FR2904304B1 - Procede de fabrication d'une nanostructure sur un substrat pre-grave. - Google Patents

Procede de fabrication d'une nanostructure sur un substrat pre-grave.

Info

Publication number
FR2904304B1
FR2904304B1 FR0606907A FR0606907A FR2904304B1 FR 2904304 B1 FR2904304 B1 FR 2904304B1 FR 0606907 A FR0606907 A FR 0606907A FR 0606907 A FR0606907 A FR 0606907A FR 2904304 B1 FR2904304 B1 FR 2904304B1
Authority
FR
France
Prior art keywords
substrate
nanostructure
coating
nanorelief
grave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0606907A
Other languages
English (en)
Other versions
FR2904304A1 (fr
Inventor
Ursula Ebels
Bernard Dieny
Dominique Lestelle
Eric Gautier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0606907A priority Critical patent/FR2904304B1/fr
Priority to EP07825248A priority patent/EP2047509B1/fr
Priority to AT07825248T priority patent/ATE553499T1/de
Priority to US12/375,272 priority patent/US8329049B2/en
Priority to PCT/IB2007/002912 priority patent/WO2008012684A1/fr
Publication of FR2904304A1 publication Critical patent/FR2904304A1/fr
Application granted granted Critical
Publication of FR2904304B1 publication Critical patent/FR2904304B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/0085—Manufacture of substrate-free structures using moulds and master templates, e.g. for hot-embossing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Stringed Musical Instruments (AREA)
  • Adornments (AREA)
  • Laminated Bodies (AREA)
FR0606907A 2006-07-27 2006-07-27 Procede de fabrication d'une nanostructure sur un substrat pre-grave. Expired - Fee Related FR2904304B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0606907A FR2904304B1 (fr) 2006-07-27 2006-07-27 Procede de fabrication d'une nanostructure sur un substrat pre-grave.
EP07825248A EP2047509B1 (fr) 2006-07-27 2007-06-26 Procédé de fabrication de nanostructure sur substrat pré-attaqué.
AT07825248T ATE553499T1 (de) 2006-07-27 2007-06-26 Verfahren zur herstellung einer nanostruktur auf einem vorgeätzten substrat
US12/375,272 US8329049B2 (en) 2006-07-27 2007-06-26 Method of fabricating a nanostructure on a pre-etched substrate
PCT/IB2007/002912 WO2008012684A1 (fr) 2006-07-27 2007-06-26 Procédé de fabrication de nanostructure sur substrat pré-attaqué.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0606907A FR2904304B1 (fr) 2006-07-27 2006-07-27 Procede de fabrication d'une nanostructure sur un substrat pre-grave.

Publications (2)

Publication Number Publication Date
FR2904304A1 FR2904304A1 (fr) 2008-02-01
FR2904304B1 true FR2904304B1 (fr) 2008-10-17

Family

ID=37873219

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0606907A Expired - Fee Related FR2904304B1 (fr) 2006-07-27 2006-07-27 Procede de fabrication d'une nanostructure sur un substrat pre-grave.

Country Status (5)

Country Link
US (1) US8329049B2 (fr)
EP (1) EP2047509B1 (fr)
AT (1) ATE553499T1 (fr)
FR (1) FR2904304B1 (fr)
WO (1) WO2008012684A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8163656B2 (en) * 2005-05-27 2012-04-24 Chou Stephen Y Process for adjusting the size and shape of nanostructures
US8163657B2 (en) * 2005-05-27 2012-04-24 Chou Stephen Y Process for adjusting the size and shape of nanostructures
US8603606B2 (en) 2010-10-29 2013-12-10 Hewlett-Packard Development Company, L.P. Preventing adhesion between nanostructures
US9457128B2 (en) 2012-09-07 2016-10-04 President And Fellows Of Harvard College Scaffolds comprising nanoelectronic components for cells, tissues, and other applications
US9786850B2 (en) * 2012-09-07 2017-10-10 President And Fellows Of Harvard College Methods and systems for scaffolds comprising nanoelectronic components
RU2517795C1 (ru) * 2012-12-27 2014-05-27 федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВПО "НИУ МЭИ") Способ формирования нанорельефа на теплообменной поверхности изделий
CN103341692A (zh) 2013-06-26 2013-10-09 京东方科技集团股份有限公司 切割不规则图形基板的方法和显示装置
US20150179877A1 (en) * 2013-12-20 2015-06-25 LuxVue Technology Corporation Nanowire device
US9583533B2 (en) 2014-03-13 2017-02-28 Apple Inc. LED device with embedded nanowire LEDs
US10405278B2 (en) * 2014-10-31 2019-09-03 Qualcomm Incorporated Low power scheduling
US11289319B2 (en) * 2019-08-06 2022-03-29 Thermo Fisher Scientific (Bremen) Gmbh System to analyze particles, and particularly the mass of particles
CN113145183B (zh) * 2020-01-22 2022-12-06 京东方科技集团股份有限公司 一种生物芯片及其制作方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6667492B1 (en) * 1997-11-10 2003-12-23 Don L. Kendall Quantum ridges and tips
US7291284B2 (en) * 2000-05-26 2007-11-06 Northwestern University Fabrication of sub-50 nm solid-state nanostructures based on nanolithography
CN101887935B (zh) 2000-08-22 2013-09-11 哈佛学院董事会 掺杂的拉长半导体,其生长,包含这类半导体的器件及其制造
WO2003083949A1 (fr) * 2002-03-28 2003-10-09 Koninklijke Philips Electronics N.V. Nanofil et dispositif electronique
EP1542519A4 (fr) * 2002-07-31 2010-01-06 Sony Corp Procede de realisation de carte a dispositif integre, carte a dispositif integre, procede de realisation de carte imprimee, carte imprimee
US7378347B2 (en) * 2002-10-28 2008-05-27 Hewlett-Packard Development Company, L.P. Method of forming catalyst nanoparticles for nanowire growth and other applications
WO2007053202A2 (fr) * 2005-06-17 2007-05-10 Georgia Tech Research Corporation Systemes et procedes pour le transfert de nanomateriaux
EP1840648A1 (fr) * 2006-03-31 2007-10-03 Sony Deutschland Gmbh Méthode pour l'application d'un motif de métal ou semiconducteur sur un substrat
US20100021985A1 (en) * 2007-03-20 2010-01-28 The Regents Of The University Of California Mechanical process for creating particles in fluid

Also Published As

Publication number Publication date
EP2047509A1 (fr) 2009-04-15
ATE553499T1 (de) 2012-04-15
WO2008012684A1 (fr) 2008-01-31
FR2904304A1 (fr) 2008-02-01
WO2008012684A8 (fr) 2009-02-26
EP2047509B1 (fr) 2012-04-11
US20100003421A1 (en) 2010-01-07
US8329049B2 (en) 2012-12-11

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Effective date: 20160331