exists a technique in which a mist solution is transported by air using a blower. An apparatus using the blower is inexpensive and can easily send a large amount of mist to the outside.
- ultrasonic atomizers may be used in the field of electronic device production.
- the ultrasonic atomizing device mists a solution using ultrasonic waves, and sends the mist solution to the outside by a carrier gas.
- a carrier gas By spraying the solution (mist) conveyed to the outside onto the substrate, a thin film for an electronic device is formed on the substrate.
- Patent Documents 1-5 exist as prior documents relating to the present invention.
- mist is taken out from the ultrasonic atomizer by blowing air from a blower.
- mist is taken out from the ultrasonic atomizer by the carrier gas.
- mist carrier gas in the ultrasonic atomizer.
- mist carrier gas or clean dry air from which dust and moisture have been removed
- the amount of carrier gas for transporting the mist is increased, the mist is sprayed on the substrate with a lot of force. As a result, the adhesion efficiency of the mist to the substrate is reduced, or the flow of mist is disturbed and film formation unevenness occurs. Furthermore, using a large amount of high-purity gas leads to high costs.
- an object of the present invention is to provide an atomization apparatus that can convey a large amount of mist (high concentration mist) to the outside with a smaller amount of carrier gas.
- the atomizing device is an atomizing device that mists a solution.
- the atomization apparatus is provided with the container in which a solution is accommodated, the mist generator which mist-forms a solution, and the internal cavity structure which is arrange
- the atomizing device is disposed in the container and supplies a gas to a gas supply space that is a space surrounded by the inner surface of the container and the outer surface of the internal cavity structure, A connection portion that connects the cavity and the gas supply space is provided.
- an internal cavity structure is disposed in a container, and a gas is supplied to the gas supply space, and a connection portion that connects the cavity of the internal cavity structure and the gas supply space is formed. Has been.
- the gas supplied into the gas supply space is filled in the gas supply space, the gas moves into the cavity of the internal cavity structure through the connection portion. Therefore, even if the gas is output relatively slowly in the gas supply space, a strong gas is output from the connecting portion. That is, in the atomization apparatus according to the present invention, a large amount of mist-like solution can be conveyed outside the atomization apparatus by supplying less gas in the container.
- connection part 5 which connects the mist formation space 3H and the gas supply space 1H. It is a side view which shows the structural example of the connection part 5 which connects the mist formation space 3H and the gas supply space 1H. It is a side view which shows the structural example of the connection part 5 which connects the mist formation space 3H and the gas supply space 1H. It is a side view which shows the structural example of the connection part 5 which connects the mist formation space 3H and the gas supply space 1H. It is a side view which shows the structural example of the connection part 5 which connects the mist formation space 3H and the gas supply space 1H.
- FIG. 4 is a schematic cross-sectional view showing a state in which a vibration surface (vibration plate) 2p of the ultrasonic vibrator 2 is disposed at an inclination.
- FIG. It is a top view which shows a mode that the some ultrasonic transducer
- FIG. It is a figure which shows the experimental data explaining the effect of the atomization apparatus 100 which concerns on embodiment.
- the present invention relates to an atomizing device that mists a solution.
- a container for storing the solution and a mist generator for misting the solution are provided. Furthermore, the atomization apparatus which concerns on this invention is arrange
- the inside of the container is divided by the cavity (misting space) of the inner cavity structure and the space (gas supply space) surrounded by the inner surface of the container and the outer surface of the inner cavity structure.
- the two spaces are connected via a connecting portion which is a narrow passage.
- the atomization apparatus includes a gas supply unit disposed in the container.
- the gas supply unit supplies gas to the gas supply space.
- the mist atomized by the atomizing device is output to the outside of the atomizing device, and is used as a raw material in the film forming process of an electronic device (FPD, solar cell, LED, touch panel, etc.) in another device. Used.
- FIG. 1 is a cross-sectional view showing a cross-sectional configuration of an atomization apparatus 100 according to the present embodiment.
- the atomization apparatus 100 includes a container 1, a mist generator 2, an internal cavity structure 3, and a gas supply unit 4. Furthermore, the atomization apparatus 100 illustrated in FIG. 1 includes a separator 8, a liquid level position detection sensor 10, and a solution supply unit 11.
- the container 1 may have any shape as long as a space is formed inside.
- the container 1 has a substantially cylindrical shape, and a space surrounded by the inner circumferential side surface is formed in the container 1.
- the container 1 contains a solution.
- the mist generator 2 is the ultrasonic vibrator 2 that mists (mists) the solution by applying ultrasonic waves to the solution in the container 1.
- the ultrasonic transducer 2 is disposed on the bottom surface of the container 1.
- the number of ultrasonic transducers 2 may be one or two or more, but in the configuration example of FIG. 1, a plurality of ultrasonic transducers 2 are arranged on the bottom surface of the container 1.
- the internal cavity structure 3 is a structure having a cavity inside. An opening is formed in the upper surface portion of the container 1, and as shown in FIG. 1, the internal cavity structure 3 is disposed so as to be inserted into the container 1 through the opening. .
- the space between the internal cavity structure 3 and the container 1 is sealed. That is, the space between the internal cavity structure 3 and the opening of the container 1 is sealed.
- the shape of the internal cavity structure 3 may be any shape as long as it has a shape in which a cavity is formed.
- the internal cavity structure 3 has a flask shape without a bottom surface. More specifically, the internal cavity structure 3 shown in FIG. 1 includes a tube portion 3A, a truncated cone portion 3B, and a cylindrical portion 3C.
- the pipe part 3A is a cylindrical pipe part, and the pipe part 3A extends from the outside of the container 1 into the container 1 so as to be inserted from the upper surface of the container 1. More specifically, the tube portion 3 ⁇ / b> A is divided into an upper tube portion disposed outside the container 1 and a lower tube portion disposed inside the container 1. And the upper pipe part is attached from the upper surface outer side of the container 1, and the lower pipe part is attached from the upper surface inner side of the container 1, and in the state where these are attached, the upper pipe part and the lower pipe part Are communicated through an opening disposed on the upper surface of the container 1.
- One end of the tube portion 3A is connected to the outside of the container 1, for example, into a thin film deposition apparatus.
- the other end of the tube portion 3A is connected to the upper end side of the truncated cone portion 3B in the container 1.
- the frustoconical part 3B has a frustoconical appearance (side wall surface), and a cavity is formed inside.
- the truncated cone part 3B has an open top surface and a bottom surface (that is, does not have a top surface and a bottom surface that closes a cavity formed therein).
- the truncated cone part 3B exists in the container 1, and the upper end side of the truncated cone part 3B is connected (communication) to the other end of the pipe part 3A as described above.
- the lower end side is connected to the upper end side of the cylindrical portion 3C.
- the truncated cone part 3B has a cross-sectional shape that spreads from the upper end side toward the lower end side. That is, the diameter of the side wall on the upper end side of the truncated cone part 3B is the smallest (same as the diameter of the pipe part 3A), the diameter of the side wall on the lower end side of the truncated cone part 3B is the largest (same as the diameter of the cylindrical part 3C), The diameter of the side wall of the truncated cone part 3B increases smoothly from the upper end side toward the lower end side.
- the cylindrical part 3C is a part having a cylindrical shape, and the height of the cylindrical part 3C is smaller than the height of the truncated cone part 3B.
- the upper end side of the cylindrical portion 3 ⁇ / b> C is connected (communication) to the lower end side of the truncated cone portion 3 ⁇ / b> B, and the lower end side of the cylindrical portion 3 ⁇ / b> C faces the bottom surface of the container 1.
- the lower end side of the cylindrical portion 3C is released (that is, does not have a bottom surface).
- the central axis in the direction extending from the tube portion 3 ⁇ / b> A through the truncated cone portion 3 ⁇ / b> B to the cylindrical portion 3 ⁇ / b> C in the internal cavity structure 3 is substantially the same as the cylindrical central axis of the container 1. I'm doing it.
- the internal cavity structure 3 is an integral structure, as shown in FIG. 1, the upper pipe part which comprises a part of 3 A of pipe parts, the lower pipe part which comprises the other part of the pipe part 3A, and a truncated cone You may comprise combining each member of the part 3B and the cylindrical part 3C.
- the lower end portion of the upper tube portion is connected to the outer upper surface of the container 1
- the upper end portion of the lower tube portion is connected to the inner upper surface of the container 1
- the truncated cone is connected to the lower end portion of the lower tube portion.
- the inner cavity structure 3 having the above-described shape is disposed so as to be inserted into the container 1 so that the interior of the container 1 is divided into two spaces. That is, a cavity portion formed inside the internal cavity structure 3 (that is, a space surrounded by the inner surface of the internal cavity structure 3, hereinafter referred to as a mist formation space 3H), an inner surface of the container 1, The interior of the container 1 is partitioned into a space formed by the outer surface of the internal cavity structure 3 (hereinafter referred to as a gas supply space 1H).
- connection portion 5 that is a gap for connecting the mist formation space 3H and the gas supply space 1H is formed.
- the connection portion 5 is disposed on the lower end side of the internal cavity structure 3. That is, in the configuration example of FIG. 1, the connection portion 5 is configured by the lower end portion of the internal cavity structure 3 and a part of the upper surface of the separator 8 described later.
- the opening size of the connection portion 5 is about 0.1 mm to 10 mm.
- the connecting portion 5 can be formed by drilling a small hole 3f (opening size is 0.1 mm to 10 mm) on the side surface of the internal cavity structure 3 (FIG. 2).
- the bottom surface of the internal cavity structure 3 may be formed, and the bottom surface may function as a separator 8 described later.
- the hole 3 f may be scattered and evenly formed in the side surface of the internal cavity structure 3, and by forming an annular slit in the side surface of the internal cavity structure 3, the connection portion 5 may be formed.
- connection portion 5 is formed between the lower end portion of the internal cavity structure 3 and the upper end portion of the separator 8 and is an annular slit. .
- the connecting portion 5 is formed by drilling a small notch 3g (opening size is 0.1 mm to 10 mm) on the side surface of the lower end portion of the internal cavity structure 3. You can also Here, in the structure of FIG. 4, the lower end part of the internal cavity structure 3 exists above the liquid level 15A. On the other hand, in the configuration of FIG.
- the lower end portion of the internal cavity structure 3 is immersed in the solution 15, a part of the notch 3g is present in the solution 15, and the other part of the notch 3g is liquid. It exists above the surface 15A (the other part of the notch 3g functions as the connecting part 5). Moreover, the notches 3g in FIGS. 4 and 5 are scattered and evenly formed on the side surface of the lower end portion of the internal cavity structure 3.
- the shape and arrangement position of the connecting portion 5 can be arbitrarily selected, but the connecting portion 5 is located above the liquid surface 15A of the solution 15 and is arranged near the liquid surface 15A. Is preferred.
- the gas supply space 1 ⁇ / b> H is widest on the upper side of the container 1 and proceeds to the lower side of the container 1. It is getting narrower. That is, the gas supply space 1H in the portion surrounded by the outer surface of the tube portion 3A and the inner surface of the container 1 is the widest, and the gas supply space 1H in the portion surrounded by the outer surface of the cylindrical portion 3C and the inner surface of the container 1 Is the narrowest.
- the gas supply unit 4 is disposed on the upper surface of the container 1. From the gas supply unit 4, a carrier gas for feeding the solution misted by the ultrasonic vibrator 2 to the outside through the tube portion 3 ⁇ / b> A of the internal cavity structure 3 is supplied.
- a carrier gas for feeding the solution misted by the ultrasonic vibrator 2 to the outside through the tube portion 3 ⁇ / b> A of the internal cavity structure 3 is supplied.
- a high-concentration inert gas can be used as the carrier gas.
- the gas supply unit 4 is provided with a supply port 4 a, and the carrier gas is supplied from the supply port 4 a existing in the container 1 into the gas supply space 1 ⁇ / b> H of the container 1. .
- the carrier gas supplied from the gas supply unit 4 is supplied into the gas supply space 1H, and after the gas supply space 1H is filled, the carrier gas is introduced into the mist formation space 3H through the connection unit 5.
- the carrier gas since the carrier gas is filled in the gas supply space 1H and then supplied to the mist formation space 3H through the narrow connection portion 5, it is faster than the gas velocity of the carrier gas output from the supply port 4a.
- the gas velocity of the carrier gas output from the connection unit 5 is higher. In other words, even if the carrier gas is gently output from the supply port 4a, the carrier gas is vigorously supplied from the connecting portion 5 to the mist formation space 3H. In order to make the flow of the carrier gas more prominent, it is desirable to adopt the following configuration.
- the opening area of the opening of the connecting portion 5 is smaller than the opening area of the supply port 4a of the gas supply unit 4.
- the dimension between the inner wall surface of the container 1 and the outer wall surface of the internal cavity structure 3 in the gas supply space 1H in the vicinity of the connecting portion 5 is the same as that in the gas supply space 1H in the vicinity of the gas supply portion 4 (supply port 4a).
- the dimension between the inner wall surface of the container 1 and the outer wall surface of the internal cavity structure 3 is preferably smaller.
- the supply port 4a of the gas supply unit 4 does not directly face the gas supply space 1H side facing the connection unit 5. For example, in the configuration example of FIG.
- the supply port 4 a of the gas supply unit 4 faces the front and back of the page of FIG. 1, and faces the gas supply space 1 H facing the connection unit 5 (that is, the inner wall of the container 1). And the region surrounded by the cylindrical wall 3C of the internal cavity structure 3 and the gas supply space 1H side).
- the separator 8 is disposed between the bottom surface of the container 1 and the lower end side of the internal cavity structure 3. As shown in FIG. 1, the separator 8 has a cup shape. That is, the separator 8 has the recessed part 8A and the flat edge part 8B connected to the upper end part of the recessed part 8A.
- the flat edge 8B of the separator 8 is an annular edge extending from the upper end of the recess 8A toward the inner wall of the container 1, and the lower surface of the flat edge 8B 1 is fixed to a protrusion 1D of a container 1 disposed in the container 1.
- the connection portion 5 is configured between the flat edge portion 8 ⁇ / b> B and the lower end portion of the internal cavity structure 3.
- the bottom surface of the recess 8A of the separator 8 is gently inclined from the side surface of the recess 8A toward the center. More specifically, the dimension between the bottom surface of the recess 8A and the bottom surface of the container 1 gradually decreases as the distance from the side surface of the recess 8A progresses to the center of the recess 8A.
- the space formed between the bottom surface of the container 1 and the bottom surface of the separator 8 is filled with an ultrasonic transmission medium 9.
- the ultrasonic transmission medium 9 has a function of transmitting ultrasonic vibration generated from the ultrasonic vibrator 2 disposed on the bottom surface of the container 1 to the separator 8. That is, the ultrasonic transmission medium 9 is accommodated in a space formed between the bottom surface of the container 1 and the bottom surface of the separator 8 so that vibration energy can be transmitted to the separator 8.
- a liquid as the ultrasonic transmission medium 9 for example, water.
- a solution 15 to be mist is contained on the bottom surface of the recess 8A of the separator 8.
- the liquid surface 15A of the solution 15 is positioned below the position where the connection portion 5 is disposed (see FIG. 1).
- the separator 8 and the ultrasonic transmission medium 9 are omitted can be adopted.
- the solution 15 is directly stored on the bottom surface of the container 1. Even in this case, the liquid level 15A of the solution 15 is located below the position where the connection portion 5 is disposed.
- the solution 15 to be mist is, for example, a strongly alkaline / acidic liquid and there is a concern about the influence on the ultrasonic vibrator 2 disposed on the bottom surface of the container 1, as shown in FIG.
- a material that is not affected by the alkaline / acidic solution 15 is used as the separator 8.
- the atomization apparatus 100 includes a liquid surface position detection sensor 10 and a solution supply unit 11.
- the solution supply unit 11 penetrates the container 1 and the internal cavity structure 3, and the solution supply port is disposed on the bottom surface side of the container 1.
- a tank filled with the solution 15 is prepared outside the atomizer 100, and the solution supply unit 11 transfers the solution 15 from the tank to the separator 8 (in a configuration without the separator 8, a container To the bottom of 1).
- the liquid level position detection sensor 10 is provided in addition to the solution supply unit 11 so that the position of the liquid level 15 ⁇ / b> A is held at a position where the mist formation efficiency is the best. Yes.
- the liquid surface position detection sensor 10 is a sensor that can detect the liquid surface height position of the solution 15.
- the liquid level position detection sensor 10 penetrates the container 1 and the internal cavity structure 3, and a part of the sensor 10 is immersed in the solution 15.
- the liquid surface position detection sensor 10 detects the position of the liquid surface 15 ⁇ / b> A of the solution 15.
- the solution supply unit 11 replenishes (supplies) the solution 15 into the container 1 so that the detection result of the liquid surface position detection sensor 10 is the position where the mist formation efficiency of the solution 15 is the best.
- the position of the liquid level 15A of the solution 15 is held so as to be the height position with the best mist efficiency.
- the position of the liquid surface 15 ⁇ / b> A having the best mist efficiency is known in advance by experiments or the like, and is set in advance as a set value in the atomization apparatus 100.
- the atomization device 100 adjusts the supply of the solution 15 by the solution supply unit 11 based on the set value and the detection result of the liquid surface position detection sensor 10.
- the liquid column 6 stands from the liquid surface 15, and the liquid surface 15 ⁇ / b> A shakes, which may make it difficult to accurately detect the liquid surface position. Therefore, it is desirable to provide a cover around the liquid level position detection sensor 10 to prevent the fluctuation of the liquid level 15A around the liquid level position detection sensor 10.
- the solution 15 in the container 1 is finely atomized by the ultrasonic vibrator 2, and the mist-like solution 7 fills the mist formation space 3 ⁇ / b> H in the internal cavity structure 3.
- the mist-like solution 7 rides on the carrier gas output from the connection portion 5, passes through the tube portion 3 ⁇ / b> A of the internal cavity structure 3, and is output to the outside of the atomizer 100.
- the ultrasonic transducer 2 applies ultrasonic vibrations to the solution 15 via the ultrasonic transmission medium 9 and the separator 8. Then, as shown in FIG. 1, the liquid column 6 rises from the liquid surface 15 ⁇ / b> A, and the solution 15 moves to liquid particles and mist.
- the mist formation efficiency is lowered.
- FIG. 6 shows a schematic configuration of the ultrasonic transducer 2, but as shown in FIG. 6, the vibration surface (vibration plate) 2 p is disposed to be inclined. That is, the liquid level 15A and the vibration surface (vibration plate) 2p are not parallel.
- the ultrasonic vibrator 2 is arranged in the container 1 so that the propagation direction of the vibration energy generated by the ultrasonic vibrator 2 is not perpendicular to the liquid surface 15.
- ultrasonic transducers 2 improves the mist efficiency.
- each ultrasonic transducer 2 is inclined with respect to the liquid surface 15A of the solution 15 so that the liquid column 6 does not rise vertically with respect to the liquid surface 15A. Furthermore, it is desirable that each ultrasonic transducer 2 is not disposed at a lower position where a droplet from the liquid column 6 of the solution 15 formed by the other ultrasonic transducer 2 falls. Thereby, the droplets etc. from each liquid column 6 do not fall above any of the ultrasonic vibrators 2 and can suppress a decrease in mist efficiency.
- each ultrasonic transducer 2 may be disposed as follows from the viewpoint of suppressing a reduction in mist efficiency. That is, below the solution 15, the ultrasonic transducers 2 are arranged on the bottom surface of the container 1 in a ring shape and evenly. Here, it is preferable that the annular diameter is as large as possible.
- the ultrasonic transducers 2 are arranged in an annular manner along the outer periphery of the recess 8 ⁇ / b> A of the separator 8. It is desirable to do.
- the vibration surface 2p of each ultrasonic transducer 2 is inclined toward the annular center side (that is, the center side of the container 1).
- the illustrated arrow indicates the liquid column 6.
- the container 1 is configured by combining several members, and the container 1 has several members penetrating and disposed.
- the container 1 having the configuration is sealed or the like so as to ensure airtightness in the container 1.
- the solution supply unit 11 supplies the solution 15 from the outside into the separator 8 so that the detection result by the liquid surface position detection sensor 10 becomes a predetermined liquid surface position set in advance. Then, after the detection result by the liquid level position detection sensor 10 reaches the predetermined liquid level position, the atomizing device 100 supplies high frequency power to the ultrasonic transducer 2. Thereby, the vibration surface of the ultrasonic vibrator 2 vibrates.
- the vibration energy generated by the vibration of the vibration surface is propagated to the solution 15 through the ultrasonic transmission water 9 and the separator 8. Then, the vibration energy reaches the liquid level 15A of the solution 15. Ultrasonic waves are difficult to propagate in gas. Therefore, the vibration energy that has reached the liquid surface 15A lifts the liquid surface 15A of the solution 15, and the liquid column 6 is formed. Further, the tip of the liquid column 6 is shredded finely to generate a large number of fine mists (see the mist-like solution 7 in FIG. 1).
- the gas supply unit 4 supplies the carrier gas into the gas supply space 1H from the outside.
- the carrier gas supplied from the supply port 4a fills the gas supply space 1H, and then moves to the mist formation space 3H through the connection portion 5 having a narrow opening.
- the carrier gas is filled in the gas supply space 1H, it is output to the mist formation space 3H through the narrow connection portion 5. Accordingly, even if the carrier gas is output relatively slowly from the supply port 4a, the carrier gas having a strong momentum is output from the connection portion 5.
- the carrier gas output from the connecting portion 5 lifts the mist-like solution 7 filling the mist formation space 3H upward from the bottom of FIG.
- the mist-like solution 7 rides on the carrier gas, passes through the tube portion 3A of the internal cavity structure 3, and is output to the outside of the atomizer 100.
- the internal cavity structure is disposed so as to be inserted into the container 1.
- a gas supply space 1H and a mist formation space 3H are formed in the container 1, and the gas supply space 1H and the mist formation space 3H are connected via a narrow connecting portion 5.
- the carrier gas supplied into the gas supply space 1H fills the gas supply space 1H and then moves into the mist formation space 3H via the narrow connection portion 5. Therefore, even if the carrier gas is output relatively slowly from the supply port 4a, a strong momentum carrier gas is output from the connection portion 5. That is, in the atomization apparatus 100 according to the present embodiment, a large amount of mist-like solution 7 (high concentration mist) is conveyed out of the atomization apparatus 100 by supplying less carrier gas in the container 1. be able to.
- mist-like solution 7 is efficiently removed from the atomization apparatus 100 outside. Can be output.
- FIG. 8 shows the experimental results showing the relationship between the carrier gas flow rate and the amount of mist-like solution 7 (hereinafter referred to as mist).
- the vertical axis in FIG. 8 is the average atomization amount (g (gram) / min (min)), and the horizontal axis in FIG. 8 is the carrier gas flow rate (L (liter) / min (min)).
- ⁇ indicates the result for the atomizing device 100
- ⁇ indicates the result for the comparison target atomizing device 200.
- FIG. 9 is a cross-sectional view showing the configuration of the comparison target atomization apparatus 200.
- the comparison target atomizing device 200 does not have the internal cavity structure 3 included in the atomizing device 100.
- the comparison target atomization apparatus 200 includes a pipe part 30 for conveying the mist-like solution 7 to the outside.
- the pipe part 30 is arrange
- the atomization apparatus 100 and the comparison object atomization apparatus 200 are the same structures, and perform the same operation
- the flow rate of the carrier gas was changed, and the change (decrease amount) in the weight of the external solution tank within a predetermined time was measured for each flow rate of the carrier gas.
- the change in the weight of the external solution tank is the amount of atomization.
- the value which divided the weight change of the said external solution tank by the said predetermined time is the average atomization amount (g / min) shown on the vertical axis
- the atomization device 100 efficiently transports the mist-like solution 7 to the outside by 20% or more compared to the comparison target atomization device 200. can do.
- connection portion 5 may be configured by the end portion of the internal cavity structure 3.
- the connection portion 5 is a gap between the lower end portion of the internal cavity structure 3 and the flat edge portion 8 ⁇ / b> B of the separator 8.
- the atomization apparatus 100 can transport the mist-like solution 7 to the outside more efficiently.
- the opening area of the opening of the connection part 5 may be smaller than the opening area of the supply port 4a of the gas supply part 4.
- the atomization apparatus 100 sets the dimension between the inner wall surface of the container 1 and the outer wall surface of the internal cavity structure 3 in the gas supply space 1H in the vicinity of the connection portion 5 to the gas supply space 1H in the vicinity of the gas supply portion 4.
- the dimension between the inner wall surface of the container 1 and the outer wall surface of the internal cavity structure 3 may be smaller.
- these configurations may be arbitrarily combined.
- the atomizing device 100 can supply the carrier gas more vigorously from the connection portion 5 to the mist formation space 3H even if the carrier gas is gently output from the supply port 4a. . That is, more mist-like solution 7 can be output to the outside with a smaller amount of carrier gas.
- the ultrasonic vibrator 2 is disposed on the bottom surface of the container 1.
- a separator 8 may be disposed between the bottom surface of the container 1 and the end side of the internal cavity structure 3.
- the ultrasonic transmission medium 9 is filled between the container 1 and the separator 8, and the solution 15 to be misted is supplied to the upper surface of the separator 8.
- the separator 8 and the ultrasonic transmission medium 9 are provided, even if the solution 15 is strongly acidic (or strongly alkaline), the solution 15 is directly applied to the ultrasonic vibrator 2. It is possible to prevent exposure and to efficiently transmit vibration energy to the solution 15 in the separator 8.
- a plurality of ultrasonic transducers 2 may be disposed.
- the solution 15 can be mist-ized more efficiently.
- FIG. 10 shows experimental results showing the relationship between the number of ultrasonic transducers 2 and the amount of mist-like solution 7 (hereinafter referred to as mist).
- the vertical axis in FIG. 10 is the average atomization amount (g (grams) / min (minutes)), and the horizontal axis in FIG. 10 is the number (number) of ultrasonic transducers 2 disposed.
- ⁇ indicates the result for the atomizing apparatus 100 according to the present invention illustrated in FIG. 1
- “ ⁇ ” indicates the result for the comparison target atomizing apparatus 200 illustrated in FIG. 9. is there.
- the average atomization amount was measured as described with reference to FIG. 8 by changing the number of ultrasonic transducers 2 arranged in the atomization apparatuses 100 and 200.
- the atomization apparatus 100 As can be seen from the experimental results shown in FIG. 10, as the number of the ultrasonic transducers 2 is increased, the atomization apparatus 100 according to the present embodiment is more mist-like than the comparison target atomization apparatus 200. The solution 7 can be produced more efficiently. Therefore, by arranging a plurality of ultrasonic transducers 2 in the atomization apparatus 100, the atomization apparatus 100 can achieve an unexpected and significant improvement in mist efficiency.
- the vibration surface of the ultrasonic transducer 2 is inclined with respect to the liquid surface of the solution 15 (see FIG. 6).
- the vibrator 2 is not disposed at a lower position where the liquid droplets 6 of the solution 15 formed by the other ultrasonic vibrators 2 fall.
- the plurality of ultrasonic transducers 2 are arranged in an annular shape on the bottom surface of the container 1, and the vibration surface of each ultrasonic transducer 2 is tilted toward the center of the annular shape (see FIG. 7).
- the atomization apparatus 100 can mist the solution 15 more efficiently even if a plurality of ultrasonic transducers 2 are disposed.
- the atomization apparatus 100 includes the liquid level position detection sensor 10 and the solution supply unit 11, and the height of the liquid level 15 ⁇ / b> A detected by the liquid level position detection sensor 10 is determined in advance.
- the solution supply unit 11 may supply the solution 15 into the container 1 so that the predetermined position (the height of the liquid surface 15A at which mist formation can be most efficiently performed) is achieved.
- the atomization apparatus 100 allows the amount of the solution 15 (the height of the liquid surface 15A) accommodated in the container 1 to be a position where mist formation can be most efficiently performed. Can be maintained. Therefore, the atomization apparatus 100 can perform mist formation continuously in a situation where the mist formation efficiency is good for a long time.
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Abstract
Description
図1は、本実施の形態に係る霧化装置100の断面構成を示す断面図である。
1H ガス供給空間
2 ミスト化器(超音波振動子)
2p 振動面(振動板)
3 内部空洞構造体
3A 管部
3B 円錐台部
3C 円筒部
3H ミスト化空間
3f 孔
3g 切り欠き
4 ガス供給部
4a 供給口
5 接続部
6 液柱
7 ミスト状の溶液
8 セパレータ
8A 凹部
8B 平縁部
9 超音波伝達媒体
10 液面位置検知センサー
11 溶液供給部
15 溶液
15A 液面
100 霧化装置
Claims (12)
- 溶液(15)をミスト化する霧化装置(100)であって、
前記溶液が収容される容器(1)と、
前記溶液をミスト化するミスト化器(2)と、
前記容器内に配設され、内部が空洞(3H)である内部空洞構造体(3)と、
前記容器に配設され、前記容器の内面と前記内部空洞構造体の外面とにより囲まれた空間であるガス供給空間(1H)にガスを供給する、ガス供給部(4)と、
前記内部空洞構造体の前記空洞と前記ガス供給空間とを接続する接続部(5)とを、備えている、
ことを特徴とする霧化装置。 - 前記接続部は、
前記内部空洞構造体の側面部に、穿設または切り欠きされている、
ことを特徴とする請求項1に記載の霧化装置。 - 前記接続部の一部は、
前記内部空洞構造体の端部により構成されている、
ことを特徴とする請求項1に記載の霧化装置。 - 前記接続部の開口部の開口面積は、 前記ガス供給部の供給口の開口面積よりも、小さい、
ことを特徴とする請求項1乃至請求項3の何れかに記載の霧化装置。 - 前記接続部近傍の前記ガス供給空間における、前記容器の内壁面と前記内部空洞構造体の外壁面との間の寸法は、
前記ガス供給部近傍の前記ガス供給空間における、前記容器の内壁面と前記内部空洞構造体の外壁面との間の寸法よりも、小さい、
ことを特徴とする請求項1乃至請求項4の何れかに記載の霧化装置。 - 前記ガス供給部の供給口は、
前記接続部に面している前記ガス供給空間に、直接的に面していない、
ことを特徴とする請求項1乃至請求項5の何れに記載の霧化装置。 - 前記ミスト化器は、
前記溶液に対して超音波を印加する超音波振動子であって、 前記超音波振動子は、
前記容器の底面に配設されており、
前記容器の前記底面と、前記内部空洞構造体の端部側との間に配設される、セパレータ(8)と、
前記容器と前記セパレータとの間に形成される空間に収容される、超音波伝達媒体(9)とを、さらに備えており、
前記溶液は、
前記セパレータの上面に存する、
ことを特徴とする請求項1乃至請求項6の何れかに記載の霧化装置。 - 前記超音波振動子は、
複数である、
ことを特徴とする請求項7の何れかに記載の霧化装置。 - 前記超音波振動子は、
前記容器の底面に配設されており、
前記超音波振動子の振動面は、
前記溶液の液面に対して傾いており、
各前記超音波振動子は、
他の前記超音波振動子により形成された前記溶液の液柱(6)からの液滴が、落下する下方位置には、配設されていない、ことを特徴とする請求項8に記載の霧化装置。 - 複数の前記超音波振動子は、
前記容器の前記底面において、環状に配設されており、
前記超音波振動子の前記振動面は、
前記環状の中心側に傾いている、
ことを特徴とする請求項9に記載の霧化装置。 - 前記溶液の液面(15A)高さ位置を検出する、液面位置検知センサー(10)を、さらに備えている、
ことを特徴とする請求項1乃至請求項10の何れかに記載の霧化装置。 - 前記溶液を前記容器内に供給する溶液供給部(11)を、さらに備えており、
前記液面位置検知センサーにより検出される前記液面高さが、予め定められた所定位置となるように、前記溶液供給部は、前記溶液を前記容器内に供給する、
ことを特徴とする請求項11に記載の霧化装置。
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PCT/JP2013/071525 WO2015019468A1 (ja) | 2013-08-08 | 2013-08-08 | 霧化装置 |
US14/906,465 US10456802B2 (en) | 2013-08-08 | 2013-08-08 | Atomizing apparatus |
DE112013007315.3T DE112013007315T5 (de) | 2013-08-08 | 2013-08-08 | Zerstäubervorrichtung |
CN201380078729.4A CN105451891B (zh) | 2013-08-08 | 2013-08-08 | 雾化装置 |
JP2015530624A JP6158336B2 (ja) | 2013-08-08 | 2013-08-08 | 霧化装置 |
KR1020167003197A KR101859304B1 (ko) | 2013-08-08 | 2013-08-08 | 무화 장치 |
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JP6158336B2 (ja) | 2017-07-05 |
TW201505714A (zh) | 2015-02-16 |
CN105451891B (zh) | 2018-09-14 |
DE112013007315T5 (de) | 2016-05-19 |
JPWO2015019468A1 (ja) | 2017-03-02 |
TWI532533B (zh) | 2016-05-11 |
CN105451891A (zh) | 2016-03-30 |
US10456802B2 (en) | 2019-10-29 |
KR20160029839A (ko) | 2016-03-15 |
US20160158788A1 (en) | 2016-06-09 |
KR101859304B1 (ko) | 2018-06-28 |
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