WO2014141570A1 - グリーンシート製造用剥離フィルムおよびグリーンシート製造用剥離フィルムの製造方法 - Google Patents
グリーンシート製造用剥離フィルムおよびグリーンシート製造用剥離フィルムの製造方法 Download PDFInfo
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- WO2014141570A1 WO2014141570A1 PCT/JP2013/085198 JP2013085198W WO2014141570A1 WO 2014141570 A1 WO2014141570 A1 WO 2014141570A1 JP 2013085198 W JP2013085198 W JP 2013085198W WO 2014141570 A1 WO2014141570 A1 WO 2014141570A1
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- WIPO (PCT)
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- green sheet
- layer
- release agent
- smoothing layer
- release film
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/16—Layered products comprising a layer of synthetic resin specially treated, e.g. irradiated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/38—Layered products comprising a layer of synthetic resin comprising epoxy resins
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/538—Roughness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/748—Releasability
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/16—Capacitors
Definitions
- the present invention relates to a release film for producing a green sheet and a method for producing a release film for producing a green sheet.
- a release film for producing a green sheet is used to form a green sheet.
- the release film for producing green sheets is generally composed of a base material and a release agent layer.
- a green sheet is produced by applying a ceramic slurry in which ceramic particles and a binder resin are dispersed and dissolved in an organic solvent on such a release film for producing a green sheet, and drying the slurry. Moreover, the manufactured green sheet peels from the peeling film for green sheet manufacture, and is used for manufacture of a ceramic capacitor.
- the ceramic capacitor manufactured by laminating such green sheets has a problem that a malfunction due to a short circuit occurs.
- the surface (cast surface) of the release film for producing a green sheet is required to have very high smoothness.
- thermosetting resin liquid is applied to one surface of a substrate sheet having fine irregularities on the surface, and then heated and cured.
- a release film in which a thermosetting resin layer formed by the above method is provided and a release agent is applied on the thermosetting resin layer to form a release agent layer (see, for example, Patent Document 1).
- An object of the present invention is to provide a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. There is to do.
- Another object of the present invention is to provide a production method for producing a release film for producing a green sheet, which can prevent pinholes and partial thickness variations on the surface of the green sheet. is there.
- a release film for producing a green sheet A substrate having a first surface and a second surface; A smoothing layer provided on the first surface side of the substrate; A release agent layer provided on the surface side opposite to the base material of the smoothing layer,
- the smoothing layer is formed by heating and curing a composition for forming a smoothing layer containing a thermosetting compound having a mass average molecular weight of 950 or less, An arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and a maximum protrusion height Rp 1 of the outer surface of the release agent layer is 50 nm or less. Release film.
- thermosetting compound is a bisphenol type epoxy compound.
- the smoothing layer the have a base opposite to the surface, wherein the surface arithmetic average roughness opposite the base of the smoothing layer Ra 4 is a 8nm or less, and wherein the smoothing Green sheet production for release film according to any one of the maximum projection height Rp 4 said substrate and opposite said surface of the layer is (1) to at 50nm or less (4).
- a second arithmetic mean roughness Ra 3 of the surface is 10 ⁇ 200 nm, and, to the second maximum projection height Rp 3 surface is above (1) to a 80 ⁇ 1000 nm (5)
- a method for producing a release film for producing a green sheet A method for producing a release film for producing a green sheet.
- a release film for producing a green sheet that can prevent the occurrence of pinholes and partial thickness variations on the surface of the green sheet and can produce a highly reliable green sheet. can do.
- a release film for producing a green sheet having excellent outer surface smoothness is provided. be able to. If this release film for producing a green sheet is used, pinholes, partial thickness variations and the like can be prevented from occurring on the surface of the green sheet.
- the peeling film for green sheet manufacture which can manufacture the green sheet excellent in the smoothness of the surface can be manufactured easily and reliably.
- FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
- the release film for producing a green sheet of the present invention is used for producing a green sheet.
- the manufactured green sheet is used for manufacture of a ceramic capacitor etc., for example.
- FIG. 1 is a cross-sectional view of a release film for producing a green sheet of the present invention.
- the upper side in FIG. 1 is referred to as “upper” and the lower side is referred to as “lower”.
- the release film 1 for producing a green sheet includes a base material 11 having a first surface 111 and a second surface 112, and a smooth surface provided on the first surface 111 of the base material 11. And a release agent layer 13 provided on the side of the surface 121 opposite to the base material of the smoothing layer 12 (hereinafter also referred to as “third surface 121”). That is, as shown in FIG. 1, the release film 1 for producing a green sheet has a three-layer structure in which a base material 11, a smoothing layer 12, and a release agent layer 13 are laminated so as to be joined to each other in this order. It is.
- the green sheet when manufacturing a green sheet using the peeling film 1 for green sheet manufacture, the green sheet applies the ceramic slurry which melt
- the release film 1 for producing a green sheet has a smoothing layer 12 between the substrate 11 and the release agent layer 13. And in the peeling film 1 for green sheet manufacture of this invention, the smoothing layer 12 heats and cures the composition for smoothing layer formation containing the thermosetting compound whose predetermined
- the arithmetic average roughness Ra 1 of the outer surface 131 of the release agent layer 13 is 8 nm or less, and the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is 50 nm or less. It has the characteristics.
- the release film 1 for producing a green sheet which is excellent in smoothness of the outer surface 131 of the release agent layer 13 and excellent in peelability. If a green sheet is manufactured using this release film 1 for manufacturing a green sheet, pinholes and partial thickness variations are prevented from occurring on the surface of the green sheet, and a highly reliable green sheet is manufactured. be able to. As a result, when a capacitor is produced by laminating green sheets, it is possible to prevent a problem due to a short circuit from occurring.
- the film used as a substrate has various surface roughnesses. Inexpensive films tend to have relatively rough surface roughness. Even when a release film for producing a green sheet is formed using a substrate having such a relatively rough surface, a smoothing layer having the above-described characteristics can be provided on the surface of the substrate. The unevenness on the surface of the base material can be accurately embedded (cancelled). As a result, the surface of the smoothing layer opposite to the substrate can be smoothed. Thereby, it can prevent that the unevenness
- each layer which comprises the peeling film 1 for green sheet manufacture which concerns on this embodiment is demonstrated one by one.
- the base material 11 has a function of imparting physical strength such as rigidity and flexibility to the release film 1 for producing a green sheet (hereinafter sometimes simply referred to as “release film 1”).
- the base material 11 has a first surface 111 and a second surface 112.
- the material constituting the substrate 11 is not particularly limited, and examples thereof include polyester resins such as polybutylene terephthalate resin, polyethylene terephthalate resin and polyethylene naphthalate resin, polyolefin resins such as polypropylene resin and polymethylpentene resin, and polycarbonate.
- a film made of plastic may be mentioned.
- the substrate 11 may be a single layer film or a multilayer film of two or more layers of the same type or different types. Among these, a polyester film is preferable, a polyethylene terephthalate film is more preferable, and a biaxially stretched polyethylene terephthalate film is more preferable.
- the polyester film is less prone to dust and the like during its processing and use. Therefore, for example, when a green sheet is manufactured using the release film 1 manufactured using a polyester resin, it is possible to effectively prevent a ceramic slurry coating failure due to dust or the like. As a result, a green sheet with fewer pinholes and the like can be manufactured.
- the base material 11 may contain a filler or the like in addition to the above materials.
- the filler include silica, titanium oxide, calcium carbonate, kaolin, aluminum oxide, and the like, and one or more of these can be used in combination.
- the base material 11 preferably has an arithmetic average roughness Ra 2 of the first surface 111 of 10 to 200 nm and a maximum protrusion height Rp 2 of 80 to 1000 nm.
- the arithmetic average roughness Ra 2 of the first surface 111 is more preferably 15 to 100 nm, and the arithmetic average roughness Ra 2 of the first surface 111 is further preferably 20 to 50 nm. Further, more preferably the maximum projection height Rp 2 of the first surface 111 is 90 ⁇ 800 nm, the maximum projection height Rp 2 of the first surface 111 is more preferably in the range of 100 ⁇ 600 nm.
- the smoothing layer 12 described later has a relatively thin film thickness
- the unevenness of the surface 111 can be embedded more suitably, and the surface 121 opposite to the substrate 11 of the smoothing layer 12 can be made smoother. As a result, it is possible to more suitably prevent the unevenness of the first surface 111 of the substrate 11 from affecting the outer surface 131 of the release agent layer 13 formed on the smoothing layer 12.
- the base 11 having the arithmetic average roughness Ra 2 of the first surface 111 and the maximum protrusion height Rp 2 within the above range is relatively inexpensive and easily available.
- the arithmetic average roughness Ra 2 of the first surface 111 exceeds the upper limit value, it is difficult to sufficiently fill the unevenness of the first surface 111 depending on the constituent material of the smoothing layer forming composition. Therefore, it may be necessary to make the release agent layer 13 relatively thick.
- the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface 111 of the substrate 11 are determined according to JIS B0601-1994 surface roughness measuring machine SV3000S4 (Mitutoyo Co., Ltd.). It is a value obtained by measurement by a stylus type).
- the “arithmetic average roughness and maximum protrusion height” refer to values obtained by measurement as described above.
- the base material 11 preferably has an arithmetic average roughness Ra 3 of the second surface 112 of 10 to 200 nm and a maximum protrusion height Rp 3 of 80 to 1000 nm.
- the arithmetic mean roughness Ra 3 of the second surface 112 is more preferably from 15 ⁇ 100 nm, the arithmetic mean roughness Ra 3 of the second surface 112 is even more preferably 20 ⁇ 50 nm.
- the maximum projection height Rp 3 of the second surface 112 is 90 ⁇ 800 nm, the maximum projection height Rp 3 of the second surface 112 is more preferably in the range of 100 ⁇ 600 nm.
- the release film 1 When the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 are within the above ranges, it is preferable that winding deviation or the like occurs when the release film 1 is wound into a roll shape. Can be prevented. Moreover, when the release film 1 is wound up and stored in a roll shape, blocking can be prevented from occurring. Specifically, the release film 1 can be wound and stored in a roll shape around a core material such as paper, plastic, or metal as necessary. At this time, when the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 are within the above ranges, air release is good when the release film 1 is wound into a roll shape. Thus, winding deviation can be effectively suppressed.
- the release film 1 when winding the release film 1, it is not necessary to increase the winding tension, and it is possible to suppress the deformation of the winding core portion caused by the winding tension.
- the arithmetic average roughness Ra 3 of the second surface 112 and the maximum protrusion height Rp 3 in the roll-shaped release film 1 are within the above ranges, the release agent layer 13 and the second base material 11 The occurrence of blocking caused by the close contact with the surface 112 can be more effectively prevented. Therefore, the roll-shaped release film 1 can be easily fed out.
- the average film thickness of the substrate 11 is not particularly limited, but is preferably 10 to 300 ⁇ m, and more preferably 15 to 200 ⁇ m. Thereby, while making the softness
- the smoothing layer 12 has a function of reducing the influence of the unevenness of the first surface 111 of the substrate 11 on the outer surface 131 of the release agent layer 13.
- the smoothing layer 12 is provided on the first surface 111 of the substrate 11.
- the smoothing layer 12 is composed of a smoothing layer forming composition containing a predetermined thermosetting compound. Moreover, the smoothing layer 12 is formed by heating and hardening the composition for smoothing layer formation.
- Such a composition for forming a smoothing layer contains a thermosetting compound having a mass average molecular weight of 950 or less, as described above.
- a thermosetting compound having a mass average molecular weight of 300 to 700 is preferably included.
- coating to the 1st surface 111 of the base material 11 and heating can be made moderate, and the composition for smoothing layer formation has moderate fluidity
- the smoothing layer 12 is formed on the first surface 111 side of the base material 11 so that the unevenness of the first surface 111 of the base material 11 is suitably embedded. be able to.
- the unevenness of the surface of the first surface 111 of the substrate 11 is relatively large, the unevenness of the first surface 111 is reduced by the action and effect of the smoothing layer forming composition as described above. Since it can be embedded suitably, the release film 1 excellent in the smoothness of the outer surface 131 of the release agent layer 13 can be obtained.
- the mass average molecular weight of the thermosetting compound exceeds the upper limit, the fluidity of the composition for forming a smoothing layer is lowered, and the smoothing layer 12 is the first surface of the substrate 11. There is a risk of forming along the irregularities 111. As a result, the third surface 121 of the smoothing layer 12 may have a shape that follows the unevenness of the first surface of the substrate 11.
- thermosetting compound having a mass average molecular weight within the above range examples include bisphenol type epoxy compounds such as bisphenol A type epoxy compounds, bisphenol A type epoxy ester compounds, bisphenol F type epoxy compounds, and bisphenol F type epoxy ester compounds.
- bisphenol type epoxy compounds such as bisphenol A type epoxy compounds, bisphenol A type epoxy ester compounds, bisphenol F type epoxy compounds, and bisphenol F type epoxy ester compounds.
- amino compounds such as compounds, melamine compounds, and urea compounds
- isocyanate compounds, oxazoline compounds, urethane compounds, acrylic compounds, phenol compounds, alkyd compounds, polyester compounds, and the like can be given.
- a bisphenol type epoxy compound is particularly preferable, and a bisphenol A type epoxy ester compound is more preferable.
- composition for forming a smoothing layer contains a thermosetting compound having a mass average molecular weight within the above range, but may contain a solvent as necessary. Thereby, the viscosity of the composition for smoothing layer formation at the time of apply
- the solvent examples include organic solvents such as aromatic hydrocarbons such as toluene and xylene, fatty acid esters such as ethyl acetate and butyl acetate, ketones such as methyl ethyl ketone and methyl isobutyl ketone, and aliphatic hydrocarbons such as hexane and heptane. 1 type or 2 types or more of them can be used in combination. Thereby, it becomes easy to make appropriate the viscosity before apply
- organic solvents such as aromatic hydrocarbons such as toluene and xylene, fatty acid esters such as ethyl acetate and butyl acetate, ketones such as methyl ethyl ketone and methyl isobutyl ketone, and aliphatic hydrocarbons such as hexane and heptane. 1 type or 2 types or
- the smoothing layer forming composition may contain other components in addition to the components as described above.
- other components include a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent.
- the content of the other components in the smoothing layer forming composition is preferably 0.1 to 10% by mass.
- the content of the thermosetting compound in the composition for forming a smoothing layer containing a solvent is not particularly limited, but is preferably 0.5 to 60% by mass, and more preferably 1 to 45% by mass. Thereby, it becomes easy to make the viscosity of the composition for smoothing layer formation suitable.
- the content of the thermosetting compound in the smoothing layer forming composition is not particularly limited, but is preferably 90% by mass or more, and more preferably 95% by mass or more. Thereby, the sclerosis
- arithmetic mean roughness of the third surface 121 of the smoothing layer 12 Ra 4 is a 8nm or less, and preferably has a maximum projection height Rp 4 is 50nm or less. Particularly, preferred arithmetic average roughness Ra 4 of the third surface 121 that is 6nm or less. In addition, it is preferable that the maximum protrusion height Rp 4 of the third surface 121 is 40 nm or less.
- the influence of the unevenness of the surface of the base material 11 on the outer surface 131 of the release agent layer 13 is more preferably applied. Can be prevented.
- the adhesiveness to the release agent layer 13 may be lowered depending on the constituent material of the smoothing layer 12 and the like. is there.
- the arithmetic average roughness Ra 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
- the maximum protrusion height Rp 4 of the third surface 121 is less than the lower limit value, in order to improve the adhesion with the release agent layer 13, on the third surface 121 of the smoothing layer 12, In some cases, it is necessary to perform a treatment for improving the adhesion. On the other hand, if the maximum protrusion height Rp 4 of the third surface 121 exceeds the upper limit, it may be necessary to provide a new smoothing layer between the release agent layer 13 and the smoothing layer 12. .
- the average film thickness of the smoothing layer 12 is not particularly limited, but is preferably 0.2 to 10 ⁇ m, and more preferably 0.3 to 5 ⁇ m. Thereby, the unevenness
- the average film thickness of the smoothing layer 12 is less than the lower limit value, the unevenness of the first surface 111 of the substrate 11 may be sufficient depending on the components constituting the smoothing layer forming composition. Therefore, it may be necessary to use the first surface 111 having a relatively small surface roughness.
- the average film thickness of the smoothing layer 12 exceeds the above upper limit, depending on the components constituting the composition for forming the smoothing layer, curling of the release film 1 is likely to occur due to curing shrinkage of the smoothing layer 12. Therefore, the handleability of the release film 1 may be reduced.
- the release agent layer 13 has a function of imparting peelability to the release film 1.
- the release agent layer 13 is provided on the third surface 121 side of the smoothing layer 12.
- the release agent layer 13 is a layer formed by applying a release agent layer forming composition to the third surface 121 of the smoothing layer 12, and drying and curing it.
- a composition for forming a release agent layer contains a release agent.
- Examples of the release agent include alkyd compounds, acrylic compounds, silicone compounds, long-chain alkyl group-containing compounds, fluorine compounds, and the like, and one or more of these can be used in combination. Among these, it is preferable to use an alkyd compound, an acrylic compound, a silicone compound, or a long-chain alkyl group-containing compound. As a result, it is possible to obtain the release agent layer 13 that has an appropriate curability and is particularly excellent in the peelability to the green sheet.
- alkyd compounds include modified products such as long-chain alkyl-modified alkyd compounds and silicone-modified alkyd compounds.
- a crosslinking agent or a catalyst may be further added to the release agent layer forming composition.
- the release agent layer 13 having an alkyd compound having a cross-linked structure can be obtained by a method of heat-curing such a release agent layer forming composition.
- the acrylic compound modified products such as a long-chain alkyl-modified acrylic compound and a silicone-modified acrylic compound can be used.
- the release agent layer forming composition contains an acrylic compound, a crosslinking agent or a catalyst may be further added to the release agent layer forming composition.
- the release agent layer 13 having an acrylic compound having a crosslinked structure can be obtained by a method of heat-curing such a release agent layer forming composition.
- a silicone compound having dimethylpolysiloxane as a basic skeleton can be used as a specific example.
- the silicone compound include an addition reaction type, a condensation reaction type, an ultraviolet curable type, and an electron beam curable type.
- the addition reaction type silicone compound has high reactivity and excellent productivity. Compared with the condensation reaction type silicone compound, the addition reaction type silicone compound has advantages such as little change in peel force after production and no cure shrinkage. It is preferable to use it.
- addition reaction type silicone compound examples include two alkenyl groups having 2 to 10 carbon atoms such as vinyl group, allyl group, propenyl group, and hexenyl group at the terminal and / or side chain of the molecule of the compound.
- the organopolysiloxane provided above is mentioned.
- crosslinking agent examples include, for example, organopolysiloxane having hydrogen atoms bonded to at least two silicon atoms in one molecule, specifically, a dimethylhydrogensiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer. And trimethylsiloxy group end-capped dimethylsiloxane-methylhydrogensiloxane copolymer, trimethylsiloxy group end-capped methylhydrogenpolysiloxane, poly (hydrogensilsesquioxane), and the like.
- the catalyst examples include finely divided platinum, finely divided platinum adsorbed on a carbon powder carrier, chloroplatinic acid, alcohol-modified chloroplatinic acid, olefin complexes of chloroplatinic acid, white metal compounds such as palladium and rhodium, etc. Is mentioned.
- Examples of the long-chain alkyl group-containing compound include a polyvinyl carbamate obtained by reacting a polyvinyl alcohol polymer with a long-chain alkyl isocyanate having 8 to 30 carbon atoms, or polyethyleneimine and a long chain alkyl group having 8 to 30 carbon atoms.
- An alkyl urea derivative obtained by reacting a chain alkyl isocyanate is used.
- fluorine compound for example, a fluorine silicone compound, a fluorine boron compound, or the like can be used.
- the release agent layer forming composition may contain a dispersion medium and a solvent in addition to the release agent described above.
- the viscosity of the composition for forming a release agent layer before being applied to the third surface 121 of the smoothing layer 12 and dried can be made moderate.
- dispersion medium or solvent examples include aromatic solvents such as toluene, fatty acid esters such as ethyl acetate, ketones such as methyl ethyl ketone, and organic solvents such as aliphatic hydrocarbons such as hexane and heptane. Species or a combination of two or more can be used.
- the release agent layer forming composition may contain other components.
- other components include a catalyst, a dye, a dispersant, an antistatic agent, and a curing agent.
- the content of the other components in the release agent layer forming composition is preferably 0.1 to 10% by mass.
- the outer surface 131 of the release agent layer 13 has an arithmetic average roughness Ra 1 of 8 nm or less, and a maximum protrusion height Rp 1 of 50 nm or less.
- the arithmetic mean roughness Ra 1 of the outer surface 131 of the release agent layer 13 is preferably 6 nm or less.
- the maximum protrusion height Rp 1 of the outer surface 131 of the release agent layer 13 is preferably 40 nm or less.
- the release agent layer 13 preferably has an average film thickness of 0.01 to 3 ⁇ m, and more preferably 0.03 to 1 ⁇ m. If the thickness of the release agent layer 13 is less than 0.01 ⁇ m, the function as the release agent layer may not be sufficiently exhibited depending on the material constituting the release agent layer 13 or the like. On the other hand, when the thickness of the release agent layer 13 exceeds 3 ⁇ m, when the release film 1 is wound into a roll, blocking is likely to occur. There may be a problem that the charging property at the time of unwinding increases.
- a base material preparing step for preparing the base material 11 and a smoothing layer forming composition containing a predetermined thermosetting compound are applied to the first surface 111 of the base material 11.
- a release agent layer forming step of forming the release agent layer 13 on the surface 121 side opposite to the substrate 11 is provided.
- the base material 11 is prepared.
- the base material 11 having the configuration described above can be used.
- the first surface 111 of the substrate 11 can be subjected to a surface treatment such as an oxidation method or a primer treatment.
- a surface treatment such as an oxidation method or a primer treatment.
- FIG. 11 What is necessary is just to select suitably as surface treatment by an oxidation method etc. according to the kind etc. of the base material 11.
- FIG. For example, corona discharge treatment, plasma discharge treatment, chromium oxidation treatment (wet), flame treatment, hot air treatment, ozone treatment, ultraviolet irradiation treatment and the like can be mentioned.
- a corona discharge treatment because it has excellent adhesion to the smoothing layer 12 and the treatment operation is simple.
- a smoothing layer forming composition is prepared.
- the thermosetting compound as described above may be used alone.
- a composition for forming a smoothing layer in which a solvent and other components as described above are mixed as necessary may be used.
- a smoothing layer forming composition that forms a liquid is applied on the first surface 111 of the substrate 11. Thereby, a coating layer is obtained.
- the smoothing layer-forming composition has an appropriate fluidity, the smoothing layer-forming composition is applied onto the first surface 111 of the substrate 11 and dried. Thereby, the unevenness
- Examples of the method for applying the smoothing layer forming composition include a gravure coating method, a bar coating method, a spray coating method, a spin coating method, an air knife coating method, a roll coating method, a blade coating method, a gate roll coating method, Examples include a die coating method.
- the gravure coating method and the bar coating method are more preferable, and the bar coating method is more preferable. Thereby, the coating layer of the target thickness can be formed easily.
- the smoothing layer 12 is formed by heating and hardening the coating layer obtained by the coating layer formation process.
- the coating layer in which the unevenness of the first surface 111 of the substrate 11 is appropriately embedded in the coating layer forming step is cured while maintaining the smoothness of the outer surface.
- the smoothing layer 12 having a sufficiently smooth third surface 121 can be obtained.
- corrugation of the 1st surface 111 of the base material 11 with respect to the outer surface 131 of the releasing agent layer 13 can be prevented more suitably. Therefore, the smoothness of the outer surface 131 of the release agent layer 13 can be made excellent in the release agent layer forming step described later.
- the heating conditions are not particularly limited.
- the heating temperature is preferably 80 to 150 ° C., and the heating time is preferably 5 seconds to 1 minute. Thereby, unintentional alteration of the smoothing layer 12 can be prevented, and the smoothing layer 12 can be formed particularly efficiently. As a result, productivity of the finally obtained release film 1 can be improved. Further, when the heating temperature is within the above range, particularly when the composition for forming a smoothing layer contains a solvent or the like, warping or cracking of the smoothing layer 12 accompanied by evaporation of the solvent or the like during heating is particularly prevented. be able to.
- the release agent layer 13 is formed on the surface 121 side of the smoothing layer 12 opposite to the substrate 11.
- the release agent layer forming composition constituting the release agent layer 13 a composition in which the above-described materials are mixed is prepared.
- the release agent layer 13 is obtained by drying and curing the composition.
- the drying method is not particularly limited, and examples thereof include a drying method using a hot air drying furnace.
- drying conditions are not particularly limited.
- the drying temperature is preferably 80 to 150 ° C.
- the drying time is preferably 5 seconds to 1 minute.
- the reliable peeling film 1 which is excellent in smoothness and excellent in peelability can be manufactured easily and reliably.
- a green sheet is manufactured using such a release film 1, it is possible to prevent a pinhole or the like from being generated on the surface of the green sheet.
- a ceramic powder-dispersed slurry is applied to the surface of the release agent layer of the release film and dried to form a green sheet.
- a method of forming an electrode on a ceramic sheet obtained by laminating the peeled green sheets to obtain a laminate and firing the laminate is exemplified. Thereby, a ceramic capacitor can be obtained.
- a ceramic capacitor is formed with a green sheet formed using the release film 1, a highly reliable ceramic capacitor in which the occurrence of problems due to a short circuit is prevented can be obtained.
- the base material has been described as having a single-layer structure, but the present invention is not limited to this, and the base material may have a multilayer structure of two or more layers of the same type or different types.
- the smoothing layer and the release agent layer are similarly described as having a single layer structure, but the present invention is not limited to this, and the smoothing layer and the release agent layer are each of the same or different two or more layers. It may have a multilayer structure.
- the green sheet manufacturing release film has been described as having a three-layer structure in which a base material, a smoothing layer, and a release agent layer are laminated to be joined to each other in this order.
- the present invention is not limited to this, and an intermediate layer may be provided between the smoothing layer and the release agent layer.
- you may provide an intermediate
- Such an intermediate layer may be a layer that improves the adhesion between the smoothing layer and the release agent layer, and is charged when the release film for producing a green sheet before the green sheet is formed is wound up. The layer which suppresses generation
- the manufacturing method of the peeling film for green sheet manufacture of this invention is not limited to the method mentioned above, Arbitrary processes may be added as needed.
- a bisphenol A type epoxy ester compound [Hitachi Chemical Polymer Co., Ltd. “TA31-059D” as a thermosetting compound, solid content concentration 50 mass%, mass average molecular weight 530] 100 mass parts, and acid catalyst p- 3 parts by mass of toluenesulfonic acid, toluene, and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass.
- the obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 to obtain a coating layer.
- the coating layer was heated at 130 ° C. for 1 minute to form a smoothing layer (thickness: 1.3 ⁇ m).
- the release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
- Example 2 The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 ⁇ m, arithmetic mean roughness Ra 2 of the first surface: 29 nm, maximum protrusion height Rp 2 : 257 nm of the first surface, A release film for producing a green sheet was produced in the same manner as in Example 1 except that the arithmetic average roughness Ra 3 of the second surface was 29 nm and the maximum protrusion height Rp 3 was 257 nm of the second surface. .
- Example 3 The biaxially stretched polyethylene terephthalate film of Example 1 was converted into a biaxially stretched polyethylene terephthalate film [thickness 31 ⁇ m, arithmetic mean roughness Ra 2 of the first surface: 15 nm, maximum projection height Rp 2 of first surface: 98 nm, Example 1 except that the arithmetic average roughness Ra 3 of the second surface was changed to 15 nm and the maximum protrusion height Rp 3 of the second surface was 98 nm, and the thickness of the smoothing layer was changed to 0.4 ⁇ m. In the same manner as described above, a release film for producing a green sheet was produced.
- Example 4 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 1.8 ⁇ m.
- Example 5 A release film for producing a green sheet was produced in the same manner as in Example 1 except that the thickness of the smoothing layer in Example 1 was changed to 2.3 ⁇ m.
- the release agent layer forming composition was uniformly applied on the first surface of the substrate so that the thickness of the release agent layer forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
- thermosetting compound manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20 mass%, mass average molecular weight 15000] 100 mass Part and 3 parts by mass of p-toluenesulfonic acid as an acid catalyst were mixed to obtain a composition for forming a smoothing layer.
- the obtained composition for forming a smoothing layer was applied to the first surface of the substrate with a Meyer bar # 4 to obtain a coating layer.
- the coating layer was heated at 130 ° C. for 1 minute to form a smoothing layer (thickness: 1.0 ⁇ m).
- thermosetting compound 80 parts by mass of a polyester compound [manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000] as a thermosetting compound, and a methylated melamine compound as a crosslinking agent 20 parts by mass, 3 parts by mass of p-toluenesulfonic acid as an acid catalyst, toluene and methyl ethyl ketone were mixed to obtain a composition for forming a smoothing layer having a solid content of 20% by mass.
- a polyester compound manufactured by Toyobo Co., Ltd., trade name “Byron 20SS”, solid content 30% by mass, mass average molecular weight 3000
- the coating layer was heated at 130 ° C. for 1 minute to form a smoothing layer (thickness: 1.2 ⁇ m).
- the release agent layer-forming composition was uniformly applied to the surface of the smoothing layer opposite to the substrate so that the thickness of the release agent layer-forming composition after drying was 0.1 ⁇ m. Thereafter, the release agent layer-forming composition was dried at 130 ° C. for 1 minute to form a release agent layer, thereby producing a release film for producing a green sheet.
- Table 1 summarizes the configurations and the like of the release films for producing green sheets of each Example and each Comparative Example.
- the bisphenol A type epoxy ester compound as a thermosetting compound [“TA31-059D” manufactured by Hitachi Chemical Polymer Co., Ltd., solid content concentration 50 mass%] is “A1”, and stearyl modification as a thermosetting compound Mixture of alkyd compound and methylated melamine compound [manufactured by Hitachi Chemical Co., Ltd., trade name “Tesfine 303”, solid content 20% by mass] “A2”, polyester compound as a thermosetting compound [Toyobo Co., Ltd. ), Trade name “Byron 20SS”, solid content 30% by mass] is indicated as “A3”.
- the film thicknesses of the base material, the smoothing layer and the release agent layer in each Example and each Comparative Example were measured with a reflective film thickness meter “F20” [manufactured by Filmetrics Co., Ltd.]
- the arithmetic average roughness Ra 2 and the maximum protrusion height Rp 2 of the first surface of the base material, the arithmetic average roughness Ra 3 and the maximum protrusion height Rp 3 of the second surface of the base material, and the smoothing layer The arithmetic average roughness Ra 4 and maximum protrusion height Rp 4 of the third surface, and the arithmetic average roughness Ra 1 and maximum protrusion height Rp 1 of the outer surface of the release agent layer were measured as follows, respectively. . First, a double-sided tape was affixed to a glass plate.
- the release film for green sheet production obtained in each example and each comparative example is placed on a double-sided tape so that the surface opposite to the surface on which the arithmetic average roughness and maximum protrusion are measured is the glass plate side. And fixed.
- the arithmetic average roughness Ra 2 , Ra 3 , Ra 4 , Ra 1 , and the maximum protrusion height Rp 2 , Rp 3 , Rp 4 , Rp 1 are measured according to JIS B0601-1994. Measured with a measuring instrument SV3000S4 (stylus type).
- A Compared with the appearance of the release film roll before storage obtained by rolling up the release film for green sheet production into a roll, there was no change in the appearance of the release film roll after storage (no blocking).
- B In the release film roll for producing a green sheet, there was a region in which the color was partially different (those that have a blocking tendency can be used).
- C The color was different over a wide area of the release film roll for producing a green sheet (with blocking). When blocking occurs due to adhesion between the front and back surfaces of the release film for green sheet production as in the above standard C, and the color changes over a wide area of the release film roll, the release film for green sheet production is normally unwound. May not be possible.
- a release film for green sheet production obtained in each example and each comparative example was obtained by using a coating solution obtained by dissolving polyvinyl butyral resin in a toluene / ethanol mixed solvent (mass ratio 6/4). On the release agent layer (outer surface), a coating layer was obtained by coating so that the thickness after drying was 3 ⁇ m. The coating layer was dried at 80 ° C. for 1 minute to form a polyvinyl butyral resin layer. Next, a polyester tape was attached to the surface of the polyvinyl butyral resin layer.
- the release film for green sheet production was peeled from the polyvinyl butyral resin layer, and the polyvinyl butyral resin layer was transferred to a polyester tape.
- the surface of the polyvinyl butyral resin layer that was in contact with the release agent layer of the release film for producing a green sheet was observed using a light interference type surface shape observation device “WYKO-1100” [manufactured by Veeco Co., Ltd.].
- the observation conditions were PSI mode and 50 magnification. In the range of 91.2 ⁇ 119.8 ⁇ m of the surface of the polyvinyl butyral resin layer, the number of recesses confirmed on the surface of the polyvinyl butyral resin layer was counted.
- the concave portion had a depth of 150 nm or more to which the shape of the release agent layer was transferred.
- the number of recesses was evaluated according to the following criteria.
- the capacitor was produced using the polyvinyl butyral resin layer (green sheet) evaluated as the following standard C, there was a tendency for a short circuit to occur due to a decrease in withstand voltage.
- the release film for producing a green sheet of the present invention was excellent in the smoothness of the outer surface. Moreover, the coarse recessed part etc. were hardly confirmed by the green sheet formed using the peeling film for green sheet manufacture of this invention. Moreover, generation
- the release film for producing a green sheet of the present invention includes a base material having a first surface and a second surface, a smoothing layer provided on the first surface, and the base material of the smoothing layer.
- a release agent layer provided on the opposite surface side, and the smoothing layer is obtained by heating and curing a composition for forming a smoothing layer containing a thermosetting compound having a mass average molecular weight of 950 or less.
- the arithmetic average roughness Ra 1 of the outer surface of the release agent layer is 8 nm or less, and the maximum protrusion height Rp 1 is 50 nm or less.
- ADVANTAGE OF THE INVENTION According to this invention, it can prevent that a pinhole etc. generate
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Abstract
Description
(1) グリーンシート製造用剥離フィルムであって、
第1の面と第2の面とを有する基材と、
前記基材の前記第1の面側に設けられた平滑化層と、
前記平滑化層の前記基材と反対の面側に設けられた剥離剤層とを有し、
前記平滑化層は、質量平均分子量が950以下の熱硬化性化合物を含む平滑化層形成用組成物を加熱して硬化させることにより形成されており、
前記剥離剤層の外表面の算術平均粗さRa1が8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRp1が50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。
前記第1の面と前記第2の面とを有する前記基材を準備する基材準備工程と、
前記質量平均分子量950以下の前記熱硬化性化合物を含む前記平滑化層形成用組成物を、前記基材の前記第1の面側に塗布することにより塗布層を形成する塗布層形成工程と、
前記塗布層を加熱して硬化させることにより、前記平滑化層を形成する平滑化層形成工程と、
前記平滑化層の前記基材と反対の前記面側に、前記剥離剤層を形成する剥離剤層形成工程とを有し、
前記剥離剤層の前記外表面の前記算術平均粗さRa1が8nm以下であり、かつ、前記剥離剤層の前記外表面の前記最大突起高さRp1が50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
〈〈グリーンシート製造用剥離フィルム〉〉
本発明のグリーンシート製造用剥離フィルムは、グリーンシートの製造に用いられるものである。そして、製造されたグリーンシートは、例えば、セラミックコンデンサー等の製造に用いられる。
基材11は、グリーンシート製造用剥離フィルム1(以下、単に「剥離フィルム1」ということもある。)に、剛性、柔軟性等の物理的強度を付与する機能を有している。
基材11を構成する材料としては、特に限定されず、例えば、ポリブチレンテレフタレート樹脂、ポリエチレンテレフタレート樹脂、ポリエチレンナフタレート樹脂などのポリエステル樹脂、ポリプロピレン樹脂やポリメチルペンテン樹脂などのポリオレフィン樹脂、ポリカーボネートなどのプラスチックからなるフィルムが挙げられる。基材11は、単層フィルムであってもよいし、同種または異種の2層以上の多層フィルムであってもよい。これらの中でも特に、ポリエステルフィルムであるのが好ましく、ポリエチレンテレフタレートフィルムであるのがより好ましく、更には二軸延伸ポリエチレンテレフタレートフィルムが好ましい。特に、ポリエステルフィルムは、その加工時や使用時等において、埃等が発生しにくい。そのため、例えば、ポリエステル樹脂を用いて製造した剥離フィルム1を使用して、グリーンシートを製造する場合に、埃等によるセラミックスラリー塗工不良等を効果的に防止することができる。その結果、ピンホール等がより少ないグリーンシートを製造することができる。
平滑化層12は、剥離剤層13の外表面131に対する、基材11の第1の面111の凹凸の影響を低減する機能を有している。
平滑化層12は、所定の熱硬化性化合物を含む平滑化層形成用組成物で構成されている。また、平滑化層12は、平滑化層形成用組成物を加熱して硬化させることにより形成される。
剥離剤層13は、剥離フィルム1に剥離性を付与する機能を有している。
かかる剥離剤層形成用組成物は、剥離剤を含むものである。
次に、前述したようなグリーンシート製造用剥離フィルム1の製造方法の好適な実施形態について説明する。
<基材準備工程>
まず、基材11を準備する。
基材11としては、前述したような構成の基材11を用いることができる。
本工程では、まず、平滑化層形成用組成物を準備する。
次に、塗布層形成工程により得られた塗布層を加熱して硬化させることにより平滑化層12を形成する。
次に、平滑化層12の基材11と反対の面121側に、剥離剤層13を形成する。
(実施例1)
まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa2:42nm、第1の面の最大突起高さRp2:619nm、第2の面の算術平均粗さRa3:42nm、第2の面の最大突起高さRp3:619nm]を用意した。
実施例1の二軸延伸ポリエチレンテレフタレートフィルムを、二軸延伸ポリエチレンテレフタレートフィルム[厚み31μm、第1の面の算術平均粗さRa2:29nm、第1の面の最大突起高さRp2:257nm、第2の面の算術平均粗さRa3:29nm、第2の面の最大突起高さRp3:257nm]に変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
実施例1の二軸延伸ポリエチレンテレフタレートフィルムを、二軸延伸ポリエチレンテレフタレートフィルム[厚み31μm、第1の面の算術平均粗さRa2:15nm、第1の面の最大突起高さRp2:98nm、第2の面の算術平均粗さRa3:15nm、第2の面の最大突起高さRp3:98nm]に変更し、平滑化層の厚みを0.4μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
実施例1の平滑化層の厚みを1.8μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
実施例1の平滑化層の厚みを2.3μmに変更した以外は、実施例1と同様にしてグリーンシート製造用剥離フィルムを作製した。
まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa2:42nm、第1の面の最大突起高さRp2:619nm、第2の面の算術平均粗さRa3:42nm、第2の面の最大突起高さRp3:619nm]を用意した。
まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa2:42nm、第1の面の最大突起高さRp2:619nm、第2の面の算術平均粗さRa3:42nm、第2の面の最大突起高さRp3:619nm]を用意した。
まず、基材としての二軸延伸ポリエチレンテレフタレートフィルム[厚み:38μm、第1の面の算術平均粗さRa2:42nm、第1の面の最大突起高さRp2:619nm、第2の面の算術平均粗さRa3:42nm、第2の面の最大突起高さRp3:619nm]を用意した。
以上のようにして得られたグリーンシート製造用剥離フィルムに関して、以下のような評価を行った。
各実施例および各比較例で得られたグリーンシート製造用剥離フィルムの幅400mm、長さ5000mをロール状に巻き上げて、剥離フィルムロールを得た。この剥離フィルムロールを40℃、湿度50%以下の環境下に30日間保管した。その後、剥離フィルムロールの外観を目視にて観察し、以下の判断基準でブロッキング性を評価した。
B:グリーンシート製造用剥離フィルムロールにおいて、部分的に色目が異なる領域があった(ブロッキング傾向にあるものの使用可能)。
C:グリーンシート製造用剥離フィルムロールの広範な領域にわたって色目が異なった(ブロッキング有り)。
上記基準Cのように、グリーンシート製造用剥離フィルムの表裏の密着によるブロッキングが発生して、剥離フィルムロールの広範な領域にわたって色目が変化した場合、グリーンシート製造用剥離フィルムを正常に巻き出すことができない場合がある。
ポリビニルブチラール樹脂をトルエン/エタノール混合溶剤(質量比6/4)にて溶解した塗工液を、各実施例および各比較例で得られたグリーンシート製造用剥離フィルムの剥離剤層の上(外表面)に、乾燥後の厚さが3μmとなるように、塗布して塗布層を得た。塗布層を80℃で1分間乾燥させて、ポリビニルブチラール樹脂層を成形した。次いで、そのポリビニルブチラール樹脂層の表面にポリエステルテープを貼付した。次いで、グリーンシート製造用剥離フィルムをポリビニルブチラール樹脂層から剥離し、ポリビニルブチラール樹脂層をポリエステルテープに転写した。次いで、グリーンシート製造用剥離フィルムの剥離剤層に接触していたポリビニルブチラール樹脂層の面を、光干渉式表面形状観察装置「WYKO-1100」[株式会社Veeco社製]を用いて観察した。観察条件は、PSIモード、50倍率とした。ポリビニルブチラール樹脂層の面の91.2×119.8μmの範囲内で、ポリビニルブチラール樹脂層の面に確認される凹部をカウントした。その凹部は、剥離剤層の形状が転写された150nm以上の深さを有していた。凹部の数を以下の判断基準で評価した。なお、下記基準Cと評価されたポリビニルブチラール樹脂層(グリーンシート)を用いてコンデンサを作製した場合、耐電圧低下によるショートが発生し易い傾向があった。
B:凹部の数が1~5個である。
C:凹部の数が6個以上である。
これらの結果を表2に示す。
11・・・基材
111・・・基材の第1の面
112・・・基材の第2の面
12・・・平滑化層
121・・・面(第3の面)
13・・・剥離剤層
131・・・剥離剤層の外表面
Claims (7)
- グリーンシート製造用剥離フィルムであって、
第1の面と第2の面とを有する基材と、
前記基材の前記第1の面側に設けられた平滑化層と、
前記平滑化層の前記基材と反対の面側に設けられた剥離剤層とを有し、
前記平滑化層は、質量平均分子量が950以下の熱硬化性化合物を含む平滑化層形成用組成物を加熱して硬化させることにより形成されており、
前記剥離剤層の外表面の算術平均粗さRa1が8nm以下であり、かつ、前記剥離剤層の前記外表面の最大突起高さRp1が50nm以下であることを特徴とするグリーンシート製造用剥離フィルム。 - 前記第1の面の算術平均粗さRa2が10~200nmであり、かつ、前記第1の面の最大突起高さRp2が80~1000nmである請求項1に記載のグリーンシート製造用剥離フィルム。
- 前記平滑化層の平均膜厚が、0.2~10μmである請求項1または2に記載のグリーンシート製造用剥離フィルム。
- 前記熱硬化性化合物は、ビスフェノール型エポキシ化合物である請求項1ないし3のいずれか1項に記載のグリーンシート製造用剥離フィルム。
- 前記平滑化層は、前記基材と反対の面を有し、
前記平滑化層の前記基材と反対の前記面の算術平均粗さRa4が8nm以下であり、かつ、前記平滑化層の前記基材と反対の前記面の最大突起高さRp4が50nm以下である請求項1ないし4のいずれか1項に記載のグリーンシート製造用剥離フィルム。 - 前記第2の面の算術平均粗さRa3が10~200nmであり、かつ、前記第2の面の最大突起高さRp3が80~1000nmである請求項1ないし5のいずれか1項に記載のグリーンシート製造用剥離フィルム。
- 請求項1ないし6のいずれか1項に記載のグリーンシート製造用剥離フィルムの製造方法であって、
前記第1の面と前記第2の面とを有する前記基材を準備する基材準備工程と、
前記質量平均分子量950以下の前記熱硬化性化合物を含む前記平滑化層形成用組成物を、前記基材の前記第1の面側に塗布することにより塗布層を形成する塗布層形成工程と、
前記塗布層を加熱して硬化させることにより、前記平滑化層を形成する平滑化層形成工程と、
前記平滑化層の前記基材と反対の前記面側に、前記剥離剤層を形成する剥離剤層形成工程とを有し、
前記剥離剤層の前記外表面の前記算術平均粗さRa1が8nm以下であり、かつ、前記剥離剤層の前記外表面の前記最大突起高さRp1が50nm以下であることを特徴とするグリーンシート製造用剥離フィルムの製造方法。
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CN201380074564.3A CN105189068B (zh) | 2013-03-15 | 2013-12-27 | 印刷电路基板制造用剥离膜及印刷电路基板制造用剥离膜的制造方法 |
KR1020157027459A KR102037128B1 (ko) | 2013-03-15 | 2013-12-27 | 그린 시트 제조용 박리 필름 및 그린 시트 제조용 박리 필름의 제조 방법 |
SG11201507461SA SG11201507461SA (en) | 2013-03-15 | 2013-12-27 | Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing |
PH12015502151A PH12015502151B1 (en) | 2013-03-15 | 2015-09-15 | Release film for green sheet manufacturing, and method for manufacturing release film for green sheet manufacturing |
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KR (1) | KR102037128B1 (ja) |
CN (1) | CN105189068B (ja) |
MY (1) | MY172241A (ja) |
PH (1) | PH12015502151B1 (ja) |
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JP2016141008A (ja) * | 2015-01-30 | 2016-08-08 | リンテック株式会社 | 剥離フィルム及び剥離フィルムの製造方法 |
KR102572480B1 (ko) | 2017-03-01 | 2023-08-30 | 도요보 가부시키가이샤 | 세라믹 그린 시트 제조용 이형 필름 및 그의 제조 방법 |
KR101880182B1 (ko) | 2018-01-02 | 2018-07-19 | 도레이첨단소재 주식회사 | 이형필름 |
JP7102267B2 (ja) * | 2018-07-10 | 2022-07-19 | リンテック株式会社 | セラミックグリーンシート製造工程用剥離フィルム |
KR102335931B1 (ko) | 2018-09-03 | 2021-12-06 | 도요보 가부시키가이샤 | 세라믹 그린시트 제조용 이형 필름 |
KR20220051338A (ko) | 2019-08-22 | 2022-04-26 | 미쯔비시 케미컬 주식회사 | 폴리에스테르 필름 롤 |
KR102267738B1 (ko) | 2020-04-23 | 2021-06-21 | 도레이첨단소재 주식회사 | 이형필름 |
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JP2003191384A (ja) * | 2001-12-26 | 2003-07-08 | Mitsubishi Polyester Film Copp | 離型フィルム用ポリエステルフィルム |
JP2007069360A (ja) * | 2005-09-02 | 2007-03-22 | Lintec Corp | 高平滑性剥離シート及びその製造方法 |
JP2010105384A (ja) * | 2008-09-30 | 2010-05-13 | Tdk Corp | 剥離フィルム、セラミック部品シート及びこれらの製造方法、並びにセラミック部品の製造方法 |
JP2012224011A (ja) * | 2011-04-21 | 2012-11-15 | Lintec Corp | セラミックグリーンシート製造工程用の剥離フィルム |
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JP5035023B2 (ja) * | 2008-02-29 | 2012-09-26 | Tdk株式会社 | 支持シートおよび積層セラミック電子部品の製造方法 |
JP5632336B2 (ja) * | 2010-07-29 | 2014-11-26 | 大日本印刷株式会社 | 接着組成物および熱硬化性接着シートの製造方法 |
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JP2003191384A (ja) * | 2001-12-26 | 2003-07-08 | Mitsubishi Polyester Film Copp | 離型フィルム用ポリエステルフィルム |
JP2007069360A (ja) * | 2005-09-02 | 2007-03-22 | Lintec Corp | 高平滑性剥離シート及びその製造方法 |
JP2010105384A (ja) * | 2008-09-30 | 2010-05-13 | Tdk Corp | 剥離フィルム、セラミック部品シート及びこれらの製造方法、並びにセラミック部品の製造方法 |
JP2012224011A (ja) * | 2011-04-21 | 2012-11-15 | Lintec Corp | セラミックグリーンシート製造工程用の剥離フィルム |
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JP2014177093A (ja) | 2014-09-25 |
TW201434655A (zh) | 2014-09-16 |
SG11201507461SA (en) | 2015-10-29 |
PH12015502151A1 (en) | 2016-01-25 |
PH12015502151B1 (en) | 2016-01-25 |
MY172241A (en) | 2019-11-19 |
JP6033134B2 (ja) | 2016-11-30 |
KR20150132229A (ko) | 2015-11-25 |
TWI551457B (zh) | 2016-10-01 |
CN105189068A (zh) | 2015-12-23 |
CN105189068B (zh) | 2017-09-29 |
KR102037128B1 (ko) | 2019-10-28 |
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