WO2014205960A1 - 切割不规则图形基板的方法和显示装置 - Google Patents
切割不规则图形基板的方法和显示装置 Download PDFInfo
- Publication number
- WO2014205960A1 WO2014205960A1 PCT/CN2013/085208 CN2013085208W WO2014205960A1 WO 2014205960 A1 WO2014205960 A1 WO 2014205960A1 CN 2013085208 W CN2013085208 W CN 2013085208W WO 2014205960 A1 WO2014205960 A1 WO 2014205960A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- cutting
- irregular pattern
- line
- lines
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 99
- 238000005520 cutting process Methods 0.000 title claims abstract description 78
- 230000001788 irregular Effects 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 42
- 229920002120 photoresistant polymer Polymers 0.000 claims description 18
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- 238000007688 edging Methods 0.000 claims description 3
- 229910018503 SF6 Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/359—Working by laser beam, e.g. welding, cutting or boring for surface treatment by providing a line or line pattern, e.g. a dotted break initiation line
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K28/00—Welding or cutting not covered by any of the preceding groups, e.g. electrolytic welding
- B23K28/02—Combined welding or cutting procedures or apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
- B26F3/002—Precutting and tensioning or breaking
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
- C03B33/074—Glass products comprising an outer layer or surface coating of non-glass material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/18—Sheet panels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/04—Cutting or splitting in curves, especially for making spectacle lenses
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
- Y10T225/12—With preliminary weakening
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49995—Shaping one-piece blank by removing material
- Y10T29/49996—Successive distinct removal operations
Definitions
- Embodiments of the present invention relate to a method of cutting an irregular graphic substrate and a display device. Background technique
- the base substrate is one of the key components constituting a display screen, a touch screen, and the like.
- a display screen of a desired shape and size
- the quality of the base substrate directly determines the production cost and market value of the screen.
- the cutting method of the base substrate is usually as follows: First, the required shape and size are input in the numerically controlled machine tool, and then the cutter wheel is sequentially cut to cut out the sides of the regular pattern.
- One aspect of the present invention provides a method of cutting an irregular pattern substrate, comprising: forming a cutting line on a substrate, wherein a closed area surrounded by the cutting line is a desired irregular pattern; A groove line is formed; an external force is applied to the substrate to divide the substrate at the groove line.
- another aspect of the present invention provides a display device in which a substrate of the display device is fabricated by the method of cutting an irregular pattern substrate as described above.
- the method for cutting an irregular graphic substrate provided by the embodiment of the invention can greatly improve the cutting precision and efficiency of the irregular graphic substrate, provide a high-precision irregular graphic substrate for the display device, and has high production efficiency and is suitable for mass production.
- FIG. 1 is a flow chart showing a method of cutting an irregular pattern substrate according to an embodiment of the present invention
- FIG. 2 is a flow chart showing an example of a method for cutting an irregular pattern substrate according to an embodiment of the present invention
- Fig. 3 is a flow chart showing another example of a method of cutting an irregular pattern substrate in an embodiment of the present invention. detailed description
- the cutting of the base substrate can be performed by using a cutting method of a regular graphic base substrate, that is, inputting a desired shape and size on a numerically controlled machine tool, and then controlling the cutter wheel to sequentially cut out irregular patterns.
- a cutting method of a regular graphic base substrate that is, inputting a desired shape and size on a numerically controlled machine tool, and then controlling the cutter wheel to sequentially cut out irregular patterns.
- the embodiment provides a method of cutting an irregular pattern substrate for improving the cutting precision and efficiency of the irregular pattern substrate.
- the method for cutting an irregular pattern substrate in this embodiment includes the following steps 100-300.
- Step 100 Form a cutting line on the substrate, wherein the closed area enclosed by the cutting line is a desired irregular pattern.
- marking the cut line in advance can significantly improve the precision and efficiency of substrate cutting.
- an example of this step includes the following steps 101-102, as shown in Figs. 2 and 3.
- Step 101 Apply a photoresist covering the entire substrate on the substrate.
- the photoresist can be a positive photoresist or a negative photoresist. Taking a positive photoresist as an example, after the photoresist is exposed and developed, the corresponding substrate of the photoresist completely reserved region has a pattern of irregular patterns required, and the substrate is protected during the substrate cutting process. effect.
- Photoresist coated The method can be, for example, a method such as spin coating or doctor blade coating.
- Step 102 performing exposure and development using a mask to form the photoresist into a completely remaining region and a completely removed region, wherein a boundary line of the photoresist completely remaining region and the dicing line of the dicing line have Corresponding to the pattern of the desired irregular pattern, so that the photoresist also has a pattern corresponding to the desired irregular pattern after exposure and development, and the photoresist pattern composed of the completely remaining region of the photoresist marks the cutting line.
- Step 200 forming a groove line at the cutting line.
- the thickness of the base substrate is usually thick, if the substrate is directly divided along the cutting line indicated by the photoresist pattern, the cutting time will be long.
- the step of forming a groove line at the cutting line in advance can improve the efficiency of cutting.
- a groove line at the cutting line there are more than four ways of forming a groove line at the cutting line, such as cutting along a cutting line on the substrate using a laser cutter to form a groove line at the cutting line, a flow chart using the method as shown in picture 2.
- the laser source can be a carbon dioxide laser beam with a working power of 500 to 2500 watts.
- etching may be performed along the dicing line on the substrate by dry etching or wet etching to form a groove line at the dicing line, and a flow chart using this mode is shown in Fig. 3. It is of course also possible to cut along the cutting line on the substrate by diamond or other hard alloy to form a groove line at the cutting line, which are all within the scope of the invention.
- the wet etching method generally uses hydrofluoric acid at a concentration of 10% - 40% because hydrofluoric acid can dissolve glass and quartz which cannot be dissolved by many other acids.
- the base substrate of the display device is usually a glass substrate or a quartz substrate.
- the dry etching method generally uses sulfur hexafluoride gas, helium gas or argon gas, because they are all inert gases, and the molecules of the base substrate are driven out by the principle of ion bombardment to form groove lines without corroding the base substrate.
- Step 300 Apply an external force to the substrate to divide the substrate at the slot line.
- an external force is applied to the substrate by ultrasonic waves, for example, to divide the substrate at the groove line.
- the ultrasonic waves cause the substrate to produce a minute fracture layer, and the fracture surface is also processed to reduce the load of subsequent cornering and/or edging processes.
- the frequency range of ultrasonic waves is generally 20 kHz to 500 MHz. In this frequency range, it can ensure that the substrate is divided along the preset groove line, and it does not affect the rest of the substrate. Integrity.
- the embodiment provides a display device.
- the substrate of the display device is fabricated by the method of cutting irregular patterns in the first embodiment, and provides a high-precision irregular graphic substrate for the display device, and has high production efficiency and is suitable for mass production. Meet the needs of consumers.
- a cutting line is formed on the substrate, and a closed area surrounded by the cutting line is a desired irregular pattern. This can improve the precision of the substrate cutting; then, the groove line is formed at the cutting line, which can shorten the cutting time of the substrate and improve the efficiency of substrate cutting.
- the display device is provided with a high-precision irregular pattern substrate, and has high production efficiency and is suitable for mass production.
- the cutting line can be formed on the substrate by a mask exposure process to improve the precision of the cutting line and further improve the precision of the substrate cutting.
- an external force is applied to the substrate by ultrasonic waves to divide the substrate at the groove line. Since the ultrasonic plate generates a minute fracture layer, the fracture surface is processed to reduce the load of the subsequent cornering and/or edging process.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/347,138 US9416041B2 (en) | 2013-06-26 | 2013-10-15 | Method for cutting substrate of irregular pattern and display device |
US15/206,880 US10414683B2 (en) | 2013-06-26 | 2016-07-11 | Method for cutting substrate of irregular pattern and display device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2013102603615A CN103341692A (zh) | 2013-06-26 | 2013-06-26 | 切割不规则图形基板的方法和显示装置 |
CN201310260361.5 | 2013-06-26 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/347,138 A-371-Of-International US9416041B2 (en) | 2013-06-26 | 2013-10-15 | Method for cutting substrate of irregular pattern and display device |
US15/206,880 Division US10414683B2 (en) | 2013-06-26 | 2016-07-11 | Method for cutting substrate of irregular pattern and display device |
Publications (1)
Publication Number | Publication Date |
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WO2014205960A1 true WO2014205960A1 (zh) | 2014-12-31 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2013/085208 WO2014205960A1 (zh) | 2013-06-26 | 2013-10-15 | 切割不规则图形基板的方法和显示装置 |
Country Status (3)
Country | Link |
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US (2) | US9416041B2 (zh) |
CN (1) | CN103341692A (zh) |
WO (1) | WO2014205960A1 (zh) |
Families Citing this family (9)
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CN103341692A (zh) * | 2013-06-26 | 2013-10-09 | 京东方科技集团股份有限公司 | 切割不规则图形基板的方法和显示装置 |
JP6262039B2 (ja) * | 2014-03-17 | 2018-01-17 | 株式会社ディスコ | 板状物の加工方法 |
CN106125413A (zh) * | 2016-08-25 | 2016-11-16 | 广西钦州天山微电子有限公司 | 一种直线切角lcd显示器及其制造方法 |
CN107942566A (zh) * | 2018-01-04 | 2018-04-20 | 京东方科技集团股份有限公司 | 基板切割方法 |
CN109166789A (zh) * | 2018-09-14 | 2019-01-08 | 苏州迈为科技股份有限公司 | 多工位电池片划片装置 |
CN110587117B (zh) * | 2019-05-21 | 2021-10-15 | 焦作市吉成磁电有限公司 | 一种超硬脆材料的加工装置及方法 |
CN111223413A (zh) * | 2020-01-03 | 2020-06-02 | 江苏铁锚玻璃股份有限公司 | 适用于交通领域的低成本显示屏面板制造方法 |
CN111968510A (zh) * | 2020-08-26 | 2020-11-20 | 合肥维信诺科技有限公司 | 显示面板的制备方法 |
CN116374947B (zh) * | 2023-06-02 | 2023-08-25 | 中国工程物理研究院电子工程研究所 | 一种熔石英悬臂梁-质量块结构及其加工方法 |
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US20150218033A1 (en) | 2015-08-06 |
US20160318791A1 (en) | 2016-11-03 |
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