WO2013133275A1 - 接着シート及び半導体装置の製造方法 - Google Patents

接着シート及び半導体装置の製造方法 Download PDF

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Publication number
WO2013133275A1
WO2013133275A1 PCT/JP2013/056002 JP2013056002W WO2013133275A1 WO 2013133275 A1 WO2013133275 A1 WO 2013133275A1 JP 2013056002 W JP2013056002 W JP 2013056002W WO 2013133275 A1 WO2013133275 A1 WO 2013133275A1
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Prior art keywords
adhesive layer
adhesive
semiconductor device
adhesive sheet
softening point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
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PCT/JP2013/056002
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English (en)
French (fr)
Japanese (ja)
Inventor
めぐみ 小玉
孝寛 徳安
哲郎 岩倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to KR1020147024893A priority Critical patent/KR20140126736A/ko
Priority to US14/383,227 priority patent/US9212298B2/en
Priority to KR1020197005030A priority patent/KR102067945B1/ko
Priority to KR1020177025281A priority patent/KR101953052B1/ko
Priority to KR1020207000826A priority patent/KR20200006197A/ko
Priority to CN201380012784.3A priority patent/CN104169383B/zh
Priority to KR1020167032236A priority patent/KR20160139043A/ko
Publication of WO2013133275A1 publication Critical patent/WO2013133275A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Definitions

  • the present invention relates to an adhesive sheet and a method for manufacturing a semiconductor device including a semiconductor chip with an adhesive layer using the adhesive sheet.
  • a semiconductor device using a low-viscosity adhesive film can be manufactured by the following method. First, after bonding an adhesive sheet to a semiconductor wafer, dicing is performed to separate the semiconductor wafer. Next, the obtained semiconductor chip is peeled off from the adhesive sheet (pickup process) and is pressure-bonded to the substrate or the like via an adhesive (die attach process). Next, after performing the above-described after cure (film cure process), the semiconductor chip is connected to the substrate by wire bonding.
  • the steps of laminating the semiconductor chips while bonding them with an adhesive and connecting the semiconductor chips to the substrate by wire bonding are repeated as necessary.
  • the semiconductor chips are stacked in multiple stages. Then, after all the steps of connecting by wire bonding are completed, the semiconductor chip is sealed with resin.
  • the present invention has been made to solve the above problems, and provides an adhesive sheet capable of realizing a highly reliable semiconductor device having good embedding property and pickup property while improving production efficiency. For the purpose.
  • an adhesive sheet includes (A) a high molecular weight component, (B1) a thermosetting component having a softening point of less than 50 ° C, and (B2) a softening point of 50 ° C or more.
  • a resin composition comprising a thermosetting component of 100 ° C. or less and (C) a phenol resin having a softening point of 100 ° C. or less.
  • thermosetting component Based on 100% by mass of the resin composition, (A) a high molecular weight component 11 to 22% by mass, (B1) 10 to 20% by mass of a thermosetting component having a softening point of less than 50 ° C., and (B2) 10 to 20% by mass of a thermosetting component having a softening point of 50 to 100 ° C. (C) A phenol resin having a softening point of 100 ° C. or lower is contained in an amount of 15 to 30% by mass.
  • the components (A), (B1), (B2) and (C) contained in the adhesive composition and the content thereof are specified, so that these components are mutually compatible.
  • tack strength and melt viscosity at 80 ° C. can be lowered. Therefore, good pickup properties and die bonding properties can be provided, and the reliability of the obtained semiconductor device can be improved.
  • foaming during wire bonding can be suppressed even when the after-curing time is shortened. Therefore, according to the adhesive sheet of one aspect of the present invention, it is possible to provide a semiconductor device having high reliability while improving production efficiency.
  • the adhesive layer may have a melt viscosity at 80 ° C. of 300 to 3000 Pa ⁇ s.
  • the adhesive can be sufficiently satisfactorily filled in the concave and convex portions formed on the surface of the substrate or the like in the die bonding step. Therefore, the adhesiveness between the substrate and the semiconductor chip can be enhanced, and the reliability of the semiconductor device can be further enhanced.
  • a manufacturing method of a semiconductor device is a manufacturing method of a semiconductor device including a semiconductor chip with an adhesive layer using the adhesive sheet, and after the semiconductor chip with an adhesive layer is pressure-bonded to a circuit board, A film curing process for heating the adhesive layer at 110 to 125 ° C. for 0.5 to 1 hour, and electrically connecting the semiconductor chip with the adhesive layer and the circuit board at 230 ° C. or less via bonding wires. And a wire bonding process.
  • the after-curing time is shorter than when a conventional adhesive sheet is used, and the production efficiency of the semiconductor device can be increased.
  • an adhesive sheet capable of realizing a semiconductor device having good embedding property and pickup property and high reliability while improving production efficiency.
  • FIG. 3 is a cross-sectional view showing a step that follows FIG. 2.
  • FIG. 4 is a cross-sectional view showing a step that follows FIG. 3.
  • FIG. 1 is a schematic cross-sectional view of an adhesive sheet according to the first embodiment.
  • the adhesive sheet 1 has a configuration in which an adhesive layer 4 is laminated on a base material 2.
  • the adhesive sheet 1 is attached to the back surface of the circuit surface of the semiconductor wafer in the laminating process when the semiconductor device is manufactured.
  • the melt viscosity at 80 ° C. of the adhesive layer 4 is 300 to 3000 Pa ⁇ s, preferably 500 to 2900 Pa ⁇ s, more preferably 1000 to 2800 Pa ⁇ s, and more preferably 1000 to 2000 Pa ⁇ s. It is more preferable that the pressure is 1000 to 1500 Pa ⁇ s.
  • the melt viscosity can be measured using, for example, a rotary viscoelasticity measuring device.
  • the tack strength of the adhesive layer 4 is preferably 0 to 1000 gf at 30 ° C., and more preferably 0 to 500 gf.
  • the tack strength is a value measured by the probe method. Specifically, the adhesive layer of the adhesive sheet is attached to a parallel glass plate with a double-sided tape, and the base film is peeled from the adhesive sheet. And it put on the 30 degreeC hotplate, the probe was pressed on the surface of the adhesive bond layer on the following conditions, and it was set as the value which measured the intensity
  • the thickness of the adhesive layer 4 is preferably 5 to 150 ⁇ m, and more preferably 20 to 60 ⁇ m. If the thickness is less than 5 ⁇ m, the stress relaxation effect and adhesiveness tend to be poor, and if it exceeds 150 ⁇ m, it is not economical.
  • the adhesive layer 4 includes (A) a high molecular weight component, (B1) a thermosetting component having a softening point of less than 50 ° C., (B2) a thermosetting component having a softening point of 50 ° C. or more and 100 ° C. or less, C) A resin composition containing a phenol resin having a softening point of 100 ° C. or lower.
  • B1 a thermosetting component having a softening point of less than 50 ° C.
  • B2 a thermosetting component having a softening point of 50 ° C. or more and 100 ° C. or less
  • C A resin composition containing a phenol resin having a softening point of 100 ° C. or lower.
  • the high molecular weight component (hereinafter simply referred to as “(A) component”) has a crosslinkable functional group, for example, a polyimide resin having a crosslinkable functional group, ) Acrylic copolymers, urethane resins, polyphenylene ether resins, polyetherimide resins, phenoxy resins, modified polyphenylene ether resins and the like. Among these, (meth) acrylic copolymers having a crosslinkable functional group are preferred. These (A) components may be used individually by 1 type, or may be used in combination of 2 or more type.
  • the crosslinkable functional group may be present in the polymer chain or at the end of the polymer chain.
  • crosslinkable functional group examples include an epoxy group, an alcoholic hydroxyl group, a phenolic hydroxyl group, and a carboxyl group.
  • an epoxy group is preferable, and an epoxy group-containing monomer such as glycidyl (meth) acrylate is used. By being used, it can be introduced into the polymer chain.
  • the component (A) is preferably an epoxy group-containing (meth) acrylic copolymer, and examples thereof include an epoxy group-containing (meth) acrylic acid ester copolymer and an epoxy group-containing acrylic rubber.
  • a containing (meth) acrylic acid ester copolymer is more preferable.
  • the acrylic rubber is mainly composed of an acrylic ester, and is a rubber made of, for example, a copolymer of butyl acrylate or ethyl acrylate and acrylonitrile.
  • the polymerization method is not particularly limited, and pearl polymerization, solution polymerization and the like can be used.
  • the glass transition temperature of component (A) is preferably ⁇ 50 to 50 ° C., and more preferably ⁇ 30 to 20 ° C.
  • the glass transition temperature of the high molecular weight component is ⁇ 50 ° C. or higher, the tackiness after being formed into a sheet film is lowered, and the handleability is improved. Also.
  • the glass transition temperature of the high molecular weight component is 50 ° C. or lower, fluidity can be secured.
  • the weight average molecular weight (hereinafter referred to as “Mw”) of the component (A) is not particularly limited, but is preferably 50,000 to 1,200,000, more preferably 100,000 to 1,200,000, and 300,000. More preferably, it is ⁇ 900,000. When the Mw of the component (A) is 50,000 or more, the film formability is good. Conversely, when the Mw of the component (A) is within 1,200,000, the fluidity increases. Mw is a value measured by gel permeation chromatography (GPC) and converted using a standard polystyrene calibration curve. The product name: L-6000 manufactured by Hitachi, Ltd.
  • THF Tetrahydrofuran
  • the content of the component (A) is 11 to 22% by mass based on 100% by mass of the resin composition.
  • the content of the component (A) is preferably 13 to 20% by mass, more preferably 15 to 18% by mass, and more preferably 15 to 17% by mass, based on 100% by mass of the resin composition. More preferably.
  • thermosetting component an epoxy resin that reacts at 150 ° C. or higher to increase the molecular weight can be preferably used, and (B1) a thermosetting component having a softening point of less than 50 ° C. (Hereinafter referred to simply as “(B1) component”) and (B2) a thermosetting component having a softening point of 50 ° C. or higher and 100 ° C. or lower (hereinafter simply referred to as “(B2) component”) Use.
  • the epoxy resin is not particularly limited as long as it is cured and has an adhesive action.
  • Bifunctional epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin and bisphenol S type epoxy resin, novolac type epoxy resins such as phenol novolac type epoxy resin and cresol novolac type epoxy resin, and the like can be used.
  • a polyfunctional epoxy resin such as a polyfunctional epoxy resin, a glycidyl amine type epoxy resin, a heterocyclic ring-containing epoxy resin, or an alicyclic epoxy resin, can be applied.
  • component (B1) for example, a novolac type epoxy resin can be preferably used.
  • component (B2) for example, a bisphenol F type epoxy resin can be preferably used.
  • the content of the component is 10 to 20% by mass based on 100% by mass of the resin composition.
  • the content of the component is 10 to 20% by mass based on 100% by mass of the resin composition.
  • a phenol resin having a softening point of 100 ° C. or lower (C) A phenol resin having a softening point of 100 ° C. or lower (hereinafter simply referred to as “component (C)”) functions as a curing agent.
  • component (C) functions as a curing agent.
  • the water absorption after introduction into a constant temperature and humidity chamber of 85 ° C. and 85% RH for 48 hours is 2% by mass or less, and the heating mass at 350 ° C. measured with a thermogravimetric analyzer (TGA). It is preferable to use a phenol resin having a reduction rate (temperature increase rate: 5 ° C./min, atmosphere: nitrogen) of less than 5% by mass.
  • a phenol resin that can be suitably used as a curing agent in the present embodiment can also be obtained as a commercial product.
  • trade names “Mirex XLC-series” and “Mirex XL-series” manufactured by Mitsui Chemicals, Inc., and “Phenolite LF-4871” manufactured by Dainippon Ink & Chemicals, Inc. may be mentioned.
  • “Millex XLC-LL” (softening point 70 ° C.) having a lower softening point is preferable because the crosslinking density at the time of curing can be controlled lower.
  • a phenol resin as an epoxy resin curing agent is also included in the curing agent.
  • component (C) is 15 to 30% by mass based on 100% by mass of the resin composition.
  • (D) Filler Although there is no restriction
  • the content of (D) filler is preferably 0 to 0.15% by mass based on 100% by mass of the resin composition.
  • alumina aluminum nitride, boron nitride, crystalline silica, or amorphous silica.
  • aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, crystalline silica aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, alumina, crystalline silica
  • it is preferable to use amorphous silica From the viewpoint of improving dicing properties, it is preferable to use alumina or silica.
  • the average particle diameter of the filler is preferably 0.005 to 2.0 ⁇ m. If the average particle size is less than 0.005 ⁇ m or exceeds 2.0 ⁇ m, the adhesiveness of the adhesive sheet may be lowered. In order to obtain good film formability and high adhesive strength, the average particle diameter of the (D) filler is more preferably 0.005 to 1.5 ⁇ m, and further preferably 0.005 to 1.0 ⁇ m. preferable.
  • the adhesive sheet 1 according to the present embodiment is more excellent in adhesion and connection reliability by further including (E) a curing accelerator or (F) a coupling agent.
  • the curing accelerator is not particularly limited.
  • Cycloamidine compounds such as nonene-5,5,6-dibutylamino-1,8-diazabicyclo [5.4.0] undecene-7 and these compounds include maleic anhydride, 1,4-benzoquinone, 2,5- Toluquinone, 1,4-naphthoquinone, 2,3-dimethylbenzoquinone, 2,6-dimethylbenzoquinone, 2,3-dimethoxy-5-methyl-1,4-benzoquinone, 2,3-dimethoxy-1,4-benzoquinone, A compound having intramolecular polarization formed by adding a quinone compound such as phenyl-1,4-benzoquinone, diazophenylmethane, a compound having a ⁇ bond such as a quinone compound such as phen
  • Organic phosphines and these phosphines have intramolecular polarization formed by adding compounds with ⁇ bonds such as maleic anhydride, quinone compounds, diazophenylmethane, phenol resins, etc.
  • Phosphorus compounds tetraphenylphosphonium tetraphenylborate, tetraphenylphosphonium ethyltriphenylborate, tetrabutylphosphonium tetrabutylborate and other tetrasubstituted phosphonium / tetrasubstituted borates, 2-ethyl-4-methylimidazole / tetraphenylborate, N- Examples thereof include tetraphenylboron salts such as methylmorpholine and tetraphenylborate and derivatives thereof.
  • curing accelerators may be used alone or in combination of two or more.
  • a hardening accelerator it is preferable that imidazoles are included.
  • the content of the curing accelerator is preferably 28 to 38% by mass based on 100% by mass of the resin composition.
  • bonding between the dissimilar materials in a resin composition can be improved by containing a coupling agent.
  • the coupling agent include silane coupling agents, titanate coupling agents, and aluminum coupling agents, and among these, silane coupling agents are preferable.
  • silane coupling agent examples include vinyltrichlorosilane, vinyltriethoxysilane, vinyltris ( ⁇ -methoxyethoxy) silane, ⁇ -methacryloxypropyltrimethoxysilane, ⁇ - (3,4-epoxycyclohexyl) ethyltri Methoxysilane, ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -glycidoxypropylmethyldimethoxysilane, vinyltriacetoxysilane, ⁇ -mercaptopropyltrimethoxysilane, ⁇ -aminopropyltrimethoxysilane, ⁇ -aminopropylmethyldimethoxy Silane, ⁇ -aminopropyltriethoxysilane, ⁇ -aminopropylmethyldiethoxysilane, ⁇ -anilinopropyltrimethoxysilane, ⁇ -anilinopropyltriethoxy
  • a varnish made of a resin composition is prepared.
  • the varnish is adjusted by mixing and kneading each component constituting the resin composition in an organic solvent.
  • the above mixing and kneading can be carried out by appropriately combining dispersers such as a normal stirrer, a raking machine, a three-roller, and a ball mill.
  • the organic solvent used for preparing the varnish is not particularly limited as long as it can uniformly dissolve, knead or disperse the components constituting the resin composition, and a conventionally known one can be used.
  • solvents include amide solvents such as dimethylformamide, dimethylacetamide, and N-methylpyrrolidone; ketone solvents such as acetone, methyl ethyl ketone, and cyclohexanone; and hydrocarbon solvents such as toluene and xylene. It is preferable to use methyl ethyl ketone and cyclohexanone because the drying speed is fast and the price is low.
  • the organic solvent is preferably used in such a range that the residual volatile content in the resin composition to be formed is 0 to 1.0% by mass based on the total mass, and the reliability decreases due to foaming of the adhesive layer 4 or the like. It is preferable to use in the range of 0 to 0.8% by mass based on the total mass.
  • each of the varnishes obtained above is uniformly coated on the base film to form a varnish layer.
  • a base film For example, a polyester film, a polypropylene film, a polyethylene terephthalate film, a polyimide film, a polyetherimide film, a polyether naphthalate film, a methylpentene film etc. are used. These substrate films may be subjected to surface treatment such as primer coating, UV treatment, corona discharge treatment, polishing treatment, and etching treatment as necessary.
  • limiting in particular in the thickness of a base film According to the thickness of the adhesive bond layer 4, and the use of the adhesive sheet 1, it selects suitably.
  • Each sheet comprising the first adhesive layer 4a and the second adhesive layer 4b is obtained by applying each varnish and drying by heating. Moreover, it is good also as an adhesive sheet comprised only by each adhesive bond layer by removing a base film after drying an adhesive bond layer.
  • the drying conditions are not particularly limited as long as the organic solvent used is sufficiently volatilized, but the heating is usually performed at 60 to 200 ° C. for 0.1 to 90 minutes.
  • the adhesive sheet 1 can be manufactured through the above steps.
  • the adhesive sheet 1 is attached to the main surface Ws of the semiconductor wafer W while being heated under pressure via the adhesive layer 4 (laminating step). . Further, the circuit surface of the semiconductor wafer W is a surface opposite to the main surface Ws.
  • the base material 2 is peeled and removed as shown in FIG.
  • the substrate 8 and ultraviolet curing are applied to the adhesive layer 4 provided on the main surface Ws of the semiconductor wafer W, as shown in FIGS. 3 (a) and 3 (b).
  • a dicing sheet 12 having a configuration in which a mold or a pressure-sensitive adhesive layer 10 is sequentially laminated is attached via the adhesive layer 10. After the dicing sheet 12 is pasted, the semiconductor wafer W and the adhesive layer 4 are diced as shown in FIG. At this time, the adhesive layer 10 may be diced together, or the base material 8 may be diced halfway together.
  • the pressure-sensitive adhesive layer 10 is cured by irradiating the pressure-sensitive adhesive layer 10 with ultraviolet rays (unnecessary in the case of the pressure-sensitive type), and the adhesive layer 4 and the pressure-sensitive adhesive layer 10 are Reduce the adhesive strength between.
  • the pressure-sensitive adhesive layer 10 and the base material 8 are peeled and removed from the adhesive layer 4 to obtain a semiconductor element 18 with an adhesive layer (pickup step).
  • the semiconductor element 18 with an adhesive layer includes a semiconductor element Wa and an adhesive layer 40.
  • the semiconductor element Wa is obtained by dividing the semiconductor wafer W, and the adhesive layer 40 is obtained by dividing the adhesive layer 4 respectively.
  • the semiconductor element 18 with the adhesive layer is bonded to the semiconductor element mounting member via the adhesive layer 40 by thermocompression bonding. 14 (die attach process).
  • the adhesive layer 40 is heated at 110 to 125 ° C. for 0.5 to 1 hour (film cure process). Subsequently, the semiconductor element Wa and the support member 14 are electrically connected at 230 ° C. or lower by wire bonding. At this time, the semiconductor element Wa, the adhesive layer 40, and the support member 14 are heated at 170 ° C. for about 15 minutes, for example. (Wire bonding process).
  • the semiconductor elements 18 are stacked in multiple stages, the above process is repeated.
  • the semiconductor element 18 with the adhesive layer is bonded to the semiconductor element Wa through the adhesive layer 40 by thermocompression bonding.
  • a plurality of semiconductor elements Wa can be mounted on the support member 14.
  • film curing and wire bonding are repeated.
  • the after-curing time must be sandwiched every time. Therefore, when the after-curing time is long, the productivity is greatly reduced.
  • the resin sealing material is formed on the surface 14a of the support member 14, the resin sealing material may be formed on the surface opposite to the surface 14a of the support member 14.
  • the semiconductor device can be manufactured using the adhesive sheet 1.
  • the adhesive sheet 1 according to this embodiment is compatible with each other.
  • tack strength and melt viscosity at 80 ° C. can be lowered. Therefore, good pickup properties and die bonding properties can be provided, and the reliability of the obtained semiconductor device can be improved.
  • foaming during wire bonding can be suppressed even when the after cure time is shortened. Therefore, according to the adhesive sheet which concerns on this invention, a semiconductor device provided with high reliability can be provided, improving production efficiency.
  • the melt viscosity of the adhesive layer at 80 ° C. is 300 to 3000 Pa ⁇ s.
  • the adhesive can be sufficiently satisfactorily filled in the concave and convex portions formed on the surface of the substrate or the like in the die bonding step. Therefore, the adhesiveness between the substrate and the semiconductor chip can be enhanced, and the reliability of the semiconductor device can be further enhanced.
  • the semiconductor chip 18 with the adhesive layer is pressure-bonded to the support member 14 and then the adhesive layer 40 is 110.
  • a film curing step of heating at 125 ° C. for 0.5 to 1 hour, and a wire bonding step of electrically connecting the semiconductor chip with an adhesive layer and the support member 14 at 230 ° C. or less via a bonding wire It is characterized by that.
  • the after-curing time is shorter than when a conventional adhesive sheet is used, and the production efficiency of the semiconductor device can be increased.
  • FIG. 5 is a schematic cross-sectional view of the semiconductor device according to the present embodiment.
  • a semiconductor device 100 shown in FIG. 5 includes a support member 14 for mounting a semiconductor element, and a plurality of (for example, two) semiconductor elements Wa provided on the support member 14.
  • the support member 14 and the semiconductor element Wa are bonded via an adhesive layer 40. Further, the semiconductor elements Wa and Wa are also bonded to each other through the adhesive layer 40.
  • the support member 14 includes a substrate 70 on which a circuit pattern 74 and terminals 76 are formed.
  • the circuit pattern 74 and the semiconductor element Wa are electrically connected by a wire 78 such as a gold wire.
  • the resin sealing material 80 is provided on the surface 14a of the support member 14, whereby the semiconductor element Wa, the adhesive layer 4, the circuit pattern 74, and the wire 78 are sealed.
  • the sealing material 80 may be provided on the surface of the support member 14 opposite to the surface 14a.
  • the semiconductor device 100 is manufactured using the adhesive sheet 1 by the method for manufacturing a semiconductor device according to this embodiment described above. Therefore, the adhesive layer 4 is sufficiently satisfactorily filled in the concave and convex portions due to the circuit pattern 74 formed on the surface 14 a of the support member 14. For this reason, the reliability of the semiconductor device 100 can be improved.
  • the adhesive sheet 1 that does not include the base materials 2 and 8 may be used. That is, the adhesive sheet may be a sheet composed of the first adhesive layer 4a and the first adhesive layer 4b, or may be a sheet composed of the first adhesive layer 4a, the first adhesive layer 4b, and the adhesive layer 10. It is good also as a sheet
  • FIG. 6 is a schematic cross-sectional view of a semiconductor device according to another embodiment.
  • a semiconductor device 200 shown in FIG. 6 includes a semiconductor element mounting support member 14, a semiconductor element Waa provided on the support member 14, and a semiconductor element Waa bonded to the semiconductor element Waa via an adhesive layer 40. And comprising.
  • the support member 14 and the semiconductor element Waa are bonded via an adhesive 41.
  • the adhesive 41 only needs to be made of a material that can bond the semiconductor element Waa to the support member 14.
  • the support member 14 includes a substrate 90 on which circuit patterns 84 and 94 are formed.
  • the circuit pattern 84 and the semiconductor element Waa are electrically connected by a wire 88 such as a gold wire, and the semiconductor element Waa and the wire 88 are sealed by the adhesive layer 40.
  • the adhesive layer 40 is sufficiently satisfactorily embedded in the concave and convex portions caused by the wires 88 and the circuit pattern 84. Further, the adhesive layer 40 can prevent the semiconductor element Wa and the wire 88 from contacting each other. Thereby, the reliability of the semiconductor device can be improved. In the semiconductor device 200, the semiconductor element Waa and the wire 88 can be collectively sealed by the adhesive layer 40.
  • a semiconductor device 400 shown in FIG. 7B is obtained by pressure-bonding a chip (second-stage semiconductor element Wb + adhesive layer 40) to an evaluation substrate 300, and is manufactured by the following procedure. .
  • the adhesive layer 40 (thickness 60 ⁇ m) of the adhesive sheet 1 is attached to a semiconductor wafer (size: 8 inches) having a thickness of 50 ⁇ m at 70 ° C.
  • they are diced to 7.5 mm square to obtain a semiconductor element (chip) Wb to which the adhesive layer 40 is bonded (see FIG. 7A).
  • the semiconductor device 400 is bonded by pressure-bonding the separated adhesive layer 40 of the semiconductor element Wb to the evaluation substrate 300 under the conditions of 120 ° C., 0.10 MPa, and 1 second. can get.
  • the first-stage semiconductor element Wbb is bonded to the support member 14 with the adhesive 41.
  • the support member 14 includes a substrate 90 on which the circuit pattern 104 is formed.
  • the adhesive 41 only needs to be made of an adhesive that can bond the semiconductor element Wbb to the support member 14.
  • a film adhesive FH-900-20 manufactured by Hitachi Chemical Co., Ltd. can be used.
  • a wire 98 is connected to the semiconductor element Wbb.
  • the wires 98 are connected to two opposite sides. For example, 32 wires are arranged at intervals of 225 ⁇ m on each side.
  • varnishes composed of an adhesive composition were prepared by the following procedure. First, after blending (B1) component, (B2) component and (D) filler, cyclohexanone is added and stirred, and then (A) component, (E) curing accelerator and (F) coupling agent are added. Then, the varnish of the adhesive composition was obtained by stirring until each component became uniform.
  • A High molecular weight component
  • A Acrylic rubber: Trade name, manufactured by Nagase ChemteX Corporation, trade name “HTR-860P-3”, weight average molecular weight 800,000, glass transition point: ⁇ 13 ° C.
  • Phenol resin having a softening point of 100 ° C. or less (curing agent) Phenol resin: manufactured by Mitsui Chemicals, Inc., trade name “Mirex XLC-LL”, softening point: 75 ° C., hydroxyl equivalent 175 Phenol resin: manufactured by Dainippon Ink & Chemicals, Inc., trade name “Phenolite LF-4871”, softening point: 130 ° C., hydroxyl group equivalent 118
  • the varnish was applied onto a base film made of a polyethylene terephthalate film having a thickness of 38 ⁇ m and subjected to heat drying at 140 ° C. for 5 minutes to prepare an adhesive sheet (thickness 40 ⁇ m).
  • melt viscosity The melt viscosities of the adhesive layers of the adhesive sheets of Examples 1 and 2 and Comparative Examples 1 to 3 are measured by a rotational viscoelasticity measuring device (ARES, manufactured by T.A. -RDA). The specific procedure is shown below. First, the base film 2 was peeled from the adhesive sheet 1, and then several adhesive layers 4 were laminated at 70 ° C. and bonded together so as to have a film thickness of 100 ⁇ m or more, and punched into a circle having a diameter of 8 mm.
  • ARES rotational viscoelasticity measuring device
  • the prepared circular film was similarly sandwiched between two 8 mm jigs, and samples were prepared and measured (measurement conditions: frequency: 1 Hz, measurement start temperature: 35 ° C., measurement end temperature: 150 ° C., temperature increase rate: 5 Measurement was performed under the measurement conditions of ° C./min, and a value of 80 ° C. was read). The results are shown in Table 2.
  • Wire embedding FH-900-25 (manufactured by Hitachi Chemical Co., Ltd.) is pasted on the back side of a 150 ⁇ m-thick semiconductor wafer whose surface is coated with Al, and 7.5 mm ⁇ using a dicer (DFD-6361 made by DISCO). Dicing to 7.5 mm. Thermocompression bonding was performed at 150 ° C./0.04 MPa / 1 second using a flexible die bonder (DB730SP manufactured by Renesas East Japan Semiconductor).
  • Stat bumps were formed with a wire bonder (UTC-230BI, manufactured by Shinkawa Co., Ltd.), and an elastomer pasting machine (trade name “ES-10”, manufactured by Renesas East Japan Semiconductor Co., Ltd.) was used.
  • t. Bumps were leveled at /3.2 kgf (50 g / bump) / 3 seconds. Bonding was performed with a wire bonder to obtain a wire embedding evaluation substrate.
  • the adhesive sheet 1 was laminated at 70 ° C. on a semiconductor wafer having a thickness of 100 ⁇ m, and diced to 7.5 mm ⁇ 7.5 mm using a dicer.
  • thermocompression bonding was performed with a flexible die bonder under the conditions of 120 ° C./0.1 MPa / 1 second to obtain an evaluation sample.
  • Carbon vapor deposition was performed on the evaluation sample using a vacuum vapor deposition machine (VE2030 manufactured by Vacuum Device Co., Ltd.).
  • a vacuum vapor deposition machine VE2030 manufactured by Vacuum Device Co., Ltd.
  • an environment-controlled scanning electron microscope (trade name “LC30”, manufactured by Philips Co., Ltd.)
  • the wire embedded portion was observed at an oblique angle of 15 °, and embedded performance was evaluated. Those with good embedding were judged as “ ⁇ ”, and those with poor embedding were judged as “x”.
  • Table 2 shows the measurement results.
  • the die shear strength (adhesive strength) of the adhesive layer was measured by the following method. First, the adhesive layer of the adhesive sheet was attached to a semiconductor wafer having a thickness of 400 ⁇ m at 70 ° C. Next, they were diced to 5 mm square to obtain a semiconductor chip with an adhesive layer. The adhesive layer side of the separated semiconductor chip with an adhesive layer is thermocompression bonded onto a lead frame (Dai Nippon Printing Co., Ltd., trade name “42 Alloy LF810TR”) at 120 ° C./0.1 MPa / 5 s.
  • a lead frame Dai Nippon Printing Co., Ltd., trade name “42 Alloy LF810TR”
  • a step cure of 110 ° C./1 hour + 170 ° C./3 hours was performed in an oven to completely cure the die bonding film, using a universal bond tester (Dage, Series 4000), 6.7 MPa.
  • the die shear strength was measured under the temperature conditions of 250 ° C./second, and this was used as the adhesive strength.
  • Electrocorrosion test substrate etched copper foil on Espanex, cut into a comb-shaped pattern (no gold plating, line 30 ⁇ m, space 70 ⁇ m)
  • the film (5 mm ⁇ 12 mm) was pasted with a crimping machine (100 ° C., pressure 2 kgf, pasting time 10 seconds), and a sample obtained by curing this at 170 ° C. for 5 hours.
  • HIRAYAMA product name + “PL-422R8”, conditions: 130 ° C./85%/100 hours
  • measured the insulation resistance ⁇
  • the value of 106 ⁇ or less within 50 hours to 100 hours is“ ⁇ ”
  • 100 hours to 1 Those maintained over 6 ⁇ was " ⁇ ".
  • the measurement results are shown in Table 2.
  • the tack strength of the adhesive layer sheets of Examples 1 and 2 and Comparative Examples 1 to 3 was measured by a probe method. Specifically, first, the adhesive layer of the adhesive sheet was attached to a parallel glass plate with a double-sided tape. Next, the base film is peeled from the adhesive sheet, placed on a hot plate at 30 ° C., the probe is pressed against the surface of the adhesive layer under the following conditions, and the strength when the probe is pulled away from the adhesive layer is measured to determine the tack strength did. Table 2 shows the measurement results. Test speed: 5 mm / min Press time: 1.0 sec Initial load (preload): 200 gf
  • an adhesive sheet capable of realizing a semiconductor device having good embedding property and pickup property and high reliability while improving production efficiency.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Adhesive Tapes (AREA)
  • Die Bonding (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Sealing Material Composition (AREA)
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US14/383,227 US9212298B2 (en) 2012-03-08 2013-03-05 Adhesive sheet and method for manufacturing semiconductor device
KR1020197005030A KR102067945B1 (ko) 2012-03-08 2013-03-05 접착시트 및 반도체 장치의 제조 방법
KR1020177025281A KR101953052B1 (ko) 2012-03-08 2013-03-05 접착시트 및 반도체 장치의 제조 방법
KR1020207000826A KR20200006197A (ko) 2012-03-08 2013-03-05 접착시트 및 반도체 장치의 제조 방법
CN201380012784.3A CN104169383B (zh) 2012-03-08 2013-03-05 粘接片材及半导体装置的制造方法
KR1020167032236A KR20160139043A (ko) 2012-03-08 2013-03-05 접착시트 및 반도체 장치의 제조 방법

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KR20250159195A (ko) 2023-03-15 2025-11-10 가부시끼가이샤 레조낙 필름상 접착제, 다이싱·다이본딩 일체형 필름, 및 반도체 장치 및 그 제조 방법

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