WO2013147052A1 - 放電ランプを備えた照明装置 - Google Patents

放電ランプを備えた照明装置 Download PDF

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Publication number
WO2013147052A1
WO2013147052A1 PCT/JP2013/059327 JP2013059327W WO2013147052A1 WO 2013147052 A1 WO2013147052 A1 WO 2013147052A1 JP 2013059327 W JP2013059327 W JP 2013059327W WO 2013147052 A1 WO2013147052 A1 WO 2013147052A1
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Prior art keywords
illuminance
power
discharge lamp
discharge lamps
discharge
Prior art date
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PCT/JP2013/059327
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English (en)
French (fr)
Japanese (ja)
Inventor
金井　信夫
英治 木村
昭芳 藤森
三井　勝
Original Assignee
株式会社オーク製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社オーク製作所 filed Critical 株式会社オーク製作所
Priority to CN201380013424.5A priority Critical patent/CN104185894B/zh
Priority to KR1020147025390A priority patent/KR102087457B1/ko
Publication of WO2013147052A1 publication Critical patent/WO2013147052A1/ja

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/26—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc
    • H05B41/28—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters
    • H05B41/288—Circuit arrangements in which the lamp is fed by power derived from dc by means of a converter, e.g. by high-voltage dc using static converters with semiconductor devices and specially adapted for lamps without preheating electrodes, e.g. for high-intensity discharge lamps, high-pressure mercury or sodium lamps or low-pressure sodium lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose

Definitions

  • the present invention relates to an illuminating device used for an exposure apparatus or the like, and more particularly to lighting at a constant illuminance of an illuminating device provided with a discharge lamp.
  • a discharge lamp is generally used as a light source for exposing a substrate, and recently, a multi-lighting type illumination apparatus having a plurality of discharge lamps is used.
  • a multi-lighting type illumination apparatus having a plurality of discharge lamps is used.
  • constant illuminance lighting is performed to illuminate the substrate uniformly with a constant illuminance.
  • an illuminometer that measures the illuminance of the discharge lamp is provided in the exposure apparatus, detects the illuminance before the exposure operation, and adjusts the output of the discharge lamp so that the illuminance on the substrate matches the target illuminance value.
  • an illuminometer that measures the illuminance of the discharge lamp is provided in the exposure apparatus, detects the illuminance before the exposure operation, and adjusts the output of the discharge lamp so that the illuminance on the substrate matches the target illuminance value.
  • the lamp illuminance changes irregularly depending on the halogen cycle.
  • this halogen cycle is also affected by the lamp temperature, the lamp illuminance follows a more unstable locus.
  • the illumination light emitted from a plurality of discharge lamps is detected by a single illuminance detection unit and power adjustment is performed for a plurality of discharge lamps at once, the illuminance change condition of each lamp is individually different, The detected illuminance follows a very unstable trajectory.
  • the illuminating device of the present invention can be installed in an exposure apparatus or the like, and a plurality of discharge lamps, an illuminance detecting unit that detects the illuminance of illumination light emitted from the plurality of discharge lamps, and the illuminance of the detected discharge lamp. And an illuminance controller that adjusts input power to the plurality of discharge lamps.
  • the illuminance detection unit may be composed of a plurality of illuminance detection sensors or the like so as to detect the illuminance of each of the plurality of discharge lamps. Furthermore, each discharge lamp to which one illuminance detection unit is assigned can be configured from a plurality of lamp groups. In any case, the illuminance control unit can perform power adjustment on a plurality of discharge lamps in a batch rather than separately.
  • the illuminance control unit is determined between the allowable threshold value and the reference illuminance value for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on the reference illuminance value among the plurality of discharge lamps.
  • the power is adjusted so that the illuminance changes toward a threshold value (here, referred to as a robust threshold value).
  • the standard illuminance value is a reference illuminance value capable of obtaining the most appropriate exposure amount, and is determined by the sensitivity characteristics of the photosensitive material, the characteristics of the discharge lamp, and the like.
  • the allowable threshold indicates the limit value of the illuminance range that can be exposed and follows the sensitivity characteristic of the photosensitive material.
  • the robust threshold value indicates a threshold value within a range in which stable illuminance can be secured for exposure even if there is a difference in illuminance from the reference illuminance value, and follows the characteristics of the discharge lamp, the photosensitive material, and the like.
  • the control of “changing illuminance toward a robust threshold” can be realized by various control methods, and feedback, feedforward control, and the like can be applied.
  • the control target value can be set as the robust threshold value, or the vicinity of the robust threshold value can be set as the illuminance target range. What is necessary is just to perform electric power adjustment suitably in the range which is not controlled toward a reference
  • the illuminance control unit can adjust the power according to a predetermined amount of power change per unit time. By taking time for the power change, the illuminance change becomes gentle. Alternatively, the illuminance control unit can instantaneously adjust the power. When the illuminance is relatively not deviated from the reference illuminance value, the constant illuminance lighting control can be completed quickly.
  • the illuminance control unit adjusts the power over a predetermined adjustment time so that the illuminance changes toward the robust threshold for the main adjustment discharge lamp having the largest illuminance difference from the allowable threshold.
  • the illuminance control unit can adjust the power within the adjustment time of the main adjustment discharge lamp with respect to the discharge lamp that is determined to require power adjustment among other discharge lamps.
  • the illuminance control unit adjusts the power over the discharge lamps determined to require power adjustment among other discharge lamps over the same time as the adjustment time of the main adjustment discharge lamp. It is possible. An unstable change in illuminance can be suppressed by ensuring a sufficient power adjustment time for a discharge lamp having a relatively small illuminance difference, or by suppressing the amount of power change per unit time.
  • the illuminance control unit can prevent power adjustment for a discharge lamp having an illuminance value equal to or less than an allowable threshold among other discharge lamps.
  • the illuminance control unit can also adjust the power so that the illuminance value falls below the allowable threshold for discharge lamps having an illuminance value exceeding the allowable threshold among other discharge lamps.
  • the illuminance control unit can adjust the power so that the illuminance changes toward the reference illuminance value with respect to a discharge lamp having an illuminance at least equal to or less than the robust threshold among other discharge lamps.
  • the illuminance control unit adjusts the power of the other discharge lamps determined to require power adjustment by the same amount of power change as the power change amount per unit time determined in advance in the main adjustment discharge lamp. It is possible.
  • the illuminance control unit can perform power adjustment for a plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
  • the lighting device adjusts the input power to the plurality of discharge lamps based on the discharge lamp, the illuminance detection unit that detects the illuminance of the illumination light emitted from the discharge lamp, and the detected illuminance of the discharge lamp.
  • the illuminance control unit performs power adjustment on the plurality of discharge lamps when the exposure is on standby and the exposure standby time is longer than the exposure period.
  • the lighting device it is possible to provide a light source unit that houses a predetermined number (one or a plurality) of discharge lamps.
  • the light source unit is discharged in a state in which the discharge lamp penetrates through a reflector disposed around each discharge lamp, a fan disposed on the opposite side of the discharge lamp of the unit housing, and a partition formed in the light source unit.
  • a lamp holding portion for holding the lamp.
  • the lighting device includes a light source unit that stores a predetermined number (one or more) of discharge lamps, and the light source unit includes a reflector disposed around each discharge lamp and a discharge lamp on the opposite side of the unit housing. And a lamp holder that holds the discharge lamp in a state where the discharge lamp penetrates the partition formed in the light source unit, and the lamp holder is formed with the partition interposed therebetween.
  • a vent hole is provided for communicating the discharge lamp side space and the fan side space.
  • An exposure apparatus includes an illuminance detection unit that detects an illuminance of illumination light emitted from each of the plurality of discharge lamps, and an input to the plurality of discharge lamps based on the detected illuminance of each discharge lamp.
  • the illuminance control means functions so as to adjust the power so that the illuminance changes toward a robust threshold defined between the two.
  • An illumination method detects the illuminance of illumination light emitted from each of the plurality of discharge lamps, and adjusts input power to the plurality of discharge lamps based on the detected illuminance of each discharge lamp.
  • a lighting method for a discharge lamp having an illuminance value that exceeds an allowable threshold value determined based on a reference illuminance value among a plurality of discharge lamps, with a robust threshold value defined between the allowable threshold value and the reference illuminance value Adjust the power so that the illuminance changes.
  • FIG. 1 is a perspective view schematically showing an exposure apparatus according to the first embodiment.
  • An exposure apparatus (drawing apparatus) 10 is an exposure apparatus that forms a pattern by projecting illumination light onto a substrate SW on which a photosensitive material such as a photoresist is applied or pasted, and includes a gate-like structure 12 and a base 14.
  • An XY stage drive mechanism (not shown here) that supports the drawing table 18 is mounted on the base 14, and a substrate SW is placed on the drawing table 18.
  • the drawing apparatus 10 includes an exposure control unit (not shown here), and an exposure operation is executed and controlled by the drawing control unit.
  • the gate-like structure 12 is provided with an exposure head 20 that forms a pattern on the surface of the substrate SW, and is attached to a support member (not shown).
  • an illumination device 16 is disposed on the gate-shaped structure 12.
  • the illumination light emitted from the illumination device 16 is guided to the exposure head 20 via an illumination optical system (not shown).
  • the exposure head 20 includes a DMD (Digital Micro-mirror Device), and minute rectangular micromirrors are two-dimensionally arranged in a matrix. Each micromirror is ON / OFF controlled based on drawing data.
  • DMD Digital Micro-mirror Device
  • each micromirror is ON / OFF controlled at a predetermined exposure pitch.
  • FIG. 2 is a diagram showing components of the lighting device.
  • FIG. 3 is a diagram schematically showing the internal configuration of the light source unit. The lighting device will be described with reference to FIGS.
  • the illumination device 16 includes a light source unit 19 provided with two short arc discharge lamps 32A and 32B (hereinafter referred to as a first discharge lamp and a second discharge lamp).
  • a first discharge lamp and a second discharge lamp are short arc discharge lamps 32A and 32B.
  • an ultrahigh pressure mercury lamp in which a mercury amount of 0.15 (mg / mm 3 ) or more is enclosed is used as a discharge lamp.
  • Reflectors 34A and 34B serving as reflectors are disposed around the first and second discharge lamps 32A and 32B.
  • the first and second discharge lamps 32A and 32B are located near one focal point of the reflectors 34A and 34B, respectively.
  • the illumination optical system 35 is located at the other focal point of the reflectors 34A and 34B on the optical path. Therefore, the illumination light emitted from the first and second discharge lamps 32A and 32B is condensed on the illumination optical system 35 by the reflection of the elliptical mirrors 34A and 34B via the folding mirror 33.
  • the illumination light emitted from each of the first and second discharge lamps 32A and 32B is synthesized by an illumination optical system 35 such as a fly-eye lens and becomes illumination light having a uniform intensity and a spatially uniform light beam. .
  • the light emitted from the illumination optical system 35 is corrected to parallel light by the folding mirror 36 and guided in the direction of the DMD provided in the exposure head 20.
  • the light source unit 19 has an internal structure in which first and second discharge lamps 32A and 32B are arranged in parallel in a housing 19H, and internal spaces 19S1 and 19S2 are partitioned by a partition wall 45. .
  • the first and second discharge lamps 32A and 32B are arranged such that the light emission direction faces the opening of the housing 19H.
  • the partition wall 45 is formed with through holes for allowing the first and second discharge lamps 32A and 32B to pass therethrough.
  • the holding portions 17A and 17B attached and fixed to the partition wall 45 project rearward from the through holes. The first and second discharge lamps 32A and 32B are held.
  • An exhaust fan 19A is attached to the rear portion (here, the rear end surface) of the housing 19H.
  • the exhaust fan 19A may be disposed on the rear side surface of the housing 19H.
  • air flows in the light emission direction or through the vent 19D of the housing 19H, and passes through the gap between the reflectors 34A, 34B and the discharge lamps 32A, 32B and the through hole of the partition wall 45.
  • the air on the discharge lamp side flows into the space 19S2 in the housing 19H.
  • vent holes 47A and 47B are formed along the partition wall surface direction.
  • the exhaust fan 19A rotates, air flows through the vents 47A and 47B to the fan side.
  • cooling air hits the entire bottom surface of the holding portions 17A and 17B, and turbulence is generated.
  • there is no bias in heat discharge of the discharge lamp and the entire discharge lamp can be cooled uniformly. This results in a uniform lamp life.
  • FIG. 4 is a block diagram of a control unit related to the lighting device.
  • the controller 42 controls the illumination operation during the exposure operation, and adjusts the illuminance of the illumination light of each of the first and second discharge lamps 32A and 32B and the illuminance of the entire illumination light irradiated on the substrate SW.
  • the ROM of the control unit 42 stores a program related to lighting control in advance.
  • the lamp power supplies 44A and 44B supply power to the first and second discharge lamps 32A and 32B, respectively.
  • the illuminance meters 46A and 46B detect the illuminance of the illumination light emitted from the first and second discharge lamps 32A and 32B, respectively.
  • the controller 42 starts supplying power to the first and second discharge lamps 32A and 32B. Then, the supplied power is adjusted and controlled based on the supplied power value and the detected illuminance value.
  • the first and second discharge lamps 32A and 32B may be configured as a lamp group including a plurality of lamps, respectively, and power adjustment may be performed collectively for each lamp group.
  • the illuminance meters 46A and 46B detect the illuminance of illumination light emitted from each lamp group corresponding to the first and second discharge lamps 32A and 32B, respectively.
  • FIG. 5 is a flowchart showing constant illuminance lighting control executed in the control unit.
  • FIG. 6 is a diagram illustrating a change in illuminance due to power adjustment. The constant illuminance lighting control will be described with reference to FIGS.
  • the illuminance of each discharge lamp 32A, 32B is measured to adjust the illuminance before the exposure starts (S101, S104). Then, it is determined whether or not the measured illuminance is illuminance that requires power adjustment (S105).
  • a reference illuminance value RL suitable for exposure is determined according to the sensitivity of the photosensitive material formed on the substrate surface.
  • two threshold values TN and TM are set.
  • Threshold values TM1 and TM2 represent an upper limit value and a lower limit value of an illuminance range that can be exposed even if there is an illuminance difference from the reference illuminance value RL (hereinafter referred to as an allowable threshold value).
  • the allowable illuminance values TM1 and TM2 are determined according to the light intensity of the discharge lamp, the photosensitive characteristics of the photosensitive material, the required pattern resolution, and the like.
  • TM1 and TM2 may be simply referred to as an allowable threshold value TM.
  • TN1 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM1
  • TN2 is a threshold value determined between the reference illuminance value RL and the allowable threshold value TM2.
  • the threshold values TN1 and TN2 are set in order to perform power adjustment that can realize a stable illuminance change (hereinafter referred to as a robust threshold value).
  • TN1 and TN2 may be simply referred to as a robust threshold value TN.
  • the temperature of the discharge lamp does not change immediately due to power fluctuation, and there is a time lag until the effect of power fluctuation appears as illuminance. Further, in the case of a discharge lamp in which a halogen substance such as mercury is enclosed, irregular illuminance fluctuations occur due to the halogen cycle, and the halogen cycle also fluctuates due to a change in lamp temperature.
  • the illuminance that changes due to various factors changes in an unstable manner, and even if the power is changed substantially linearly, the illuminance fluctuation becomes irregular and there is a wobble. Therefore, it is difficult to predict the change in illuminance according to the amount of power fluctuation and incorporate this into the control.
  • a robust threshold value TN is set as follows. The robust threshold value TN is determined according to empirical and / or qualitative theory according to the characteristics of the discharge lamp used.
  • the measured illuminance value is within the range between the robust threshold value TN and the allowable threshold value TM or less than or equal to the robust threshold value TN, if the power adjustment is performed, there is a high possibility that the fluctuation width of the illuminance fluctuation exceeds the allowable threshold value TM. . Even if the power fluctuation is not performed, the illuminance value is equal to or smaller than the allowable threshold value TM, so that the exposure is not affected.
  • step S105 it is determined whether or not to change the power depending on whether or not the measured illuminance value exceeds the allowable threshold value TM. The same determination is made when the illuminance value is smaller than the reference illuminance value RL. If there is a discharge lamp whose measured illuminance value exceeds the allowable threshold value TM, power adjustment is performed in step S106.
  • step S106 power is increased or decreased with the robust threshold TN as a target value, and the power is changed substantially linearly over a predetermined time J.
  • the amount of power change per unit time is determined according to the difference between the robust threshold value TN and the measured illuminance value.
  • the predetermined time J is determined by determining the amount of change.
  • FIG. 6 shows the measured illuminance value P1 of the discharge lamp 32A and illuminance value P2 of the discharge lamp 32B.
  • the illuminance of the discharge lamp 32A deviates from the allowable threshold value TM due to a change over time.
  • the illuminance of the discharge lamp 32B has an illuminance difference that exceeds the robust threshold TN with respect to the reference illuminance value RL, but the difference is within the allowable threshold TM.
  • power adjustment (power reduction in FIG. 6) is performed over a predetermined time J so that the illuminance changes toward the robust threshold TN for the discharge lamp 32A.
  • power adjustment for the discharge lamp 32B is not performed. The same applies to the case where the illuminance value of the discharge lamp 32B is equal to or less than the robust threshold value TN as indicated by the broken line P '.
  • FIG. 6 shows the illuminance fluctuation caused by the power drop. Irregular illuminance changes to some extent, but the fluctuation range of illuminance is relatively small because the robust threshold value TN is set as a target value and the electric power is changed at a constant change rate over a predetermined time J. Therefore, the illuminance value after power adjustment does not transiently exceed the reference illuminance value RL or exceed the allowable threshold value TM.
  • the change in illuminance of the discharge lamp 32A shown in FIG. 6 is an example, and the change in illuminance varies depending on the usage conditions and the like. However, any illuminance change does not exceed the allowable threshold TM during the illuminance change process.
  • step S105 When power adjustment is performed for a predetermined time J in order to perform feedback control, the process returns to step S105 again to perform power adjustment. Then, the power adjustment is continued until both the illuminances of the discharge lamps 32A and 32B are equal to or less than the allowable threshold value TM (S105, S106).
  • the power adjustment is not performed until the end of exposure (S107).
  • the exposure period varies depending on the use status of the exposure apparatus, such as an operation period for continuously manufacturing one substrate or the same type of substrate.
  • a standby state is entered until the next exposure operation is started (S101).
  • the illuminance of the discharge lamps 32A and 32B is measured, and it is determined whether or not the measured illuminance of each discharge lamp exceeds the allowable threshold TM. Is done. If it is determined that the allowable threshold value TM is exceeded, the power adjustment is performed over a predetermined time J in accordance with the determined power change amount per unit time.
  • the power adjustment is not limited to directly adjusting the lamp input power itself, but can be adjusted by the current value.
  • the allowable threshold value and the robust threshold value may be set as appropriate in consideration of usage conditions and the like. And about illumination intensity measurement, you may measure the illumination intensity of two discharge lamps with one illumination meter.
  • the robust threshold value may not be directly set as the target value, and parameter control may be performed so that the change in illuminance occurs toward the robust threshold value (not aiming at the reference illuminance value).
  • the power fluctuation is adjusted instantaneously.
  • “instantaneous” means that the power is adjusted in a period of less than a few seconds regardless of a predetermined amount of power change per unit time.
  • Other configurations are substantially the same as those in the first embodiment.
  • FIG. 7 is a diagram showing a change in illuminance due to power adjustment in the second embodiment.
  • the power is instantaneously changed for the discharge lamp that needs to be adjusted.
  • This power change is performed in a very short time.
  • the illuminance fluctuation range is increased to some extent, the illuminance is decreased toward the robust threshold, so that the illuminance change that exceeds the allowable threshold TM does not occur even if there is an irregular illuminance change.
  • the power adjustment can be completed in a short time for a discharge lamp having a large illuminance difference.
  • FIG. 8 is a flowchart showing constant illuminance lighting control in the third embodiment.
  • FIG. 9 is a diagram showing a change in illuminance due to power adjustment in the third embodiment.
  • the same parts as those in the first embodiment such as processing in the exposure standby state are omitted.
  • five discharge lamps and illuminance meters are arranged.
  • each discharge lamp When the illuminance of each discharge lamp is measured (S201), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S202). When there is a discharge lamp having an illuminance value exceeding the allowable threshold value TM, it is determined whether or not there is a lamp having an illuminance value larger than the robust threshold value TN (S203).
  • FIG. 9 shows measured illuminance values P1 to P5 for five discharge lamps.
  • a discharge lamp having illuminance values P1 and P5 power adjustment similar to that of the first embodiment is performed. That is, the power is varied using the robust threshold value TN as a target value.
  • the predetermined period J in which the power adjustment is performed that is, the amount of power change per unit time is determined based on the discharge lamp having the illuminance value P1 having the largest illuminance difference.
  • the amount of power change per unit time for the discharge lamp having the illuminance value P5 is determined according to the predetermined time J previously determined. Therefore, the amount of power change in the discharge lamp with the illuminance value P5 is smaller than the amount of power fluctuation for the discharge lamp with the illuminance value P1. As a result, the illuminance change is also relatively gradual.
  • the illuminance value is on the reference illuminance value RL side from the allowable threshold value TM, but the power adjustment is performed on the discharge lamps P2 and P4 that are on the allowable threshold value TM side from the robust threshold value TN.
  • the power change amount per unit time is determined according to the predetermined time J previously determined, and the power is changed according to the gradual power change amount. The power adjustment is not performed for the discharge lamp having the illuminance value P3.
  • the power change amount becomes more gradual and the illuminance fluctuation also becomes gradual.
  • the illuminance value of each discharge lamp approaches the reference illuminance value by power adjustment, it is not necessary to make a large power change at the next constant illuminance lighting control.
  • the fourth embodiment when there are a plurality of discharge lamps whose illuminance value exceeds the allowable threshold value, the illuminance is gradually changed except for the discharge lamp having the maximum illuminance difference.
  • the illuminance is gradually changed except for the discharge lamp having the maximum illuminance difference.
  • it is substantially the same as 1st Embodiment.
  • FIG. 10 is a flowchart showing constant illuminance lighting control in the fourth embodiment.
  • FIG. 11 is a diagram showing a change in illuminance due to power adjustment in the fourth embodiment. Here, it is assumed that four discharge lamps are arranged.
  • each discharge lamp When the illuminance of each discharge lamp is measured (S301), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S302). When there is no discharge lamp having an illuminance value exceeding the allowable threshold value TM, power adjustment is not performed.
  • the same power adjustment as in the first embodiment is performed on the discharge lamp having the illuminance value P1 having the maximum illuminance difference.
  • power adjustment is performed over a predetermined time J so that the illuminance falls within the allowable threshold value TM without setting the robust threshold value TM as a target ( S305).
  • the power change amount per unit time at this time is set to a relatively small change amount. Therefore, the power fluctuation amount is sufficiently smaller than a value set with the robust threshold value TN as a target. As a result, the change in illuminance of the discharge lamp having the illuminance value P4 is very gradual compared to the discharge lamp having the illuminance value P1.
  • the power adjustment can be completed in a short period of time by giving the illuminance fluctuation range to only one discharge lamp and making the illuminance change gentle otherwise.
  • FIG. 12 is a flowchart showing constant illuminance lighting control in the fifth embodiment.
  • FIG. 13 is a diagram illustrating a change in illuminance due to power adjustment in the fifth embodiment. Here, it is assumed that three discharge lamps are arranged.
  • each discharge lamp When the illuminance of each discharge lamp is measured (S401), it is determined whether or not there is a discharge lamp having an illuminance value exceeding the allowable threshold TM (S402). When there is a discharge lamp having an illuminance value exceeding the allowable threshold TM, it is determined whether or not there is a lamp exceeding the robust threshold TN for the remaining discharge lamps (S403). If there is a lamp exceeding the robust threshold TN, power adjustment is performed toward the robust threshold TN (S404).
  • FIG. 13 shows changes in illuminance for the discharge lamps having illuminance values P1, P2, and P3.
  • the power adjustment is performed for any of the discharge lamps, and the illuminance change becomes gentler as the illuminance difference from the reference illuminance value becomes smaller.
  • FIG. 14 is a diagram showing a change in illuminance due to power adjustment in the sixth embodiment.
  • the power adjustment is performed over a predetermined period J based on a predetermined amount of power change per unit time for the discharge lamp with illuminance P1. At the same time, power adjustment is performed on the discharge lamps with illuminances P2 and P3 according to the same amount of power change.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
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PCT/JP2013/059327 2012-03-29 2013-03-28 放電ランプを備えた照明装置 WO2013147052A1 (ja)

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WO2019111769A1 (ja) * 2017-12-08 2019-06-13 フェニックス電機株式会社 ランプの点灯方法
TWI811234B (zh) * 2017-08-23 2023-08-11 日商鳳凰電機股份有限公司 光源裝置、曝光裝置、及光源裝置之判定方法

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WO2019111769A1 (ja) * 2017-12-08 2019-06-13 フェニックス電機株式会社 ランプの点灯方法
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TWI794352B (zh) * 2017-12-08 2023-03-01 日商鳳凰電機股份有限公司 燈之點亮方法
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TWI815773B (zh) * 2017-12-08 2023-09-11 日商鳳凰電機股份有限公司 燈之點亮方法

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KR20150001730A (ko) 2015-01-06
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CN104185894B (zh) 2016-10-05

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