WO2014196010A1 - 外観検査装置 - Google Patents
外観検査装置 Download PDFInfo
- Publication number
- WO2014196010A1 WO2014196010A1 PCT/JP2013/065404 JP2013065404W WO2014196010A1 WO 2014196010 A1 WO2014196010 A1 WO 2014196010A1 JP 2013065404 W JP2013065404 W JP 2013065404W WO 2014196010 A1 WO2014196010 A1 WO 2014196010A1
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- WIPO (PCT)
- Prior art keywords
- opening
- unit
- imaging
- illumination
- light
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0815—Controlling of component placement on the substrate during or after manufacturing
Definitions
- the present invention relates to an appearance inspection apparatus, and more particularly, to an appearance inspection apparatus including a light source and an imaging unit.
- an appearance inspection apparatus including a light source and an imaging unit is known.
- Such an appearance inspection apparatus is disclosed in, for example, Japanese Patent Application Laid-Open No. 08-29121.
- the above-mentioned Japanese Patent Application Laid-Open No. 08-29121 includes a top camera arranged vertically above the imaging position and an upper illumination arranged in a ring around the top camera, and further arranged obliquely above the imaging position.
- An appearance inspection apparatus is disclosed that includes four side cameras that are arranged and four oblique illuminations that are arranged in the vicinity of the respective side cameras.
- the upper illumination and the oblique illumination are configured to directly irradiate illumination light to a circuit board (an electronic component on the circuit board) that is an imaging target.
- an appearance inspection apparatus that performs indirect illumination that reflects light from a light source and irradiates an object to be imaged is known.
- a reflection unit that covers the imaging position is provided, and the illumination light is irradiated from around the imaging target object by reflecting the light of the light source disposed in the reflection unit on the inner surface of the reflection unit.
- the main imaging unit performs imaging from an imaging opening formed at the top of the reflecting unit.
- indirect illumination is performed by an appearance inspection apparatus provided with a plurality of other inspection devices (side camera and oblique illumination) in addition to the main imaging unit.
- the reflecting section blocks the optical axis of the side camera and the oblique illumination. Therefore, in this case, for example, it is considered necessary to employ a configuration in which inspection equipment (side camera and oblique illumination) is disposed inside the reflection portion.
- an obstacle inspection device
- the reflection area of the reflection portion is greatly reduced, and shadows are formed to be uniform and uniform.
- the present invention has been made to solve the above-described problems, and one object of the present invention is to provide uniformity of indirect illumination even when an inspection device other than the main imaging unit can be installed. It is an object of the present invention to provide an appearance inspection apparatus capable of suppressing the decrease of the image quality.
- an appearance inspection apparatus covers a main imaging unit that images an imaging object arranged at an imaging position from substantially vertically above, a light source, and the imaging position.
- An indirect illumination unit including a reflection unit that reflects the illumination light of the light source and irradiates the imaging target, and the reflection unit is located at a position different from the arrangement position of the main imaging unit from the outside of the reflection unit.
- An opening for performing imaging or light irradiation on the imaging target is provided.
- the imaging object is imaged or irradiated with light from the outside of the reflecting unit at a position different from the arrangement position of the main imaging unit of the reflecting unit.
- other inspection devices such as an imaging unit and an illumination unit
- the reflection area of the reflection portion may be greatly reduced by arranging an obstacle (inspection device) that blocks light inside the reflection portion as in the configuration in which the inspection device is arranged inside the reflection portion.
- a decrease in the uniformity of indirect illumination can be suppressed only to the opening portion for performing imaging or light irradiation provided in the reflection portion.
- the area of the opening for imaging or irradiating light can be reduced to that required for inspection equipment (imaging unit, illumination unit, etc.), which also reduces the uniformity of indirect illumination. Can be suppressed. As a result, according to the present invention, it is possible to suppress a decrease in the uniformity of indirect illumination even when an inspection device other than the main imaging unit can be installed.
- the visual inspection apparatus preferably further includes a closing portion that closes the opening of the reflecting portion.
- a closing portion that closes the opening of the reflecting portion.
- the closing portion has a first reflecting surface portion that reflects light at a portion that closes the opening in a state where the opening is closed. If comprised in this way, when obstruct
- the closing portion preferably has an engaging portion that engages with an edge of the opening of the reflecting portion, and is configured to be detachable from the opening. According to this structure, when the inspection device is not used (installed), the closed portion can be easily attached to the opening, and when the inspection device is used (installed) later, the closed portion Can be easily removed.
- the opening is formed at a plurality of positions in the reflection portion that are radially centered on the imaging position and obliquely inclined from the imaging axis of the main imaging unit. Yes. If comprised in this way, it can image or irradiate light with respect to an imaging position with each other test
- the plurality of openings are circumferentially arranged at intervals around the imaging position in plan view in the reflection portion.
- the circumferential shape in the present invention is a broad concept including not only a case where the circumference is arranged concentrically with a constant radius but also a case where the circumference is arranged along a circumference with a different radius. If comprised in this way, it can arrange
- an imaging unit is used as an inspection device, it is possible to increase the degree of freedom of the arrangement position of the inspection device, such as being able to capture images from a plurality of angles so as to surround the imaging target.
- the appearance inspection apparatus preferably, different types of inspection devices are used in a state in which imaging or light irradiation can be performed on the imaging object from the outside of the reflection unit through the opening.
- a common support member that can be attached is further provided. If comprised in this way, the apparatus for a test
- the inspection device irradiates an inclined imaging unit that images an imaging object from an oblique direction, a projection unit that can project pattern light for three-dimensional measurement, a laser pointer, and illumination light having a specific wavelength. Including at least one of the specific wavelength illumination units.
- various inspections such as visual inspection from an oblique direction, three-dimensional shape inspection by pattern projection or laser projection, and visual inspection using illumination light of a specific wavelength such as ultraviolet light and infrared light are inspected.
- it can be implemented in combination with a two-dimensional image inspection substantially vertically above using the main imaging unit.
- the inspection device includes at least one of a tilt imaging unit, a projection unit, a laser pointer, and a specific wavelength illumination unit
- the inspection device is a projection unit
- the projection unit is illuminated by an indirect illumination unit.
- the illumination light of the indirect illumination unit can be supplemented with simple illumination light.
- the illumination light from the indirect illumination unit cannot be reflected at the opening portion of the reflection unit, so the same uniform illumination light as the illumination light from the indirect illumination unit is incident from the projection unit through the opening. As a result, a part of the illumination light that has not been reflected by the opening can be compensated. As a result, it is possible to more effectively suppress a reduction in the uniformity of the indirect illumination due to the opening for installing the inspection device (projection unit) other than the main imaging unit.
- the inspection device preferably reflects the light to the end surface on the opening side. It has a reflective surface part.
- the inspection device when the inspection device is a tilt imaging unit or a projection unit, the imaging (imaging) lens barrel is arranged on the opening side.
- the imaging (imaging) lens barrel is arranged on the opening side.
- an annular seal member provided so as to close a gap between the end surface portion on the opening portion side of the inspection device and the edge portion of the opening portion.
- the seal member further includes a third reflecting surface portion that reflects light at a portion exposed to the opening side. If comprised in this way, among the illumination lights of an indirect illumination part, the illumination light which leaks from the clearance gap between an inspection apparatus and the edge part of an opening part is reflected by the 3rd reflective surface part of a sealing member instead of a reflection part. Can do. As a result, since the effect of reducing the effective opening area of the opening can be obtained, it is possible to prevent the uniformity of indirect illumination from being lowered even when an inspection device is used.
- the opening is preferably configured to be closable, and further includes an image processing unit that performs image processing on a captured image of the main imaging unit, and the image processing unit is open in the open state.
- the illumination unevenness part corresponding to the opening of the open state is detected from the captured image captured by the main imaging unit using the illumination light of the indirect illumination unit, and the illumination in the detected captured image It is configured to perform processing for correcting unevenness.
- FIG. 1 is a schematic diagram schematically showing an overall configuration of an appearance inspection apparatus according to an embodiment of the present invention. It is the perspective view which showed the reflection part of the external appearance inspection apparatus by one Embodiment of this invention. It is the typical top view which showed arrangement
- FIG. 10 is a perspective view showing the seal member shown in FIG. 9. It is a schematic diagram of the indirect illumination part for demonstrating the specific example of the image correction process by the image process part of the external appearance inspection apparatus by one Embodiment of this invention.
- FIG. 1 It is a schematic diagram of the captured image for demonstrating the specific example of the image correction process by an image process part. It is the schematic diagram of the captured image which showed an example when the dark area resulting from an opening part reflected in the captured image shown in FIG. It is the schematic diagram of the captured image which showed another example when the dark area resulting from an opening part reflected in the captured image shown in FIG.
- the appearance inspection apparatus 100 images a printed circuit board (hereinafter referred to as “substrate”) 110 during or after manufacture in a substrate manufacturing process as an imaging object, and the substrate 110 and the substrate 110 is an apparatus that performs various inspections on the electronic component 120 on the 110.
- the appearance inspection apparatus 100 constitutes a part of a board production line for producing a circuit board by mounting the electronic component 120 on the board 110.
- the substrate 110 is an example of the “imaging target” in the present invention.
- solder (solder paste) 130 is printed (applied) in a predetermined pattern on a substrate 110 on which a wiring pattern is formed by a solder printing apparatus (not shown) (solder). Printing process). Subsequently, the electronic component 120 is mounted (mounted) on the substrate 110 after solder printing by a surface mounting machine (not shown) (mounting process), whereby the terminal portion of the electronic component 120 is disposed on the solder 130. The Thereafter, the mounted substrate 110 is transferred to a reflow furnace (not shown) and the solder 130 is melted and cured (cooled) (reflow process), whereby the terminal portion of the electronic component 120 is connected to the wiring of the substrate 110. Soldered together. As a result, the electronic component 120 is fixed on the substrate 110 in a state of being electrically connected to the wiring, and the substrate manufacturing is completed.
- the appearance inspection apparatus 100 inspects the printed state of the solder on the substrate after the solder printing process, inspects the mounting state of the electronic component after the mounting process, or inspects the mounting state of the electronic component after the reflow process. Used for. Therefore, one or a plurality of appearance inspection apparatuses 100 are provided in the board production line. As the solder printing state, inspections such as a printing position deviation with respect to a designed printing position, a solder shape, a volume and a height (application amount), and a bridge (short circuit) are performed.
- the mounting state of the electronic component whether or not the type and orientation (polarity) of the electronic component is appropriate, the amount of displacement with respect to the design mounting position of the electronic component is within an allowable range, or the soldered state of the terminal part is normal Whether or not it is inspected.
- detection of foreign matters such as dust and other deposits is also performed as common inspection contents between the processes.
- the appearance inspection apparatus 100 can move in the XY direction (horizontal direction) and the Z direction (vertical direction) above the substrate transport conveyor 10 for transporting the substrate 110 and the substrate transport conveyor 10.
- a head moving mechanism 20, an imaging head unit 30 held by the head moving mechanism 20, and a control device 40 that controls the appearance inspection apparatus 100 are provided.
- a specific structure of the appearance inspection apparatus 100 will be described.
- the substrate transport conveyor 10 is configured to transport the substrate 110 in the X direction and to stop and hold the substrate 110 at a predetermined inspection position.
- the substrate transport conveyor 10 is configured to be able to transport the substrate 110 that has been inspected in the X direction from a predetermined inspection position and to carry the substrate 110 out of the appearance inspection apparatus 100.
- the head moving mechanism 20 is provided above the substrate transfer conveyor 10 (in the direction of arrow Z1), and is constituted by, for example, an orthogonal three-axis (XYZ-axis) robot using a ball screw shaft and a servo motor. Since the configuration of the orthogonal three-axis robot itself is known, detailed description thereof is omitted.
- the head moving mechanism 20 includes an X-axis motor 21, a Y-axis motor 22, and a Z-axis motor 23 for driving these X, Y, and Z axes.
- the head moving mechanism 20 moves the imaging head unit 30 in the XY direction (horizontal direction) above the substrate transport conveyor 10 (substrate 110) (arrow Z ⁇ b> 1 direction). Direction) and Z direction (vertical direction).
- the imaging head unit 30 includes a main imaging unit 31, an indirect illumination unit 32, and a support member 33 (see FIG. 4) to which an inspection device 60 described later can be attached.
- the imaging head unit 30 is moved to a predetermined position above the substrate 110 by the head moving mechanism 20, and the imaging head unit 30 is mounted on the substrate 110 and the substrate 110 by using the main imaging unit 31, the inspection device 60, and the like.
- the electronic component 120 is configured to perform imaging for appearance inspection.
- the main imaging unit 31 is composed of a CCD camera or the like provided with a lens barrel unit 31a for holding a lens.
- the main imaging unit 31 is configured to capture a two-dimensional (planar) image of the upper surface of the substrate 110 disposed at the imaging position P from a position substantially vertically above. That is, the position immediately below the main imaging unit 31 is set as the imaging position P.
- the main imaging unit 31 obtains RGB images (color images) corresponding to red R, green G, and blue B under illumination light from a white LED light source described later.
- the indirect illumination unit 32 includes a plurality of light sources (54, 55 and 56) and a dome-shaped (hemispherical shell-shaped) reflection unit 51 provided so as to cover the imaging position P.
- the reflector 51 is provided to hold the light source and reflect the illumination light of the light source to irradiate the substrate 110.
- the reflecting portion 51 integrally includes a main opening 52 formed at the top and a plurality of small openings 53 formed at positions different from the main opening 52. As shown in FIGS. 2 and 3, the plurality of openings 53 are disposed so as to surround the main opening 52.
- the main imaging unit 31 is arranged above the main opening 52 (in the direction of arrow Z ⁇ b> 1), and the main imaging unit 31 images the substrate 110 through the main opening 52.
- a plurality of light sources of the indirect illumination unit 32 are provided on the inner surface side of the dome-shaped reflection unit 51.
- the light source of the indirect illumination unit 32 includes an upper light source 54, a middle light source 55, and a lower light source 56 that are provided in order from the apex side (main opening 52 side) on the inner surface side of the reflection unit 51.
- a plurality of upper light sources 54 are provided in an annular shape so as to surround the outer periphery of the main opening 52 at the uppermost position (in the direction of arrow Z1) in the indirect illumination unit 32.
- the middle-stage light source 55 is arranged in a ring shape so as to surround the upper-stage light source 54 in plan view at a position below the upper-stage light source 54 (in the direction of arrow Z2) and above the lower-stage light source 56 (in the direction of arrow Z1). Is provided.
- a plurality of lower light sources 56 are provided in an annular shape so as to surround the middle light source 55 at a position below the middle light source 55 (in the direction of arrow Z2).
- Each of the upper light source 54, the middle light source 55, and the lower light source 56 is configured by a white LED.
- the middle light source 54 is an example of the “light source” in the present invention.
- the upper light source 54 is configured to irradiate the substrate 110 with illumination light from above.
- the middle light source 55 is an indirect illumination light source configured to irradiate illumination light toward the inner surface side of the reflecting portion 51.
- the middle light source 55 is configured to irradiate the imaging target with uniform and uniform illumination light in the circumferential direction from about 45 degrees obliquely from above by reflecting the illumination light on the inner surface of the reflecting portion 51.
- the lower light source 56 is configured to irradiate illumination light at an irradiation angle close to the lateral direction (upwardly about 30 degrees oblique) with respect to the imaging target.
- the upper light source 54 and the lower light source 56 are direct illumination, but are configured to irradiate the substrate 110 with illumination light via a light diffusion plate (not shown). Thereby, the main imaging unit 31 can perform imaging using the illumination light irradiated from different heights (angles) with respect to the same imaging target.
- the reflecting portion 51 is made of a metal material such as aluminum, for example, and a matte white coating is applied to the inner surface of the dome. Thereby, the inner surface of the reflection part 51 becomes a reflective surface which diffusely reflects illumination light.
- a cylindrical portion 52a (not shown in FIG. 1) extending upward is formed at the edge of the main opening 52 of the reflecting portion 51.
- the lens barrel portion 31a of the main imaging unit 31 is inserted inside the cylindrical portion 52a.
- the reflecting portion 51 is held by the support member 33 by attaching the cylindrical portion 52 a to the support member 33.
- these openings 53 are radially centered around the imaging position P in the reflection unit 51 and from the imaging axis of the main imaging unit 31 (Z axis passing through the imaging position P). It is formed at a position inclined obliquely at an angle ⁇ . For this reason, if the inspection device 60 is arranged so as to face the opening 53, the inspection device 60 is arranged so that the imaging position P is located in front through the opening 53. The positions where these openings 53 are formed are located above the middle light source 55. Each opening 53 is formed in a circular shape.
- the opening 53 of the reflecting portion 51 is configured to be fitted with a cap 57 that closes the opening 53. It is configured to be occluded.
- the cap 57 is an example of the “blocking portion” in the present invention.
- the cap 57 integrally includes a circular lid portion 57a and a side wall portion 57b corresponding to the circular opening 53, and an engaging convex portion 57c provided on the side wall portion 57b.
- the engagement convex portion 57c is an example of the “engagement portion” in the present invention.
- the lid portion 57 a has a surface that is gently curved in an arc shape when viewed from the side, and has a disk shape that is slightly larger than the opening portion 53.
- the cap 57 is configured to be able to close the opening 53 by the lid portion 57a.
- the cap 57 is made of a matte white synthetic resin or the like.
- the cap 57 is configured such that the surface of the lid portion 57a that closes the opening portion 53 in a state where the opening portion 53 is closed functions as a first reflecting surface portion 57d that reflects light.
- the side wall portion 57b has a cylindrical shape that fits into the opening 53, and is formed in the vicinity of the end portion of the side wall portion 57b so that the engaging convex portion 57c protrudes outward along the outer peripheral surface. .
- the engaging convex portion 57 c engages with the edge of the opening 53 to close the opening 53 and fix the cap 57.
- the cap 57 is configured to be detachable from the opening 53.
- the cap 57 can be removed.
- the lid 57 a that is, the first reflecting surface portion 57 d slightly protrudes inward from the inner surface of the reflecting portion 51.
- the support member 33 is disposed above the reflecting portion 51, and can image or irradiate light to the substrate 110 from the outside of the reflecting portion 51 through the opening 53. In this state, it is provided for attaching the inspection device 60.
- the support member 33 is a support block formed so as to have a circular hole 33 a inside and a mounting surface 33 b composed of each surface of a polygonal outer surface in plan view. is there.
- the support member 33 is configured as a common support member capable of attaching different types of inspection devices 60 to the attachment surface 33b.
- the support member 33 and a mounting member 34 described later are shown with hatching.
- the lens barrel 31a of the main imaging unit 31 is disposed in the hole 33a.
- the mounting surface 33b of the support member 33 is formed to correspond to the number of the openings 53 of the reflecting portion 51 and the positions around the imaging position P of each opening 53. Therefore, in the present embodiment, the outer surface of the support member 33 is formed in an octagonal shape, and the support member 33 has a total of eight mounting surfaces 33b. As shown in FIGS. 3 and 4, the relative position around the imaging position P between the support member 33 and the reflection portion 51 so that the opening 53 of the reflection portion 51 is located in front of each mounting surface 33 b. Is set.
- a common attachment member 34 for attaching the inspection device 60 in a replaceable manner is attached to the support member 33.
- the attachment member 34 is made of, for example, an L-shaped bracket, and is fixed to each of the eight attachment surfaces 33 b of the support member 33.
- the attachment member 34 includes a first portion 34 a that is fixed to the attachment surface 33 b of the support member 33, and a second portion 34 b that extends radially outward from the attachment surface 33 b and supports the inspection device 60. Then, the inspection device 60 is attached to the second portion 34b via individual brackets prepared for the different types of inspection devices 60.
- FIG. 4 and 7 show an example in which the mounting member 34 and the inspection device 60 are installed at four locations indicated by solid lines, and the mounting member 34 and the inspection device 60 are installed at the other four locations in FIG. The fact that it can be installed is indicated by a two-dot chain line.
- FIG. 3 shows an example in which the inspection devices 60 are installed at all eight locations in order to indicate the maximum number of inspection devices 60 that can be installed.
- the inspection device 60 includes an inclined imaging unit 61 that images an imaging object from an oblique direction, a projection unit (projector) 62 that can project pattern light for three-dimensional measurement, a laser pointer 63, and A specific wavelength illumination unit 64 that irradiates illumination light of a specific wavelength is included.
- 4 and 7 show an example in which the tilt imaging unit 61 and the projection unit 62 are attached to the support member 33.
- FIG. 4 and 7 show an example in which the tilt imaging unit 61 and the projection unit 62 are attached to the support member 33.
- the tilt imaging unit 61 is configured by a CCD camera or the like provided with a lens barrel unit 61 a that holds a lens, like the main imaging unit 31.
- the tilt imaging unit 61 is configured to be attached to the second portion 34b of the attachment member 34 via the individual bracket 61b.
- the mounting angle can be adjusted between the individual bracket 61b and the second portion 34b and between the individual bracket 61b and the tilt imaging unit 61, and the individual bracket 61b slides the tilt imaging unit 61 in the imaging axis direction. It is possible to make it. Accordingly, the tilt imaging unit 61 can capture an oblique image of the substrate 110 from the oblique direction of the angle ⁇ with respect to the imaging position P.
- the inclined imaging unit 61 can be installed at any position of the angle ⁇ interval by the eight attachment members 34, it is possible to perform a visual inspection with a high degree of freedom according to the imaging target. Become.
- the projection unit 62 is a projector unit capable of projecting illumination light of a predetermined light / dark pattern (pattern) onto an imaging object.
- the projection unit 62 mainly includes, for example, a light source (not shown) such as a white LED and a MEMS mirror device (not shown) provided therein, and a lens barrel 62a that holds an imaging lens.
- the MEMS mirror device is an array of a large number of movable micromirrors that can be individually driven, and can reflect light in a predetermined reflection direction on and off in units of individual micromirrors at an arbitrary gradation. It has become. Thereby, the projection part 62 can project the light of arbitrary bright and dark patterns by control of a MEMS mirror apparatus.
- the projection unit 62 is configured to be attached to the second portion 34b of the attachment member 34 via the individual bracket 62b.
- this projection unit 62 for example, an equidistant grid-like light / dark pattern having a sinusoidal light intensity distribution is projected onto the substrate 110, and a plurality of images obtained by shifting the position (phase) of the light / dark pattern are captured as a main image.
- the part 31 is imaged. Thereby, it is possible to obtain a three-dimensional shape measurement image by the phase shift method. Although details are omitted, the three-dimensional shape (height) of the imaging target (substrate 110) can be calculated based on the difference in pixel values of the same portion in the obtained three-dimensional shape measurement images. It is.
- the projection unit 62 can also irradiate uniform (plane pattern) illumination light without contrast by control of the MEMS mirror device.
- the projection unit 62 is used for cases other than the case of performing three-dimensional shape measurement. That is, the projection unit 62 is configured to irradiate the substrate 110 with uniform illumination light through the opening 53 when imaging the substrate 110 using illumination light from the indirect illumination unit 32. Thereby, it is possible to supplement illumination light (illumination light of the middle light source 55) that is not reflected by the portion where the opening 53 is formed in the reflection unit 51 with uniform illumination light of the projection unit 62.
- the laser pointer 63 incorporates a laser light source and gives a light spot to the imaging target.
- the main imaging unit 31 captures an image with a laser spot irradiated with an angle ⁇ (see FIG. 1) and gives a light spot on the substrate 110
- the light spot in the image is changed according to the height position of the light spot. The position changes. Based on this light spot position, the three-dimensional shape (height) of the imaging object (substrate 110) can be calculated.
- the specific wavelength illumination unit 64 irradiates the imaging target with illumination light in a specific wavelength region such as ultraviolet light or infrared light. By using the specific wavelength illumination unit 64, an inspection using an ultraviolet image or an infrared image can be performed according to an inspection object.
- these inspection devices 60 have a second reflecting surface portion 65 that reflects light at the end surface portion on the opening 53 side.
- the second reflecting surface portion 65 (see the hatched portion) is formed on the end surface portion of the lens barrel portion 61a (see FIG. 4) disposed on the opening 53 side.
- the second reflecting surface portion 65 is made of, for example, a matte white painted surface, and is configured to diffusely reflect the illumination light of the indirect illumination portion 32 passing through the opening 53 into the reflecting portion 51 (see FIG. 9). .
- the second reflection surface portion 65 is similarly formed on the end surface portion on the opening 53 side of the lens barrel portion 62a (see FIG. 8).
- description is abbreviate
- annular shape (cylindrical shape) is formed so as to close a gap between the end surface portion of the inspection device 60 on the opening 53 side and the edge of the opening 53.
- the sealing member 66 is provided.
- FIG. 4 for convenience, the state in which the seal member 66 has been removed is shown, and the inspection device 60 and the opening 53 are shown far apart from each other.
- the seal member 66 is formed in a cylindrical shape along the edge of the circular opening 53 and along the side surface of the inspection device 60.
- the seal member 66 corresponds to the outer diameter of the lens barrel portion 61a, and the gap between the inner peripheral surface of the seal member 66 and the lens barrel portion 61a as much as possible. Is formed so as not to occur.
- the seal member 66 has a third reflection surface portion 66a that reflects light on an end surface portion on the opening 53 side of the inspection device 60 (tilt imaging unit 61).
- one end 66 b on the opening 53 side of the seal member 66 has a flange shape that protrudes toward the inner peripheral side and the outer peripheral side, and the inner diameter d 1 of the one end 66 b is the inner diameter d 2 of the opening 53. It is formed to be smaller than that.
- the 3rd reflective surface part 66a is formed in the whole surface of the end surface part by the side of the opening part 53 of the one end part 66b.
- the third reflecting surface portion 66a is formed by applying a matte white paint.
- the third reflection surface portion 66a reflects the illumination light of the indirect illumination unit 32 that passes through the opening 53 in the portion exposed to the opening side (the portion corresponding to the difference between the inner diameter d1 and the inner diameter d2). It is configured to diffusely reflect inward.
- the sealing member 66 is formed in the shape suitable for each end surface part by the side of the opening part 53, and the opening part 53 side is formed.
- a third reflecting surface portion is formed in the exposed portion.
- the entire sealing member 66 including the inner peripheral surface 66c of the cylindrical portion of the sealing member 66 is subjected to a surface treatment that makes it difficult to reflect illumination light such as black paint. Yes. Thereby, especially in the inner peripheral surface 66c, unwanted incident light (so-called stray light) is prevented from entering the inspection device 60 (inclined imaging unit 61).
- the length (the height of the seal member 66) to the other end 66d opposite to the opening 53 of the cylindrical portion of the seal member 66 is as shown by the length L in FIG. It is formed on the arrangement position side of the device 60 with a margin in size. That is, the positional deviation in the optical axis direction between the inspection device 60 and the opening 53 is considered in consideration of the adjustment amount and assembly error when the inspection device 60 is slid in the optical axis direction for focusing.
- a length margin L of the cylindrical portion of the seal member 66 is set so that absorption is possible.
- the positional deviation between the optical axis of the inspection device 60 and the center of the opening 53 in the lateral direction perpendicular to the optical axis direction can be absorbed by providing a dimensional margin at the flange-shaped one end 66b. It has become.
- the seal member 66 is configured to be able to absorb the positional deviation between the inspection device 60 and the opening 53 (the positional deviation in the optical axis direction and the lateral direction perpendicular to the optical axis). .
- the appearance inspection apparatus 100 is configured to be controlled by a control apparatus 40.
- the control device 40 includes a control unit 41, a storage unit 42, an image processing unit 43, an imaging control unit 44, a projection control unit 45, an illumination control unit 46, and a motor control unit 47.
- the control unit 41 includes a CPU that executes logical operations, a ROM (Read Only Memory) that stores programs for controlling the CPU, and a RAM (Random Access Memory) that temporarily stores various data during operation of the device. It is configured.
- the control unit 41 includes an image processing unit 43, an imaging control unit 44, a projection control unit 45, an illumination control unit 46, and a motor control unit in accordance with a program stored in the ROM and software (program) stored in the storage unit 42. 47 is configured to control each part of the appearance inspection apparatus 100. Then, the control unit 41 performs the above-described various visual inspections on the substrate 110 using the main imaging unit 31, the tilted imaging unit 61 as the inspection device 60, and the like. In addition, since the content of the process accompanying an external appearance inspection is well-known, description is abbreviate
- the storage unit 42 includes a nonvolatile storage device that can store various data and can be read out by the control unit 41.
- a component shape database that defines the shape of the electronic component 120, information on a projection pattern (light / dark pattern for three-dimensional measurement, plane pattern), and the like generated by the projection unit 62 are stored.
- the control unit 41 performs two-dimensional image inspection and main imaging using a two-dimensional image captured using the main imaging unit 31 and the indirect illumination unit 32 (and the plane pattern illumination of the projection unit 62) or the specific wavelength illumination unit 64.
- 3D (three-dimensional shape) inspection by three-dimensional shape measurement using the unit 31 and the projection unit 62 or the laser pointer 63, and an oblique image using an oblique image captured using the tilt imaging unit 61 and the indirect illumination unit 32
- the inspection of the solder 130 on the substrate 110, the mounting state inspection of the electronic component 120 mounted on the substrate 110, the inspection of the substrate 110 in the completed state, and the like are performed by combining image inspection and the like.
- the storage unit 42 stores attachment information 42a of the inspection device 60 corresponding to the eight openings 53 provided in each indirect illumination unit 32 (reflection unit 51). .
- the attachment information 42a includes what kind of inspection device 60 is attached to which position of the opening 53 among the eight openings 53 (which opening 53 is used), and which opening. 53 is information indicating whether 53 is not used.
- the mounting information may be input in advance as setting information when the inspection device 60 is installed, or the connection state of the control line between the inspection device 60 and the control device 40 (use status of input / output ports) is detected. It is also possible to obtain it.
- the position of the opening 53 in the open state (that is, the opening 53 where the inspection device 60 is installed and the cap 57 is removed) can be acquired.
- This attachment information 42a is an example of the “position information of the opening” in the present invention.
- the image processing unit 43 performs image processing on the captured image (imaging signal) captured by the main imaging unit 31 and the tilt imaging unit 61 to recognize the electronic component 120 and the solder joint (solder 130) of the substrate 110 (image recognition). ) To generate image data suitable for.
- the image processing unit 43 captures a two-dimensional image using the main imaging unit 31 and the indirect illumination unit 32, the position information of the opening 53 in the open state (inspection device 60).
- the illumination unevenness portion corresponding to the opening 53 is detected from the captured image captured by the main imaging unit 31 using the illumination light of the indirect illumination unit 32 based on the attachment information 42a).
- the image processing unit 43 is configured to perform a process of correcting illumination unevenness in the detected captured image.
- FIG. 11 it is assumed that an object A is imaged on a substrate 110 using a main imaging unit 31 and an indirect illumination unit 32.
- the object A has a disk-like shape that gently rises toward the top and has a mirror-reflected object surface such as a metal surface.
- the captured image of the main imaging unit 31 using the illumination light (indirect illumination) of the indirect illumination unit 32 in which the light of the middle light source 55 is reflected by the reflection unit 51 is illustrated in FIG.
- illumination light (indirect illumination) from above at an angle of approximately 45 degrees is irradiated from the entire circumference in the circumferential direction (see FIG.
- this illumination light is reflected from the surface of the object A and is reflected on the main imaging unit 31.
- an annular bright region 71 is formed on the object A in the captured image.
- the illumination light reflected by the top part A1 and the peripheral part A2 of the object A is difficult to be incident on the main imaging unit 31 due to the irradiation angle, and becomes relatively dark.
- the illumination light is not reflected in the formation region of the opening portion 53 (broken line arrow in FIG. 11). Therefore, a dark region 72 corresponding to the opening 53 is formed in the annular bright region 71 as shown in FIG.
- the dark region 72 is an example of the “illumination uneven portion” in the present invention.
- this dark region 72 is caused by the opening 53 in the open state, if the positions of the respective openings 53 are Q1 to Q8 as shown in FIG. 3, the corresponding positions in the annular bright region 71 shown in FIG. Dark regions 72 are formed in Q1 to Q8.
- the four openings 53 Q2, Q4, Q6, and Q8 in the oblique direction are closed by the cap 57 (when the inspection device 60 is not installed), as shown in FIG. A dark region corresponding to one opening 53 is not formed, and only dark regions 72 (Q1, Q3, Q5, and Q7) corresponding to the remaining four openings 53 in the open state are formed.
- the positions of the dark regions 72 in the image correspond to the positions where the openings 53 are formed in the reflecting portion 51, respectively, and are circumferentially and equiangularly spaced at an angle ⁇ (see FIG. 3).
- the dark region 72 has the number and arrangement position corresponding to the open portion 53 in the annular bright region 71. If formed, it can be determined that these dark regions 72 are uneven illumination portions due to the openings 53.
- the image processing unit 43 detects an annular bright region 71 having a dark region 72 therein in the captured image when processing the captured image using the indirect illumination (middle light source 55) of the indirect illumination unit 32. .
- a bright area 71 can be detected by known image recognition based on lightness (pixel density value).
- the image processing unit 43 detects the bright region 71 is the dark region 72 (illumination uneven portion) corresponding to the opening 53 based on the attachment information 42 a of the inspection device 60 stored in the storage unit 42? Judge whether or not.
- the dark areas 72 in the bright area 71 coincide with (correspond to) the number and arrangement positions of the opened openings 53 obtained from the attachment information 42a, the dark areas 72 are changed.
- the image processing unit 43 determines that the area is a dark area (illumination unevenness) caused by the opening 53 and corrects (interpolates) the dark area 72 using an image (pixel value) of the surrounding bright area 71. .
- the inspection process can be performed after correcting the captured image including the dark region 72 caused by the opening 53 (see FIGS. 13 and 14) as a captured image without illumination unevenness as shown in FIG. It becomes possible.
- the imaging control unit 44 reads out an imaging signal at a predetermined timing from the main imaging unit 31 and the tilt imaging unit 61 based on the control signal output from the control unit 41 and reads the readout signal.
- the imaging signal is configured to be output to the image processing unit 43.
- the projection control unit 45 controls illumination by the projection unit 62 based on the control signal output from the control unit 41.
- the projection control unit 45 uses the projection pattern data stored in the storage unit 42, and uses a plurality of illumination lights of a plurality of projection patterns whose phases are shifted.
- the projection unit 62 is controlled so as to perform projections of times.
- the projection control unit 45 performs control to supplement illumination light from the indirect illumination unit 32 using plain pattern illumination.
- the illumination control unit 46 is configured to turn on the light sources of the upper light source 54, the middle light source 55, and the lower light source 56 of the indirect illumination unit 32 at a predetermined timing based on the control signal output from the control unit 41. Yes.
- the motor control unit 47 Based on the control signal output from the control unit 41, the motor control unit 47 performs servo motors of the appearance inspection apparatus 100 (the X-axis motor 21, the Y-axis motor 22 and the Z-axis motor 23 of the head moving mechanism 20, the substrate transfer). It is configured to control the driving of a motor (not shown) for driving the conveyor 10. Further, the motor control unit 47 is configured to acquire the positions of the imaging head unit 30 and the substrate 110 based on signals from encoders (not shown) of the respective servo motors.
- the imaging target (substrate 110) is imaged or irradiated with light from the outside of the reflecting unit 51 at a position different from the arrangement position of the main imaging unit 31 of the reflecting unit 51.
- the inspection device 60 other than the main imaging unit 31 can be disposed outside the reflecting unit 51.
- the obstacle (inspection device 60) that blocks light is arranged inside the reflection portion 51, the reflection area of the reflection portion 51 is not greatly reduced, and the reduction in uniformity of indirect illumination is reflected. Only the portion of the opening 53 for performing imaging or light irradiation provided in the portion 51 can be suppressed.
- the area of the opening 53 for performing imaging or light irradiation can be suppressed to the amount necessary for the inspection device 60, it is also possible to suppress a decrease in uniformity of indirect illumination.
- the appearance inspection apparatus 100 of the present embodiment even when the inspection device 60 other than the main imaging unit 31 is configured to be installable, it is possible to suppress a decrease in uniformity of indirect illumination. .
- the cap 57 that closes the opening 53 of the reflecting portion 51 is provided. Thereby, only the opening part 53 actually used can be made into the opened state. As a result, since it can be suppressed to the minimum necessary opening area, light leakage through the opening 53 can be suppressed to the minimum, and this can also suppress a decrease in uniformity of indirect illumination. Further, by providing the cap 57 that closes the opening 53, when the inspection device 60 is not used (installed), foreign matter and dust inside the reflection portion 51 (imaging position P), and other inspection reliability. It is possible to suppress the intrusion of a substance that lowers the property.
- the first reflective surface portion 57d that reflects light is formed on the portion of the cap 57 that closes the opening portion 53 (the lid portion 57a) while the opening portion 53 is closed. .
- the 1st reflective surface part 57d of the cap 57 can be functioned as a part of reflective surface of the reflective part 51.
- FIG. As a result, even when the opening portion 53 is provided in the reflecting portion 51, when the opening portion 53 is closed by the cap 57 (when the inspection device 60 is not used), it is effective to reduce the uniformity of indirect illumination. Can be suppressed.
- the cap 57 is configured so that the engaging protrusion 57 c that engages with the edge of the opening 53 of the reflecting portion 51 is provided on the cap 57 and is detachable from the opening 53. To do. Accordingly, the cap 57 can be easily attached to the opening 53, and the cap 57 can be easily removed even when the inspection device 60 is used (installed) later.
- the openings 53 are formed at a plurality of positions that are radially centered on the imaging position P and inclined by the angle ⁇ from the imaging axis of the main imaging unit 31. To do. Accordingly, the inspection device 60 can be imaged or irradiated with light to the imaging position P through the plurality of openings 53 in the oblique direction different from the main imaging unit 31. At this time, by arranging the opening 53 at a radial position centered on the imaging position P, the opening 53 can be arranged on the line connecting the imaging position P and the inspection device 60. It is not necessary to bend the optical axis, and the opening area of the opening 53 can be minimized.
- the plurality of openings 53 are arranged circumferentially at an angle ⁇ around the imaging position P in plan view.
- a plurality of inspection devices 60 can be arranged and used so as to surround the imaging position P in plan view.
- the degree of freedom of the arrangement position of the inspection device 60 can be increased, the arrangement of the inspection device 60 according to the use and type of the inspection device 60, the shape of the imaging target, the position of the inspection target part, and the like. It is possible to provide a highly convenient appearance inspection apparatus 100 in which the position can be set.
- the common support member 33 to which different types of inspection devices 60 can be attached is provided outside the reflection portion 51.
- the inspection device 60 can be attached to the support member 33 in accordance with the inspection target (imaging target), and an optimal apparatus configuration corresponding to the inspection target can be constructed.
- an optimal apparatus configuration corresponding to the inspection object can be easily constructed.
- the inspection device 60 at least one of the tilt imaging unit 61, the projection unit 62, the laser pointer 63, and the specific wavelength illumination unit 64 is provided.
- This allows various inspections such as visual inspection from an oblique direction, three-dimensional shape inspection by pattern projection or laser projection, and visual inspection using illumination light of a specific wavelength such as ultraviolet light and infrared light, depending on the inspection object. It can be implemented in combination with a substantially vertical upper two-dimensional image inspection using the main imaging unit 31.
- the projection unit 62 when the projection unit 62 performs imaging of the imaging target (substrate 110) using illumination light from the indirect illumination unit 32, the projection unit 62 is applied to the substrate 110 through the opening 53. It is configured to irradiate uniform illumination light. Thereby, not only the 3D shape inspection by the pattern projection using the projection unit 62 but also the 2D image inspection by the main imaging unit 31 using the indirect illumination unit 32, the uniform from the projection unit 62 is performed.
- the illumination light of the indirect illumination unit 32 can be supplemented with simple illumination light. As a result, when installing the projection part 62 as the test
- the second reflection surface portion 65 that reflects light is provided on the end surface portion on the opening 53 side of the inspection device 60. Thereby, part of the illumination light that has not been reflected by the opening 53 can be reflected by the second reflecting surface portion 65. As a result, an effect of reducing the effective opening area of the opening 53 (the area of the region that cannot be reflected) can be obtained, so that even when the inspection device 60 is used, the uniformity of indirect illumination is prevented from being lowered. Can do.
- the seal member 66 is provided so as to close the gap between the end surface portion on the opening 53 side of the inspection device 60 and the edge portion of the opening 53, and the end portion 66 b
- a third reflecting surface portion 66a that reflects light is provided in a portion exposed to the opening 53 side.
- the dark region 72 corresponding to the opening 53 in the open state is detected from the captured image, and the detected dark region 72 is corrected.
- the image processing unit 43 is configured as described above. Thereby, since the dark region 72 can be corrected, it is possible to suppress the deterioration of the uniformity of the indirect illumination caused by the opening 53 when using the inspection device 60 later by image processing.
- indirect illumination is performed by the middle light source of the indirect illumination unit and direct illumination is performed by the upper light source and the lower light source is shown, but the present invention is not limited thereto.
- a light source that performs indirect illumination may be provided in the indirect illumination unit. Therefore, the upper light source and the lower light source need not be provided.
- you may comprise so that indirect illumination may be performed by either an upper stage light source or a lower stage light source, and in that case, you may comprise so that a middle stage light source may perform direct illumination.
- a dome-shaped (hemispherical shell-shaped) reflecting portion is provided in the above-described embodiment, but the present invention is not limited thereto.
- a reflecting portion having a shape other than a hemispherical shell shape may be provided.
- the inner shape of the reflecting portion is important, and the outer shape of the reflecting portion is arbitrary.
- the shape of the inner surface of the reflecting portion may be determined in consideration of the irradiation direction of illumination light to the imaging object and the arrangement of the light sources.
- the present invention is not limited to this. At least one opening may be provided. That is, the number of openings may be seven or less, or nine or more.
- the number of openings corresponds to the number of inspection devices 60 that can be installed in the appearance inspection apparatus, so that the greater the number of openings, the greater the degree of freedom of the apparatus configuration and the appropriate apparatus configuration corresponding to the inspection object. It can be made easy. On the other hand, the greater the number of openings, the lower the uniformity of indirect illumination due to the openings.
- the effect of suppressing the reduction in the uniformity of indirect illumination due to the configuration that performs the general image correction works even more effectively.
- an example is shown in which eight openings are arranged circumferentially at equal angular intervals (angle ⁇ ) around the imaging position P, but the present invention is not limited to this.
- the openings need not be arranged circumferentially. That is, the distance D from the imaging position P of the opening need not be constant.
- a plurality of rows of openings may be arranged concentrically.
- the opening may have a shape other than a circular shape.
- the opening contributes to a decrease in the uniformity of indirect illumination. Therefore, the shape of the opening is as small as possible within the range that does not hinder the operation of the inspection equipment to be installed. Shape is desirable.
- the opening 53 is formed in a circular shape so as to correspond to the cylindrical lens barrels (61a, 62a) of the tilt imaging unit 61 and the projection unit 62, and a minimum necessary opening area is sufficient. Thus, the shape of the opening 53 is set.
- the cap 57 is provided as an example of the “blocking portion” of the present invention, but the present invention is not limited to this.
- You may provide the obstruction
- a non-translucent seal sheet-like member
- the opening 53 may be formed as a screw hole, and a cap having a male screw portion may be screwed together.
- a lid member may be provided on the reflecting portion 51.
- the cap is composed of two members, and the first member inside the reflecting portion and the second member outside the reflecting portion are engaged through the opening, thereby closing the opening and closing the cap to the reflecting portion. You may employ
- the first reflecting surface portion 57d is formed on the lid portion 57a of the cap 57 that closes the opening 53.
- the present invention is not limited to this.
- You may provide a 1st reflective surface part in parts other than a cover part in a cap.
- the first reflective surface portion may be formed on the end surface of the side wall portion 57b (the end surface opposite to the lid portion 57a) by fitting the cap 57 of FIG. 6 into the opening 53 from the outside of the reflective portion 51.
- the first reflective surface portion of the cap can be made continuous with the inner surface (reflective surface) of the reflective portion 51 to be integrated with the reflective surface of the reflective portion 51. Therefore, it can suppress more effectively that the uniformity of indirect illumination falls due to an opening part.
- the support member may be provided with an individual attachment member (different for each inspection device) corresponding to the inspection device.
- the first member 34a of the attachment member 34 remains common to the respective inspection devices 60, and the attachment member may be configured so that the second portion 34b has an individual shape for each inspection device 60. Good.
- a support member corresponding to the inspection device to be mounted may be provided for each inspection device.
- the present invention is not limited thereto.
- an inspection device other than the tilt imaging unit 61, the projection unit 62, the laser pointer 63, and the specific wavelength illumination unit 64 may be provided as the inspection device.
- the substrate 110 when imaging the imaging target (substrate 110) using illumination light from the indirect illumination unit 32, the substrate 110 is irradiated with plain pattern illumination light through the opening 53.
- the example which comprised the projection part 62 was shown, this invention is not limited to this. Irradiation with plain pattern illumination light is not necessary.
- the second reflecting surface portion 65 is provided on the end surface portion on the opening 53 side of the inspection device 60
- the present invention is not limited thereto.
- the second reflecting surface portion need not be provided.
- the present invention is not limited thereto. I can't. In the present invention, the seal member need not be provided.
- the example in which the image processing unit 43 is configured to detect and correct the illumination unevenness corresponding to the opening 53 from the captured image based on the attachment information 42a has been described. Is not limited to this. In the present invention, image correction need not be performed.
- Main imaging unit 32 Indirect illumination unit 33 Support member 43 Image processing unit 51 Reflection unit 53 Aperture 55 Middle light source (light source) 57 Cap (blocking part) 57c Engaging convex part (engaging part) 57d First reflection surface portion 60 Inspection device 61 Inclined imaging portion 62 Projection portion 63 Laser pointer 64 Specific wavelength illumination portion 65 Second reflection surface portion 66 Seal member 66a Third reflection surface portion 72 Dark region (illumination unevenness portion) 100 Appearance inspection device 110 Substrate (object to be imaged) P Imaging position
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Abstract
Description
32 間接照明部
33 支持部材
43 画像処理部
51 反射部
53 開口部
55 中段光源(光源)
57 キャップ(閉塞部)
57c 係合凸部(係合部)
57d 第1反射面部
60 検査用機器
61 傾斜撮像部
62 投影部
63 レーザポインタ
64 特定波長照明部
65 第2反射面部
66 シール部材
66a 第3反射面部
72 暗領域(照明ムラ部分)
100 外観検査装置
110 基板(撮像対象物)
P 撮像位置
Claims (12)
- 撮像位置に配置された撮像対象物を略垂直上方から撮像する主撮像部(31)と、
光源(55)と、前記撮像位置を覆うように設けられ、前記光源の照明光を反射させて撮像対象物に照射する反射部(51)と、を含む間接照明部(32)とを備え、
前記反射部は、前記主撮像部の配置位置とは異なる位置に、前記反射部の外部から前記撮像対象物に対して撮像または光の照射を行うための開口部(53)を有する、外観検査装置。 - 前記反射部の前記開口部を閉塞する閉塞部(57)をさらに備える、請求項1に記載の外観検査装置。
- 前記閉塞部は、前記開口部を閉塞した状態で前記開口部を塞ぐ部分に、光を反射する第1反射面部(57d)を有する、請求項2に記載の外観検査装置。
- 前記閉塞部は、前記反射部の前記開口部の縁部と係合する係合部(57c)を有し、前記開口部に着脱可能なように構成されている、請求項2に記載の外観検査装置。
- 前記開口部は、前記反射部において、前記撮像位置を中心とする放射状で、かつ、前記主撮像部の撮像軸から斜めに傾斜した複数の位置に形成されている、請求項1に記載の外観検査装置。
- 複数の前記開口部は、前記反射部において、平面視で前記撮像位置回りに互いに間隔を隔てて周状に配列されている、請求項5に記載の外観検査装置。
- 前記反射部の外部から前記開口部を介して前記撮像対象物に対して撮像または光の照射を行うことが可能な状態で、種類の異なる検査用機器(60)を取り付け可能な共通の支持部材(33)をさらに備える、請求項1に記載の外観検査装置。
- 前記検査用機器は、前記撮像対象物を斜め方向から撮像する傾斜撮像部(61)、三次元計測用のパターン光を投影可能な投影部(62)、レーザポインタ(63)、および、特定波長の照明光を照射する特定波長照明部(64)の少なくともいずれかを含む、請求項7に記載の外観検査装置。
- 前記検査用機器は、前記投影部であり、
前記投影部は、前記間接照明部による照明光を用いて前記撮像対象物の撮像を行う場合に、前記開口部を介して前記撮像対象物に一様な照明光を照射するように構成されている、請求項8に記載の外観検査装置。 - 前記検査用機器は、前記開口部側の端面部に、光を反射する第2反射面部(65)を有する、請求項8に記載の外観検査装置。
- 前記検査用機器の前記開口部側の端面部と、前記開口部の縁部との隙間を塞ぐように設けられた環状のシール部材(66)をさらに備え、
前記シール部材は、前記開口部側に露出する部分に、光を反射する第3反射面部(66a)を有する、請求項7に記載の外観検査装置。 - 前記開口部は閉塞可能に構成されており、
前記主撮像部の撮像画像を画像処理する画像処理部(43)をさらに備え、
前記画像処理部は、開状態の前記開口部の位置情報に基づいて、前記間接照明部の照明光を用いて前記主撮像部により撮像された撮像画像中から前記開状態の開口部に対応する照明ムラ部分(72)を検出し、検出した前記撮像画像中の照明ムラを補正する処理を行うように構成されている、請求項1に記載の外観検査装置。
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JP7079665B2 (ja) | 2018-05-30 | 2022-06-02 | シーシーエス株式会社 | 光照射装置及びピンホール部材 |
JP2019207211A (ja) * | 2018-05-30 | 2019-12-05 | シーシーエス株式会社 | 光照射装置及びピンホール部材 |
WO2020075213A1 (ja) * | 2018-10-09 | 2020-04-16 | オリンパス株式会社 | 計測装置、計測方法および顕微鏡システム |
JPWO2020075213A1 (ja) * | 2018-10-09 | 2021-09-02 | オリンパス株式会社 | 計測装置、計測方法および顕微鏡システム |
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JP7411928B2 (ja) | 2019-12-26 | 2024-01-12 | 株式会社Rutilea | 物品撮影装置 |
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WO2023139659A1 (ja) * | 2022-01-18 | 2023-07-27 | ヤマハロボティクスホールディングス株式会社 | 物品の三次元線図を生成する方法及び三次元線図生成装置及び三次元形状検査装置 |
WO2024042933A1 (ja) * | 2022-08-24 | 2024-02-29 | 株式会社サキコーポレーション | 検査装置 |
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KR101759632B1 (ko) | 2017-07-20 |
JP6101798B2 (ja) | 2017-10-11 |
KR20150142028A (ko) | 2015-12-21 |
JPWO2014196010A1 (ja) | 2017-02-23 |
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