WO2014175215A1 - 無アルカリガラス基板およびその製造方法 - Google Patents
無アルカリガラス基板およびその製造方法 Download PDFInfo
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- WO2014175215A1 WO2014175215A1 PCT/JP2014/061168 JP2014061168W WO2014175215A1 WO 2014175215 A1 WO2014175215 A1 WO 2014175215A1 JP 2014061168 W JP2014061168 W JP 2014061168W WO 2014175215 A1 WO2014175215 A1 WO 2014175215A1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/0085—Compositions for glass with special properties for UV-transmitting glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
- C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/11—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen
- C03C3/112—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine
- C03C3/115—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron
- C03C3/118—Glass compositions containing silica with 40% to 90% silica, by weight containing halogen or nitrogen containing fluorine containing boron containing aluminium
Definitions
- the present invention is a non-alkali glass that is suitable for various display substrate glasses, substantially does not contain an alkali metal oxide, can be easily formed into a plate shape, and the in-plane distribution of ultraviolet transmittance is suppressed. Regarding the substrate.
- various display substrate glasses especially glass that forms a metal or oxide thin film on the surface, contain alkali metal oxides, so that alkali metal ions diffuse into the thin film and deteriorate the film characteristics.
- the alkali-free glass is substantially free of alkali metal ions.
- a flat panel display typified by a liquid crystal display (LCD)
- two substrate glasses constituting the FPD in the case of LCD, a substrate glass provided with TFT elements and a color filter are provided).
- the substrate glass is bonded using a curable resin.
- the FPD includes components that have a problem with heat resistance such as a TFT element. Therefore, a photocurable resin is used as the curable resin, and the resin is cured by ultraviolet irradiation.
- display substrate glass is required to have ultraviolet transparency, and Patent Documents 1 and 2 propose an alkali-free glass substrate in which the ultraviolet transmittance at 300 nm is 50 to 85% at a thickness of 0.5 mm. Has been.
- the UV transmittance is uniform across the entire surface of the display substrate glass, that is, the in-plane distribution of UV transmittance is small.
- a photopolymerizable monomer is added to the liquid crystal material filled in the liquid crystal layer of the LCD, and light irradiation is performed with the liquid crystal molecules tilted in a predetermined direction to form a polymer in the vicinity of the alignment film, whereby the liquid crystal
- PSA polymer alignment stabilization
- the substrate glass for display is required to have a small in-plane distribution of ultraviolet transmittance.
- the in-plane distribution of the ultraviolet transmittance of the display substrate glass is large, it is necessary to change the ultraviolet irradiation conditions depending on the portion of the display substrate glass, and the yield of the liquid crystal display panel is lowered.
- the display substrate glass used in the display device.
- the substrate glass is etched using hydrofluoric acid or the like, and further physically polished as necessary. A thinning method is performed.
- the substrate glass is thinned by performing an etching process or the like before forming the display device member on the surface of the substrate glass, the strength of the substrate glass is lowered and the amount of deflection is increased. Therefore, the problem that it cannot process in the existing manufacturing line arises.
- the substrate glass is thinned by performing an etching process or the like after the display device member is formed on the surface of the substrate glass, the fineness formed on the glass surface of the substrate in the process of forming the display device member on the surface of the substrate glass. A problem of obvious scratches, that is, the occurrence of edge pits arises.
- a thin substrate glass (thin substrate glass) is laminated with another supporting substrate glass to form a laminate, and a predetermined device for manufacturing a display device in that state.
- a method of separating the thin substrate glass and the supporting substrate glass after the above process has been proposed (see Patent Document 4).
- a method of separating the thin substrate glass and the support substrate glass a method of scanning and irradiating the surface of the substrate with a laser beam can be applied as in the method described in Patent Document 5.
- the substrate glass for display is required to have a small in-plane distribution of light transmittance. When the in-plane distribution of the light transmittance is large in the display substrate glass, it is necessary to change the irradiation condition of the laser beam depending on the portion of the display substrate glass, and the yield of the display device is lowered.
- the object of the present invention is to solve the above-mentioned drawbacks, high ultraviolet transmittance, small in-plane distribution of ultraviolet transmittance, high strain point, high Young's modulus, and easy to mold into a plate during substrate production. It is to provide a non-alkali glass substrate.
- the present invention has a strain point of 680 ° C. or higher, a Young's modulus of 78 GPa or higher, and an ultraviolet transmittance at a wavelength of 300 nm of 40 to 85% in terms of a thickness of 0.5 mm.
- the in-plane distribution of ultraviolet transmittance at 300 nm on a G6 size substrate is 1% or less in terms of thickness 0.5 mm, and the average cooling rate near the glass transition point determined by the rate cool method is 400 ° C./min or less.
- the in-plane distribution of the average cooling rate is 40 ° C./min or less, and the SiO 2 50 to 73 in terms of mass percentage based on oxide.
- the total amount of halogen elements is preferably 0.001 to 1% in terms of oxide-based mass percentage.
- the alkali-free glass substrate of the present invention preferably has an in-plane distribution of Fe content (expressed in terms of mass percentage in terms of Fe 2 O 3 ) of 0.001 to 0.003%.
- the present invention provides a method for producing an alkali-free glass having a composition of SiO 2 —Al 2 O 3 —RO (RO is one or more of MgO, CaO, BaO and SrO). Because A strain point of 680 ° C.
- the average cooling rate in the vicinity of the glass transition point determined by the rate cool method is 400 ° C./min or less, the in-plane distribution of the average cooling rate is 40 ° C./min or less, and ultraviolet rays at a wavelength of 300 nm on a G6 size substrate.
- the total amount of halogen elements is preferably 0.001 to 1% in terms of mass percentage based on oxide.
- the in-plane distribution of Fe content is preferably 0.001 to 0.003% in terms of mass percentage in terms of Fe 2 O 3 .
- the non-alkali glass substrate of the present invention can be easily formed into a plate shape during substrate production. Further, the alkali-free glass substrate of the present invention has a high ultraviolet transmittance and a small in-plane distribution of the ultraviolet transmittance, so that the yield is improved when used as a substrate glass for FPD.
- the alkali-free glass substrate of the present invention contains SiO 2 , Al 2 O 3 , SnO 2 and Fe 2 O 3 as essential components, and B 2 O 3 , MgO, CaO, SrO, BaO and ZrO 2 are contained as optional components.
- the composition range of each component will be described. If SiO 2 is less than 50% (mass%, the same unless otherwise specified), the strain point is not sufficiently increased, the thermal expansion coefficient is increased, and the density is increased. 52% or more is preferable, 54% or more is more preferable, and 56% or more is more preferable. In 73 percent, reduced solubility at the time of glass production, the temperature T 4 which is a temperature T 2 and 10 4 dPa ⁇ s glass viscosity becomes 10 2 dPa ⁇ s is increased, the liquidus temperature rises. It is preferably 70% or less, more preferably 68.5% or less, and even more preferably 67% or less.
- Al 2 O 3 suppresses the phase separation of the glass, lowers the thermal expansion coefficient, and raises the strain point. However, if it is less than 10.5%, this effect does not appear, and other components that increase the expansion coefficient are increased. As a result, the thermal expansion of the glass increases. It is preferably 12.5% or more, more preferably 14.5% or more, and further preferably 16.5% or more. If it exceeds 24%, the solubility of the glass during production may be deteriorated, or the devitrification temperature may be increased. It is preferably 23% or less, more preferably 22.5% or less, and even more preferably 22% or less.
- B 2 O 3 is not essential, but can be contained in order to improve the melting reactivity of the glass during production, lower the devitrification temperature, and improve the BHF resistance. However, if the amount is too large, the strain point becomes low and the Young's modulus becomes small. 4% or less is preferable. In order to acquire said effect
- MgO has the characteristics of increasing the Young's modulus while maintaining a low density without increasing the expansion coefficient in alkaline earths, and can be contained because it improves the solubility during glass production. However, if the amount is too large, the devitrification temperature increases, so the content is made 10% or less. It is preferably 8% or less, more preferably 7.5% or less, and even more preferably 7% or less. In order to acquire said effect
- CaO has the characteristics of increasing the Young's modulus while maintaining the low density without increasing the expansion coefficient in alkaline earth following MgO, and can be contained because it improves the solubility during glass production.
- the amount is too large, the devitrification temperature may increase, or a large amount of phosphorus, which is an impurity in limestone (CaCO 3 ), which is a raw material for CaO, may be mixed. It is preferably 10% or less, more preferably 8.5% or less, and even more preferably 7% or less. In order to acquire said effect
- SrO can be contained without increasing the devitrification temperature of the glass and improving the solubility during glass production.
- the amount is preferably 12% or less, more preferably 10.5% or less, and further preferably 9% or less.
- 1.5% or more is preferable, 2% or more is more preferable, and 2.5% or more is further more preferable.
- BaO is not essential, but can be contained to improve solubility during glass production. However, if the amount is too large, the glass expansion coefficient and density are excessively increased. It is preferably 13.5% or less, more preferably 10% or less, further preferably 8% or less, and particularly preferably 6% or less. In order to acquire said effect
- ZrO 2 is made 5% or less in order to reduce the melting temperature during glass production or to promote crystal precipitation during firing. If it exceeds 5%, the glass becomes unstable or the relative dielectric constant ⁇ of the glass increases. 1.5% or less is preferable, 1% or less is more preferable, 0.5% or less is further preferable, and it is particularly preferable not to contain substantially.
- the temperature T 4 at which the glass viscosity becomes 10 4 dPa ⁇ s increases, and the equipment and float molding used to mold the glass into a plate shape.
- the life of the float bath casing structure and heater may be extremely shortened. It is preferably 10% or more, more preferably 11.5% or more, and further preferably 13% or more. If it exceeds 29.5%, there is a risk that the thermal expansion coefficient cannot be reduced. It is preferably 22% or less, more preferably 20% or less, and further preferably 18% or less.
- SnO 2 is preferably contained for improving clarity during glass production.
- SnO 2 generates O 2 gas in a glass melt obtained by melting glass raw materials.
- SnO 2 is reduced from SnO 2 to SnO at a temperature of 1450 ° C. or more, and O 2 gas is generated and acts to grow bubbles greatly.
- the glass raw material is melted at 1500 ° C. or higher.
- Sn content in the glass is in terms of SnO 2, 0.01% or more. If SnO 2 is less than 0.01%, a clarification action during glass melting cannot be obtained. Preferably it is 0.05% or more, More preferably, it is 0.1% or more.
- the glass may be colored or devitrified, so the Sn content in the glass is 1% or less, preferably 0.5% or less, more preferably in terms of SnO 2. 0.3% or less.
- Sn content is not the input amount in a glass raw material but the quantity which remains in a glass melt. The same applies to the Fe content, the F content, and the Cl content described later.
- Fe 2 O 3 has the effect of raising the temperature of the molten glass in the melting tank and lowering the melting temperature of the melting tank at the time of glass production due to the infrared absorption effect by Fe 2+ ions. Therefore, the Fe content in the glass is 0.005% or more in terms of Fe 2 O 3 , preferably 0.01% or more, more preferably 0.02% or more, and particularly preferably 0.04% or more. However, if it is too much, there is a problem of coloring the glass or lowering the ultraviolet transmittance, so the content is made 0.1% or less. 0.07% or less is preferable, 0.055% or less is more preferable, and 0.045% or less is particularly preferable.
- a halogen element is not essential, but can be contained for improving clarity during glass production.
- F and Cl are preferable from the viewpoint of clarity.
- the content of F is less than 0.001% by mass, the clarification action during melting of the glass raw material may be reduced.
- it is 0.005 mass% or more, More preferably, it is 0.01 mass% or more, More preferably, it is 0.02 mass% or more, Most preferably, it is 0.03 mass% or more.
- the F content is more than 0.15% by mass, the strain point of the glass to be produced is lowered.
- it is 0.12 mass% or less, More preferably, it is 0.1 mass% or less.
- the clarification action during melting of the glass raw material is lowered.
- it is 0.005 mass% or more, More preferably, it is 0.01 mass% or more.
- the moisture concentration in the glass is lowered and the clarity is deteriorated.
- it is 0.25 mass% or less, More preferably, it is 0.2 mass% or less.
- content of a halogen element is 0.001 mass% or more in total.
- the clarification action during melting of the glass raw material is lowered.
- content of a halogen element is 1 mass% or less in total. If the content is more than 1% by mass, the strain point may be excessively lowered. Preferably it is 0.7 mass% or less, More preferably, it is 0.5 mass% or less.
- the alkali-free glass substrate of the present invention does not contain an alkali metal oxide exceeding the impurity level (that is, substantially) so as not to cause deterioration of the characteristics of the metal or oxide thin film provided on the glass surface during panel manufacture.
- PbO, As 2 O 3 Sb 2 O 3 is preferably not substantially contained.
- the amount of impurities as impurities is preferably 23 mol ppm or less, more preferably 23 mol ppm or less, still more preferably 18 mol ppm or less, and particularly preferably 11 mol ppm or less.
- the alkali-free glass substrate of the present invention can contain ZnO and SO 3 in a total amount of 5% or less in order to improve solubility, clarity and moldability during glass production.
- the alkali-free glass of the present invention preferably has a strain point of 680 ° C. or higher, 690 ° C. or higher, more preferably 700 ° C. or higher, and even more preferably 710 ° C. or higher.
- the alkali-free glass of the present invention has a Young's modulus of preferably 78 GPa or more, 79 GPa or more, 80 GPa or more, more preferably 81 GPa or more, and further preferably 82 GPa or more.
- the alkali-free glass substrate of the present invention has an ultraviolet transmittance at a wavelength of 300 nm of 40 to 85% in terms of a thickness of 0.5 mm.
- the ultraviolet rays used for bonding the two substrate glasses constituting the FPD are mainly ultraviolet rays having a wavelength of about 300 nm. If the two substrate glasses have a low ultraviolet transmittance at a wavelength of 300 nm, it takes a long time to bond the two substrate glasses with the ultraviolet curable resin. That is, even when the ultraviolet curable resin is irradiated with ultraviolet rays, it is easily absorbed by the substrate glass, so that it takes time to cure the resin.
- the alkali-free glass substrate of the present invention has an ultraviolet transmittance at a wavelength of 300 nm of 40% or more in terms of a thickness of 0.5 mm. Therefore, when used as a substrate glass constituting an FPD, the ultraviolet curable resin is cured for a long time. Is not required.
- the ultraviolet transmittance of the glass substrate varies depending on the thickness of the substrate. In the present invention, in order to eliminate the influence of the thickness of the substrate, it was standardized to an ultraviolet transmittance in terms of a thickness of 0.5 mm.
- the ultraviolet transmittance at 300 nm is preferably 45% or more, more preferably 50% or more.
- the alkali-free glass substrate of the present invention has an ultraviolet transmittance at a wavelength of 300 nm of 85% or less in terms of a thickness of 0.5 mm. . Preferably it is 80% or less, More preferably, it is 75% or less.
- the alkali-free glass substrate of the present invention has an in-plane distribution of the ultraviolet transmittance in addition to the ultraviolet transmittance at a wavelength of 300 nm being in the above range.
- the in-plane distribution of ultraviolet transmittance at a wavelength of 300 nm is 1% or less, preferably 0.5% in terms of thickness 0.5 mm on a G6 size substrate (typically 1850 mm ⁇ 1500 mm). % Or less.
- substrate glass which comprises FPD it is not necessary to change the irradiation conditions of an ultraviolet-ray according to the site
- the alkali-free glass substrate of the present invention is a G7 size substrate (typically 1870 mm ⁇ 2200 mm) with an in-plane distribution of ultraviolet transmittance at a wavelength of 300 nm, and is 1% or less in terms of thickness 0.5 mm, and further 0 0.5% or less, more preferably a G8 size substrate (typically 2460 mm ⁇ 2160 mm), 1% or less, more preferably 0.5% or less in terms of thickness 0.5 mm. .
- the in-plane distribution means a difference between the maximum value and the minimum value in the plane.
- the average cooling rate and the in-plane distribution near the glass transition point determined by the rate cool method are shown below in order that the ultraviolet transmittance and the in-plane distribution satisfy the numerical range described above. Meet the conditions.
- the ultraviolet transmittance changes depending on the proportion of divalent iron (so-called Redox) in the total iron contained in the alkali-free glass substrate.
- the in-plane distribution of Redox exists in the alkali-free glass substrate
- the in-plane distribution of ultraviolet transmittance occurs.
- the presence of an in-plane distribution of the Fe content in the alkali-free glass substrate may cause an in-plane distribution of ultraviolet transmittance.
- the in-plane distribution of Fe content is also small.
- the in-plane distribution of the Fe content is preferably 0.001 to 0.003%.
- the virtual temperature of glass obtained by cooling from a high temperature (rate cool) at a constant cooling rate and the cooling rate hold a linear relationship it is possible to define the virtual temperature instead as the cooling rate at the rate cool. it can.
- this is the average cooling rate near the glass transition point determined by the rate cool method.
- the average cooling rate in the vicinity of the glass transition point determined by the rate cool method is more specifically determined by the following procedure. An experiment in which the glass is held at a temperature about 100 ° C.
- the in-plane distribution of redox of the alkali-free glass substrate can be reduced, and the in-plane distribution of ultraviolet transmittance is reduced. it can.
- the alkali-free glass substrate of the present invention has an average cooling rate of 400 ° C./min or less and an in-plane distribution of the average cooling rate of 40 ° C./min or less.
- the average cooling rate of the alkali-free glass substrate is 400 ° C./min or less
- the ultraviolet transmittance of the alkali-free glass substrate is in the above-described range, and the in-plane distribution of the ultraviolet transmittance is reduced.
- the in-plane distribution of the average cooling rate of the alkali-free glass substrate is 40 ° C./min or less ( ⁇ 20 ° C./min or less)
- the in-plane distribution of the ultraviolet transmittance of the alkali-free glass substrate is sufficiently small, and G6 size
- the thickness of the substrate is 1% or less in terms of a thickness of 0.5 mm.
- the alkali-free glass substrate of the present invention preferably has an average cooling rate of 300 ° C./min or less and an in-plane distribution of the average cooling rate of 40 ° C./min or less ( ⁇ 20 ° C./min or less). More preferably, the average cooling rate is 220 ° C./min or less, the in-plane distribution of the average cooling rate is 30 ° C./min or less ( ⁇ 15 ° C./min or less), and the average cooling rate is 150 ° C./min. It is particularly preferred that the in-plane distribution of the average cooling rate is 30 ° C./min or less ( ⁇ 15 ° C./min or less).
- the alkali-free glass substrate of the present invention can be produced, for example, by the following method.
- the raw materials of each component that are normally used are formulated so as to be target components having a strain point of 680 ° C. or higher, a Young's modulus of 78 GPa or higher, and an ultraviolet transmittance at a wavelength of 300 nm of 40 to 85% in terms of thickness 0.5 mm.
- This is continuously charged into a melting furnace and heated to 1500 to 1800 ° C. for melting.
- An alkali-free glass substrate can be obtained by forming this molten glass into a predetermined plate thickness by various forming methods (float method, downdraw method, fusion method, etc.), and then cooling after slow cooling.
- the average cooling rate is 400 ° C./min or less
- the in-plane distribution of the average cooling rate is 40 ° C./min or less
- the in-plane distribution of ultraviolet transmittance at a wavelength of 300 nm on a G6 size substrate is 0. It is necessary to manage the temperature conditions during molding and slow cooling so that it is 1% or less in terms of 5 mm.
- Examples 1, 3, 5, 7, 9, 11, 13, 15, 17, 19, 21, 23, 25, 27, 29, 31, 33, 35, 37, 39, 41, 43, 45, 47 are Examples, Examples 2, 4, 6, 8, 10, 12, 14, 16, 18, 20, 22, 24, 26, 28, 30, 32, 34, 36, 38, 40, 42, 44, 46 48 are comparative examples.
- the temperature retention of the side walls of the forming furnace and the slow cooling furnace is strengthened, and the temperature distribution of the heater of the slow cooling furnace is adjusted by paying attention to the temperature distribution of the glass so that the temperature distribution of the glass becomes better than before (uniform). To be).
- the temperature of the side wall portions of the forming furnace and the slow cooling furnace is as usual, and the thermal insulation is weaker than in the examples. .
- Table 1 shows the glass composition (unit: mass%) of glasses 1 to 8, the thermal expansion coefficient at 50 to 350 ° C. (unit: ⁇ 10 ⁇ 7 / ° C.), strain point (unit: ° C.), glass transition point ( Unit: ° C), specific gravity, Young's modulus (GPa) (measured by ultrasonic method), high temperature viscosity value, T 2 (temperature at which glass viscosity ⁇ becomes 10 2 poise, unit: ° C) , And a temperature T 4 (temperature at which the glass viscosity ⁇ becomes 10 4 poise, unit: ° C.), devitrification temperature (unit: ° C.), photoelastic constant (unit: nm / MPa / cm) (measured by a disk compression method at a measurement wavelength of 546 nm).
- Table 2 shows the glass used in Examples 1 to 48, average cooling rate (unit: ° C / min), in-plane distribution of average cooling rate (unit: ° C / min), and in-plane transmittance average at a wavelength of 300 nm (unit :%), And in-plane distribution (unit:%) of transmittance at a wavelength of 300 nm.
- the size of the glass used in each example is G6 size (1850 mm ⁇ 1500 mm ⁇ 0.5 mm).
- the average in-plane transmittance and the in-plane distribution of transmittance can be obtained by cutting out a plurality of samples of 50 mm ⁇ 50 mm from a G6 size plate and measuring the transmittance and refractive index of each sample.
- the transmittance of the glass was measured with a Hitachi Ultraviolet Visible Near Infrared Spectrophotometer 4U-4100.
- a precision refractometer KPR-2000 manufactured by Shimadzu Device Manufacturing was used.
- the in-plane distribution of the average cooling rate is 40 ° C./min or less, and the in-plane distribution of the ultraviolet transmittance at a wavelength of 300 nm is 1 on a G6 size substrate. %, It is considered that the yield is improved when used as FPD substrate glass.
- the alkali-free glass substrate of the present invention is suitable for various display substrate glasses because it can be easily formed into a plate shape and the in-plane distribution of ultraviolet transmittance is suppressed.
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Abstract
Description
この際、FPDには、TFT素子等の耐熱性が問題となる構成要素が存在するため、硬化性樹脂として光硬化性樹脂を使用し、紫外線照射により樹脂を硬化させる。このため、ディスプレイ用基板ガラスは紫外線透過性を有することが求められており、特許文献1および2では、300nmにおける紫外線透過率が厚み0.5mmで50~85%となる無アルカリガラス基板が提案されている。
また、表示装置用部材を基板ガラスの表面に形成した後にエッチング処理等をして基板ガラスを薄くすると、表示装置用部材を基板ガラスの表面に形成する過程において基板のガラス表面に形成された微細な傷が顕在化する問題、すなわちエッジピットの発生という問題が生じる。
薄板基板ガラスと支持基板ガラスとを分離する方法としては、特許文献5に記載の方法のように、基板表面にレーザビームをスキャン照射する方法も適用できる。
この技術に対応するため、ディスプレイ用基板ガラスは、光線透過率の面内分布が小さいことが求められる。ディスプレイ用基板ガラスは、光線透過率の面内分布が大きいと、ディスプレイ用基板ガラスの部位によって、レーザビームの照射条件を変更することが必要となり、表示装置の歩留まりが低下する。
SiO2 50~73、
Al2O3 10.5~24、
B2O3 0~5、
MgO 0~10、
CaO 0~14.5、
SrO 0~24、
BaO 0~20、
ZrO2 0~5、
SnO2 0.01~1、
Fe2O3 0.005~0.1、
含有し
MgO+CaO+SrO+BaO が8~29.5である、
無アルカリガラス基板を提供する。
歪点が680℃以上、ヤング率が78GPa以上、波長300nmにおける紫外線透過率が厚み0.5mm換算で40~85%、酸化物基準の質量百分率表示で
SiO2 50~73、
Al2O3 10.5~24、
B2O3 0~5、
MgO 0~10、
CaO 0~14.5、
SrO 0~24、
BaO 0~20、
ZrO2 0~5、
SnO2 0.01~1、
Fe2O3 0.005~0.1、
含有しMgO+CaO+SrO+BaO が8~29.5である無アルカリガラスになるようにガラス原料を調合する工程と、
レートクール法で求められるガラス転移点付近の平均冷却速度が400℃/min以下であり、該平均冷却速度の面内分布が40℃/min以下であり、G6サイズの基板での波長300nmにおける紫外線透過率の面内分布が厚み0.5mm換算で1%以下となるように、成形時および徐冷時の温度条件を管理する工程と、
を含むことを特徴とする無アルカリガラス基板の製造方法を提供する。
本発明の無アルカリガラス基板の製造方法は、Fe含有量の面内分布が、Fe2O3換算の質量百分率表示で、0.001~0.003%でであることが好ましい。
本発明の無アルカリガラス基板(以下、「本発明のガラス基板」ともいう。)は、SiO2、Al2O3、SnO2およびFe2O3を必須成分として含有し、B2O3、MgO、CaO、SrO、BaOおよびZrO2を任意成分として含有する。
なお、Sn含有量は、ガラス原料における投入量ではなく、ガラス融液中に残存する量である。この点については、後述するFe含有量、F含有量、およびCl含有量についても同様である。
ガラス中にSn4+を含有する場合、ガラスを冷却する過程において、ガラス中のSnが酸化されFeが還元されることにより、ガラスの紫外線透過率は上昇する。
しかし多すぎるとガラスの着色や、紫外線透過率低下の問題があるので0.1%以下とする。0.07%以下が好ましく、0.055%以下がより好ましく、0.045%以下が特に好ましい。
Fは、含有量が0.001質量%未満だと、ガラス原料の溶解時における清澄作用が低下するおそれがある。好ましくは0.005質量%以上、より好ましくは0.01質量%以上、さらに好ましくは0.02質量%以上、特に好ましくは0.03質量%以上である。
F含有量が0.15質量%超だと、製造されるガラスの歪点が低くなる。好ましくは0.12質量%以下、さらに好ましくは0.1質量%以下である。
Cl含有量が0.001質量%未満だと、ガラス原料の溶解時における清澄作用が低下する。好ましくは0.005質量%以上、さらに好ましくは0.01質量%以上である。Cl含有量が0.35質量%超だと、ガラス中の水分濃度が低下し、清澄性が悪化する。好ましくは0.25質量%以下、さらに好ましくは0.2質量%以下である。
なお、ハロゲン元素の含有量は総量で0.001質量%以上であることが好ましい。含有量が0.001質量%未満だと、ガラス原料の溶解時における清澄作用が低下する。好ましくは0.01質量%以上、さらに好ましくは0.03質量%以上である。
また、ハロゲン元素の含有量は総量で1質量%以下であることが好ましい。含有量が1質量%超だと、歪点が低下しすぎるおそれれがある。好ましくは0.7質量%以下、さらに好ましくは0.5質量%以下である。
FPDの製造時、該FPDを構成する2枚の基板ガラスの貼り合わせに用いられる紫外線は、主として波長300nm付近の波長の紫外線である。2枚の基板ガラスが、波長300nmにおける紫外線透過率が低いと、紫外線硬化樹脂によって2枚の基板ガラスを貼り合わせるのに長時間を要する。すなわち紫外線硬化樹脂に対して紫外線を照射しても、基板ガラスに吸収されやすいため、樹脂を硬化させるのに時間がかかる。
本発明の無アルカリガラス基板は、波長300nmにおける紫外線透過率が、厚み0.5mm換算で40%以上であるため、FPDを構成する基板ガラスとして使用した場合に、紫外線硬化樹脂の硬化に長時間を要することがない。
ガラス基板における紫外線透過率は、基板の厚みによっても異なる。本発明では、基板の厚みによる影響を排除するため、厚み0.5mm換算の紫外線透過率に規格化した。
300nmにおける紫外線透過率が、好ましくは45%以上、より好ましくは50%以上である。
ただし、紫外線透過率が高くなりすぎると、紫外線を照射した際に、酸化物半導体でのVth特性シフトなど、TFT素子の特性が変化し、FPDの構成要素の特性が損なわれるおそれがある。
本発明の無アルカリガラス基板は、波長300nmにおける紫外線透過率が、厚み0.5mm換算で85%以下であるため、耐熱性が問題となるFPDの構成要素が、紫外線照射時に破損するおそれがない。好ましくは80%以下、より好ましくは75%以下である。
本発明の無アルカリガラス基板は、波長300nmにおける紫外線透過率の面内分布が、G7サイズの基板(典型的には、1870mm×2200mm)で、厚み0.5mm換算で1%以下、さらには0.5%以下であることがより好ましく、G8サイズの基板(典型的には、2460mm×2160mm)で、厚み0.5mm換算で1%以下、さらには0.5%以下であることがさらに好ましい。
なお、本明細書では、透過率に限らず、面内分布とは面内におけるその値の最大値と最小値の差を意味する。
本願発明者が無アルカリガラス基板における紫外線透過率の面内分布について鋭意検討した結果、以下の知見が得られた。
(1)無アルカリガラス基板がFeを含有する場合、その紫外線透過率は、無アルカリガラス基板に含まれる全鉄のうちの2価の鉄の割合(いわゆるRedox)によって変化する。したがって、無アルカリガラス基板にRedoxの面内分布が存在する場合、紫外線透過率の面内分布が生じる。
なお、無アルカリガラス基板中のFe含有量に面内分布が存在することによっても、紫外線透過率の面内分布が生じるおそれがある。このため、Fe含有量の面内分布も小さいことが好ましい。但し、Feの濃度の面内分布を極端に小さくすることは、製造上困難である。本発明では、Fe含有量(Fe2O3換算)の面内分布が、0.001~0.003%であることが好ましい。Fe含有量(Fe2O3換算)の面内分布0.001%未満を達成するには、冷却速度を後述する条件よりもさらに下げるか、ヒータ密度をかなり高くする必要があり、製造上困難である。一方、0.003%超だと、紫外線透過率の面内分布が発生するおそれがある。
(2)無アルカリガラス基板のRedoxは、ガラス製造時における溶解温度や冷却速度によって変化し、無アルカリガラス基板のRedoxの面内分布は、ガラス製造時における冷却速度に主として影響される。
(3)ガラスの冷却速度は、その製造工程によって一様ではなく、温度域によって冷却速度が異なる。しかしながら、一定冷却速度で高温から冷却(レートクール)して得られたガラスの仮想温度と冷却速度は線形の関係が成り立つことから、仮想温度をレートクール時の冷却速度として代わりに定義することができる。本明細書において、これをレートクール法で求められるガラス転移点付近の平均冷却速度とする。なお、レートクール法で求められるガラス転移点付近の平均冷却速度は、より具体的には以下のような手順で求められる。
ガラスをガラス転移点より100℃程度高い温度にて10分間保持後、一定冷却速度にて冷却する実験を、0.1℃/分、1℃/分、10℃/分、100℃/分、1000℃/分にて実施し、すべてのガラスの屈折率を測定することで、屈折率と冷却速度の関係を検量線として得ることができる。その後、実際のサンプルの屈折率を測定し、検量線から冷却速度を求める。
以下、本明細書において、『平均冷却速度』と記載した場合、レートクール法で求められるガラス転移点付近の平均冷却速度を意図する。
(4)平均冷却速度を所定の数値以下とし、かつ、その面内分布を小さくすれば、無アルカリガラス基板のRedoxの面内分布を少なくすることができ、紫外線透過率の面内分布を小さくできる。
無アルカリガラス基板の平均冷却速度が400℃/min以下であれば、無アルカリガラス基板の紫外線透過率が上述した範囲となり、紫外線透過率の面内分布が小さくなる。
無アルカリガラス基板の平均冷却速度の面内分布が40℃/min以下(±20゜C/min以下)であれば、無アルカリガラス基板の紫外線透過率の面内分布が十分小さくなり、G6サイズの基板で厚み0.5mm換算で1%以下となる。
本発明では、平均冷却速度が400℃/min以下、該平均冷却速度の面内分布が40℃/min以下となり、G6サイズの基板での波長300nmにおける紫外線透過率の面内分布が厚み0.5mm換算で1%以下となるように、成形時、および、徐冷時の温度条件を管理する必要がある。ここで、平均冷却速度の面内分布を小さくするためには、成形時、および、徐冷時において、側面側からもガラスリボンを加熱することが好ましい。
なお、平均面内透過率および透過率の面内分布をG6サイズの板から50mm×50mmの複数のサンプルに切り出し、各サンプルの透過率ならびに屈折率を測定することにより求めることができる。ガラスの透過率は日立紫外可視近赤外分光光度計4U-4100にて測定した。屈折率測定には島津デバイス製造製、精密屈折率計KPR-2000を使用した。
本出願は、2013年4月23日付出願の日本特許出願2013-090141に基づくものであり、その内容はここに参照として取り込まれる。
Claims (6)
- 歪点が680℃以上であり、ヤング率が78GPa以上であり、波長300nmにおける紫外線透過率が、厚み0.5mm換算で40~85%であり、G6サイズの基板での、波長300nmにおける紫外線透過率の面内分布が厚み0.5mm換算で1%以下であり、レートクール法で求められるガラス転移点付近の平均冷却速度が400℃/min以下であり、該平均冷却速度の面内分布が40℃/min以下であり、酸化物基準の質量百分率表示で
SiO2 50~73、
Al2O3 10.5~24、
B2O3 0~5、
MgO 0~10、
CaO 0~14.5、
SrO 0~24、
BaO 0~20、
ZrO2 0~5、
SnO2 0.01~1、
Fe2O3 0.005~0.1、
含有し
MgO+CaO+SrO+BaO が8~29.5である、
無アルカリガラス基板。 - ハロゲン元素の総量が、酸化物基準の質量百分率表示で、0.001~1%である、請求項1に記載の無アルカリガラス基板。
- Fe含有量の面内分布が、Fe2O3換算の質量百分率表示で、0.001~0.003%である、請求項1または2に記載の無アルカリガラス基板。
- SiO2-Al2O3-RO(ROはMgO、CaO、BaO及びSrOの1種以上)系の組成を有する無アルカリガラスを製造する方法であって、
歪点が680℃以上、ヤング率が78GPa以上、波長300nmにおける紫外線透過率が厚み0.5mm換算で40~85%、酸化物基準の質量百分率表示で
SiO2 50~73、
Al2O3 10.5~24、
B2O3 0~5、
MgO 0~10、
CaO 0~14.5、
SrO 0~24、
BaO 0~20、
ZrO2 0~5、
SnO2 0.01~1、
Fe2O3 0.005~0.1、
含有しMgO+CaO+SrO+BaO が8~29.5である無アルカリガラスになるようにガラス原料を調合する工程と、
レートクール法で求められるガラス転移点付近の平均冷却速度が400℃/min以下であり、該平均冷却速度の面内分布が40℃/min以下であり、G6サイズの基板での波長300nmにおける紫外線透過率の面内分布が厚み0.5mm換算で1%以下となるように、成形時および徐冷時の温度条件を管理する工程と、
を含むことを特徴とする無アルカリガラス基板の製造方法。 - ハロゲン元素の総量が、酸化物基準の質量百分率表示で、0.001~1%である、請求項4に記載の無アルカリガラス基板の製造方法。
- Fe含有量の面内分布が、Fe2O3換算の質量百分率表示で、0.001~0.003%である、請求項4または5に記載の無アルカリガラス基板の製造方法。
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Also Published As
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JPWO2014175215A1 (ja) | 2017-02-23 |
TW201500315A (zh) | 2015-01-01 |
US20170260085A1 (en) | 2017-09-14 |
KR20160002797A (ko) | 2016-01-08 |
TWI576325B (zh) | 2017-04-01 |
KR101728976B1 (ko) | 2017-04-20 |
CN105121370A (zh) | 2015-12-02 |
CN106396370A (zh) | 2017-02-15 |
US20160039710A1 (en) | 2016-02-11 |
CN106396370B (zh) | 2018-11-09 |
US9963379B2 (en) | 2018-05-08 |
JP5991429B2 (ja) | 2016-09-14 |
US9708211B2 (en) | 2017-07-18 |
CN105121370B (zh) | 2017-08-08 |
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