WO2014057769A1 - 減圧治具及び減圧治具を用いた被加圧物の加圧方法 - Google Patents
減圧治具及び減圧治具を用いた被加圧物の加圧方法 Download PDFInfo
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- WO2014057769A1 WO2014057769A1 PCT/JP2013/074891 JP2013074891W WO2014057769A1 WO 2014057769 A1 WO2014057769 A1 WO 2014057769A1 JP 2013074891 W JP2013074891 W JP 2013074891W WO 2014057769 A1 WO2014057769 A1 WO 2014057769A1
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- Prior art keywords
- decompression
- pressurized
- preliminary
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- frame
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B5/00—Presses characterised by the use of pressing means other than those mentioned in the preceding groups
- B30B5/02—Presses characterised by the use of pressing means other than those mentioned in the preceding groups wherein the pressing means is in the form of a flexible element, e.g. diaphragm, urged by fluid pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
- H01L2023/4081—Compliant clamping elements not primarily serving heat-conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
- H01L2023/4075—Mechanical elements
- H01L2023/4087—Mounting accessories, interposers, clamping or screwing parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a depressurization jig for depressurizing a storage space in which a pressurized object is stored and a pressurization using the depressurization jig in order to pressurize the pressurized object to be pressurized by a pressurizing unit.
- the present invention relates to a method for pressing an object.
- a decompression jig that holds an object to be pressurized in a state of being decompressed is used in processes performed by applying pressure under reduced pressure, such as sealing a semiconductor chip or manufacturing a multilayer substrate.
- pressure under reduced pressure such as sealing a semiconductor chip or manufacturing a multilayer substrate.
- a resin sealing material and a semiconductor chip are stacked on a substrate and placed in a space covered with a flexible film, and then subjected to a decompression process using a decompression jig
- a technique is disclosed in which sealing is performed by pressurizing and fixing with a flexible film by a differential pressure of and by heating in a pressurized state.
- 2003-124628 discloses that after laminating a plurality of resin sheets, the inside of the sheet material holder is depressurized to fix the resin sheet with a cover member that is a flexible film, and then to a hot press device. Thus, a technique for performing a heat and pressure treatment is disclosed.
- the present invention provides a decompression jig capable of pressurizing an object to be pressurized after the space in which the object to be pressurized is sufficiently decompressed, and an object to be pressurized using the decompression jig.
- An object of the present invention is to provide a pressing method.
- the first aspect of the present invention is a depressurization for depressurizing a housing space in which a pressurized object is accommodated in order to pressurize the pressurized object to be pressurized by a pressurizing means.
- a first decompressing member comprising a first frame-shaped member formed in a frame shape and a first sheet member stretched over the first frame-shaped member;
- a holding member that is disposed opposite to the pressure reducing member and that accommodates the object to be pressed between the first pressure reducing member, and is arranged between the first frame-like member and the holding member;
- a space between the first pressure reducing member and the holding member is partitioned in an airtight state, and a seal member that forms an accommodation space capable of accommodating the object to be pressurized, and the holding facing the first pressure reducing member. It is arranged on the opposite side of the member, a preliminary decompression chamber is formed between the first sheet member, and the preliminary decompression chamber can be decompressed.
- a first pre-decompression member being, with a, a vacuum fixture.
- the object to be pressurized is disposed in the accommodation space, and after the predepressurization chamber is evacuated and depressurized, the accommodation space is exhausted, whereby the object to be pressurized is the first sheet member.
- the housing space can be evacuated in a state where no pressure is applied.
- the holding member is a second shape formed in a frame shape arranged to face the first frame-shaped member.
- a second decompression member comprising a frame-like member and a second sheet member stretched over the second frame-like member, opposite the first decompression member so as to face the second decompression member.
- the second pressure reducing member having the same configuration as the first pressure reducing member is used as the holding member, and the second preliminary pressure reducing member having the same configuration as the first preliminary pressure reducing member is used.
- the provided structure can be employed. According to this configuration, since the holding member can be formed of a sheet to reduce the heat capacity, when heating or cooling the object to be pressed, rapid heating or cooling can be performed, which is preferable. Furthermore, since the second preliminary decompression member does not bend toward the accommodation space even if the accommodation space is decompressed, the first sheet member and the second sheet member do not contact the object to be pressed.
- the first preliminary decompression member or the second preliminary decompression member is formed toward the inside of the preliminary decompression chamber. This is a decompression jig provided with a spacer.
- the preliminary decompression chamber since the volume of the preliminary decompression chamber can be reduced by the spacer, the preliminary decompression chamber can be quickly decompressed, and when the preliminary decompression chamber is decompressed, the first sheet member, It is possible to prevent the second sheet member from being bent excessively.
- the plate-like member is disposed on the holding member, and the accommodation space accommodates an object to be pressurized.
- a housing space forming member that divides the second housing space and a flow path space that communicates the second housing space and the exhaust means.
- the storage space can be divided into the second storage space and the flow path space by the storage space forming member, it is difficult to cause the positional displacement of the pressurized object.
- a frame-shaped plate-like member disposed on the holding member, the positioning member positioning the pressed object It is a decompression jig provided with.
- the object to be pressed can be accurately positioned by the positioning member, so that the object to be pressed can be stably pressed without causing a positional shift. It can be performed.
- a sixth aspect of the present invention is the decompression jig according to the first or second aspect of the present invention, wherein the object to be pressed is a substrate including a semiconductor chip and a semiconductor chip sealing material. It is.
- the pressure treatment can be performed after sufficient evacuation. Therefore, generation of voids can be prevented, which is preferable.
- a method for pressurizing an object to be pressurized The pressure reducing jig according to the first or second aspect of the present invention and an object to be pressed are prepared, and the preliminary decompression is performed.
- a pre-depressurization step of evacuating the chamber and depressurizing; an arrangement step of disposing the object to be pressurized in the accommodation space; and evacuating the accommodation space, and the object to be pressurized is pressurized by the first sheet member.
- a pressurizing method for an object to be pressed comprising: a fixing step for fixing; and a pressurizing step for removing the preliminary decompression member from the decompression member and pressurizing the fixed object to be pressed.
- the preliminary decompression chamber is evacuated and decompressed in the preliminary decompression step, the pressurized object is placed in the accommodation space in the placement step, the accommodation space is exhausted in the decompression step, The pressure object is depressurized within the range not receiving pressure from the first sheet member, and the pre-depressurization chamber is opened to the atmospheric pressure in the fixing step, whereby the first sheet member is disposed in the accommodation space.
- the object to be pressed can be fixed by being in close contact with the object, the preliminary decompression member can be removed from the decompression member in the pressurizing step, and the fixed object to be pressed can be pressurized by the pressurizing means.
- the object to be pressurized can be fixed and pressurized after the storage space has been sufficiently depressurized, thus preventing bubbles and the like from remaining in the object to be pressurized and causing defects such as voids. Can do.
- an internal pressure for depressurizing the preliminary decompression chamber is equal to or lower than an internal pressure for depressurizing the accommodation space. This is a method of pressurizing the pressed article.
- the preliminary decompression chamber becomes lower in pressure, and the force toward the preliminary decompression chamber acts on the first sheet member. It is possible to prevent the pressure member from receiving a pressing force from the first sheet member.
- a pressure is applied by fixing the object to be pressed in the fixing step. This is a method of pressurizing an object to be pressurized.
- the pressing force for fixing the object to be pressed in the fixing step is used to apply the pressure.
- the pressed article can be pressurized.
- FIG. 1A is a plan view and a cross-sectional view of the decompression jig
- FIG. 1B is a cross-sectional view taken along line AA of FIG. 1A.
- FIG. 1A is a plan view and a cross-sectional view of the decompression jig
- FIG. 1B is a cross-sectional view taken along line AA of FIG. 1A.
- FIG. 2A is a plan view and a cross-sectional view seen from above
- FIG. 2B is a plan view seen from below
- FIG. 2C is an enlarged view of a portion A in FIG. 2B.
- 3A is a plan view and a cross-sectional view seen from above, FIG.
- FIG. 3B is a plan view seen from below
- FIG. 3C is an enlarged view of a portion A in FIG. 3A.
- 4A is a plan view and a cross-sectional view seen from above
- FIG. 4B is a plan view seen from below.
- 5A is a plan view and a cross-sectional view seen from above
- FIG. 5B is a plan view seen from below.
- FIG. 9A is a plan view and a cross-sectional view as seen from above in a state where it is combined with the first pressure reducing member and the first preliminary pressure reducing member
- FIG. 9B is a cross-sectional view taken along the line AA in FIG. 9A. .
- FIG. 10A is a plan view of the second decompression member provided with the accommodation space forming member as viewed from above, and FIG. 10B is a cross-sectional view taken along the lines AA and BB in FIG. 10A. is there.
- FIG. 11A is a plan view of the second decompression member provided with the positioning member as viewed from above, and FIG. 11B is a cross-sectional view taken along line AA and BB in FIG. 11A.
- FIG. 12A is a plan view seen from above
- FIG. 12B is a plan view seen from below
- FIG. 12C is a cross-sectional view taken along line AA of FIG. 12A.
- a depressurization jig for depressurizing the accommodation space by arranging an object to be pressurized according to the present invention and a method for pressurizing the object to be pressurized using the depressurization jig will be described with reference to the drawings. .
- the decompression jig 1 includes a first decompression member 10, a second decompression member 20 that is a holding member that accommodates an object to be pressurized between the first decompression member 10, a seal member 30,
- the first preliminary decompression member 40 and the second preliminary decompression member 50 are combined.
- the first decompression member 10 is described as being disposed above and the second decompression member 20 is disposed below, but the present invention is not limited thereto.
- the first decompression member 10 is formed by stretching a first sheet member 12 made of a flexible sheet-like member over a first frame member 11.
- the first sheet member 12 is made of Teflon (registered trademark), which is a resin material.
- the first frame member 11 is formed with a seal groove 11 b in which the seal ring 11 a is disposed.
- the first sheet member 12 is sealed by the first pressing member 13. It is being fixed to the 1st frame-shaped member 11 via.
- the first frame-like member 11 is connected to an exhaust means (not shown) via an exhaust port 14, and has an exhaust passage 15 that communicates with a storage space S (to be described later) together with a groove formed in the first pressing member 13. Is formed.
- the exhaust port 14 is provided at two locations near the corner of the first frame-like member 11.
- the second decompression member 20 has the same configuration as the first decompression member 10, and is used as a holding member that accommodates an object to be pressurized W between the first decompression member 10.
- the decompression jig 1 is configured to place the first decompression member 10 above the second decompression member 20 as in the present embodiment
- the pressurized object W is the second decompression member 20.
- the second decompression member 20 is formed by stretching a second sheet member 22 made of a flexible sheet-like member over a second frame member 21 disposed to face the first frame member 11.
- the second sheet member 22 needs to have a rigidity that does not bend greatly when the article W to be pressed is placed.
- the second sheet member 22 is made of stainless steel that is a metal material.
- the second frame-shaped member 21 is formed with a seal groove 21b in which a seal ring 21a is disposed, and the second sheet member 22 is sealed by the second pressing member 23 with the seal ring 21a. It is being fixed to the 2nd frame-shaped member 21 via.
- the second frame-shaped member 21 is connected to an exhaust means via an exhaust port 24 and is formed with an exhaust passage 25 communicating with a storage space S described later together with a groove formed in the second pressing member 23.
- the exhaust ports 24 are provided at two locations near the corners of the second frame-shaped member 21.
- the exhaust passages 15 and 25 are provided in the first frame-like member 11 and the second frame-like member 21, respectively, but can be provided only in any one of the frame-like members. Further, the number and arrangement can be arbitrarily set in accordance with the shape and size of the accommodation space S.
- the seal member 30 is disposed between the first frame member 11 and the second frame member 21, and divides a space formed between the first sheet member 12 and the second sheet member 22 in an airtight state. It is a member which forms the accommodation space S which can accommodate the to-be-pressurized object W.
- the seal member 30 is provided outside the exhaust passage 15 of the first frame-like member 11 and the exhaust passage 25 of the second frame-like member 21, and is configured so that the accommodation space S communicates with the exhaust passages 15 and 25. ing. That is, the storage space S is configured to be evacuated through the exhaust passages 15 and 25 and depressurized.
- the seal member 30 is provided integrally with the first frame member 11.
- a heat resistant rubber material in particular, silicon rubber can be suitably used. Since the silicon rubber has high adhesion, the accommodation space S can be reliably kept airtight. Silicon rubber has high heat resistance, and can be suitably used when the object to be pressurized W is pressurized while being heated to a high temperature.
- the first preliminary decompression member 40 includes a main body portion 41 formed in a plate shape and a spacer 42, and is opposed to the first decompression member 10 via a seal ring 43.
- a preliminary decompression chamber Y (see FIG. 1A) is formed between the decompression member 20 and the first sheet member 12.
- the spacer 42 is formed toward the inside of the preliminary decompression chamber Y so as to reduce the volume of the preliminary decompression chamber Y so that the preliminary decompression chamber Y can be quickly decompressed and the preliminary decompression chamber Y is decompressed.
- the first sheet member 12 has a function of suppressing the bending of the first sheet member 12 excessively.
- the first preliminary decompression member 40 is connected to exhaust means via an exhaust port 44 and is formed with an exhaust passage 45 communicating with the preliminary decompression chamber Y so that the interior of the preliminary decompression chamber Y can be decompressed.
- the exhaust ports 44 are provided at two locations near the corner of the main body 41.
- the first preliminary decompression member 40 is formed of a material having high rigidity, for example, a hard plastic or a metal material so that it does not deform even if the preliminary decompression chamber Y is decompressed.
- the main body portion 41 and the spacer 42 are integrally formed, but may be formed so as to be separable.
- the second preliminary decompression member 50 has the same structure as the first preliminary decompression member 40, and includes a main body 51, a spacer 52, an exhaust port 54, and an exhaust passage 55.
- the second preliminary decompression member 50 is disposed on the opposite side of the first decompression member 10 through the seal ring 53 so as to face the second decompression member 20, and the preliminary decompression chamber Y (see FIG. 1 (A)), and the inside of the preliminary decompression chamber Y can be decompressed.
- an object to be pressed W in which film materials are laminated is prepared.
- the object to be pressed W for example, a substrate in which a semiconductor chip sealing material F is stacked on a substrate K including a semiconductor chip is used.
- An epoxy sheet or the like can be used as the semiconductor chip sealing material F.
- a first decompression member 10 As shown in FIG. 6A, a first decompression member 10, a second decompression member 20, a seal member 30, a first preliminary decompression member 40, and a second preliminary decompression member 50 are prepared.
- Each exhaust port 14, 24, 44, 54 is connected to exhaust means (not shown) such as a rotary pump.
- the first preliminary decompression member 40 is attached to the first decompression member 10
- the second preliminary decompression member 50 is attached to the second decompression member 20
- Each of the preliminary decompression chambers Y is formed, and the preliminary decompression chamber Y is exhausted and decompressed by the exhaust means.
- the object to be pressurized W is arranged, that is, placed on the second sheet member 22 of the second decompression member 20.
- the first frame-like member 11 of the first decompression member 10 is interposed via the seal member 30 so that the first sheet member 12 and the second sheet member 22 face each other.
- the second decompression member 20 is placed on the second frame member 21.
- the accommodation space S is formed, and the object to be pressurized W is disposed therein. That is, the article to be pressurized W is accommodated and held between the first decompression member 10 and the second decompression member 20.
- the first decompression member 10 and the second decompression member 20 are in a state where the first preliminary decompression member 40 and the second preliminary decompression member 50 are mounted, respectively.
- the accommodation space S is exhausted by the exhaust means to reduce the internal pressure to a predetermined internal pressure.
- the predetermined internal pressure is an internal pressure in a range where the article to be pressurized W does not receive the applied pressure from the first sheet member 12, for example, an internal pressure when the internal pressure in the preliminary decompression chamber Y exhausts the accommodation space S. It is as follows. According to this, since the internal pressure of the preliminary decompression chamber Y becomes lower than the internal pressure of the accommodation space S, and the force toward the preliminary decompression chamber Y acts on the first sheet member 12, the first pressure is applied to the pressurized object W.
- the pressing force does not act from the one sheet member 12, and the first sheet member 12 does not adhere to the pressed object W.
- the first sheet member 12 does not bend and contact the pressed object W.
- the pressed object W can be prevented from receiving pressure from the first sheet member 12 even if the above conditions are not satisfied.
- the term “close contact” refers to a state in which the object is adhered in an airtight manner. For example, the accommodation space is depressurized and the first sheet member 12 is bent toward the object to be pressed W to pressurize the object to be pressed W. In other words, it refers to a state of adhering while the object to be pressed W is merely placed on the second sheet member 22 and does not adhere.
- the preliminary decompression chamber Y is opened to atmospheric pressure.
- the accommodation space S is in a decompressed state, and the first sheet member 12 is made of a material having sufficient flexibility. Therefore, due to the pressure difference between the internal pressure of the accommodation space S and the atmospheric pressure, FIG. As shown in F), the first sheet member 12 is bent toward the pressed object W side to pressurize the pressed object W, and is brought into close contact with the applied pressure, and the pressed object W is not mixed with bubbles. It can be fixed with.
- FIG. 8G the first preliminary decompression member 40 and the second preliminary decompression member 50 are removed from the first decompression member 10 and the second decompression member 20.
- the object to be pressurized W fixed by the first decompression member 10 and the second decompression member 20 is pressurized by the pressurizing means P as shown in FIG.
- the object to be pressurized W can be fixed in advance by the decompression jig 1, so that the position deviation of the object to be pressurized W due to an impact during transportation is shifted. Can be prevented.
- the article to be pressurized W is taken out from the decompression jig 1, and the series of steps is completed.
- the pressurizing means P for example, a uniaxial pressing device can be adopted. Since the first preliminary decompression member 40 and the second preliminary decompression member 50 are removed and pressurized, it is possible to pressurize the object to be pressurized W with a rigid structure such as a flat pressure plate, a pressure die, and a pressure roll. is there. Thereby, a big pressurization force can be applied to a to-be-pressurized object.
- a hot press apparatus that can be pressurized while heating
- a cold press apparatus that can be pressurized while cooling, or the like
- a configuration in which a preheating unit that preheats the decompression jig 1 and the object to be pressed W, a residual heat removal unit that cools the decompression jig 1 and the object to be pressed W, and the like are employed as the pressurizing unit. You can also. Thereby, reliable heating and cooling are possible in a short time, and productivity can be improved.
- the to-be-pressurized object W can be heated and cooled easily. And even if it is the material which the to-be-pressurized object W warps by heating, since it can heat in the state fixed beforehand with the decompression jig 1, it can improve workability
- the decompression jig 1 is provided independently from the pressurizing means P, the object to be pressurized W can be set in advance on the decompression jig 1 outside the pressurizing means P, so that the work efficiency is improved. Can be made.
- the steps such as (A) to (G) and (I) of FIGS. 6 to 8) such as depressurization of the predepressurization chamber Y, depressurization of the storage space S, and release of the predepressurization chamber Y to the atmosphere are also performed by the pressurizing means P Can be done externally.
- the pressurizing means P is occupied only by the pressurizing process (FIG. 8H) in the series of processes, and if a plurality of decompression jigs 1 are prepared in advance, the objects to be pressed one after another. Since W can be fed into the pressurizing means P, productivity can be dramatically improved.
- the decompression jig 1 does not receive pressure from the first sheet member 12 and the exhaust of the accommodation space S without the first sheet member 12 being in close contact with the subject W. After sufficiently performing, the first sheet member 12 can be brought into close contact with the object to be pressed W disposed in the accommodation space S to fix the object to be pressed W. Thereby, it is possible to prevent bubbles and the like from remaining in the pressed object W and causing defects such as voids.
- the pressurizing method using the decompression jig 1 is a laminate in which bubbles are likely to remain between the layers, or a pressure-sensitive article W that is sticky and easily retains bubbles even with a small pressure, such as those described above. It can be suitably used for a substrate and a semiconductor chip sealing material, a heat dissipation sheet sandwiched between a semiconductor chip and a heat sink, or an imprint in which even a small amount of bubbles is not allowed to remain. Moreover, it can use suitably also in the case of the material to which the to-be-pressurized object W does not want to load with pressure until the decompression of the storage space S is completed, for example, a slurry molded object.
- the pressing force (adhesion force) for fixing the object to be pressed W in the fixing step is not performed without applying pressure by the pressing means.
- the object to be pressurized W can be pressurized by using the pressure. That is, in the pressurizing process, the object to be pressurized W in the fixing process is pressurized by the applied pressure for fixing.
- the first sheet member 12 is made of Teflon (registered trademark), which is a resin material
- the second sheet member 22 is made of stainless steel, which is a metal material, but the material and combination are limited to this. Is not to be done.
- fiber reinforced rubber such as a fiber reinforced rubber sheet dispersed and reinforced with glass or ceramic whiskers, or a rubberized cloth formed by integrating rubber thin films on both sides of a base fabric.
- a sheet can be used.
- a rubberized cloth having both rigidity and flexibility can be suitably used as the first sheet member 12 and the second sheet member 22.
- fluorine-based fibers polyimide fibers, polyphenylene sulfide fibers, aramid fibers, nylon, polyester, polyamide, polyurethane, cotton and other fabrics, glass fiber sheets, and the like can be used.
- Fluorine rubber, nitrile rubber, urethane rubber, chloroprene rubber, natural rubber, silicon rubber, etc. can be used as the rubber constituting the rubber thin film.
- a surfactant such as trialkoxyalkyl phosphate, carbon or the like can be added as an antistatic agent.
- the base fabric When heat resistance is required for the first sheet member 12 and the second sheet member 22 such as when the decompression jig 1 is used at a high temperature (for example, 160 ° C.), for example, glass fiber or heat resistance is used as the base fabric.
- the synthetic fiber fluorine rubber, silicon rubber or the like can be suitably used as the rubber.
- the heat-resistant synthetic fiber refers to a fiber that can be used while keeping the accommodation space S airtight at the use temperature of the decompression jig 1, and glass fiber, heat-resistant nylon, and the like can be suitably used.
- the thermal expansion is low, so that the first sheet member 12 and the second sheet member 22 and other members are subject to a difference in thermal expansion. It is possible to prevent the displacement of the pressurized object W. In addition, it has high elasticity and is flexible, and even if it is deformed by an external force, it has a property of returning to its original shape when the external force is removed. Therefore, the shape does not change even after repeated use. Since the buffering property for making the applied pressure uniform is high, uniform pressure can be applied without applying a local pressure from the pressurizing means to the article W to be pressurized. Since it is highly durable, it is not destroyed by the object to be pressed W or the corners of the jig.
- a polyimide material sheet can be used as the first sheet member 12 and the second sheet member 22.
- a polyimide sheet is used as the first sheet member 12 and the second sheet member 22, since the heat resistance is high, it is possible to pressurize the article to be pressed W at a high temperature.
- the second decompression member 20 may be formed as a flat member. According to this, since it can be made a simple structure and the rigidity of the region for holding the pressed object W is high, the pressed object W can be stably held. It can be suitably used when the strength of the object to be pressed W such as a body is weak. Furthermore, the second decompression member 20 formed of a flat plate-like member is also suitable for placing an object to be pressurized W having a low strength on the second decompression member 20. Note that when heating or cooling is performed in the pressurization step, the structure shown in FIG. 3 can reduce the heat capacity, so that rapid heating or cooling can be performed.
- the first preliminary decompression is performed.
- the member 42 may not be provided with the spacer 42. The same applies to the second preliminary decompression member 50.
- the first sheet member 12 is fixed to the first frame member 11 via the seat ring 11a by the first pressing member 13, but the fixing method of the first sheet member 12 is limited to this.
- the first sheet member 12 may be directly bonded and fixed to the first frame member 11. The same applies to the fixation of the second sheet member 22.
- the configuration of the second decompression member 20 is different. As shown in FIG. 10, the accommodation space S is covered on the second sheet member 22 of the second decompression member 20 while being sandwiched between the first sheet member 12 and the second sheet member 22.
- An accommodation space forming member 60 is provided that partitions into a second accommodation space S2 that accommodates the pressurized object W and a flow path space H for exhausting the inside of the second accommodation space S2.
- the accommodation space forming member 60 is made of stainless steel, which is a metal material, thinner than the pressed object W, and is attached to the second sheet member 22 with an adhesive.
- the second storage space S2 is formed in accordance with the shape of the article to be pressed W, and is formed in a rectangular shape in the present embodiment.
- the channel space H is formed as a channel between the outer periphery of the storage space forming member 60 and the second storage space S2 and the outer periphery, and communicates the second storage space S2 and the exhaust passages 15 and 25.
- the housing space forming member 60 is composed of two elements.
- the first element of the accommodation space forming member 60 has approximately half the size of the second sheet member 22 and lacks only the second accommodation space S2.
- the second element of the accommodation space forming member 60 is formed smaller than the first element because the outer periphery forms the flow path space H.
- a flow path space H as a flow path between the second accommodation space S2 and the outer periphery is formed between the first element and the second element. If the storage space forming member 60 is configured in this way, the storage space forming member 60 can be easily manufactured.
- the accommodation space forming member 60 When the accommodation space forming member 60 is used, it is possible to make it difficult to cause the displacement of the pressurized object W, and to secure a flow path space H for exhausting the exhausted air due to the displacement of the pressurized object W.
- the passage can be prevented from being blocked, and the inside of the second accommodation space S2 can be surely and quickly exhausted.
- the positioning member 61 is formed thinner than the accommodation space forming member 60. Therefore, even if the positioning member 61 is formed in a closed frame shape, the flow path space H is not blocked.
- the accommodation space forming member 60 can also be provided on the first sheet member 12. Further, a configuration in which only the positioning member 61 is provided without providing the accommodation space forming member 60 can also be adopted.
- a rigidity imparting member 70 made of a material having higher rigidity than the first sheet member 12 and formed in a rectangular plate shape is provided on the opposite side of the first sheet member 12 to the pressed object W. be able to.
- the rigidity imparting member 70 corresponds to a position where the object to be pressed W is accommodated, is disposed at a position where pressure can be applied, and is formed to have a size larger than the outer shape of the object to be pressed W.
- a material for forming the rigidity imparting member 70 a metal material, in particular, stainless steel can be suitably used.
- the pressurized object W since a certain rigidity can be imparted to at least a portion of the first sheet member 12 that pressurizes the pressurized object W by the rigidity imparting member 70, the pressurized object W has an uneven shape.
- the first sheet member 12 can be prevented from entering and sticking into the concave portion of the article to be pressed W, and the material of the article to be pressed W is easily stuck to the first sheet member 12 and easily broken.
- it can be used suitably also when it is desired to pressurize only the convex portion of the article to be pressed W.
- the rigidity imparting member 70 is provided on the opposite side of the object to be pressed W.
- the rigidity imparting member 70 may be provided so as to face the object to be pressed W.
- the pressurized object W is disposed in the accommodating space S, the preliminary decompressing chamber Y is evacuated and decompressed, and then the accommodating space S is evacuated.
- the accommodation space S can be exhausted in a state in which the pressurized object W does not receive pressure from the first sheet member and the first sheet member is not in close contact with the pressurized object W.
- the first sheet member 12 is flexible, the first sheet member 12 can be brought into close contact with the object to be pressed W arranged in the accommodation space S to fix the object to be pressed W. it can.
- the pressurized object W can be pressurized after the storage space S is sufficiently depressurized, bubbles and the like remain in the pressurized object W and prevent defects such as voids from occurring. be able to. Moreover, it can use suitably also for the material to which the to-be-pressurized object W does not want to load with pressure until the decompression of the storage space S is completed.
- the decompression jig 1 of the present invention can also be used in a ceramic material forming step shown in the following steps. 1.
- the slurry-like ceramic material is tape-molded to obtain a tape-molded body. 2.
- the tape molded body is heated and dried under reduced pressure. Thereby, drying time can be shortened. 3.
- the dried tape compact is heat pressed to increase the density.
- the accommodation space does not have to be fixed to the tape molded body in a reduced pressure state. In that case, the accommodation space is opened to the atmosphere or filled with gas.
- a slurry material other than a ceramic material can be formed by the same method.
- the substrate provided with the semiconductor chip was sealed with an epoxy sheet using the decompression jig shown in the first embodiment.
- a 300 ⁇ m thick Teflon (registered trademark) sheet reinforced with glass cloth was used for the first sheet member, and a 300 ⁇ m thick double-sided mirror-polished stainless steel plate was used for the second sheet member.
- the first frame member and the second frame member are each made of an aluminum material.
- the first preliminary decompression member and the second preliminary decompression member are each made of a transparent acrylic resin.
- the first decompression member and the first preliminary decompression member, the second decompression member and the second preliminary decompression member were respectively combined, and the preliminary decompression step was performed.
- the preliminary decompression chamber was decompressed by a rotary pump, and the internal pressure was -98 kPa.
- an epoxy sheet is laminated on a substrate including a semiconductor chip, arranged on the second sheet member, and the first frame member of the first decompression member is placed on the second frame of the second decompression member via the seal member.
- the object to be pressurized was accommodated in the accommodating space.
- the housing space was evacuated by a rotary pump, and the internal pressure of the housing space was controlled in the range of ⁇ 95 to 0 kPa by a vacuum regulator.
- the preliminary decompression chamber was opened to atmospheric pressure, the object to be pressurized was fixed, and the pressure was applied to the pressing step.
- the object to be pressed was pressed by a uniaxial hot press apparatus equipped with a press hot plate capable of being pressed.
- the temperature is preferably 40 to 200 ° C., and in this embodiment, 120 ° C.
- the pressing pressure is preferably 100 to 3000 kPa, and in this embodiment, 500 kPa. If the press pressurizing time is too short, sufficient sealing cannot be achieved, and if it is too long, the productivity is lowered. Therefore, 1 to 60 seconds is preferable, and in this example, 5 seconds was used.
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Abstract
Description
また、本発明は以下の詳細な説明により更に完全に理解できるであろう。しかしながら、詳細な説明および特定の実施例は、本発明の望ましい実施の形態であり、説明の目的のためにのみ記載されているものである。この詳細な説明から、種々の変更、改変が、当業者にとって明らかだからである。
出願人は、記載された実施の形態のいずれをも公衆に献上する意図はなく、開示された改変、代替案のうち、特許請求の範囲内に文言上含まれないかもしれないものも、均等論下での発明の一部とする。
本明細書あるいは請求の範囲の記載において、名詞及び同様な指示語の使用は、特に指示されない限り、または文脈によって明瞭に否定されない限り、単数および複数の両方を含むものと解釈すべきである。本明細書中で提供されたいずれの例示または例示的な用語(例えば、「等」)の使用も、単に本発明を説明し易くするという意図であるに過ぎず、特に請求の範囲に記載しない限り本発明の範囲に制限を加えるものではない。
本発明に係る被加圧物を収容空間に配置して当該収容空間を減圧する減圧治具と、この減圧治具を用いた被加圧物の加圧方法について、図を参照して説明する。
図9に示すように、第2減圧部材20は、平板状の部材として形成してもよい。これによれば、簡単な構造にすることができるとともに、被加圧物Wを保持する領域の剛性が高いため、被加圧物Wを安定して保持することができるので、例えば、スラリー成形体など被加圧物Wの強度が弱い場合に好適に用いることができる。さらに、平板状の部材で形成された第2減圧部材20は、強度の弱い被加圧物Wを第2減圧部材20上に載置するのにも好適である。なお、加圧工程で加熱または冷却を行う場合には、図3に示す構造の方が熱容量を小さくすることができるので、迅速な加熱または冷却を行うことができる。
本発明に係る被加圧物減圧治具の第2実施形態について、図を参照して説明する。ここで、第1実施形態と同様の構成については、同じ符号を用い、説明を省略する。なお、図10(A)の断面図及び図11(A)の断面図においては、構造をわかりやすくするために、部材の一部を誇張して大きく記載してある。
図12に示すように、第1シート部材12の被加圧物Wの反対側に、第1シート部材12より剛性が高い材料からなり、矩形の板状に形成された剛性付与部材70を設けることができる。剛性付与部材70は、被加圧物Wを収容する位置に対応し、加圧可能な位置に配置され、被加圧物Wの外形より大きな寸法に形成される。剛性付与部材70を形成する材料として、金属材料、特に、ステンレス鋼を好適に用いることができる。
本実施形態の減圧治具1及び被加圧物の加圧方法によれば、収容空間Sに被加圧物Wを配置し、予備減圧室Yを排気して減圧した後に収容空間Sを排気することにより、被加圧物Wが第1シート部材から加圧力を受けず、第1シート部材が被加圧物Wに密着しない状態で収容空間Sの排気を行うことができる。また、第1シート部材12は可撓性を有しているので、第1シート部材12を収容空間Sに配置された被加圧物Wに密着させて被加圧物Wを固定することができる。これにより、収容空間Sが十分に減圧された後に、被加圧物Wの加圧を行うことができるため、被加圧物Wに気泡などが残存し、ボイドなどの欠陥が生じることを防ぐことができる。また、被加圧物Wが、収容空間Sの減圧が完了するまで加圧力を負荷したくない材料にも好適に用いることができる。
本発明の減圧治具1は、下記工程に示すセラミック材料の成形工程に用いることもできる。
1.スラリー状セラミック材料をテープ成形して、テープ成形体を得る。
2.減圧治具を用い、テープ成形体を減圧下で加熱乾燥させる。これにより、乾燥時間を短縮することができる。
3.予備減圧室を大気に開放して予備減圧部材を取り外す。
4.乾燥したテープ成形体を熱加圧して高密度化を行う。なお、このとき、収容空間は減圧状態でテープ成形体を固定していなくてもよく、その場合収容空間は大気に開放するかガス封入を行う。
10…第1減圧部材(第1の減圧部材)
11…第1枠状部材(第1の枠状部材)
12…第1シート部材(第1のシート部材)
14…排気ポート
15…排気路
20…第2減圧部材(第2の減圧部材)
21…第2枠状部材(第2の枠状部材)
22…第2シート部材(第2のシート部材)
24…排気ポート
25…排気路
30…シール部材
40…第1予備減圧部材(第1の予備減圧部材)
41…本体部
42…スペーサー
50…第2予備減圧部材(第2の予備減圧部材)
60…収容空間形成部材
61…位置決め部材
70…剛性付与部材
S…収容空間
S2…第2収容空間(第2の収容空間)
W…被加圧物
H…流路空間
Claims (9)
- 加圧処理を行う被加圧物を加圧手段により加圧するために、被加圧物が収容される収容空間を減圧する減圧治具であって、
枠状に形成された第1の枠状部材と該第1の枠状部材に張り渡される第1のシート部材とを備えた第1の減圧部材と、
前記第1の減圧部材に対向して配置され、前記第1の減圧部材との間に前記被加圧物を収容する保持部材と、
前記第1の枠状部材と前記保持部材との間に配置され、前記第1の減圧部材と前記保持部材との間の空間を気密状態に区画し、前記被加圧物を収容可能な収容空間を形成するシール部材と、
第1の減圧部材に対向して前記保持部材の反対側に配置され、前記第1のシート部材との間に予備減圧室を形成し、前記予備減圧室を減圧可能に構成されている第1の予備減圧部材と、を備えたことを特徴とする
減圧治具。 - 前記保持部材は、前記第1の枠状部材と対向して配置される枠状に形成された第2の枠状部材と該第2の枠状部材に張り渡される第2のシート部材とを備えた第2の減圧部材であり、
前記第2の減圧部材に対向して前記第1の減圧部材の反対側に配置され、前記第2のシート部材との間に予備減圧室を形成し、前記予備減圧室内部を減圧可能に構成されている第2の予備減圧部材を備えたことを特徴とする
請求項1に記載の減圧治具。 - 前記第1の予備減圧部材又は第2の予備減圧部材は、前記予備減圧室内部に向かって形成されたスペーサーを備えたことを特徴とする
請求項1または請求項2に記載の減圧治具。 - 前記保持部材に配置された板状部材であって、
前記収容空間を、被加圧物を収容する第2の収容空間と、第2の収容空間と排気手段とを連通する流路空間と、に区画する収容空間形成部材を備えたことを特徴とする
請求項1または請求項2に記載の減圧治具。 - 前記保持部材に配置された枠状の板状部材であって、
前記被加圧物の位置決めを行う位置決め部材を備えたことを特徴とする
請求項4に記載の減圧治具。 - 前記被加圧物は、半導体チップを備える基板及び半導体チップ封止用材料であることを特徴とする
請求項1または請求項2に記載の減圧治具。 - 請求項1または請求項2に記載の減圧治具と、被加圧物と、を用意し、
前記予備減圧室を排気して減圧する予備減圧工程と、
前記収容空間に前記被加圧物を配置する配置工程と、
前記収容空間を排気し、被加圧物が前記第1のシート部材から加圧力を受けない範囲で減圧する減圧工程と、
前記予備減圧室を大気圧に開放することにより、前記第1のシート部材を前記収容空間に配置された被加圧物に密着させて被加圧物を固定する固定工程と、
前記予備減圧部材を前記減圧部材から取り外し、固定された被加圧物を加圧する加圧工程と、を備えたことを特徴とする
被加圧物の加圧方法。 - 前記予備減圧室を減圧する内圧は、前記収容空間を減圧する内圧以下であることを特徴とする
請求項7に記載の被加圧物の加圧方法。 - 前記加圧工程において、前記固定工程における被加圧物を固定する加圧力により、被加圧物を加圧することを特徴とする
請求項7記載の被加圧物の加圧方法。
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KR1020157003062A KR20150066513A (ko) | 2012-10-12 | 2013-09-13 | 감압 지그 및 감압 지그를 이용한 피가압물의 가압 방법 |
US14/419,560 US20150217529A1 (en) | 2012-10-12 | 2013-09-13 | Decompressing jig and a method for applying pressure on a workpiece by using the decompressing jig |
CN201380041442.4A CN104520977B (zh) | 2012-10-12 | 2013-09-13 | 减压夹具以及使用减压夹具的被加压物的加压方法 |
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- 2013-09-13 WO PCT/JP2013/074891 patent/WO2014057769A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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US20150217529A1 (en) | 2015-08-06 |
KR20150066513A (ko) | 2015-06-16 |
JPWO2014057769A1 (ja) | 2016-09-05 |
CN104520977A (zh) | 2015-04-15 |
CN104520977B (zh) | 2018-05-18 |
JP6269496B2 (ja) | 2018-01-31 |
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